| .. |
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Buffer
|
8c811f7802
update double wafers scheduler
|
il y a 7 mois |
|
Dryer
|
6497945cbe
Revise jobcreate and lottrack bugs;
|
il y a 7 mois |
|
Dummy
|
f7533a737b
Initialize
|
il y a 9 mois |
|
EFEM
|
07fbbfc5ca
EFEM place routine add aligner wafersize and distance command
|
il y a 6 mois |
|
LPs
|
c695867e44
update loadport status
|
il y a 7 mois |
|
Loader
|
872e30ee95
Add Metal Animation; Modify several UI displays;
|
il y a 6 mois |
|
Metal
|
ccde2b587e
revise metal loop run recipe ，add TC monitor，revise pump flow scaling
|
il y a 6 mois |
|
PUF
|
07fbbfc5ca
EFEM place routine add aligner wafersize and distance command
|
il y a 6 mois |
|
Prewet
|
d637aec5ae
Revise SRDHome, PrewetKeepwet;
|
il y a 6 mois |
|
Reservoir
|
07fbbfc5ca
EFEM place routine add aligner wafersize and distance command
|
il y a 6 mois |
|
Rinse
|
2bf0be7542
update loader waferSize
|
il y a 6 mois |
|
SRD
|
72f614e1ff
Add SRD Flipper Animation;
|
il y a 6 mois |
|
Transporter
|
4e761b030f
update async scheduler
|
il y a 7 mois |
|
Autotransfer_LP_FA.cs
|
f7533a737b
Initialize
|
il y a 9 mois |
|
DVIDName.cs
|
f7533a737b
Initialize
|
il y a 9 mois |
|
EntityTaskBase.cs
|
f7533a737b
Initialize
|
il y a 9 mois |
|
FaModuleNotifier.cs
|
f7533a737b
Initialize
|
il y a 9 mois |
|
FaRemoteManager.cs
|
371876b350
add robot map routine
|
il y a 8 mois |
|
ManualTransfer.cs
|
f7533a737b
Initialize
|
il y a 9 mois |
|
ModuleHomeAllRoutine.cs
|
7849fa3cd1
update scheduler
|
il y a 7 mois |
|
ReservoirMetalHomeRoutine.cs
|
f7533a737b
Initialize
|
il y a 9 mois |
|
ResourceMonitor.cs
|
f7533a737b
Initialize
|
il y a 9 mois |
|
RouteManager.cs
|
4feb75325b
update ui log
|
il y a 6 mois |
chenkui
07fbbfc5ca
EFEM place routine add aligner wafersize and distance command