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Buffer
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8c811f7802
update double wafers scheduler
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hai 3 meses |
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Dryer
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2a4870d3c3
synchronous x12 bug solution to x8
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hai 1 mes |
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Dummy
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f7533a737b
Initialize
|
hai 5 meses |
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EFEM
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2ea59fe258
revise robot cycle bug
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hai 1 mes |
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LPs
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c695867e44
update loadport status
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hai 3 meses |
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Loader
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2facb74aa2
add QDR Prewet function;
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hai 1 mes |
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Metal
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f71afdff82
update metal short current test
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hai 3 semanas |
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PUF
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be3b324847
update EFEM UI;
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hai 1 mes |
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Prewet
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6550cc0e88
Add Manual KeepWet LotTrack;
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hai 1 mes |
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Reservoir
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5df7250a7f
add efem lock UI， add gold power set simulator
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hai 1 mes |
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Rinse
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2a4870d3c3
synchronous x12 bug solution to x8
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hai 1 mes |
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SRD
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72f614e1ff
Add SRD Flipper Animation;
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hai 2 meses |
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Transporter
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2facb74aa2
add QDR Prewet function;
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hai 1 mes |
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Autotransfer_LP_FA.cs
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f7533a737b
Initialize
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hai 5 meses |
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DVIDName.cs
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f7533a737b
Initialize
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hai 5 meses |
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EntityTaskBase.cs
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f7533a737b
Initialize
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hai 5 meses |
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FaModuleNotifier.cs
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f7533a737b
Initialize
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hai 5 meses |
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FaRemoteManager.cs
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371876b350
add robot map routine
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hai 4 meses |
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HoldoffTimeSignalMonitor.cs
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2819cb58db
revise reservoir holdofftime monitor bug
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hai 1 mes |
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ManualTransfer.cs
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f7533a737b
Initialize
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hai 5 meses |
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ModuleHomeAllRoutine.cs
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7849fa3cd1
update scheduler
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hai 3 meses |
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ReservoirMetalHomeRoutine.cs
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f7533a737b
Initialize
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hai 5 meses |
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ResourceMonitor.cs
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f7533a737b
Initialize
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hai 5 meses |
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RouteManager.cs
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4feb75325b
update ui log
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hai 2 meses |
chenkui
f71afdff82
update metal short current test