 chenzk
|
6de2319620
add pause/resume
|
5 days ago |
|
chenzk
|
da5f88fe9f
add efem safeopen/safeclose
|
1 week ago |
|
chenzk
|
2ea59fe258
revise robot cycle bug
|
3 weeks ago |
 chenkui
|
0b609ee2cd
add EFEM DoorLocked signal
|
1 month ago |
|
chenkui
|
07fbbfc5ca
EFEM place routine add aligner wafersize and distance command
|
1 month ago |
|
chenkui
|
81f8544042
add Aligner plat type
|
2 months ago |
|
chenkui
|
171e04deeb
update efem
|
2 months ago |
|
chenkui
|
fd18176c06
update galil axis
|
2 months ago |
|
chenkui
|
c525a0bcf3
update efem vacuum
|
2 months ago |
|
chenkui
|
1fba73d760
update axis run judger
|
3 months ago |
|
chenkui
|
fc844d450d
update robot aligner vacuum
|
3 months ago |
|
chenkui
|
4648c5a74f
update efem crossed/double wafer
|
3 months ago |
|
chenkui
|
e9e0bd7d47
update robot cycle
|
3 months ago |
|
chenzk
|
3c848ec44f
revise robotcycle bug,add efem simulator
|
3 months ago |
|
chenzk
|
9aa3738300
add robot cycle(exclude srd)
|
3 months ago |
|
chenkui
|
371876b350
add robot map routine
|
4 months ago |
|
chenkui
|
f7533a737b
Initialize
|
5 months ago |
