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- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.Routine;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.Routine;
- using MECF.Framework.Common.Utilities;
- using CyberX8_Core;
- using CyberX8_RT.Devices.AXIS;
- using CyberX8_RT.Devices.Loader;
- using CyberX8_RT.Devices.PUF;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- namespace CyberX8_RT.Modules.PUF
- {
- public class PufOnlyPlaceToLoaderRoutine : RoutineBase, IRoutine
- {
- private enum PlaceStep
- {
- LipSealGotoUnlock,
- LipSealGotoUnlockWait,
- VacuumLevelCheck,
- SideConditionRoutine,
- SideConditionRoutineWait,
- RotationGotoLoaderPlaceDown,
- RotationGotoLoaderPlaceDownWait,
- VerticalFlip,
- VerticalFlipWait,
- FirstPlaceVacuumCheck,
- FirstPlaceVacuumCheckWait,
- SecondPlaceVacuumCheck,
- SecondPlaceVacuumCheckWait,
- VacuumOff,
- End
- }
- #region 内部变量
- private bool _isSecondPlaceVacuumCheck = false;
- private string _side;
- private JetAxisBase _flipAxis;
- private JetAxisBase _rotationAxis;
- private JetAxisBase _verticalAxis;
- private PufVacuum _vacuum;
- private JetAxisBase _loaderCrsAxis;
- private PufPlaceVacuumCheckRoutine _pufPlaceVacuumCheckRoutine;
- private PufWaferPickSubRoutine _pufWaferPickSubRoutine;
- #endregion
- /// <summary>
- /// 构造函数
- /// </summary>
- /// <param name="module"></param>
- public PufOnlyPlaceToLoaderRoutine(string module) : base(module)
- {
- _pufWaferPickSubRoutine = new PufWaferPickSubRoutine(module);
- }
- /// <summary>
- /// 中止
- /// </summary>
- public void Abort()
- {
- if (_pufPlaceVacuumCheckRoutine != null)
- {
- _pufPlaceVacuumCheckRoutine.Abort();
- }
- if (_pufWaferPickSubRoutine != null)
- {
- _pufWaferPickSubRoutine.Abort();
- }
- _flipAxis.StopPositionOperation();
- _rotationAxis.StopPositionOperation();
- _verticalAxis.StopPositionOperation();
- Runner.Stop("Manual Abort");
- }
- /// <summary>
- /// 监控
- /// </summary>
- /// <returns></returns>
- public RState Monitor()
- {
- Runner.Run(PlaceStep.LipSealGotoUnlock, LipSealGotoUnlock, _delay_1ms)
- .WaitWithStopCondition(PlaceStep.LipSealGotoUnlockWait, CheckLipSealEndStatus, CheckLipSealStopStatus)
- .Run(PlaceStep.VacuumLevelCheck, CheckWaferPresent, _delay_1ms)
- .RunConditionSubRoutine(PlaceStep.SideConditionRoutine, SideConditionIndex, new IRoutine[] { _pufWaferPickSubRoutine }, new object[] { _side })
- .WaitConditionSubRoutine(PlaceStep.SideConditionRoutineWait)
- .Run(PlaceStep.RotationGotoLoaderPlaceDown, () => _rotationAxis.PositionStation("LoaderPutDown"), _delay_1ms)
- .WaitWithStopCondition(PlaceStep.RotationGotoLoaderPlaceDownWait, CheckRotationPositionStatus, CheckRotationPositionRunStop)
- .Run(PlaceStep.VerticalFlip, () => _verticalAxis.PositionStation("Flip"), _delay_1ms)
- .WaitWithStopCondition(PlaceStep.VerticalFlipWait, CheckVerticalPositionStatus, CheckVerticalPositionRunStop)
- .Run(PlaceStep.FirstPlaceVacuumCheck, () => StartPlaceVacuumCheckRoutine(false, 1), _delay_1ms)
- .WaitWithStopCondition(PlaceStep.FirstPlaceVacuumCheckWait, CheckFirstPlaceVacuumCheckRoutineStatus, () => { return false; })
- .Run(PlaceStep.SecondPlaceVacuumCheck, StartSecondPlaceVacuumCheckRoutine, _delay_1ms)
- .WaitWithStopCondition(PlaceStep.SecondPlaceVacuumCheckWait, CheckPlaceVacuumCheckRoutineEndStatus, CheckSecondPlaceVacuumCheckRoutineStopStatus)
- .Run(PlaceStep.VacuumOff, VacuumOff, _delay_1ms)
- .End(PlaceStep.End, NullFun, _delay_1ms);
- return Runner.Status;
- }
- /// <summary>
- /// LipSeal Goto Unlock
- /// </summary>
- /// <returns></returns>
- private bool LipSealGotoUnlock()
- {
- if (ModuleHelper.IsInstalled(ModuleName.Loader1))
- {
- return _loaderCrsAxis.PositionStation("Unlock");
- }
- else
- {
- return true;
- }
- }
- /// <summary>
- /// 检验Lip Seal完成状态
- /// </summary>
- /// <returns></returns>
- private bool CheckLipSealEndStatus()
- {
- if (ModuleHelper.IsInstalled(ModuleName.Loader1))
- {
- return _loaderCrsAxis.Status == RState.End;
- }
- else
- {
- return true;
- }
- }
- /// <summary>
- /// 检验Lip Seal完成状态
- /// </summary>
- /// <returns></returns>
- private bool CheckLipSealStopStatus()
- {
- if (ModuleHelper.IsInstalled(ModuleName.Loader1))
- {
- return _loaderCrsAxis.Status == RState.Failed;
- }
- else
- {
- return true;
- }
- }
- /// <summary>
- /// 检验是否存在Wafer
- /// </summary>
- /// <returns></returns>
- private bool CheckWaferPresent()
- {
- if (_side == "SideA")
- {
- if (!_vacuum.ChuckAWaferPresent)
- {
- LOG.WriteLog(eEvent.ERR_PUF, Module, $"{_side} has no Wafer");
- return false;
- }
- }
- else
- {
- if (!_vacuum.ChuckBWaferPresent)
- {
- LOG.WriteLog(eEvent.ERR_PUF, Module, $"{_side} has no Wafer");
- return false;
- }
- }
- return true;
- }
- /// <summary>
- /// Side条件获取SubRoutine索引
- /// </summary>
- /// <returns></returns>
- private int SideConditionIndex()
- {
- if (_flipAxis.CheckPositionIsInStation(_flipAxis.MotionData.MotorPosition, _side))
- {
- return 1;
- }
- else
- {
- return 0;
- }
- }
- /// <summary>
- /// 检验Rotation移动状态
- /// </summary>
- /// <returns></returns>
- private bool CheckRotationPositionStatus()
- {
- return _rotationAxis.Status == RState.End;
- }
- /// <summary>
- /// 检验Rotation是否还在运动
- /// </summary>
- /// <returns></returns>
- private bool CheckRotationPositionRunStop()
- {
- return _rotationAxis.Status == RState.Failed;
- }
- /// <summary>
- /// 检验Vertical移动状态
- /// </summary>
- /// <returns></returns>
- private bool CheckVerticalPositionStatus()
- {
- return _verticalAxis.Status == RState.End;
- }
- /// <summary>
- /// 检验Vertical是否还在运动
- /// </summary>
- /// <returns></returns>
- private bool CheckVerticalPositionRunStop()
- {
- return _verticalAxis.Status == RState.Failed;
- }
- /// <summary>
- /// 启动Place Vacuum Check routine
- /// </summary>
- /// <returns></returns>
- private bool StartPlaceVacuumCheckRoutine(bool showError, int times)
- {
- return _pufPlaceVacuumCheckRoutine.Start(_side, showError, times) == RState.Running;
- }
- /// <summary>
- /// 检验第一次Place Vacuum Check routine运行情况
- /// </summary>
- /// <returns></returns>
- private bool CheckFirstPlaceVacuumCheckRoutineStatus()
- {
- RState rsState = _pufPlaceVacuumCheckRoutine.Monitor();
- if (rsState == RState.End)
- {
- return true;
- }
- if (rsState == RState.Failed || rsState == RState.Timeout)
- {
- _isSecondPlaceVacuumCheck = true;
- return true;
- }
- return false;
- }
- /// <summary>
- /// 启动Place Vacuum Check routine完成状态
- /// </summary>
- /// <returns></returns>
- private bool CheckPlaceVacuumCheckRoutineEndStatus()
- {
- RState rsState = _pufPlaceVacuumCheckRoutine.Monitor();
- return rsState == RState.End;
- }
- /// <summary>
- /// 启动第二次Place Vacuum Check routine
- /// </summary>
- /// <returns></returns>
- private bool StartSecondPlaceVacuumCheckRoutine()
- {
- if (_isSecondPlaceVacuumCheck)
- {
- return StartPlaceVacuumCheckRoutine(true, 2);
- }
- else
- {
- return true;
- }
- }
- /// <summary>
- /// 检验第二次Place Vacuum Check routine错误状态
- /// </summary>
- /// <returns></returns>
- private bool CheckSecondPlaceVacuumCheckRoutineStopStatus()
- {
- RState rState = _pufPlaceVacuumCheckRoutine.Monitor();
- if (rState == RState.Failed || rState == RState.Timeout)
- {
- return true;
- }
- return false;
- }
- /// <summary>
- /// 关闭Vacuum
- /// </summary>
- /// <returns></returns>
- private bool VacuumOff()
- {
- if (_side == "SideA")
- {
- return _vacuum.VacuumAOff();
- }
- else if (_side == "SideB")
- {
- return _vacuum.VacuumBOff();
- }
- return false;
- }
- /// <summary>
- /// 启动
- /// </summary>
- /// <param name="objs"></param>
- /// <returns></returns>
- public RState Start(params object[] objs)
- {
- _side = objs[0].ToString();
- _flipAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Flip");
- _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Rotation");
- _verticalAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Vertical");
- _vacuum = DEVICE.GetDevice<PufVacuum>($"{Module}.Vacuum");
- GetCrsAxis();
- _isSecondPlaceVacuumCheck = false;
- _pufPlaceVacuumCheckRoutine = new PufPlaceVacuumCheckRoutine(Module);
- return Runner.Start(Module, "Start Place To Loader");
- }
- /// <summary>
- /// 获取lipseal Axis
- /// </summary>
- private void GetCrsAxis()
- {
- if (Module == ModuleName.PUF1.ToString())
- {
- _loaderCrsAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.LSA");
- }
- else
- {
- _loaderCrsAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.LSB");
- }
- }
- }
- }
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