123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569570571572573574575576577578579580581582583584585586587588589590591592593594595596597598599600601602603604605606607608609610611612613614615616617618619620621622623624625626627628629630631632633634635636637638639640641642643644645646647648649650651652653654655656657658659660661662663664665666667668669670671672673674675676677678679680681682683684685686687688689690691692693694695696697698699700701702703704705706707708709710711712713714715716717718719720721722723724725726727728729730731732733734735736737738739740741742743744745746747748749750751752753754755756757758759760761762763764765766767768769770771772773774775776777778779780781782783784785786787788789790791792793794795796797798799800801802803804805806807808809810811812813814815816817818819820821822823824825826827828829830831832833834835836837838839840841842843844845846847848849850851852853854855856857858859860861862863864865866867868869870871872873874875876877878879880881882883884885886887888889890891892893894895896897898899900901902903904905906907908909910911912913914915916917918919920921922923924925926927928929930931932933934935936937938939940941942943944945946947948949950951952953954955956957958959960961962963964965966967968969970971972973974975976977978979980981982983984985986987988989990991992993994995996997998999100010011002100310041005100610071008100910101011101210131014101510161017101810191020102110221023102410251026102710281029103010311032103310341035103610371038103910401041104210431044104510461047104810491050105110521053105410551056105710581059106010611062106310641065106610671068106910701071107210731074107510761077107810791080108110821083108410851086108710881089109010911092109310941095109610971098109911001101110211031104110511061107110811091110111111121113111411151116111711181119112011211122112311241125112611271128112911301131113211331134113511361137113811391140114111421143114411451146114711481149115011511152115311541155115611571158115911601161116211631164116511661167116811691170117111721173117411751176117711781179118011811182118311841185118611871188118911901191119211931194119511961197119811991200120112021203120412051206120712081209121012111212121312141215121612171218121912201221122212231224122512261227122812291230123112321233123412351236123712381239124012411242124312441245124612471248124912501251125212531254125512561257125812591260126112621263126412651266126712681269127012711272127312741275127612771278127912801281128212831284128512861287128812891290129112921293129412951296129712981299 |
- using System;
- using System.Diagnostics;
- using System.Collections.Generic;
- using Aitex.Core.Common;
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.Fsm;
- using Aitex.Core.RT.OperationCenter;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Utilities;
- using Aitex.Core.Util;
- using Aitex.Core.RT.Log;
- using Aitex.Sorter.Common;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.Schedulers;
- using MECF.Framework.Common.SubstrateTrackings;
- using CyberX8_Core;
- using CyberX8_RT;
- using CyberX8_RT.Devices;
- using CyberX8_RT.Devices.YASKAWA;
- using CyberX8_RT.Devices.EFEM;
- using CyberX8_RT.Modules.LPs;
- using CyberX8_RT.Modules.EFEM;
- using System.Reflection;
- using CyberX8_RT.Modules.Transporter;
- using MECF.Framework.Common.Alarm;
- using MECF.Framework.Common.CommonData;
- using CyberX8_RT.Modules.Loader;
- namespace CyberX8_RT.Modules
- {
- class EfemEntity : Entity, IEntity, IModuleEntity
- {
- //private int _bigWafer = 0;
- //private int _midWafer = 0;
- //private int _smallWafer = 0;
- private bool _isVacuume = false;
- public enum STATE
- {
- Unknown, // 0
- Initializing, // 1
- Idle, // 2
- Error, // 3
- Picking, // 4
- Placing, // 5
- Aligning, // 6
- Mapping, // 7
- Init, // 8
- Orgshing, // 9
- Lifting, // 10
- InitingAL, // 11
- InitingRB, // 12
- Extending, // 13
- Retracting, // 14
- //SettingLamp, // 15
- Swapping,
- Gotoing,
- Gripping,
- Ungripping,
- Fliping,
- Vacuuming,
- Retrying,
- ConfirmCompleting,
- ErrorPicking,
- ErrorPlacing
- }
- public enum MSG
- {
- HomeAll, // 0
- Pick, // 1
- Place, // 2
- Align, // 3
- ActionDone, // 4
- MoveCmd, // 6
- Recover, // 8
- Goto, // 9
- Error, // 10
- Online, // 11
- CommReady, // 12
- Lift, // 13
- HomeAL, // 14
- HomeRB, // 15
- Extend, // 16
- Retract, // 17
- PMLiftPinUp, // 18
- PMLiftPinDown, // 19
- TurnOffBuzzer,
- Abort,
- GotoMap,
- Map,
- ToInit,
- Cool,
- Swap,
- Grip,
- Ungrip,
- Flip,
- LiftActionDone,
- Offline,
- SetRobotSpeed,
- MapDummy,
- Vacuum,
- CloseBuzzer,
- RobotPowerOn,
- Retry,
- ConfirmComplete,
- BackroundCmd=999,
- Load,
- Unload,
- Dock,
- Undock,
- Clamp,
- Unclamp,
- ReadCarrierId,
- WriteCarrierID,
- ReadTagData,
- WriteTagData
- }
- public enum EfemType
- {
- FutureEfem = 1,
- SunWayEFEM =2
- }
- public bool IsIdle
- {
- get { return fsm.State == (int)STATE.Idle; }
- }
- public bool IsError
- {
- get { return fsm.State == (int)STATE.Error; }
- }
- public bool IsInit
- {
- get { return fsm.State == (int)STATE.Unknown || fsm.State == (int)STATE.Init; }
- }
- public bool IsBusy
- {
- get { return !IsInit && !IsError && !IsIdle; }
- }
- public bool IsAuto { get; } = true;
- /// <summary>
- /// 是否为工程模式
- /// </summary>
- public bool IsEngineering { get; } = false;
- /// <summary>
- /// 是否为产品模式
- /// </summary>
- public bool IsProduction { get; } = true;
- /// <summary>
- /// 模块名称
- /// </summary>
- public ModuleName Module { get; private set; }
- public bool IsHomed
- {
- get { return _isHomed; }
- }
- public bool IsOnline { get; internal set; }
- public bool IsDisable { get; internal set; }
- public RState RobotStatus
- {
- get
- {
- if (_efem.Status != RState.Running)
- {
- if (_robotWatch.ElapsedMilliseconds < 200)
- return RState.Running;
- else
- return _efem.Status;
- }
- else
- return RState.Running;
- }
- }
- public bool Check(int msg, out string reason, params object[] args)
- {
- throw new NotImplementedException();
- }
- // Fields
- private readonly string Name;
- private readonly EfemBase _efem;
- private readonly LoadPortModule[] _lpms = new LoadPortModule[3];
- private readonly DummyDevice[] _dummies = new DummyDevice[2];
- private readonly EfemType _efemType;
- public EfemBase EfemDevice => _efem;
- public EfemType EFEMType => _efemType;
- // routine
- private readonly EfemPickRoutine _pickRoutine;
- private readonly EfemPlaceRoutine _placeRoutine;
- private readonly EfemSwapRoutine _swapRoutine;
- private readonly EfemHomeRoutine _homeRoutine;
- private readonly EFEMAlignRoutine _alignRoutine;
- private readonly EfemMapDummyRoutine _mapDummyRoutine;
- private readonly EfemRobotMapRoutine _robotMapRoutine;
- private readonly EfemVacuumRoutine _vacuumRoutine;
- private string LiftMessage;
- private Stopwatch _robotWatch = new Stopwatch();
- private R_TRIG _robotIdleTrigger = new R_TRIG();
- private bool _isHomed = false;
- private EfemAutoMessageProcessor _autoMessageProcessor;
- private STATE _errorPreState;
- // Constructor
- public EfemEntity()
- {
- Module = ModuleName.EFEM;
- Name = ModuleName.EFEM.ToString();
- InitFsmMap();
- _efemType = (EfemType)SC.GetValue<int>($"EFEM.EfemType");
- _efem = new SunWayRobot();
- _homeRoutine = new EfemHomeRoutine(_efem);
- _pickRoutine = new EfemPickRoutine(_efem);
- _placeRoutine = new EfemPlaceRoutine(_efem);
- _swapRoutine = new EfemSwapRoutine(_efem);
- _alignRoutine = new EFEMAlignRoutine(_efem);
- _mapDummyRoutine = new EfemMapDummyRoutine(_efem);
- _vacuumRoutine = new EfemVacuumRoutine(_efem);
- _autoMessageProcessor =new EfemAutoMessageProcessor(_efem);
- }
- public LoadPortModule GetLoadportModule(int lpNumber)
- {
- if (lpNumber < 0|| _lpms.Length<=lpNumber)
- {
- return null;
- }
- return _lpms[lpNumber];
- }
- public DummyDevice GetDummyDevice(int dummyNumber)
- {
- if (dummyNumber < 0||_dummies.Length<=dummyNumber)
- {
- return null;
- }
- return _dummies[dummyNumber];
- }
-
- protected override bool Init()
- {
- _lpms[0] = new LoadPortModule(ModuleName.LP1, _efem);
- _lpms[1] = new LoadPortModule(ModuleName.LP2, _efem);
- _lpms[2] = new LoadPortModule(ModuleName.LP3, _efem);
- _dummies[0] = new DummyDevice(ModuleName.Dummy1);
- _dummies[1] = new DummyDevice(ModuleName.Dummy2);
- _lpms[0].Initialize();
- _lpms[1].Initialize();
- _lpms[2].Initialize();
- OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAll); return true; });
- OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.ClearError}", (cmd, args) => { PostMsg(MSG.Recover); return true; });
- OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.TurnOffBuzzer}", (cmd, args) => { PostMsg(MSG.CloseBuzzer); return true; });
- OP.Subscribe($"{ModuleName.EFEM}.Online", (cmd, args) =>
- {
- PostMsg(MSG.Online, args[0]); return true;
- });
- OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Pick}", (cmd, args) => { CheckToPostMessage<STATE, MSG>(eEvent.ERR_EFEM_COMMON_FAILED,"EFEM",(int)MSG.Pick, args[0]); return true; });
- OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Place}", (cmd, args) => { CheckToPostMessage<STATE, MSG>(eEvent.ERR_EFEM_COMMON_FAILED, "EFEM", (int)MSG.Place, args[0]); return true; });
- OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Swap}", (cmd, args) => { PostMsg(MSG.Swap, args[0]); return true; });
- OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.DummyMap}", (cmd, args) => { CheckToPostMessage<STATE, MSG>(eEvent.ERR_EFEM_COMMON_FAILED, "EFEM", (int)MSG.MapDummy); return true; });
-
- OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Speed}", (cmd, args) => {
- return _efem.SetRobotSpeed(ModuleName.EfemRobot, (int)args[0]); });
- OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Vacuum}", (cmd, args) => {
- return _efem.Vacuum(ModuleName.EfemRobot, (bool)args[1]); });
- OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.PowerOn}", (cmd, args) => {
- return _efem.RobotPowerOn(ModuleName.EfemRobot, (bool)args[0]); });
-
- OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Abort}", (cmd, args) => { PostMsg(MSG.Abort); return true; });
- OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeRB); return true; });
- OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Grip}", (cmd, args) =>
- {
- bool isGrip = ((string)args[0]).ToLower() == "on";
- PostMsg(isGrip ? MSG.Grip : MSG.Ungrip, args[1]);
-
- return true;
- });
- //OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Flip}", (cmd, args) => { PostMsg(MSG.Flip, args[0]); return true; });
- OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Aligner1); return true; });
- OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Align}", (cmd, args) => { CheckToPostMessage<STATE,MSG>(eEvent.ERR_EFEM_COMMON_FAILED,ModuleName.EFEM.ToString(),(int)MSG.Align, ModuleName.Aligner1, args[0], args[1]); return true; });
- //OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Vacuum}", (cmd, args) => { CheckToPostMessage<STATE,MSG>(eEvent.ERR_EFEM_COMMON_FAILED,ModuleName.EFEM.ToString(),(int)MSG.Vacuum, args); return true; });
- OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Vacuum}", (cmd, args) => { return VacuumAction(args); });
-
-
- DATA.Subscribe($"{Name}.FsmState", () => ((STATE)fsm.State).ToString(),SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Name}.FsmPrevState", () => ((STATE)fsm.PrevState).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Name}.FsmLastMessage", GetFsmLastMessage, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Name}.RobotMoveAction", () => (_efem.TMRobotMoveInfo), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Name}.State", () => ((STATE)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Name}.IsAlarm", () => IsError, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Name}.IsInit", () => IsInit, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Name}.IsIdle", () => IsIdle, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Name}.IsBusy", () => IsBusy, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Name}.IsOnline", () => IsOnline, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Name}.IsHomed", () => _isHomed, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Name}.RobotSpeed",()=>IsIdle?SC.GetValue<int>("EFEM.DefaultMoveSpeedInPercent"):0);
- _robotWatch.Restart();
- return true;
- }
- private void InitFsmMap()
- {
- fsm = new StateMachine<EfemEntity>("EFEM", (int)STATE.Unknown, 50);
- fsm.EnableRepeatedMsg(true);
- AnyStateTransition(FSM_MSG.TIMER, fnMonitor, FSM_STATE.SAME);
- AnyStateTransition(MSG.TurnOffBuzzer, fnTurnOffBuzzer, FSM_STATE.SAME);
- AnyStateTransition(MSG.Error, fnError, STATE.Error);
- AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME);
- AnyStateTransition(MSG.Abort, fnAbortRobot, FSM_STATE.SAME);
- AnyStateTransition(MSG.ToInit, fnToInit, STATE.Init);
- AnyStateTransition(MSG.BackroundCmd, fnBackroundCommand, FSM_STATE.SAME);
- AnyStateTransition(MSG.CloseBuzzer, fnCloseBuzzer, FSM_STATE.SAME);
-
- Transition(STATE.Unknown,MSG.CommReady, fnCommReady, STATE.Init);
- //Error
- Transition(STATE.Error, MSG.Recover, fnRecover, STATE.Idle);
- // Home
- Transition(STATE.Init, MSG.HomeAll, fnHomeAll, STATE.Initializing);
- Transition(STATE.Idle, MSG.HomeAll, fnHomeAll, STATE.Initializing);
- Transition(STATE.Error, MSG.HomeAll, fnHomeAll, STATE.Initializing);
- Transition(STATE.Initializing, FSM_MSG.TIMER, fnHomingTimeout, STATE.Idle);
- // Home Robot
- Transition(STATE.Error, MSG.HomeRB, fnHomeRobot, STATE.InitingRB);
- Transition(STATE.Idle, MSG.HomeRB, fnHomeRobot, STATE.InitingRB);
- Transition(STATE.InitingRB, FSM_MSG.TIMER, fnHomingRobotTimeout, STATE.Idle);
- // Home Aligner
- Transition(STATE.Idle, MSG.HomeAL, fnHomeAligner, STATE.InitingAL);
- Transition(STATE.InitingAL, FSM_MSG.TIMER, fnHomingAlignTimeout, STATE.Idle);
- // Pick wafer
- Transition(STATE.Idle, MSG.Pick, FnStartPick, STATE.Picking);
- Transition(STATE.Picking, FSM_MSG.TIMER, FnPickTimeout, STATE.Idle);
- Transition(STATE.Picking, MSG.Abort, FnAbortPick, STATE.Idle);
- Transition(STATE.Error, MSG.Pick, FnErrorStartPick, STATE.ErrorPicking);
- Transition(STATE.ErrorPicking, FSM_MSG.TIMER, FnErrorPickTimeout, STATE.Error);
- Transition(STATE.ErrorPicking, MSG.Abort, FnErrorAbortPick, STATE.Error);
- // Place wafer
- Transition(STATE.Idle, MSG.Place, FnStartPlace, STATE.Placing);
- Transition(STATE.Placing, FSM_MSG.TIMER, FnPlaceTimeout, STATE.Idle);
- Transition(STATE.Placing, MSG.Abort, FnAbortPlace, STATE.Idle);
- Transition(STATE.Error, MSG.Place, FnErrorStartPlace, STATE.ErrorPlacing);
- Transition(STATE.ErrorPlacing, FSM_MSG.TIMER, FnErrorPlaceTimeout, STATE.Error);
- Transition(STATE.ErrorPlacing, MSG.Abort, FnErrorAbortPlace, STATE.Error);
- // Swap wafer with LL sequence
- Transition(STATE.Idle, MSG.Swap, FnStartSwap, STATE.Swapping);
- Transition(STATE.Swapping, FSM_MSG.TIMER, FnSwapTimeout, STATE.Idle);
- Transition(STATE.Swapping, MSG.Abort, FnAbortSwap, STATE.Idle);
- // Goto
- Transition(STATE.Idle, MSG.Goto, fnGoto, STATE.Gotoing);
- Transition(STATE.Gotoing, MSG.ActionDone, fnActionDone, STATE.Idle);
- // Map
- Transition(STATE.Idle, MSG.Map, fnMap, STATE.Mapping);
- Transition(STATE.Mapping, MSG.ActionDone, fnActionDone, STATE.Idle);
- // Grip
- Transition(STATE.Idle, MSG.Grip, fnGrip, STATE.Gripping);
- Transition(STATE.Gripping, MSG.ActionDone, fnActionDone, STATE.Idle);
- // Ungrip
- Transition(STATE.Idle, MSG.Ungrip, fnUngrip, STATE.Ungripping);
- Transition(STATE.Ungripping, MSG.ActionDone, fnActionDone, STATE.Idle);
- // Aligner
- Transition(STATE.Idle, MSG.Lift, fnLift, STATE.Lifting);
- //Transition(STATE.Lifting, MSG.LiftActionDone, fnActionDone, STATE.Idle);
- Transition(STATE.Lifting, FSM_MSG.TIMER, fnLiftTimeout, STATE.Idle);
- Transition(STATE.Idle, MSG.Align, fnAlign, STATE.Aligning);
- Transition(STATE.Aligning, FSM_MSG.TIMER, fnAlignTimeout, STATE.Idle);
- Transition(STATE.Aligning, MSG.ActionDone, fnActionDone, STATE.Idle);
- //MapDummy
- Transition(STATE.Idle, MSG.MapDummy, MapDummy, STATE.Mapping);
- Transition(STATE.Mapping, FSM_MSG.TIMER, MapDummyTimeout, STATE.Idle);
- //Vacuum
- //Transition(STATE.Init, MSG.Vacuum, VacuumAction, STATE.Vacuuming);
- //Transition(STATE.Idle, MSG.Vacuum, VacuumAction, STATE.Vacuuming);
- //Transition(STATE.Error, MSG.Vacuum, VacuumAction, STATE.Vacuuming);
- //Transition(STATE.Vacuuming, FSM_MSG.TIMER, VacuumActionTimeout, STATE.Idle);
- //Retry
- Transition(STATE.Error, MSG.Retry, NullFunc, STATE.Retrying);
- Transition(STATE.Retrying, FSM_MSG.TIMER, EfemRetry, STATE.Retrying);
- Transition(STATE.Retrying, MSG.Align, RetryAlign, STATE.Aligning);
- Transition(STATE.Retrying, MSG.Pick, RetryPick, STATE.Picking);
- Transition(STATE.Retrying, MSG.Place, RetryPlace, STATE.Placing);
- //ConfirmComplete
- Transition(STATE.Init, MSG.ConfirmComplete, ClearModuleAlarm, STATE.Init);
- Transition(STATE.Idle, MSG.ConfirmComplete, ClearModuleAlarm, STATE.Idle);
- Transition(STATE.Error, MSG.ConfirmComplete, NullFunc, STATE.ConfirmCompleting);
- Transition(STATE.ConfirmCompleting, FSM_MSG.TIMER, ConfirmComplete, STATE.ConfirmCompleting);
- Transition(STATE.ConfirmCompleting, MSG.Align, ConfirmAlign, STATE.Idle);
- Transition(STATE.ConfirmCompleting, MSG.Pick, ConfirmPickup, STATE.Idle);
- Transition(STATE.ConfirmCompleting, MSG.Place, ConfirmPlace, STATE.Idle);
- EnumLoop<STATE>.ForEach((item) => { fsm.MapState((int)item, item.ToString()); });
- EnumLoop<MSG>.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); });
- Running = true;
- }
- private bool fnCommReady(object[] param)
- {
- return true;
- }
-
- private bool fnCloseBuzzer(object[] param)
- {
- return _efem.CloseBuzzer();
- }
-
- private bool fnHomeAll(object[] param)
- {
- _isHomed = false;
- return _homeRoutine.Start(ModuleName.EFEM) == RState.Running;
- }
- private bool fnHomingTimeout(object[] param)
- {
- RState ret = _homeRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- bool result= ret == RState.End;
- if(result)
- {
- _isHomed= true;
- RecoverLPStatus();
-
- }
- return result;
- }
- private void RecoverLPStatus()
- {
- _lpms[0].PostMsg(LoadPortModule.MSG.EnterIdle);
- _lpms[1].PostMsg(LoadPortModule.MSG.EnterIdle);
- _lpms[2].PostMsg(LoadPortModule.MSG.EnterIdle);
- }
- private bool fnHomeRobot(object[] param)
- {
- if (_isHomed)
- {
- return _homeRoutine.Start(ModuleName.EfemRobot) == RState.Running;
- }
- else
- {
- return false;
- }
- }
- private bool fnHomingRobotTimeout(object[] param)
- {
- RState ret = _homeRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- bool result = ret == RState.End;
- if (result)
- {
- AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), STATE.Idle.ToString());
- }
- return result;
- }
- private bool fnHomeAligner(object[] param)
- {
- // module
- ModuleName unit = ModuleName.EFEM;
- if (param[0] is string s1)
- unit = ModuleNameString.ToEnum(s1);
- else if (param[0] is ModuleName mod)
- unit = mod;
- else
- throw new ArgumentException("Argument error");
- return _homeRoutine.Start(unit) == RState.Running;
- }
- private bool fnHomingAlignTimeout(object[] param)
- {
- RState ret = _homeRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- bool result = ret == RState.End;
- if (result)
- {
- AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), STATE.Idle.ToString());
- }
- return result;
- }
-
- private bool fnActionDone(object[] param)
- {
- return false;
- }
- public bool CheckToPostMessage(int msg, params object[] args)
- {
- if (!fsm.FindTransition(fsm.State, msg))
- {
- LOG.Write(eEvent.WARN_EFEM_COMMON_WARN, ModuleName.EFEM, $"{Name} is in {(STATE)fsm.State} state,can not do {(MSG)msg}");
- return false;
- }
- Running = true;
- fsm.PostMsg(msg, args);
- return true;
- }
- private bool fnMonitor(object[] param)
- {
- if (_isVacuume)
- {
- VacuumActionTimeout();
- _isVacuume = false;
- }
- // robot idle check
- _robotIdleTrigger.CLK = _efem.Status != RState.Running;
- if (_robotIdleTrigger.Q)
- {
- _robotWatch.Restart();
- LOG.WriteLog(eEvent.EV_EFEM_ROBOT, Module.ToString(), $"robot status changed to {_efem.Status}");
- }
- _autoMessageProcessor.Monitor();
- return true;
- }
-
- private bool fnOnline(object[] param)
- {
- bool bOnlineFlag = (bool)param[0];
- if (_efem is EfemBase efem)
- {
- efem.SetOnline(bOnlineFlag);
- }
- IsOnline = bOnlineFlag;
- return true;
- }
- private string GetFsmLastMessage()
- {
- int msg = fsm.LastMsg;
- if (msg >= (int)MSG.HomeAll && msg <= (int)MSG.Error)
- return ((MSG)msg).ToString();
- if (msg == (int)FSM_MSG.TIMER)
- return "Timer";
- return msg.ToString();
- }
- private bool fnError(object[] param)
- {
- _errorPreState = (STATE)fsm.State;
- string error = (param != null && param.Length != 0) ? param[0].ToString() : "";
- if (Singleton<RouteManager>.Instance.IsAutoRunning)
- {
- int msg = 0;
- if (_errorPreState == STATE.Picking)
- {
- msg = (int)MSG.Pick;
- }
- else if (_errorPreState == STATE.Aligning)
- {
- msg= (int)MSG.Align;
- }
- else if (_errorPreState == STATE.Placing)
- {
- msg = (int)MSG.Place;
- }
- else
- {
- error = $"{error}\r\n Plase Home Robot back to idle state";
- }
- AlarmList alarmList = new AlarmList(Module.ToString(), ((STATE)fsm.State).ToString(), msg,
- error, 0, (int)AlarmType.Error);
- AlarmListManager.Instance.AddAlarm(alarmList);
- }
- return true;
- }
- private bool fnToInit(object[] param)
- {
- return true;
- }
- private bool fnRecover(object[] param)
- {
- bool result=_efem.ClearError();
- if (result)
- {
- PostMsg(MSG.ToInit);
- }
- return result;
- }
- private bool fnAbortRobot(object[] param)
- {
- //_efem.ExecuteAction();
- return true;
- }
- private bool fnBackroundCommand(object[] param)
- {
- _autoMessageProcessor.SendAutoCommandMessage(param);
- return true;
- }
- private bool fnRobotPowerOn(object[] param)
- {
- return _efem.RobotPowerOn(ModuleName.EfemRobot, (bool)param[0]);
- }
- private bool fnSetLED(object[] param)
- {
- LightType light = (LightType)param[0];
- LightStatus st = (LightStatus)param[1];
- return _efem.SetLamp(light, st);
- }
- private bool fnTurnOffBuzzer(object[] param)
- {
- return false;
- }
- private bool FnStartPick(object[] param)
- {
- return _pickRoutine.Start(param) == RState.Running;
- }
- private bool FnErrorStartPick(object[] param)
- {
- if (!_isHomed)
- {
- LOG.WriteLog(eEvent.ERR_EFEM_ROBOT, Module.ToString(), "EFEM is not homed");
- return false;
- }
- _efem.Reset();
- return _pickRoutine.Start(param) == RState.Running;
- }
- /// <summary>
- /// Retry Pick
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool RetryPick(object[] param)
- {
- int stepIndex = (int)param[0];
- return _pickRoutine.Retry(stepIndex) == RState.Running;
- }
- private bool FnPickTimeout(object[] param)
- {
- RState ret = _pickRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error,_pickRoutine.ErrorMsg);
- return false;
- }
- if (ret == RState.End)
- {
- AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), STATE.Picking.ToString());
- }
- return ret == RState.End;
- }
- private bool FnErrorPickTimeout(object[] param)
- {
- RState ret = _pickRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error, _pickRoutine.ErrorMsg);
- return false;
- }
- return ret == RState.End;
- }
- /// <summary>
- /// 确认Pick是否完成
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool ConfirmPickup(object[] param)
- {
- int stepIdex = (int)param[0];
- bool result = _pickRoutine.CheckCompleteCondition(stepIdex);
- if (!result)
- {
- PostMsg(MSG.Error,_pickRoutine.ErrorMsg);
- }
- else
- {
- if (Singleton<RouteManager>.Instance.IsAutoRunning)
- {
- AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), STATE.Picking.ToString());
- }
- }
- return result;
- }
- private bool FnAbortPick(object[] param)
- {
- _pickRoutine.Abort();
- return true;
- }
- private bool FnErrorAbortPick(object[] param)
- {
- _pickRoutine.Abort();
- return true;
- }
- private bool FnStartPlace(object[] param)
- {
- return _placeRoutine.Start(param) == RState.Running;
- }
- private bool FnErrorStartPlace(object[] param)
- {
- if(!_isHomed)
- {
- LOG.WriteLog(eEvent.ERR_EFEM_ROBOT, Module.ToString(), "EFEM is not homed");
- return false;
- }
- _efem.Reset();
- return _placeRoutine.Start(param) == RState.Running;
- }
- /// <summary>
- /// Retry Place
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool RetryPlace(object[] param)
- {
- int stepIndex = (int)param[0];
- return _placeRoutine.Retry(stepIndex) == RState.Running;
- }
- private bool FnPlaceTimeout(object[] param)
- {
- RState ret = _placeRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error,_placeRoutine.ErrorMsg);
- return false;
- }
- if (ret == RState.End)
- {
- AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), STATE.Placing.ToString());
- }
- return ret == RState.End;
- }
- private bool FnErrorPlaceTimeout(object[] param)
- {
- RState ret = _placeRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error, _placeRoutine.ErrorMsg);
- return false;
- }
- return ret == RState.End;
- }
- /// <summary>
- /// 确认Place是否完成
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool ConfirmPlace(object[] param)
- {
- int stepIdex = (int)param[0];
- bool result = _placeRoutine.CheckCompleteCondition(stepIdex);
- if (!result)
- {
- PostMsg(MSG.Error, _placeRoutine.ErrorMsg);
- }
- else
- {
- if (Singleton<RouteManager>.Instance.IsAutoRunning)
- {
- AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), STATE.Picking.ToString());
- }
- }
- return result;
- }
- private bool FnAbortPlace(object[] param)
- {
- _placeRoutine.Abort();
- return true;
- }
- private bool FnErrorAbortPlace(object[] param)
- {
- _placeRoutine.Abort();
- return true;
- }
- private bool FnStartSwap(object[] param)
- {
- return _swapRoutine.Start(param) == RState.Running;
- }
- private bool FnSwapTimeout(object[] param)
- {
- RState ret = _swapRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool FnAbortSwap(object[] param)
- {
- _swapRoutine.Abort();
- return true;
- }
- private bool fnGoto(object[] param)
- {
- // module
- ModuleName unit = ModuleName.EFEM;
- if (param[0] is string s1)
- unit = ModuleNameString.ToEnum(s1);
- else if (param[0] is ModuleName mod)
- unit = mod;
- else
- throw new ArgumentException("Argument error");
- _efem.Goto(unit, Hand.Blade1);
- return true;
- }
- private bool fnLift(object[] param)
- {
- // module
- ModuleName unit = ModuleName.EFEM;
- if (param[0] is string s1)
- unit = ModuleNameString.ToEnum(s1);
- else if (param[0] is ModuleName mod)
- unit = mod;
- else
- throw new ArgumentException("Argument error");
- bool isUp = true;
- if (param.Length > 1)
- {
- isUp = (bool) param[1];
- }
- if (isUp)
- {
- if (!_efem.SetPinUp(unit))
- return false;
- }
- else
- {
- if (!_efem.SetPinDown(unit))
- return false;
- }
- LiftMessage = isUp ? "Up" : "Down";
- return true;
- }
- private bool fnLiftTimeout(object[] param)
- {
- if (LiftMessage == "Up")
- {
- return _efem.LiftIsDown == false && _efem.LiftIsUp == true;
- }
- else if (LiftMessage == "Down")
- {
- return _efem.LiftIsDown == true && _efem.LiftIsUp == false;
- }
- return false;
- }
- private bool fnAlign(object[] param)
- {
- return _alignRoutine.Start(param) == RState.Running;
- }
- private bool fnAlignTimeout(object[] param)
- {
- RState ret = _alignRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error,_alignRoutine.ErrorMsg);
- return false;
- }
- if (ret == RState.End)
- {
- AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), STATE.Aligning.ToString());
- }
- return ret == RState.End;
- }
- /// <summary>
- /// Retry Align
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool RetryAlign(object[] param)
- {
- int stepIndex = (int)param[0];
- return _alignRoutine.Retry(stepIndex) == RState.Running;
- }
- /// <summary>
- /// 确认Align是否完成
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool ConfirmAlign(object[] param)
- {
- int stepIdex = (int)param[0];
- bool result = _alignRoutine.CheckCompleteCondition(stepIdex);
- if (!result)
- {
- PostMsg(MSG.Error, _alignRoutine.ErrorMsg);
- }
- else
- {
- if (Singleton<RouteManager>.Instance.IsAutoRunning)
- {
- AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), STATE.Aligning.ToString());
- }
- }
- return result;
- }
- private bool MapDummyTimeout(object[] param)
- {
- RState ret = _mapDummyRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- PostMsg(MSG.Error);
- return false;
- }
- return ret == RState.End;
- }
- private bool VacuumActionTimeout()
- {
- RState ret = _vacuumRoutine.Monitor();
- if (ret == RState.Failed || ret == RState.Timeout)
- {
- LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "Vacuum");
- return false;
- }
- return ret == RState.End;
- }
- private bool fnMap(object[] param)
- {
- // module
- ModuleName unit = ModuleName.EFEM;
- if (param[0] is string s1)
- unit = ModuleNameString.ToEnum(s1);
- else if (param[0] is ModuleName mod)
- unit = mod;
- else
- throw new ArgumentException("Argument error");
- if (!_efem.Map(unit))
- return false;
- return true;
- }
- private bool MapDummy(object[] param)
- {
- return _mapDummyRoutine.Start()==RState.Running;
- }
- private bool VacuumAction(object[] param)
- {
- ModuleName vacuumModule = (ModuleName)param[0];
- bool vacuum=(bool)param[1];
- bool result = _vacuumRoutine.Start(vacuumModule, vacuum) == RState.Running;
- if (result)
- {
- _isVacuume = true;
- }
- return result;
- }
- private bool fnGrip(object[] param)
- {
- Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[0]);
- if (!_efem.Grip(arm, true))
- return false;
- return true;
- }
- public int SendEfemAutoCommand(params object[] args)
- {
- if (CheckToPostMessage((int)MSG.BackroundCmd, args))
- return (int)MSG.BackroundCmd;
- return (int)FSM_MSG.NONE;
- }
- private bool fnUngrip(object[] param)
- {
-
- Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[0]);
- if (!_efem.Grip(arm, false))
- return false;
- return true;
- }
- #region EfemRetry
- /// <summary>
- /// Retry
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool EfemRetry(object[] param)
- {
- AlarmList alarmList = AlarmListManager.Instance.GetAlarmListByModule(Module.ToString());
- if (alarmList != null)
- {
- CheckToPostMessage<STATE, MSG>(eEvent.ERR_EFEM_ROBOT, Module.ToString(), alarmList.ModuleCmd,
- alarmList.ModuleStep);
- }
- return false;
- }
- #endregion
- #region ConfirmComplete
- /// <summary>
- /// 确认是否完成
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool ConfirmComplete(object[] param)
- {
- AlarmList alarmList = AlarmListManager.Instance.GetAlarmListByModule(Module.ToString());
- if (alarmList != null)
- {
- if (alarmList.ModuleState == STATE.Picking.ToString())
- {
- CheckToPostMessage<STATE, MSG>(eEvent.ERR_EFEM_ROBOT, Module.ToString(), (int)MSG.Pick, alarmList.ModuleStep);
- }
- else if (alarmList.ModuleState == STATE.Placing.ToString())
- {
- CheckToPostMessage<STATE, MSG>(eEvent.ERR_EFEM_ROBOT, Module.ToString(), (int)MSG.Place, alarmList.ModuleStep);
- }
- else if (alarmList.ModuleState == STATE.Aligning.ToString())
- {
- CheckToPostMessage<STATE, MSG>(eEvent.ERR_EFEM_ROBOT, Module.ToString(), (int)MSG.Align, alarmList.ModuleStep);
- }
- else
- {
- PostMsg(PUFSTATE.Error);
- }
- }
- return false;
- }
- /// <summary>
- /// 清除报警
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool ClearModuleAlarm(object[] param)
- {
- AlarmList alarmList = AlarmListManager.Instance.GetAlarmListByModule(Module.ToString());
- if (alarmList != null)
- {
- AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), "");
- }
- return true;
- }
- #endregion
- public int Invoke(string function, params object[] args)
- {
- switch (function)
- {
- case "HomeAll":
- if (IsIdle)
- {
- return (int)FSM_MSG.NONE;
- }
- if (CheckToPostMessage((int)MSG.HomeAll))
- {
- return (int)MSG.HomeAll;
- }
- else
- {
- return (int)FSM_MSG.NONE;
- }
- case "Retry":
- if (CheckToPostMessage<STATE, MSG>(eEvent.ERR_EFEM_ROBOT, Module.ToString(), (int)MSG.Retry, args))
- {
- return (int)MSG.Retry;
- }
- else
- {
- return (int)FSM_MSG.NONE;
- }
- case "ConfirmComplete":
- if (CheckToPostMessage<STATE, MSG>(eEvent.ERR_EFEM_ROBOT, Module.ToString(), (int)MSG.ConfirmComplete, args))
- {
- return (int)MSG.ConfirmComplete;
- }
- else
- {
- return (int)FSM_MSG.NONE;
- }
- }
- return (int)FSM_MSG.NONE;
- }
- public bool CheckAcked(int msg)
- {
- return fsm.CheckExecuted(msg);
- }
- internal void InvokeReset()
- {
- if (fsm.State == (int) STATE.Error)
- {
- PostMsg((int)MSG.Recover);
- }
- }
- public int InvokeAlign(string module, int reserv, float time)
- {
- if (CheckToPostMessage((int)MSG.Align, module, reserv, time))
- return (int)MSG.Align;
- return (int)FSM_MSG.NONE;
- }
- public int InvokeLiftDown(string module)
- {
- if (CheckToPostMessage((int)MSG.Lift, module, false))
- return (int)MSG.Lift;
- return (int)FSM_MSG.NONE;
- }
- public int InvokePick(ModuleName source, int slot, Hand hand, WaferSize size)
- {
- if (CheckToPostMessage((int)MSG.Pick, source, slot, hand, size))
- return (int)MSG.Pick;
- return (int)FSM_MSG.NONE;
- }
- public int InvokeGoto(ModuleName source, int slot)
- {
- if (CheckToPostMessage((int)MSG.Goto, source, slot))
- return (int)MSG.Goto;
- return (int)FSM_MSG.NONE;
- }
- public int InvokePlace(ModuleName target, int slot, Hand hand, WaferSize size)
- {
- if (CheckToPostMessage((int)MSG.Place, target, slot, hand, size))
- return (int)MSG.Place;
- return (int)FSM_MSG.NONE;
- }
- public int InvokePickAndPlace(ModuleName targetModule, Hand pickHand, int pickSlot, Hand placeHand, int placeSlot, WaferSize size)
- {
- if (CheckToPostMessage((int)MSG.Swap, targetModule, pickSlot, pickHand, placeHand, placeSlot, size))
- return (int)MSG.Swap;
- return (int)FSM_MSG.NONE;
- }
- public int InvokeMap(string target )
- {
- if (CheckToPostMessage((int)MSG.Map, target ))
- return (int)MSG.Map;
- return (int)FSM_MSG.NONE;
- }
- public int InvokeFlip(Hand hand)
- {
- if (CheckToPostMessage((int)MSG.Flip, hand))
- return (int)MSG.Flip;
- return (int)FSM_MSG.NONE;
- }
- public bool IsPrepareTransferReady(ModuleName module, EnumTransferType type, int slot)
- {
- //if (type == EnumTransferType.Pick)
- //{
- // //需要补充:判断LP 放好了,而且已经map过。
- // return _efem[module].HasCassette && _efem[module].IsMapped;
- //}
- //else if (type == EnumTransferType.Place)
- //{
- // //需要补充:判断LP 放好了,而且已经map过。
- // return _efem[module].HasCassette && _efem[module].IsMapped;
- //}
- return false;
- }
- internal bool CheckReadyRunNewJob(ModuleName module)
- {
- //???
- return true;
- }
- internal bool CheckReadyTransfer(ModuleName module)
- {
- //return _efem[module].HasCassette && _efem[module].IsMapped;
- return true;
- }
- internal bool CheckPlaced(ModuleName module)
- {
- //return _efem[module].HasCassette;
- return true;
- }
-
- internal void NoteJobStart(ModuleName module)
- {
- //_efem[module].NoteJobStart();
- }
- internal void NoteJobComplete(ModuleName module)
- {
- //_efem[module].NoteJobComplete();
- }
- }
- }
|