 chenzk
|
5df7250a7f
add efem lock UI， add gold power set simulator
|
6 months ago |
 chenkui
|
be3b324847
update EFEM UI;
|
6 months ago |
|
chenkui
|
171e04deeb
update efem
|
6 months ago |
|
chenkui
|
c525a0bcf3
update efem vacuum
|
7 months ago |
 niuyx
|
69d4e6919b
Add SRD UnloaderRoutine、ChuckATMRoutine; Modify EfemView;
|
7 months ago |
|
chenzk
|
9b64adb2cf
revise lp/dummy ui
|
7 months ago |
|
chenzk
|
dadd411645
add robotcycle precheck
|
7 months ago |
|
chenzk
|
20ecea3b8f
revise robot cycle routine
|
7 months ago |
|
chenzk
|
ebde22937c
revise efem and efemsimulator view
|
8 months ago |
|
chenzk
|
3c848ec44f
revise robotcycle bug,add efem simulator
|
8 months ago |
|
niuyx
|
7cd95698ba
Add Robot Wafer display in OperationOverView and EfemView; Modify logs in VacuumLevelCheckRoutine;
|
8 months ago |
|
chenkui
|
371876b350
add robot map routine
|
8 months ago |
|
chenkui
|
f7533a737b
Initialize
|
9 months ago |
