| .. |
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Buffer
|
8c811f7802
update double wafers scheduler
|
7 months ago |
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Dryer
|
6497945cbe
Revise jobcreate and lottrack bugs;
|
7 months ago |
|
Dummy
|
f7533a737b
Initialize
|
9 months ago |
|
EFEM
|
0b609ee2cd
add EFEM DoorLocked signal
|
6 months ago |
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LPs
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c695867e44
update loadport status
|
7 months ago |
|
Loader
|
2facb74aa2
add QDR Prewet function;
|
6 months ago |
|
Metal
|
2facb74aa2
add QDR Prewet function;
|
6 months ago |
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PUF
|
be3b324847
update EFEM UI;
|
5 months ago |
|
Prewet
|
6550cc0e88
Add Manual KeepWet LotTrack;
|
6 months ago |
|
Reservoir
|
07fbbfc5ca
EFEM place routine add aligner wafersize and distance command
|
6 months ago |
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Rinse
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2bf0be7542
update loader waferSize
|
6 months ago |
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SRD
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72f614e1ff
Add SRD Flipper Animation;
|
6 months ago |
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Transporter
|
2facb74aa2
add QDR Prewet function;
|
6 months ago |
|
Autotransfer_LP_FA.cs
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f7533a737b
Initialize
|
9 months ago |
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DVIDName.cs
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f7533a737b
Initialize
|
9 months ago |
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EntityTaskBase.cs
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f7533a737b
Initialize
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9 months ago |
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FaModuleNotifier.cs
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f7533a737b
Initialize
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9 months ago |
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FaRemoteManager.cs
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371876b350
add robot map routine
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8 months ago |
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ManualTransfer.cs
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f7533a737b
Initialize
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9 months ago |
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ModuleHomeAllRoutine.cs
|
7849fa3cd1
update scheduler
|
7 months ago |
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ReservoirMetalHomeRoutine.cs
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f7533a737b
Initialize
|
9 months ago |
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ResourceMonitor.cs
|
f7533a737b
Initialize
|
9 months ago |
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RouteManager.cs
|
4feb75325b
update ui log
|
6 months ago |
chenkui
be3b324847
update EFEM UI;