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CycleRobotCycleNewRoutine.cs
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2ea59fe258
revise robot cycle bug
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4 weeks ago |
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CycleRobotCycleRoutine.cs
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20ecea3b8f
revise robot cycle routine
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3 months ago |
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EFEMAlignRoutine.cs
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07fbbfc5ca
EFEM place routine add aligner wafersize and distance command
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2 months ago |
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EfemAutoMessageProcessor.cs
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371876b350
add robot map routine
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4 months ago |
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EfemCycleAction.cs
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e9e0bd7d47
update robot cycle
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3 months ago |
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EfemEntity.cs
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6de2319620
add pause/resume
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1 week ago |
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EfemHomeRoutine.cs
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8324f5d834
add X12 Update to X8
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1 month ago |
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EfemMapDummyRoutine.cs
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07fbbfc5ca
EFEM place routine add aligner wafersize and distance command
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2 months ago |
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EfemPickRoutine.cs
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20ef460721
revise metal init wafersize check，revise efem pick/place srd routine
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2 months ago |
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EfemPlaceRoutine.cs
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07fbbfc5ca
EFEM place routine add aligner wafersize and distance command
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2 months ago |
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EfemRobotMapRoutine.cs
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56c86c7a9c
update Efem MapRoutine
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4 months ago |
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EfemSafeCloseRoutine.cs
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da5f88fe9f
add efem safeopen/safeclose
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1 week ago |
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EfemSafeOpenRoutine.cs
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da5f88fe9f
add efem safeopen/safeclose
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1 week ago |
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EfemSwapRoutine.cs
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f7533a737b
Initialize
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5 months ago |
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EfemVacuumRoutine.cs
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388b234daf
add X8 EfemRobot
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4 months ago |
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RobotCycleMoveRoutine.cs
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2ea59fe258
revise robot cycle bug
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4 weeks ago |
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RobotCycleRoutine.cs
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81f8544042
add Aligner plat type
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2 months ago |
chenzk
6de2319620
add pause/resume