 chenzk
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d139dd0788
revise robot action_ready received
|
il y a 3 mois |
|
chenzk
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ec4bd50731
revise pause status update time
|
il y a 4 mois |
|
chenzk
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c9fee396c0
revise pause/resume bug
|
il y a 4 mois |
|
chenzk
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2c8b87bbcf
revise pause/resume bug
|
il y a 4 mois |
|
chenzk
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a8bf067f6f
revise pause/resume and robot simulator
|
il y a 4 mois |
|
chenzk
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4b96706273
revsie pause/resume
|
il y a 4 mois |
|
chenzk
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e2761d1248
1.revise robot device safeOpen/Close logic
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il y a 4 mois |
|
chenzk
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f22f75738a
revise safeopen/close log bug
|
il y a 4 mois |
|
chenzk
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da5f88fe9f
add efem safeopen/safeclose
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il y a 4 mois |
 chenkui
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69a0c70b7c
fix gold power supplier set current and step issue
|
il y a 5 mois |
|
chenkui
|
07fbbfc5ca
EFEM place routine add aligner wafersize and distance command
|
il y a 6 mois |
|
chenkui
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81f8544042
add Aligner plat type
|
il y a 6 mois |
|
chenkui
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c695867e44
update loadport status
|
il y a 7 mois |
 niuyx
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f63aa20656
Revise Robot Home Animation Bug;
|
il y a 7 mois |
|
chenkui
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24c6be2f94
update robot abort
|
il y a 7 mois |
|
chenkui
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fc844d450d
update robot aligner vacuum
|
il y a 7 mois |
|
chenkui
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4648c5a74f
update efem crossed/double wafer
|
il y a 7 mois |
|
chenkui
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1af6a448da
update dummy wafersize
|
il y a 7 mois |
|
chenkui
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18048c3726
update robot place aligner home
|
il y a 7 mois |
|
chenzk
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3705df9310
add rinse run recipe
|
il y a 7 mois |
|
chenzk
|
5abebed224
revise sunwayrobot
|
il y a 8 mois |
|
chenzk
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20ecea3b8f
revise robot cycle routine
|
il y a 8 mois |
|
chenkui
|
e2d5bb5c5d
update galil controller inputs
|
il y a 8 mois |
|
chenkui
|
0f6f0fbadc
update efem pick and place wafer size
|
il y a 8 mois |
|
chenzk
|
9aa3738300
add robot cycle(exclude srd)
|
il y a 8 mois |
|
chenkui
|
23e37955ed
add SRD1/SRD2/Aligner1/PUF1 station
|
il y a 8 mois |
|
chenkui
|
63d3440eab
update SunWayRobot
|
il y a 8 mois |
|
chenkui
|
56c86c7a9c
update Efem MapRoutine
|
il y a 8 mois |
|
chenkui
|
747b0bffa5
update sunway robot
|
il y a 8 mois |
|
chenkui
|
371876b350
add robot map routine
|
il y a 8 mois |
