SRDProcessRecipeRoutine.cs 14 KB

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  1. using Aitex.Core.RT.Log;
  2. using Aitex.Core.RT.Routine;
  3. using MECF.Framework.Common.RecipeCenter;
  4. using MECF.Framework.Common.Routine;
  5. using CyberX8_Core;
  6. using CyberX8_RT.Devices.AXIS;
  7. using CyberX8_RT.Devices.SRD;
  8. using System;
  9. using System.Collections.Generic;
  10. using MECF.Framework.Common.Utilities;
  11. using MECF.Framework.Common.CommonData;
  12. using MECF.Framework.Common.CommonData.SRD;
  13. using Aitex.Core.RT.SCCore;
  14. using Aitex.Core.RT.Device;
  15. using CyberX8_RT.Devices.Facilities;
  16. using Aitex.Core.Util;
  17. using CyberX8_RT.Modules.Transporter;
  18. using MECF.Framework.Common.WaferHolder;
  19. namespace CyberX8_RT.Modules.SRD
  20. {
  21. public class SRDProcessRecipeRoutine : RoutineBase, IRoutine
  22. {
  23. #region 常量
  24. private const int LOTTRACK_TIME = 1000;
  25. #endregion
  26. private enum SRDProcessState
  27. {
  28. Ready,
  29. RunWafer,
  30. Unloading,
  31. End,
  32. InitialRunWaferStateMachine,
  33. InitialUnloadingStateMachine,
  34. CheckRunWaferStateMachineInitialStatus,
  35. CheckUnloadingStateMachineInitialStatus,
  36. StartRunWaferStateMachine,
  37. StartUnloadingStateMachine,
  38. CycleRun,
  39. CycleEnd
  40. }
  41. #region 内部变量
  42. /// <summary>
  43. /// 次数
  44. /// </summary>
  45. private int _cycleCount = 0;
  46. /// <summary>
  47. /// Rotation Axis
  48. /// </summary>
  49. private JetAxisBase _rotationAxis;
  50. /// <summary>
  51. /// Arm Axis
  52. /// </summary>
  53. private JetAxisBase _armAxis;
  54. /// <summary>
  55. /// SRD Recipe
  56. /// </summary>
  57. private SrdRecipe _srdRecipe;
  58. /// <summary>
  59. /// 设备对象
  60. /// </summary>
  61. private SrdCommonDevice _srdCommonDevice;
  62. /// <summary>
  63. /// Run wafer Recipe Routine
  64. /// </summary>
  65. private SRDRunWaferRecipeRoutine _runWaferRecipRoutine;
  66. /// <summary>
  67. /// Unload Routine
  68. /// </summary>
  69. private SRDUnloadRoutine _unloadRoutine;
  70. /// <summary>
  71. /// lock track time
  72. /// </summary>
  73. private DateTime _lotTackTime = DateTime.Now;
  74. /// <summary>
  75. /// LotTrack数据
  76. /// </summary>
  77. private List<SRDLotTrackData> _datas = new List<SRDLotTrackData>();
  78. /// <summary>
  79. /// LotTrack文件头数据
  80. /// </summary>
  81. private LotTrackFileHeaderCommonData _header = new LotTrackFileHeaderCommonData();
  82. /// <summary>
  83. /// Facilities
  84. /// </summary>
  85. private SystemFacilities _facilities;
  86. #endregion
  87. #region 属性
  88. /// <summary>
  89. /// 当前子状态机
  90. /// </summary>
  91. public string CurrentStateMachine
  92. {
  93. get { return GetCurrentStateMachine(); }
  94. }
  95. /// <summary>
  96. /// 当前cycle次数
  97. /// </summary>
  98. public int AchievedCycle { get { return Runner.LoopCounter; } }
  99. /// <summary>
  100. /// 是否正在用水
  101. /// </summary>
  102. public bool IsUsingWater { get { return _runWaferRecipRoutine.IsUsingWater; } }
  103. /// <summary>
  104. /// LotTrack数据
  105. /// </summary>
  106. public List<SRDLotTrackData> SRDLotTrackDatas { get { return _datas; } }
  107. /// <summary>
  108. /// LotTrack文件头数据
  109. /// </summary>
  110. public LotTrackFileHeaderCommonData SRDLotTrackHeaderDatas { get { return _header; } }
  111. #endregion
  112. /// <summary>
  113. /// 构造函数
  114. /// </summary>
  115. /// <param name="module"></param>
  116. public SRDProcessRecipeRoutine(string module, JetAxisBase rotationAxis, JetAxisBase armAxis, SrdCommonDevice srdCommon) : base(module)
  117. {
  118. _rotationAxis = rotationAxis;
  119. _armAxis = armAxis;
  120. _srdCommonDevice = srdCommon;
  121. _runWaferRecipRoutine = new SRDRunWaferRecipeRoutine(module);
  122. _unloadRoutine= new SRDUnloadRoutine(module);
  123. }
  124. /// <summary>
  125. /// 取消
  126. /// </summary>
  127. public void Abort()
  128. {
  129. if(_unloadRoutine.Monitor() == RState.Running)
  130. {
  131. _unloadRoutine.Abort();
  132. }
  133. if (_runWaferRecipRoutine.Monitor() == RState.Running)
  134. {
  135. _runWaferRecipRoutine.Abort();
  136. }
  137. Runner.Stop("Manual Abort");
  138. if (_srdCommonDevice != null)
  139. {
  140. _srdCommonDevice.EnterErrorOperation();
  141. }
  142. }
  143. /// <summary>
  144. /// 监控
  145. /// </summary>
  146. /// <returns></returns>
  147. /// <exception cref="NotImplementedException"></exception>
  148. public RState Monitor()
  149. {
  150. LottrackRecord();
  151. Runner.LoopStart(SRDProcessState.Ready, "Process Recipe Start", _cycleCount, NullFun, _delay_1ms)
  152. .LoopRun(SRDProcessState.StartRunWaferStateMachine, () => { return StartRunWaferRecipeStateMachine(); }, _delay_1ms)
  153. .LoopRunWithStopStatus(SRDProcessState.RunWafer, CheckRunWaferRecipeStateCompleteState, CheckRunWaferRecipeStateErrorState)
  154. .LoopRun(SRDProcessState.StartUnloadingStateMachine, () => { return StartUnloadingStateMachine(); }, _delay_1ms)
  155. .LoopRunWithStopStatus(SRDProcessState.Unloading, CheckUnloadingStateCompleteState, CheckUnloadingStateErrorState)
  156. .LoopEnd(SRDProcessState.CycleEnd, NullFun, _delay_1ms)
  157. .End(SRDProcessState.End, NullFun, _delay_1ms);
  158. return Runner.Status;
  159. }
  160. /// <summary>
  161. /// 启动
  162. /// </summary>
  163. /// <param name="objects"></param>
  164. /// <returns></returns>
  165. /// <exception cref="NotImplementedException"></exception>
  166. public RState Start(params object[] objects)
  167. {
  168. _srdRecipe = objects[0] as SrdRecipe;
  169. if (_srdRecipe == null)
  170. {
  171. LOG.WriteLog(eEvent.ERR_SRD, Module.ToString(), " recipe is null");
  172. return RState.Failed;
  173. }
  174. _cycleCount = (int)objects[1];
  175. if (_cycleCount == 0)
  176. {
  177. return RState.End;
  178. }
  179. _header.SoftWareVersion = System.Reflection.Assembly.GetExecutingAssembly().GetName().Version.ToString();
  180. _header.Recipe = $"{_srdRecipe.Ppid}.srd.rcp";
  181. if (SC.ContainsItem("System.ToolID")) _header.ToolID = SC.GetStringValue("System.ToolID");
  182. _facilities = DEVICE.GetDevice<SystemFacilities>("System.Facilities");
  183. if (_facilities == null)
  184. {
  185. LOG.WriteLog(eEvent.ERR_SRD, Module, "Facility is null");
  186. return RState.Failed;
  187. }
  188. _datas.Clear();
  189. _lotTackTime = DateTime.Now;
  190. return Runner.Start(Module, "Process Recipe");
  191. }
  192. #region RunWaferStateMatcine
  193. /// <summary>
  194. /// 启动状态机
  195. /// </summary>
  196. /// <param name="recipe"></param>
  197. /// <returns></returns>
  198. private bool StartRunWaferRecipeStateMachine()
  199. {
  200. bool result = _runWaferRecipRoutine.Start(_srdRecipe)==RState.Running;
  201. if (result)
  202. {
  203. LOG.WriteLog(eEvent.INFO_SRD, Module.ToString(), $"Start Run Wafer State Machine, recipe[{_srdRecipe.Ppid}] times[{_cycleCount + 1}]");
  204. }
  205. else
  206. {
  207. NotifyError(eEvent.ERR_SRD, _runWaferRecipRoutine.ErrorMsg, 0);
  208. }
  209. return result;
  210. }
  211. /// <summary>
  212. /// 检验RunWafer状态机完成情况
  213. /// </summary>
  214. /// <returns></returns>
  215. private bool CheckRunWaferRecipeStateCompleteState()
  216. {
  217. return CommonFunction.CheckRoutineEndState(_runWaferRecipRoutine);
  218. }
  219. /// <summary>
  220. /// 检验RunWafer状态机错误情况
  221. /// </summary>
  222. /// <returns></returns>
  223. private bool CheckRunWaferRecipeStateErrorState()
  224. {
  225. bool result = CommonFunction.CheckRoutineStopState(_runWaferRecipRoutine);
  226. if (result)
  227. {
  228. AddLotTrackData();
  229. if (_srdCommonDevice != null)
  230. {
  231. _srdCommonDevice.EnterErrorOperation();
  232. }
  233. NotifyError(eEvent.ERR_SRD, _runWaferRecipRoutine.ErrorMsg, 0);
  234. }
  235. return result;
  236. }
  237. #endregion
  238. #region UnloadingStateMatcine
  239. /// <summary>
  240. /// 启动状态机
  241. /// </summary>
  242. /// <param name="recipe"></param>
  243. /// <returns></returns>
  244. private bool StartUnloadingStateMachine()
  245. {
  246. bool result= _unloadRoutine.Start() == RState.Running;
  247. if (!result)
  248. {
  249. NotifyError(eEvent.ERR_SRD,_unloadRoutine.ErrorMsg, 0);
  250. }
  251. return result;
  252. }
  253. /// <summary>
  254. /// 检验Unloading状态机完成情况
  255. /// </summary>
  256. /// <returns></returns>
  257. private bool CheckUnloadingStateCompleteState()
  258. {
  259. return CommonFunction.CheckRoutineEndState(_unloadRoutine);
  260. }
  261. /// <summary>
  262. /// 检验Unloading状态机错误情况
  263. /// </summary>
  264. /// <returns></returns>
  265. private bool CheckUnloadingStateErrorState()
  266. {
  267. bool result= CommonFunction.CheckRoutineStopState(_unloadRoutine);
  268. if (result)
  269. {
  270. AddLotTrackData();
  271. NotifyError(eEvent.ERR_SRD, _unloadRoutine.ErrorMsg, 0);
  272. }
  273. return result;
  274. }
  275. /// <summary>
  276. /// 停止unloading状态机
  277. /// </summary>
  278. /// <returns></returns>
  279. private bool StopUnloadingStateMachine()
  280. {
  281. //_unloadingStateMachine.Stop();
  282. if (_rotationAxis.IsRun)
  283. {
  284. _rotationAxis.StopPositionOperation();
  285. }
  286. if (_armAxis.IsRun)
  287. {
  288. _armAxis.StopPositionOperation();
  289. }
  290. return true;
  291. }
  292. #endregion
  293. /// <summary>
  294. /// 获取当前子状态机
  295. /// </summary>
  296. private string GetCurrentStateMachine()
  297. {
  298. string result;
  299. if(Runner.CurrentStep.ToString() == "Ready")
  300. {
  301. result = "Ready";
  302. }
  303. else if(Runner.CurrentStep.ToString().Contains("RunWafer"))
  304. {
  305. result = _runWaferRecipRoutine.CurrentStep;
  306. }
  307. else if(Runner.CurrentStep.ToString().Contains("Unloading"))
  308. {
  309. result = _unloadRoutine.CurrentStep;
  310. }
  311. else
  312. {
  313. result = "End";
  314. }
  315. return result;
  316. }
  317. /// <summary>
  318. /// 记录Lottrack
  319. /// </summary>
  320. private void LottrackRecord()
  321. {
  322. //记录Lottrack
  323. if (DateTime.Now.Subtract(_lotTackTime).TotalMilliseconds >= LOTTRACK_TIME)
  324. {
  325. AddLotTrackData();
  326. _lotTackTime = DateTime.Now;
  327. }
  328. }
  329. /// <summary>
  330. /// 获取Lot Track数据
  331. /// </summary>
  332. /// <returns></returns>
  333. private void AddLotTrackData()
  334. {
  335. SRDLotTrackData data = new SRDLotTrackData();
  336. data.TimeStamp = DateTime.Now;
  337. data.StateMachine = GetCurrentStateMachine();
  338. data.ArmPosition = _armAxis.MotionData.MotorPosition;
  339. data.WaterPressure = _srdCommonDevice.CommonData.WaterPressure;
  340. data.WaferPresence = $"{_srdCommonDevice.WaferPresence}:{_srdCommonDevice.CommonData.WaferPresence}";
  341. data.ChuckVacuumOn = _srdCommonDevice.CommonData.ChuckVacuum;
  342. data.ChuckVacuumPressure = _srdCommonDevice.CommonData.VacuumValue;
  343. data.ArmTorque = _armAxis.MotionData.ActualTorque;
  344. data.SpinTorque = _rotationAxis.MotionData.ActualTorque;
  345. data.RotationSpeed = _rotationAxis.MotionData.ActualVelocity;
  346. data.N2BelowOn = false;
  347. data.WaterAbove = _srdCommonDevice.CommonData.WaterAbove;
  348. data.WaterBelow = _srdCommonDevice.CommonData.WaterBelow;
  349. data.ExhaustOn = _srdCommonDevice.CommonData.ExhaustOn;
  350. data.LoaderDIEnable = _facilities.LoaderDiEnable;
  351. data.WaterFlow = 0;
  352. _datas.Add(data);
  353. }
  354. /// <summary>
  355. /// 重试
  356. /// </summary>
  357. /// <param name="step"></param>
  358. public RState Retry(int step)
  359. {
  360. List<Enum> preStepIds = new List<Enum>();
  361. return Runner.Retry(SRDProcessState.Ready, preStepIds, Module, "RunRecipe Retry");
  362. }
  363. /// <summary>
  364. /// 检验前面完成状态
  365. /// </summary>
  366. /// <returns></returns>
  367. public bool CheckCompleteCondition(int index)
  368. {
  369. if (_armAxis.IsRun)
  370. {
  371. NotifyError(eEvent.ERR_SRD, "Arm axis is run", 0);
  372. return false;
  373. }
  374. if (!_armAxis.IsHomed)
  375. {
  376. NotifyError(eEvent.ERR_SRD, "Arm axis is not homed", 0);
  377. return false;
  378. }
  379. if (_rotationAxis.IsRun)
  380. {
  381. NotifyError(eEvent.ERR_SRD, "Rotation axis is run", 0);
  382. return false;
  383. }
  384. if (!_rotationAxis.IsHomed)
  385. {
  386. NotifyError(eEvent.ERR_SRD, "Rotation axis is not homed", 0);
  387. return false;
  388. }
  389. if (!_srdCommonDevice.CommonData.ChuckVacuum)
  390. {
  391. NotifyError(eEvent.ERR_SRD, "Vacuum is not released", 0);
  392. return false;
  393. }
  394. if (!_srdCommonDevice.CommonData.DoorOpened)
  395. {
  396. NotifyError(eEvent.ERR_SRD, "Door is not opened", 0);
  397. return false;
  398. }
  399. return true;
  400. }
  401. }
  402. }