using System; using System.Diagnostics; using System.Collections.Generic; using Aitex.Core.Common; using Aitex.Core.RT.DataCenter; using Aitex.Core.RT.Event; using Aitex.Core.RT.Fsm; using Aitex.Core.RT.OperationCenter; using Aitex.Core.RT.SCCore; using Aitex.Core.Utilities; using Aitex.Core.Util; using Aitex.Core.RT.Log; using Aitex.Sorter.Common; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.Schedulers; using MECF.Framework.Common.SubstrateTrackings; using CyberX8_Core; using CyberX8_RT; using CyberX8_RT.Devices; using CyberX8_RT.Devices.YASKAWA; using CyberX8_RT.Devices.EFEM; using CyberX8_RT.Modules.LPs; using CyberX8_RT.Modules.EFEM; using System.Reflection; using CyberX8_RT.Modules.Transporter; using MECF.Framework.Common.Alarm; using MECF.Framework.Common.CommonData; using CyberX8_RT.Modules.Loader; namespace CyberX8_RT.Modules { class EfemEntity : Entity, IEntity, IModuleEntity { //private int _bigWafer = 0; //private int _midWafer = 0; //private int _smallWafer = 0; private bool _isVacuume = false; public enum STATE { Unknown, // 0 Initializing, // 1 Idle, // 2 Error, // 3 Picking, // 4 Placing, // 5 Aligning, // 6 Mapping, // 7 Init, // 8 Orgshing, // 9 Lifting, // 10 InitingAL, // 11 InitingRB, // 12 Extending, // 13 Retracting, // 14 //SettingLamp, // 15 Swapping, Gotoing, Gripping, Ungripping, Fliping, Vacuuming, Retrying, ConfirmCompleting, ErrorPicking, ErrorPlacing } public enum MSG { HomeAll, // 0 Pick, // 1 Place, // 2 Align, // 3 ActionDone, // 4 MoveCmd, // 6 Recover, // 8 Goto, // 9 Error, // 10 Online, // 11 CommReady, // 12 Lift, // 13 HomeAL, // 14 HomeRB, // 15 Extend, // 16 Retract, // 17 PMLiftPinUp, // 18 PMLiftPinDown, // 19 TurnOffBuzzer, Abort, GotoMap, Map, ToInit, Cool, Swap, Grip, Ungrip, Flip, LiftActionDone, Offline, SetRobotSpeed, MapDummy, Vacuum, CloseBuzzer, RobotPowerOn, Retry, ConfirmComplete, BackroundCmd=999, Load, Unload, Dock, Undock, Clamp, Unclamp, ReadCarrierId, WriteCarrierID, ReadTagData, WriteTagData } public enum EfemType { FutureEfem = 1, SunWayEFEM =2 } public bool IsIdle { get { return fsm.State == (int)STATE.Idle; } } public bool IsError { get { return fsm.State == (int)STATE.Error; } } public bool IsInit { get { return fsm.State == (int)STATE.Unknown || fsm.State == (int)STATE.Init; } } public bool IsBusy { get { return !IsInit && !IsError && !IsIdle; } } public bool IsAuto { get; } = true; /// /// 是否为工程模式 /// public bool IsEngineering { get; } = false; /// /// 是否为产品模式 /// public bool IsProduction { get; } = true; /// /// 模块名称 /// public ModuleName Module { get; private set; } public bool IsHomed { get { return _isHomed; } } public bool IsOnline { get; internal set; } public bool IsDisable { get; internal set; } public RState RobotStatus { get { if (_efem.Status != RState.Running) { if (_robotWatch.ElapsedMilliseconds < 200) return RState.Running; else return _efem.Status; } else return RState.Running; } } public bool Check(int msg, out string reason, params object[] args) { throw new NotImplementedException(); } // Fields private readonly string Name; private readonly EfemBase _efem; private readonly LoadPortModule[] _lpms = new LoadPortModule[3]; private readonly DummyDevice[] _dummies = new DummyDevice[2]; private readonly EfemType _efemType; public EfemBase EfemDevice => _efem; public EfemType EFEMType => _efemType; // routine private readonly EfemPickRoutine _pickRoutine; private readonly EfemPlaceRoutine _placeRoutine; private readonly EfemSwapRoutine _swapRoutine; private readonly EfemHomeRoutine _homeRoutine; private readonly EFEMAlignRoutine _alignRoutine; private readonly EfemMapDummyRoutine _mapDummyRoutine; private readonly EfemRobotMapRoutine _robotMapRoutine; private readonly EfemVacuumRoutine _vacuumRoutine; private string LiftMessage; private Stopwatch _robotWatch = new Stopwatch(); private R_TRIG _robotIdleTrigger = new R_TRIG(); private bool _isHomed = false; private EfemAutoMessageProcessor _autoMessageProcessor; private STATE _errorPreState; // Constructor public EfemEntity() { Module = ModuleName.EFEM; Name = ModuleName.EFEM.ToString(); InitFsmMap(); _efemType = (EfemType)SC.GetValue($"EFEM.EfemType"); _efem = new SunWayRobot(); _homeRoutine = new EfemHomeRoutine(_efem); _pickRoutine = new EfemPickRoutine(_efem); _placeRoutine = new EfemPlaceRoutine(_efem); _swapRoutine = new EfemSwapRoutine(_efem); _alignRoutine = new EFEMAlignRoutine(_efem); _mapDummyRoutine = new EfemMapDummyRoutine(_efem); _vacuumRoutine = new EfemVacuumRoutine(_efem); _autoMessageProcessor =new EfemAutoMessageProcessor(_efem); } public LoadPortModule GetLoadportModule(int lpNumber) { if (lpNumber < 0|| _lpms.Length<=lpNumber) { return null; } return _lpms[lpNumber]; } public DummyDevice GetDummyDevice(int dummyNumber) { if (dummyNumber < 0||_dummies.Length<=dummyNumber) { return null; } return _dummies[dummyNumber]; } protected override bool Init() { _lpms[0] = new LoadPortModule(ModuleName.LP1, _efem); _lpms[1] = new LoadPortModule(ModuleName.LP2, _efem); _lpms[2] = new LoadPortModule(ModuleName.LP3, _efem); _dummies[0] = new DummyDevice(ModuleName.Dummy1); _dummies[1] = new DummyDevice(ModuleName.Dummy2); _lpms[0].Initialize(); _lpms[1].Initialize(); _lpms[2].Initialize(); OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAll); return true; }); OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.ClearError}", (cmd, args) => { PostMsg(MSG.Recover); return true; }); OP.Subscribe($"{ModuleName.EFEM}.{EfemOperation.TurnOffBuzzer}", (cmd, args) => { PostMsg(MSG.CloseBuzzer); return true; }); OP.Subscribe($"{ModuleName.EFEM}.Online", (cmd, args) => { PostMsg(MSG.Online, args[0]); return true; }); OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Pick}", (cmd, args) => { CheckToPostMessage(eEvent.ERR_EFEM_COMMON_FAILED,"EFEM",(int)MSG.Pick, args[0]); return true; }); OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Place}", (cmd, args) => { CheckToPostMessage(eEvent.ERR_EFEM_COMMON_FAILED, "EFEM", (int)MSG.Place, args[0]); return true; }); OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Swap}", (cmd, args) => { PostMsg(MSG.Swap, args[0]); return true; }); OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.DummyMap}", (cmd, args) => { CheckToPostMessage(eEvent.ERR_EFEM_COMMON_FAILED, "EFEM", (int)MSG.MapDummy); return true; }); OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Speed}", (cmd, args) => { return _efem.SetRobotSpeed(ModuleName.EfemRobot, (int)args[0]); }); OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Vacuum}", (cmd, args) => { return _efem.Vacuum(ModuleName.EfemRobot, (bool)args[1]); }); OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.PowerOn}", (cmd, args) => { return _efem.RobotPowerOn(ModuleName.EfemRobot, (bool)args[0]); }); OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Abort}", (cmd, args) => { PostMsg(MSG.Abort); return true; }); OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeRB); return true; }); OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Grip}", (cmd, args) => { bool isGrip = ((string)args[0]).ToLower() == "on"; PostMsg(isGrip ? MSG.Grip : MSG.Ungrip, args[1]); return true; }); //OP.Subscribe($"{ModuleName.EfemRobot}.{EfemOperation.Flip}", (cmd, args) => { PostMsg(MSG.Flip, args[0]); return true; }); OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Home}", (cmd, args) => { PostMsg(MSG.HomeAL, ModuleName.Aligner1); return true; }); OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Align}", (cmd, args) => { CheckToPostMessage(eEvent.ERR_EFEM_COMMON_FAILED,ModuleName.EFEM.ToString(),(int)MSG.Align, ModuleName.Aligner1, args[0], args[1]); return true; }); //OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Vacuum}", (cmd, args) => { CheckToPostMessage(eEvent.ERR_EFEM_COMMON_FAILED,ModuleName.EFEM.ToString(),(int)MSG.Vacuum, args); return true; }); OP.Subscribe($"{ModuleName.Aligner1}.{EfemOperation.Vacuum}", (cmd, args) => { return VacuumAction(args); }); DATA.Subscribe($"{Name}.FsmState", () => ((STATE)fsm.State).ToString(),SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.FsmPrevState", () => ((STATE)fsm.PrevState).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.FsmLastMessage", GetFsmLastMessage, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.RobotMoveAction", () => (_efem.TMRobotMoveInfo), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.State", () => ((STATE)fsm.State).ToString(), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.IsAlarm", () => IsError, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.IsInit", () => IsInit, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.IsIdle", () => IsIdle, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.IsBusy", () => IsBusy, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.IsOnline", () => IsOnline, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.IsHomed", () => _isHomed, SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Name}.RobotSpeed",()=>IsIdle?SC.GetValue("EFEM.DefaultMoveSpeedInPercent"):0); _robotWatch.Restart(); return true; } private void InitFsmMap() { fsm = new StateMachine("EFEM", (int)STATE.Unknown, 50); fsm.EnableRepeatedMsg(true); AnyStateTransition(FSM_MSG.TIMER, fnMonitor, FSM_STATE.SAME); AnyStateTransition(MSG.TurnOffBuzzer, fnTurnOffBuzzer, FSM_STATE.SAME); AnyStateTransition(MSG.Error, fnError, STATE.Error); AnyStateTransition(MSG.Online, fnOnline, FSM_STATE.SAME); AnyStateTransition(MSG.Abort, fnAbortRobot, FSM_STATE.SAME); AnyStateTransition(MSG.ToInit, fnToInit, STATE.Init); AnyStateTransition(MSG.BackroundCmd, fnBackroundCommand, FSM_STATE.SAME); AnyStateTransition(MSG.CloseBuzzer, fnCloseBuzzer, FSM_STATE.SAME); Transition(STATE.Unknown,MSG.CommReady, fnCommReady, STATE.Init); //Error Transition(STATE.Error, MSG.Recover, fnRecover, STATE.Idle); // Home Transition(STATE.Init, MSG.HomeAll, fnHomeAll, STATE.Initializing); Transition(STATE.Idle, MSG.HomeAll, fnHomeAll, STATE.Initializing); Transition(STATE.Error, MSG.HomeAll, fnHomeAll, STATE.Initializing); Transition(STATE.Initializing, FSM_MSG.TIMER, fnHomingTimeout, STATE.Idle); // Home Robot Transition(STATE.Error, MSG.HomeRB, fnHomeRobot, STATE.InitingRB); Transition(STATE.Idle, MSG.HomeRB, fnHomeRobot, STATE.InitingRB); Transition(STATE.InitingRB, FSM_MSG.TIMER, fnHomingRobotTimeout, STATE.Idle); // Home Aligner Transition(STATE.Idle, MSG.HomeAL, fnHomeAligner, STATE.InitingAL); Transition(STATE.InitingAL, FSM_MSG.TIMER, fnHomingAlignTimeout, STATE.Idle); // Pick wafer Transition(STATE.Idle, MSG.Pick, FnStartPick, STATE.Picking); Transition(STATE.Picking, FSM_MSG.TIMER, FnPickTimeout, STATE.Idle); Transition(STATE.Picking, MSG.Abort, FnAbortPick, STATE.Idle); Transition(STATE.Error, MSG.Pick, FnErrorStartPick, STATE.ErrorPicking); Transition(STATE.ErrorPicking, FSM_MSG.TIMER, FnErrorPickTimeout, STATE.Error); Transition(STATE.ErrorPicking, MSG.Abort, FnErrorAbortPick, STATE.Error); // Place wafer Transition(STATE.Idle, MSG.Place, FnStartPlace, STATE.Placing); Transition(STATE.Placing, FSM_MSG.TIMER, FnPlaceTimeout, STATE.Idle); Transition(STATE.Placing, MSG.Abort, FnAbortPlace, STATE.Idle); Transition(STATE.Error, MSG.Place, FnErrorStartPlace, STATE.ErrorPlacing); Transition(STATE.ErrorPlacing, FSM_MSG.TIMER, FnErrorPlaceTimeout, STATE.Error); Transition(STATE.ErrorPlacing, MSG.Abort, FnErrorAbortPlace, STATE.Error); // Swap wafer with LL sequence Transition(STATE.Idle, MSG.Swap, FnStartSwap, STATE.Swapping); Transition(STATE.Swapping, FSM_MSG.TIMER, FnSwapTimeout, STATE.Idle); Transition(STATE.Swapping, MSG.Abort, FnAbortSwap, STATE.Idle); // Goto Transition(STATE.Idle, MSG.Goto, fnGoto, STATE.Gotoing); Transition(STATE.Gotoing, MSG.ActionDone, fnActionDone, STATE.Idle); // Map Transition(STATE.Idle, MSG.Map, fnMap, STATE.Mapping); Transition(STATE.Mapping, MSG.ActionDone, fnActionDone, STATE.Idle); // Grip Transition(STATE.Idle, MSG.Grip, fnGrip, STATE.Gripping); Transition(STATE.Gripping, MSG.ActionDone, fnActionDone, STATE.Idle); // Ungrip Transition(STATE.Idle, MSG.Ungrip, fnUngrip, STATE.Ungripping); Transition(STATE.Ungripping, MSG.ActionDone, fnActionDone, STATE.Idle); // Aligner Transition(STATE.Idle, MSG.Lift, fnLift, STATE.Lifting); //Transition(STATE.Lifting, MSG.LiftActionDone, fnActionDone, STATE.Idle); Transition(STATE.Lifting, FSM_MSG.TIMER, fnLiftTimeout, STATE.Idle); Transition(STATE.Idle, MSG.Align, fnAlign, STATE.Aligning); Transition(STATE.Aligning, FSM_MSG.TIMER, fnAlignTimeout, STATE.Idle); Transition(STATE.Aligning, MSG.ActionDone, fnActionDone, STATE.Idle); //MapDummy Transition(STATE.Idle, MSG.MapDummy, MapDummy, STATE.Mapping); Transition(STATE.Mapping, FSM_MSG.TIMER, MapDummyTimeout, STATE.Idle); //Vacuum //Transition(STATE.Init, MSG.Vacuum, VacuumAction, STATE.Vacuuming); //Transition(STATE.Idle, MSG.Vacuum, VacuumAction, STATE.Vacuuming); //Transition(STATE.Error, MSG.Vacuum, VacuumAction, STATE.Vacuuming); //Transition(STATE.Vacuuming, FSM_MSG.TIMER, VacuumActionTimeout, STATE.Idle); //Retry Transition(STATE.Error, MSG.Retry, NullFunc, STATE.Retrying); Transition(STATE.Retrying, FSM_MSG.TIMER, EfemRetry, STATE.Retrying); Transition(STATE.Retrying, MSG.Align, RetryAlign, STATE.Aligning); Transition(STATE.Retrying, MSG.Pick, RetryPick, STATE.Picking); Transition(STATE.Retrying, MSG.Place, RetryPlace, STATE.Placing); //ConfirmComplete Transition(STATE.Init, MSG.ConfirmComplete, ClearModuleAlarm, STATE.Init); Transition(STATE.Idle, MSG.ConfirmComplete, ClearModuleAlarm, STATE.Idle); Transition(STATE.Error, MSG.ConfirmComplete, NullFunc, STATE.ConfirmCompleting); Transition(STATE.ConfirmCompleting, FSM_MSG.TIMER, ConfirmComplete, STATE.ConfirmCompleting); Transition(STATE.ConfirmCompleting, MSG.Align, ConfirmAlign, STATE.Idle); Transition(STATE.ConfirmCompleting, MSG.Pick, ConfirmPickup, STATE.Idle); Transition(STATE.ConfirmCompleting, MSG.Place, ConfirmPlace, STATE.Idle); EnumLoop.ForEach((item) => { fsm.MapState((int)item, item.ToString()); }); EnumLoop.ForEach((item) => { fsm.MapMessage((int)item, item.ToString()); }); Running = true; } private bool fnCommReady(object[] param) { return true; } private bool fnCloseBuzzer(object[] param) { return _efem.CloseBuzzer(); } private bool fnHomeAll(object[] param) { _isHomed = false; return _homeRoutine.Start(ModuleName.EFEM) == RState.Running; } private bool fnHomingTimeout(object[] param) { RState ret = _homeRoutine.Monitor(); if (ret == RState.Failed || ret == RState.Timeout) { PostMsg(MSG.Error); return false; } bool result= ret == RState.End; if(result) { _isHomed= true; RecoverLPStatus(); } return result; } private void RecoverLPStatus() { _lpms[0].PostMsg(LoadPortModule.MSG.EnterIdle); _lpms[1].PostMsg(LoadPortModule.MSG.EnterIdle); _lpms[2].PostMsg(LoadPortModule.MSG.EnterIdle); } private bool fnHomeRobot(object[] param) { if (_isHomed) { return _homeRoutine.Start(ModuleName.EfemRobot) == RState.Running; } else { return false; } } private bool fnHomingRobotTimeout(object[] param) { RState ret = _homeRoutine.Monitor(); if (ret == RState.Failed || ret == RState.Timeout) { PostMsg(MSG.Error); return false; } bool result = ret == RState.End; if (result) { AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), STATE.Idle.ToString()); } return result; } private bool fnHomeAligner(object[] param) { // module ModuleName unit = ModuleName.EFEM; if (param[0] is string s1) unit = ModuleNameString.ToEnum(s1); else if (param[0] is ModuleName mod) unit = mod; else throw new ArgumentException("Argument error"); return _homeRoutine.Start(unit) == RState.Running; } private bool fnHomingAlignTimeout(object[] param) { RState ret = _homeRoutine.Monitor(); if (ret == RState.Failed || ret == RState.Timeout) { PostMsg(MSG.Error); return false; } bool result = ret == RState.End; if (result) { AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), STATE.Idle.ToString()); } return result; } private bool fnActionDone(object[] param) { return false; } public bool CheckToPostMessage(int msg, params object[] args) { if (!fsm.FindTransition(fsm.State, msg)) { LOG.Write(eEvent.WARN_EFEM_COMMON_WARN, ModuleName.EFEM, $"{Name} is in {(STATE)fsm.State} state,can not do {(MSG)msg}"); return false; } Running = true; fsm.PostMsg(msg, args); return true; } private bool fnMonitor(object[] param) { if (_isVacuume) { VacuumActionTimeout(); _isVacuume = false; } // robot idle check _robotIdleTrigger.CLK = _efem.Status != RState.Running; if (_robotIdleTrigger.Q) { _robotWatch.Restart(); LOG.WriteLog(eEvent.EV_EFEM_ROBOT, Module.ToString(), $"robot status changed to {_efem.Status}"); } _autoMessageProcessor.Monitor(); return true; } private bool fnOnline(object[] param) { bool bOnlineFlag = (bool)param[0]; if (_efem is EfemBase efem) { efem.SetOnline(bOnlineFlag); } IsOnline = bOnlineFlag; return true; } private string GetFsmLastMessage() { int msg = fsm.LastMsg; if (msg >= (int)MSG.HomeAll && msg <= (int)MSG.Error) return ((MSG)msg).ToString(); if (msg == (int)FSM_MSG.TIMER) return "Timer"; return msg.ToString(); } private bool fnError(object[] param) { _errorPreState = (STATE)fsm.State; string error = (param != null && param.Length != 0) ? param[0].ToString() : ""; if (Singleton.Instance.IsAutoRunning) { int msg = 0; if (_errorPreState == STATE.Picking) { msg = (int)MSG.Pick; } else if (_errorPreState == STATE.Aligning) { msg= (int)MSG.Align; } else if (_errorPreState == STATE.Placing) { msg = (int)MSG.Place; } else { error = $"{error}\r\n Plase Home Robot back to idle state"; } AlarmList alarmList = new AlarmList(Module.ToString(), ((STATE)fsm.State).ToString(), msg, error, 0, (int)AlarmType.Error); AlarmListManager.Instance.AddAlarm(alarmList); } return true; } private bool fnToInit(object[] param) { return true; } private bool fnRecover(object[] param) { bool result=_efem.ClearError(); if (result) { PostMsg(MSG.ToInit); } return result; } private bool fnAbortRobot(object[] param) { //_efem.ExecuteAction(); return true; } private bool fnBackroundCommand(object[] param) { _autoMessageProcessor.SendAutoCommandMessage(param); return true; } private bool fnRobotPowerOn(object[] param) { return _efem.RobotPowerOn(ModuleName.EfemRobot, (bool)param[0]); } private bool fnSetLED(object[] param) { LightType light = (LightType)param[0]; LightStatus st = (LightStatus)param[1]; return _efem.SetLamp(light, st); } private bool fnTurnOffBuzzer(object[] param) { return false; } private bool FnStartPick(object[] param) { return _pickRoutine.Start(param) == RState.Running; } private bool FnErrorStartPick(object[] param) { if (!_isHomed) { LOG.WriteLog(eEvent.ERR_EFEM_ROBOT, Module.ToString(), "EFEM is not homed"); return false; } _efem.Reset(); return _pickRoutine.Start(param) == RState.Running; } /// /// Retry Pick /// /// /// private bool RetryPick(object[] param) { int stepIndex = (int)param[0]; return _pickRoutine.Retry(stepIndex) == RState.Running; } private bool FnPickTimeout(object[] param) { RState ret = _pickRoutine.Monitor(); if (ret == RState.Failed || ret == RState.Timeout) { PostMsg(MSG.Error,_pickRoutine.ErrorMsg); return false; } if (ret == RState.End) { AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), STATE.Picking.ToString()); } return ret == RState.End; } private bool FnErrorPickTimeout(object[] param) { RState ret = _pickRoutine.Monitor(); if (ret == RState.Failed || ret == RState.Timeout) { PostMsg(MSG.Error, _pickRoutine.ErrorMsg); return false; } return ret == RState.End; } /// /// 确认Pick是否完成 /// /// /// private bool ConfirmPickup(object[] param) { int stepIdex = (int)param[0]; bool result = _pickRoutine.CheckCompleteCondition(stepIdex); if (!result) { PostMsg(MSG.Error,_pickRoutine.ErrorMsg); } else { if (Singleton.Instance.IsAutoRunning) { AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), STATE.Picking.ToString()); } } return result; } private bool FnAbortPick(object[] param) { _pickRoutine.Abort(); return true; } private bool FnErrorAbortPick(object[] param) { _pickRoutine.Abort(); return true; } private bool FnStartPlace(object[] param) { return _placeRoutine.Start(param) == RState.Running; } private bool FnErrorStartPlace(object[] param) { if(!_isHomed) { LOG.WriteLog(eEvent.ERR_EFEM_ROBOT, Module.ToString(), "EFEM is not homed"); return false; } _efem.Reset(); return _placeRoutine.Start(param) == RState.Running; } /// /// Retry Place /// /// /// private bool RetryPlace(object[] param) { int stepIndex = (int)param[0]; return _placeRoutine.Retry(stepIndex) == RState.Running; } private bool FnPlaceTimeout(object[] param) { RState ret = _placeRoutine.Monitor(); if (ret == RState.Failed || ret == RState.Timeout) { PostMsg(MSG.Error,_placeRoutine.ErrorMsg); return false; } if (ret == RState.End) { AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), STATE.Placing.ToString()); } return ret == RState.End; } private bool FnErrorPlaceTimeout(object[] param) { RState ret = _placeRoutine.Monitor(); if (ret == RState.Failed || ret == RState.Timeout) { PostMsg(MSG.Error, _placeRoutine.ErrorMsg); return false; } return ret == RState.End; } /// /// 确认Place是否完成 /// /// /// private bool ConfirmPlace(object[] param) { int stepIdex = (int)param[0]; bool result = _placeRoutine.CheckCompleteCondition(stepIdex); if (!result) { PostMsg(MSG.Error, _placeRoutine.ErrorMsg); } else { if (Singleton.Instance.IsAutoRunning) { AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), STATE.Picking.ToString()); } } return result; } private bool FnAbortPlace(object[] param) { _placeRoutine.Abort(); return true; } private bool FnErrorAbortPlace(object[] param) { _placeRoutine.Abort(); return true; } private bool FnStartSwap(object[] param) { return _swapRoutine.Start(param) == RState.Running; } private bool FnSwapTimeout(object[] param) { RState ret = _swapRoutine.Monitor(); if (ret == RState.Failed || ret == RState.Timeout) { PostMsg(MSG.Error); return false; } return ret == RState.End; } private bool FnAbortSwap(object[] param) { _swapRoutine.Abort(); return true; } private bool fnGoto(object[] param) { // module ModuleName unit = ModuleName.EFEM; if (param[0] is string s1) unit = ModuleNameString.ToEnum(s1); else if (param[0] is ModuleName mod) unit = mod; else throw new ArgumentException("Argument error"); _efem.Goto(unit, Hand.Blade1); return true; } private bool fnLift(object[] param) { // module ModuleName unit = ModuleName.EFEM; if (param[0] is string s1) unit = ModuleNameString.ToEnum(s1); else if (param[0] is ModuleName mod) unit = mod; else throw new ArgumentException("Argument error"); bool isUp = true; if (param.Length > 1) { isUp = (bool) param[1]; } if (isUp) { if (!_efem.SetPinUp(unit)) return false; } else { if (!_efem.SetPinDown(unit)) return false; } LiftMessage = isUp ? "Up" : "Down"; return true; } private bool fnLiftTimeout(object[] param) { if (LiftMessage == "Up") { return _efem.LiftIsDown == false && _efem.LiftIsUp == true; } else if (LiftMessage == "Down") { return _efem.LiftIsDown == true && _efem.LiftIsUp == false; } return false; } private bool fnAlign(object[] param) { return _alignRoutine.Start(param) == RState.Running; } private bool fnAlignTimeout(object[] param) { RState ret = _alignRoutine.Monitor(); if (ret == RState.Failed || ret == RState.Timeout) { PostMsg(MSG.Error,_alignRoutine.ErrorMsg); return false; } if (ret == RState.End) { AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), STATE.Aligning.ToString()); } return ret == RState.End; } /// /// Retry Align /// /// /// private bool RetryAlign(object[] param) { int stepIndex = (int)param[0]; return _alignRoutine.Retry(stepIndex) == RState.Running; } /// /// 确认Align是否完成 /// /// /// private bool ConfirmAlign(object[] param) { int stepIdex = (int)param[0]; bool result = _alignRoutine.CheckCompleteCondition(stepIdex); if (!result) { PostMsg(MSG.Error, _alignRoutine.ErrorMsg); } else { if (Singleton.Instance.IsAutoRunning) { AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), STATE.Aligning.ToString()); } } return result; } private bool MapDummyTimeout(object[] param) { RState ret = _mapDummyRoutine.Monitor(); if (ret == RState.Failed || ret == RState.Timeout) { PostMsg(MSG.Error); return false; } return ret == RState.End; } private bool VacuumActionTimeout() { RState ret = _vacuumRoutine.Monitor(); if (ret == RState.Failed || ret == RState.Timeout) { LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, ModuleName.EFEM, "Vacuum"); return false; } return ret == RState.End; } private bool fnMap(object[] param) { // module ModuleName unit = ModuleName.EFEM; if (param[0] is string s1) unit = ModuleNameString.ToEnum(s1); else if (param[0] is ModuleName mod) unit = mod; else throw new ArgumentException("Argument error"); if (!_efem.Map(unit)) return false; return true; } private bool MapDummy(object[] param) { return _mapDummyRoutine.Start()==RState.Running; } private bool VacuumAction(object[] param) { ModuleName vacuumModule = (ModuleName)param[0]; bool vacuum=(bool)param[1]; bool result = _vacuumRoutine.Start(vacuumModule, vacuum) == RState.Running; if (result) { _isVacuume = true; } return result; } private bool fnGrip(object[] param) { Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[0]); if (!_efem.Grip(arm, true)) return false; return true; } public int SendEfemAutoCommand(params object[] args) { if (CheckToPostMessage((int)MSG.BackroundCmd, args)) return (int)MSG.BackroundCmd; return (int)FSM_MSG.NONE; } private bool fnUngrip(object[] param) { Hand arm = (Hand)Enum.Parse(typeof(Hand), (string)param[0]); if (!_efem.Grip(arm, false)) return false; return true; } #region EfemRetry /// /// Retry /// /// /// private bool EfemRetry(object[] param) { AlarmList alarmList = AlarmListManager.Instance.GetAlarmListByModule(Module.ToString()); if (alarmList != null) { CheckToPostMessage(eEvent.ERR_EFEM_ROBOT, Module.ToString(), alarmList.ModuleCmd, alarmList.ModuleStep); } return false; } #endregion #region ConfirmComplete /// /// 确认是否完成 /// /// /// private bool ConfirmComplete(object[] param) { AlarmList alarmList = AlarmListManager.Instance.GetAlarmListByModule(Module.ToString()); if (alarmList != null) { if (alarmList.ModuleState == STATE.Picking.ToString()) { CheckToPostMessage(eEvent.ERR_EFEM_ROBOT, Module.ToString(), (int)MSG.Pick, alarmList.ModuleStep); } else if (alarmList.ModuleState == STATE.Placing.ToString()) { CheckToPostMessage(eEvent.ERR_EFEM_ROBOT, Module.ToString(), (int)MSG.Place, alarmList.ModuleStep); } else if (alarmList.ModuleState == STATE.Aligning.ToString()) { CheckToPostMessage(eEvent.ERR_EFEM_ROBOT, Module.ToString(), (int)MSG.Align, alarmList.ModuleStep); } else { PostMsg(PUFSTATE.Error); } } return false; } /// /// 清除报警 /// /// /// private bool ClearModuleAlarm(object[] param) { AlarmList alarmList = AlarmListManager.Instance.GetAlarmListByModule(Module.ToString()); if (alarmList != null) { AlarmListManager.Instance.CheckModuleAlamAndRemove(Module.ToString(), ""); } return true; } #endregion public int Invoke(string function, params object[] args) { switch (function) { case "HomeAll": if (IsIdle) { return (int)FSM_MSG.NONE; } if (CheckToPostMessage((int)MSG.HomeAll)) { return (int)MSG.HomeAll; } else { return (int)FSM_MSG.NONE; } case "Retry": if (CheckToPostMessage(eEvent.ERR_EFEM_ROBOT, Module.ToString(), (int)MSG.Retry, args)) { return (int)MSG.Retry; } else { return (int)FSM_MSG.NONE; } case "ConfirmComplete": if (CheckToPostMessage(eEvent.ERR_EFEM_ROBOT, Module.ToString(), (int)MSG.ConfirmComplete, args)) { return (int)MSG.ConfirmComplete; } else { return (int)FSM_MSG.NONE; } } return (int)FSM_MSG.NONE; } public bool CheckAcked(int msg) { return fsm.CheckExecuted(msg); } internal void InvokeReset() { if (fsm.State == (int) STATE.Error) { PostMsg((int)MSG.Recover); } } public int InvokeAlign(string module, int reserv, float time) { if (CheckToPostMessage((int)MSG.Align, module, reserv, time)) return (int)MSG.Align; return (int)FSM_MSG.NONE; } public int InvokeLiftDown(string module) { if (CheckToPostMessage((int)MSG.Lift, module, false)) return (int)MSG.Lift; return (int)FSM_MSG.NONE; } public int InvokePick(ModuleName source, int slot, Hand hand, WaferSize size) { if (CheckToPostMessage((int)MSG.Pick, source, slot, hand, size)) return (int)MSG.Pick; return (int)FSM_MSG.NONE; } public int InvokeGoto(ModuleName source, int slot) { if (CheckToPostMessage((int)MSG.Goto, source, slot)) return (int)MSG.Goto; return (int)FSM_MSG.NONE; } public int InvokePlace(ModuleName target, int slot, Hand hand, WaferSize size) { if (CheckToPostMessage((int)MSG.Place, target, slot, hand, size)) return (int)MSG.Place; return (int)FSM_MSG.NONE; } public int InvokePickAndPlace(ModuleName targetModule, Hand pickHand, int pickSlot, Hand placeHand, int placeSlot, WaferSize size) { if (CheckToPostMessage((int)MSG.Swap, targetModule, pickSlot, pickHand, placeHand, placeSlot, size)) return (int)MSG.Swap; return (int)FSM_MSG.NONE; } public int InvokeMap(string target ) { if (CheckToPostMessage((int)MSG.Map, target )) return (int)MSG.Map; return (int)FSM_MSG.NONE; } public int InvokeFlip(Hand hand) { if (CheckToPostMessage((int)MSG.Flip, hand)) return (int)MSG.Flip; return (int)FSM_MSG.NONE; } public bool IsPrepareTransferReady(ModuleName module, EnumTransferType type, int slot) { //if (type == EnumTransferType.Pick) //{ // //需要补充:判断LP 放好了,而且已经map过。 // return _efem[module].HasCassette && _efem[module].IsMapped; //} //else if (type == EnumTransferType.Place) //{ // //需要补充:判断LP 放好了,而且已经map过。 // return _efem[module].HasCassette && _efem[module].IsMapped; //} return false; } internal bool CheckReadyRunNewJob(ModuleName module) { //??? return true; } internal bool CheckReadyTransfer(ModuleName module) { //return _efem[module].HasCassette && _efem[module].IsMapped; return true; } internal bool CheckPlaced(ModuleName module) { //return _efem[module].HasCassette; return true; } internal void NoteJobStart(ModuleName module) { //_efem[module].NoteJobStart(); } internal void NoteJobComplete(ModuleName module) { //_efem[module].NoteJobComplete(); } } }