 chenkui
|
2facb74aa2
add QDR Prewet function;
|
hai 1 mes |
|
chenkui
|
0d497c6f55
PUF/Loader/Transport check all axis is homed then enter idle state
|
hai 1 mes |
 niuyx
|
6bd8541e2b
Modify LoaderLotTrack; Modify Thornton simulator;
|
hai 2 meses |
|
chenkui
|
2bf0be7542
update loader waferSize
|
hai 2 meses |
|
chenkui
|
da62bf186b
update WaferHolderInfo DATA
|
hai 3 meses |
|
chenkui
|
8c811f7802
update double wafers scheduler
|
hai 3 meses |
|
chenkui
|
4648c5a74f
update efem crossed/double wafer
|
hai 3 meses |
|
chenkui
|
1af6a448da
update dummy wafersize
|
hai 3 meses |
|
chenkui
|
e61eba41b9
update puf/loader scheduler
|
hai 3 meses |
|
chenkui
|
7849fa3cd1
update scheduler
|
hai 3 meses |
|
chenkui
|
5902a2565b
add loader LoadSideRoutine
|
hai 3 meses |
|
chenkui
|
e4fd0ff15a
update swing to shuttle
|
hai 4 meses |
|
chenkui
|
31c26804e6
add Festo Communication Protocol
|
hai 4 meses |
|
chenkui
|
f7533a737b
Initialize
|
hai 4 meses |
