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- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.Routine;
- using MECF.Framework.Common.RecipeCenter;
- using MECF.Framework.Common.Routine;
- using CyberX8_Core;
- using CyberX8_RT.Devices.AXIS;
- using CyberX8_RT.Devices.SRD;
- using System;
- using System.Collections.Generic;
- using MECF.Framework.Common.Utilities;
- using MECF.Framework.Common.CommonData;
- using MECF.Framework.Common.CommonData.SRD;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.RT.Device;
- using CyberX8_RT.Devices.Facilities;
- using Aitex.Core.Util;
- using CyberX8_RT.Modules.Transporter;
- using MECF.Framework.Common.WaferHolder;
- namespace CyberX8_RT.Modules.SRD
- {
- public class SRDProcessRecipeRoutine : RoutineBase, IRoutine
- {
- #region 常量
- private const int LOTTRACK_TIME = 1000;
- #endregion
- private enum SRDProcessState
- {
- Ready,
- RunWafer,
- Unloading,
- End,
- InitialRunWaferStateMachine,
- InitialUnloadingStateMachine,
- CheckRunWaferStateMachineInitialStatus,
- CheckUnloadingStateMachineInitialStatus,
- StartRunWaferStateMachine,
- StartUnloadingStateMachine,
- CycleRun,
- CycleEnd
- }
- #region 内部变量
- /// <summary>
- /// 次数
- /// </summary>
- private int _cycleCount = 0;
- /// <summary>
- /// Rotation Axis
- /// </summary>
- private JetAxisBase _rotationAxis;
- /// <summary>
- /// Arm Axis
- /// </summary>
- private JetAxisBase _armAxis;
- /// <summary>
- /// SRD Recipe
- /// </summary>
- private SrdRecipe _srdRecipe;
- /// <summary>
- /// 设备对象
- /// </summary>
- private SrdCommonDevice _srdCommonDevice;
- /// <summary>
- /// Run wafer Recipe Routine
- /// </summary>
- private SRDRunWaferRecipeRoutine _runWaferRecipRoutine;
- /// <summary>
- /// Unload Routine
- /// </summary>
- private SRDUnloadRoutine _unloadRoutine;
- /// <summary>
- /// lock track time
- /// </summary>
- private DateTime _lotTackTime = DateTime.Now;
- /// <summary>
- /// LotTrack数据
- /// </summary>
- private List<SRDLotTrackData> _datas = new List<SRDLotTrackData>();
- /// <summary>
- /// LotTrack文件头数据
- /// </summary>
- private LotTrackFileHeaderCommonData _header = new LotTrackFileHeaderCommonData();
- /// <summary>
- /// Facilities
- /// </summary>
- private SystemFacilities _facilities;
- #endregion
- #region 属性
- /// <summary>
- /// 当前子状态机
- /// </summary>
- public string CurrentStateMachine
- {
- get { return GetCurrentStateMachine(); }
- }
- /// <summary>
- /// 当前cycle次数
- /// </summary>
- public int AchievedCycle { get { return Runner.LoopCounter; } }
- /// <summary>
- /// 是否正在用水
- /// </summary>
- public bool IsUsingWater { get { return _runWaferRecipRoutine.IsUsingWater; } }
- /// <summary>
- /// LotTrack数据
- /// </summary>
- public List<SRDLotTrackData> SRDLotTrackDatas { get { return _datas; } }
- /// <summary>
- /// LotTrack文件头数据
- /// </summary>
- public LotTrackFileHeaderCommonData SRDLotTrackHeaderDatas { get { return _header; } }
- #endregion
- /// <summary>
- /// 构造函数
- /// </summary>
- /// <param name="module"></param>
- public SRDProcessRecipeRoutine(string module, JetAxisBase rotationAxis, JetAxisBase armAxis, SrdCommonDevice srdCommon) : base(module)
- {
- _rotationAxis = rotationAxis;
- _armAxis = armAxis;
- _srdCommonDevice = srdCommon;
- _runWaferRecipRoutine = new SRDRunWaferRecipeRoutine(module);
- _unloadRoutine= new SRDUnloadRoutine(module);
- }
- /// <summary>
- /// 取消
- /// </summary>
- public void Abort()
- {
- if(_unloadRoutine.Monitor() == RState.Running)
- {
- _unloadRoutine.Abort();
- }
- if (_runWaferRecipRoutine.Monitor() == RState.Running)
- {
- _runWaferRecipRoutine.Abort();
- }
- Runner.Stop("Manual Abort");
- if (_srdCommonDevice != null)
- {
- _srdCommonDevice.EnterErrorOperation();
- }
- }
- /// <summary>
- /// 监控
- /// </summary>
- /// <returns></returns>
- /// <exception cref="NotImplementedException"></exception>
- public RState Monitor()
- {
- LottrackRecord();
- Runner.LoopStart(SRDProcessState.Ready, "Process Recipe Start", _cycleCount, NullFun, _delay_1ms)
- .LoopRun(SRDProcessState.StartRunWaferStateMachine, () => { return StartRunWaferRecipeStateMachine(); }, _delay_1ms)
- .LoopRunWithStopStatus(SRDProcessState.RunWafer, CheckRunWaferRecipeStateCompleteState, CheckRunWaferRecipeStateErrorState)
- .LoopRun(SRDProcessState.StartUnloadingStateMachine, () => { return StartUnloadingStateMachine(); }, _delay_1ms)
- .LoopRunWithStopStatus(SRDProcessState.Unloading, CheckUnloadingStateCompleteState, CheckUnloadingStateErrorState)
- .LoopEnd(SRDProcessState.CycleEnd, NullFun, _delay_1ms)
- .End(SRDProcessState.End, NullFun, _delay_1ms);
- return Runner.Status;
- }
- /// <summary>
- /// 启动
- /// </summary>
- /// <param name="objects"></param>
- /// <returns></returns>
- /// <exception cref="NotImplementedException"></exception>
- public RState Start(params object[] objects)
- {
- _srdRecipe = objects[0] as SrdRecipe;
- if (_srdRecipe == null)
- {
- LOG.WriteLog(eEvent.ERR_SRD, Module.ToString(), " recipe is null");
- return RState.Failed;
- }
- _cycleCount = (int)objects[1];
- if (_cycleCount == 0)
- {
- return RState.End;
- }
-
- _header.SoftWareVersion = System.Reflection.Assembly.GetExecutingAssembly().GetName().Version.ToString();
- _header.Recipe = $"{_srdRecipe.Ppid}.srd.rcp";
- if (SC.ContainsItem("System.ToolID")) _header.ToolID = SC.GetStringValue("System.ToolID");
- _facilities = DEVICE.GetDevice<SystemFacilities>("System.Facilities");
- if (_facilities == null)
- {
- LOG.WriteLog(eEvent.ERR_SRD, Module, "Facility is null");
- return RState.Failed;
- }
- _datas.Clear();
- _lotTackTime = DateTime.Now;
- return Runner.Start(Module, "Process Recipe");
- }
- #region RunWaferStateMatcine
- /// <summary>
- /// 启动状态机
- /// </summary>
- /// <param name="recipe"></param>
- /// <returns></returns>
- private bool StartRunWaferRecipeStateMachine()
- {
- bool result = _runWaferRecipRoutine.Start(_srdRecipe)==RState.Running;
- if (result)
- {
- LOG.WriteLog(eEvent.INFO_SRD, Module.ToString(), $"Start Run Wafer State Machine, recipe[{_srdRecipe.Ppid}] times[{_cycleCount + 1}]");
- }
- else
- {
- NotifyError(eEvent.ERR_SRD, _runWaferRecipRoutine.ErrorMsg, 0);
- }
- return result;
- }
- /// <summary>
- /// 检验RunWafer状态机完成情况
- /// </summary>
- /// <returns></returns>
- private bool CheckRunWaferRecipeStateCompleteState()
- {
- return CommonFunction.CheckRoutineEndState(_runWaferRecipRoutine);
- }
- /// <summary>
- /// 检验RunWafer状态机错误情况
- /// </summary>
- /// <returns></returns>
- private bool CheckRunWaferRecipeStateErrorState()
- {
- bool result = CommonFunction.CheckRoutineStopState(_runWaferRecipRoutine);
- if (result)
- {
- AddLotTrackData();
- if (_srdCommonDevice != null)
- {
- _srdCommonDevice.EnterErrorOperation();
- }
- NotifyError(eEvent.ERR_SRD, _runWaferRecipRoutine.ErrorMsg, 0);
- }
- return result;
- }
-
- #endregion
- #region UnloadingStateMatcine
- /// <summary>
- /// 启动状态机
- /// </summary>
- /// <param name="recipe"></param>
- /// <returns></returns>
- private bool StartUnloadingStateMachine()
- {
- bool result= _unloadRoutine.Start() == RState.Running;
- if (!result)
- {
- NotifyError(eEvent.ERR_SRD,_unloadRoutine.ErrorMsg, 0);
- }
- return result;
- }
- /// <summary>
- /// 检验Unloading状态机完成情况
- /// </summary>
- /// <returns></returns>
- private bool CheckUnloadingStateCompleteState()
- {
- return CommonFunction.CheckRoutineEndState(_unloadRoutine);
- }
- /// <summary>
- /// 检验Unloading状态机错误情况
- /// </summary>
- /// <returns></returns>
- private bool CheckUnloadingStateErrorState()
- {
- bool result= CommonFunction.CheckRoutineStopState(_unloadRoutine);
- if (result)
- {
- AddLotTrackData();
- NotifyError(eEvent.ERR_SRD, _unloadRoutine.ErrorMsg, 0);
- }
- return result;
- }
- /// <summary>
- /// 停止unloading状态机
- /// </summary>
- /// <returns></returns>
- private bool StopUnloadingStateMachine()
- {
- //_unloadingStateMachine.Stop();
- if (_rotationAxis.IsRun)
- {
- _rotationAxis.StopPositionOperation();
- }
- if (_armAxis.IsRun)
- {
- _armAxis.StopPositionOperation();
- }
- return true;
- }
- #endregion
-
- /// <summary>
- /// 获取当前子状态机
- /// </summary>
- private string GetCurrentStateMachine()
- {
- string result;
- if(Runner.CurrentStep.ToString() == "Ready")
- {
- result = "Ready";
- }
- else if(Runner.CurrentStep.ToString().Contains("RunWafer"))
- {
- result = _runWaferRecipRoutine.CurrentStep;
- }
- else if(Runner.CurrentStep.ToString().Contains("Unloading"))
- {
- result = _unloadRoutine.CurrentStep;
- }
- else
- {
- result = "End";
- }
- return result;
- }
- /// <summary>
- /// 记录Lottrack
- /// </summary>
- private void LottrackRecord()
- {
- //记录Lottrack
- if (DateTime.Now.Subtract(_lotTackTime).TotalMilliseconds >= LOTTRACK_TIME)
- {
- AddLotTrackData();
- _lotTackTime = DateTime.Now;
- }
- }
-
- /// <summary>
- /// 获取Lot Track数据
- /// </summary>
- /// <returns></returns>
- private void AddLotTrackData()
- {
- SRDLotTrackData data = new SRDLotTrackData();
- data.TimeStamp = DateTime.Now;
- data.StateMachine = GetCurrentStateMachine();
- data.ArmPosition = _armAxis.MotionData.MotorPosition;
- data.WaterPressure = _srdCommonDevice.CommonData.WaterPressure;
- data.WaferPresence = $"{_srdCommonDevice.WaferPresence}:{_srdCommonDevice.CommonData.WaferPresence}";
- data.ChuckVacuumOn = _srdCommonDevice.CommonData.ChuckVacuum;
- data.ChuckVacuumPressure = _srdCommonDevice.CommonData.VacuumValue;
- data.ArmTorque = _armAxis.MotionData.ActualTorque;
- data.SpinTorque = _rotationAxis.MotionData.ActualTorque;
- data.RotationSpeed = _rotationAxis.MotionData.ActualVelocity;
- data.N2BelowOn = false;
- data.WaterAbove = _srdCommonDevice.CommonData.WaterAbove;
- data.WaterBelow = _srdCommonDevice.CommonData.WaterBelow;
- data.ExhaustOn = _srdCommonDevice.CommonData.ExhaustOn;
- data.LoaderDIEnable = _facilities.LoaderDiEnable;
- data.WaterFlow = 0;
- _datas.Add(data);
- }
- /// <summary>
- /// 重试
- /// </summary>
- /// <param name="step"></param>
- public RState Retry(int step)
- {
- List<Enum> preStepIds = new List<Enum>();
- return Runner.Retry(SRDProcessState.Ready, preStepIds, Module, "RunRecipe Retry");
- }
- /// <summary>
- /// 检验前面完成状态
- /// </summary>
- /// <returns></returns>
- public bool CheckCompleteCondition(int index)
- {
- if (_armAxis.IsRun)
- {
- NotifyError(eEvent.ERR_SRD, "Arm axis is run", 0);
- return false;
- }
- if (!_armAxis.IsHomed)
- {
- NotifyError(eEvent.ERR_SRD, "Arm axis is not homed", 0);
- return false;
- }
- if (_rotationAxis.IsRun)
- {
- NotifyError(eEvent.ERR_SRD, "Rotation axis is run", 0);
- return false;
- }
- if (!_rotationAxis.IsHomed)
- {
- NotifyError(eEvent.ERR_SRD, "Rotation axis is not homed", 0);
- return false;
- }
- if (!_srdCommonDevice.CommonData.ChuckVacuum)
- {
- NotifyError(eEvent.ERR_SRD, "Vacuum is not released", 0);
- return false;
- }
- if (!_srdCommonDevice.CommonData.DoorOpened)
- {
- NotifyError(eEvent.ERR_SRD, "Door is not opened", 0);
- return false;
- }
- return true;
- }
- }
- }
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