 chenzk
|
8324f5d834
add X12 Update to X8
|
2 months ago |
 chenkui
|
07fbbfc5ca
EFEM place routine add aligner wafersize and distance command
|
2 months ago |
|
chenkui
|
81f8544042
add Aligner plat type
|
2 months ago |
|
chenkui
|
3c1628200a
update Efem Home sequence
|
3 months ago |
|
chenkui
|
e2d5bb5c5d
update galil controller inputs
|
4 months ago |
|
chenkui
|
0f6f0fbadc
update efem pick and place wafer size
|
4 months ago |
|
chenkui
|
00c6fabca5
update transporter
|
4 months ago |
|
chenkui
|
371876b350
add robot map routine
|
5 months ago |
|
chenkui
|
388b234daf
add X8 EfemRobot
|
5 months ago |
|
chenkui
|
f7533a737b
Initialize
|
5 months ago |
