| 123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504 | using Aitex.Core.RT.Device;using Aitex.Core.RT.Routine;using MECF.Framework.Common.Equipment;using MECF.Framework.Common.Routine;using CyberX8_Core;using CyberX8_RT.Devices.AXIS;using CyberX8_RT.Devices.Loader;using System;using System.Collections.Generic;using Aitex.Core.RT.Log;using MECF.Framework.Common.CommonData.Loader;using MECF.Framework.Common.WaferHolder;using Aitex.Core.RT.SCCore;using Aitex.Core.Util;namespace CyberX8_RT.Modules.Loader{    public class LoaderLoadSideRoutine : RoutineBase, IRoutine    {        private enum LoadStep        {            SideLoad,            SideAllLoadWait,            LeakTest,            LeakTestWait,            RotationGoToTRNPA,            RotationGoToTRNPAWait,            UnclampWaferHolder,            End        }        #region 常量        private const string SIDE_A = "SideA";        private const string SIDE_B = "SideB";        private const int LOTTRACK_TIME = 1000;        #endregion        #region 内部变量        private JetAxisBase _rotationAxis;        private LoaderLoadRoutine _sideLoadRoutine;        private LoaderCommonDevice _loaderCommonDevice;        private bool _isSideLoaded = false;        private bool _isSideStop = false;        /// <summary>        /// lotTrack time        /// </summary>        private DateTime _lotTackTime = DateTime.Now;        /// <summary>        /// Loader Common        /// </summary>        private LoaderCommonDevice _loaderCommon;        /// <summary>        /// LoaderSide         /// </summary>        private LoaderSideDevice _loaderSide;        /// <summary>        /// Loader LotTrackData        /// </summary>        private List<LoaderLotTrackData> _datas = new List<LoaderLotTrackData>();        /// <summary>        /// Flow LotTrackData        /// </summary>        private List<LoaderFlowLotTrackData> _flowDatas = new List<LoaderFlowLotTrackData>();        /// <summary>        /// Loader Start and Finish Time        /// </summary>        private List<DateTime> _loadTimeList = new List<DateTime>();        /// <summary>        ///         /// </summary>        private string _side = "";        /// <summary>        /// WaferSize        /// </summary>        private int _waferSize;        /// <summary>        /// load是否完成        /// </summary>        private bool _loadComplete = false;        /// <summary>        /// 完成后运行        /// </summary>        private string _completeSide = "TRNPA";        /// <summary>        /// Wafer组        /// </summary>        private string _waferGroup = "";        #endregion        #region 属性        /// <summary>        /// UnLoad LotTrackData        /// </summary>        public List<LoaderLotTrackData> LoadLotTrackDatas { get { return _datas; } }        /// <summary>        /// Flow LotTrackData        /// </summary>        public List<LoaderFlowLotTrackData> FlowLotTrackDatas { get { return _flowDatas; } }        /// <summary>        /// LoadTimeList        /// </summary>        public List<DateTime> LoadTimeList { get { return _loadTimeList; } }        /// <summary>        /// Wafer组        /// </summary>        public string WaferGroup { get { return _waferGroup; } }        /// <summary>        /// is SideA        /// </summary>        public bool IsSideA { get { return _side == "A" ? true : false; } }        #endregion        /// <summary>        /// 构造函数        /// </summary>        /// <param name="module"></param>        public LoaderLoadSideRoutine(string module) : base(module)        {        }        /// <summary>        /// 中止        /// </summary>        public void Abort()        {        }        /// <summary>        /// 监控        /// </summary>        /// <returns></returns>        public RState Monitor()        {            //记录Lot track            LottrackRecord();            Runner.Run(LoadStep.SideLoad, () => StartLoadRoutine(_sideLoadRoutine,_isSideLoaded), _delay_1ms)                .WaitWithStopCondition(LoadStep.SideAllLoadWait, CheckLoadAllRoutineEndStatus,CheckLoadAllRoutineStopStatus)                .Run(LoadStep.LeakTest, StartFlowTest, _delay_1ms)                .WaitWithStopCondition(LoadStep.LeakTestWait, CheckFlowTestEndStatus, CheckFlowTestStopStatus)                .RunIf(LoadStep.RotationGoToTRNPA,_loadComplete,RotationGotoTransporterA,_delay_1s)                .WaitWithStopConditionIf(LoadStep.RotationGoToTRNPAWait,_loadComplete, CheckRotationPositionStatus,CheckRotationPositionRunStop)                .RunIf(LoadStep.UnclampWaferHolder,_loadComplete, WaferHolderClampOffAction,_delay_1ms)                .End(LoadStep.End, UpdateWaferHolderUse, _delay_1ms);            return Runner.Status;        }        /// <summary>        /// 检验Rotation移动状态        /// </summary>        /// <returns></returns>        private bool CheckRotationPositionStatus()        {            return _rotationAxis.Status == RState.End;        }        /// <summary>        /// 检验Rotation是否还在运动        /// </summary>        /// <returns></returns>        private bool CheckRotationPositionRunStop()        {            bool result= _rotationAxis.Status == RState.Failed||_rotationAxis.Status==RState.Timeout;            if (result)            {                NotifyError(eEvent.ERR_LOADER, "rotation goto position failed", 2);            }            return result;        }        /// <summary>        /// 启动load routine        /// </summary>        /// <param name="loadRoutine"></param>        /// <returns></returns>        private bool StartLoadRoutine(LoaderLoadRoutine loadRoutine,bool isSideLoaded)        {            if (isSideLoaded)            {                return true;            }            bool result= loadRoutine.Start()==RState.Running;            if (!result)            {                NotifyError(eEvent.ERR_LOADER, loadRoutine.ErrorMsg, 0);            }            return result;        }        /// <summary>        /// 检验LoadAll完成状态        /// </summary>        /// <returns></returns>        private bool CheckLoadAllRoutineEndStatus()        {            bool sideResult = true;            if (!_isSideLoaded)            {                sideResult = CheckLoadRoutineEndStatus(_sideLoadRoutine);            }            if (sideResult)            {                _loadTimeList.Add(DateTime.Now);            }            return sideResult;        }        /// <summary>        /// 检验LoadAll停止状态        /// </summary>        /// <returns></returns>        private bool CheckLoadAllRoutineStopStatus()        {            bool sideComplete = false;            if(!_isSideLoaded&&!_isSideStop)            {                RState ret = _sideLoadRoutine.Monitor();                _isSideStop = ret == RState.Failed || ret == RState.Timeout;                sideComplete = (ret != RState.Running);                if (_isSideStop)                {                    NotifyError(eEvent.ERR_LOADER, $"load A failed\r\n{_sideLoadRoutine.ErrorMsg}", 0);                }            }            return _isSideStop;        }        /// <summary>        /// 检验routine完成状态        /// </summary>        /// <param name="loadRoutine"></param>        /// <returns></returns>        private bool CheckLoadRoutineEndStatus(LoaderLoadRoutine loadRoutine)        {            return loadRoutine.Monitor() == RState.End;        }        /// <summary>        /// 启动Flowtest        /// </summary>        /// <returns></returns>        private bool StartFlowTest()        {            bool result= _loaderCommonDevice.StartFlowTestAction();            if (!result)            {                NotifyError(eEvent.ERR_LOADER, "Start Flow Test failed", 1);            }            return result;        }        /// <summary>        /// 检验FlowTest停止状态        /// </summary>        /// <returns></returns>        private bool CheckFlowTestStopStatus()        {            if (_loaderCommonDevice.Status == RState.Failed || _loaderCommonDevice.Status == RState.Timeout)            {                NotifyError(eEvent.ERR_LOADER, "Flow Test failed",1);                return true;            }            return false;        }        /// <summary>        /// 检验FlowTest完成状态        /// </summary>        /// <returns></returns>        private bool CheckFlowTestEndStatus()        {            bool result = _loaderCommonDevice.Status == RState.End;            if (result)            {                _flowDatas = _loaderCommonDevice.FlowLotTrackDatas;            }            return result;        }        /// <summary>        /// Rotation 运动至TRNPA        /// </summary>        /// <returns></returns>        private bool RotationGotoTransporterA()        {            bool result = _rotationAxis.PositionStation(_completeSide, false);            if (!result)            {                NotifyError(eEvent.ERR_LOADER, $"rotation start goto {_completeSide} failed", 2);            }            return result;        }        /// <summary>        /// Wafer Holder Clamp Off        /// </summary>        /// <returns></returns>        public bool WaferHolderClampOffAction()        {            bool result = _loaderCommonDevice.WaferHolderClampOffAction();            if (!result)            {                NotifyError(eEvent.ERR_LOADER, "Wafer Shuttle Clamp Off failed", 2);            }            return result;        }        /// <summary>        /// 更新WaferHolder总用量        /// </summary>        /// <returns></returns>        private bool UpdateWaferHolderUse()        {            WaferHolderInfo waferHolderInfo = WaferHolderManager.Instance.GetWaferHolder("Loader");            if(waferHolderInfo != null)            {                waferHolderInfo.TotalUses += 1;                WaferHolderManager.Instance.UpdateWaferHolderInfo(waferHolderInfo);            }            return true;        }        /// <summary>        /// 启动        /// </summary>        /// <param name="objs"></param>        /// <returns></returns>        public RState Start(params object[] objs)        {            _side = objs[0].ToString();            _loadComplete=(bool)objs[1];            if (objs.Length > 2)            {                _completeSide= objs[2].ToString();            }            if (objs.Length > 3)            {                _waferGroup= objs[3].ToString();            }            LoaderEntity loaderEntity = Singleton<RouteManager>.Instance.GetModule<LoaderEntity>(ModuleName.Loader1.ToString());            if (_side == SIDE_A)            {                _waferSize = loaderEntity.SideAWaferSize;            }            else            {                _waferSize = loaderEntity.SideBWaferSize;            }            InitializeParameters();            _loaderCommon = DEVICE.GetDevice<LoaderCommonDevice>($"{Module}.Common");            _loaderSide = DEVICE.GetDevice<LoaderSideDevice>($"{Module}.{_side}");            //清除lotTrack数据            _datas.Clear();            _flowDatas.Clear();            _loadTimeList.Clear();            _loadTimeList.Add(DateTime.Now);                        return Runner.Start(Module, "Start LoadAll");        }        /// <summary>        /// 初始化参数        /// </summary>        private void InitializeParameters()        {            _isSideLoaded = false;            _isSideStop = false;            _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Rotation");            _sideLoadRoutine = new LoaderLoadRoutine(ModuleName.Loader1.ToString(), _side);            _loaderCommonDevice = DEVICE.GetDevice<LoaderCommonDevice>($"{ModuleName.Loader1}.Common");        }        /// <summary>        /// 重试        /// </summary>        /// <param name="step"></param>        public RState Retry(int step)        {            InitializeParameters();            List<Enum> preStepIds = new List<Enum>();            _datas.Clear();            if (step == 0 || step == -1)            {                string side = _side == SIDE_A ? "A" : "B";                _isSideLoaded = CheckSideLoadCondition(side, step,false);                return Runner.Retry(LoadStep.SideLoad, preStepIds, Module, "LoadAll Retry");            }            else if (step == 1)            {                AddPreSteps(LoadStep.LeakTest, preStepIds);                return Runner.Retry(LoadStep.LeakTest, preStepIds, Module, $"LoadAll step {LoadStep.LeakTest} start Retry");            }            else            {                AddPreSteps(LoadStep.RotationGoToTRNPA, preStepIds);                return Runner.Retry(LoadStep.RotationGoToTRNPA, preStepIds, Module, $"LoadAll step {LoadStep.RotationGoToTRNPA} start Retry");            }                   }        /// <summary>        /// 忽略前        /// </summary>        /// <param name="step"></param>        /// <param name="preStepIds"></param>        private void AddPreSteps(LoadStep step, List<Enum> preStepIds)        {            for (int i = 0; i < (int)step; i++)            {                preStepIds.Add((LoadStep)i);            }        }        /// <summary>        /// 检验前面Unload完成状态        /// </summary>        /// <returns></returns>        public bool CheckCompleteCondition(int index)        {            string side = _side == SIDE_A ? "A" : "B";            if (!CheckSideLoadCondition(side, index,true))            {                return false;            }            JetAxisBase loaderRotationAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.Rotation");            double loaderRotationPosition = loaderRotationAxis.MotionData.MotorPosition;            if (!loaderRotationAxis.CheckPositionIsInStation(loaderRotationPosition, "TRNPA"))            {                NotifyError(eEvent.ERR_LOADER, $"loader rotation {loaderRotationPosition} not in TRNPA", index);            }            return true;        }        /// <summary>        /// 检验Side Unload情况         /// </summary>        /// <param name="side"></param>        /// <param name="index"></param>        /// <returns></returns>        private bool CheckSideLoadCondition(string side, int index,bool showError)        {            JetAxisBase shuttleAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.Shuttle{side}");            double shuttlePosition = shuttleAxis.MotionData.MotorPosition;            if (!shuttleAxis.CheckPositionInStationIgnoreWaferSize(shuttlePosition, "MID"))            {                if (showError)                {                    NotifyError(eEvent.ERR_LOADER, $"shuttle{side} {shuttlePosition} is not in mid", index);                }                return false;            }            JetAxisBase tiltAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.Tilt{side}");            double tiltPosition = tiltAxis.MotionData.MotorPosition;            if (tiltAxis.CheckPositionIsInStation(tiltPosition, "VERT"))            {                if (showError)                {                    NotifyError(eEvent.ERR_LOADER, $"tilt{side} {tiltPosition} is not in VERT", index);                }                return false;            }            JetAxisBase crsAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.LS{side}");            double crsPosition = crsAxis.MotionData.MotorPosition;            if (!crsAxis.CheckPositionIsInStation(crsPosition, "Setup"))            {                if (showError)                {                    NotifyError(eEvent.ERR_LOADER, $"LS{side} {crsPosition} is not in Setup", index);                }                return false;            }            return true;        }        /// <summary>        /// 记录Lottrack        /// </summary>        private void LottrackRecord()        {            //记录Lottrack            if (DateTime.Now.Subtract(_lotTackTime).TotalMilliseconds >= LOTTRACK_TIME)            {                AddLotTrackData();                _lotTackTime = DateTime.Now;            }        }        /// <summary>        /// 获取Lot Track数据        /// </summary>        /// <returns></returns>        private void AddLotTrackData()        {            LoadStep step = (LoadStep)Runner.CurrentStep;            if (step <= LoadStep.SideAllLoadWait)            {                LoaderLotTrackData data = new LoaderLotTrackData();                data.TimeStamp = DateTime.Now;                if (_side == SIDE_A)                {                    data.LoaderABernoulliBladderEnable = _loaderSide.SideData.BernoulliBladder;                    data.LoaderABernoulliBladderPressure = _loaderSide.SideData.BernoulliBladderPressure;                    data.LoaderABernoulliN2Pressure = _loaderSide.SideData.BernoulliPressure;                    data.LoaderACRSVacuum = _loaderSide.SideData.CRSVacuum;                    data.LoaderACRSVacuumAnlg = _loaderSide.SideData.CRSVacuumValue;                    data.LoaderAWHPressure = _loaderSide.SideData.WHBladderPressure;                }                else                {                    data.LoaderBBernoulliBladderEnable = _loaderSide.SideData.BernoulliBladder;                    data.LoaderBBernoulliBladderPressure = _loaderSide.SideData.BernoulliBladderPressure;                    data.LoaderBBernoulliN2Pressure = _loaderSide.SideData.BernoulliPressure;                    data.LoaderBCRSVacuum = _loaderSide.SideData.CRSVacuum;                    data.LoaderBCRSVacuumAnlg = _loaderSide.SideData.CRSVacuumValue;                    data.LoaderBWHPressure = _loaderSide.SideData.WHBladderPressure;                }                data.LoaderWHClamped = _loaderCommon.CommonData.WaferHolderClamp;                _datas.Add(data);            }                    }            }}
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