 chenzk
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d139dd0788
revise robot action_ready received
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3 months ago |
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chenzk
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ec4bd50731
revise pause status update time
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3 months ago |
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chenzk
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c9fee396c0
revise pause/resume bug
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4 months ago |
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chenzk
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2c8b87bbcf
revise pause/resume bug
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4 months ago |
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chenzk
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a8bf067f6f
revise pause/resume and robot simulator
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4 months ago |
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chenzk
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4b96706273
revsie pause/resume
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4 months ago |
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chenzk
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e2761d1248
1.revise robot device safeOpen/Close logic
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4 months ago |
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chenzk
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f22f75738a
revise safeopen/close log bug
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4 months ago |
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chenzk
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da5f88fe9f
add efem safeopen/safeclose
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4 months ago |
 chenkui
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69a0c70b7c
fix gold power supplier set current and step issue
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5 months ago |
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chenkui
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07fbbfc5ca
EFEM place routine add aligner wafersize and distance command
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5 months ago |
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chenkui
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81f8544042
add Aligner plat type
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6 months ago |
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chenkui
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c695867e44
update loadport status
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6 months ago |
 niuyx
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f63aa20656
Revise Robot Home Animation Bug;
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7 months ago |
|
chenkui
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24c6be2f94
update robot abort
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7 months ago |
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chenkui
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fc844d450d
update robot aligner vacuum
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7 months ago |
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chenkui
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4648c5a74f
update efem crossed/double wafer
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7 months ago |
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chenkui
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1af6a448da
update dummy wafersize
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7 months ago |
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chenkui
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18048c3726
update robot place aligner home
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7 months ago |
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chenzk
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3705df9310
add rinse run recipe
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7 months ago |
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chenzk
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5abebed224
revise sunwayrobot
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7 months ago |
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chenzk
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20ecea3b8f
revise robot cycle routine
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7 months ago |
|
chenkui
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e2d5bb5c5d
update galil controller inputs
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7 months ago |
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chenkui
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0f6f0fbadc
update efem pick and place wafer size
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7 months ago |
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chenzk
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9aa3738300
add robot cycle(exclude srd)
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7 months ago |
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chenkui
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23e37955ed
add SRD1/SRD2/Aligner1/PUF1 station
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7 months ago |
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chenkui
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63d3440eab
update SunWayRobot
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8 months ago |
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chenkui
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56c86c7a9c
update Efem MapRoutine
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8 months ago |
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chenkui
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747b0bffa5
update sunway robot
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8 months ago |
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chenkui
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371876b350
add robot map routine
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8 months ago |
