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- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.Routine;
- using MECF.Framework.Common.Utilities;
- using CyberX8_Core;
- using CyberX8_RT.Devices.AXIS;
- using CyberX8_RT.Devices.AXIS.CANOpen;
- using CyberX8_RT.Modules.PUF;
- using CyberX8_RT.Modules;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using MECF.Framework.Common.CommonData.Loader;
- using CyberX8_RT.Modules.Transporter;
- using MECF.Framework.Common.WaferHolder;
- using CyberX8_RT.Modules.Loader;
- using Aitex.Core.Common;
- namespace CyberX8_RT.Devices.Loader
- {
- public class LoaderLoadRoutine : RoutineBase, IRoutine
- {
- private enum LoadStep
- {
- CheckPreCondition,
- WSClampOn,
- BernoulliN2On,
- BernoulliN2OnCheck,
- BernoulliBladderOff,
- BernoulliBladderOffCheck,
- TiltGotoFloat,
- TiltGotoFloatWait,
- Wait1,
- BernoulliBladderOn,
- BernoulliBladderOnCheck,
- CRSVacuumValue,
- CRSVacuumValueCheck,
- TiltGotoVertical,
- TiltGotoVerticalWait,
- CRSGotoUnlock,
- CRSGotoUnlockWait,
- ShuttleGotoCRS,
- ShuttleGotoCRSWait,
- WSBladderOn,
- WSBladderOnCheck,
- CRSGotoSetUp,
- CRSGotoSetUpWait,
- CRSGotoLock,
- CRSGotoLockWait,
- BernoulliN2Off,
- BernoulliN2OffCheck,
- WSBladderOff,
- WSBladderOffCheck,
- Wait2,
- CRSVacuumOff,
- CRSVacuumOffCheck,
- Wait3,
- ShuttleGotoMID,
- ShuttleGotoMIDWait,
- HomingCRSAxis,
- HomingCRSAxisWait,
- CRSHomedGotoSetUp,
- CRSHomedGotoSetUpCheck,
- End
-
- }
- #region 内部变量
- private string _side = "";
- private int _crsVacuumReleaseDelayInMilliseconds = 250;
- private int _translateOutDelayInMilliseconds = 250;
- private int _waferSize = 200;
- private JetAxisBase _crsAxis;
- private JetAxisBase _tiltAxis;
- private JetAxisBase _shuttleAxis;
- private JetAxisBase _rotationAxis;
- private LoaderCommonDevice _loaderCommonDevice;
- private LoaderSideDevice _sideDevice;
- private LoaderSideBernoulliBladderRoutine _bernoulliBladderRoutine;
- private LoaderSideBernoulliN2PressureRoutine _bernoulliN2PressureRoutine;
- private LoaderSideVacuumAndLevelCheckRoutineRoutine _vacuumAndLevelCheckRoutineRoutine;
- private LoaderSideVacuumLevelCheckRoutine _vacuumLevelCheckRoutine;
- private LoaderSideWhBladderRoutine _whBladderRoutine;
- #endregion
- /// <summary>
- /// 构造函数
- /// </summary>
- /// <param name="module"></param>
- public LoaderLoadRoutine(string module,string side) : base(module)
- {
- _side = side;
- }
-
- /// <summary>
- /// 中止
- /// </summary>
- public void Abort()
- {
- Runner.Stop("Manual Abort");
- }
- /// <summary>
- /// 监控
- /// </summary>
- /// <returns></returns>
- public RState Monitor()
- {
- Runner.Run(LoadStep.CheckPreCondition, CheckPreCondition, _delay_1ms)
- //1 WSClamp On
- .Run(LoadStep.WSClampOn, WaferHolderClampOn, _delay_1ms)
- //2 BernoulliN2 On
- .Run(LoadStep.BernoulliN2On, () => { return _bernoulliN2PressureRoutine.Start(true) == RState.Running; }, _delay_1ms)
- .WaitWithStopCondition(LoadStep.BernoulliN2OnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliN2PressureRoutine); },
- () => CheckRoutineStopStatus(_bernoulliN2PressureRoutine, "BernoulliN2 On failed"))
- //3 Bernoulli Bladder Off
- .Run(LoadStep.BernoulliBladderOff, () => { return _bernoulliBladderRoutine.Start(false) == RState.Running; }, _delay_1ms)
- .WaitWithStopCondition(LoadStep.BernoulliBladderOffCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliBladderRoutine); },
- () => CheckRoutineStopStatus(_bernoulliBladderRoutine, "BernoulliBladder Off failed"))
- //4 Tilt Goto Float
- .Run(LoadStep.TiltGotoFloat, () => { return AxisPosition(_tiltAxis, "FLOAT"); }, NullFun, _delay_1ms)
- .WaitWithStopCondition(LoadStep.TiltGotoFloatWait, () => { return _tiltAxis.Status == RState.End; },
- () => CheckAxisMotionStopStatus(_tiltAxis))
- //5 等待0.5秒
- .Delay(LoadStep.Wait1, 500)
- //6 BernoulliBladder On
- .Run(LoadStep.BernoulliBladderOn, () => { return _bernoulliBladderRoutine.Start(true) == RState.Running; }, _delay_1ms)
- .WaitWithStopCondition(LoadStep.BernoulliBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliBladderRoutine); },
- () => CheckRoutineStopStatus(_bernoulliBladderRoutine, "BernoulliBladder On failed"))
- //7 CRS Vacuum Check
- .Run(LoadStep.CRSVacuumValue, () => { return _vacuumLevelCheckRoutine.Start(true) == RState.Running; }, _delay_1ms)
- .WaitWithStopCondition(LoadStep.CRSVacuumValueCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumLevelCheckRoutine); },
- () => CheckRoutineStopStatus(_vacuumLevelCheckRoutine, "CRS Vacuum Check failed"))
- //8 Tilt Goto Vertical
- .Run(LoadStep.TiltGotoVertical, () => { return AxisPosition(_tiltAxis, "VERT"); }, NullFun, _delay_1ms)
- .WaitWithStopCondition(LoadStep.TiltGotoVerticalWait, () => { return _tiltAxis.Status == RState.End; },
- () => CheckAxisMotionStopStatus(_tiltAxis))
- //9 CRS Goto Unlock
- .Run(LoadStep.CRSGotoUnlock, () => { return AxisPosition(_crsAxis, $"Unlock{_waferSize}"); }, NullFun, _delay_1ms)
- .WaitWithStopCondition(LoadStep.CRSGotoUnlockWait, () => { return _crsAxis.Status == RState.End; },
- () => CheckAxisMotionStopStatus(_crsAxis))
- //10 Shuttle Goto CRS
- .Run(LoadStep.ShuttleGotoCRS, () => { return AxisPosition(_shuttleAxis, "LS"); }, NullFun, _delay_1ms)
- .WaitWithStopCondition(LoadStep.ShuttleGotoCRSWait, () => { return _shuttleAxis.Status == RState.End; },
- () => CheckAxisMotionStopStatus(_shuttleAxis))
- //11 WS Bladder On
- .Run(LoadStep.WSBladderOn, () => { return _whBladderRoutine.Start(true) == RState.Running; }, _delay_1ms)
- .WaitWithStopCondition(LoadStep.WSBladderOnCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); },
- () => CheckRoutineStopStatus(_whBladderRoutine, "WSBladder On failed"))
- //12 CRS Goto SetUp
- .Run(LoadStep.CRSGotoSetUp, () => { return AxisPosition(_crsAxis, $"Setup{_waferSize}"); }, NullFun, _delay_1ms)
- .WaitWithStopCondition(LoadStep.CRSGotoSetUpWait, () => { return _crsAxis.Status == RState.End; },
- () => CheckAxisMotionStopStatus(_crsAxis))
- //13 CRS Goto Lock
- .Run(LoadStep.CRSGotoLock, () => { return AxisPosition(_crsAxis, $"Lock{_waferSize}"); }, NullFun, _delay_1ms)
- .WaitWithStopCondition(LoadStep.CRSGotoLockWait, () => { return _crsAxis.Status == RState.End; },
- () => CheckAxisMotionStopStatus(_crsAxis))
- //14 Bernoulli N2 Off
- .Run(LoadStep.BernoulliN2Off, () => { return _bernoulliN2PressureRoutine.Start(false) == RState.Running; }, _delay_1ms)
- .WaitWithStopCondition(LoadStep.BernoulliN2OffCheck, () => { return CommonFunction.CheckRoutineEndState(_bernoulliN2PressureRoutine); },
- () => CheckRoutineStopStatus(_bernoulliN2PressureRoutine, "Bernoulli N2 Off failed"))
- //15 WS Bladder Off
- .Run(LoadStep.WSBladderOff, () => { return _whBladderRoutine.Start(false) == RState.Running; }, _delay_1ms)
- .WaitWithStopCondition(LoadStep.WSBladderOffCheck, () => { return CommonFunction.CheckRoutineEndState(_whBladderRoutine); },
- () => CheckRoutineStopStatus(_whBladderRoutine, "WS Bladder Off failed"))
- //16 等待0.5秒
- .Delay(LoadStep.Wait2, 500)
- //17 CRS Vacuum Off
- .Run(LoadStep.CRSVacuumOff, () => { return _vacuumAndLevelCheckRoutineRoutine.Start(false) == RState.Running; }, _delay_1ms)
- .WaitWithStopCondition(LoadStep.CRSVacuumOffCheck, () => { return CommonFunction.CheckRoutineEndState(_vacuumAndLevelCheckRoutineRoutine); },
- () => CheckRoutineStopStatus(_vacuumAndLevelCheckRoutineRoutine, "LS Vacuum Off failed"))
- //18 等待0.5秒
- .Delay(LoadStep.Wait3, 500)
- //19 Shuttle Goto Mid
- .Run(LoadStep.ShuttleGotoMID, () => { return AxisPosition(_shuttleAxis, "MID"); }, NullFun, _delay_1ms)
- .WaitWithStopCondition(LoadStep.ShuttleGotoMIDWait, () => { return _shuttleAxis.Status == RState.End; },
- () => CheckAxisMotionStopStatus(_shuttleAxis))
- //20 Home CRS Axis
- .Run(LoadStep.HomingCRSAxis, CRSHome, _delay_1ms)
- .WaitWithStopCondition(LoadStep.HomingCRSAxisWait, () => { return _crsAxis.Status == RState.End; },
- () => CheckCRSHomeStopStatus())
- .Run(LoadStep.CRSHomedGotoSetUp, () => { return AxisPosition(_crsAxis, $"Setup{_waferSize}"); }, _delay_1ms)
- .WaitWithStopCondition(LoadStep.CRSHomedGotoSetUpCheck, () => { return _crsAxis.Status == RState.End; },
- () => CheckAxisMotionStopStatus(_crsAxis))
- .End(LoadStep.End, UpdateWaferHolderLipCRSUsed);
- return Runner.Status;
- }
- /// <summary>
- /// 检验TranslateBladderOff异常状态
- /// </summary>
- /// <returns></returns>
- private bool CheckRoutineStopStatus(IRoutine routine, string error)
- {
- bool result = CommonFunction.CheckRoutineStopState(routine);
- if (result)
- {
- NotifyError(eEvent.ERR_LOADER, $"{error}", 0);
- }
- return result;
- }
- /// <summary>
- /// Axis goto position
- /// </summary>
- /// <param name="axis"></param>
- /// <param name="station"></param>
- /// <returns></returns>
- private bool AxisPosition(JetAxisBase axis, string station)
- {
- bool result = axis.PositionStation(station);
- if (!result)
- {
- NotifyError(eEvent.ERR_LOADER, $"{axis.Module} goto {station} failed", 0);
- }
- return result;
- }
- /// <summary>
- /// 检验电机运动异常状态
- /// </summary>
- /// <param name="axis"></param>
- /// <returns></returns>
- private bool CheckAxisMotionStopStatus(JetAxisBase axis)
- {
- bool result = axis.Status == RState.Failed || axis.Status == RState.Timeout;
- if (result)
- {
- NotifyError(eEvent.ERR_LOADER, $"{axis.Module} motion failed", 0);
- }
- return result;
- }
- /// <summary>
- /// CRS Home
- /// </summary>
- /// <returns></returns>
- private bool CRSHome()
- {
- bool result = _crsAxis.Home();
- if (!result)
- {
- NotifyError(eEvent.ERR_LOADER, "LS Axis home failed", 0);
- }
- return result;
- }
- /// <summary>
- /// 检验CRS home异常状态
- /// </summary>
- /// <returns></returns>
- private bool CheckCRSHomeStopStatus()
- {
- bool result=_crsAxis.Status==RState.Failed||_crsAxis.Status==RState.Timeout;
- if (result)
- {
- NotifyError(eEvent.ERR_LOADER, "LS Axis home failed", 0);
- }
- return result;
- }
- /// <summary>
- /// 启动
- /// </summary>
- /// <param name="objs"></param>
- /// <returns></returns>
- public RState Start(params object[] objs)
- {
- if (SC.ContainsItem($"Loader1.{_side}WaferSize"))
- {
- _waferSize = SC.GetValue<int>($"Loader1.{_side}WaferSize");
- }
- _crsAxis = GetCrsAxis();
- _tiltAxis = GetTiltAxis();
- _shuttleAxis= GetShuttleAxis();
- _loaderCommonDevice = DEVICE.GetDevice<LoaderCommonDevice>($"Loader1.Common");
- _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.Rotation");
- _sideDevice = DEVICE.GetDevice<LoaderSideDevice>($"{Module}.{_side}");
- _vacuumLevelCheckRoutine = new LoaderSideVacuumLevelCheckRoutine($"{Module}.{_side}");
- _whBladderRoutine = new LoaderSideWhBladderRoutine($"{Module}.{_side}");
- _bernoulliBladderRoutine = new LoaderSideBernoulliBladderRoutine($"{Module}.{_side}");
- _bernoulliN2PressureRoutine = new LoaderSideBernoulliN2PressureRoutine($"{Module}.{_side}");
- _vacuumAndLevelCheckRoutineRoutine = new LoaderSideVacuumAndLevelCheckRoutineRoutine($"{Module}.{_side}");
- if (SC.ContainsItem("Loader1.LSVacuumReleaseDelayInMilliseconds"))
- {
- _crsVacuumReleaseDelayInMilliseconds = SC.GetValue<int>("Loader1.LSVacuumReleaseDelayInMilliseconds");
- }
- if (SC.ContainsItem("Loader1.TranslateOutDelayInMilliseconds"))
- {
- _translateOutDelayInMilliseconds = SC.GetValue<int>("Loader1.TranslateOutDelayInMilliseconds");
- }
- Runner.Start(Module, "Load");
- return RState.Running;
- }
- /// <summary>
- /// 获取Shuttle轴对象
- /// </summary>
- /// <returns></returns>
- private JetAxisBase GetShuttleAxis()
- {
- switch (_side)
- {
- case "SideA":
- return DEVICE.GetDevice<JetAxisBase>($"{Module}.ShuttleA");
- default:
- return DEVICE.GetDevice<JetAxisBase>($"{Module}.ShuttleB");
- }
- }
- /// <summary>
- /// 获取CRS轴对象
- /// </summary>
- /// <returns></returns>
- private JetAxisBase GetCrsAxis()
- {
- switch(_side)
- {
- case "SideA":
- return DEVICE.GetDevice<JetAxisBase>($"{Module}.LSA");
- default:
- return DEVICE.GetDevice<JetAxisBase>($"{Module}.LSB");
- }
- }
- /// <summary>
- /// 获取Tilt轴对象
- /// </summary>
- /// <returns></returns>
- private JetAxisBase GetTiltAxis()
- {
- switch (_side)
- {
- case "SideA":
- return DEVICE.GetDevice<JetAxisBase>($"{Module}.TiltA");
- default:
- return DEVICE.GetDevice<JetAxisBase>($"{Module}.TiltB");
- }
- }
- /// <summary>
- /// 检验前置条件
- /// </summary>
- /// <returns></returns>
- private bool CheckPreCondition()
- {
- if(!CheckHomeCondition())
- {
- return false;
- }
- if(!CheckAxisCondition())
- {
- return false;
- }
- if(!StatusCheck())
- {
- return false;
- }
- if(!CRSVacuumCheck())
- {
- return false;
- }
- return true;
- }
- /// <summary>
- /// 检验Home条件
- /// </summary>
- /// <returns></returns>
- private bool CheckHomeCondition()
- {
- //检验PUF、Loader Transporter,Robot均Homed
- if (ModuleHelper.IsInstalled(ModuleName.PUF1))
- {
- PUFEntity puf1Entity = Singleton<RouteManager>.Instance.GetModule<PUFEntity>(ModuleName.PUF1.ToString());
- if (!puf1Entity.IsHomed)
- {
- NotifyError(eEvent.ERR_LOADER, "PUF1 is not homed",-1);
- return false;
- }
- }
- if (ModuleHelper.IsInstalled(ModuleName.Loader1))
- {
- LoaderEntity loaderEntity = Singleton<RouteManager>.Instance.GetModule<LoaderEntity>(ModuleName.Loader1.ToString());
- if (!loaderEntity.IsHomed)
- {
- NotifyError(eEvent.ERR_LOADER, "Loader is not homed", -1);
- return false;
- }
- }
- if (ModuleHelper.IsInstalled(ModuleName.Transporter2))
- {
- TransporterEntity loaderTransportEntity = Singleton<RouteManager>.Instance.GetModule<TransporterEntity>(ModuleName.Transporter2.ToString());
- if (!loaderTransportEntity.IsHomed)
- {
- NotifyError(eEvent.ERR_LOADER, "Loader Transporter is not homed",-1);
- return false;
- }
- }
- return true;
- }
- /// <summary>
- /// 检验Axis位置
- /// </summary>
- /// <param name="side"></param>
- /// <returns></returns>
- private bool CheckAxisCondition()
- {
- if(!_rotationAxis.IsHomed)
- {
- NotifyError(eEvent.ERR_LOADER, $"rotation is not homed",-1);
- return false;
- }
- if (!_shuttleAxis.IsHomed)
- {
- NotifyError(eEvent.ERR_LOADER, $"{_shuttleAxis.Name} is not homed",-1);
- return false;
- }
- if (!_tiltAxis.IsHomed)
- {
- NotifyError(eEvent.ERR_LOADER, $"{_tiltAxis.Name} is not homed", -1);
- return false;
- }
- if (!_crsAxis.IsHomed)
- {
- NotifyError(eEvent.ERR_LOADER, $"{_crsAxis.Name} is not homed",-1);
- return false;
- }
- double rotationPosition = _rotationAxis.MotionData.MotorPosition; //校验rotation是否再load位置
- if (!_rotationAxis.CheckPositionIsInStation(rotationPosition, $"LOAD{_side.Substring(_side.Length- 1)}{_waferSize}"))
- {
- NotifyError(eEvent.ERR_LOADER, $"rotation {rotationPosition} not in LOAD{_side.Substring(_side.Length - 1)}{_waferSize}", -1);
- return false;
- }
- double shuttlePosition=_shuttleAxis.MotionData.MotorPosition;//校验shuttle位置是否再out位置
- if (!_shuttleAxis.CheckPositionIsInStation(shuttlePosition, $"OUT{_waferSize}"))
- {
- NotifyError(eEvent.ERR_LOADER, $"shuttle {shuttlePosition} not in $OUT{_waferSize}",-1);
- return false;
- }
- double tiltPosition = _tiltAxis.MotionData.MotorPosition;//校验tilt是否在hori位置
- if (!_tiltAxis.CheckPositionIsInStation(tiltPosition, "HORI"))
- {
- NotifyError(eEvent.ERR_LOADER, $"tilt {tiltPosition} not in HORI", -1);
- return false;
- }
- double crsPosition=_crsAxis.MotionData.MotorPosition;//校验crs是否在setup位置
- if (_crsAxis.CheckPositionIsInStation(tiltPosition, $"Setup{_waferSize}"))
- {
- NotifyError(eEvent.ERR_LOADER, $"crs {crsPosition} not at Setup{_waferSize}",-1);
- return false;
- }
- return true;
- }
- /// <summary>
- /// Wafer Holder Clamp On
- /// </summary>
- /// <returns></returns>
- private bool WaferHolderClampOn()
- {
- bool result = _loaderCommonDevice.WaferHolderClampOnAction();
- if (!result)
- {
- NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle Clamp on faied", 0);
- }
- return result;
- }
- /// <summary>
- /// Status Check
- /// </summary>
- /// <param name="side"></param>
- /// <returns></returns>
- private bool StatusCheck()
- {
- //判断是否放置wafershuttle
- if (!_loaderCommonDevice.CommonData.WaferHolderPresent)
- {
- NotifyError(eEvent.ERR_LOADER, "There is no wafer shuttle, can not do load", -1);
- return false;
- }
- return true;
- }
- /// <summary>
- /// CRS Vacuum Check
- /// </summary>
- /// <param name="side"></param>
- /// <returns></returns>
- private bool CRSVacuumCheck()
- {
- LoaderSideData sideData = _sideDevice.SideData;
- LoaderCommonData commonData = _loaderCommonDevice.CommonData;
- //Bernoulli Bladder
- if (!sideData.BernoulliBladder)
- {
- NotifyError(eEvent.ERR_LOADER, "BernoulliBladder is off", -1);
- return false;
- }
- if (sideData.BernoulliExtended)
- {
- NotifyError(eEvent.ERR_LOADER, "Bernoulli is Extended", -1);
- return false;
- }
- //Bernoulli N2
- if (sideData.BernoulliN2)
- {
- NotifyError(eEvent.ERR_LOADER, "Bernoulli N2 is On", -1);
- return false;
- }
- //CRS Vacuum检验
- if (!sideData.CRSVacuum)
- {
- NotifyError(eEvent.ERR_LOADER, "LS Vacuum is off",-1);
- return false;
- }
- if (SC.ContainsItem($"{Module}.LSVacuumHighLimit")) //真空值要大于最小设定值
- {
- double crsVacuumHighLimit = SC.GetValue<double>($"{Module}.LSVacuumHighLimit");
- if (sideData.CRSVacuumValue >= crsVacuumHighLimit || sideData.CRSVacuumValue >= 0)
- {
- NotifyError(eEvent.ERR_LOADER, "LS Vacuum value is invalid", -1);
- return false;
- }
- }
- //WS Clamp
- if (!commonData.WaferHolderClamp)
- {
- NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle Clamp is off", -1);
- return false;
- }
- //WS Bladder
- if (sideData.WHBladder)
- {
- NotifyError(eEvent.ERR_LOADER, "WS Bladder is on", -1);
- return false;
- }
- //Drip Tray Fluid
- if (commonData.DripTrayFluid)
- {
- NotifyError(eEvent.ERR_LOADER, "Drip Tray Fluid is on", -1);
- return false;
- }
- //Wafer Shuttle Present
- if (!commonData.WaferHolderPresent)
- {
- NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle is absent",-1);
- return false;
- }
- return true;
- }
- /// <summary>
- /// 更新WaferHolder LipCRS用量
- /// </summary>
- /// <returns></returns>
- private bool UpdateWaferHolderLipCRSUsed()
- {
- WaferHolderInfo waferHolderInfo = WaferHolderManager.Instance.GetWaferHolder("Loader");
- if (waferHolderInfo != null)
- {
- if (!string.IsNullOrEmpty(waferHolderInfo.CrsAId)&&_side=="SideA")
- {
- waferHolderInfo.CrsATotalUses++;
- WaferHolderManager.Instance.UpdateWaferHolderInfo(waferHolderInfo);
- }
- if (!string.IsNullOrEmpty(waferHolderInfo.CrsBId) && _side == "SideB")
- {
- waferHolderInfo.CrsBTotalUses++;
- WaferHolderManager.Instance.UpdateWaferHolderInfo(waferHolderInfo);
- }
- }
- return true;
- }
- }
- }
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