123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482 |
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.OperationCenter;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using MECF.Framework.Common.Algorithm;
- using MECF.Framework.Common.Beckhoff.ModuleIO;
- using MECF.Framework.Common.CommonData.Prewet;
- using MECF.Framework.Common.Device.ResistivityProbe;
- using MECF.Framework.Common.Device.Rinse;
- using MECF.Framework.Common.Persistent.Prewet;
- using MECF.Framework.Common.Persistent.Rinse;
- using MECF.Framework.Common.RecipeCenter;
- using MECF.Framework.Common.ToolLayout;
- using MECF.Framework.Common.TwinCat;
- using System.Collections.Generic;
- using System.Reflection;
- using CyberX8_RT.Modules;
- using CyberX8_RT.Modules.Rinse;
- using CyberX8_RT.Devices.Resistivity;
- using CyberX8_RT.Modules.Prewet;
- using MECF.Framework.Common.IOCore;
- namespace CyberX8_RT.Devices.Rinse
- {
- public class RinseDevice : BaseDevice, IDevice
- {
- private enum RinseOperation
- {
- None
- }
- #region 常量
- private const string WATER_LEVEL="WaterLevel";
- private const string WAFER_HOLDER_CLAMP="WaferHolderClamp";
- private const string N2_VALVE="N2Valve";
- private const string FILL_VALVE="FillValve";
- private const string DRAIN_VALVE="DrainValve";
- private const string WASTE_VALVE="WasteValve";
- private const string RESISTIVITY="Resistivity";
- private const string PERSISTENT_VALUE = "PersistentValue";
- private const string RINSEDATA = "RinseData";
- private const string RINSEITEM = "RinseItem";
- private const string RESISTIVITYVALUE = "Resistivity";
- #endregion
- #region 内部变量
- /// <summary>
- /// 数据
- /// </summary>
- private RinseData _rinseData = new RinseData();
- /// <summary>
- /// Rinse 持久性数值对象
- /// </summary>
- private RinsePersistentValue _rinsePersistentValue;
- /// <summary>
- /// 变量是否初始化字典
- /// </summary>
- private Dictionary<string, bool> _variableInitializeDic = new Dictionary<string, bool>();
- /// <summary>
- /// ByPass Inter Locks
- /// </summary>
- private bool _bypassInterLocks = false;
- /// <summary>
- /// RinseItem
- /// </summary>
- private RinseItem _rinseItem = new RinseItem();
- /// <summary>
- /// 工艺当前执行小步骤
- /// </summary>
- private string _currentStateMachine = "Init";
- /// <summary>
- /// 工艺当前执行大步骤
- /// </summary>
- private string _currentStatus = "Init";
- /// <summary>
- /// 水阻值
- /// </summary>
- private double _resistivityValue;
- /// <summary>
- /// 水阻计控制器
- /// </summary>
- private ResistivityController _resistivityController;
- #endregion
- #region 属性
- /// <summary>
- /// Rinse数据
- /// </summary>
- public RinseData RinseData { get { return _rinseData; } }
- /// <summary>
- /// 所有io变量是否初始化
- /// </summary>
- public bool IOInitialized { get { return AllIoVariableInitialized(); } }
- /// <summary>
- /// 所有io变量是否初始化
- /// </summary>
- public RinseItem RinseItem { get { return _rinseItem; } }
- /// <summary>
- /// 当前状态机
- /// </summary>
- public string CurrentStateMachine { get { return _currentStateMachine; } }
- #endregion
- /// <summary>
- /// 构造函数
- /// </summary>
- /// <param name="moduleName"></param>
- /// <param name="name"></param>
- public RinseDevice(string moduleName) : base(moduleName, moduleName, moduleName, moduleName)
- {
- }
- /// <summary>
- /// 初始化
- /// </summary>
- /// <returns></returns>
- public bool Initialize()
- {
- SubscribeData();
- SubscribeValueAction();
- InitializeOperation();
- return true;
- }
- /// <summary>
- /// 订阅数据
- /// </summary>
- private void SubscribeData()
- {
- _rinsePersistentValue = RinsePersistentManager.Instance.GetRinsePersistentValue(Module);
- if (_rinsePersistentValue == null)
- {
- LOG.WriteLog(eEvent.ERR_RINSE, Module, "Persistent Value Object is not exist");
- }
- _rinseItem = RinseItemManager.Instance.GetRinseItem(Module);
- _resistivityController = DEVICE.GetDevice<ResistivityController>(RinseItem.ResistivityID);
- DATA.Subscribe($"{Module}.{PERSISTENT_VALUE}", () => _rinsePersistentValue,SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.{RINSEDATA}", () => _rinseData, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.CurrentStateMachine", () => _currentStateMachine, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.CurrentStatus", () => _currentStatus, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.Resistivity.ID", () => _resistivityController != null ? _resistivityController.Module : "", SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.{RESISTIVITYVALUE}", () => {
- if (_resistivityController != null)
- {
- string value = _resistivityController.ResisitivityValue;
- if(double.TryParse(value, out _resistivityValue))
- {
- return _resistivityValue;
- }
- else
- {
- return 0;
- }
- }
- else
- {
- return 0;
- }
- }, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.WaterLevel", () => RinseData.WaterLevel, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.DIFillEnable",()=>RinseData.FillValve, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.DrainEnable", () => RinseData.DrainValve, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.N2Enable",()=>RinseData.N2Valve, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.WaferShuttleClamped",()=>RinseData.WaferHolderClamp, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- DATA.Subscribe($"{Module}.WasteEnable", () => RinseData.WasteValve, SubscriptionAttribute.FLAG.IgnoreSaveDB);
- }
- /// <summary>
- /// 订阅变量数值发生变化
- /// </summary>
- private void SubscribeValueAction()
- {
- BeckhoffIoSubscribeUpdateVariable(WATER_LEVEL);
- BeckhoffIoSubscribeUpdateVariable(WASTE_VALVE);
- BeckhoffIoSubscribeUpdateVariable(WAFER_HOLDER_CLAMP);
- BeckhoffIoSubscribeUpdateVariable(N2_VALVE);
- BeckhoffIoSubscribeUpdateVariable(FILL_VALVE);
- BeckhoffIoSubscribeUpdateVariable(DRAIN_VALVE);
- }
- /// <summary>
- /// 初始化Operation
- /// </summary>
- private void InitializeOperation()
- {
- OP.Subscribe($"{Module}.ClampValveOn", (cmd, args) => { return WaferHolderClampValveOn(); });
- OP.Subscribe($"{Module}.ClampValveOff", (cmd, args) => { return WaferHolderClampValveOff(); });
- OP.Subscribe($"{Module}.N2ValveOn", (cmd, args) => { return N2ValveOn(); });
- OP.Subscribe($"{Module}.N2ValveOff", (cmd, args) => { return N2ValveOff(); });
- OP.Subscribe($"{Module}.FillValveOn", (cmd, args) => { return FillValveOn(); });
- OP.Subscribe($"{Module}.FillValveOff", (cmd, args) => { return FillValveOff(); });
- OP.Subscribe($"{Module}.DrainValveOn", (cmd, args) => { return DrainValveOn(); });
- OP.Subscribe($"{Module}.DrainValveOff", (cmd, args) => { return DrainValveOff(); });
- OP.Subscribe($"{Module}.WasteValveOn", (cmd, args) => { return WasteValveOff() ;});
- OP.Subscribe($"{Module}.WasteValveOff", (cmd, args) => { return WasteValveOn() ;});
- OP.Subscribe($"{Module}.ByPassInterLocks", (cms, args) => { _bypassInterLocks = (bool)(args[0]); return true; });
- OP.Subscribe($"{Module}.DisabledAction", DisabledOperation);
- OP.Subscribe($"{Module}.ManualAction", ManualOperation);
- OP.Subscribe($"{Module}.AutoAction", AutoOperation);
- OP.Subscribe($"{Module}.EngineeringModeAction", EngineeringModeOperation);
- OP.Subscribe($"{Module}.ProductionModeAction", ProductionModeOperation);
- }
- /// <summary>
- /// 订阅IO变量
- /// </summary>
- /// <param name="variable"></param>
- private void BeckhoffIoSubscribeUpdateVariable(string variable)
- {
- _variableInitializeDic[variable] = false;
- IOModuleManager.Instance.SubscribeModuleVariable(Module, variable, UpdateVariableValue);
- }
- /// <summary>
- /// 更新变量数值
- /// </summary>
- /// <param name="variable"></param>
- /// <param name="value"></param>
- private void UpdateVariableValue(string variable, object value)
- {
- if (!RinseData.IsDataInitialized)
- {
- RinseData.IsDataInitialized = true;
- }
- PropertyInfo property = RinseData.GetType().GetProperty(variable);
- if (property != null)
- {
- property.SetValue(RinseData, value);
- }
- if (_variableInitializeDic.ContainsKey(variable) && !_variableInitializeDic[variable])
- {
- _variableInitializeDic[variable] = true;
- }
- }
- /// <summary>
- /// 是否所有IO变量初始化完成
- /// </summary>
- /// <returns></returns>
- private bool AllIoVariableInitialized()
- {
- foreach (string item in _variableInitializeDic.Keys)
- {
- if (!_variableInitializeDic[item])
- {
- LOG.WriteLog(eEvent.ERR_DRYER, Module, $"{item} is not initialized");
- return false;
- }
- }
- return true;
- }
- #region Operation
- /// <summary>
- /// DisabledAction
- /// </summary>
- /// <param name="cmd"></param>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool DisabledOperation(string cmd, object[] args)
- {
- string currentOperation = "Disabled";
- RinseEntity rinseEntity = Singleton<RouteManager>.Instance.GetModule<RinseEntity>(Module);
- if (rinseEntity == null || _rinsePersistentValue == null) return false;
- if (_rinsePersistentValue.OperatingMode != "Disabled") rinseEntity.EnterInit();
- _rinsePersistentValue.OperatingMode = currentOperation;
- RinsePersistentManager.Instance.UpdatePersistentValue(Module);
- return true;
- }
- /// <summary>
- /// ManualAction
- /// </summary>
- /// <param name="cmd"></param>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool ManualOperation(string cmd, object[] args)
- {
- string currentOperation = "Manual";
- RinseEntity rinseEntity = Singleton<RouteManager>.Instance.GetModule<RinseEntity>(Module);
- if (rinseEntity == null || _rinsePersistentValue == null) return false;
- if (_rinsePersistentValue.OperatingMode == "Auto" && rinseEntity.IsBusy)
- {
- LOG.WriteLog(eEvent.ERR_RINSE, Module, $"{Module} is Busy, can't change to manual mode");
- return false;
- }
- if (_rinsePersistentValue.OperatingMode != "Manual") rinseEntity.EnterInit();
- _rinsePersistentValue.OperatingMode = currentOperation;
- RinsePersistentManager.Instance.UpdatePersistentValue(Module);
- return true;
- }
- /// <summary>
- /// AutoAction
- /// </summary>
- /// <param name="cmd"></param>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool AutoOperation(string cmd, object[] args)
- {
- string currentOperation = "Auto";
- RinseEntity rinseEntity = Singleton<RouteManager>.Instance.GetModule<RinseEntity>(Module);
- if (rinseEntity == null || _rinsePersistentValue == null) return false;
- if (_rinsePersistentValue.OperatingMode != "Auto") rinseEntity.EnterInit();
- _rinsePersistentValue.OperatingMode = currentOperation;
- RinsePersistentManager.Instance.UpdatePersistentValue(Module);
- return true;
- }
- /// <summary>
- /// EngineeringModeAction
- /// </summary>
- /// <param name="cmd"></param>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool EngineeringModeOperation(string cmd, object[] args)
- {
- string currentRecipeOperation = "Engineering";
- _rinsePersistentValue.RecipeOperatingMode = currentRecipeOperation;
- RinsePersistentManager.Instance.UpdatePersistentValue(Module);
- return true;
- }
- /// <summary>
- /// ProductionAction
- /// </summary>
- /// <param name="cmd"></param>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool ProductionModeOperation(string cmd, object[] args)
- {
- string currentRecipeOperation = "Production";
- _rinsePersistentValue.RecipeOperatingMode = currentRecipeOperation;
- RinsePersistentManager.Instance.UpdatePersistentValue(Module);
- return true;
- }
- #endregion
- /// <summary>
- /// 更新当前工艺小步骤
- /// </summary>
- /// <param name="tmp"></param>
- public void UpdateStateMachine(string tmp)
- {
- _currentStateMachine = tmp;
- }
- /// <summary>
- /// 更新当前工艺大步骤
- /// </summary>
- /// <param name="tmp"></param>
- public void UpdateStatus(string tmp)
- {
- _currentStatus = tmp;
- }
- #region Wafer Holder Clamp Valve
- /// <summary>
- /// Wafer Holder Clamp Valve On
- /// </summary>
- /// <returns></returns>
- public bool WaferHolderClampValveOn()
- {
- string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{WAFER_HOLDER_CLAMP}");
- return IOModuleManager.Instance.WriteIoValue(ioName, true);
- }
- /// <summary>
- /// Wafer Holder Clamp Valve Off
- /// </summary>
- /// <returns></returns>
- public bool WaferHolderClampValveOff()
- {
- string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{WAFER_HOLDER_CLAMP}");
- return IOModuleManager.Instance.WriteIoValue(ioName, false);
- }
- #endregion
- #region N2 Valve
- /// <summary>
- /// N2 Valve On
- /// </summary>
- /// <returns></returns>
- public bool N2ValveOn()
- {
- string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{N2_VALVE}");
- return IOModuleManager.Instance.WriteIoValue(ioName, true);
- }
- /// <summary>
- /// N2 Valve Off
- /// </summary>
- /// <returns></returns>
- public bool N2ValveOff()
- {
- string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{N2_VALVE}");
- return IOModuleManager.Instance.WriteIoValue(ioName, false);
- }
- #endregion
- #region Fill Valve
- /// <summary>
- /// Fill Valve On
- /// </summary>
- /// <returns></returns>
- public bool FillValveOn()
- {
- if(!_bypassInterLocks)
- {
- //Clamp Status必须为Clamped
- if(!_rinseData.WaferHolderClamp)
- {
- LOG.WriteLog(eEvent.ERR_RINSE, Module, "Clamp Status is not Clamped");
- return false;
- }
- }
- string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{FILL_VALVE}");
- return IOModuleManager.Instance.WriteIoValue(ioName, true);
- }
- /// <summary>
- /// Fill Valve Off
- /// </summary>
- /// <returns></returns>
- public bool FillValveOff()
- {
- string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{FILL_VALVE}");
- return IOModuleManager.Instance.WriteIoValue(ioName, false);
- }
- #endregion
- #region Drain Valve
- /// <summary>
- /// Drain Valve On
- /// </summary>
- /// <returns></returns>
- public bool DrainValveOn()
- {
- string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{DRAIN_VALVE}");
- return IOModuleManager.Instance.WriteIoValue(ioName, true);
- }
- /// <summary>
- /// Drain Valve Off
- /// </summary>
- /// <returns></returns>
- public bool DrainValveOff()
- {
- string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{DRAIN_VALVE}");
- return IOModuleManager.Instance.WriteIoValue(ioName, false);
- }
- #endregion
- #region Waste Valve
- /// <summary>
- /// Waste Valve On
- /// </summary>
- /// <returns></returns>
- public bool WasteValveOn()
- {
- string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{WASTE_VALVE}");
- return IOModuleManager.Instance.WriteIoValue(ioName, true);
- }
- /// <summary>
- /// Waste Valve Off(等价于Metal Valve On)
- /// </summary>
- /// <returns></returns>
- public bool WasteValveOff()
- {
- string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{WASTE_VALVE}");
- return IOModuleManager.Instance.WriteIoValue(ioName, false);
- }
- #endregion
- public void Monitor()
- {
- }
- public void Reset()
- {
- }
- public void Terminate()
- {
- }
- }
- }
|