 chenzk
|
b4810568ec
reivse close buzzer
|
hai 1 semana |
|
chenzk
|
2c8b87bbcf
revise pause/resume bug
|
hai 5 meses |
|
chenzk
|
f22f75738a
revise safeopen/close log bug
|
hai 5 meses |
|
chenzk
|
48af58ca91
revise saveopen/saveclose
|
hai 5 meses |
|
chenzk
|
6de2319620
add pause/resume
|
hai 5 meses |
|
chenzk
|
da5f88fe9f
add efem safeopen/safeclose
|
hai 5 meses |
|
chenzk
|
2ea59fe258
revise robot cycle bug
|
hai 6 meses |
 chenkui
|
0b609ee2cd
add EFEM DoorLocked signal
|
hai 6 meses |
|
chenkui
|
07fbbfc5ca
EFEM place routine add aligner wafersize and distance command
|
hai 7 meses |
|
chenkui
|
81f8544042
add Aligner plat type
|
hai 7 meses |
|
chenkui
|
171e04deeb
update efem
|
hai 7 meses |
|
chenkui
|
fd18176c06
update galil axis
|
hai 7 meses |
|
chenkui
|
c525a0bcf3
update efem vacuum
|
hai 8 meses |
|
chenkui
|
1fba73d760
update axis run judger
|
hai 8 meses |
|
chenkui
|
fc844d450d
update robot aligner vacuum
|
hai 8 meses |
|
chenkui
|
4648c5a74f
update efem crossed/double wafer
|
hai 8 meses |
|
chenkui
|
e9e0bd7d47
update robot cycle
|
hai 8 meses |
|
chenzk
|
3c848ec44f
revise robotcycle bug,add efem simulator
|
hai 8 meses |
|
chenzk
|
9aa3738300
add robot cycle(exclude srd)
|
hai 8 meses |
|
chenkui
|
371876b350
add robot map routine
|
hai 9 meses |
|
chenkui
|
f7533a737b
Initialize
|
hai 10 meses |
