update efem vacuum

CyberX8_MainPages/ViewModels/EfemViewModel.cs

@@ -26,6 +26,7 @@ using System.Windows.Documents;
 using System.Windows.Input;
 using System.Windows;
 using MECF.Framework.Common.Jobs;
+using System.Configuration;
 
 namespace CyberX8_MainPages.ViewModels
 {
@@ -138,7 +139,7 @@ namespace CyberX8_MainPages.ViewModels
 
         private bool _isHomeAllEnable;
 
-
+        private double _vacuumValue;
         #endregion
 
         #region 属性
@@ -553,6 +554,14 @@ namespace CyberX8_MainPages.ViewModels
             get { return m_srd2Wafer; }
             set { SetProperty(ref m_srd2Wafer, value); }
         }
+        /// <summary>
+        /// 真空数值
+        /// </summary>
+        public double VacuumValue
+        {
+            get { return _vacuumValue; }
+            set { SetProperty(ref _vacuumValue, value); }
+        }
         #endregion
 
         #region 命令
@@ -1146,6 +1155,8 @@ namespace CyberX8_MainPages.ViewModels
                 IsLP2HasNoJob = lp2Cj == null ? true : false;
                 ControlJobInfo lp3Cj = CommonFunction.GetValue<ControlJobInfo>(RtDataValues, "LP3.CurrentControlJob");
                 IsLP3HasNoJob = lp3Cj == null ? true : false;
+
+                VacuumValue = CommonFunction.GetValue<double>(RtDataValues, "EFEM.VacuumValue");
             }
             RobotMoveInfo = (RobotMoveInfo)QueryDataClient.Instance.Service.GetData("EFEM.RobotMoveAction");
 
@@ -1213,6 +1224,8 @@ namespace CyberX8_MainPages.ViewModels
 
             m_RtDataKeys.Add("Dummy1.WaferSize");
             m_RtDataKeys.Add("Dummy2.WaferSize");
+
+            m_RtDataKeys.Add("EFEM.VacuumValue");
         }
         /// <summary>
         /// Robot位置信息变更（动画）

CyberX8_MainPages/Views/EfemView.xaml

@@ -125,7 +125,12 @@
         <userControls:DummyCassette Canvas.Left="751" Canvas.Top="272" RotateTransformValue="180" Width="100" Height="100" HorizontalAlignment="Left" VerticalAlignment="Center"/>
         <TextBlock Canvas.Top="142" Canvas.Left="670" Text="Dummy" HorizontalAlignment="Center" Margin="0,5,0,0" FontSize="16">
         </TextBlock>
-
+        <GroupBox Header="" Background="{DynamicResource Table_BG_Content}" Width="500" Height="70" Canvas.Left="1020" Canvas.Top="504" HorizontalAlignment="Left" VerticalAlignment="Center">
+            <Grid>
+                <TextBlock Margin="20,0" Text="Vacuum" VerticalAlignment="Center" HorizontalAlignment="Left" FontSize="14" />
+                <TextBlock Margin="100,0" Text="{Binding VacuumValue}" HorizontalAlignment="left" FontSize="14" VerticalAlignment="Center"/>
+            </Grid>
+        </GroupBox>
         <Grid Canvas.Top="280" Canvas.Left="1020" Width="500">
             <Grid.RowDefinitions>
                 <RowDefinition Height="30"/>
@@ -366,7 +371,7 @@
                     <TextBlock Text="{Binding RtDataValues[LP1.IsDocked]}" TextAlignment="Center"/>
                 </Border>
                 <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="4" Grid.Column="2" Padding="5,1">
-                    <StackPanel Orientation="Horizontal">                        
+                    <StackPanel Orientation="Horizontal">
                     </StackPanel>
                 </Border>
 
@@ -380,7 +385,7 @@
                 </Border>
                 <Border BorderBrush="{DynamicResource Table_BD}" BorderThickness="1,0,1,1" Background="{DynamicResource Table_BG_Content}" Grid.Row="5" Grid.Column="2" Padding="5,1">
                     <StackPanel Orientation="Horizontal">
-                        
+
                     </StackPanel>
                 </Border>
 

CyberX8_RT/Config/Devices/ModuleIOCfg.xml

@@ -1,5 +1,8 @@
 <?xml version="1.0" encoding="utf-8"?>
 <BeckhoffModuleIOCfg xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
+	<Module Name="EFEM">
+		<IO Name="EFEM.VacuumValue" IOName="r_SPUF_VAC"/>
+	</Module>
 	<Module Name="LP1">
 		<IO Name="LP1.Cassete200Present" IOName="r_Cassette_1_200"/>
 		<IO Name="LP1.Cassete150Present" IOName="r_Cassette_1_150"/>

CyberX8_RT/Config/Station/StationPositionsCfg.xml

@@ -250,13 +250,6 @@
     </Axis>
   </Module>
   <Module Name="SRD1">
-    <Axis Name="SRD1.Arm">
-      <ToleranceDefault>0.5</ToleranceDefault>
-      <Stations>
-        <Station Name="SRD1.Arm.Home" Position="0" />
-        <Station Name="SRD1.Arm.Center" Position="-43" ModifiedDate="2024-09-04 17:16:30.547" />
-      </Stations>
-    </Axis>
     <Axis Name="SRD1.Rotation">
       <ToleranceDefault>0.5</ToleranceDefault>
       <Stations>
@@ -265,13 +258,6 @@
     </Axis>
   </Module>
   <Module Name="SRD2">
-    <Axis Name="SRD2.Arm">
-      <ToleranceDefault>0.5</ToleranceDefault>
-      <Stations>
-        <Station Name="SRD2.Arm.Home" Position="0" />
-        <Station Name="SRD2.Arm.Center" Position="-49.438" />
-      </Stations>
-    </Axis>
     <Axis Name="SRD2.Rotation">
       <ToleranceDefault>0.5</ToleranceDefault>
       <Stations>

CyberX8_RT/Config/Station/StationPositionsCfg_Simulator.xml

@@ -250,13 +250,6 @@
 		</Axis>
 	</Module>
 	<Module Name="SRD1">
-		<Axis Name="SRD1.Arm">
-			<ToleranceDefault>0.5</ToleranceDefault>
-			<Stations>
-				<Station Name="SRD1.Arm.Home" Position="0" />
-				<Station Name="SRD1.Arm.Center" Position="-43" ModifiedDate="2024-09-04 17:16:30.547" />
-			</Stations>
-		</Axis>
 		<Axis Name="SRD1.Rotation">
 			<ToleranceDefault>0.5</ToleranceDefault>
 			<Stations>
@@ -265,13 +258,6 @@
 		</Axis>
 	</Module>
 	<Module Name="SRD2">
-		<Axis Name="SRD2.Arm">
-			<ToleranceDefault>0.5</ToleranceDefault>
-			<Stations>
-				<Station Name="SRD2.Arm.Home" Position="0" />
-				<Station Name="SRD2.Arm.Center" Position="-49.438" />
-			</Stations>
-		</Axis>
 		<Axis Name="SRD2.Rotation">
 			<ToleranceDefault>0.5</ToleranceDefault>
 			<Stations>

CyberX8_RT/Config/System.sccfg

@@ -11,24 +11,17 @@
 		<config default="0.1" name="Increment" nameView="Increment" description="步进" max="100" min="0" paramter="" tag="" unit="" type="Double" visible="true"/>
 		<config default="true" name="IsSimulatorMode" nameView="Simulator Mode" description="仿真模式" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
 		<config default="true" name="DisplayPopDialogWhenJobComplete" nameView="Pop Dialog When Job Complete" description="是否弹出Job结束对话框" max="" min="" paramter="" tag="" unit="" type="Bool" />
-		<config default="2" name="MaxInternalWaferCount" nameView="Max Internal wafer count" description="系统可允许进入的wafer数" max="8" min="1" paramter="" tag="" unit="" visible="true" type="Integer" />
-		<config default="00000000,00000000,00000000,00000000,00000000,00000000,00000000,00000000" name="COMLogFlag" description="Flag for print COM data log" max="" min="" paramter="" tag="" unit="" visible="false" type="String" />
 		<config default="True" name="IsIgnoreSaveDB" nameView="IsIgnoreSaveDB" description="IO实时数据是否保存数据库，2023/09/02暂时加参数设计" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
 		<config default="10"  name="CheckResourceInterval" nameView="CheckResourceInterval" description="进程资源监视间隔，单位为分钟，0为不监视" max="60" min="0" paramter="" tag="" unit="min" type="Integer"/>
-		<config default="1"  name="SystemType" nameView="SystemType" description="0 = Venus;1 = Kepler 2300;2 = Kepler 2200A;3 = Kepler 2200B;4 = Venus SE;5 = Venus DE;" max="9" min="0" paramter="" tag="" unit="min" type="Integer"/>
-		<config default="1000"  name="DataCollectionInterval" nameView="DataCollectionInterval" description="插入数据时间间隔" max="2000" min="200" paramter="" tag="" unit="ms" type="Integer"/>
-		<config default="0" name="PressureUnitType"  nameView="Pressure Unit Type" description="0=>mtorr,1=>Pa" max="1" min="0" paramter="" tag=""  unit="" type="Integer"/>
 		<config default="Cyber X8" name="Name" nameView="Name" description="Name" tag="" unit="" type="String" />
+		<config default="100" name="CompareInterval" nameView="CompareInterval" description="interval distance of comparing left/right side of target position" tag="" unit="mm" type="Double" />
+		<config default="1000"  name="DataCollectionInterval" nameView="DataCollectionInterval" description="插入数据时间间隔" max="2000" min="200" paramter="" tag="" unit="ms" type="Integer"/>
 		<configs name="Job" nameView="Job"  >
 			<config default="10" name="BuzzerTimeWhenJobDone" nameView="Buzzer Time When Job Done"  description="buzzer time after job done, -1=never stop, 0=silent,xxx=buzzer time" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
 		</configs>
 		<config default="EFEM,PUF1,PUF2,Loader1,Transporter2,Transporter1,Prewet" name="InitializeCheckModuleList" nameView="InitializeCheckModuleList" description="Initialize检验模块集合" max="" min="" paramter="" tag="" unit="" type="String"/>
 		<config default="SN 03.Cyber101" name="ToolID" nameView="ToolID" description="Tool ID" tag="" unit="" type="String" />
 	</configs>
-	<configs name="Twincat" nameView="Twincat">
-		<config default="false" name="EnableReadLog" nameView="Enalbe Twincat Variable Read log" description="是否启用Twincat变量读取日志" max="" min="" paramter="" tag="" unit="" type="Bool" />
-		<config default="10" name="SlsSpeed" nameView="SLS Axis Speed" description="SLS模式下Axis的速度" max="100" min="1" paramter="" tag="" unit="" type="Integer" />
-	</configs>
 	<!--FA-->
 	<configs name="FA" nameView="FA">
 		<config default="Passive" name="ConnectionMode" nameView="Connection Mode" description="Passive  Active" max="0" min="0" paramter="" tag="" unit="" type="String" />
@@ -226,27 +219,27 @@
 		<config default="0.125" name="ShortTestThreshold" nameView="ShortTestThreshold" description="short test threshold" max="1" min="0" paramter="" tag="" unit="A" type="Double"/>		
 		<config default="100" name="WaferShuttleSoakMaxTime" nameView="WaferShuttleSoakMaxTime" description="Max Time Length of Wafer Shuttle Soak in metal" type="Integer" min="0" max="100000" paramter="" tag="" unit="minute"/>
 		<config default="10" name="CurrentCheckDelay" nameView="CurrentCheckDelay" description="After delay second to check current"  type="Integer" min="0" max="60" paramter="" tag="" unit="s" />
-			<configs name="Metal1" nameView="Metal1">
-					<config default="50" name="MetalTotalAmpHoursWarningLimit" nameView="MetalTotalAmpHoursWarningLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit=""/>
-					<config default="100" name="MetalTotalAmpHoursFaultLimit" nameView="MetalTotalAmpHoursFaultLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
-					<config default="50" name="AnodeATotalAmpHoursWarningLimit" nameView="AnodeATotalAmpHoursWarningLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
-					<config default="100" name="AnodeATotalAmpHoursFaultLimit" nameView="AnodeATotalAmpHoursFaultLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
-					<config default="50" name="AnodeBTotalAmpHoursWarningLimit" nameView="AnodeBTotalAmpHoursWarningLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
-					<config default="100" name="AnodeBTotalAmpHoursFaultLimit" nameView="AnodeBTotalAmpHoursFaultLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
-					<config default="50" name="MembraneATotalAmpHoursWarningLimit" nameView="MembraneATotalAmpHoursWarningLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
-					<config default="100" name="MembraneATotalAmpHoursFaultLimit" nameView="MembraneATotalAmpHoursFaultLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
-					<config default="50" name="MembraneBTotalAmpHoursWarningLimit" nameView="MembraneBTotalAmpHoursWarningLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
-					<config default="100" name="MembraneBTotalAmpHoursFaultLimit" nameView="MembraneBTotalAmpHoursFaultLimit"  type="Double" value="0" min="0" max="100000" paramter="" tag="" unit="" description="" />
-					<config default="50" name="MetalTotalWafersWarningLimit" nameView="MetalTotalWafersWarningLimit"  type="Integer" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
-					<config default="100" name="MetalTotalWafersFaultLimit" nameView="MetalTotalWafersFaultLimit"  type="Integer" value="0"  min="0" max="100000" paramter="" tag="" unit=""/>
-					<config default="50" name="AnodeATotalWafersWarningLimit" nameView="AnodeATotalWafersWarningLimit"  type="Integer" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
-					<config default="100" name="AnodeATotalWafersFaultLimit" nameView="AnodeATotalWafersFaultLimit"  type="Integer" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
-					<config default="50" name="AnodeBTotalWafersWarningLimit" nameView="AnodeBTotalWafersWarningLimit"  type="Integer" value="0" min="0" max="100000" paramter="" tag="" unit="" description="" />
-					<config default="100" name="AnodeBTotalWafersFaultLimit" nameView="AnodeBTotalWafersFaultLimit" type="Integer" value="0"  min="0" max="100000" paramter="" tag="" unit="" description=""/>
-					<config default="50" name="AnodeABathTotalUsageDaysWarningLimit" nameView="BathTotalDaysWarningLimit"  type="Integer" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
-					<config default="100" name="AnodeABathTotalUsageDaysFaultLimit" nameView="BathTotalDaysFaultLimit"  type="Integer" value="0" min="0" max="100000" paramter="" tag="" unit="" description="" />
-					<config default="50" name="AnodeBBathTotalUsageDaysWarningLimit" nameView="BathTotalDaysWarningLimit"  type="Integer" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
-					<config default="100" name="AnodeBBathTotalUsageDaysFaultLimit" nameView="BathTotalDaysFaultLimit"  type="Integer" value="0" min="0" max="100000" paramter="" tag="" unit="" description="" />
+		<configs name="Metal1" nameView="Metal1">
+				<config default="50" name="MetalTotalAmpHoursWarningLimit" nameView="MetalTotalAmpHoursWarningLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit=""/>
+				<config default="100" name="MetalTotalAmpHoursFaultLimit" nameView="MetalTotalAmpHoursFaultLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
+				<config default="50" name="AnodeATotalAmpHoursWarningLimit" nameView="AnodeATotalAmpHoursWarningLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
+				<config default="100" name="AnodeATotalAmpHoursFaultLimit" nameView="AnodeATotalAmpHoursFaultLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
+				<config default="50" name="AnodeBTotalAmpHoursWarningLimit" nameView="AnodeBTotalAmpHoursWarningLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
+				<config default="100" name="AnodeBTotalAmpHoursFaultLimit" nameView="AnodeBTotalAmpHoursFaultLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
+				<config default="50" name="MembraneATotalAmpHoursWarningLimit" nameView="MembraneATotalAmpHoursWarningLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
+				<config default="100" name="MembraneATotalAmpHoursFaultLimit" nameView="MembraneATotalAmpHoursFaultLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
+				<config default="50" name="MembraneBTotalAmpHoursWarningLimit" nameView="MembraneBTotalAmpHoursWarningLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
+				<config default="100" name="MembraneBTotalAmpHoursFaultLimit" nameView="MembraneBTotalAmpHoursFaultLimit"  type="Double" value="0" min="0" max="100000" paramter="" tag="" unit="" description="" />
+				<config default="50" name="MetalTotalWafersWarningLimit" nameView="MetalTotalWafersWarningLimit"  type="Integer" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
+				<config default="100" name="MetalTotalWafersFaultLimit" nameView="MetalTotalWafersFaultLimit"  type="Integer" value="0"  min="0" max="100000" paramter="" tag="" unit=""/>
+				<config default="50" name="AnodeATotalWafersWarningLimit" nameView="AnodeATotalWafersWarningLimit"  type="Integer" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
+				<config default="100" name="AnodeATotalWafersFaultLimit" nameView="AnodeATotalWafersFaultLimit"  type="Integer" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
+				<config default="50" name="AnodeBTotalWafersWarningLimit" nameView="AnodeBTotalWafersWarningLimit"  type="Integer" value="0" min="0" max="100000" paramter="" tag="" unit="" description="" />
+				<config default="100" name="AnodeBTotalWafersFaultLimit" nameView="AnodeBTotalWafersFaultLimit" type="Integer" value="0"  min="0" max="100000" paramter="" tag="" unit="" description=""/>
+				<config default="50" name="AnodeABathTotalUsageDaysWarningLimit" nameView="BathTotalDaysWarningLimit"  type="Integer" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
+				<config default="100" name="AnodeABathTotalUsageDaysFaultLimit" nameView="BathTotalDaysFaultLimit"  type="Integer" value="0" min="0" max="100000" paramter="" tag="" unit="" description="" />
+				<config default="50" name="AnodeBBathTotalUsageDaysWarningLimit" nameView="BathTotalDaysWarningLimit"  type="Integer" value="0"  min="0" max="100000" paramter="" tag="" unit="" description="" />
+				<config default="100" name="AnodeBBathTotalUsageDaysFaultLimit" nameView="BathTotalDaysFaultLimit"  type="Integer" value="0" min="0" max="100000" paramter="" tag="" unit="" description="" />
 		  </configs>
 	      <configs name="Metal2" nameView="Metal2">
 					<config default="50" name="MetalTotalAmpHoursWarningLimit" nameView="MetalTotalAmpHoursWarningLimit"  type="Double" value="0"  min="0" max="100000" paramter="" tag="" unit=""/>

CyberX8_RT/Devices/AXIS/JetAxisBase.cs

@@ -1342,17 +1342,13 @@ namespace CyberX8_RT.Devices.AXIS
             {
                 return false;
             }
-            var buffer16Position=GetPositionByStation(station);
+            double compareInterval = SC.GetValue<double>("System.CompareInterval");
             switch(compareType)
             {
                 case "Left":
-                    return IsInStationLeftDirection(position);
+                    return IsInStationLeftDirection(position,compareInterval);
                 case "Right":
-                    if (buffer16Position.success)
-                    {
-                        position=buffer16Position.position;
-                    }
-                    return IsInStationRightPosition(position);
+                    return IsInStationRightPosition(position,compareInterval);
                 default:
                     return false;
             }
@@ -1362,17 +1358,17 @@ namespace CyberX8_RT.Devices.AXIS
         /// </summary>
         /// <param name="stationPosition"></param>
         /// <returns></returns>
-        private bool IsInStationLeftDirection(double stationPosition)
+        private bool IsInStationLeftDirection(double stationPosition,double compareInterval)
         {
             double currentPosition = MotionData.MotorPosition;
             double targetPosition = _targetPosition;
             if(_currentOperation==MotionOperation.Position)
             {
-                return currentPosition <= stationPosition && targetPosition <= stationPosition;
+                return currentPosition <= stationPosition-compareInterval && targetPosition <= stationPosition - compareInterval;
             }
             else
             {
-                return currentPosition <= stationPosition;
+                return currentPosition <= stationPosition-compareInterval;
             }
         }
         /// <summary>
@@ -1380,17 +1376,17 @@ namespace CyberX8_RT.Devices.AXIS
         /// </summary>
         /// <param name="stationPosition"></param>
         /// <returns></returns>
-        private bool IsInStationRightPosition(double stationPosition)
+        private bool IsInStationRightPosition(double stationPosition, double compareInterval)
         {
             double currentPosition = MotionData.MotorPosition;
             double targetPosition = _targetPosition;
             if (_currentOperation == MotionOperation.Position)
             {
-                return currentPosition > stationPosition && targetPosition > stationPosition;
+                return currentPosition > stationPosition+compareInterval && targetPosition > stationPosition + compareInterval;
             }
             else
             {
-                return currentPosition > stationPosition ;
+                return currentPosition > stationPosition+compareInterval ;
             }
         }
         #endregion

CyberX8_RT/Modules/EFEM/EfemEntity.cs

@@ -27,11 +27,15 @@ using MECF.Framework.Common.Alarm;
 using MECF.Framework.Common.CommonData;
 using CyberX8_RT.Modules.Loader;
 using Aitex.Core.RT.Routine;
+using MECF.Framework.Common.IOCore;
 
 namespace CyberX8_RT.Modules
 {
     class EfemEntity : Entity, IEntity, IModuleEntity
     {
+        #region 常量
+        private const string VACUUM_VALUE = "VacuumValue";
+        #endregion
         //private int _bigWafer = 0;
         //private int _midWafer = 0;
         //private int _smallWafer = 0;
@@ -222,6 +226,14 @@ namespace CyberX8_RT.Modules
         private STATE _errorPreState;
         private IRoutine _currentRoutine;
         private int _currentCycleTimes;
+        /// <summary>
+        /// 变量是否初始化字典
+        /// </summary>
+        private Dictionary<string, bool> _variableInitializeDic = new Dictionary<string, bool>();
+        /// <summary>
+        /// 真空数值
+        /// </summary>
+        private double _vacuumValue;
         // Constructor
         public EfemEntity()
         {
@@ -330,10 +342,27 @@ namespace CyberX8_RT.Modules
             DATA.Subscribe($"{Name}.IsHomed", () => _isHomed,  SubscriptionAttribute.FLAG.IgnoreSaveDB);
             DATA.Subscribe($"{Name}.RobotSpeed",()=>IsIdle?SC.GetValue<int>("EFEM.DefaultMoveSpeedInPercent"):0);
             DATA.Subscribe($"{Name}.CurrentRobotCycleTime",()=>_currentCycleTimes, SubscriptionAttribute.FLAG.IgnoreSaveDB);
+            DATA.Subscribe($"{Name}.VacuumValue",()=>_vacuumValue, SubscriptionAttribute.FLAG.IgnoreSaveDB);
             _robotWatch.Restart();
             return true;
         }
-
+        /// <summary>
+        /// 订阅IO变量
+        /// </summary>
+        /// <param name="variable"></param>
+        private void BeckhoffIoSubscribeUpdateVariable(string variable)
+        {
+            _variableInitializeDic[variable] = false;
+            IOModuleManager.Instance.SubscribeModuleVariable($"{Module}", variable, UpdateVariableValue);
+        }
+        /// 更新变量数值
+        /// </summary>
+        /// <param name="variable"></param>
+        /// <param name="value"></param>
+        private void UpdateVariableValue(string variable, object value)
+        {
+            _vacuumValue = (double)value;
+        }
         private void InitFsmMap()
         {
             fsm = new StateMachine<EfemEntity>("EFEM", (int)STATE.Unknown, 50);