| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384 | using Aitex.Core.Common;using Aitex.Core.RT.Device;using Aitex.Core.RT.Log;using Aitex.Core.RT.Routine;using Aitex.Core.Util;using CyberX8_Core;using CyberX8_RT.Devices.AXIS;using CyberX8_RT.Devices.EFEM;using CyberX8_RT.Modules.LPs;using CyberX8_RT.Modules.Rinse;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.Routine;using MECF.Framework.Common.Schedulers;using MECF.Framework.Common.SubstrateTrackings;using MECF.Framework.Common.Utilities;using System;using System.Collections.Generic;using System.Linq;using System.Text;using System.Threading.Tasks;namespace CyberX8_RT.Modules.EFEM{    public class CycleRobotCycleNewRoutine : ModuleRoutineBase, IRoutine    {        private enum CycleRobotCycleStep        {            LoopStart,            LoopRunRobotCycle,            LoopRunRobotCycleWait,            LoopEnd,            End        }        /// <summary>        /// Cycle次数        /// </summary>        private int _cycleTimes;        /// <summary>        /// 当前处于第几次Cycle        /// </summary>        private int _currentCycle;        private RobotCycleMoveRoutine _cycleMoveRoutine;        private List<ModuleName> _sequences;        private int _alignerAngle;        private List<EfemCycleAction> _actions;        private int _dummySlotNumber = 25; //当前cycle中的dummy slot 数量        public CycleRobotCycleNewRoutine(EfemBase efem) : base(ModuleName.EfemRobot)        {            _cycleMoveRoutine = new RobotCycleMoveRoutine(efem);        }        public RState Start(params object[] objs)        {            _currentCycle = 0;            string str = objs[0].ToString();            _sequences = new List<ModuleName>();            foreach(string item in str.Split('-'))            {                _sequences.Add((ModuleName)Enum.Parse(typeof(ModuleName), item));            }            if(!CheckRobotCyclePreCondiction(_sequences))            {                return RState.Failed;            }            _cycleTimes=(int)objs[1];            _alignerAngle = (int)objs[2];            _actions = new List<EfemCycleAction>();            GenerateCycleAction();            if (_cycleTimes < 1)            {                LOG.Write(eEvent.ERR_EFEM_ROBOT, Module, $"Input Robot Cycle Times{_cycleTimes} error");                return RState.Failed;            }            return Runner.Start(Module, "Start CycleRobotCycleRoutine");        }        private void GenerateCycleAction()        {            if (!ModuleHelper.IsLoadPort(_sequences[0]))            {                return;            }            WaferInfo[] waferInfos = WaferManager.Instance.GetWafers(_sequences[0]);            int count = 0;            foreach (WaferInfo item in waferInfos)            {                if (item.IsEmpty)                {                    continue;                }                _actions.AddRange(GenerateCycle(_sequences[0], item.Slot, _sequences[1], ModuleHelper.IsDummy(_sequences[1]) ? count : 0));                for (int i = 1; i < _sequences.Count; i++)                {                    if (i == 1)                    {                        _actions.AddRange(GenerateCycle(_sequences[i], ModuleHelper.IsDummy(_sequences[i]) ? count : 0, _sequences[i + 1],                            ModuleHelper.IsDummy(_sequences[i + 1]) ? count : 0));                    }                    else if (i == _sequences.Count - 1)                    {                        _actions.AddRange(GenerateCycle(_sequences[i], ModuleHelper.IsDummy(_sequences[i]) ? count : 0, _sequences[0],                            item.Slot));                    }                    if (ModuleHelper.IsDummy(_sequences[i]))                    {                        WaferInfo[] dummywaferInfos = WaferManager.Instance.GetWafers(_sequences[i]);                        if (dummywaferInfos != null)                        {                            _dummySlotNumber = dummywaferInfos.Length;                        }                    }                }                count++;                if(count >= _dummySlotNumber)                {                    count = 0;                }            }        }        private List<EfemCycleAction> GenerateCycle(ModuleName source,int sourceSlot,ModuleName destModule,int destSlot)        {            List<EfemCycleAction> actions = new List<EfemCycleAction>();            if (source == ModuleName.Aligner1)            {                EfemCycleAction action = new EfemCycleAction();                action.Action = "Align";                action.Parameter = _alignerAngle;                actions.Add(action);            }            EfemCycleAction pick = new EfemCycleAction();            MoveItem pickMoveItem = new MoveItem();            pickMoveItem.SourceModule = source;            pickMoveItem.SourceSlot = sourceSlot;            pick.Parameter = pickMoveItem;            pick.Action = "Pick";            actions.Add(pick);            EfemCycleAction place = new EfemCycleAction();            MoveItem placeMoveItem = new MoveItem();            placeMoveItem.DestinationModule = destModule;            placeMoveItem.DestinationSlot = destSlot;            place.Parameter = placeMoveItem;            place.Action = "Place";            actions.Add(place);            return actions;        }        public RState Monitor()        {            Runner.LoopStart(CycleRobotCycleStep.LoopStart, "Loop StartCycleRobotCycleRoutine", _cycleTimes, NullFun, _delay_1ms)                .LoopRun(CycleRobotCycleStep.LoopRunRobotCycle, () => _cycleMoveRoutine.Start(_actions) == RState.Running,_delay_1ms)                .LoopRunWithStopStatus(CycleRobotCycleStep.LoopRunRobotCycleWait, () => { return CommonFunction.CheckRoutineEndState(_cycleMoveRoutine); },                 () => CheckRoutineStopStatus(_cycleMoveRoutine, "CycleRobotCycleRoutine failed"), 86400000)//24小时                .LoopEnd(CycleRobotCycleStep.LoopEnd, UpdateCycleCount, _delay_1ms)                .End(CycleRobotCycleStep.End, AchievedCycleCount, _delay_1ms);            return Runner.Status;        }        private bool CheckRoutineStopStatus(IRoutine routine, string error)        {            bool result = CommonFunction.CheckRoutineStopState(routine);            if (result)            {                Stop($"{error}");            }            return result;        }                /// <summary>        /// Abort        /// </summary>        public void Abort()        {            Runner.Stop("CycleRobotCycleRoutine Abort");        }        /// <summary>        /// 统计完成的Cycle次数        /// </summary>        /// <returns></returns>        private bool UpdateCycleCount()        {            _currentCycle += 1;            return true;        }        /// <summary>        ///         /// </summary>        /// <returns></returns>        private bool AchievedCycleCount()        {            _currentCycle -= 1;            return true;        }        /// <summary>        /// 获取当前Cycle次数        /// </summary>        /// <returns></returns>        public int GetCurrentCycle()        {            return _currentCycle;        }        private bool CheckRobotCyclePreCondiction(List<ModuleName> lists)        {            bool result = true;            //Robot            if (!CheckRobotStatus())             {                return false;            }            //LP            if(lists.Contains(ModuleName.LP1))            {                if (!CheckLoadPortStatus(ModuleName.LP1))                {                    return false;                };            }            else if (lists.Contains(ModuleName.LP2))            {                if (!CheckLoadPortStatus(ModuleName.LP2))                {                    return false;                };            }            else            {                if (!CheckLoadPortStatus(ModuleName.LP2))                {                    return false;                };            }            //Dummy            if (lists.Contains(ModuleName.Dummy1))            {                if (!CheckDummyStatus(ModuleName.Dummy1))                {                    return false;                };            }            else if(lists.Contains(ModuleName.Dummy2))            {                if (!CheckDummyStatus(ModuleName.Dummy2))                {                    return false;                };            }            //Puf            if (lists.Contains(ModuleName.PUF1) && !CheckPufStatus(ModuleName.PUF1))            {                return false ;            }            //Srd            if (lists.Contains(ModuleName.SRD1))            {                if (!CheckSrdStatus(ModuleName.SRD1))                {                    return false;                };            }            else if(lists.Contains(ModuleName.SRD2))            {                if (!CheckSrdStatus(ModuleName.SRD2))                {                    return false;                };            }            return result;        }        //检查robot状态        private bool CheckRobotStatus()        {            bool result = true;            if (WaferManager.Instance.CheckHasWafer(ModuleName.EfemRobot, 0))            {                Stop($"Efem robot arm already has a wafer, cannot do the RobotCycle action");                result =  false;            }            return result;        }        //检查loadport状态        private bool CheckLoadPortStatus(ModuleName loadpoartName)        {            bool result = true;                        if (ModuleHelper.IsInstalled(loadpoartName))            {                Loadport loadPort = GetLoadPort(loadpoartName);                if (loadPort == null)                {                    Stop($"{loadpoartName} is null");                    return false;                }                WaferInfo[] waferInfos = WaferManager.Instance.GetWafers(loadpoartName);                if (waferInfos.Length < 1)                {                    Stop($"there is no wafer in {loadpoartName}");                    return false;                }            }            else            {                Stop($"{loadpoartName} is not installed");                return false;            }            return result;        }        private Loadport GetLoadPort(ModuleName station)        {            LoadPortModule loadPortModule = Singleton<RouteManager>.Instance.EFEM.GetLoadportModule(station - ModuleName.LP1);            return loadPortModule.LPDevice;        }        //Dummy状态判断        private bool CheckDummyStatus(ModuleName dummyName)        {            bool result = true;            if (!ModuleHelper.IsInstalled(dummyName))            {                Stop($"{dummyName} is not installed");                return false;            }            //若dummy存在wafer,需要人工处理            DummyDevice dummyDevice = Singleton<RouteManager>.Instance.EFEM.GetDummyDevice(dummyName - ModuleName.Dummy1);            if (dummyDevice != null)            {                if (!dummyDevice.HasCassette)                {                    Stop($"{dummyName} dose not have cassette");                    return false;                }                WaferInfo[] waferInfos = WaferManager.Instance.GetWafers(dummyName);                if (waferInfos.Length > 0)                {                    foreach (var item in waferInfos)                    {                        if (item != null && !item.IsEmpty)                        {                            Stop($"There are wafers inside the {dummyName},cannot do the RobotCycle action");                            return false;                        }                    }                }            }            return result;        }        //检查puf        private bool CheckPufStatus(ModuleName pufName)        {            bool result = true;            if (!ModuleHelper.IsInstalled(pufName))            {                Stop($"{pufName} is not install");                return false;            }            JetAxisBase puf1RotationAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.PUF1}.Rotation");            if (puf1RotationAxis == null)            {                Stop("Puf1 Rotation Axis is null");                return false;            }            double puf1RotationPosition = puf1RotationAxis.MotionData.MotorPosition;            if ( !puf1RotationAxis.CheckPositionIsInStation(puf1RotationPosition, "Robot"))            {                Stop($"PUF1 Rotation {puf1RotationPosition} is not in Robot");                return false;            }            return result;        }        //检查srd        private bool CheckSrdStatus(ModuleName SrdName)        {             bool result = true;            if (!ModuleHelper.IsInstalled(SrdName))            {                Stop($"{SrdName} is not install");                return false;            }            return result;        }    }}
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