using Aitex.Core.RT.Device; using Aitex.Core.RT.Log; using Aitex.Core.RT.Routine; using Aitex.Core.Util; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.Routine; using MECF.Framework.Common.Utilities; using CyberX8_Core; using CyberX8_RT.Devices.AXIS; using CyberX8_RT.Devices.AXIS.CANOpen; using CyberX8_RT.Modules.PUF; using CyberX8_RT.Modules; using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; using MECF.Framework.Common.CommonData.Loader; using CyberX8_RT.Modules.Transporter; namespace CyberX8_RT.Devices.Loader { public class LoaderUnloadRoutine : RoutineBase, IRoutine { private enum UnloadStep { CheckPreCondition, WSClampOn, WSSideClampOn, WSSideClampOnCheck, TranslateBladderOff, TranslateBladderOffCheck, CRSGotoSetUp, CRSGotoSetUpWait, BernoulliBladderOn, BernoulliBladderOnCheck, BernoulliN2On, TransBladderOn, TransBladderOnCheck, TranslateHighOff, TranslateHighOffCheck, CRSVacuumOn, CRSVacuumOnCheck, WSBladderOn, WSBladderOnCheck, ConditionCRSVacuumLevel, ConditionCRSVacuumLevelCheck, CRSGotoUnlock, CRSGotoUnlockWait, ReTranslateBladderOff, ReTranslateBladderOffCheck, ReTranslateHighOff, ReTranslateHighOffCheck, DoorUnlock, DoorUnlockCheck, ShuttleGotoOpen, ShuttleGotoOpenWait, VacuumLevel, VacuumLevelCheck, TiltGotoHori, TiltGotoHoriCheck, BernoulliBladderOff, BernoulliBladderOffCheck, ReBernoulliBladderOn, ReBernoulliBladderOnCheck, BernoulliN2Off, End } #region 内部变量 private string _side = ""; private LoaderCommonWaferHolderSideClampRoutine _waferHolderSideClampRoutine; private LoaderSideTransBladderRoutine _transBladderRoutine; private JetAxisBase _crsAxis; private LoaderSideBernoulliBladderRoutine _bernoulliBladderRoutine; private LoaderSideTransHighRoutine _transHightRoutine; private LoaderSideVacuumRoutine _vacuumRoutine; private LoaderSideVacuumLevelCheckRoutine _vacuumLevelCheckRoutine; private LoaderSideWhBladderRoutine _whBladderRoutine; private LoaderSideUnloadVacuumLevelCheckRoutine _unloadVacuumLevelCheckRoutine; private LoaderSideDoorLockRoutine _doorLockRoutine; private JetAxisBase _shuttleAxis; private JetAxisBase _tiltAxis; private JetAxisBase _rotationAxis; private LoaderSideDevice _sideDevice; private LoaderCommonDevice _loaderCommonDevice; #endregion /// /// 构造函数 /// /// public LoaderUnloadRoutine(string module,string side) : base(module) { _side = side; } /// /// 中止 /// public void Abort() { Runner.Stop("Manual Abort"); } /// /// 监控 /// /// public RState Monitor() { Runner.Run(UnloadStep.CheckPreCondition,CheckPreCondition,_delay_1ms) //1.0 WS Clamp On .Run(UnloadStep.WSClampOn, WaferHolderClampOn, _delay_1ms) //1.1 WSSideClampOn .Run(UnloadStep.WSSideClampOn, () => { return _waferHolderSideClampRoutine.Start(true) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(UnloadStep.WSSideClampOnCheck, () => { return CommonFunction.CheckRoutineEndState(_waferHolderSideClampRoutine); }, ()=>CheckRoutineStopStatus(_waferHolderSideClampRoutine,"Wafer Shuttle Side Clamp on failed")) //1.2 TranslateBladderOff .Run(UnloadStep.TranslateBladderOff, () => { return _transBladderRoutine.Start(false) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(UnloadStep.TranslateBladderOffCheck, () => { return CommonFunction.CheckRoutineEndState(_transBladderRoutine); }, ()=>CheckRoutineStopStatus(_transBladderRoutine,"TransBladder off failed")) //1.3 CRS Goto Setup .Run(UnloadStep.CRSGotoSetUp, () => { return AxisPosition(_crsAxis,"Setup"); }, NullFun, _delay_1ms) .WaitWithStopCondition(UnloadStep.CRSGotoSetUpWait, () => { return _crsAxis.Status == RState.End; }, ()=>CheckAxisMotionStopStatus(_crsAxis)) //1.4 BernoulliBladderOn .Run(UnloadStep.BernoulliBladderOn, () => { return _bernoulliBladderRoutine.Start(true) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(UnloadStep.BernoulliBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliBladderRoutine); }, () => CheckRoutineStopStatus(_bernoulliBladderRoutine, "BernoulliBladder On failed")) //1.5 BernoulliN2 On .Run(UnloadStep.BernoulliN2On, BernoulliN2On, _delay_1ms) //1.6 Trans Bladder On .Run(UnloadStep.TransBladderOn, () => { return _transBladderRoutine.Start(true) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(UnloadStep.TransBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_transBladderRoutine); }, () => CheckRoutineStopStatus(_transBladderRoutine,"TransBladder On failed")) //1.6 Trans High Off .Run(UnloadStep.TranslateHighOff, () => { return _transHightRoutine.Start(false) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(UnloadStep.TranslateHighOffCheck, () => { return CommonFunction.CheckRoutineEndState(_transHightRoutine); }, () => CheckRoutineStopStatus(_transHightRoutine,"TransHigh off failed")) //1.7 CRS Vacuum On .Run(UnloadStep.CRSVacuumOn, () => { return _vacuumRoutine.Start(true) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(UnloadStep.CRSVacuumOnCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumRoutine); }, () => CheckRoutineStopStatus(_vacuumRoutine,"Vaccum On failed")) //1.8 WS Bladder On .Run(UnloadStep.WSBladderOn, () => { return _whBladderRoutine.Start(true) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(UnloadStep.WSBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); }, () => CheckRoutineStopStatus(_whBladderRoutine,"WSBladder On failed")) //1.9 condition vacuum level check .Run(UnloadStep.ConditionCRSVacuumLevel, () => { return _unloadVacuumLevelCheckRoutine.Start(true) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(UnloadStep.ConditionCRSVacuumLevelCheck, () => { return CommonFunction.CheckRoutineEndState(_unloadVacuumLevelCheckRoutine); }, () => CheckRoutineStopStatus(_unloadVacuumLevelCheckRoutine," Vacuum Level Check failed")) //2.0 CRS Goto Unlock .Run(UnloadStep.CRSGotoUnlock, () => { return AxisPosition(_crsAxis,"Unlock"); }, NullFun, _delay_1ms) .WaitWithStopCondition(UnloadStep.CRSGotoUnlockWait, () => { return _crsAxis.Status == RState.End; }, () => CheckAxisMotionStopStatus(_crsAxis)) //2.1 Trans Bladder Off .Run(UnloadStep.ReTranslateBladderOff, () => { return _transBladderRoutine.Start(false) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(UnloadStep.ReTranslateBladderOffCheck, () => { return CommonFunction.CheckRoutineEndState(_transBladderRoutine); }, () => CheckRoutineStopStatus(_transBladderRoutine,"ReTransBladder Off failed")) //2.2 Trans High Off .Run(UnloadStep.ReTranslateHighOff, () => { return _transHightRoutine.Start(false) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(UnloadStep.ReTranslateHighOffCheck, () => { return CommonFunction.CheckRoutineEndState(_transHightRoutine); }, () => CheckRoutineStopStatus(_transHightRoutine,"ReTransHigh Off failed")) //2.3 Dor Lock On .Run(UnloadStep.DoorUnlock, () => { return _doorLockRoutine.Start(false) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(UnloadStep.DoorUnlockCheck, () => { return CommonFunction.CheckRoutineEndState(_doorLockRoutine); }, () => CheckRoutineStopStatus(_doorLockRoutine,"door unlock failed")) //2.4 Shuttle Goto OPEN .Run(UnloadStep.ShuttleGotoOpen, () => { return AxisPosition(_shuttleAxis,"OPEN"); }, NullFun, _delay_1ms) .WaitWithStopCondition(UnloadStep.ShuttleGotoOpenWait, () => { return _shuttleAxis.Status == RState.End; }, () => CheckAxisMotionStopStatus(_shuttleAxis)) //2.5 CRS Vacuum Check .Run(UnloadStep.VacuumLevel, () => { return _vacuumLevelCheckRoutine.Start(true) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(UnloadStep.VacuumLevelCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumLevelCheckRoutine); }, () => CheckRoutineStopStatus(_vacuumLevelCheckRoutine,"Vacuum Level check failed")) //2.6 Tilt Goto HORI .Run(UnloadStep.TiltGotoHori, () => { return AxisPosition(_tiltAxis,"HORI"); }, NullFun, _delay_1ms) .WaitWithStopCondition(UnloadStep.TiltGotoHoriCheck, () => { return _tiltAxis.Status == RState.End; }, () => CheckAxisMotionStopStatus(_tiltAxis)) //2.7 BernoulliBladderOff .Run(UnloadStep.BernoulliBladderOff, () => { return _bernoulliBladderRoutine.Start(false) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(UnloadStep.BernoulliBladderOffCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliBladderRoutine); }, () => CheckRoutineStopStatus(_bernoulliBladderRoutine,"BernoulliBladder Off failed")) //2.8 Re BernoulliBladderOn .Run(UnloadStep.ReBernoulliBladderOn, () => { return _bernoulliBladderRoutine.Start(true) == RState.Running; }, _delay_1ms) .WaitWithStopCondition(UnloadStep.ReBernoulliBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliBladderRoutine); }, () => CheckRoutineStopStatus(_bernoulliBladderRoutine, "BernoulliBladder On failed")) //2.9 Bernoulli N2 Off .Run(UnloadStep.BernoulliN2Off, BernoulliN2Off, _delay_1ms) .End(UnloadStep.End, NullFun, 10); return Runner.Status; } /// /// Wafer Holder Clamp On /// /// private bool WaferHolderClampOn() { bool result = _loaderCommonDevice.WaferHolderClampOnAction(); if(!result) { NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle Clamp on faied", 0); } return result; } /// /// 检验TranslateBladderOff异常状态 /// /// private bool CheckRoutineStopStatus(IRoutine routine,string error) { bool result = CommonFunction.CheckRoutineStopState(routine); if (result) { NotifyError(eEvent.ERR_LOADER, $"{error}", 0); } return result; } /// /// Axis goto position /// /// /// /// private bool AxisPosition(JetAxisBase axis,string station) { bool result = axis.PositionStation(station); if (!result) { NotifyError(eEvent.ERR_LOADER, $"{axis.Module} goto {station} failed", 0); } return result; } /// /// 检验电机运动异常状态 /// /// /// private bool CheckAxisMotionStopStatus(JetAxisBase axis) { bool result = axis.Status == RState.Failed || axis.Status == RState.Timeout; if (result) { NotifyError(eEvent.ERR_LOADER, $"{axis.Module} motion failed", 0); } return result; } /// /// BerolliN2 On /// /// private bool BernoulliN2On() { bool result= _sideDevice.BernoulliN2OnAction("", null); if (!result) { NotifyError(eEvent.ERR_LOADER, $"BernoulliN2 On failed", 0); } return result; } /// /// BernoulliN2Off /// /// private bool BernoulliN2Off() { bool result = _sideDevice.BernoulliN2OffAction("", null); if (!result) { NotifyError(eEvent.ERR_LOADER, "BernoulliN2 Off failed", 0); } return result; } /// /// 启动 /// /// /// /// public RState Start(params object[] objs) { _shuttleAxis = GetShuttleAxis(); _crsAxis = GetCrsAxis(); _tiltAxis = GetTiltAxis(); _loaderCommonDevice = DEVICE.GetDevice($"Loader1.Common"); _rotationAxis = DEVICE.GetDevice($"{ModuleName.Loader1}.Rotation"); _sideDevice = DEVICE.GetDevice($"{Module}.{_side}"); _waferHolderSideClampRoutine = new LoaderCommonWaferHolderSideClampRoutine($"{Module}"); _vacuumRoutine = new LoaderSideVacuumRoutine($"{Module}.{_side}"); _vacuumLevelCheckRoutine = new LoaderSideVacuumLevelCheckRoutine($"{Module}.{_side}"); _unloadVacuumLevelCheckRoutine = new LoaderSideUnloadVacuumLevelCheckRoutine($"{Module}.{_side}"); _doorLockRoutine = new LoaderSideDoorLockRoutine($"{Module}.{_side}"); _whBladderRoutine = new LoaderSideWhBladderRoutine($"{Module}.{_side}"); _transHightRoutine = new LoaderSideTransHighRoutine($"{Module}.{_side}"); _bernoulliBladderRoutine = new LoaderSideBernoulliBladderRoutine($"{Module}.{_side}"); _transBladderRoutine = new LoaderSideTransBladderRoutine($"{Module}.{_side}"); Runner.Start(Module, $"Unload {_side}"); return RState.Running; } /// /// 获取Shuttle轴对象 /// /// private JetAxisBase GetShuttleAxis() { switch (_side) { case "SideA": return DEVICE.GetDevice($"{Module}.ShuttleA"); default: return DEVICE.GetDevice($"{Module}.ShuttleB"); } } /// /// 获取CRS轴对象 /// /// private JetAxisBase GetCrsAxis() { switch (_side) { case "SideA": return DEVICE.GetDevice($"{Module}.LSA"); default: return DEVICE.GetDevice($"{Module}.LSB"); } } /// /// 获取Tilt轴对象 /// /// private JetAxisBase GetTiltAxis() { switch (_side) { case "SideA": return DEVICE.GetDevice($"{Module}.TiltA"); default: return DEVICE.GetDevice($"{Module}.TiltB"); } } /// /// 检验前置条件 /// /// private bool CheckPreCondition() { if (!CheckHomeCondition()) { return false; } if (!CheckUnloadAxisCondition()) { return false; } if (!UnloadStatusCheck()) { return false; } if (!UnloadCRSVacuumCheck()) { return false; } return true; } /// /// 检验Home条件 /// /// private bool CheckHomeCondition() { //检验PUF、Loader Transporter,Robot均Homed if (ModuleHelper.IsInstalled(ModuleName.PUF1)) { PUFEntity puf1Entity = Singleton.Instance.GetModule(ModuleName.PUF1.ToString()); if (!puf1Entity.IsHomed) { NotifyError(eEvent.ERR_LOADER, "PUF1 is not homed",-1); return false; } } if (ModuleHelper.IsInstalled(ModuleName.PUF2)) { PUFEntity puf2Entity = Singleton.Instance.GetModule(ModuleName.PUF2.ToString()); if (!puf2Entity.IsHomed) { NotifyError(eEvent.ERR_LOADER,"PUF2 is not homed",-1); return false; } } if (ModuleHelper.IsInstalled(ModuleName.Transporter2)) { TransporterEntity loaderTransportEntity = Singleton.Instance.GetModule(ModuleName.Transporter2.ToString()); if (!loaderTransportEntity.IsHomed) { NotifyError(eEvent.ERR_LOADER, "Loader Transporter is not homed",-1); return false; } } return true; } /// /// 检验Axis我们的 /// /// /// private bool CheckUnloadAxisCondition() { if (!_rotationAxis.IsHomed) { NotifyError(eEvent.ERR_LOADER, $"rotation is not homed",-1); return false; } if (!_shuttleAxis.IsHomed) { NotifyError(eEvent.ERR_LOADER, $"{_shuttleAxis.Name} is not homed", -1); return false; } if (!_tiltAxis.IsHomed) { NotifyError(eEvent.ERR_LOADER, $"{_tiltAxis.Name} is not homed",-1); return false; } if (!_crsAxis.IsHomed) { NotifyError(eEvent.ERR_LOADER, $"{_crsAxis.Name} is not homed", -1); return false; } double rotationPosition = _rotationAxis.MotionData.MotorPosition; if (!_rotationAxis.CheckPositionIsInStation(rotationPosition, "LOAD") && !_rotationAxis.CheckPositionIsInStation(rotationPosition, "SERVICEB")) { NotifyError(eEvent.ERR_LOADER, $"rotation {rotationPosition} not in LOAD and SERVICEB",-1); return false; } double shuttlePosition=_shuttleAxis.MotionData.MotorPosition; if (!_shuttleAxis.CheckPositionIsInStation(shuttlePosition, "CLOSED")) { NotifyError(eEvent.ERR_LOADER, $"shuttle {shuttlePosition} not in CLOSE", -1); return false; } double tiltPosition = _tiltAxis.MotionData.MotorPosition; if (!_tiltAxis.CheckPositionIsInStation(tiltPosition, "VERT")) { NotifyError(eEvent.ERR_LOADER, $"tilt {tiltPosition} not in VERT", -1); return false; } double crsPosition = _crsAxis.MotionData.MotorPosition; if (_crsAxis.CheckPositionIsEmpty(crsPosition)) { NotifyError(eEvent.ERR_LOADER, $"crs {crsPosition} not at station", -1); return false; } return true; } /// /// Unload Status Check /// /// /// private bool UnloadStatusCheck() { //Facility:CDA,N2,Vaccum均Enable且在正常范围 //Side WaferPresent LoaderSideData sideData = _sideDevice.SideData; //if (sideData.WaferPresent) //{ // NotifyError(eEvent.ERR_LOADER, "side wafer is not present"); // return false; //} if (sideData.DoorLowerUnlocked || sideData.DoorUpperUnlocked) { NotifyError(eEvent.ERR_LOADER, "Door Lock is off", -1); return false; } return true; } /// /// CRS Vacuum Check /// /// /// private bool UnloadCRSVacuumCheck() { //CRS Vacuum检验 LoaderSideData sideData = _sideDevice.SideData; if (sideData.CRSVacuum) { NotifyError(eEvent.ERR_LOADER, "LS Vacuum is on",-1); return false; } //WS Bladder if (sideData.WHBladder) { NotifyError(eEvent.ERR_LOADER, "WS Bladder is on", -1); return false; } //Translate Bladder/High Pres,且Sensor处于Retracted if (sideData.TransBladder) { NotifyError(eEvent.ERR_LOADER, "TransBladder is on",-1); return false; } if (sideData.TransHigh) { NotifyError(eEvent.ERR_LOADER, "Trans High is on", -1); return false; } //Bernoulli N2 if (sideData.BernoulliN2) { NotifyError(eEvent.ERR_LOADER, "Bernoulli N2 is on",-1); return false; } //Wafer Shuttle Present LoaderCommonData commonData = _loaderCommonDevice.CommonData; if (!commonData.WaferHolderPresent) { NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle is absent", -1); return false; } //Drip Tray Fluid if (commonData.DripTrayFluid) { NotifyError(eEvent.ERR_LOADER, "Drip Tray Fluid is on",-1); return false; } return true; } } }