PufOnlyPlaceToLoaderRoutine.cs 11 KB

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  1. using Aitex.Core.RT.Device;
  2. using Aitex.Core.RT.Log;
  3. using Aitex.Core.RT.Routine;
  4. using MECF.Framework.Common.Equipment;
  5. using MECF.Framework.Common.Routine;
  6. using MECF.Framework.Common.Utilities;
  7. using CyberX8_Core;
  8. using CyberX8_RT.Devices.AXIS;
  9. using CyberX8_RT.Devices.Loader;
  10. using CyberX8_RT.Devices.PUF;
  11. using System;
  12. using System.Collections.Generic;
  13. using System.Linq;
  14. using System.Text;
  15. using System.Threading.Tasks;
  16. namespace CyberX8_RT.Modules.PUF
  17. {
  18. public class PufOnlyPlaceToLoaderRoutine : RoutineBase, IRoutine
  19. {
  20. private enum PlaceStep
  21. {
  22. LipSealGotoUnlock,
  23. LipSealGotoUnlockWait,
  24. VacuumLevelCheck,
  25. SideConditionRoutine,
  26. SideConditionRoutineWait,
  27. RotationGotoLoaderPlaceDown,
  28. RotationGotoLoaderPlaceDownWait,
  29. VerticalFlip,
  30. VerticalFlipWait,
  31. FirstPlaceVacuumCheck,
  32. FirstPlaceVacuumCheckWait,
  33. SecondPlaceVacuumCheck,
  34. SecondPlaceVacuumCheckWait,
  35. VacuumOff,
  36. End
  37. }
  38. #region 内部变量
  39. private bool _isSecondPlaceVacuumCheck = false;
  40. private string _side;
  41. private JetAxisBase _flipAxis;
  42. private JetAxisBase _rotationAxis;
  43. private JetAxisBase _verticalAxis;
  44. private PufVacuum _vacuum;
  45. private JetAxisBase _loaderCrsAxis;
  46. private PufPlaceVacuumCheckRoutine _pufPlaceVacuumCheckRoutine;
  47. private PufWaferPickSubRoutine _pufWaferPickSubRoutine;
  48. #endregion
  49. /// <summary>
  50. /// 构造函数
  51. /// </summary>
  52. /// <param name="module"></param>
  53. public PufOnlyPlaceToLoaderRoutine(string module) : base(module)
  54. {
  55. _pufWaferPickSubRoutine = new PufWaferPickSubRoutine(module);
  56. }
  57. /// <summary>
  58. /// 中止
  59. /// </summary>
  60. public void Abort()
  61. {
  62. if (_pufPlaceVacuumCheckRoutine != null)
  63. {
  64. _pufPlaceVacuumCheckRoutine.Abort();
  65. }
  66. if (_pufWaferPickSubRoutine != null)
  67. {
  68. _pufWaferPickSubRoutine.Abort();
  69. }
  70. _flipAxis.StopPositionOperation();
  71. _rotationAxis.StopPositionOperation();
  72. _verticalAxis.StopPositionOperation();
  73. Runner.Stop("Manual Abort");
  74. }
  75. /// <summary>
  76. /// 监控
  77. /// </summary>
  78. /// <returns></returns>
  79. public RState Monitor()
  80. {
  81. Runner.Run(PlaceStep.LipSealGotoUnlock, LipSealGotoUnlock, _delay_1ms)
  82. .WaitWithStopCondition(PlaceStep.LipSealGotoUnlockWait, CheckLipSealEndStatus, CheckLipSealStopStatus)
  83. .Run(PlaceStep.VacuumLevelCheck, CheckWaferPresent, _delay_1ms)
  84. .RunConditionSubRoutine(PlaceStep.SideConditionRoutine, SideConditionIndex, new IRoutine[] { _pufWaferPickSubRoutine }, new object[] { _side })
  85. .WaitConditionSubRoutine(PlaceStep.SideConditionRoutineWait)
  86. .Run(PlaceStep.RotationGotoLoaderPlaceDown, () => _rotationAxis.PositionStation("LoaderPutDown"), _delay_1ms)
  87. .WaitWithStopCondition(PlaceStep.RotationGotoLoaderPlaceDownWait, CheckRotationPositionStatus, CheckRotationPositionRunStop)
  88. .Run(PlaceStep.VerticalFlip, () => _verticalAxis.PositionStation("Flip"), _delay_1ms)
  89. .WaitWithStopCondition(PlaceStep.VerticalFlipWait, CheckVerticalPositionStatus, CheckVerticalPositionRunStop)
  90. .Run(PlaceStep.FirstPlaceVacuumCheck, () => StartPlaceVacuumCheckRoutine(false, 1), _delay_1ms)
  91. .WaitWithStopCondition(PlaceStep.FirstPlaceVacuumCheckWait, CheckFirstPlaceVacuumCheckRoutineStatus, () => { return false; })
  92. .Run(PlaceStep.SecondPlaceVacuumCheck, StartSecondPlaceVacuumCheckRoutine, _delay_1ms)
  93. .WaitWithStopCondition(PlaceStep.SecondPlaceVacuumCheckWait, CheckPlaceVacuumCheckRoutineEndStatus, CheckSecondPlaceVacuumCheckRoutineStopStatus)
  94. .Run(PlaceStep.VacuumOff, VacuumOff, _delay_1ms)
  95. .End(PlaceStep.End, NullFun, _delay_1ms);
  96. return Runner.Status;
  97. }
  98. /// <summary>
  99. /// LipSeal Goto Unlock
  100. /// </summary>
  101. /// <returns></returns>
  102. private bool LipSealGotoUnlock()
  103. {
  104. if (ModuleHelper.IsInstalled(ModuleName.Loader1))
  105. {
  106. return _loaderCrsAxis.PositionStation("Unlock");
  107. }
  108. else
  109. {
  110. return true;
  111. }
  112. }
  113. /// <summary>
  114. /// 检验Lip Seal完成状态
  115. /// </summary>
  116. /// <returns></returns>
  117. private bool CheckLipSealEndStatus()
  118. {
  119. if (ModuleHelper.IsInstalled(ModuleName.Loader1))
  120. {
  121. return _loaderCrsAxis.Status == RState.End;
  122. }
  123. else
  124. {
  125. return true;
  126. }
  127. }
  128. /// <summary>
  129. /// 检验Lip Seal完成状态
  130. /// </summary>
  131. /// <returns></returns>
  132. private bool CheckLipSealStopStatus()
  133. {
  134. if (ModuleHelper.IsInstalled(ModuleName.Loader1))
  135. {
  136. return _loaderCrsAxis.Status == RState.Failed;
  137. }
  138. else
  139. {
  140. return true;
  141. }
  142. }
  143. /// <summary>
  144. /// 检验是否存在Wafer
  145. /// </summary>
  146. /// <returns></returns>
  147. private bool CheckWaferPresent()
  148. {
  149. if (_side == "SideA")
  150. {
  151. if (!_vacuum.ChuckAWaferPresent)
  152. {
  153. LOG.WriteLog(eEvent.ERR_PUF, Module, $"{_side} has no Wafer");
  154. return false;
  155. }
  156. }
  157. else
  158. {
  159. if (!_vacuum.ChuckBWaferPresent)
  160. {
  161. LOG.WriteLog(eEvent.ERR_PUF, Module, $"{_side} has no Wafer");
  162. return false;
  163. }
  164. }
  165. return true;
  166. }
  167. /// <summary>
  168. /// Side条件获取SubRoutine索引
  169. /// </summary>
  170. /// <returns></returns>
  171. private int SideConditionIndex()
  172. {
  173. if (_flipAxis.CheckPositionIsInStation(_flipAxis.MotionData.MotorPosition, _side))
  174. {
  175. return 1;
  176. }
  177. else
  178. {
  179. return 0;
  180. }
  181. }
  182. /// <summary>
  183. /// 检验Rotation移动状态
  184. /// </summary>
  185. /// <returns></returns>
  186. private bool CheckRotationPositionStatus()
  187. {
  188. return _rotationAxis.Status == RState.End;
  189. }
  190. /// <summary>
  191. /// 检验Rotation是否还在运动
  192. /// </summary>
  193. /// <returns></returns>
  194. private bool CheckRotationPositionRunStop()
  195. {
  196. return _rotationAxis.Status == RState.Failed;
  197. }
  198. /// <summary>
  199. /// 检验Vertical移动状态
  200. /// </summary>
  201. /// <returns></returns>
  202. private bool CheckVerticalPositionStatus()
  203. {
  204. return _verticalAxis.Status == RState.End;
  205. }
  206. /// <summary>
  207. /// 检验Vertical是否还在运动
  208. /// </summary>
  209. /// <returns></returns>
  210. private bool CheckVerticalPositionRunStop()
  211. {
  212. return _verticalAxis.Status == RState.Failed;
  213. }
  214. /// <summary>
  215. /// 启动Place Vacuum Check routine
  216. /// </summary>
  217. /// <returns></returns>
  218. private bool StartPlaceVacuumCheckRoutine(bool showError, int times)
  219. {
  220. return _pufPlaceVacuumCheckRoutine.Start(_side, showError, times) == RState.Running;
  221. }
  222. /// <summary>
  223. /// 检验第一次Place Vacuum Check routine运行情况
  224. /// </summary>
  225. /// <returns></returns>
  226. private bool CheckFirstPlaceVacuumCheckRoutineStatus()
  227. {
  228. RState rsState = _pufPlaceVacuumCheckRoutine.Monitor();
  229. if (rsState == RState.End)
  230. {
  231. return true;
  232. }
  233. if (rsState == RState.Failed || rsState == RState.Timeout)
  234. {
  235. _isSecondPlaceVacuumCheck = true;
  236. return true;
  237. }
  238. return false;
  239. }
  240. /// <summary>
  241. /// 启动Place Vacuum Check routine完成状态
  242. /// </summary>
  243. /// <returns></returns>
  244. private bool CheckPlaceVacuumCheckRoutineEndStatus()
  245. {
  246. RState rsState = _pufPlaceVacuumCheckRoutine.Monitor();
  247. return rsState == RState.End;
  248. }
  249. /// <summary>
  250. /// 启动第二次Place Vacuum Check routine
  251. /// </summary>
  252. /// <returns></returns>
  253. private bool StartSecondPlaceVacuumCheckRoutine()
  254. {
  255. if (_isSecondPlaceVacuumCheck)
  256. {
  257. return StartPlaceVacuumCheckRoutine(true, 2);
  258. }
  259. else
  260. {
  261. return true;
  262. }
  263. }
  264. /// <summary>
  265. /// 检验第二次Place Vacuum Check routine错误状态
  266. /// </summary>
  267. /// <returns></returns>
  268. private bool CheckSecondPlaceVacuumCheckRoutineStopStatus()
  269. {
  270. RState rState = _pufPlaceVacuumCheckRoutine.Monitor();
  271. if (rState == RState.Failed || rState == RState.Timeout)
  272. {
  273. return true;
  274. }
  275. return false;
  276. }
  277. /// <summary>
  278. /// 关闭Vacuum
  279. /// </summary>
  280. /// <returns></returns>
  281. private bool VacuumOff()
  282. {
  283. if (_side == "SideA")
  284. {
  285. return _vacuum.VacuumAOff();
  286. }
  287. else if (_side == "SideB")
  288. {
  289. return _vacuum.VacuumBOff();
  290. }
  291. return false;
  292. }
  293. /// <summary>
  294. /// 启动
  295. /// </summary>
  296. /// <param name="objs"></param>
  297. /// <returns></returns>
  298. public RState Start(params object[] objs)
  299. {
  300. _side = objs[0].ToString();
  301. _flipAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Flip");
  302. _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Rotation");
  303. _verticalAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Vertical");
  304. _vacuum = DEVICE.GetDevice<PufVacuum>($"{Module}.Vacuum");
  305. GetCrsAxis();
  306. _isSecondPlaceVacuumCheck = false;
  307. _pufPlaceVacuumCheckRoutine = new PufPlaceVacuumCheckRoutine(Module);
  308. return Runner.Start(Module, "Start Place To Loader");
  309. }
  310. /// <summary>
  311. /// 获取lipseal Axis
  312. /// </summary>
  313. private void GetCrsAxis()
  314. {
  315. if (Module == ModuleName.PUF1.ToString())
  316. {
  317. _loaderCrsAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.LSA");
  318. }
  319. else
  320. {
  321. _loaderCrsAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.LSB");
  322. }
  323. }
  324. }
  325. }