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- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.Routine;
- using CyberX8_Core;
- using CyberX8_RT.Devices.Metal;
- using CyberX8_RT.Devices.PowerSupplier;
- using MECF.Framework.Common.CommonData.Metal;
- using MECF.Framework.Common.CommonData;
- using MECF.Framework.Common.CommonData.PowerSupplier;
- using MECF.Framework.Common.Device.PowerSupplier;
- using MECF.Framework.Common.RecipeCenter;
- using MECF.Framework.Common.Routine;
- using MECF.Framework.Common.Utilities;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- namespace CyberX8_RT.Modules.Metal
- {
- public class CompactEmbranceRunRecipeRoutine : RoutineBase, IRoutine
- {
- private enum RecipeStep
- {
- WaferHolderClampOn,
- RunRecipe,
- RunRecipeWait,
- WaferHolderUnclampOn,
- End
- }
- #region 内部变量
- /// <summary>
- /// recipe
- /// </summary>
- private DepRecipe _recipe;
- /// <summary>
- /// 单面
- /// </summary>
- private string _side;
- /// <summary>
- /// Metal设备
- /// </summary>
- private CompactMembranMetalDevice _device;
- /// <summary>
- /// RunRecipe routine
- /// </summary>
- private ReservoirRunRecipeRoutine _runRecipeRoutine;
- #endregion
- #region 属性
- /// <summary>
- /// A面电量
- /// </summary>
- public double AnodeAUsage { get { return _runRecipeRoutine.AnodeAUsage; } }
- /// <summary>
- /// B面电量
- /// </summary>
- public double AnodeBUsage { get { return _runRecipeRoutine.AnodeBUsage; } }
- /// <summary>
- /// LotTrack数据
- /// </summary>
- public List<MetalLotTrackData> MetalLotTrackDatas { get { return _runRecipeRoutine.MetalLotTrackDatas; } }
- /// <summary>
- /// LotTrack文件头数据
- /// </summary>
- public LotTrackFileHeaderCommonData MetalLotTrackHeaderDatas { get { return _runRecipeRoutine.MetalLotTrackHeaderDatas; } }
- #endregion
- /// <summary>
- /// 构造函数
- /// </summary>
- /// <param name="module"></param>
- public CompactEmbranceRunRecipeRoutine(string module) : base(module)
- {
- _runRecipeRoutine=new ReservoirRunRecipeRoutine(module);
- }
- /// <summary>
- /// 中止
- /// </summary>
- public void Abort()
- {
- _runRecipeRoutine.Abort();
- Runner.Stop("Manual Abort");
- }
- /// <summary>
- /// 监控
- /// </summary>
- /// <returns></returns>
- public RState Monitor()
- {
- Runner.Run(RecipeStep.WaferHolderClampOn, () => _device.WaferHolderClampOn("", null), () => _device.MetalDeviceData.WHClamp&&!_device.MetalDeviceData.WHUnclamp,_delay_1s)
- .Run(RecipeStep.RunRecipe,()=>_runRecipeRoutine.Start(new object[] {_recipe,_side })==RState.Running,_delay_1ms)
- .WaitWithStopCondition(RecipeStep.RunRecipeWait,()=>CommonFunction.CheckRoutineEndState(_runRecipeRoutine),CheckRunRecipeStopStatus)
- .Run(RecipeStep.WaferHolderUnclampOn, () => _device.WaferHolderUnclampOn("", null), () => _device.MetalDeviceData.WHUnclamp && !_device.MetalDeviceData.WHClamp, _delay_1s)
- .End(RecipeStep.End, NullFun, _delay_1ms);
- return Runner.Status;
- }
- /// <summary>
- /// RunRecipe停止状态
- /// </summary>
- /// <returns></returns>
- public bool CheckRunRecipeStopStatus()
- {
- bool result = CommonFunction.CheckRoutineStopState(_runRecipeRoutine);
- if (result)
- {
- AddLotTrackData();
- if (_device.SideAPowerSupplier != null)
- {
- _device.SideAPowerSupplier.DisableOperation("", null);
- }
- if (_device.SideBPowerSupplier != null)
- {
- _device.SideBPowerSupplier.DisableOperation("", null);
- }
- }
- return result;
- }
- /// <summary>
- /// 启动
- /// </summary>
- /// <param name="objs"></param>
- /// <returns></returns>
- public RState Start(params object[] objs)
- {
- _recipe=objs[0] as DepRecipe;
- if (_recipe == null)
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module, "recipe is null");
- return RState.Failed;
- }
- if (objs.Length>1)
- {
- _side = objs[1].ToString();
- }
- _device = DEVICE.GetDevice<CompactMembranMetalDevice>(Module);
- if(!CheckPreCondition())
- {
- return RState.Failed;
- }
- return Runner.Start(Module, "Start run recipe");
- }
- /// <summary>
- /// 检验前置条件
- /// </summary>
- /// <returns></returns>
- private bool CheckPreCondition()
- {
- if(_recipe==null)
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module, "Recipe is null");
- return false;
- }
- if(_recipe.CurrentRampProfileSteps.Count==0)
- {
- LOG.WriteLog(eEvent.ERR_METAL, Module, "Recipe RampProfileSteps count is 0");
- return false;
- }
- return true;
- }
- /// <summary>
- /// 获取Lot Track数据
- /// </summary>
- /// <returns></returns>
- public void AddLotTrackData()
- {
- _runRecipeRoutine.AddLotTrackData();
- }
- }
- }
|