RinseDevice.cs 19 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Log;
  4. using Aitex.Core.RT.OperationCenter;
  5. using Aitex.Core.RT.Routine;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Core.Util;
  8. using MECF.Framework.Common.Algorithm;
  9. using MECF.Framework.Common.Beckhoff.ModuleIO;
  10. using MECF.Framework.Common.CommonData.Prewet;
  11. using MECF.Framework.Common.Device.ResistivityProbe;
  12. using MECF.Framework.Common.Device.Rinse;
  13. using MECF.Framework.Common.Persistent.Prewet;
  14. using MECF.Framework.Common.Persistent.Rinse;
  15. using MECF.Framework.Common.RecipeCenter;
  16. using MECF.Framework.Common.ToolLayout;
  17. using MECF.Framework.Common.TwinCat;
  18. using System.Collections.Generic;
  19. using System.Reflection;
  20. using CyberX8_RT.Modules;
  21. using CyberX8_RT.Modules.Rinse;
  22. using CyberX8_RT.Devices.Resistivity;
  23. using CyberX8_RT.Modules.Prewet;
  24. using MECF.Framework.Common.IOCore;
  25. namespace CyberX8_RT.Devices.Rinse
  26. {
  27. public class RinseDevice : BaseDevice, IDevice
  28. {
  29. private enum RinseOperation
  30. {
  31. None
  32. }
  33. #region 常量
  34. private const string WATER_LEVEL="WaterLevel";
  35. private const string WAFER_HOLDER_CLAMP="WaferHolderClamp";
  36. private const string N2_VALVE="N2Valve";
  37. private const string FILL_VALVE="FillValve";
  38. private const string DRAIN_VALVE="DrainValve";
  39. private const string WASTE_VALVE="WasteValve";
  40. private const string RESISTIVITY="Resistivity";
  41. private const string PERSISTENT_VALUE = "PersistentValue";
  42. private const string RINSEDATA = "RinseData";
  43. private const string RINSEITEM = "RinseItem";
  44. private const string RESISTIVITYVALUE = "Resistivity";
  45. #endregion
  46. #region 内部变量
  47. /// <summary>
  48. /// 数据
  49. /// </summary>
  50. private RinseData _rinseData = new RinseData();
  51. /// <summary>
  52. /// Rinse 持久性数值对象
  53. /// </summary>
  54. private RinsePersistentValue _rinsePersistentValue;
  55. /// <summary>
  56. /// 变量是否初始化字典
  57. /// </summary>
  58. private Dictionary<string, bool> _variableInitializeDic = new Dictionary<string, bool>();
  59. /// <summary>
  60. /// ByPass Inter Locks
  61. /// </summary>
  62. private bool _bypassInterLocks = false;
  63. /// <summary>
  64. /// RinseItem
  65. /// </summary>
  66. private RinseItem _rinseItem = new RinseItem();
  67. /// <summary>
  68. /// 工艺当前执行小步骤
  69. /// </summary>
  70. private string _currentStateMachine = "Init";
  71. /// <summary>
  72. /// 工艺当前执行大步骤
  73. /// </summary>
  74. private string _currentStatus = "Init";
  75. /// <summary>
  76. /// 水阻值
  77. /// </summary>
  78. private double _resistivityValue;
  79. /// <summary>
  80. /// 水阻计控制器
  81. /// </summary>
  82. private ResistivityController _resistivityController;
  83. #endregion
  84. #region 属性
  85. /// <summary>
  86. /// Rinse数据
  87. /// </summary>
  88. public RinseData RinseData { get { return _rinseData; } }
  89. /// <summary>
  90. /// 所有io变量是否初始化
  91. /// </summary>
  92. public bool IOInitialized { get { return AllIoVariableInitialized(); } }
  93. /// <summary>
  94. /// 所有io变量是否初始化
  95. /// </summary>
  96. public RinseItem RinseItem { get { return _rinseItem; } }
  97. /// <summary>
  98. /// 当前状态机
  99. /// </summary>
  100. public string CurrentStateMachine { get { return _currentStateMachine; } }
  101. #endregion
  102. /// <summary>
  103. /// 构造函数
  104. /// </summary>
  105. /// <param name="moduleName"></param>
  106. /// <param name="name"></param>
  107. public RinseDevice(string moduleName) : base(moduleName, moduleName, moduleName, moduleName)
  108. {
  109. }
  110. /// <summary>
  111. /// 初始化
  112. /// </summary>
  113. /// <returns></returns>
  114. public bool Initialize()
  115. {
  116. SubscribeData();
  117. SubscribeValueAction();
  118. InitializeOperation();
  119. return true;
  120. }
  121. /// <summary>
  122. /// 订阅数据
  123. /// </summary>
  124. private void SubscribeData()
  125. {
  126. _rinsePersistentValue = RinsePersistentManager.Instance.GetRinsePersistentValue(Module);
  127. if (_rinsePersistentValue == null)
  128. {
  129. LOG.WriteLog(eEvent.ERR_RINSE, Module, "Persistent Value Object is not exist");
  130. }
  131. _rinseItem = RinseItemManager.Instance.GetRinseItem(Module);
  132. _resistivityController = DEVICE.GetDevice<ResistivityController>(RinseItem.ResistivityID);
  133. DATA.Subscribe($"{Module}.{PERSISTENT_VALUE}", () => _rinsePersistentValue,SubscriptionAttribute.FLAG.IgnoreSaveDB);
  134. DATA.Subscribe($"{Module}.{RINSEDATA}", () => _rinseData, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  135. DATA.Subscribe($"{Module}.CurrentStateMachine", () => _currentStateMachine, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  136. DATA.Subscribe($"{Module}.CurrentStatus", () => _currentStatus, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  137. DATA.Subscribe($"{Module}.Resistivity.ID", () => _resistivityController != null ? _resistivityController.Module : "", SubscriptionAttribute.FLAG.IgnoreSaveDB);
  138. DATA.Subscribe($"{Module}.{RESISTIVITYVALUE}", () => {
  139. if (_resistivityController != null)
  140. {
  141. string value = _resistivityController.ResisitivityValue;
  142. if(double.TryParse(value, out _resistivityValue))
  143. {
  144. return _resistivityValue;
  145. }
  146. else
  147. {
  148. return 0;
  149. }
  150. }
  151. else
  152. {
  153. return 0;
  154. }
  155. }, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  156. DATA.Subscribe($"{Module}.WaterLevel", () => RinseData.WaterLevel, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  157. DATA.Subscribe($"{Module}.DIFillEnable",()=>RinseData.FillValve, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  158. DATA.Subscribe($"{Module}.DrainEnable", () => RinseData.DrainValve, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  159. DATA.Subscribe($"{Module}.N2Enable",()=>RinseData.N2Valve, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  160. DATA.Subscribe($"{Module}.WaferShuttleClamped",()=>RinseData.WaferHolderClamp, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  161. DATA.Subscribe($"{Module}.WasteEnable", () => RinseData.WasteValve, SubscriptionAttribute.FLAG.IgnoreSaveDB);
  162. }
  163. /// <summary>
  164. /// 订阅变量数值发生变化
  165. /// </summary>
  166. private void SubscribeValueAction()
  167. {
  168. BeckhoffIoSubscribeUpdateVariable(WATER_LEVEL);
  169. BeckhoffIoSubscribeUpdateVariable(WASTE_VALVE);
  170. BeckhoffIoSubscribeUpdateVariable(WAFER_HOLDER_CLAMP);
  171. BeckhoffIoSubscribeUpdateVariable(N2_VALVE);
  172. BeckhoffIoSubscribeUpdateVariable(FILL_VALVE);
  173. BeckhoffIoSubscribeUpdateVariable(DRAIN_VALVE);
  174. }
  175. /// <summary>
  176. /// 初始化Operation
  177. /// </summary>
  178. private void InitializeOperation()
  179. {
  180. OP.Subscribe($"{Module}.ClampValveOn", (cmd, args) => { return WaferHolderClampValveOn(); });
  181. OP.Subscribe($"{Module}.ClampValveOff", (cmd, args) => { return WaferHolderClampValveOff(); });
  182. OP.Subscribe($"{Module}.N2ValveOn", (cmd, args) => { return N2ValveOn(); });
  183. OP.Subscribe($"{Module}.N2ValveOff", (cmd, args) => { return N2ValveOff(); });
  184. OP.Subscribe($"{Module}.FillValveOn", (cmd, args) => { return FillValveOn(); });
  185. OP.Subscribe($"{Module}.FillValveOff", (cmd, args) => { return FillValveOff(); });
  186. OP.Subscribe($"{Module}.DrainValveOn", (cmd, args) => { return DrainValveOn(); });
  187. OP.Subscribe($"{Module}.DrainValveOff", (cmd, args) => { return DrainValveOff(); });
  188. OP.Subscribe($"{Module}.WasteValveOn", (cmd, args) => { return WasteValveOff() ;});
  189. OP.Subscribe($"{Module}.WasteValveOff", (cmd, args) => { return WasteValveOn() ;});
  190. OP.Subscribe($"{Module}.ByPassInterLocks", (cms, args) => { _bypassInterLocks = (bool)(args[0]); return true; });
  191. OP.Subscribe($"{Module}.DisabledAction", DisabledOperation);
  192. OP.Subscribe($"{Module}.ManualAction", ManualOperation);
  193. OP.Subscribe($"{Module}.AutoAction", AutoOperation);
  194. OP.Subscribe($"{Module}.EngineeringModeAction", EngineeringModeOperation);
  195. OP.Subscribe($"{Module}.ProductionModeAction", ProductionModeOperation);
  196. }
  197. /// <summary>
  198. /// 订阅IO变量
  199. /// </summary>
  200. /// <param name="variable"></param>
  201. private void BeckhoffIoSubscribeUpdateVariable(string variable)
  202. {
  203. _variableInitializeDic[variable] = false;
  204. IOModuleManager.Instance.SubscribeModuleVariable(Module, variable, UpdateVariableValue);
  205. }
  206. /// <summary>
  207. /// 更新变量数值
  208. /// </summary>
  209. /// <param name="variable"></param>
  210. /// <param name="value"></param>
  211. private void UpdateVariableValue(string variable, object value)
  212. {
  213. if (!RinseData.IsDataInitialized)
  214. {
  215. RinseData.IsDataInitialized = true;
  216. }
  217. PropertyInfo property = RinseData.GetType().GetProperty(variable);
  218. if (property != null)
  219. {
  220. property.SetValue(RinseData, value);
  221. }
  222. if (_variableInitializeDic.ContainsKey(variable) && !_variableInitializeDic[variable])
  223. {
  224. _variableInitializeDic[variable] = true;
  225. }
  226. }
  227. /// <summary>
  228. /// 是否所有IO变量初始化完成
  229. /// </summary>
  230. /// <returns></returns>
  231. private bool AllIoVariableInitialized()
  232. {
  233. foreach (string item in _variableInitializeDic.Keys)
  234. {
  235. if (!_variableInitializeDic[item])
  236. {
  237. LOG.WriteLog(eEvent.ERR_DRYER, Module, $"{item} is not initialized");
  238. return false;
  239. }
  240. }
  241. return true;
  242. }
  243. #region Operation
  244. /// <summary>
  245. /// DisabledAction
  246. /// </summary>
  247. /// <param name="cmd"></param>
  248. /// <param name="param"></param>
  249. /// <returns></returns>
  250. private bool DisabledOperation(string cmd, object[] args)
  251. {
  252. string currentOperation = "Disabled";
  253. RinseEntity rinseEntity = Singleton<RouteManager>.Instance.GetModule<RinseEntity>(Module);
  254. if (rinseEntity == null || _rinsePersistentValue == null) return false;
  255. if (_rinsePersistentValue.OperatingMode != "Disabled") rinseEntity.EnterInit();
  256. _rinsePersistentValue.OperatingMode = currentOperation;
  257. RinsePersistentManager.Instance.UpdatePersistentValue(Module);
  258. return true;
  259. }
  260. /// <summary>
  261. /// ManualAction
  262. /// </summary>
  263. /// <param name="cmd"></param>
  264. /// <param name="param"></param>
  265. /// <returns></returns>
  266. private bool ManualOperation(string cmd, object[] args)
  267. {
  268. string currentOperation = "Manual";
  269. RinseEntity rinseEntity = Singleton<RouteManager>.Instance.GetModule<RinseEntity>(Module);
  270. if (rinseEntity == null || _rinsePersistentValue == null) return false;
  271. if (_rinsePersistentValue.OperatingMode == "Auto" && rinseEntity.IsBusy)
  272. {
  273. LOG.WriteLog(eEvent.ERR_RINSE, Module, $"{Module} is Busy, can't change to manual mode");
  274. return false;
  275. }
  276. if (_rinsePersistentValue.OperatingMode != "Manual") rinseEntity.EnterInit();
  277. _rinsePersistentValue.OperatingMode = currentOperation;
  278. RinsePersistentManager.Instance.UpdatePersistentValue(Module);
  279. return true;
  280. }
  281. /// <summary>
  282. /// AutoAction
  283. /// </summary>
  284. /// <param name="cmd"></param>
  285. /// <param name="param"></param>
  286. /// <returns></returns>
  287. private bool AutoOperation(string cmd, object[] args)
  288. {
  289. string currentOperation = "Auto";
  290. RinseEntity rinseEntity = Singleton<RouteManager>.Instance.GetModule<RinseEntity>(Module);
  291. if (rinseEntity == null || _rinsePersistentValue == null) return false;
  292. if (_rinsePersistentValue.OperatingMode != "Auto") rinseEntity.EnterInit();
  293. _rinsePersistentValue.OperatingMode = currentOperation;
  294. RinsePersistentManager.Instance.UpdatePersistentValue(Module);
  295. return true;
  296. }
  297. /// <summary>
  298. /// EngineeringModeAction
  299. /// </summary>
  300. /// <param name="cmd"></param>
  301. /// <param name="param"></param>
  302. /// <returns></returns>
  303. private bool EngineeringModeOperation(string cmd, object[] args)
  304. {
  305. string currentRecipeOperation = "Engineering";
  306. _rinsePersistentValue.RecipeOperatingMode = currentRecipeOperation;
  307. RinsePersistentManager.Instance.UpdatePersistentValue(Module);
  308. return true;
  309. }
  310. /// <summary>
  311. /// ProductionAction
  312. /// </summary>
  313. /// <param name="cmd"></param>
  314. /// <param name="param"></param>
  315. /// <returns></returns>
  316. private bool ProductionModeOperation(string cmd, object[] args)
  317. {
  318. string currentRecipeOperation = "Production";
  319. _rinsePersistentValue.RecipeOperatingMode = currentRecipeOperation;
  320. RinsePersistentManager.Instance.UpdatePersistentValue(Module);
  321. return true;
  322. }
  323. #endregion
  324. /// <summary>
  325. /// 更新当前工艺小步骤
  326. /// </summary>
  327. /// <param name="tmp"></param>
  328. public void UpdateStateMachine(string tmp)
  329. {
  330. _currentStateMachine = tmp;
  331. }
  332. /// <summary>
  333. /// 更新当前工艺大步骤
  334. /// </summary>
  335. /// <param name="tmp"></param>
  336. public void UpdateStatus(string tmp)
  337. {
  338. _currentStatus = tmp;
  339. }
  340. #region Wafer Holder Clamp Valve
  341. /// <summary>
  342. /// Wafer Holder Clamp Valve On
  343. /// </summary>
  344. /// <returns></returns>
  345. public bool WaferHolderClampValveOn()
  346. {
  347. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{WAFER_HOLDER_CLAMP}");
  348. return IOModuleManager.Instance.WriteIoValue(ioName, true);
  349. }
  350. /// <summary>
  351. /// Wafer Holder Clamp Valve Off
  352. /// </summary>
  353. /// <returns></returns>
  354. public bool WaferHolderClampValveOff()
  355. {
  356. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{WAFER_HOLDER_CLAMP}");
  357. return IOModuleManager.Instance.WriteIoValue(ioName, false);
  358. }
  359. #endregion
  360. #region N2 Valve
  361. /// <summary>
  362. /// N2 Valve On
  363. /// </summary>
  364. /// <returns></returns>
  365. public bool N2ValveOn()
  366. {
  367. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{N2_VALVE}");
  368. return IOModuleManager.Instance.WriteIoValue(ioName, true);
  369. }
  370. /// <summary>
  371. /// N2 Valve Off
  372. /// </summary>
  373. /// <returns></returns>
  374. public bool N2ValveOff()
  375. {
  376. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{N2_VALVE}");
  377. return IOModuleManager.Instance.WriteIoValue(ioName, false);
  378. }
  379. #endregion
  380. #region Fill Valve
  381. /// <summary>
  382. /// Fill Valve On
  383. /// </summary>
  384. /// <returns></returns>
  385. public bool FillValveOn()
  386. {
  387. if(!_bypassInterLocks)
  388. {
  389. //Clamp Status必须为Clamped
  390. if(!_rinseData.WaferHolderClamp)
  391. {
  392. LOG.WriteLog(eEvent.ERR_RINSE, Module, "Clamp Status is not Clamped");
  393. return false;
  394. }
  395. }
  396. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{FILL_VALVE}");
  397. return IOModuleManager.Instance.WriteIoValue(ioName, true);
  398. }
  399. /// <summary>
  400. /// Fill Valve Off
  401. /// </summary>
  402. /// <returns></returns>
  403. public bool FillValveOff()
  404. {
  405. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{FILL_VALVE}");
  406. return IOModuleManager.Instance.WriteIoValue(ioName, false);
  407. }
  408. #endregion
  409. #region Drain Valve
  410. /// <summary>
  411. /// Drain Valve On
  412. /// </summary>
  413. /// <returns></returns>
  414. public bool DrainValveOn()
  415. {
  416. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{DRAIN_VALVE}");
  417. return IOModuleManager.Instance.WriteIoValue(ioName, true);
  418. }
  419. /// <summary>
  420. /// Drain Valve Off
  421. /// </summary>
  422. /// <returns></returns>
  423. public bool DrainValveOff()
  424. {
  425. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{DRAIN_VALVE}");
  426. return IOModuleManager.Instance.WriteIoValue(ioName, false);
  427. }
  428. #endregion
  429. #region Waste Valve
  430. /// <summary>
  431. /// Waste Valve On
  432. /// </summary>
  433. /// <returns></returns>
  434. public bool WasteValveOn()
  435. {
  436. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{WASTE_VALVE}");
  437. return IOModuleManager.Instance.WriteIoValue(ioName, true);
  438. }
  439. /// <summary>
  440. /// Waste Valve Off(等价于Metal Valve On)
  441. /// </summary>
  442. /// <returns></returns>
  443. public bool WasteValveOff()
  444. {
  445. string ioName = BeckhoffModuleIOManager.Instance.GetIoNameByInnerModuleName($"{Module}.{WASTE_VALVE}");
  446. return IOModuleManager.Instance.WriteIoValue(ioName, false);
  447. }
  448. #endregion
  449. public void Monitor()
  450. {
  451. }
  452. public void Reset()
  453. {
  454. }
  455. public void Terminate()
  456. {
  457. }
  458. }
  459. }