| 12345678910111213141516171819202122232425262728293031323334353637383940414243444546474849505152535455565758596061626364656667686970717273747576777879808182838485868788899091929394 | using Aitex.Core.Common;using MECF.Framework.Common.Equipment;using CyberX8_RT.Devices.EFEM;using System;using System.Collections.Generic;using System.Linq;using System.Text;using System.Threading.Tasks;using Aitex.Core.RT.Log;using Aitex.Core.RT.Routine;using Aitex.Sorter.Common;using MECF.Framework.Common.Schedulers;using MECF.Framework.Common.SubstrateTrackings;using System.Diagnostics;using CyberX8_Core;using Aitex.Core.RT.SCCore;using System.Threading;namespace CyberX8_RT.Modules.EFEM{    public class EfemVacuumRoutine : ModuleRoutineBase, IRoutine    {        private bool _vacuumStatus;        private ModuleName _vacuumModule;        private enum VacuumStep        {            VacuumAction,            End,        }        EfemBase _efem;        /// <summary>        /// 构造函数        /// </summary>        /// <param name="efem"></param>        public EfemVacuumRoutine(EfemBase efem) : base(ModuleName.EFEM)        {            _efem = efem;        }        /// <summary>        /// 启动        /// </summary>        /// <param name="objs"></param>        /// <returns></returns>        public RState Start(params object[] objs)        {            _vacuumModule = (ModuleName)objs[0];            _vacuumStatus = (bool)objs[1];            return Runner.Start(Module, "Vacumm");        }        /// <summary>        /// 监控        /// </summary>        /// <returns></returns>        public RState Monitor()        {            Runner.Run(VacuumStep.VacuumAction, ()=> { return Vacuum(_vacuumModule, _vacuumStatus);}, CheckVacuumDone, 30000)                    .End(VacuumStep.End, NullFun, 0);            return Runner.Status;        }        /// <summary>        /// Vacuum功能        /// </summary>        /// <returns></returns>        private bool Vacuum(ModuleName moduleName,bool VacuumState)        {            return _efem.Vacuum(moduleName,VacuumState);        }        private bool CheckVacuumDone()        {            if (_efem.Status == RState.End)            {                return true;            }            else if (_efem.Status == RState.Failed)            {                LOG.Write(eEvent.ERR_EFEM_COMMON_FAILED, Module, $"Efem Vacuum failed: {_efem.Status}");                return true;            }            return false;        }        public void Abort()        {            Runner.Stop("Manual Abort");        }    }}
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