CompactEmbranceRunRecipeRoutine.cs 5.8 KB

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  1. using Aitex.Core.RT.Device;
  2. using Aitex.Core.RT.Log;
  3. using Aitex.Core.RT.Routine;
  4. using CyberX8_Core;
  5. using CyberX8_RT.Devices.Metal;
  6. using CyberX8_RT.Devices.PowerSupplier;
  7. using MECF.Framework.Common.CommonData.Metal;
  8. using MECF.Framework.Common.CommonData;
  9. using MECF.Framework.Common.CommonData.PowerSupplier;
  10. using MECF.Framework.Common.Device.PowerSupplier;
  11. using MECF.Framework.Common.RecipeCenter;
  12. using MECF.Framework.Common.Routine;
  13. using MECF.Framework.Common.Utilities;
  14. using System;
  15. using System.Collections.Generic;
  16. using System.Linq;
  17. using System.Text;
  18. using System.Threading.Tasks;
  19. namespace CyberX8_RT.Modules.Metal
  20. {
  21. public class CompactEmbranceRunRecipeRoutine : RoutineBase, IRoutine
  22. {
  23. private enum RecipeStep
  24. {
  25. WaferHolderClampOn,
  26. RunRecipe,
  27. RunRecipeWait,
  28. WaferHolderUnclampOn,
  29. End
  30. }
  31. #region 内部变量
  32. /// <summary>
  33. /// recipe
  34. /// </summary>
  35. private DepRecipe _recipe;
  36. /// <summary>
  37. /// 单面
  38. /// </summary>
  39. private string _side;
  40. /// <summary>
  41. /// Metal设备
  42. /// </summary>
  43. private CompactMembranMetalDevice _device;
  44. /// <summary>
  45. /// RunRecipe routine
  46. /// </summary>
  47. private ReservoirRunRecipeRoutine _runRecipeRoutine;
  48. #endregion
  49. #region 属性
  50. /// <summary>
  51. /// A面电量
  52. /// </summary>
  53. public double AnodeAUsage { get { return _runRecipeRoutine.AnodeAUsage; } }
  54. /// <summary>
  55. /// B面电量
  56. /// </summary>
  57. public double AnodeBUsage { get { return _runRecipeRoutine.AnodeBUsage; } }
  58. /// <summary>
  59. /// LotTrack数据
  60. /// </summary>
  61. public List<MetalLotTrackData> MetalLotTrackDatas { get { return _runRecipeRoutine.MetalLotTrackDatas; } }
  62. /// <summary>
  63. /// LotTrack文件头数据
  64. /// </summary>
  65. public LotTrackFileHeaderCommonData MetalLotTrackHeaderDatas { get { return _runRecipeRoutine.MetalLotTrackHeaderDatas; } }
  66. #endregion
  67. /// <summary>
  68. /// 构造函数
  69. /// </summary>
  70. /// <param name="module"></param>
  71. public CompactEmbranceRunRecipeRoutine(string module) : base(module)
  72. {
  73. _runRecipeRoutine=new ReservoirRunRecipeRoutine(module);
  74. }
  75. /// <summary>
  76. /// 中止
  77. /// </summary>
  78. public void Abort()
  79. {
  80. _runRecipeRoutine.Abort();
  81. Runner.Stop("Manual Abort");
  82. }
  83. /// <summary>
  84. /// 监控
  85. /// </summary>
  86. /// <returns></returns>
  87. public RState Monitor()
  88. {
  89. Runner.Run(RecipeStep.WaferHolderClampOn, () => _device.WaferHolderClampOn("", null), () => _device.MetalDeviceData.WHClamp&&!_device.MetalDeviceData.WHUnclamp,_delay_1s)
  90. .Run(RecipeStep.RunRecipe,()=>_runRecipeRoutine.Start(new object[] {_recipe,_side })==RState.Running,_delay_1ms)
  91. .WaitWithStopCondition(RecipeStep.RunRecipeWait,()=>CommonFunction.CheckRoutineEndState(_runRecipeRoutine),CheckRunRecipeStopStatus)
  92. .Run(RecipeStep.WaferHolderUnclampOn, () => _device.WaferHolderUnclampOn("", null), () => _device.MetalDeviceData.WHUnclamp && !_device.MetalDeviceData.WHClamp, _delay_1s)
  93. .End(RecipeStep.End, NullFun, _delay_1ms);
  94. return Runner.Status;
  95. }
  96. /// <summary>
  97. /// RunRecipe停止状态
  98. /// </summary>
  99. /// <returns></returns>
  100. public bool CheckRunRecipeStopStatus()
  101. {
  102. bool result = CommonFunction.CheckRoutineStopState(_runRecipeRoutine);
  103. if (result)
  104. {
  105. AddLotTrackData();
  106. if (_device.SideAPowerSupplier != null)
  107. {
  108. _device.SideAPowerSupplier.DisableOperation("", null);
  109. }
  110. if (_device.SideBPowerSupplier != null)
  111. {
  112. _device.SideBPowerSupplier.DisableOperation("", null);
  113. }
  114. }
  115. return result;
  116. }
  117. /// <summary>
  118. /// 启动
  119. /// </summary>
  120. /// <param name="objs"></param>
  121. /// <returns></returns>
  122. public RState Start(params object[] objs)
  123. {
  124. _recipe=objs[0] as DepRecipe;
  125. if (_recipe == null)
  126. {
  127. LOG.WriteLog(eEvent.ERR_METAL, Module, "recipe is null");
  128. return RState.Failed;
  129. }
  130. if (objs.Length>1)
  131. {
  132. _side = objs[1].ToString();
  133. }
  134. _device = DEVICE.GetDevice<CompactMembranMetalDevice>(Module);
  135. if(!CheckPreCondition())
  136. {
  137. return RState.Failed;
  138. }
  139. return Runner.Start(Module, "Start run recipe");
  140. }
  141. /// <summary>
  142. /// 检验前置条件
  143. /// </summary>
  144. /// <returns></returns>
  145. private bool CheckPreCondition()
  146. {
  147. if(_recipe==null)
  148. {
  149. LOG.WriteLog(eEvent.ERR_METAL, Module, "Recipe is null");
  150. return false;
  151. }
  152. if(_recipe.CurrentRampProfileSteps.Count==0)
  153. {
  154. LOG.WriteLog(eEvent.ERR_METAL, Module, "Recipe RampProfileSteps count is 0");
  155. return false;
  156. }
  157. return true;
  158. }
  159. /// <summary>
  160. /// 获取Lot Track数据
  161. /// </summary>
  162. /// <returns></returns>
  163. public void AddLotTrackData()
  164. {
  165. _runRecipeRoutine.AddLotTrackData();
  166. }
  167. }
  168. }