 niuyx
|
6bd8541e2b
Modify LoaderLotTrack; Modify Thornton simulator;
|
6 months ago |
|
niuyx
|
8734ae3224
Add GalilRotationAxis; Modify SRD related configs；
|
7 months ago |
|
niuyx
|
69d4e6919b
Add SRD UnloaderRoutine、ChuckATMRoutine; Modify EfemView;
|
7 months ago |
 chenkui
|
4648c5a74f
update efem crossed/double wafer
|
7 months ago |
|
niuyx
|
58c7513e6c
Modify SRD related Routines; Modify SRD recipes;
|
7 months ago |
|
chenkui
|
1af6a448da
update dummy wafersize
|
7 months ago |
|
niuyx
|
48517b7d99
Add SRDLiftUpRoutine; Revise IO ModuleIOCfg.xml and SRD UI; Add SRD related Simulator;
|
7 months ago |
|
chenkui
|
e9e0bd7d47
update robot cycle
|
7 months ago |
|
chenkui
|
5902a2565b
add loader LoadSideRoutine
|
7 months ago |
 chenzk
|
9aa3738300
add robot cycle(exclude srd)
|
8 months ago |
|
chenkui
|
0b293c8ffb
update puf axis
|
8 months ago |
|
chenkui
|
0aabb32d23
update galil axis
|
8 months ago |
|
chenkui
|
478aa5ec7f
update puf view
|
8 months ago |
|
chenkui
|
371876b350
add robot map routine
|
8 months ago |
|
chenkui
|
388b234daf
add X8 EfemRobot
|
8 months ago |
|
chenkui
|
e4fd0ff15a
update swing to shuttle
|
8 months ago |
|
chenkui
|
b4b22b406e
update wago and galil profileposition
|
8 months ago |
|
chenkui
|
2afdd30e69
add wago controller
|
8 months ago |
|
chenkui
|
05cd83ee92
Add Galil Axis
|
9 months ago |
|
chenkui
|
731f2849fa
add galil controller
|
9 months ago |
|
chenkui
|
31c26804e6
add Festo Communication Protocol
|
9 months ago |
|
chenkui
|
f7533a737b
Initialize
|
9 months ago |
