CyberX8/CyberX8_RT/Devices/Loader/LoaderUnloadRoutine.cs

using Aitex.Core.RT.Device;
using Aitex.Core.RT.Log;
using Aitex.Core.RT.Routine;
using Aitex.Core.Util;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.Routine;
using MECF.Framework.Common.Utilities;
using CyberX8_Core;
using CyberX8_RT.Devices.AXIS;
using CyberX8_RT.Devices.AXIS.CANOpen;
using CyberX8_RT.Modules.PUF;
using CyberX8_RT.Modules;
using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;
using MECF.Framework.Common.CommonData.Loader;
using CyberX8_RT.Modules.Transporter;

namespace CyberX8_RT.Devices.Loader
{
    public class LoaderUnloadRoutine : RoutineBase, IRoutine
    {
        private enum UnloadStep
        {
            CheckPreCondition,
            WSClampOn,
            WSSideClampOn,
            WSSideClampOnCheck,
            TranslateBladderOff,
            TranslateBladderOffCheck,
            CRSGotoSetUp,
            CRSGotoSetUpWait,
            BernoulliBladderOn,
            BernoulliBladderOnCheck,
            BernoulliN2On,
            TransBladderOn,
            TransBladderOnCheck,
            TranslateHighOff,
            TranslateHighOffCheck,
            CRSVacuumOn,
            CRSVacuumOnCheck,
            WSBladderOn,
            WSBladderOnCheck,
            ConditionCRSVacuumLevel,
            ConditionCRSVacuumLevelCheck,
            CRSGotoUnlock,
            CRSGotoUnlockWait,
            ReTranslateBladderOff,
            ReTranslateBladderOffCheck,
            ReTranslateHighOff,
            ReTranslateHighOffCheck,
            DoorUnlock,
            DoorUnlockCheck,
            ShuttleGotoOpen,
            ShuttleGotoOpenWait,
            VacuumLevel,
            VacuumLevelCheck,
            TiltGotoHori,
            TiltGotoHoriCheck,
            BernoulliBladderOff,
            BernoulliBladderOffCheck,
            ReBernoulliBladderOn,
            ReBernoulliBladderOnCheck,
            BernoulliN2Off,
            End
        }
        #region 内部变量
        private string _side = "";
        private LoaderCommonWaferHolderSideClampRoutine _waferHolderSideClampRoutine;
        private LoaderSideTransBladderRoutine _transBladderRoutine;
        private JetAxisBase _crsAxis;
        private LoaderSideBernoulliBladderRoutine _bernoulliBladderRoutine;
        private LoaderSideTransHighRoutine _transHightRoutine;
        private LoaderSideVacuumRoutine _vacuumRoutine;
        private LoaderSideVacuumLevelCheckRoutine _vacuumLevelCheckRoutine;
        private LoaderSideWhBladderRoutine _whBladderRoutine;
        private LoaderSideUnloadVacuumLevelCheckRoutine _unloadVacuumLevelCheckRoutine;
        private LoaderSideDoorLockRoutine _doorLockRoutine;
        private JetAxisBase _shuttleAxis;
        private JetAxisBase _tiltAxis;
        private JetAxisBase _rotationAxis;
        private LoaderSideDevice _sideDevice;
        private LoaderCommonDevice _loaderCommonDevice;
        #endregion
        /// <summary>
        /// 构造函数
        /// </summary>
        /// <param name="module"></param>
        public LoaderUnloadRoutine(string module,string side) : base(module)
        {
            _side = side;
        }
        /// <summary>
        /// 中止
        /// </summary>
        public void Abort()
        {
            Runner.Stop("Manual Abort");
        }
        /// <summary>
        /// 监控
        /// </summary>
        /// <returns></returns>
        public RState Monitor()
        {
            Runner.Run(UnloadStep.CheckPreCondition,CheckPreCondition,_delay_1ms)
                //1.0 WS Clamp On
                .Run(UnloadStep.WSClampOn, WaferHolderClampOn, _delay_1ms)
                //1.1 WSSideClampOn
                .Run(UnloadStep.WSSideClampOn, () => { return _waferHolderSideClampRoutine.Start(true) == RState.Running; }, _delay_1ms)
                .WaitWithStopCondition(UnloadStep.WSSideClampOnCheck, () => { return CommonFunction.CheckRoutineEndState(_waferHolderSideClampRoutine); }, 
                    ()=>CheckRoutineStopStatus(_waferHolderSideClampRoutine,"Wafer Shuttle Side Clamp on failed"))
                //1.2 TranslateBladderOff
                .Run(UnloadStep.TranslateBladderOff, () => { return _transBladderRoutine.Start(false) == RState.Running; }, _delay_1ms)
                .WaitWithStopCondition(UnloadStep.TranslateBladderOffCheck, () => { return CommonFunction.CheckRoutineEndState(_transBladderRoutine); },
                    ()=>CheckRoutineStopStatus(_transBladderRoutine,"TransBladder off failed"))
                //1.3 CRS Goto Setup
                .Run(UnloadStep.CRSGotoSetUp, () => { return AxisPosition(_crsAxis,"Setup"); }, NullFun, _delay_1ms)
                .WaitWithStopCondition(UnloadStep.CRSGotoSetUpWait, () => { return _crsAxis.Status == RState.End; }, 
                    ()=>CheckAxisMotionStopStatus(_crsAxis))
                //1.4 BernoulliBladderOn
                .Run(UnloadStep.BernoulliBladderOn, () => { return _bernoulliBladderRoutine.Start(true) == RState.Running; }, _delay_1ms)
                .WaitWithStopCondition(UnloadStep.BernoulliBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliBladderRoutine); }, 
                    () => CheckRoutineStopStatus(_bernoulliBladderRoutine, "BernoulliBladder On failed"))
                //1.5 BernoulliN2 On
                .Run(UnloadStep.BernoulliN2On, BernoulliN2On, _delay_1ms)
                //1.6 Trans Bladder On
                .Run(UnloadStep.TransBladderOn, () => { return _transBladderRoutine.Start(true) == RState.Running; }, _delay_1ms)
                .WaitWithStopCondition(UnloadStep.TransBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_transBladderRoutine); }, 
                    () => CheckRoutineStopStatus(_transBladderRoutine,"TransBladder On failed"))
                //1.6 Trans High Off
                .Run(UnloadStep.TranslateHighOff, () => { return _transHightRoutine.Start(false) == RState.Running; }, _delay_1ms)
                .WaitWithStopCondition(UnloadStep.TranslateHighOffCheck, () => { return CommonFunction.CheckRoutineEndState(_transHightRoutine); }, 
                    () => CheckRoutineStopStatus(_transHightRoutine,"TransHigh off failed"))
                //1.7 CRS Vacuum On
                .Run(UnloadStep.CRSVacuumOn, () => { return _vacuumRoutine.Start(true) == RState.Running; }, _delay_1ms)
                .WaitWithStopCondition(UnloadStep.CRSVacuumOnCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumRoutine); }, 
                    () => CheckRoutineStopStatus(_vacuumRoutine,"Vaccum On failed"))
                //1.8 WS Bladder On
                .Run(UnloadStep.WSBladderOn, () => { return _whBladderRoutine.Start(true) == RState.Running; }, _delay_1ms)
                .WaitWithStopCondition(UnloadStep.WSBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); }, 
                    () => CheckRoutineStopStatus(_whBladderRoutine,"WSBladder On failed"))
                //1.9 condition vacuum level check
                .Run(UnloadStep.ConditionCRSVacuumLevel, () => { return _unloadVacuumLevelCheckRoutine.Start(true) == RState.Running; }, _delay_1ms)
                .WaitWithStopCondition(UnloadStep.ConditionCRSVacuumLevelCheck, () => { return CommonFunction.CheckRoutineEndState(_unloadVacuumLevelCheckRoutine); },
                    () => CheckRoutineStopStatus(_unloadVacuumLevelCheckRoutine," Vacuum Level Check failed"))
                //2.0 CRS Goto Unlock
                .Run(UnloadStep.CRSGotoUnlock, () => { return AxisPosition(_crsAxis,"Unlock"); }, NullFun, _delay_1ms)
                .WaitWithStopCondition(UnloadStep.CRSGotoUnlockWait, () => { return _crsAxis.Status == RState.End; }, 
                    () => CheckAxisMotionStopStatus(_crsAxis))
                //2.1 Trans Bladder Off
                .Run(UnloadStep.ReTranslateBladderOff, () => { return _transBladderRoutine.Start(false) == RState.Running; }, _delay_1ms)
                .WaitWithStopCondition(UnloadStep.ReTranslateBladderOffCheck, () => { return CommonFunction.CheckRoutineEndState(_transBladderRoutine); }, 
                    () => CheckRoutineStopStatus(_transBladderRoutine,"ReTransBladder Off failed"))
                //2.2 Trans High Off
                .Run(UnloadStep.ReTranslateHighOff, () => { return _transHightRoutine.Start(false) == RState.Running; }, _delay_1ms)
                .WaitWithStopCondition(UnloadStep.ReTranslateHighOffCheck, () => { return CommonFunction.CheckRoutineEndState(_transHightRoutine); },
                    () => CheckRoutineStopStatus(_transHightRoutine,"ReTransHigh Off failed"))
                //2.3 Dor Lock On
                .Run(UnloadStep.DoorUnlock, () => { return _doorLockRoutine.Start(false) == RState.Running; }, _delay_1ms)
                .WaitWithStopCondition(UnloadStep.DoorUnlockCheck, () => { return CommonFunction.CheckRoutineEndState(_doorLockRoutine); }, 
                    () => CheckRoutineStopStatus(_doorLockRoutine,"door unlock failed"))
                //2.4 Shuttle Goto OPEN
                .Run(UnloadStep.ShuttleGotoOpen, () => { return AxisPosition(_shuttleAxis,"OPEN"); }, NullFun, _delay_1ms)
                .WaitWithStopCondition(UnloadStep.ShuttleGotoOpenWait, () => { return _shuttleAxis.Status == RState.End; }, 
                    () => CheckAxisMotionStopStatus(_shuttleAxis))
                //2.5 CRS Vacuum Check
                .Run(UnloadStep.VacuumLevel, () => { return _vacuumLevelCheckRoutine.Start(true) == RState.Running; }, _delay_1ms)
                .WaitWithStopCondition(UnloadStep.VacuumLevelCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumLevelCheckRoutine); }, 
                    () => CheckRoutineStopStatus(_vacuumLevelCheckRoutine,"Vacuum Level check failed"))
                //2.6 Tilt Goto HORI
                .Run(UnloadStep.TiltGotoHori, () => { return AxisPosition(_tiltAxis,"HORI"); }, NullFun, _delay_1ms)
                .WaitWithStopCondition(UnloadStep.TiltGotoHoriCheck, () => { return _tiltAxis.Status == RState.End; }, 
                    () => CheckAxisMotionStopStatus(_tiltAxis))
                //2.7 BernoulliBladderOff
                .Run(UnloadStep.BernoulliBladderOff, () => { return _bernoulliBladderRoutine.Start(false) == RState.Running; }, _delay_1ms)
                .WaitWithStopCondition(UnloadStep.BernoulliBladderOffCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliBladderRoutine); }, 
                    () => CheckRoutineStopStatus(_bernoulliBladderRoutine,"BernoulliBladder Off failed"))
                //2.8 Re BernoulliBladderOn
                .Run(UnloadStep.ReBernoulliBladderOn, () => { return _bernoulliBladderRoutine.Start(true) == RState.Running; }, _delay_1ms)
                .WaitWithStopCondition(UnloadStep.ReBernoulliBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliBladderRoutine); },
                    () => CheckRoutineStopStatus(_bernoulliBladderRoutine, "BernoulliBladder On failed"))
                //2.9 Bernoulli N2 Off
                .Run(UnloadStep.BernoulliN2Off, BernoulliN2Off, _delay_1ms)
                .End(UnloadStep.End, NullFun, 10);
            return Runner.Status;
        }
        /// <summary>
        /// Wafer Holder Clamp On
        /// </summary>
        /// <returns></returns>
        private bool WaferHolderClampOn()
        {
            bool result = _loaderCommonDevice.WaferHolderClampOnAction();
            if(!result)
            {
                NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle Clamp on faied", 0);
            }
            return result;
        }
        /// <summary>
        /// 检验TranslateBladderOff异常状态
        /// </summary>
        /// <returns></returns>
        private bool CheckRoutineStopStatus(IRoutine routine,string error)
        {
            bool result = CommonFunction.CheckRoutineStopState(routine);
            if (result)
            {
                NotifyError(eEvent.ERR_LOADER, $"{error}", 0);
            }
            return result;
        }
        /// <summary>
        /// Axis goto position
        /// </summary>
        /// <param name="axis"></param>
        /// <param name="station"></param>
        /// <returns></returns>
        private bool AxisPosition(JetAxisBase axis,string station)
        {
            bool result = axis.PositionStation(station);
            if (!result)
            {
                NotifyError(eEvent.ERR_LOADER, $"{axis.Module} goto {station} failed", 0);
            }
            return result;
        }
        /// <summary>
        /// 检验电机运动异常状态
        /// </summary>
        /// <param name="axis"></param>
        /// <returns></returns>
        private bool CheckAxisMotionStopStatus(JetAxisBase axis)
        {
            bool result = axis.Status == RState.Failed || axis.Status == RState.Timeout;
            if (result)
            {
                NotifyError(eEvent.ERR_LOADER, $"{axis.Module} motion failed", 0);
            }
            return result;
        }
        /// <summary>
        /// BerolliN2 On
        /// </summary>
        /// <returns></returns>
        private bool BernoulliN2On()
        {
            bool result= _sideDevice.BernoulliN2OnAction("", null);
            if (!result)
            {
                NotifyError(eEvent.ERR_LOADER, $"BernoulliN2 On failed", 0);
            }
            return result;
        }
        /// <summary>
        /// BernoulliN2Off
        /// </summary>
        /// <returns></returns>
        private bool BernoulliN2Off()
        {
            bool result = _sideDevice.BernoulliN2OffAction("", null);
            if (!result)
            {
                NotifyError(eEvent.ERR_LOADER, "BernoulliN2 Off failed", 0);
            }
            return result;
        }
        /// <summary>
        /// 启动
        /// </summary>
        /// <param name="objs"></param>
        /// <returns></returns>
        /// <exception cref="NotImplementedException"></exception>
        public RState Start(params object[] objs)
        {
            _shuttleAxis = GetShuttleAxis();
            _crsAxis = GetCrsAxis();
            _tiltAxis = GetTiltAxis();
            _loaderCommonDevice = DEVICE.GetDevice<LoaderCommonDevice>($"Loader1.Common");
            _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.Rotation");
            _sideDevice = DEVICE.GetDevice<LoaderSideDevice>($"{Module}.{_side}");
            _waferHolderSideClampRoutine = new LoaderCommonWaferHolderSideClampRoutine($"{Module}");
            _vacuumRoutine = new LoaderSideVacuumRoutine($"{Module}.{_side}");
            _vacuumLevelCheckRoutine = new LoaderSideVacuumLevelCheckRoutine($"{Module}.{_side}");
            _unloadVacuumLevelCheckRoutine = new LoaderSideUnloadVacuumLevelCheckRoutine($"{Module}.{_side}");
            _doorLockRoutine = new LoaderSideDoorLockRoutine($"{Module}.{_side}");
            _whBladderRoutine = new LoaderSideWhBladderRoutine($"{Module}.{_side}");
            _transHightRoutine = new LoaderSideTransHighRoutine($"{Module}.{_side}");
            _bernoulliBladderRoutine = new LoaderSideBernoulliBladderRoutine($"{Module}.{_side}");
            _transBladderRoutine = new LoaderSideTransBladderRoutine($"{Module}.{_side}");
            Runner.Start(Module, $"Unload {_side}");
            return RState.Running;
        }
        /// <summary>
        /// 获取Shuttle轴对象
        /// </summary>
        /// <returns></returns>
        private JetAxisBase GetShuttleAxis()
        {
            switch (_side)
            {
                case "SideA":
                    return DEVICE.GetDevice<JetAxisBase>($"{Module}.ShuttleA");
                default:
                    return DEVICE.GetDevice<JetAxisBase>($"{Module}.ShuttleB");
            }
        }
        /// <summary>
        /// 获取CRS轴对象
        /// </summary>
        /// <returns></returns>
        private JetAxisBase GetCrsAxis()
        {
            switch (_side)
            {
                case "SideA":
                    return DEVICE.GetDevice<JetAxisBase>($"{Module}.LSA");
                default:
                    return DEVICE.GetDevice<JetAxisBase>($"{Module}.LSB");
            }
        }
        /// <summary>
        /// 获取Tilt轴对象
        /// </summary>
        /// <returns></returns>
        private JetAxisBase GetTiltAxis()
        {
            switch (_side)
            {
                case "SideA":
                    return DEVICE.GetDevice<JetAxisBase>($"{Module}.TiltA");
                default:
                    return DEVICE.GetDevice<JetAxisBase>($"{Module}.TiltB");
            }
        }

        /// <summary>
        /// 检验前置条件
        /// </summary>
        /// <returns></returns>
        private bool CheckPreCondition()
        {
            if (!CheckHomeCondition())
            {
                return false;
            }
            if (!CheckUnloadAxisCondition())
            {
                return false;
            }

            if (!UnloadStatusCheck())
            {
                return false;
            }

            if (!UnloadCRSVacuumCheck())
            {
                return false;
            }
            return true;
        }

        /// <summary>
        /// 检验Home条件
        /// </summary>
        /// <returns></returns>
        private bool CheckHomeCondition()
        {
            //检验PUF、Loader Transporter,Robot均Homed
            if (ModuleHelper.IsInstalled(ModuleName.PUF1))
            {
                PUFEntity puf1Entity = Singleton<RouteManager>.Instance.GetModule<PUFEntity>(ModuleName.PUF1.ToString());
                if (!puf1Entity.IsHomed)
                {
                    NotifyError(eEvent.ERR_LOADER, "PUF1 is not homed",-1);
                    return false;
                }
            }
            if (ModuleHelper.IsInstalled(ModuleName.PUF2))
            {
                PUFEntity puf2Entity = Singleton<RouteManager>.Instance.GetModule<PUFEntity>(ModuleName.PUF2.ToString());

                if (!puf2Entity.IsHomed)
                {
                    NotifyError(eEvent.ERR_LOADER,"PUF2 is not homed",-1);
                    return false;
                }
            }
            if (ModuleHelper.IsInstalled(ModuleName.Transporter2))
            {
                TransporterEntity loaderTransportEntity = Singleton<RouteManager>.Instance.GetModule<TransporterEntity>(ModuleName.Transporter2.ToString());
                if (!loaderTransportEntity.IsHomed)
                {
                    NotifyError(eEvent.ERR_LOADER, "Loader Transporter is not homed",-1);
                    return false;
                }
            }
            return true;
        }

        /// <summary>
        /// 检验Axis我们的
        /// </summary>
        /// <param name="side"></param>
        /// <returns></returns>
        private bool CheckUnloadAxisCondition()
        {
            if (!_rotationAxis.IsHomed)
            {
                NotifyError(eEvent.ERR_LOADER, $"rotation is not homed",-1);
                return false;
            }
            if (!_shuttleAxis.IsHomed)
            {
                NotifyError(eEvent.ERR_LOADER, $"{_shuttleAxis.Name} is not homed", -1);
                return false;
            }
            if (!_tiltAxis.IsHomed)
            {
                NotifyError(eEvent.ERR_LOADER, $"{_tiltAxis.Name} is not homed",-1);
                return false;
            }
            if (!_crsAxis.IsHomed)
            {
                NotifyError(eEvent.ERR_LOADER, $"{_crsAxis.Name} is not homed", -1);
                return false;
            }
            double rotationPosition = _rotationAxis.MotionData.MotorPosition;
            if (!_rotationAxis.CheckPositionIsInStation(rotationPosition, "LOAD") &&
                !_rotationAxis.CheckPositionIsInStation(rotationPosition, "SERVICEB"))
            {
                NotifyError(eEvent.ERR_LOADER, $"rotation {rotationPosition} not in LOAD and SERVICEB",-1);
                return false;
            }
            double shuttlePosition=_shuttleAxis.MotionData.MotorPosition;
            if (!_shuttleAxis.CheckPositionIsInStation(shuttlePosition, "CLOSED"))
            {
                NotifyError(eEvent.ERR_LOADER, $"shuttle {shuttlePosition} not in CLOSE", -1);
                return false;
            }
            double tiltPosition = _tiltAxis.MotionData.MotorPosition;
            if (!_tiltAxis.CheckPositionIsInStation(tiltPosition, "VERT"))
            {
                NotifyError(eEvent.ERR_LOADER, $"tilt {tiltPosition} not in VERT", -1);
                return false;
            }
            double crsPosition = _crsAxis.MotionData.MotorPosition;
            if (_crsAxis.CheckPositionIsEmpty(crsPosition))
            {
                NotifyError(eEvent.ERR_LOADER, $"crs {crsPosition} not at station", -1);
                return false;
            }
            return true;
        }

        /// <summary>
        /// Unload Status Check
        /// </summary>
        /// <param name="side"></param>
        /// <returns></returns>
        private bool UnloadStatusCheck()
        {
            //Facility:CDA,N2,Vaccum均Enable且在正常范围

            //Side WaferPresent
            LoaderSideData sideData = _sideDevice.SideData;
            //if (sideData.WaferPresent)
            //{
            //    NotifyError(eEvent.ERR_LOADER, "side wafer is not present");
            //    return false;
            //}
            if (sideData.DoorLowerUnlocked || sideData.DoorUpperUnlocked)
            {
                NotifyError(eEvent.ERR_LOADER, "Door Lock is off", -1);
                return false;
            }
            return true;
        }
        /// <summary>
        /// CRS Vacuum Check
        /// </summary>
        /// <param name="side"></param>
        /// <returns></returns>
        private bool UnloadCRSVacuumCheck()
        {
            //CRS Vacuum检验
            LoaderSideData sideData = _sideDevice.SideData;
            if (sideData.CRSVacuum)
            {
                NotifyError(eEvent.ERR_LOADER, "LS Vacuum is on",-1);
                return false;
            }
            //WS Bladder
            if (sideData.WHBladder)
            {
                NotifyError(eEvent.ERR_LOADER, "WS Bladder is on", -1);
                return false;
            }
            //Translate Bladder/High Pres,且Sensor处于Retracted
            if (sideData.TransBladder)
            {
                NotifyError(eEvent.ERR_LOADER, "TransBladder is on",-1);
                return false;
            }
            if (sideData.TransHigh)
            {
                NotifyError(eEvent.ERR_LOADER, "Trans High is on", -1);
                return false;
            }
            //Bernoulli N2
            if (sideData.BernoulliN2)
            {
                NotifyError(eEvent.ERR_LOADER, "Bernoulli N2 is on",-1);
                return false;
            }
            //Wafer Shuttle Present
            LoaderCommonData commonData = _loaderCommonDevice.CommonData;
            if (!commonData.WaferHolderPresent)
            {
                NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle is absent", -1);
                return false;
            }
            //Drip Tray Fluid
            if (commonData.DripTrayFluid)
            {
                NotifyError(eEvent.ERR_LOADER, "Drip Tray Fluid is on",-1);
                return false;
            }
            return true;
        }
    }
}