 chenkui
|
52e6d20b63
update top view
|
3 months ago |
|
chenkui
|
2bf0be7542
update loader waferSize
|
3 months ago |
|
chenkui
|
2d8d4b7f42
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/CyberX8
|
3 months ago |
 niuyx
|
72f614e1ff
Add SRD Flipper Animation;
|
3 months ago |
 chenzk
|
69039a19fc
revise reservoir/metal initialize usage monitro
|
3 months ago |
|
niuyx
|
d637aec5ae
Revise SRDHome, PrewetKeepwet;
|
3 months ago |
|
chenkui
|
f60252eacb
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/CyberX8
|
3 months ago |
|
chenzk
|
75e260a8c2
revise metal pump on bug,revise reservoir ui
|
3 months ago |
|
chenzk
|
5f835c9295
revise reservoir UI， add start job PMCounter Check
|
3 months ago |
|
chenkui
|
2ead753b04
update loader WaferGroup
|
3 months ago |
|
chenzk
|
7d2a38becb
revise reservoir pump bug
|
3 months ago |
|
chenzk
|
20ef460721
revise metal init wafersize check，revise efem pick/place srd routine
|
3 months ago |
|
chenzk
|
1afd0ecfa7
revise tc ui
|
3 months ago |
|
chenzk
|
a631c1fcf0
add reservoir Initialize error log
|
3 months ago |
|
chenkui
|
ad21ac97b9
update wago ao
|
3 months ago |
|
chenzk
|
e6704b8066
revise wago write AO，revise reservoir CMM UI visibility
|
3 months ago |
|
chenzk
|
b814ec857f
add metal usage update bug
|
3 months ago |
|
chenzk
|
37b93a17de
add metal loop run recipe
|
3 months ago |
|
niuyx
|
85c399073c
Modify SRDInitializeHome, SRDHome, SRDProcessError; Optimize TC simulator;
|
3 months ago |
|
niuyx
|
ea1b590024
Modify Prewet RunRecipeRoutine and KeepWetRoutine; Revise SRD Bugs;
|
3 months ago |
|
chenkui
|
3c1628200a
update Efem Home sequence
|
3 months ago |
|
chenzk
|
bc3c31cdb4
revise reservoir low level
|
3 months ago |
|
chenkui
|
898fe7af38
update SchedulerLoader
|
3 months ago |
|
chenzk
|
c0bc387d9f
revise TC connect judgement
|
3 months ago |
|
chenkui
|
fd18176c06
update galil axis
|
3 months ago |
|
niuyx
|
b0beffaf5a
Optimize GalilSimulator; Modify SRD simulator;
|
3 months ago |
|
chenzk
|
a2948247a7
revise reservoir pump structure
|
3 months ago |
|
chenkui
|
76a2644a3d
update scheduler issue
|
3 months ago |
|
niuyx
|
690b52a232
Revise SRD related Bugs; Modify SRD Rotation deceleration
|
3 months ago |
|
chenzk
|
06957818cb
revise reservoir ph bug
|
3 months ago |
