 chenkui
|
69a0c70b7c
fix gold power supplier set current and step issue
|
hai 1 mes |
|
chenkui
|
07fbbfc5ca
EFEM place routine add aligner wafersize and distance command
|
hai 1 mes |
|
chenkui
|
81f8544042
add Aligner plat type
|
hai 2 meses |
|
chenkui
|
c695867e44
update loadport status
|
hai 2 meses |
 niuyx
|
f63aa20656
Revise Robot Home Animation Bug;
|
hai 2 meses |
|
chenkui
|
24c6be2f94
update robot abort
|
hai 3 meses |
|
chenkui
|
fc844d450d
update robot aligner vacuum
|
hai 3 meses |
|
chenkui
|
4648c5a74f
update efem crossed/double wafer
|
hai 3 meses |
|
chenkui
|
1af6a448da
update dummy wafersize
|
hai 3 meses |
|
chenkui
|
18048c3726
update robot place aligner home
|
hai 3 meses |
 chenzk
|
3705df9310
add rinse run recipe
|
hai 3 meses |
|
chenzk
|
5abebed224
revise sunwayrobot
|
hai 3 meses |
|
chenzk
|
20ecea3b8f
revise robot cycle routine
|
hai 3 meses |
|
chenkui
|
e2d5bb5c5d
update galil controller inputs
|
hai 3 meses |
|
chenkui
|
0f6f0fbadc
update efem pick and place wafer size
|
hai 3 meses |
|
chenzk
|
9aa3738300
add robot cycle(exclude srd)
|
hai 3 meses |
|
chenkui
|
23e37955ed
add SRD1/SRD2/Aligner1/PUF1 station
|
hai 3 meses |
|
chenkui
|
63d3440eab
update SunWayRobot
|
hai 4 meses |
|
chenkui
|
56c86c7a9c
update Efem MapRoutine
|
hai 4 meses |
|
chenkui
|
747b0bffa5
update sunway robot
|
hai 4 meses |
|
chenkui
|
371876b350
add robot map routine
|
hai 4 meses |
