 chenzk
|
8324f5d834
add X12 Update to X8
|
1 月之前 |
 chenkui
|
07fbbfc5ca
EFEM place routine add aligner wafersize and distance command
|
1 月之前 |
|
chenkui
|
81f8544042
add Aligner plat type
|
2 月之前 |
|
chenkui
|
3c1628200a
update Efem Home sequence
|
2 月之前 |
|
chenkui
|
e2d5bb5c5d
update galil controller inputs
|
3 月之前 |
|
chenkui
|
0f6f0fbadc
update efem pick and place wafer size
|
3 月之前 |
|
chenkui
|
00c6fabca5
update transporter
|
3 月之前 |
|
chenkui
|
371876b350
add robot map routine
|
4 月之前 |
|
chenkui
|
388b234daf
add X8 EfemRobot
|
4 月之前 |
|
chenkui
|
f7533a737b
Initialize
|
5 月之前 |
