Helios/PLC/PLC.tmc

<?xml version="1.0" encoding="utf-8"?><TcModuleClass xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:noNamespaceSchemaLocation="http://www.beckhoff.com/schemas/2009/05/TcModuleClass" Hash="{D5ED5FFC-DA2C-A08E-C0C3-8610CB19D31A}" GeneratedBy="TwinCAT XAE Plc"><DataTypes><DataType><Name GUID="{6F5942ED-BFA1-497D-8225-23C6DAAD0A09}" TcBaseType="true">ST_LibVersion</Name><BitSize>288</BitSize><SubItem><Name>iMajor</Name><Type GUID="{18071995-0000-0000-0000-000000000005}">UINT</Type><BitSize>16</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>iMinor</Name><Type GUID="{18071995-0000-0000-0000-000000000005}">UINT</Type><BitSize>16</BitSize><BitOffs>16</BitOffs></SubItem><SubItem><Name>iBuild</Name><Type GUID="{18071995-0000-0000-0000-000000000005}">UINT</Type><BitSize>16</BitSize><BitOffs>32</BitOffs></SubItem><SubItem><Name>iRevision</Name><Type GUID="{18071995-0000-0000-0000-000000000005}">UINT</Type><BitSize>16</BitSize><BitOffs>48</BitOffs></SubItem><SubItem><Name>nFlags</Name><Type GUID="{18071995-0000-0000-0000-000000000007}">DWORD</Type><BitSize>32</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>sVersion</Name><Type GUID="{18071995-0000-0000-0000-000100000017}">STRING(23)</Type><BitSize>192</BitSize><BitOffs>96</BitOffs></SubItem></DataType><DataType><Name Namespace="Tc2_ControllerToolbox">ST_CTRL_CYCLE_TIME_INTERPRETATION</Name><BitSize>128</BitSize><SubItem><Name>bInterpretCycleTimeAsTicks</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>fBaseTime</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>64</BitOffs></SubItem><Properties><Property><Name>hide</Name></Property></Properties></DataType><DataType><Name Namespace="Tc2_System">E_WATCHDOG_TIME_CONFIG</Name><BitSize>16</BitSize><BaseType>INT</BaseType><EnumInfo><Text>eWATCHDOG_TIME_DISABLED</Text><Enum>0</Enum></EnumInfo><EnumInfo><Text>eWATCHDOG_TIME_SECONDS</Text><Enum>1</Enum></EnumInfo><EnumInfo><Text>eWATCHDOG_TIME_MINUTES</Text><Enum>2</Enum></EnumInfo></DataType><DataType><Name GUID="{B57D3F4A-0836-49B0-81C3-BED5F4817EC9}" TcBaseType="true" CName="TcEventSeverity*" RemovableEnumPrefix="TCEVENTSEVERITY_">TcEventSeverity</Name><BitSize>16</BitSize><BaseType GUID="{18071995-0000-0000-0000-000000000006}">INT</BaseType><EnumInfo><Text><![CDATA[TCEVENTSEVERITY_Verbose]]></Text><Enum>0</Enum></EnumInfo><EnumInfo><Text><![CDATA[TCEVENTSEVERITY_Info]]></Text><Enum>1</Enum></EnumInfo><EnumInfo><Text><![CDATA[TCEVENTSEVERITY_Warning]]></Text><Enum>2</Enum></EnumInfo><EnumInfo><Text><![CDATA[TCEVENTSEVERITY_Error]]></Text><Enum>3</Enum></EnumInfo><EnumInfo><Text><![CDATA[TCEVENTSEVERITY_Critical]]></Text><Enum>4</Enum></EnumInfo><Properties><Property><Name>plcAttribute_qualified_only</Name></Property><Property><Name>plcAttribute_strict</Name></Property></Properties><Hides><Hide GUID="{777FF09F-0B00-4AF2-BD7C-C1E2CE4A0947}" /><Hide GUID="{EC3C119D-4FEC-4197-96FB-DAE1B7C403FB}" /></Hides></DataType><DataType><Name GUID="{EB67FE92-FBB1-4149-A2D5-DDFE2EFA568C}" TcBaseType="true" CName="TcEventEntryFlags*">TcEventEntryFlags</Name><BitSize>8</BitSize><BaseType GUID="{18071995-0000-0000-0000-000000000001}">BYTE</BaseType><EnumInfo><Text><![CDATA[None]]></Text><Enum>0</Enum></EnumInfo><EnumInfo><Text><![CDATA[WithConfirmation]]></Text><Enum>#x1</Enum></EnumInfo><Properties><Property><Name>plcAttribute_qualified_only</Name></Property></Properties><Hides><Hide GUID="{3C674EEB-D690-4295-AE43-3728EFC1EF66}" /></Hides></DataType><DataType><Name GUID="{6925E8D1-EDCA-47DD-B80C-A6329A85D63D}" TcBaseType="true" CName="TcEventEntry*">TcEventEntry</Name><BitSize>192</BitSize><SubItem><Name>uuidEventClass</Name><Type GUID="{18071995-0000-0000-0000-000000000021}">GUID</Type><BitSize>128</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>nEventId</Name><Type GUID="{18071995-0000-0000-0000-000000000008}">UDINT</Type><BitSize>32</BitSize><BitOffs>128</BitOffs></SubItem><SubItem><Name>eSeverity</Name><Type GUID="{B57D3F4A-0836-49B0-81C3-BED5F4817EC9}">TcEventSeverity</Type><BitSize>16</BitSize><BitOffs>160</BitOffs></SubItem><SubItem><Name>eFlags</Name><Type GUID="{EB67FE92-FBB1-4149-A2D5-DDFE2EFA568C}">TcEventEntryFlags</Type><BitSize>8</BitSize><BitOffs>176</BitOffs></SubItem><Hides><Hide GUID="{F00C83AD-DEC8-486E-AE99-5E0A75C26DE0}" /><Hide GUID="{128902B7-F178-4299-B8BF-51215A80685F}" /></Hides></DataType><DataType><Name>UDINT (81..10000)</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Properties><Property><Name>LowerBorder</Name><Value>81</Value></Property><Property><Name>UpperBorder</Name><Value>10000</Value></Property></Properties></DataType><DataType><Name Namespace="Tc2_SUPS">E_S_UPS_State</Name><BitSize>16</BitSize><BaseType>INT</BaseType><EnumInfo><Text>eSUPS_PowerOK</Text><Enum>0</Enum></EnumInfo><EnumInfo><Text>eSUPS_PowerFailure</Text><Enum>1</Enum></EnumInfo><EnumInfo><Text>eSUPS_WritePersistentData</Text><Enum>2</Enum></EnumInfo><EnumInfo><Text>eSUPS_QuickShutdown</Text><Enum>3</Enum></EnumInfo><EnumInfo><Text>eSUPS_WaitForRecover</Text><Enum>4</Enum></EnumInfo><EnumInfo><Text>eSUPS_WaitForPowerOFF</Text><Enum>5</Enum></EnumInfo></DataType><DataType><Name>LstPressure</Name><BitSize>1456</BitSize><SubItem><Name>ToleranceMode</Name><Type>STRING(80)</Type><Comment><![CDATA['Value' or 'Percent']]></Comment><BitSize>648</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>ToleranceDelayTime</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>656</BitOffs></SubItem><SubItem><Name>PressureUnitMode</Name><Type>STRING(80)</Type><Comment><![CDATA['Pressure' or 'Position']]></Comment><BitSize>648</BitSize><BitOffs>672</BitOffs></SubItem><SubItem><Name>StartValue</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>1328</BitOffs></SubItem><SubItem><Name>StartValueWarningRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>1344</BitOffs></SubItem><SubItem><Name>StartValueAlarmRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>1360</BitOffs></SubItem><SubItem><Name>ValvePositionPreset</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>1376</BitOffs></SubItem><SubItem><Name>EnableRamp</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>1392</BitOffs></SubItem><SubItem><Name>HoldTime</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>1408</BitOffs></SubItem><SubItem><Name>RampTime</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>1424</BitOffs></SubItem><SubItem><Name>TargetValue</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>1440</BitOffs></SubItem></DataType><DataType><Name>LstGas</Name><BitSize>1104</BitSize><SubItem><Name>ToleranceMode</Name><Type>STRING(80)</Type><Comment><![CDATA['Value' or 'Percent']]></Comment><BitSize>648</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>ToleranceDelayTime</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>656</BitOffs></SubItem><SubItem><Name>Gas1</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>672</BitOffs></SubItem><SubItem><Name>Gas1WarningRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>688</BitOffs></SubItem><SubItem><Name>Gas1AlarmRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>704</BitOffs></SubItem><SubItem><Name>Gas2</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>720</BitOffs></SubItem><SubItem><Name>Gas2WarningRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>736</BitOffs></SubItem><SubItem><Name>Gas2AlarmRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>752</BitOffs></SubItem><SubItem><Name>Gas3</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>768</BitOffs></SubItem><SubItem><Name>Gas3WarningRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>784</BitOffs></SubItem><SubItem><Name>Gas3AlarmRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>800</BitOffs></SubItem><SubItem><Name>Gas4</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>816</BitOffs></SubItem><SubItem><Name>Gas4WarningRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>832</BitOffs></SubItem><SubItem><Name>Gas4AlarmRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>848</BitOffs></SubItem><SubItem><Name>Gas5</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>864</BitOffs></SubItem><SubItem><Name>Gas5WarningRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>880</BitOffs></SubItem><SubItem><Name>Gas5AlarmRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>896</BitOffs></SubItem><SubItem><Name>Gas6</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>912</BitOffs></SubItem><SubItem><Name>Gas6WarningRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>928</BitOffs></SubItem><SubItem><Name>Gas6AlarmRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>944</BitOffs></SubItem><SubItem><Name>Gas7</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>960</BitOffs></SubItem><SubItem><Name>Gas7WarningRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>976</BitOffs></SubItem><SubItem><Name>Gas7AlarmRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>992</BitOffs></SubItem><SubItem><Name>Gas8</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>1008</BitOffs></SubItem><SubItem><Name>Gas8WarningRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>1024</BitOffs></SubItem><SubItem><Name>Gas8AlarmRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>1040</BitOffs></SubItem><SubItem><Name>Gas9</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>1056</BitOffs></SubItem><SubItem><Name>Gas9WarningRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>1072</BitOffs></SubItem><SubItem><Name>Gas9AlarmRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>1088</BitOffs></SubItem></DataType><DataType><Name>LstHeater</Name><BitSize>864</BitSize><SubItem><Name>ToleranceMode</Name><Type>STRING(80)</Type><Comment><![CDATA['Value' or 'Percent']]></Comment><BitSize>648</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>ToleranceDelayTime</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>656</BitOffs></SubItem><SubItem><Name>WallTemp</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>672</BitOffs></SubItem><SubItem><Name>WallTempWaningRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>688</BitOffs></SubItem><SubItem><Name>WallTempAlarmRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>704</BitOffs></SubItem><SubItem><Name>LidTemp</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>720</BitOffs></SubItem><SubItem><Name>LidTempWaningRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>736</BitOffs></SubItem><SubItem><Name>LidTempAlarmRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>752</BitOffs></SubItem><SubItem><Name>StageEdgeTemp</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>768</BitOffs></SubItem><SubItem><Name>StageEdgeTempWaningRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>784</BitOffs></SubItem><SubItem><Name>StageEdgeTempAlarmRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>800</BitOffs></SubItem><SubItem><Name>StageCenterTemp</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>816</BitOffs></SubItem><SubItem><Name>StageCenterTempWaningRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>832</BitOffs></SubItem><SubItem><Name>StageCenterTempAlarmRange</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>848</BitOffs></SubItem></DataType><DataType><Name>Lst</Name><BitSize>3424</BitSize><SubItem><Name>Pressure</Name><Type>LstPressure</Type><BitSize>1456</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>GAS</Name><Type>LstGas</Type><BitSize>1104</BitSize><BitOffs>1456</BitOffs></SubItem><SubItem><Name>Heater</Name><Type>LstHeater</Type><BitSize>864</BitSize><BitOffs>2560</BitOffs></SubItem></DataType><DataType><Name>RecipeEachStep</Name><BitSize>4208</BitSize><SubItem><Name>StepNo</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>Completion</Name><Type>STRING(80)</Type><Comment><![CDATA['Stable', 'Time' or 'End']]></Comment><BitSize>648</BitSize><BitOffs>16</BitOffs></SubItem><SubItem><Name>StepTime</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>672</BitOffs></SubItem><SubItem><Name>AddTime</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>688</BitOffs></SubItem><SubItem><Name>CycleStart</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>704</BitOffs></SubItem><SubItem><Name>CycleEnd</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>712</BitOffs></SubItem><SubItem><Name>CycleNumber</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>720</BitOffs></SubItem><SubItem><Name>Lifter_Up</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>736</BitOffs></SubItem><SubItem><Name>AdjustTargetStepNo</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>752</BitOffs></SubItem><SubItem><Name>Lifter_Down</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>768</BitOffs></SubItem><SubItem><Name>LstUnit</Name><Type>Lst</Type><BitSize>3424</BitSize><BitOffs>784</BitOffs></SubItem></DataType><DataType><Name Namespace="Tc2_Standard">TON</Name><BitSize>256</BitSize><SubItem><Name>IN</Name><Type>BOOL</Type><Comment><![CDATA[ starts timer with rising edge, resets timer with falling edge ]]></Comment><BitSize>8</BitSize><BitOffs>64</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>PT</Name><Type>TIME</Type><Comment><![CDATA[ time to pass, before Q is set ]]></Comment><BitSize>32</BitSize><BitOffs>96</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>Q</Name><Type>BOOL</Type><Comment><![CDATA[ gets TRUE, delay time (PT) after a rising edge at IN ]]></Comment><BitSize>8</BitSize><BitOffs>128</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>ET</Name><Type>TIME</Type><Comment><![CDATA[ elapsed time ]]></Comment><BitSize>32</BitSize><BitOffs>160</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>M</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>192</BitOffs></SubItem><SubItem><Name>StartTime</Name><Type>TIME</Type><BitSize>32</BitSize><BitOffs>224</BitOffs></SubItem><Properties><Property><Name>PouType</Name><Value>FunctionBlock</Value></Property></Properties></DataType><DataType><Name>Tolerance</Name><BitSize>2752</BitSize><SubItem><Name>ENABLE</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>64</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>STEP_TYPE</Name><Type>STRING(80)</Type><BitSize>648</BitSize><BitOffs>72</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>STEP_TIME</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>720</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>TOL_V</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>736</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>TOL_P</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>744</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>SV</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>752</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>PV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>768</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>WARNING_RANGE</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>800</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>ALARM_RANGE</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>816</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>DELAY_TIME</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>832</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>STABLE_TIME</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>848</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>RST</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>864</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>STU_WARNING</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>872</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>STU_ALARM</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>880</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>STABLE_DONE</Name><Type>BOOL</Type><Comment><![CDATA[STU_TIMEOUT:BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>888</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>SV_SUB_WARNING_RANGE</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>896</BitOffs></SubItem><SubItem><Name>SV_ADD_WARNING_RANGE</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>912</BitOffs></SubItem><SubItem><Name>SV_DIV_WARNING_RANGE</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>928</BitOffs></SubItem><SubItem><Name>SV_MUL_WARNING_RANGE</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>944</BitOffs></SubItem><SubItem><Name>SV_SUB_ALARM_RANGE</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>960</BitOffs></SubItem><SubItem><Name>SV_ADD_ALARM_RANGE</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>976</BitOffs></SubItem><SubItem><Name>SV_DIV_ALARM_RANGE</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>992</BitOffs></SubItem><SubItem><Name>SV_MUL_ALARM_RANGE</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>1008</BitOffs></SubItem><SubItem><Name>STU_WARNING_V</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>1024</BitOffs></SubItem><SubItem><Name>STU_WARNING_P</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>1032</BitOffs></SubItem><SubItem><Name>STU_ALARM_V</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>1040</BitOffs></SubItem><SubItem><Name>STU_ALARM_P</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>1048</BitOffs></SubItem><SubItem><Name>TON_DELAY_TIME</Name><Type Namespace="Tc2_Standard">TON</Type><BitSize>256</BitSize><BitOffs>1088</BitOffs></SubItem><SubItem><Name>TON_DELAY_TIME_PT</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>1344</BitOffs></SubItem><SubItem><Name>TON_ALARM_P</Name><Type Namespace="Tc2_Standard">TON</Type><BitSize>256</BitSize><BitOffs>1408</BitOffs></SubItem><SubItem><Name>TON_ALARM_V</Name><Type Namespace="Tc2_Standard">TON</Type><BitSize>256</BitSize><BitOffs>1664</BitOffs></SubItem><SubItem><Name>TON_WARNING_P</Name><Type Namespace="Tc2_Standard">TON</Type><BitSize>256</BitSize><BitOffs>1920</BitOffs></SubItem><SubItem><Name>TON_WARNING_V</Name><Type Namespace="Tc2_Standard">TON</Type><BitSize>256</BitSize><BitOffs>2176</BitOffs></SubItem><SubItem><Name>TON_STABLE</Name><Type Namespace="Tc2_Standard">TON</Type><BitSize>256</BitSize><BitOffs>2432</BitOffs></SubItem><SubItem><Name>TON_STABLE_IN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>2688</BitOffs></SubItem><Properties><Property><Name>PouType</Name><Value>FunctionBlock</Value></Property></Properties></DataType><DataType><Name Namespace="Tc2_Standard">R_TRIG</Name><Comment><![CDATA[
	Rising Edge detection.
]]></Comment><BitSize>128</BitSize><SubItem><Name>CLK</Name><Type>BOOL</Type><Comment><![CDATA[ Signal to detect ]]></Comment><BitSize>8</BitSize><BitOffs>64</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>Q</Name><Type>BOOL</Type><Comment><![CDATA[ rising edge at signal detected ]]></Comment><BitSize>8</BitSize><BitOffs>72</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>M</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>80</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><Properties><Property><Name>PouType</Name><Value>FunctionBlock</Value></Property><Property><Name>conditionalshow_all_locals</Name></Property></Properties></DataType><DataType><Name>PROCESS</Name><BitSize>36672</BitSize><SubItem><Name>ENABLE</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>64</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>NEXTSTEP_EN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>72</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>Alarm_RST</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>80</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>PMStableTime</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>96</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>STEP_DATA</Name><Type>RecipeEachStep</Type><BitSize>4208</BitSize><BitOffs>112</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>APC_PRESSURE</Name><Type>REAL</Type><Comment><![CDATA[APC]]></Comment><BitSize>32</BitSize><BitOffs>4320</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>APC_POSITION</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>4352</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>APC_CONTROL_MODE</Name><Type>SINT</Type><BitSize>8</BitSize><BitOffs>4384</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>MFC1_SV</Name><Type>REAL</Type><Comment><![CDATA[MFC]]></Comment><BitSize>32</BitSize><BitOffs>4416</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>MFC2_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>4448</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>MFC3_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>4480</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>MFC4_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>4512</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>MFC5_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>4544</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>MFC6_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>4576</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>MFC7_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>4608</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>MFC8_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>4640</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>MFC9_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>4672</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>WALL_TEMP</Name><Type>REAL</Type><Comment><![CDATA[HEATER]]></Comment><BitSize>32</BitSize><BitOffs>4704</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>LID_TEMP</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>4736</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>STAGE_EDGE_TEMP</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>4768</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>STAGE_CENTER_TEMP</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>4784</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>STEP_TIME_OUT</Name><Type>BOOL</Type><Comment><![CDATA[STEP]]></Comment><BitSize>8</BitSize><BitOffs>4800</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>STEP_ERR</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>4808</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>NEXTSTEP</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>4816</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>PRESSURE_WARNING</Name><Type>BOOL</Type><Comment><![CDATA[Tolerance]]></Comment><BitSize>8</BitSize><BitOffs>4824</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>PRESSURE_ALARM</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>4832</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>MFC1_WARNING</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>4840</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>MFC1_Alarm</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>4848</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>MFC2_WARNING</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>4856</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>MFC2_Alarm</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>4864</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>MFC3_WARNING</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>4872</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>MFC3_Alarm</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>4880</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>MFC4_WARNING</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>4888</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>MFC4_Alarm</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>4896</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>MFC5_WARNING</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>4904</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>MFC5_Alarm</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>4912</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>MFC6_WARNING</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>4920</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>MFC6_Alarm</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>4928</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>MFC7_WARNING</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>4936</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>MFC7_Alarm</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>4944</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>MFC8_WARNING</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>4952</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>MFC8_Alarm</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>4960</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>MFC9_WARNING</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>4968</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>MFC9_Alarm</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>4976</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>WALL_TEMP_WARNING</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>4984</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>WALL_TEMP_Alarm</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>4992</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>LID_TEMP_WARNING</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>5000</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>LID_TEMP_Alarm</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>5008</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>STAGE_EDGE_TEMP_WARNING</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>5016</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>STAGE_EDGE_TEMP_Alarm</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>5024</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>STAGE_CENTER_TEMP_WARNING</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>5032</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>STAGE_CENTER_TEMP_ALARM</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>5040</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>STEP_TIME</Name><Type Namespace="Tc2_Standard">TON</Type><BitSize>256</BitSize><BitOffs>5056</BitOffs></SubItem><SubItem><Name>STEP_TIME_DONE</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>5312</BitOffs></SubItem><SubItem><Name>COMPLETION</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>5328</BitOffs></SubItem><SubItem><Name>TOL_PRESSURE_PERCENT</Name><Type>Tolerance</Type><Comment><![CDATA[Tolerance]]></Comment><BitSize>2752</BitSize><BitOffs>5376</BitOffs></SubItem><SubItem><Name>TOL_PRESSURE_VALUE_EN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>8128</BitOffs></SubItem><SubItem><Name>TOL_PRESSURE_PERCENT_EN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>8136</BitOffs></SubItem><SubItem><Name>TOL_MFC1_PERCENT</Name><Type>Tolerance</Type><BitSize>2752</BitSize><BitOffs>8192</BitOffs></SubItem><SubItem><Name>TOL_MFC2_PERCENT</Name><Type>Tolerance</Type><BitSize>2752</BitSize><BitOffs>10944</BitOffs></SubItem><SubItem><Name>TOL_MFC3_PERCENT</Name><Type>Tolerance</Type><BitSize>2752</BitSize><BitOffs>13696</BitOffs></SubItem><SubItem><Name>TOL_MFC5_PERCENT</Name><Type>Tolerance</Type><Comment><![CDATA[TOL_MFC4_PERCENT:Tolerance;]]></Comment><BitSize>2752</BitSize><BitOffs>16448</BitOffs></SubItem><SubItem><Name>TOL_MFC6_PERCENT</Name><Type>Tolerance</Type><BitSize>2752</BitSize><BitOffs>19200</BitOffs></SubItem><SubItem><Name>TOL_MFC7_PERCENT</Name><Type>Tolerance</Type><BitSize>2752</BitSize><BitOffs>21952</BitOffs></SubItem><SubItem><Name>TOL_MFC_VALUE_EN</Name><Type>BOOL</Type><Comment><![CDATA[TOL_MFC8_PERCENT:Tolerance;
TOL_MFC9_PERCENT:Tolerance;]]></Comment><BitSize>8</BitSize><BitOffs>24704</BitOffs></SubItem><SubItem><Name>TOL_MFC_PERCENT_EN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>24712</BitOffs></SubItem><SubItem><Name>TOL_WALL_TEMP_PERCENT</Name><Type>Tolerance</Type><BitSize>2752</BitSize><BitOffs>24768</BitOffs></SubItem><SubItem><Name>TOL_LID_TEMP_PERCENT</Name><Type>Tolerance</Type><BitSize>2752</BitSize><BitOffs>27520</BitOffs></SubItem><SubItem><Name>TOL_STAGE_EDGE_TEMP_PERCENT</Name><Type>Tolerance</Type><BitSize>2752</BitSize><BitOffs>30272</BitOffs></SubItem><SubItem><Name>TOL_STAGE_CENTER_TEMP_PERCENT</Name><Type>Tolerance</Type><BitSize>2752</BitSize><BitOffs>33024</BitOffs></SubItem><SubItem><Name>TOL_HEATER_VALUE_EN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>35776</BitOffs></SubItem><SubItem><Name>TOL_HEATER_PERCENT_EN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>35784</BitOffs></SubItem><SubItem><Name>TON_STEP_TIME</Name><Type Namespace="Tc2_Standard">TON</Type><BitSize>256</BitSize><BitOffs>35840</BitOffs></SubItem><SubItem><Name>TON_STEP_TIME_EN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>36096</BitOffs></SubItem><SubItem><Name>WARNING_OCC</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>36104</BitOffs></SubItem><SubItem><Name>ALARM_OCC</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>36112</BitOffs></SubItem><SubItem><Name>i</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>36128</BitOffs></SubItem><SubItem><Name>STABLE_DONE</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>36144</BitOffs></SubItem><SubItem><Name>EN_TRIG</Name><Type Namespace="Tc2_Standard">R_TRIG</Type><BitSize>128</BitSize><BitOffs>36160</BitOffs></SubItem><SubItem><Name>TON_STABLE_PROCESS</Name><Type Namespace="Tc2_Standard">TON</Type><BitSize>256</BitSize><BitOffs>36288</BitOffs></SubItem><SubItem><Name>CHAMBER_TEMP_MIN_VALUE</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>36544</BitOffs></SubItem><SubItem><Name>STAGE_EDGE_TEMP_MIN_VALUE</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>36576</BitOffs></SubItem><SubItem><Name>STAGE_CENTER_TEMP_MIN_VALUE</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>36608</BitOffs></SubItem><Properties><Property><Name>PouType</Name><Value>FunctionBlock</Value></Property></Properties></DataType><DataType><Name Namespace="Tc2_System">T_AmsNetID</Name><Comment><![CDATA[ TwinCAT AMS netID address string. ]]></Comment><BitSize>192</BitSize><BaseType>STRING(23)</BaseType></DataType><DataType><Name Namespace="Tc2_SUPS">E_S_UPS_Mode</Name><BitSize>16</BitSize><BaseType>INT</BaseType><EnumInfo><Text>eSUPS_WrPersistData_Shutdown</Text><Enum>0</Enum><Comment><![CDATA[ in case of powerfailure: writing of persistent data + shutdown]]></Comment></EnumInfo><EnumInfo><Text>eSUPS_WrPersistData_NoShutdown</Text><Enum>1</Enum><Comment><![CDATA[ in case of powerfailure: writing of persistent data, no shutdown]]></Comment></EnumInfo><EnumInfo><Text>eSUPS_ImmediateShutdown</Text><Enum>2</Enum><Comment><![CDATA[ in case of powerfailure: skips writing of data, immediate shutdown]]></Comment></EnumInfo><EnumInfo><Text>eSUPS_CheckPowerStatus</Text><Enum>3</Enum><Comment><![CDATA[ in case of powerfailure: reports powerfailure without action (no writing, no shutdown) ]]></Comment></EnumInfo></DataType><DataType><Name Namespace="Tc2_Utilities">E_PersistentMode</Name><Comment><![CDATA[ Write persistent data control modes ]]></Comment><BitSize>16</BitSize><BaseType>INT</BaseType><EnumInfo><Text>SPDM_2PASS</Text><Enum>0</Enum></EnumInfo><EnumInfo><Text>SPDM_VAR_BOOST</Text><Enum>1</Enum></EnumInfo></DataType><DataType><Name Namespace="Tc2_System">T_U64KAFFINITY</Name><Comment><![CDATA[ CPU affinity mask ]]></Comment><BitSize>64</BitSize><SubItem><Name>lower</Name><Type>DWORD</Type><BitSize>32</BitSize><BitOffs>0</BitOffs><Default><Value>0</Value></Default></SubItem><SubItem><Name>higher</Name><Type>DWORD</Type><BitSize>32</BitSize><BitOffs>32</BitOffs><Default><Value>0</Value></Default></SubItem><Properties><Property><Name>conditionalshow</Name></Property></Properties></DataType><DataType><Name Namespace="Tc2_System">T_AmsPort</Name><Comment><![CDATA[ TwinCAT AMS port address. ]]></Comment><BitSize>16</BitSize><BaseType>UINT</BaseType></DataType><DataType><Name Namespace="Tc2_System">ADSRDWRTEX</Name><Comment><![CDATA[ Extended ADS read/write command. ]]></Comment><BitSize>1792</BitSize><SubItem><Name>NETID</Name><Type Namespace="Tc2_System">T_AmsNetID</Type><Comment><![CDATA[ Ams net id ]]></Comment><BitSize>192</BitSize><BitOffs>64</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>PORT</Name><Type Namespace="Tc2_System">T_AmsPort</Type><Comment><![CDATA[ Ads communication port ]]></Comment><BitSize>16</BitSize><BitOffs>256</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>IDXGRP</Name><Type>UDINT</Type><Comment><![CDATA[ Index group ]]></Comment><BitSize>32</BitSize><BitOffs>288</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>IDXOFFS</Name><Type>UDINT</Type><Comment><![CDATA[ Index offset ]]></Comment><BitSize>32</BitSize><BitOffs>320</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>WRITELEN</Name><Type>UDINT</Type><Comment><![CDATA[ Max. number of data bytes to write (WRITELEN <= max. size of source buffer) ]]></Comment><BitSize>32</BitSize><BitOffs>352</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>READLEN</Name><Type>UDINT</Type><Comment><![CDATA[ Max. number of data bytes to read (READLEN <= max. size of destination buffer) ]]></Comment><BitSize>32</BitSize><BitOffs>384</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>SRCADDR</Name><Type GUID="{18071995-0000-0000-0000-000000000018}">PVOID</Type><Comment><![CDATA[ Pointer to source buffer ]]></Comment><BitSize>64</BitSize><BitOffs>448</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property><Property><Name>TcIgnorePersistent</Name></Property></Properties></SubItem><SubItem><Name>DESTADDR</Name><Type GUID="{18071995-0000-0000-0000-000000000018}">PVOID</Type><Comment><![CDATA[ Pointer to destination buffer ]]></Comment><BitSize>64</BitSize><BitOffs>512</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property><Property><Name>TcIgnorePersistent</Name></Property></Properties></SubItem><SubItem><Name>WRTRD</Name><Type>BOOL</Type><Comment><![CDATA[ Rising edge starts command execution ]]></Comment><BitSize>8</BitSize><BitOffs>576</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>TMOUT</Name><Type>TIME</Type><Comment><![CDATA[ Maximum time allowed for the execution of this ADS command ]]></Comment><BitSize>32</BitSize><BitOffs>608</BitOffs><Default><DateTime>5000</DateTime></Default><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>BUSY</Name><Type>BOOL</Type><Comment><![CDATA[ Busy flag ]]></Comment><BitSize>8</BitSize><BitOffs>640</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>ERR</Name><Type>BOOL</Type><Comment><![CDATA[ Error flag ]]></Comment><BitSize>8</BitSize><BitOffs>648</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>ERRID</Name><Type>UDINT</Type><Comment><![CDATA[ ADS error code ]]></Comment><BitSize>32</BitSize><BitOffs>672</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>COUNT_R</Name><Type>UDINT</Type><Comment><![CDATA[ Count of bytes actually read ]]></Comment><BitSize>32</BitSize><BitOffs>704</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><Properties><Property><Name>PouType</Name><Value>FunctionBlock</Value></Property><Property><Name>hide_all_locals</Name></Property></Properties></DataType><DataType><Name Namespace="Tc2_System">ST_AdsBaDevApiIoCtlModifier</Name><BitSize>128</BitSize><SubItem><Name>affinity</Name><Type Namespace="Tc2_System">T_U64KAFFINITY</Type><Comment><![CDATA[ CPU affinity mask ]]></Comment><BitSize>64</BitSize><BitOffs>0</BitOffs><Default><SubItem><Name>.lower</Name><Value>0</Value></SubItem><SubItem><Name>.higher</Name><Value>0</Value></SubItem></Default></SubItem><SubItem><Name>flags</Name><Type>DWORD</Type><Comment><![CDATA[ Extended modifier flags ]]></Comment><BitSize>32</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>rsrv</Name><Type>DWORD</Type><Comment><![CDATA[ Reserved for future use ]]></Comment><BitSize>32</BitSize><BitOffs>96</BitOffs></SubItem><Properties><Property><Name>conditionalshow</Name></Property></Properties></DataType><DataType><Name Namespace="Tc2_System">ST_AdsBaDevApiHead</Name><Comment><![CDATA[ Api request header ]]></Comment><BitSize>192</BitSize><SubItem><Name>indexGroup</Name><Type>UDINT</Type><Comment><![CDATA[ Function group ]]></Comment><BitSize>32</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>indexOffset</Name><Type>UDINT</Type><Comment><![CDATA[ Function offset ]]></Comment><BitSize>32</BitSize><BitOffs>32</BitOffs></SubItem><SubItem><Name>modifier</Name><Type Namespace="Tc2_System">ST_AdsBaDevApiIoCtlModifier</Type><BitSize>128</BitSize><BitOffs>64</BitOffs></SubItem><Properties><Property><Name>conditionalshow</Name></Property></Properties></DataType><DataType><Name Namespace="Tc2_System">ST_AdsBaDevApiReq</Name><Comment><![CDATA[ Api request frame ]]></Comment><BitSize>8416</BitSize><SubItem><Name>head</Name><Type Namespace="Tc2_System">ST_AdsBaDevApiHead</Type><Comment><![CDATA[ Header ]]></Comment><BitSize>192</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>inData</Name><Type>BYTE</Type><ArrayInfo><LBound>0</LBound><Elements>1025</Elements></ArrayInfo><Comment><![CDATA[ User data ]]></Comment><BitSize>8200</BitSize><BitOffs>192</BitOffs></SubItem><Properties><Property><Name>conditionalshow</Name></Property></Properties></DataType><DataType><Name Namespace="Tc2_System">FB_BaDeviceIoControl</Name><BitSize>11200</BitSize><SubItem><Name>sNetID</Name><Type Namespace="Tc2_System">T_AmsNetID</Type><BitSize>192</BitSize><BitOffs>64</BitOffs><Default><String /></Default><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>affinity</Name><Type Namespace="Tc2_System">T_U64KAFFINITY</Type><BitSize>64</BitSize><BitOffs>256</BitOffs><Default><SubItem><Name>.lower</Name><Value>0</Value></SubItem><SubItem><Name>.higher</Name><Value>0</Value></SubItem></Default><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>nModifier</Name><Type>UDINT</Type><BitSize>32</BitSize><BitOffs>320</BitOffs><Default><Value>0</Value></Default><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>nIdxGrp</Name><Type>UDINT</Type><BitSize>32</BitSize><BitOffs>352</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>nIdxOffs</Name><Type>UDINT</Type><BitSize>32</BitSize><BitOffs>384</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>cbWriteLen</Name><Type>UDINT</Type><BitSize>32</BitSize><BitOffs>416</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>cbReadLen</Name><Type>UDINT</Type><BitSize>32</BitSize><BitOffs>448</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>pWriteBuff</Name><Type GUID="{18071995-0000-0000-0000-000000000018}">PVOID</Type><BitSize>64</BitSize><BitOffs>512</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>pReadBuff</Name><Type GUID="{18071995-0000-0000-0000-000000000018}">PVOID</Type><BitSize>64</BitSize><BitOffs>576</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>bExecute</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>640</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>tTimeout</Name><Type>TIME</Type><BitSize>32</BitSize><BitOffs>672</BitOffs><Default><DateTime>5000</DateTime></Default><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>bBusy</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>704</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>bError</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>712</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>nErrID</Name><Type>UDINT</Type><BitSize>32</BitSize><BitOffs>736</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>cbRead</Name><Type>UDINT</Type><BitSize>32</BitSize><BitOffs>768</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>fbRW</Name><Type Namespace="Tc2_System">ADSRDWRTEX</Type><BitSize>1792</BitSize><BitOffs>832</BitOffs><Default><SubItem><Name>.PORT</Name><Value>10000</Value></SubItem><SubItem><Name>.IDXGRP</Name><Value>1100</Value></SubItem><SubItem><Name>.IDXOFFS</Name><Value>0</Value></SubItem></Default></SubItem><SubItem><Name>req</Name><Type Namespace="Tc2_System">ST_AdsBaDevApiReq</Type><BitSize>8416</BitSize><BitOffs>2624</BitOffs></SubItem><SubItem><Name>state</Name><Type>BYTE</Type><BitSize>8</BitSize><BitOffs>11040</BitOffs></SubItem><SubItem><Name>rtrig</Name><Type Namespace="Tc2_Standard">R_TRIG</Type><BitSize>128</BitSize><BitOffs>11072</BitOffs></SubItem><Properties><Property><Name>PouType</Name><Value>FunctionBlock</Value></Property><Property><Name>hide</Name></Property></Properties></DataType><DataType><Name Namespace="Tc2_System">FB_BaGenGetVersion</Name><BitSize>11840</BitSize><SubItem><Name>sNetID</Name><Type Namespace="Tc2_System">T_AmsNetID</Type><BitSize>192</BitSize><BitOffs>64</BitOffs><Default><String /></Default><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>bExecute</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>256</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>tTimeout</Name><Type>TIME</Type><BitSize>32</BitSize><BitOffs>288</BitOffs><Default><DateTime>5000</DateTime></Default><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>bBusy</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>320</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>bError</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>328</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>nErrID</Name><Type>UDINT</Type><BitSize>32</BitSize><BitOffs>352</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>nVersion</Name><Type>BYTE</Type><BitSize>8</BitSize><BitOffs>384</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>nRevision</Name><Type>BYTE</Type><BitSize>8</BitSize><BitOffs>392</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>nBuild</Name><Type>WORD</Type><BitSize>16</BitSize><BitOffs>400</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>fbCtrl</Name><Type Namespace="Tc2_System">FB_BaDeviceIoControl</Type><BitSize>11200</BitSize><BitOffs>448</BitOffs><Default><SubItem><Name>.nModifier</Name><Value>0</Value></SubItem><SubItem><Name>.affinity.lower</Name><Value>0</Value></SubItem><SubItem><Name>.affinity.higher</Name><Value>0</Value></SubItem><SubItem><Name>.nIdxGrp</Name><Value>0</Value></SubItem><SubItem><Name>.nIdxOffs</Name><Value>0</Value></SubItem></Default></SubItem><SubItem><Name>rtrig</Name><Type Namespace="Tc2_Standard">R_TRIG</Type><BitSize>128</BitSize><BitOffs>11648</BitOffs></SubItem><SubItem><Name>state</Name><Type>BYTE</Type><BitSize>8</BitSize><BitOffs>11776</BitOffs></SubItem><SubItem><Name>rsp</Name><Type>DWORD</Type><BitSize>32</BitSize><BitOffs>11808</BitOffs></SubItem><Properties><Property><Name>PouType</Name><Value>FunctionBlock</Value></Property><Property><Name>hide</Name></Property></Properties></DataType><DataType><Name Namespace="Tc2_System">ADSWRITE</Name><Comment><![CDATA[ ADS write command. ]]></Comment><BitSize>1344</BitSize><SubItem><Name>NETID</Name><Type Namespace="Tc2_System">T_AmsNetID</Type><Comment><![CDATA[ Ams net id ]]></Comment><BitSize>192</BitSize><BitOffs>64</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>PORT</Name><Type Namespace="Tc2_System">T_AmsPort</Type><Comment><![CDATA[ Ads communication port ]]></Comment><BitSize>16</BitSize><BitOffs>256</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>IDXGRP</Name><Type>UDINT</Type><Comment><![CDATA[ Index group ]]></Comment><BitSize>32</BitSize><BitOffs>288</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>IDXOFFS</Name><Type>UDINT</Type><Comment><![CDATA[ Index offset ]]></Comment><BitSize>32</BitSize><BitOffs>320</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>LEN</Name><Type>UDINT</Type><Comment><![CDATA[ Max. number of data bytes to write (LEN <= max. size of source buffer) ]]></Comment><BitSize>32</BitSize><BitOffs>352</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>SRCADDR</Name><Type GUID="{18071995-0000-0000-0000-000000000018}">PVOID</Type><Comment><![CDATA[ Pointer to source buffer ]]></Comment><BitSize>64</BitSize><BitOffs>384</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property><Property><Name>TcIgnorePersistent</Name></Property></Properties></SubItem><SubItem><Name>WRITE</Name><Type>BOOL</Type><Comment><![CDATA[ Rising edge starts command execution ]]></Comment><BitSize>8</BitSize><BitOffs>448</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>TMOUT</Name><Type>TIME</Type><Comment><![CDATA[ Maximum time allowed for the execution of this ADS command ]]></Comment><BitSize>32</BitSize><BitOffs>480</BitOffs><Default><DateTime>5000</DateTime></Default><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>BUSY</Name><Type>BOOL</Type><Comment><![CDATA[ Busy flag ]]></Comment><BitSize>8</BitSize><BitOffs>512</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>ERR</Name><Type>BOOL</Type><Comment><![CDATA[ Error flag ]]></Comment><BitSize>8</BitSize><BitOffs>520</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>ERRID</Name><Type>UDINT</Type><Comment><![CDATA[ ADS error code ]]></Comment><BitSize>32</BitSize><BitOffs>544</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><Properties><Property><Name>PouType</Name><Value>FunctionBlock</Value></Property><Property><Name>hide_all_locals</Name></Property></Properties></DataType><DataType><Name Namespace="Tc2_Utilities">FB_WritePersistentData</Name><Comment><![CDATA[ This function block initiatializes storage of the persistent data from the PLC program ]]></Comment><BitSize>1728</BitSize><SubItem><Name>NETID</Name><Type Namespace="Tc2_System">T_AmsNetID</Type><Comment><![CDATA[ TwinCAT network address (ams net id) ]]></Comment><BitSize>192</BitSize><BitOffs>64</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>PORT</Name><Type>UINT</Type><Comment><![CDATA[ Contains the ADS port number of the PLC run-time system whose persistent data is to be stored (851, 852...)]]></Comment><BitSize>16</BitSize><BitOffs>256</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>START</Name><Type>BOOL</Type><Comment><![CDATA[ Rising edge on this input activates the fb execution ]]></Comment><BitSize>8</BitSize><BitOffs>272</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>TMOUT</Name><Type>TIME</Type><Comment><![CDATA[ Max fb execution time ]]></Comment><BitSize>32</BitSize><BitOffs>288</BitOffs><Default><DateTime>5000</DateTime></Default><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>MODE</Name><Type Namespace="Tc2_Utilities">E_PersistentMode</Type><Comment><![CDATA[ =SPDM_2PASS: optimized boost; =SPDM_VAR_BOOST: boost per variable; ]]></Comment><BitSize>16</BitSize><BitOffs>320</BitOffs><Default><EnumText>E_PersistentMode.SPDM_2PASS</EnumText></Default><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>BUSY</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>336</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>ERR</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>344</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>ERRID</Name><Type>UDINT</Type><BitSize>32</BitSize><BitOffs>352</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>fbAdsWrite</Name><Type Namespace="Tc2_System">ADSWRITE</Type><BitSize>1344</BitSize><BitOffs>384</BitOffs><Default><SubItem><Name>.IDXGRP</Name><Value>139460625</Value></SubItem><SubItem><Name>.IDXOFFS</Name><Value>0</Value></SubItem></Default><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><Properties><Property><Name>PouType</Name><Value>FunctionBlock</Value></Property><Property><Name>conditionalshow_all_locals</Name></Property></Properties></DataType><DataType><Name Namespace="Tc2_System">ADSWRTCTL</Name><Comment><![CDATA[ ADS write control command. ]]></Comment><BitSize>1344</BitSize><SubItem><Name>NETID</Name><Type Namespace="Tc2_System">T_AmsNetID</Type><Comment><![CDATA[ Ams net id ]]></Comment><BitSize>192</BitSize><BitOffs>64</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>PORT</Name><Type Namespace="Tc2_System">T_AmsPort</Type><Comment><![CDATA[ Ads communication port ]]></Comment><BitSize>16</BitSize><BitOffs>256</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>ADSSTATE</Name><Type>UINT</Type><Comment><![CDATA[ ADS state ]]></Comment><BitSize>16</BitSize><BitOffs>272</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>DEVSTATE</Name><Type>UINT</Type><Comment><![CDATA[ Device state ]]></Comment><BitSize>16</BitSize><BitOffs>288</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>LEN</Name><Type>UDINT</Type><Comment><![CDATA[ Max. number of data bytes to write ( LEN <= max. size of source buffer) ]]></Comment><BitSize>32</BitSize><BitOffs>320</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>SRCADDR</Name><Type GUID="{18071995-0000-0000-0000-000000000018}">PVOID</Type><Comment><![CDATA[ Pointer to source buffer ]]></Comment><BitSize>64</BitSize><BitOffs>384</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property><Property><Name>TcIgnorePersistent</Name></Property></Properties></SubItem><SubItem><Name>WRITE</Name><Type>BOOL</Type><Comment><![CDATA[ Rising edge starts command execution ]]></Comment><BitSize>8</BitSize><BitOffs>448</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>TMOUT</Name><Type>TIME</Type><Comment><![CDATA[ Maximum time allowed for the execution of this ADS command ]]></Comment><BitSize>32</BitSize><BitOffs>480</BitOffs><Default><DateTime>5000</DateTime></Default><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>BUSY</Name><Type>BOOL</Type><Comment><![CDATA[ Busy flag ]]></Comment><BitSize>8</BitSize><BitOffs>512</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>ERR</Name><Type>BOOL</Type><Comment><![CDATA[ Error flag ]]></Comment><BitSize>8</BitSize><BitOffs>520</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>ERRID</Name><Type>UDINT</Type><Comment><![CDATA[ ADS error code ]]></Comment><BitSize>32</BitSize><BitOffs>544</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><Properties><Property><Name>PouType</Name><Value>FunctionBlock</Value></Property><Property><Name>hide_all_locals</Name></Property></Properties></DataType><DataType><Name Namespace="Tc2_SUPS">FB_NT_QuickShutdown</Name><BitSize>1920</BitSize><SubItem><Name>NETID</Name><Type Namespace="Tc2_System">T_AmsNetID</Type><BitSize>192</BitSize><BitOffs>64</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>START</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>256</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>TMOUT</Name><Type>TIME</Type><BitSize>32</BitSize><BitOffs>288</BitOffs><Default><DateTime>5000</DateTime></Default><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>BUSY</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>320</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>ERR</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>328</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>ERRID</Name><Type>UDINT</Type><BitSize>32</BitSize><BitOffs>352</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>ADSWRTCTL1</Name><Type Namespace="Tc2_System">ADSWRTCTL</Type><BitSize>1344</BitSize><BitOffs>384</BitOffs></SubItem><SubItem><Name>RisingEdge</Name><Type Namespace="Tc2_Standard">R_TRIG</Type><BitSize>128</BitSize><BitOffs>1728</BitOffs></SubItem><SubItem><Name>DELAY</Name><Type>DWORD</Type><BitSize>32</BitSize><BitOffs>1856</BitOffs><Default><Value>4294967295</Value></Default></SubItem><Properties><Property><Name>PouType</Name><Value>FunctionBlock</Value></Property><Property><Name>conditionalshow</Name></Property></Properties></DataType><DataType><Name Namespace="Tc2_System">ST_WD_GPIO_InfoEx</Name><BitSize>192</BitSize><SubItem><Name>nType</Name><Type>UINT</Type><BitSize>16</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>nLength</Name><Type>UINT</Type><BitSize>16</BitSize><BitOffs>16</BitOffs></SubItem><SubItem><Name>nFlags</Name><Type>WORD</Type><Comment><![CDATA[ 	Bit0-1: 	00 = Not valid, 01 = RO, 			10 = WO, 		11 = RW,
							Bit2-4: 	00 = lowActive,	01 = highActive,	10 = reserved	11 = Toggle,
							Bit4-15:	reserved ]]></Comment><BitSize>16</BitSize><BitOffs>32</BitOffs></SubItem><SubItem><Name>nReserved2</Name><Type>UINT</Type><BitSize>16</BitSize><BitOffs>48</BitOffs></SubItem><SubItem><Name>nAddress</Name><Type>DWORD</Type><BitSize>32</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>nReserved3</Name><Type>DWORD</Type><BitSize>32</BitSize><BitOffs>96</BitOffs></SubItem><SubItem><Name>nBitmask</Name><Type>DWORD</Type><BitSize>32</BitSize><BitOffs>128</BitOffs></SubItem><SubItem><Name>nReserved4</Name><Type>DWORD</Type><BitSize>32</BitSize><BitOffs>160</BitOffs></SubItem></DataType><DataType><Name Namespace="Tc2_SUPS">FB_S_UPS_BAPI</Name><BitSize>74624</BitSize><SubItem><Name>sNetID</Name><Type Namespace="Tc2_System">T_AmsNetID</Type><Comment><![CDATA[ '' = local netid ]]></Comment><BitSize>192</BitSize><BitOffs>64</BitOffs><Default><String /></Default><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>iPLCPort</Name><Type>UINT</Type><Comment><![CDATA[ PLC Runtime System for writing persistent data ]]></Comment><BitSize>16</BitSize><BitOffs>256</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>tTimeout</Name><Type>TIME</Type><Comment><![CDATA[ ADS Timeout ]]></Comment><BitSize>32</BitSize><BitOffs>288</BitOffs><Default><DateTime>5000</DateTime></Default><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>eUpsMode</Name><Type Namespace="Tc2_SUPS">E_S_UPS_Mode</Type><Comment><![CDATA[ UPS mode (w/wo writing persistent data, w/wo shutdown) ]]></Comment><BitSize>16</BitSize><BitOffs>320</BitOffs><Default><EnumText>E_S_UPS_Mode.eSUPS_WrPersistData_Shutdown</EnumText></Default><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>ePersistentMode</Name><Type Namespace="Tc2_Utilities">E_PersistentMode</Type><Comment><![CDATA[ mode for writing persistent data ]]></Comment><BitSize>16</BitSize><BitOffs>336</BitOffs><Default><EnumText>E_PersistentMode.SPDM_2PASS</EnumText></Default><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>tRecoverTime</Name><Type>TIME</Type><Comment><![CDATA[ ON time to recover from short power failure in mode eSUPS_WrPersistData_NoShutdown/eSUPS_CheckPowerStatus  ]]></Comment><BitSize>32</BitSize><BitOffs>352</BitOffs><Default><DateTime>10000</DateTime></Default><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>bPowerFailDetect</Name><Type>BOOL</Type><Comment><![CDATA[ TRUE while powerfailure is detected ]]></Comment><BitSize>8</BitSize><BitOffs>384</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>eState</Name><Type Namespace="Tc2_SUPS">E_S_UPS_State</Type><Comment><![CDATA[ current ups state ]]></Comment><BitSize>16</BitSize><BitOffs>400</BitOffs><Default><EnumText>E_S_UPS_State.eSUPS_PowerOK</EnumText></Default><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>nCapacity</Name><Type>BYTE</Type><Comment><![CDATA[ actual capacity of UPS ]]></Comment><BitSize>8</BitSize><BitOffs>416</BitOffs><Default><Value>0</Value></Default><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>bBusy</Name><Type>BOOL</Type><Comment><![CDATA[ TRUE: function block is busy ]]></Comment><BitSize>8</BitSize><BitOffs>424</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>bError</Name><Type>BOOL</Type><Comment><![CDATA[ TRUE: function block has error ]]></Comment><BitSize>8</BitSize><BitOffs>432</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>nErrID</Name><Type>UDINT</Type><Comment><![CDATA[ FB error ID   ]]></Comment><BitSize>32</BitSize><BitOffs>448</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>fbSUpsGetGpioInfo</Name><Type Namespace="Tc2_System">FB_BaDeviceIoControl</Type><BitSize>11200</BitSize><BitOffs>512</BitOffs><Default><SubItem><Name>.nModifier</Name><Value>0</Value></SubItem><SubItem><Name>.affinity.lower</Name><Value>0</Value></SubItem><SubItem><Name>.affinity.higher</Name><Value>0</Value></SubItem><SubItem><Name>.nIdxGrp</Name><Value>20480</Value></SubItem><SubItem><Name>.nIdxOffs</Name><Value>161</Value></SubItem></Default><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>nSUpsGetGpioInfo</Name><Type>DWORD</Type><BitSize>32</BitSize><BitOffs>11712</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>nGpioState</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>11744</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>fbSUpsGetState</Name><Type Namespace="Tc2_System">FB_BaDeviceIoControl</Type><BitSize>11200</BitSize><BitOffs>11776</BitOffs><Default><SubItem><Name>.nModifier</Name><Value>0</Value></SubItem><SubItem><Name>.affinity.lower</Name><Value>0</Value></SubItem><SubItem><Name>.affinity.higher</Name><Value>0</Value></SubItem><SubItem><Name>.nIdxGrp</Name><Value>20480</Value></SubItem><SubItem><Name>.nIdxOffs</Name><Value>1</Value></SubItem></Default><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>nCapacityRsp</Name><Type>BYTE</Type><BitSize>8</BitSize><BitOffs>22976</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>bCharging</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>22984</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>bDischarging</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>22992</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>nGetState</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>23008</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>nUpsState</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>23024</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>fbUpsStateTimer</Name><Type Namespace="Tc2_Standard">TON</Type><BitSize>256</BitSize><BitOffs>23040</BitOffs><Default><SubItem><Name>.IN</Name><Bool>true</Bool></SubItem></Default><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>fbStartupTimer</Name><Type Namespace="Tc2_Standard">TON</Type><BitSize>256</BitSize><BitOffs>23296</BitOffs><Default><SubItem><Name>.IN</Name><Bool>true</Bool></SubItem><SubItem><Name>.PT</Name><DateTime>0</DateTime></SubItem></Default><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>nInitState</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>23552</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>dxValue</Name><Type>DWORD</Type><BitSize>32</BitSize><BitOffs>23584</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>dxStatus</Name><Type>DWORD</Type><BitSize>32</BitSize><BitOffs>23616</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>dxBitMask</Name><Type>DWORD</Type><BitSize>32</BitSize><BitOffs>23648</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>nBitNo</Name><Type>BYTE</Type><BitSize>8</BitSize><BitOffs>23680</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>bBitLevel</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>23688</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>bStatus</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>23696</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>bLowActive</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>23704</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>bHighActive</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>23712</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>bOldSupsVersion</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>23720</BitOffs><Default><Bool>true</Bool></Default><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>fbSUpsEnable</Name><Type Namespace="Tc2_System">FB_BaDeviceIoControl</Type><BitSize>11200</BitSize><BitOffs>23744</BitOffs><Default><SubItem><Name>.nModifier</Name><Value>0</Value></SubItem><SubItem><Name>.affinity.lower</Name><Value>0</Value></SubItem><SubItem><Name>.affinity.higher</Name><Value>0</Value></SubItem><SubItem><Name>.nIdxGrp</Name><Value>20480</Value></SubItem><SubItem><Name>.nIdxOffs</Name><Value>0</Value></SubItem></Default><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>bSUps</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>34944</BitOffs><Default><Bool>true</Bool></Default><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>bSUpsEnable</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>34952</BitOffs><Default><Bool>true</Bool></Default><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>nEnableState</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>34960</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>bEnableNotSupported</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>34976</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>fbSUpsStatus</Name><Type Namespace="Tc2_System">FB_BaDeviceIoControl</Type><BitSize>11200</BitSize><BitOffs>35008</BitOffs><Default><SubItem><Name>.nModifier</Name><Value>0</Value></SubItem><SubItem><Name>.affinity.lower</Name><Value>0</Value></SubItem><SubItem><Name>.affinity.higher</Name><Value>0</Value></SubItem><SubItem><Name>.nIdxGrp</Name><Value>20480</Value></SubItem><SubItem><Name>.nIdxOffs</Name><Value>1</Value></SubItem></Default><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>nSUpsStatus</Name><Type>BYTE</Type><BitSize>8</BitSize><BitOffs>46208</BitOffs><Default><Value>0</Value></Default><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>bSUpsStatus</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>46216</BitOffs><Default><Bool>true</Bool></Default><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>fbSUpsGetRevision</Name><Type Namespace="Tc2_System">FB_BaDeviceIoControl</Type><BitSize>11200</BitSize><BitOffs>46272</BitOffs><Default><SubItem><Name>.nModifier</Name><Value>0</Value></SubItem><SubItem><Name>.affinity.lower</Name><Value>0</Value></SubItem><SubItem><Name>.affinity.higher</Name><Value>0</Value></SubItem><SubItem><Name>.nIdxGrp</Name><Value>20480</Value></SubItem><SubItem><Name>.nIdxOffs</Name><Value>2</Value></SubItem></Default><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>nSUpsVersionData</Name><Type>BYTE</Type><ArrayInfo><LBound>0</LBound><Elements>3</Elements></ArrayInfo><BitSize>24</BitSize><BitOffs>57472</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>bSUpsGetRevision</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>57496</BitOffs><Default><Bool>true</Bool></Default><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>sSupsVersion</Name><Type>STRING(15)</Type><BitSize>128</BitSize><BitOffs>57504</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>nRevisionState</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>57632</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>fbBaGenGetVersion</Name><Type Namespace="Tc2_System">FB_BaGenGetVersion</Type><BitSize>11840</BitSize><BitOffs>57664</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>bBaGenGetVersion</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>69504</BitOffs><Default><Bool>true</Bool></Default><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>nVersion</Name><Type>BYTE</Type><BitSize>8</BitSize><BitOffs>69512</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>nRevision</Name><Type>BYTE</Type><BitSize>8</BitSize><BitOffs>69520</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>nBuild</Name><Type>WORD</Type><BitSize>16</BitSize><BitOffs>69536</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>sBaVersion</Name><Type>STRING(15)</Type><BitSize>128</BitSize><BitOffs>69552</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>bOldBaVersion</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>69680</BitOffs><Default><Bool>true</Bool></Default><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>bPowerFailDetectPrev</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>69688</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>bPowerOKInFirstCycle</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>69696</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>fbWritePersistentData</Name><Type Namespace="Tc2_Utilities">FB_WritePersistentData</Type><BitSize>1728</BitSize><BitOffs>69760</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>fbNT_QuickShutdown</Name><Type Namespace="Tc2_SUPS">FB_NT_QuickShutdown</Type><BitSize>1920</BitSize><BitOffs>71488</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>WaitForOffTimer</Name><Type Namespace="Tc2_Standard">TON</Type><BitSize>256</BitSize><BitOffs>73408</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>bFirstCycle</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>73664</BitOffs><Default><Bool>true</Bool></Default><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>pAddress1</Name><Type PointerTo="1">BYTE</Type><BitSize>64</BitSize><BitOffs>73728</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>dxValue1</Name><Type>BYTE</Type><BitSize>8</BitSize><BitOffs>73792</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>dxBitMask1</Name><Type>BYTE</Type><BitSize>8</BitSize><BitOffs>73800</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>pAddress2</Name><Type PointerTo="1">WORD</Type><BitSize>64</BitSize><BitOffs>73856</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>dxValue2</Name><Type>WORD</Type><BitSize>16</BitSize><BitOffs>73920</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>dxBitMask2</Name><Type>WORD</Type><BitSize>16</BitSize><BitOffs>73936</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>pAddress4</Name><Type PointerTo="1">DWORD</Type><BitSize>64</BitSize><BitOffs>73984</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>dxValue4</Name><Type>DWORD</Type><BitSize>32</BitSize><BitOffs>74048</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>dxBitMask4</Name><Type>DWORD</Type><BitSize>32</BitSize><BitOffs>74080</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>pAddress8</Name><Type PointerTo="1">LWORD</Type><BitSize>64</BitSize><BitOffs>74112</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>dxValue8</Name><Type>LWORD</Type><BitSize>64</BitSize><BitOffs>74176</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>dxBitMask8</Name><Type>LWORD</Type><BitSize>64</BitSize><BitOffs>74240</BitOffs><Properties><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>bUseInfo</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>74304</BitOffs><Properties><Property><Name>TcPersistent</Name></Property><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>nIoAddr</Name><Type>UDINT</Type><BitSize>32</BitSize><BitOffs>74336</BitOffs><Properties><Property><Name>TcPersistent</Name></Property><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>nOffset</Name><Type>BYTE</Type><BitSize>8</BitSize><BitOffs>74368</BitOffs><Properties><Property><Name>TcPersistent</Name></Property><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>nParams</Name><Type>BYTE</Type><BitSize>8</BitSize><BitOffs>74376</BitOffs><Properties><Property><Name>TcPersistent</Name></Property><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>bUseInfoEx</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>74384</BitOffs><Properties><Property><Name>TcPersistent</Name></Property><Property><Name>conditionalshow</Name></Property></Properties></SubItem><SubItem><Name>stGpioInfoEx</Name><Type Namespace="Tc2_System">ST_WD_GPIO_InfoEx</Type><BitSize>192</BitSize><BitOffs>74400</BitOffs><Properties><Property><Name>TcPersistent</Name></Property><Property><Name>conditionalshow</Name></Property></Properties></SubItem><Properties><Property><Name>PouType</Name><Value>FunctionBlock</Value></Property><Property><Name>conditionalshow_all_locals</Name></Property></Properties></DataType><DataType><Name>RANGEJD</Name><BitSize>1280</BitSize><SubItem><Name>ENABLE</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>64</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>SV</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>128</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>PV</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>192</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>RANGE_ALARM_H</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>256</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>RANGE_ALARM_L</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>320</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>RANGE_WARNING_H</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>384</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>RANGE_WARNING_L</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>448</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>TIME_ALARM</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>512</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>TIME_WARNING</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>576</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>ALARM</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>640</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>WARNING</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>648</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>TON_ALARM</Name><Type Namespace="Tc2_Standard">TON</Type><BitSize>256</BitSize><BitOffs>704</BitOffs></SubItem><SubItem><Name>TON_WARNING</Name><Type Namespace="Tc2_Standard">TON</Type><BitSize>256</BitSize><BitOffs>960</BitOffs></SubItem><SubItem><Name>STATUS_ALARM</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>1216</BitOffs></SubItem><SubItem><Name>STATUS_WARNING</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>1224</BitOffs></SubItem><Properties><Property><Name>PouType</Name><Value>FunctionBlock</Value></Property></Properties></DataType><DataType><Name Namespace="Tc2_ControllerToolbox">E_CTRL_MODE</Name><BitSize>16</BitSize><BaseType>INT</BaseType><EnumInfo><Text>eCTRL_MODE_IDLE</Text><Enum>0</Enum><Comment><![CDATA[ mode idle					]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_MODE_PASSIVE</Text><Enum>1</Enum><Comment><![CDATA[ mode passive				]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_MODE_ACTIVE</Text><Enum>2</Enum><Comment><![CDATA[ mode active					]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_MODE_RESET</Text><Enum>3</Enum><Comment><![CDATA[ mode reset					]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_MODE_MANUAL</Text><Enum>4</Enum><Comment><![CDATA[ mode manual				]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_MODE_TUNE</Text><Enum>5</Enum><Comment><![CDATA[ mode tuning				]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_MODE_SELFTEST</Text><Enum>6</Enum><Comment><![CDATA[ mode selftest				]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_MODE_SYNC_MOVEMENT</Text><Enum>7</Enum><Comment><![CDATA[ mode synchronize			]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_MODE_FREEZE</Text><Enum>8</Enum><Comment><![CDATA[ mode freeze				]]></Comment></EnumInfo></DataType><DataType><Name Namespace="Tc2_ControllerToolbox">E_CTRL_STATE</Name><BitSize>16</BitSize><BaseType>INT</BaseType><EnumInfo><Text>eCTRL_STATE_IDLE</Text><Enum>0</Enum><Comment><![CDATA[ state idle		]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_STATE_PASSIVE</Text><Enum>1</Enum><Comment><![CDATA[ state passive	]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_STATE_ACTIVE</Text><Enum>2</Enum><Comment><![CDATA[ state active		]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_STATE_RESET</Text><Enum>3</Enum><Comment><![CDATA[ state reset		]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_STATE_MANUAL</Text><Enum>4</Enum><Comment><![CDATA[ state manual	]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_STATE_TUNING</Text><Enum>5</Enum><Comment><![CDATA[ state tuning		]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_STATE_TUNED</Text><Enum>6</Enum><Comment><![CDATA[ state tuning ready - tuned		]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_STATE_SELFTEST</Text><Enum>7</Enum><Comment><![CDATA[ state selftest		]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_STATE_ERROR</Text><Enum>8</Enum><Comment><![CDATA[ state error		]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_STATE_SYNC_MOVEMENT</Text><Enum>9</Enum><Comment><![CDATA[ state synchronizing movement		]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_STATE_FREEZE</Text><Enum>10</Enum><Comment><![CDATA[ state freeze 	]]></Comment></EnumInfo></DataType><DataType><Name Namespace="Tc2_ControllerToolbox">E_CTRL_ERRORCODES</Name><BitSize>16</BitSize><BaseType>INT</BaseType><EnumInfo><Text>eCTRL_ERROR_NOERROR</Text><Enum>0</Enum><Comment><![CDATA[ no error ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDTASKCYCLETIME</Text><Enum>1</Enum><Comment><![CDATA[ invalid task cycle time ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDCTRLCYCLETIME</Text><Enum>2</Enum><Comment><![CDATA[ invalid ctrl cycle time ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM</Text><Enum>3</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_Tv</Text><Enum>4</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_Td</Text><Enum>5</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_Tn</Text><Enum>6</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_Ti</Text><Enum>7</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fHystereisisRange</Text><Enum>8</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fPosOutOn_Off</Text><Enum>9</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fNegOutOn_Off</Text><Enum>10</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_TableDescription</Text><Enum>11</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_TableData</Text><Enum>12</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_DataTableADR</Text><Enum>13</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_T0</Text><Enum>14</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_T1</Text><Enum>15</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_T2</Text><Enum>16</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_T3</Text><Enum>17</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_Theta</Text><Enum>18</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nOrder</Text><Enum>19</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_Tt</Text><Enum>20</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_Tu</Text><Enum>21</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_Tg</Text><Enum>22</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_infinite_slope</Text><Enum>23</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fMaxIsLessThanfMin</Text><Enum>24</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fOutMaxLimitIsLessThanfOutMinLimit</Text><Enum>25</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fOuterWindow</Text><Enum>26</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fInnerWindow</Text><Enum>27</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fOuterWindowIsLessThanfInnerWindow</Text><Enum>28</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fDeadBandInput</Text><Enum>29</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fDeadBandOutput</Text><Enum>30</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_PWM_Cycletime</Text><Enum>31</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_no_Parameterset</Text><Enum>32</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fOutOn</Text><Enum>33</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fOutOff</Text><Enum>34</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fGain</Text><Enum>35</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fOffset</Text><Enum>36</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_MODE_NOT_SUPPORTED</Text><Enum>37</Enum><Comment><![CDATA[ invalid mode: mode not supported ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_Tv_heating</Text><Enum>38</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_Td_heating</Text><Enum>39</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_Tn_heating</Text><Enum>40</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_Tv_cooling</Text><Enum>41</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_Td_cooling</Text><Enum>42</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_Tn_cooling</Text><Enum>43</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_RANGE_NOT_SUPPORTED</Text><Enum>44</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nParameterChangeCycleTicks</Text><Enum>45</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_ParameterEstimationFailed</Text><Enum>46</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_NoiseLevelToHigh</Text><Enum>47</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INTERNAL_ERROR_0</Text><Enum>48</Enum><Comment><![CDATA[ internal error ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INTERNAL_ERROR_1</Text><Enum>49</Enum><Comment><![CDATA[ internal error ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INTERNAL_ERROR_2</Text><Enum>50</Enum><Comment><![CDATA[ internal error ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INTERNAL_ERROR_3</Text><Enum>51</Enum><Comment><![CDATA[ internal error ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INTERNAL_ERROR_4</Text><Enum>52</Enum><Comment><![CDATA[ internal error ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INTERNAL_ERROR_5</Text><Enum>53</Enum><Comment><![CDATA[ internal error ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INTERNAL_ERROR_6</Text><Enum>54</Enum><Comment><![CDATA[ internal error ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INTERNAL_ERROR_7</Text><Enum>55</Enum><Comment><![CDATA[ internal error ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INTERNAL_ERROR_8</Text><Enum>56</Enum><Comment><![CDATA[ internal error ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INTERNAL_ERROR_9</Text><Enum>57</Enum><Comment><![CDATA[ internal error ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_WorkArrayADR</Text><Enum>58</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_tOnTime</Text><Enum>59</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_tOffTime</Text><Enum>60</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nMaxMovingPulses</Text><Enum>61</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nAdditionalPulsesAtLimits</Text><Enum>62</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fCtrlOutMax_Min</Text><Enum>63</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fDeltaMax</Text><Enum>64</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_tMovingTime</Text><Enum>65</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_tDeadTime</Text><Enum>66</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_tAdditionalMoveTimeAtLimits</Text><Enum>67</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fThreshold</Text><Enum>68</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_MEMCPY</Text><Enum>69</Enum><Comment><![CDATA[ MEMCPY failed ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_MEMSET</Text><Enum>70</Enum><Comment><![CDATA[ MEMSET failed ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nNumberOfColumns</Text><Enum>71</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_FileClose</Text><Enum>72</Enum><Comment><![CDATA[ File Close  failed ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_FileOpen</Text><Enum>73</Enum><Comment><![CDATA[ File Open failed ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_FileWrite</Text><Enum>74</Enum><Comment><![CDATA[ File Write failed ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fVeloNeg</Text><Enum>75</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fVeloPos</Text><Enum>76</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_DeadBandInput</Text><Enum>77</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_DeadBandOutput</Text><Enum>78</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_CycleDuration</Text><Enum>79</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_tStart</Text><Enum>80</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_StepHeigthTuningToLow</Text><Enum>81</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fMinLimitIsLessThanZero</Text><Enum>82</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fMaxLimitIsGreaterThan100</Text><Enum>83</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fStepSize</Text><Enum>84</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fOkRangeIsLessOrEqualZero</Text><Enum>85</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fForceRangeIsLessOrEqualfOkRange</Text><Enum>86</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPWMPeriod</Text><Enum>87</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_tMinimumPulseTime</Text><Enum>88</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_FileDelete</Text><Enum>89</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nNumberOfPwmOutputs</Text><Enum>90</Enum><Comment><![CDATA[ File Delete failed ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nPwmInputArray_SIZEOF</Text><Enum>91</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nPwmOutputArray_SIZEOF</Text><Enum>92</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nPwmWaitTimesConfig_SIZEOF</Text><Enum>93</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nPwmInternalData_SIZEOF</Text><Enum>94</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_SIZEOF</Text><Enum>95</Enum><Comment><![CDATA[ SiZEOF failed ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nOrderOfTheTransferfunction</Text><Enum>96</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nNumeratorArray_SIZEOF</Text><Enum>97</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nDenominatorArray_SIZEOF</Text><Enum>98</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_a_n_IsZero</Text><Enum>99</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_WorkArraySIZEOF</Text><Enum>100</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_MOVINGRANGE_MIN_MAX</Text><Enum>101</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_MOVINGTIME</Text><Enum>102</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_DEADTIME</Text><Enum>103</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fMinLimitIsGreaterThanfMaxLimit</Text><Enum>104</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_DataTableSIZEOF</Text><Enum>105</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_OutputVectorDescription</Text><Enum>106</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_TaskCycleTimeIsLessThanOneMillisecond</Text><Enum>107</Enum><Comment><![CDATA[  ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nMinMovingPulses</Text><Enum>108</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fAcceleration</Text><Enum>109</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fDeceleration</Text><Enum>110</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_StartAndTargetPos</Text><Enum>111</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fVelocity</Text><Enum>112</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fTargetPos</Text><Enum>113</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fStartPos</Text><Enum>114</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fMovingLength</Text><Enum>115</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_NT_GetTime</Text><Enum>116</Enum><Comment><![CDATA[ internal error NT_GetTime ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_No3PhaseSolutionPossible</Text><Enum>117</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fStartVelo</Text><Enum>118</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fTargetVelo</Text><Enum>119</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALID_NEW_PARAMETER_TYPE</Text><Enum>120</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fBaseTime</Text><Enum>121</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nOrderOfTheTransferfunction_SIZEOF</Text><Enum>122</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nFilterOrder</Text><Enum>124</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nCoefficientsArray_a_SIZEOF</Text><Enum>125</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nCoefficientsArray_b_SIZEOF</Text><Enum>126</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nDigitalFiterData_SIZEOF</Text><Enum>127</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nLogBuffer_SIZEOF</Text><Enum>128</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_LogBufferOverflow</Text><Enum>129</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nLogBuffer_ADR</Text><Enum>130</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nCoefficientsArray_a_ADR</Text><Enum>131</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nCoefficientsArray_b_ADR</Text><Enum>132</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nPwmInputArray_ADR</Text><Enum>133</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nPwmOutputArray_ADR</Text><Enum>134</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nPwmWaitTimesConfig_ADR</Text><Enum>135</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nPwmInternalData_ADR</Text><Enum>136</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nDigitalFiterData_ADR</Text><Enum>137</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nNumeratorArray_ADR</Text><Enum>138</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nDenominatorArray_ADR</Text><Enum>139</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nTransferfunction1Data_ADR</Text><Enum>140</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nTransferfunction2Data_ADR</Text><Enum>141</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_FileSeek</Text><Enum>142</Enum><Comment><![CDATA[ internal error FB_FileSeek ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_AmbientTempMaxIsLessThanAmbientTempMin</Text><Enum>143</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_ForerunTempMaxIsLessThanForerunTempMin</Text><Enum>144</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDLOGCYCLETIME</Text><Enum>145</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDVERSION_TcControllerToolbox</Text><Enum>146</Enum></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_Bandwidth</Text><Enum>147</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_NotchFrequency</Text><Enum>148</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_DampingCoefficient</Text><Enum>149</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_fKpIsLessThanZero</Text><Enum>150</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo><EnumInfo><Text>eCTRL_ERROR_INVALIDPARAM_nSamplesToFilter</Text><Enum>151</Enum><Comment><![CDATA[ invalid parameter ]]></Comment></EnumInfo></DataType><DataType><Name Namespace="Tc2_ControllerToolbox">ST_CTRL_PID_PARAMS</Name><BitSize>448</BitSize><SubItem><Name>tCtrlCycleTime</Name><Type>TIME</Type><Comment><![CDATA[ controller cycle time [TIME]			]]></Comment><BitSize>32</BitSize><BitOffs>0</BitOffs><Default><DateTime>0</DateTime></Default></SubItem><SubItem><Name>tTaskCycleTime</Name><Type>TIME</Type><Comment><![CDATA[ task cycle time [TIME]				]]></Comment><BitSize>32</BitSize><BitOffs>32</BitOffs><Default><DateTime>0</DateTime></Default></SubItem><SubItem><Name>fKp</Name><Type>LREAL</Type><Comment><![CDATA[ proportional gain					]]></Comment><BitSize>64</BitSize><BitOffs>64</BitOffs><Default><Value>0</Value></Default></SubItem><SubItem><Name>tTn</Name><Type>TIME</Type><Comment><![CDATA[ Tn									]]></Comment><BitSize>32</BitSize><BitOffs>128</BitOffs><Default><DateTime>0</DateTime></Default></SubItem><SubItem><Name>tTv</Name><Type>TIME</Type><Comment><![CDATA[ Tv									]]></Comment><BitSize>32</BitSize><BitOffs>160</BitOffs><Default><DateTime>0</DateTime></Default></SubItem><SubItem><Name>tTd</Name><Type>TIME</Type><Comment><![CDATA[ Td									]]></Comment><BitSize>32</BitSize><BitOffs>192</BitOffs><Default><DateTime>0</DateTime></Default></SubItem><SubItem><Name>fOutMaxLimit</Name><Type>LREAL</Type><Comment><![CDATA[ maximum output limit				]]></Comment><BitSize>64</BitSize><BitOffs>256</BitOffs><Default><Value>1E+38</Value></Default></SubItem><SubItem><Name>fOutMinLimit</Name><Type>LREAL</Type><Comment><![CDATA[ minimum output limit				]]></Comment><BitSize>64</BitSize><BitOffs>320</BitOffs><Default><Value>-1E+38</Value></Default></SubItem><SubItem><Name>bPInTheFeedbackPath</Name><Type>BOOL</Type><Comment><![CDATA[ configuration of the signal flow for the P-part ]]></Comment><BitSize>8</BitSize><BitOffs>384</BitOffs><Default><Bool>false</Bool></Default></SubItem><SubItem><Name>bDInTheFeedbackPath</Name><Type>BOOL</Type><Comment><![CDATA[ configuration of the signal flow for the D-part ]]></Comment><BitSize>8</BitSize><BitOffs>392</BitOffs><Default><Bool>false</Bool></Default></SubItem><SubItem><Name>bARWOnIPartOnly</Name><Type>BOOL</Type><Comment><![CDATA[ FALSE: 	Hold the I-part if the entire control output reaches a limit. ]]></Comment><BitSize>8</BitSize><BitOffs>400</BitOffs><Default><Bool>false</Bool></Default></SubItem></DataType><DataType><Name Namespace="Tc2_ControllerToolbox">FB_License</Name><BitSize>64</BitSize><Properties><Property><Name>PouType</Name><Value>FunctionBlock</Value></Property><Property><Name>hide</Name></Property></Properties></DataType><DataType><Name Namespace="Tc2_ControllerToolbox">FB_CTRL_PID</Name><BitSize>2944</BitSize><SubItem><Name>fSetpointValue</Name><Type>LREAL</Type><Comment><![CDATA[ controller input ]]></Comment><BitSize>64</BitSize><BitOffs>64</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>fActualValue</Name><Type>LREAL</Type><Comment><![CDATA[ actual value of the controlled variable ]]></Comment><BitSize>64</BitSize><BitOffs>128</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>fManSyncValue</Name><Type>LREAL</Type><Comment><![CDATA[ manual value to synchronize controller output ]]></Comment><BitSize>64</BitSize><BitOffs>192</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>bSync</Name><Type>BOOL</Type><Comment><![CDATA[ rising edge sets controller output manual sync value ]]></Comment><BitSize>8</BitSize><BitOffs>256</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>eMode</Name><Type Namespace="Tc2_ControllerToolbox">E_CTRL_MODE</Type><Comment><![CDATA[ operating mode ]]></Comment><BitSize>16</BitSize><BitOffs>272</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>bHold</Name><Type>BOOL</Type><Comment><![CDATA[ TRUE will hold the controller output at current value ]]></Comment><BitSize>8</BitSize><BitOffs>288</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>fOut</Name><Type>LREAL</Type><Comment><![CDATA[ controller output ]]></Comment><BitSize>64</BitSize><BitOffs>320</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>bARWactive</Name><Type>BOOL</Type><Comment><![CDATA[ TRUE indicates that the controller output is restricted ]]></Comment><BitSize>8</BitSize><BitOffs>384</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>eState</Name><Type Namespace="Tc2_ControllerToolbox">E_CTRL_STATE</Type><Comment><![CDATA[ current state of the function block ]]></Comment><BitSize>16</BitSize><BitOffs>400</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>eErrorId</Name><Type Namespace="Tc2_ControllerToolbox">E_CTRL_ERRORCODES</Type><Comment><![CDATA[ error code ]]></Comment><BitSize>16</BitSize><BitOffs>416</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>bError</Name><Type>BOOL</Type><Comment><![CDATA[ TRUE, if error occurs ]]></Comment><BitSize>8</BitSize><BitOffs>432</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>stParams</Name><Type Namespace="Tc2_ControllerToolbox" ReferenceTo="true">ST_CTRL_PID_PARAMS</Type><Comment><![CDATA[ parameter structure ]]></Comment><BitSize>64</BitSize><BitOffs>448</BitOffs><Properties><Property><Name>ItemType</Name><Value>InOut</Value></Property></Properties></SubItem><SubItem><Name>stInternalParams</Name><Type Namespace="Tc2_ControllerToolbox">ST_CTRL_PID_PARAMS</Type><BitSize>448</BitSize><BitOffs>512</BitOffs></SubItem><SubItem><Name>stInternalCycleTimeInterpretation</Name><Type Namespace="Tc2_ControllerToolbox">ST_CTRL_CYCLE_TIME_INTERPRETATION</Type><BitSize>128</BitSize><BitOffs>960</BitOffs></SubItem><SubItem><Name>bFirstInit</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>1088</BitOffs><Default><Bool>true</Bool></Default></SubItem><SubItem><Name>bFirstCallAfterAStateChange</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>1096</BitOffs><Default><Bool>false</Bool></Default></SubItem><SubItem><Name>fD_I</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>1152</BitOffs></SubItem><SubItem><Name>fC_D</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>1216</BitOffs></SubItem><SubItem><Name>fD_D</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>1280</BitOffs></SubItem><SubItem><Name>fTaskCycleTime</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>1344</BitOffs></SubItem><SubItem><Name>fCtrlCycleTime</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>1408</BitOffs></SubItem><SubItem><Name>fHalfCtrlCycleTime</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>1472</BitOffs></SubItem><SubItem><Name>fTn</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>1536</BitOffs></SubItem><SubItem><Name>fTv</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>1600</BitOffs></SubItem><SubItem><Name>fTd</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>1664</BitOffs></SubItem><SubItem><Name>bIPartEnabled</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>1728</BitOffs></SubItem><SubItem><Name>bDPartEnabled</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>1736</BitOffs></SubItem><SubItem><Name>fSyncValueInternal</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>1792</BitOffs></SubItem><SubItem><Name>fLimitValue</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>1856</BitOffs></SubItem><SubItem><Name>fE</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>1920</BitOffs><Default><Value>0</Value></Default></SubItem><SubItem><Name>fE_1</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>1984</BitOffs><Default><Value>0</Value></Default></SubItem><SubItem><Name>fY_P</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>2048</BitOffs><Default><Value>0</Value></Default></SubItem><SubItem><Name>fY_I</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>2112</BitOffs><Default><Value>0</Value></Default></SubItem><SubItem><Name>fY_I_1</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>2176</BitOffs><Default><Value>0</Value></Default></SubItem><SubItem><Name>fY_D</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>2240</BitOffs><Default><Value>0</Value></Default></SubItem><SubItem><Name>fY_D_1</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>2304</BitOffs><Default><Value>0</Value></Default></SubItem><SubItem><Name>fY</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>2368</BitOffs><Default><Value>0</Value></Default></SubItem><SubItem><Name>fY_1</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>2432</BitOffs><Default><Value>0</Value></Default></SubItem><SubItem><Name>fActVal</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>2496</BitOffs><Default><Value>0</Value></Default></SubItem><SubItem><Name>fActVal_1</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>2560</BitOffs><Default><Value>0</Value></Default></SubItem><SubItem><Name>nCtrlCycleTicks</Name><Type>UDINT</Type><BitSize>32</BitSize><BitOffs>2624</BitOffs></SubItem><SubItem><Name>nActCtrlCycleTick</Name><Type>UDINT</Type><BitSize>32</BitSize><BitOffs>2656</BitOffs></SubItem><SubItem><Name>eMode_old</Name><Type Namespace="Tc2_ControllerToolbox">E_CTRL_MODE</Type><BitSize>16</BitSize><BitOffs>2688</BitOffs></SubItem><SubItem><Name>bMaxLimitReached</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>2704</BitOffs></SubItem><SubItem><Name>bMinLimitReached</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>2712</BitOffs></SubItem><SubItem><Name>bSyncRequest</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>2720</BitOffs></SubItem><SubItem><Name>fbR_TRIG</Name><Type Namespace="Tc2_Standard">R_TRIG</Type><BitSize>128</BitSize><BitOffs>2752</BitOffs></SubItem><SubItem><Name>fbLicense</Name><Type Namespace="Tc2_ControllerToolbox">FB_License</Type><BitSize>64</BitSize><BitOffs>2880</BitOffs></SubItem><Action><Name>M_Error</Name></Action><Action><Name>M_Reset</Name></Action><Action><Name>M_Manual</Name></Action><Action><Name>M_Active</Name></Action><Action><Name>M_StateChange</Name></Action><Action><Name>M_Passive</Name></Action><Action><Name>M_Init</Name></Action><Properties><Property><Name>PouType</Name><Value>FunctionBlock</Value></Property></Properties></DataType><DataType><Name>PID_AutoTune</Name><BitSize>896</BitSize><SubItem><Name>PV</Name><Type>REAL</Type><Comment><![CDATA[ 过程变量（Process Value），即当前温度]]></Comment><BitSize>32</BitSize><BitOffs>64</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>AutoTuneActive</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>96</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>StepResponseAmplitude</Name><Type>REAL</Type><Comment><![CDATA[ 阶跃响应的输出幅度]]></Comment><BitSize>32</BitSize><BitOffs>128</BitOffs><Default><Value>20</Value></Default><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>Output</Name><Type>REAL</Type><Comment><![CDATA[ 控制器输出]]></Comment><BitSize>32</BitSize><BitOffs>160</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>Kp</Name><Type>REAL</Type><Comment><![CDATA[ 比例增益]]></Comment><BitSize>32</BitSize><BitOffs>192</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>Ki</Name><Type>REAL</Type><Comment><![CDATA[ 积分增益]]></Comment><BitSize>32</BitSize><BitOffs>224</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>Kd</Name><Type>REAL</Type><Comment><![CDATA[ 微分增益]]></Comment><BitSize>32</BitSize><BitOffs>256</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>Done</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>288</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>StepResponseStartTime</Name><Type>REAL</Type><Comment><![CDATA[ 阶跃响应开始时间（以秒为单位）]]></Comment><BitSize>32</BitSize><BitOffs>320</BitOffs><Default><Value>0</Value></Default></SubItem><SubItem><Name>StepResponsePVStart</Name><Type>REAL</Type><Comment><![CDATA[ 阶跃响应开始时的PV值]]></Comment><BitSize>32</BitSize><BitOffs>352</BitOffs></SubItem><SubItem><Name>StepResponsePVEnd</Name><Type>REAL</Type><Comment><![CDATA[ 阶跃响应结束时的PV值]]></Comment><BitSize>32</BitSize><BitOffs>384</BitOffs></SubItem><SubItem><Name>StepResponseTime</Name><Type>REAL</Type><Comment><![CDATA[ 阶跃响应时间（以秒为单位）]]></Comment><BitSize>32</BitSize><BitOffs>416</BitOffs></SubItem><SubItem><Name>Ku</Name><Type>REAL</Type><Comment><![CDATA[ 临界增益]]></Comment><BitSize>32</BitSize><BitOffs>448</BitOffs></SubItem><SubItem><Name>Tu</Name><Type>REAL</Type><Comment><![CDATA[ 临界周期（以秒为单位）]]></Comment><BitSize>32</BitSize><BitOffs>480</BitOffs></SubItem><SubItem><Name>CurrentTime</Name><Type>REAL</Type><Comment><![CDATA[ 当前时间（以秒为单位）]]></Comment><BitSize>32</BitSize><BitOffs>512</BitOffs></SubItem><SubItem><Name>NT_Time</Name><Type>TIME</Type><BitSize>32</BitSize><BitOffs>544</BitOffs></SubItem><SubItem><Name>D_Dec</Name><Type Namespace="Tc2_Standard">TON</Type><BitSize>256</BitSize><BitOffs>576</BitOffs></SubItem><SubItem><Name>monitor</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>832</BitOffs></SubItem><Properties><Property><Name>PouType</Name><Value>FunctionBlock</Value></Property></Properties></DataType><DataType><Name>Temp_controller</Name><BitSize>7360</BitSize><SubItem><Name>ENABLE</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>64</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>AUTO_TUNE</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>72</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>AUTO_TUNE_OUTPUT</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>96</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>TEMP_SV</Name><Type>REAL</Type><Comment><![CDATA[FILTER_ENABLE:BOOL;		]]></Comment><BitSize>32</BitSize><BitOffs>128</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>TEMP_ACTUAL</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>160</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>TEMP_RATE</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>192</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>PID_P</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>224</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>PID_I</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>256</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>PID_D</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>288</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>PID_Dp</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>320</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>PID_Feedforward</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>352</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>PID_Output_Limit</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>384</BitOffs><Properties><Property><Name>ItemType</Name><Value>Input</Value></Property></Properties></SubItem><SubItem><Name>PID_AUTO_TUNE_P</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>416</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>PID_AUTO_TUNE_I</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>448</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>PID_AUTO_TUNE_D</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>480</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>PID_AUTO_TUNE_DONE</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>512</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>SCR_OUT</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>544</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>SSR_ON</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>576</BitOffs><Properties><Property><Name>ItemType</Name><Value>Output</Value></Property></Properties></SubItem><SubItem><Name>SAMPLING_TIME</Name><Type>TIME</Type><Comment><![CDATA[采样时间]]></Comment><BitSize>32</BitSize><BitOffs>608</BitOffs><Default><DateTime>T#1S</DateTime></Default></SubItem><SubItem><Name>PID_NM</Name><Type Namespace="Tc2_ControllerToolbox">FB_CTRL_PID</Type><BitSize>2944</BitSize><BitOffs>640</BitOffs></SubItem><SubItem><Name>PID_PARAMS</Name><Type Namespace="Tc2_ControllerToolbox">ST_CTRL_PID_PARAMS</Type><BitSize>448</BitSize><BitOffs>3584</BitOffs></SubItem><SubItem><Name>PID_MODE</Name><Type Namespace="Tc2_ControllerToolbox">E_CTRL_MODE</Type><BitSize>16</BitSize><BitOffs>4032</BitOffs></SubItem><SubItem><Name>PID_OUTPUT</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>4096</BitOffs></SubItem><SubItem><Name>PID_FUC_STATE</Name><Type Namespace="Tc2_ControllerToolbox">E_CTRL_STATE</Type><BitSize>16</BitSize><BitOffs>4160</BitOffs></SubItem><SubItem><Name>PID_ERRID</Name><Type Namespace="Tc2_ControllerToolbox">E_CTRL_ERRORCODES</Type><BitSize>16</BitSize><BitOffs>4176</BitOffs></SubItem><SubItem><Name>PID_ERR</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>4192</BitOffs></SubItem><SubItem><Name>PID_TASKTIME</Name><Type>TIME</Type><BitSize>32</BitSize><BitOffs>4224</BitOffs><Default><DateTime>T#800MS</DateTime></Default></SubItem><SubItem><Name>PID_CYCLETIME</Name><Type>TIME</Type><BitSize>32</BitSize><BitOffs>4256</BitOffs><Default><DateTime>T#800MS</DateTime></Default></SubItem><SubItem><Name>SSR_ON_PERCENT</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>4288</BitOffs></SubItem><SubItem><Name>TEMP_DATA_ARR</Name><Type>REAL</Type><ArrayInfo><LBound>1</LBound><Elements>10</Elements></ArrayInfo><Comment><![CDATA[FIFO]]></Comment><BitSize>320</BitSize><BitOffs>4320</BitOffs></SubItem><SubItem><Name>FIRST_RUN</Name><Type Namespace="Tc2_Standard">R_TRIG</Type><BitSize>128</BitSize><BitOffs>4672</BitOffs></SubItem><SubItem><Name>SAMPLING_TON1</Name><Type Namespace="Tc2_Standard">TON</Type><BitSize>256</BitSize><BitOffs>4800</BitOffs></SubItem><SubItem><Name>SAMPLING_TON2</Name><Type Namespace="Tc2_Standard">TON</Type><BitSize>256</BitSize><BitOffs>5056</BitOffs></SubItem><SubItem><Name>SAMPLING_TON1_EN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>5312</BitOffs></SubItem><SubItem><Name>SAMPLING_TON2_EN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>5320</BitOffs></SubItem><SubItem><Name>TEMP_AVERAGE</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>5344</BitOffs></SubItem><SubItem><Name>i</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>5376</BitOffs></SubItem><SubItem><Name>SSR_ON_TIME</Name><Type>TIME</Type><BitSize>32</BitSize><BitOffs>5408</BitOffs></SubItem><SubItem><Name>SSR_RESET_TIME</Name><Type>TIME</Type><BitSize>32</BitSize><BitOffs>5440</BitOffs></SubItem><SubItem><Name>SSR_ON_TON</Name><Type Namespace="Tc2_Standard">TON</Type><BitSize>256</BitSize><BitOffs>5504</BitOffs></SubItem><SubItem><Name>SSR_RESET_TON</Name><Type Namespace="Tc2_Standard">TON</Type><BitSize>256</BitSize><BitOffs>5760</BitOffs></SubItem><SubItem><Name>SSR_ON_ENABLE</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>6016</BitOffs></SubItem><SubItem><Name>SSR_RESET_ENABLE</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>6024</BitOffs></SubItem><SubItem><Name>PID_AUTO_TUNE</Name><Type>PID_AutoTune</Type><BitSize>896</BitSize><BitOffs>6080</BitOffs></SubItem><SubItem><Name>TON_FOR_RATE</Name><Type Namespace="Tc2_Standard">TON</Type><BitSize>256</BitSize><BitOffs>6976</BitOffs></SubItem><SubItem><Name>CACHE_TEMP_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>7232</BitOffs></SubItem><SubItem><Name>TEMP_SV_TO_PID</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>7264</BitOffs></SubItem><SubItem><Name>EACH_STEP_TEMP</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>7296</BitOffs></SubItem><Properties><Property><Name>PouType</Name><Value>FunctionBlock</Value></Property></Properties></DataType><DataType><Name>CHAMBER_IN</Name><BitSize>832</BitSize><SubItem><Name>C02</Name><Type>BOOL</Type><ArrayInfo><LBound>1</LBound><Elements>16</Elements></ArrayInfo><Comment><![CDATA[C02 	EL1889 16DI]]></Comment><BitSize>128</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>C03</Name><Type>BOOL</Type><ArrayInfo><LBound>1</LBound><Elements>16</Elements></ArrayInfo><Comment><![CDATA[C03	EL1889 16DI]]></Comment><BitSize>128</BitSize><BitOffs>128</BitOffs></SubItem><SubItem><Name>C04</Name><Type>INT</Type><ArrayInfo><LBound>1</LBound><Elements>8</Elements></ArrayInfo><Comment><![CDATA[C04	EL3318	8TC]]></Comment><BitSize>128</BitSize><BitOffs>256</BitOffs></SubItem><SubItem><Name>C05</Name><Type>INT</Type><ArrayInfo><LBound>1</LBound><Elements>8</Elements></ArrayInfo><Comment><![CDATA[C05	EL3318	8TC]]></Comment><BitSize>128</BitSize><BitOffs>384</BitOffs></SubItem><SubItem><Name>C06</Name><Type>INT</Type><ArrayInfo><LBound>1</LBound><Elements>4</Elements></ArrayInfo><Comment><![CDATA[C06	EL3164	4AI	0-10V]]></Comment><BitSize>64</BitSize><BitOffs>512</BitOffs></SubItem><SubItem><Name>C11</Name><Type>BOOL</Type><ArrayInfo><LBound>1</LBound><Elements>8</Elements></ArrayInfo><Comment><![CDATA[C10 	EL9410	POWER MODULE
C11	EL1918	SPLC+8SDI]]></Comment><BitSize>64</BitSize><BitOffs>576</BitOffs></SubItem><SubItem><Name>C12</Name><Type>BOOL</Type><ArrayInfo><LBound>1</LBound><Elements>4</Elements></ArrayInfo><Comment><![CDATA[C12	EL1904	4SDI]]></Comment><BitSize>32</BitSize><BitOffs>640</BitOffs></SubItem><SubItem><Name>C13</Name><Type>BOOL</Type><ArrayInfo><LBound>1</LBound><Elements>4</Elements></ArrayInfo><Comment><![CDATA[C13	EL1904	4SDI]]></Comment><BitSize>32</BitSize><BitOffs>672</BitOffs></SubItem><SubItem><Name>C15</Name><Type>INT</Type><ArrayInfo><LBound>1</LBound><Elements>8</Elements></ArrayInfo><Comment><![CDATA[C15	EL3318	8TC]]></Comment><BitSize>128</BitSize><BitOffs>704</BitOffs></SubItem></DataType><DataType><Name>IGS_IN</Name><BitSize>704</BitSize><SubItem><Name>C32</Name><Type>INT</Type><ArrayInfo><LBound>1</LBound><Elements>4</Elements></ArrayInfo><Comment><![CDATA[C32	EL3164	4AI	0-10V]]></Comment><BitSize>64</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>C33</Name><Type>INT</Type><ArrayInfo><LBound>1</LBound><Elements>4</Elements></ArrayInfo><Comment><![CDATA[C33	EL3164	4AI	0-10V]]></Comment><BitSize>64</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>C34</Name><Type>INT</Type><ArrayInfo><LBound>1</LBound><Elements>4</Elements></ArrayInfo><Comment><![CDATA[C34	EL3164	4AI	0-10V]]></Comment><BitSize>64</BitSize><BitOffs>128</BitOffs></SubItem><SubItem><Name>C35</Name><Type>INT</Type><ArrayInfo><LBound>1</LBound><Elements>4</Elements></ArrayInfo><Comment><![CDATA[C35	EL3154	4AI	4-20mA]]></Comment><BitSize>64</BitSize><BitOffs>192</BitOffs></SubItem><SubItem><Name>C36</Name><Type>BOOL</Type><ArrayInfo><LBound>1</LBound><Elements>16</Elements></ArrayInfo><Comment><![CDATA[C36	EL1889 16DI]]></Comment><BitSize>128</BitSize><BitOffs>256</BitOffs></SubItem><SubItem><Name>C37</Name><Type>BOOL</Type><ArrayInfo><LBound>1</LBound><Elements>16</Elements></ArrayInfo><Comment><![CDATA[C37	EL1889 16DI]]></Comment><BitSize>128</BitSize><BitOffs>384</BitOffs></SubItem><SubItem><Name>C38</Name><Type>BOOL</Type><ArrayInfo><LBound>1</LBound><Elements>4</Elements></ArrayInfo><Comment><![CDATA[C38	EL1904	4SDI]]></Comment><BitSize>32</BitSize><BitOffs>512</BitOffs></SubItem><SubItem><Name>C39</Name><Type>BOOL</Type><ArrayInfo><LBound>1</LBound><Elements>4</Elements></ArrayInfo><Comment><![CDATA[C39	EL1904	4SDI]]></Comment><BitSize>32</BitSize><BitOffs>544</BitOffs></SubItem><SubItem><Name>C40</Name><Type>INT</Type><ArrayInfo><LBound>1</LBound><Elements>8</Elements></ArrayInfo><Comment><![CDATA[C40	EL3318	8TC]]></Comment><BitSize>128</BitSize><BitOffs>576</BitOffs></SubItem></DataType><DataType><Name>STR_FCSP700_INPUT</Name><BitSize>224</BitSize><SubItem><Name>Active_Exception_Status</Name><Type>USINT</Type><BitSize>8</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>Flow_Reading</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>32</BitOffs></SubItem><SubItem><Name>Pressure_Reading</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>Temperature_Reading</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>96</BitOffs></SubItem><SubItem><Name>Position_Readback</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>128</BitOffs></SubItem><SubItem><Name>Position_Setpoint</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>160</BitOffs></SubItem><SubItem><Name>WcState</Name><Type>BIT</Type><BitSize>1</BitSize><BitOffs>192</BitOffs></SubItem><SubItem><Name>InputToggle</Name><Type>BIT</Type><BitSize>1</BitSize><BitOffs>193</BitOffs></SubItem><SubItem><Name>State</Name><Type>UINT</Type><BitSize>16</BitSize><BitOffs>208</BitOffs></SubItem></DataType><DataType><Name>VAT_IN</Name><BitSize>224</BitSize><SubItem><Name>Actual_Pressure</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>Pressure_Sensor_1</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>32</BitOffs></SubItem><SubItem><Name>Pressure_Sensor_2</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>Actual_Position</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>96</BitOffs></SubItem><SubItem><Name>Control_Mode</Name><Type>SINT</Type><Comment><![CDATA[
											CONTROL MODE:	
											1=HOMING
											2=POSITION
											3=CLOSE
											4=OPEN
											5=PRESSURE
											6=HOLD:KEEP IN CURRENT POSITION
											7=LEARN:INTERNAL LEARN PROCEDURE
											]]></Comment><BitSize>8</BitSize><BitOffs>128</BitOffs></SubItem><SubItem><Name>Error_Number</Name><Type>UINT</Type><BitSize>16</BitSize><BitOffs>144</BitOffs></SubItem><SubItem><Name>General_Status</Name><Type>UINT</Type><Comment><![CDATA[
											BIT 0	FIELDBUS DATA VALID 
													0 = Valve is not in the EtherCAT state OPERATIONAL or the process data output 
													watchdog 
													(SyncManager2) is disabled 
													1 = Valve is in the EtherCAT state OPERATIONAL and the process data output 
													watchdog 
													(SyncManager2) is enabled 
											BIT 1 ZERO ADJUST EXECUTED 
													ZERO ADJUST successful executed, active for 2 seconds 
											BIT 2 PING PONG RX-BIT 
													PING PONG RX BIT, is inverted and transmitted back to the fieldbus master (PLC) 
											BIT 3 PRESSURE SIMULATION 
													0 = off 
													1 = on 
											BIT 4 TARGET PRESSURE REACHED 
													0 = The actual pressure is not within 2% of the pressure setpoint 
													1 = The actual pressure is within 2% of the pressure setpoint 
											BIT 5-6 NOT USED (reserved) - 
											BIT 7-8 ACCESS MODE 
											bit 8	bit 7
												0 		0 	= LOCAL 
												0 		1 	= REMOTE 
												1 		0 	= LOCKED 
											BIT 9 WARNINGS ACTIVE 
													0 = No WARNINGS 
													1 = At least one WARNING of the warning bitmaps is active (GENERAL 
														WARNING bitmap and EXTENDED WARNING bitmap) 
											BIT 10 SEALING STATE 
													Only valid if a sealing functionality is available.
													0 = valve is not sealed 
													1 = valve is sealed 
											BIT 11 INTERLOCK ACTIVE 
													Is set if an interlock input is active 
											BIT 12-15 NOT USED (reserved) -
											]]></Comment><BitSize>16</BitSize><BitOffs>160</BitOffs></SubItem><SubItem><Name>General_Warnings</Name><Type>UINT</Type><Comment><![CDATA[
											BIT 0 NOT USED (reserved) - 
											BIT 1 LEARN DATA SET 
													Learn data not present. Learn required for adaptive pressure control. 
													Just active if adaptive pressure control algorithm is choosen. 
											BIT 2 NOT USED (reserved) - 
											BIT 3 POWER FAILURE BATTERY 
													Not ready, voltage too low. 
													Just active if power failure is available. 
											4-15 NOT USED (reserved) -
											]]></Comment><BitSize>16</BitSize><BitOffs>176</BitOffs></SubItem><SubItem><Name>Extended_Warnings</Name><Type>UINT</Type><Comment><![CDATA[
											BIT 0 REMOTE CONTROL NOT POSSIBLE 
													Remote control not possible, access mode local is active, change to acces mode 
													remote or access mode locked 
											BIT 1 ACTUAL CONTROL MODE SETPOINT NOT ALLOWED 
													Not possible to switch the actual control mode to CONTROL MODE SETPOINT 
													• Control mode is interlock or fatal error 
													• CONTROL MODE SETPOINT is 5 (pressure) or 7 (learn) and no sensor 
													  is selected (sensor mode configuration) 
											BIT 2 ZERO DISABLED 
													Using zero function not possible 
											BIT 3 PFO DEACTIVATED 
													Power Failure Option is deactivated 
											BIT 4 NOT USED (reserved) - 
											BIT 5 OUT OF RANGE: PRESSURE SETPOINT 
													Value of PRESSURE SETPOINT is out of range 
											BIT 6 OUT OF RANGE: POSITION SETPOINT 
													Value of POSITION SETPOINT is out of range 
											BIT 7-9 NOT USED (reserved) - 
											BIT 10 OUT OF RANGE: CONTROL MODE SETPOINT 
													Value of CONTROL MODE SETPOINT is out of range 
											BIT 11 OUT OF RANGE: GENERAL CONTROL SETPOINT 
													Value of GENERAL CONTROL SETPOINT is out of range 
											BIT 12-15 NOT USED (reserved) -
											]]></Comment><BitSize>16</BitSize><BitOffs>192</BitOffs></SubItem></DataType><DataType><Name>TMP_IN</Name><BitSize>112</BitSize><SubItem><Name>Rotation</Name><Type>BIT</Type><Comment><![CDATA[1:ROTATING,0:NOT ROTATING]]></Comment><BitSize>1</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>Normal</Name><Type>BIT</Type><Comment><![CDATA[1:NORMAL,0:UNNORMAL]]></Comment><BitSize>1</BitSize><BitOffs>1</BitOffs></SubItem><SubItem><Name>Acceleration</Name><Type>BIT</Type><BitSize>1</BitSize><BitOffs>2</BitOffs></SubItem><SubItem><Name>Deceleration_Includes_Braking</Name><Type>BIT</Type><BitSize>1</BitSize><BitOffs>3</BitOffs></SubItem><SubItem><Name>Remote_Local</Name><Type>BIT</Type><Comment><![CDATA[1:LOCAL.E-CAT CONTROL DISABLED,0:REMOTE.E-CAT CONTROL ENABLED]]></Comment><BitSize>1</BitSize><BitOffs>4</BitOffs></SubItem><SubItem><Name>Turbo_Low_Speed</Name><Type>BIT</Type><BitSize>1</BitSize><BitOffs>5</BitOffs></SubItem><SubItem><Name>Alarm</Name><Type>BIT</Type><BitSize>1</BitSize><BitOffs>6</BitOffs></SubItem><SubItem><Name>Warning</Name><Type>BIT</Type><BitSize>1</BitSize><BitOffs>7</BitOffs></SubItem><SubItem><Name>Turbo_Speed</Name><Type>INT</Type><Comment><![CDATA[0.1[%],1000(100.0%):RATED SPEED,0(0.0%):NO RATATION]]></Comment><BitSize>16</BitSize><BitOffs>16</BitOffs></SubItem><SubItem><Name>Turbo_Current</Name><Type>INT</Type><Comment><![CDATA[0.1A]]></Comment><BitSize>16</BitSize><BitOffs>32</BitOffs></SubItem><SubItem><Name>Turbo_pump_temperature</Name><Type>INT</Type><Comment><![CDATA[1[℃]]]></Comment><BitSize>16</BitSize><BitOffs>48</BitOffs></SubItem><SubItem><Name>VibrationH</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>VibrationB</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>80</BitOffs></SubItem><SubItem><Name>VibrationZ</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>96</BitOffs></SubItem></DataType><DataType><Name>STR_CDG200D</Name><BitSize>192</BitSize><SubItem><Name>Reading_Valid1</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>Overrange_Exceeded1</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>8</BitOffs></SubItem><SubItem><Name>Underrange_Exceeded1</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>16</BitOffs></SubItem><SubItem><Name>Sensor_Value1</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>32</BitOffs></SubItem><SubItem><Name>Reading_Valid2</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>Overrange_Exceeded2</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>72</BitOffs></SubItem><SubItem><Name>Underrange_Exceeded2</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>80</BitOffs></SubItem><SubItem><Name>Sensor_Value2</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>96</BitOffs></SubItem><SubItem><Name>Active_Exception_Status</Name><Type>USINT</Type><BitSize>8</BitSize><BitOffs>128</BitOffs></SubItem><SubItem><Name>Trip_Point_Output_All_Insta</Name><Type>UDINT</Type><BitSize>32</BitSize><BitOffs>160</BitOffs></SubItem></DataType><DataType><Name>STR_BPG400</Name><BitSize>224</BitSize><SubItem><Name>Combination_Gauge_Reading_Valid_Module_1</Name><Type>BIT</Type><BitSize>1</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>Combination_Gauge_Overrange_Exceeded_Module_1</Name><Type>BIT</Type><BitSize>1</BitSize><BitOffs>1</BitOffs></SubItem><SubItem><Name>Combination_Gauge_Underrange_Exceeded_Module_1</Name><Type>BIT</Type><BitSize>1</BitSize><BitOffs>2</BitOffs></SubItem><SubItem><Name>Combination_Gauge_Active_Value_Module_1</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>32</BitOffs></SubItem><SubItem><Name>Combination_Gauge_Active_Sensor_Number_Module_1</Name><Type>UINT</Type><BitSize>16</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>Combination_Gauge_Reading_Valid_Module_2</Name><Type>BIT</Type><BitSize>1</BitSize><BitOffs>80</BitOffs></SubItem><SubItem><Name>Combination_Gauge_Overrange_Exceeded_Module_2</Name><Type>BIT</Type><BitSize>1</BitSize><BitOffs>81</BitOffs></SubItem><SubItem><Name>Combination_Gauge_Underrange_Exceeded_Module_2</Name><Type>BIT</Type><BitSize>1</BitSize><BitOffs>82</BitOffs></SubItem><SubItem><Name>Combination_Gauge_Active_Value_Module_2</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>96</BitOffs></SubItem><SubItem><Name>Combination_Gauge_Active_Sensor_Number_Module_2</Name><Type>UINT</Type><BitSize>16</BitSize><BitOffs>128</BitOffs></SubItem><SubItem><Name>Active_Exception_Status</Name><Type>USINT</Type><BitSize>8</BitSize><BitOffs>144</BitOffs></SubItem><SubItem><Name>Trip_Point_Output_All_Instance</Name><Type>UDINT</Type><BitSize>32</BitSize><BitOffs>160</BitOffs></SubItem><SubItem><Name>WcState</Name><Type>BIT</Type><BitSize>1</BitSize><BitOffs>192</BitOffs></SubItem><SubItem><Name>InputToggle</Name><Type>BIT</Type><BitSize>1</BitSize><BitOffs>193</BitOffs></SubItem><SubItem><Name>State</Name><Type>UINT</Type><BitSize>16</BitSize><BitOffs>208</BitOffs></SubItem></DataType><DataType><Name>CHILLER_IN</Name><BitSize>288</BitSize><SubItem><Name>Module1_Word</Name><Type>UINT</Type><ArrayInfo><LBound>1</LBound><Elements>2</Elements></ArrayInfo><BitSize>32</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>Module2_Word</Name><Type>UINT</Type><ArrayInfo><LBound>1</LBound><Elements>16</Elements></ArrayInfo><BitSize>256</BitSize><BitOffs>32</BitOffs></SubItem></DataType><DataType><Name>TMP_OUT</Name><BitSize>8</BitSize><SubItem><Name>Turbo_Start_Stop</Name><Type>BIT</Type><Comment><![CDATA[	1:START,0:STOP]]></Comment><BitSize>1</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>Turbo_Reset_Alarm</Name><Type>BIT</Type><Comment><![CDATA[	1:RESET ALARM,0:NO ACTION]]></Comment><BitSize>1</BitSize><BitOffs>1</BitOffs></SubItem><SubItem><Name>Turbo_Low_Speed</Name><Type>BIT</Type><Comment><![CDATA[	1:LOW SPEED MODE ON,0:OFF]]></Comment><BitSize>1</BitSize><BitOffs>2</BitOffs></SubItem></DataType><DataType><Name>CHAMBER_OUT</Name><BitSize>416</BitSize><SubItem><Name>C07</Name><Type>BOOL</Type><ArrayInfo><LBound>1</LBound><Elements>16</Elements></ArrayInfo><Comment><![CDATA[C07	EL2889 16DO]]></Comment><BitSize>128</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>C08</Name><Type>BOOL</Type><ArrayInfo><LBound>1</LBound><Elements>16</Elements></ArrayInfo><Comment><![CDATA[C08	EL2889	16DO]]></Comment><BitSize>128</BitSize><BitOffs>128</BitOffs></SubItem><SubItem><Name>C09</Name><Type>BOOL</Type><ArrayInfo><LBound>1</LBound><Elements>16</Elements></ArrayInfo><Comment><![CDATA[C09	EL2889	16DO]]></Comment><BitSize>128</BitSize><BitOffs>256</BitOffs></SubItem><SubItem><Name>C14</Name><Type>BOOL</Type><ArrayInfo><LBound>1</LBound><Elements>4</Elements></ArrayInfo><Comment><![CDATA[C14	EL2904	4SDO]]></Comment><BitSize>32</BitSize><BitOffs>384</BitOffs></SubItem></DataType><DataType><Name>IGS_OUT</Name><BitSize>160</BitSize><SubItem><Name>C42</Name><Type>BOOL</Type><ArrayInfo><LBound>1</LBound><Elements>16</Elements></ArrayInfo><Comment><![CDATA[C42	EL2889	16DO]]></Comment><BitSize>128</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>C43</Name><Type>BOOL</Type><ArrayInfo><LBound>1</LBound><Elements>4</Elements></ArrayInfo><Comment><![CDATA[C43	EL2904	4SDO]]></Comment><BitSize>32</BitSize><BitOffs>128</BitOffs></SubItem></DataType><DataType><Name>STR_FCSP700_OUTPUT</Name><BitSize>128</BitSize><SubItem><Name>Flow_SP</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>Actuator_Control</Name><Type>USINT</Type><BitSize>8</BitSize><BitOffs>32</BitOffs></SubItem><SubItem><Name>Actuator_Position_SP</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>Ramp_Time</Name><Type>UDINT</Type><BitSize>32</BitSize><BitOffs>96</BitOffs></SubItem></DataType><DataType><Name>STR_EX260_SEC</Name><BitSize>32</BitSize><SubItem><Name>A</Name><Type>USINT</Type><BitSize>8</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>B</Name><Type>USINT</Type><BitSize>8</BitSize><BitOffs>8</BitOffs></SubItem><SubItem><Name>C</Name><Type>USINT</Type><BitSize>8</BitSize><BitOffs>16</BitOffs></SubItem><SubItem><Name>D</Name><Type>USINT</Type><BitSize>8</BitSize><BitOffs>24</BitOffs></SubItem></DataType><DataType><Name>VAT_OUT</Name><BitSize>192</BitSize><SubItem><Name>Target_Pressure</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>Target_Position</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>32</BitOffs></SubItem><SubItem><Name>Pressure_Input_Digital_Sensor_1</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>Pressure_Input_Digital_Sensor_2</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>96</BitOffs></SubItem><SubItem><Name>Control_Mode</Name><Type>SINT</Type><Comment><![CDATA[	0 = init 
															1 = homing 
															2 = position 
															3 = close 
															4 = open 
															5 = pressure 
															6 = hold 
															7 = learn 
															8 = interlock open 
															9 = interlock close 
															12 = power failure 
															13 = safety 
															14 = fatal error
														]]></Comment><BitSize>8</BitSize><BitOffs>128</BitOffs></SubItem><SubItem><Name>General_Control_Setpoint</Name><Type>UINT</Type><BitSize>16</BitSize><BitOffs>144</BitOffs></SubItem><SubItem><Name>Pressure_Ramp_Time</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>160</BitOffs></SubItem></DataType><DataType><Name>CHILLER_OUT</Name><BitSize>288</BitSize><SubItem><Name>Module1_Word</Name><Type>UINT</Type><ArrayInfo><LBound>1</LBound><Elements>2</Elements></ArrayInfo><BitSize>32</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>Module2_Word</Name><Type>UINT</Type><ArrayInfo><LBound>1</LBound><Elements>16</Elements></ArrayInfo><BitSize>256</BitSize><BitOffs>32</BitOffs></SubItem></DataType><DataType><Name>STR_NDI</Name><BitSize>904</BitSize><SubItem><Name>Heartbeat</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>AV101_OPEN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>8</BitOffs></SubItem><SubItem><Name>AV101_CLOSE</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>16</BitOffs></SubItem><SubItem><Name>AV102_OPEN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>24</BitOffs></SubItem><SubItem><Name>AV102_CLOSE</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>32</BitOffs></SubItem><SubItem><Name>AV103_OPEN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>40</BitOffs></SubItem><SubItem><Name>AV103_CLOSE</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>48</BitOffs></SubItem><SubItem><Name>AV104_OPEN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>56</BitOffs></SubItem><SubItem><Name>AV104_CLOSE</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>AV105_OPEN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>72</BitOffs></SubItem><SubItem><Name>AV105_CLOSE</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>80</BitOffs></SubItem><SubItem><Name>AV106_OPEN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>88</BitOffs></SubItem><SubItem><Name>AV106_CLOSE</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>96</BitOffs></SubItem><SubItem><Name>CY1_OPEN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>104</BitOffs></SubItem><SubItem><Name>CY1_CLOSE</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>112</BitOffs></SubItem><SubItem><Name>CY2_OPEN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>120</BitOffs></SubItem><SubItem><Name>CY2_CLOSE</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>128</BitOffs></SubItem><SubItem><Name>GV1_OPEN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>136</BitOffs></SubItem><SubItem><Name>GV1_CLOSE</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>144</BitOffs></SubItem><SubItem><Name>Lid_Closed</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>152</BitOffs></SubItem><SubItem><Name>Water_Leak_Sensor01</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>160</BitOffs></SubItem><SubItem><Name>Water_Leak_Sensor02</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>168</BitOffs></SubItem><SubItem><Name>Water_Leak_Sensor03</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>176</BitOffs></SubItem><SubItem><Name>Water_Leak_Sensor04</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>184</BitOffs></SubItem><SubItem><Name>WAFER_CHECK_SENSOR1</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>192</BitOffs></SubItem><SubItem><Name>WAFER_CHECK_SENSOR2</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>200</BitOffs></SubItem><SubItem><Name>WAFER_CHECK_SENSOR3</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>208</BitOffs></SubItem><SubItem><Name>WAFER_CHECK_SENSOR4</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>216</BitOffs></SubItem><SubItem><Name>PS10_H_ALM</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>224</BitOffs></SubItem><SubItem><Name>PS10_L_ALM</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>232</BitOffs></SubItem><SubItem><Name>PS11_H_ALM</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>240</BitOffs></SubItem><SubItem><Name>PS11_L_ALM</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>248</BitOffs></SubItem><SubItem><Name>PS12_H_ALM</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>256</BitOffs></SubItem><SubItem><Name>PS12_L_ALM</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>264</BitOffs></SubItem><SubItem><Name>LID_heater_OT</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>272</BitOffs></SubItem><SubItem><Name>Chamber_heater_OT</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>280</BitOffs></SubItem><SubItem><Name>Chiller_Controller_ALM</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>288</BitOffs></SubItem><SubItem><Name>PG_PS1_Pressure_Switch_Up_Limit</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>296</BitOffs></SubItem><SubItem><Name>PG_PS1_Pressure_Switch_Down_Limit</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>304</BitOffs></SubItem><SubItem><Name>PG_PS2_Pressure_Switch_Up_Limit</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>312</BitOffs></SubItem><SubItem><Name>PG_PS2_Pressure_Switch_Down_Limit</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>320</BitOffs></SubItem><SubItem><Name>PG_PS3_Pressure_Switch_Up_Limit</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>328</BitOffs></SubItem><SubItem><Name>PG_PS3_Pressure_Switch_Down_Limit</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>336</BitOffs></SubItem><SubItem><Name>PG_PS4_Pressure_Switch_Up_Limit</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>344</BitOffs></SubItem><SubItem><Name>PG_PS4_Pressure_Switch_Down_Limit</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>352</BitOffs></SubItem><SubItem><Name>PG_PS5_Pressure_Switch_Up_Limit</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>360</BitOffs></SubItem><SubItem><Name>PG_PS5_Pressure_Switch_Down_Limit</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>368</BitOffs></SubItem><SubItem><Name>PG_PS6_Pressure_Switch_Up_Limit</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>376</BitOffs></SubItem><SubItem><Name>PG_PS6_Pressure_Switch_Down_Limit</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>384</BitOffs></SubItem><SubItem><Name>PG_PS7_Pressure_Switch_Up_Limit</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>392</BitOffs></SubItem><SubItem><Name>PG_PS7_Pressure_Switch_Down_Limit</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>400</BitOffs></SubItem><SubItem><Name>PG_PS8_Pressure_Switch_Up_Limit</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>408</BitOffs></SubItem><SubItem><Name>PG_PS8_Pressure_Switch_Down_Limit</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>416</BitOffs></SubItem><SubItem><Name>PG_PS9_Pressure_Switch_Up_Limit</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>424</BitOffs></SubItem><SubItem><Name>PG_PS9_Pressure_Switch_Down_Limit</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>432</BitOffs></SubItem><SubItem><Name>MS1_Pressure_Switch_Up_Limit</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>440</BitOffs></SubItem><SubItem><Name>MS1_Pressure_Switch_Down_Limit</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>448</BitOffs></SubItem><SubItem><Name>PS1_Pressure_Switch</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>456</BitOffs></SubItem><SubItem><Name>PS2_Pressure_Switch</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>464</BitOffs></SubItem><SubItem><Name>HT001_OT</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>472</BitOffs></SubItem><SubItem><Name>HT002_OT</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>480</BitOffs></SubItem><SubItem><Name>HT003_OT</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>488</BitOffs></SubItem><SubItem><Name>HT004_OT</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>496</BitOffs></SubItem><SubItem><Name>HT005_OT</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>504</BitOffs></SubItem><SubItem><Name>HT006_OT</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>512</BitOffs></SubItem><SubItem><Name>Turbo_Pump_Heater_OT</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>520</BitOffs></SubItem><SubItem><Name>Pendulum_Valve_Heater_OT</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>528</BitOffs></SubItem><SubItem><Name>IGS_Heater_OT</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>536</BitOffs></SubItem><SubItem><Name>Tape_Heater_OT</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>544</BitOffs></SubItem><SubItem><Name>Foreline_Heater_OT</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>552</BitOffs></SubItem><SubItem><Name>Gate_Valve_OT</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>560</BitOffs></SubItem><SubItem><Name>Stage_Heater_OT</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>568</BitOffs></SubItem><SubItem><Name>CDA_OK</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>576</BitOffs></SubItem><SubItem><Name>Lift_Pin_Middle1</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>584</BitOffs></SubItem><SubItem><Name>Lift_Pin_Middle2</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>592</BitOffs></SubItem><SubItem><Name>FL01B2</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>600</BitOffs></SubItem><SubItem><Name>FL01B4</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>608</BitOffs></SubItem><SubItem><Name>FL02B2</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>616</BitOffs></SubItem><SubItem><Name>FL02B4</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>624</BitOffs></SubItem><SubItem><Name>FL03B2</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>632</BitOffs></SubItem><SubItem><Name>FL03B4</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>640</BitOffs></SubItem><SubItem><Name>FL04B2</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>648</BitOffs></SubItem><SubItem><Name>FL04B4</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>656</BitOffs></SubItem><SubItem><Name>DP01_OUTPUT1</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>664</BitOffs></SubItem><SubItem><Name>DP01_OUTPUT2</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>672</BitOffs></SubItem><SubItem><Name>MaualEndStepFeedBack</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>680</BitOffs></SubItem><SubItem><Name>AV1</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>688</BitOffs></SubItem><SubItem><Name>AV2</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>696</BitOffs></SubItem><SubItem><Name>AV3</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>704</BitOffs></SubItem><SubItem><Name>AV4</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>712</BitOffs></SubItem><SubItem><Name>AV6</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>720</BitOffs></SubItem><SubItem><Name>AV7</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>728</BitOffs></SubItem><SubItem><Name>AV9</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>736</BitOffs></SubItem><SubItem><Name>AV10</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>744</BitOffs></SubItem><SubItem><Name>AV11</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>752</BitOffs></SubItem><SubItem><Name>AV12</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>760</BitOffs></SubItem><SubItem><Name>AV13</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>768</BitOffs></SubItem><SubItem><Name>AV14</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>776</BitOffs></SubItem><SubItem><Name>AV16</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>784</BitOffs></SubItem><SubItem><Name>AV17</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>792</BitOffs></SubItem><SubItem><Name>AV19</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>800</BitOffs></SubItem><SubItem><Name>AV20</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>808</BitOffs></SubItem><SubItem><Name>AV22</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>816</BitOffs></SubItem><SubItem><Name>AV23</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>824</BitOffs></SubItem><SubItem><Name>AV25</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>832</BitOffs></SubItem><SubItem><Name>AV26</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>840</BitOffs></SubItem><SubItem><Name>AV27</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>848</BitOffs></SubItem><SubItem><Name>AV5</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>856</BitOffs></SubItem><SubItem><Name>AV8</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>864</BitOffs></SubItem><SubItem><Name>AV15</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>872</BitOffs></SubItem><SubItem><Name>AV18</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>880</BitOffs></SubItem><SubItem><Name>AV21</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>888</BitOffs></SubItem><SubItem><Name>AV24</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>896</BitOffs></SubItem></DataType><DataType><Name>STR_NDO</Name><BitSize>392</BitSize><SubItem><Name>Heartbeat</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>AV101</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>8</BitOffs></SubItem><SubItem><Name>AV102</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>16</BitOffs></SubItem><SubItem><Name>AV103</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>24</BitOffs></SubItem><SubItem><Name>AV104</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>32</BitOffs></SubItem><SubItem><Name>AV105</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>40</BitOffs></SubItem><SubItem><Name>AV106</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>48</BitOffs></SubItem><SubItem><Name>AV107</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>56</BitOffs></SubItem><SubItem><Name>AV108</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>AV109</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>72</BitOffs></SubItem><SubItem><Name>AV110</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>80</BitOffs></SubItem><SubItem><Name>GV101C</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>88</BitOffs></SubItem><SubItem><Name>GV101O</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>96</BitOffs></SubItem><SubItem><Name>AV201</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>104</BitOffs></SubItem><SubItem><Name>AV202</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>112</BitOffs></SubItem><SubItem><Name>AC101</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>120</BitOffs></SubItem><SubItem><Name>AC102</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>128</BitOffs></SubItem><SubItem><Name>AC103</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>136</BitOffs></SubItem><SubItem><Name>AC104</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>144</BitOffs></SubItem><SubItem><Name>AC105</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>152</BitOffs></SubItem><SubItem><Name>AC106</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>160</BitOffs></SubItem><SubItem><Name>AV1</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>168</BitOffs></SubItem><SubItem><Name>AV2</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>176</BitOffs></SubItem><SubItem><Name>AV3</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>184</BitOffs></SubItem><SubItem><Name>AV4</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>192</BitOffs></SubItem><SubItem><Name>AV6</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>200</BitOffs></SubItem><SubItem><Name>AV7</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>208</BitOffs></SubItem><SubItem><Name>AV9</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>216</BitOffs></SubItem><SubItem><Name>AV10</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>224</BitOffs></SubItem><SubItem><Name>AV11</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>232</BitOffs></SubItem><SubItem><Name>AV12</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>240</BitOffs></SubItem><SubItem><Name>AV13</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>248</BitOffs></SubItem><SubItem><Name>AV14</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>256</BitOffs></SubItem><SubItem><Name>AV16</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>264</BitOffs></SubItem><SubItem><Name>AV17</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>272</BitOffs></SubItem><SubItem><Name>AV19</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>280</BitOffs></SubItem><SubItem><Name>AV20</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>288</BitOffs></SubItem><SubItem><Name>AV22</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>296</BitOffs></SubItem><SubItem><Name>AV23</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>304</BitOffs></SubItem><SubItem><Name>AV25</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>312</BitOffs></SubItem><SubItem><Name>AV26</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>320</BitOffs></SubItem><SubItem><Name>AV27</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>328</BitOffs></SubItem><SubItem><Name>AV5</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>336</BitOffs></SubItem><SubItem><Name>AV8</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>344</BitOffs></SubItem><SubItem><Name>AV15</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>352</BitOffs></SubItem><SubItem><Name>AV18</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>360</BitOffs></SubItem><SubItem><Name>AV21</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>368</BitOffs></SubItem><SubItem><Name>AV24</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>376</BitOffs></SubItem><SubItem><Name>MaualEndStep</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>384</BitOffs></SubItem></DataType><DataType><Name>STR_AI</Name><BitSize>2560</BitSize><SubItem><Name>VG101_Pressure</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>VG102_Pressure</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>32</BitOffs></SubItem><SubItem><Name>VG103_Pressure</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>VG104_Pressure</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>96</BitOffs></SubItem><SubItem><Name>BA1_Pressure</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>128</BitOffs></SubItem><SubItem><Name>MFC1_Flow</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>160</BitOffs></SubItem><SubItem><Name>MFC2_Flow</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>192</BitOffs></SubItem><SubItem><Name>MFC3_Flow</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>224</BitOffs></SubItem><SubItem><Name>MFC4_Flow</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>256</BitOffs></SubItem><SubItem><Name>MFC5_Flow</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>288</BitOffs></SubItem><SubItem><Name>MFC6_Flow</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>320</BitOffs></SubItem><SubItem><Name>MFC7_Flow</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>352</BitOffs></SubItem><SubItem><Name>CHILLER1_TEMP_PV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>384</BitOffs></SubItem><SubItem><Name>CHILLER1_DI_PV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>416</BitOffs></SubItem><SubItem><Name>CHILLER1_FLOW_PV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>448</BitOffs></SubItem><SubItem><Name>CHILLER1_PRESS_PV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>480</BitOffs></SubItem><SubItem><Name>CHILLER2_TEMP_PV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>512</BitOffs></SubItem><SubItem><Name>CHILLER2_DI_PV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>544</BitOffs></SubItem><SubItem><Name>CHILLER2_FLOW_PV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>576</BitOffs></SubItem><SubItem><Name>CHILLER2_PRESS_PV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>608</BitOffs></SubItem><SubItem><Name>Turbo_Pump_Temp</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>640</BitOffs></SubItem><SubItem><Name>APC_Temp</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>672</BitOffs></SubItem><SubItem><Name>Gate_Valve_Temp</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>704</BitOffs></SubItem><SubItem><Name>Gate_Valve_Temp_Monitor</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>736</BitOffs></SubItem><SubItem><Name>IGS_Temp1</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>768</BitOffs></SubItem><SubItem><Name>IGS_Temp2</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>800</BitOffs></SubItem><SubItem><Name>IGS_Temp3</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>832</BitOffs></SubItem><SubItem><Name>IGS_Temp4</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>864</BitOffs></SubItem><SubItem><Name>Lid_Temp</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>896</BitOffs></SubItem><SubItem><Name>Lid_Temp_Monitor1</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>928</BitOffs></SubItem><SubItem><Name>Lid_Temp_Monitor2</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>960</BitOffs></SubItem><SubItem><Name>Tape_Temp1</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>992</BitOffs></SubItem><SubItem><Name>Tape_Temp2</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1024</BitOffs></SubItem><SubItem><Name>Tape_Temp3</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1056</BitOffs></SubItem><SubItem><Name>AV102_Temp</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1088</BitOffs></SubItem><SubItem><Name>AV101_Temp</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1120</BitOffs></SubItem><SubItem><Name>AV106_Temp</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1152</BitOffs></SubItem><SubItem><Name>BA01_Temp</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1184</BitOffs></SubItem><SubItem><Name>VG103_Pipe_Temp</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1216</BitOffs></SubItem><SubItem><Name>Exhaust1_6_Temp</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1248</BitOffs></SubItem><SubItem><Name>Exhaust7_8_Temp</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1280</BitOffs></SubItem><SubItem><Name>VG101_Pipe_Temp</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1312</BitOffs></SubItem><SubItem><Name>Chamber_Temp1</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1344</BitOffs></SubItem><SubItem><Name>Chamber_Temp2</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1376</BitOffs></SubItem><SubItem><Name>Chamber_Temp3</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1408</BitOffs></SubItem><SubItem><Name>Chamber_Temp_Monitor</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1440</BitOffs></SubItem><SubItem><Name>Stage_Temp1</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1472</BitOffs></SubItem><SubItem><Name>Stage_Temp2</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1504</BitOffs></SubItem><SubItem><Name>Stage_Temp3</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1536</BitOffs></SubItem><SubItem><Name>Stage_Temp4</Name><Type>REAL</Type><Comment><![CDATA[TC11	]]></Comment><BitSize>32</BitSize><BitOffs>1568</BitOffs></SubItem><SubItem><Name>PG_PS1_Value</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1600</BitOffs></SubItem><SubItem><Name>PG_PS2_Value</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1632</BitOffs></SubItem><SubItem><Name>PG_PS3_Value</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1664</BitOffs></SubItem><SubItem><Name>PG_PS4_Value</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1696</BitOffs></SubItem><SubItem><Name>PG_PS5_Value</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1728</BitOffs></SubItem><SubItem><Name>PG_PS6_Value</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1760</BitOffs></SubItem><SubItem><Name>PG_PS7_Value</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1792</BitOffs></SubItem><SubItem><Name>PG_PS8_Value</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1824</BitOffs></SubItem><SubItem><Name>PG_PS9_Value</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1856</BitOffs></SubItem><SubItem><Name>PS1_Value</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1888</BitOffs></SubItem><SubItem><Name>PS2_Value</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1920</BitOffs></SubItem><SubItem><Name>MS1_Value</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1952</BitOffs></SubItem><SubItem><Name>GD01_Value</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1984</BitOffs></SubItem><SubItem><Name>GD02_Value</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>2016</BitOffs></SubItem><SubItem><Name>APC</Name><Type>VAT_IN</Type><BitSize>224</BitSize><BitOffs>2048</BitOffs></SubItem><SubItem><Name>TMP</Name><Type>TMP_IN</Type><BitSize>112</BitSize><BitOffs>2272</BitOffs></SubItem><SubItem><Name>VG103_PV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>2400</BitOffs></SubItem><SubItem><Name>VG101_PV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>2432</BitOffs></SubItem><SubItem><Name>VG102_PV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>2464</BitOffs></SubItem><SubItem><Name>BA1_PV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>2496</BitOffs></SubItem><SubItem><Name>VG104_PV</Name><Type>REAL</Type><Comment><![CDATA[原PS12]]></Comment><BitSize>32</BitSize><BitOffs>2528</BitOffs></SubItem></DataType><DataType><Name>STR_AO</Name><BitSize>1504</BitSize><SubItem><Name>MFC1_Flow_Setpoint</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>MFC1_Rate_Setpoint</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>32</BitOffs></SubItem><SubItem><Name>MFC2_Flow_Setpoint</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>MFC2_Rate_Setpoint</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>96</BitOffs></SubItem><SubItem><Name>MFC3_Flow_Setpoint</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>128</BitOffs></SubItem><SubItem><Name>MFC3_Rate_Setpoint</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>160</BitOffs></SubItem><SubItem><Name>MFC4_Flow_Setpoint</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>192</BitOffs></SubItem><SubItem><Name>MFC4_Rate_Setpoint</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>224</BitOffs></SubItem><SubItem><Name>MFC5_Flow_Setpoint</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>256</BitOffs></SubItem><SubItem><Name>MFC5_Rate_Setpoint</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>288</BitOffs></SubItem><SubItem><Name>MFC6_Flow_Setpoint</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>320</BitOffs></SubItem><SubItem><Name>MFC6_Rate_Setpoint</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>352</BitOffs></SubItem><SubItem><Name>MFC7_Flow_Setpoint</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>384</BitOffs></SubItem><SubItem><Name>MFC7_Rate_Setpoint</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>416</BitOffs></SubItem><SubItem><Name>LID_Temp_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>448</BitOffs></SubItem><SubItem><Name>Chamber_Temp1_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>480</BitOffs></SubItem><SubItem><Name>Chamber_Temp2_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>512</BitOffs></SubItem><SubItem><Name>Chamber_Temp3_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>544</BitOffs></SubItem><SubItem><Name>AV102_Temp_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>576</BitOffs></SubItem><SubItem><Name>AV101_Temp_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>608</BitOffs></SubItem><SubItem><Name>AV106_Temp_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>640</BitOffs></SubItem><SubItem><Name>BA01_Temp_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>672</BitOffs></SubItem><SubItem><Name>VG103_Pipe_Temp_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>704</BitOffs></SubItem><SubItem><Name>Exhaust1_6_Temp_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>736</BitOffs></SubItem><SubItem><Name>Exhaust7_8_Temp_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>768</BitOffs></SubItem><SubItem><Name>VG101_Pipe_Temp_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>800</BitOffs></SubItem><SubItem><Name>Gate_Valve_Temp_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>832</BitOffs></SubItem><SubItem><Name>APC_Temp_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>864</BitOffs></SubItem><SubItem><Name>TMP_Temp_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>896</BitOffs></SubItem><SubItem><Name>Tape_Temp1_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>928</BitOffs></SubItem><SubItem><Name>Tape_Temp2_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>960</BitOffs></SubItem><SubItem><Name>Tape_Temp3_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>992</BitOffs></SubItem><SubItem><Name>IGS_Temp1_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1024</BitOffs></SubItem><SubItem><Name>IGS_Temp2_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1056</BitOffs></SubItem><SubItem><Name>Chiller_Temp1_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1088</BitOffs></SubItem><SubItem><Name>Chiller_Temp2_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1120</BitOffs></SubItem><SubItem><Name>Stage_Temp1_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1152</BitOffs></SubItem><SubItem><Name>Stage_Temp2_SV</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1184</BitOffs></SubItem><SubItem><Name>Chiller1_On</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1216</BitOffs></SubItem><SubItem><Name>Chiller2_On</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>1248</BitOffs></SubItem><SubItem><Name>APC</Name><Type>VAT_OUT</Type><BitSize>192</BitSize><BitOffs>1280</BitOffs></SubItem><SubItem><Name>TMP</Name><Type>TMP_OUT</Type><BitSize>8</BitSize><BitOffs>1472</BitOffs></SubItem></DataType><DataType><Name>ConfigPM</Name><BitSize>1536</BitSize><SubItem><Name>TurboN2Pressure</Name><Type>INT</Type><Comment><![CDATA[TurboN2FlowSetPoint:LREAL;			//0-200		mtorr]]></Comment><BitSize>16</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>PrepareTransferTimeout</Name><Type>INT</Type><Comment><![CDATA[1-99999	s]]></Comment><BitSize>16</BitSize><BitOffs>16</BitOffs></SubItem><SubItem><Name>TransferWaferTimeout</Name><Type>INT</Type><Comment><![CDATA[1-99999	s]]></Comment><BitSize>16</BitSize><BitOffs>32</BitOffs></SubItem><SubItem><Name>OpenGasValveTimeout</Name><Type>INT</Type><Comment><![CDATA[0-60		s]]></Comment><BitSize>16</BitSize><BitOffs>48</BitOffs></SubItem><SubItem><Name>CloseGasValveTimeout</Name><Type>INT</Type><Comment><![CDATA[0-10]]></Comment><BitSize>16</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>OpenCloseSlitValveTimeout</Name><Type>INT</Type><Comment><![CDATA[0-10]]></Comment><BitSize>16</BitSize><BitOffs>80</BitOffs></SubItem><SubItem><Name>GasFlowPressureAlarmRange</Name><Type>LREAL</Type><Comment><![CDATA[0-760000	mtorr]]></Comment><BitSize>64</BitSize><BitOffs>128</BitOffs></SubItem><SubItem><Name>GasFlowPressureAlarmTime</Name><Type>LREAL</Type><Comment><![CDATA[0-3600	s]]></Comment><BitSize>64</BitSize><BitOffs>192</BitOffs></SubItem><SubItem><Name>GasFlowPressureWarningRange</Name><Type>LREAL</Type><Comment><![CDATA[0-760000	mtorr]]></Comment><BitSize>64</BitSize><BitOffs>256</BitOffs></SubItem><SubItem><Name>GasFlowPressureWarningTime</Name><Type>LREAL</Type><Comment><![CDATA[0-3600	s]]></Comment><BitSize>64</BitSize><BitOffs>320</BitOffs></SubItem><SubItem><Name>EnableThrottleValve</Name><Type>BOOL</Type><Comment><![CDATA[0-10				//不清楚作用]]></Comment><BitSize>8</BitSize><BitOffs>384</BitOffs></SubItem><SubItem><Name>ValveHeaterSetPointLimit</Name><Type>INT</Type><Comment><![CDATA[0-500]]></Comment><BitSize>16</BitSize><BitOffs>400</BitOffs></SubItem><SubItem><Name>ForeLineHeaterSetPointLimit</Name><Type>INT</Type><Comment><![CDATA[0-500]]></Comment><BitSize>16</BitSize><BitOffs>416</BitOffs></SubItem><SubItem><Name>CheckSubstrateTempTimeout</Name><Type>INT</Type><Comment><![CDATA[0-3600			//不清楚作用]]></Comment><BitSize>16</BitSize><BitOffs>432</BitOffs></SubItem><SubItem><Name>CheckATMTimeout</Name><Type>INT</Type><Comment><![CDATA[0-3000	s]]></Comment><BitSize>16</BitSize><BitOffs>448</BitOffs></SubItem><SubItem><Name>OverVentTime</Name><Type>UINT</Type><Comment><![CDATA[0-60000	ms		充气至常压]]></Comment><BitSize>16</BitSize><BitOffs>464</BitOffs></SubItem><SubItem><Name>ChamberBasePressureThreshold</Name><Type>UDINT</Type><Comment><![CDATA[0-1000000	mtorr	腔体基础压力门槛	工艺开始压力？腔体压力下限？]]></Comment><BitSize>32</BitSize><BitOffs>480</BitOffs></SubItem><SubItem><Name>ChamberBaseTemperatureThreshold</Name><Type>LREAL</Type><Comment><![CDATA[0-1000	℃		腔体基础温度门槛	工艺开始温度？腔体温度下限？]]></Comment><BitSize>64</BitSize><BitOffs>512</BitOffs></SubItem><SubItem><Name>ProcessPressureOffset</Name><Type>LREAL</Type><Comment><![CDATA[0-100		mtorr]]></Comment><BitSize>64</BitSize><BitOffs>576</BitOffs></SubItem><SubItem><Name>PickDelayTime</Name><Type>INT</Type><Comment><![CDATA[0-10000	ms]]></Comment><BitSize>16</BitSize><BitOffs>640</BitOffs></SubItem><SubItem><Name>PlaceDelayTime</Name><Type>INT</Type><Comment><![CDATA[0-10000	ms]]></Comment><BitSize>16</BitSize><BitOffs>656</BitOffs></SubItem><SubItem><Name>ChamberLabel</Name><Type>STRING(80)</Type><Comment><![CDATA['']]></Comment><BitSize>648</BitSize><BitOffs>672</BitOffs></SubItem><SubItem><Name>WallHeaterSetPointLimit</Name><Type>INT</Type><Comment><![CDATA[0-500]]></Comment><BitSize>16</BitSize><BitOffs>1328</BitOffs></SubItem><SubItem><Name>PendulumHeaterSetPointLimit</Name><Type>INT</Type><Comment><![CDATA[0-500]]></Comment><BitSize>16</BitSize><BitOffs>1344</BitOffs></SubItem><SubItem><Name>EnableWallHeater</Name><Type>BOOL</Type><Comment><![CDATA[0-10]]></Comment><BitSize>8</BitSize><BitOffs>1360</BitOffs></SubItem><SubItem><Name>EnableGridHeater</Name><Type>BOOL</Type><Comment><![CDATA[0-10]]></Comment><BitSize>8</BitSize><BitOffs>1368</BitOffs></SubItem><SubItem><Name>RecipeRunningMode</Name><Type>INT</Type><Comment><![CDATA[0-5]]></Comment><BitSize>16</BitSize><BitOffs>1376</BitOffs></SubItem><SubItem><Name>ForelineInterlockPressure</Name><Type>LREAL</Type><Comment><![CDATA[500-2000	℃]]></Comment><BitSize>64</BitSize><BitOffs>1408</BitOffs></SubItem><SubItem><Name>IsEnableRecipeExtension</Name><Type>BOOL</Type><Comment><![CDATA[0-10]]></Comment><BitSize>8</BitSize><BitOffs>1472</BitOffs></SubItem><SubItem><Name>ControlPressureSetPoint</Name><Type>INT</Type><Comment><![CDATA[0-2000	mtorr]]></Comment><BitSize>16</BitSize><BitOffs>1488</BitOffs></SubItem><SubItem><Name>ControlPressureN2FlowSetPoint</Name><Type>INT</Type><Comment><![CDATA[0-500		sccm	]]></Comment><BitSize>16</BitSize><BitOffs>1504</BitOffs></SubItem><SubItem><Name>PMStableTime</Name><Type>INT</Type><Comment><![CDATA[0-100		s]]></Comment><BitSize>16</BitSize><BitOffs>1520</BitOffs></SubItem></DataType><DataType><Name>SVLREAL</Name><BitSize>256</BitSize><SubItem><Name>MinSV</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>MaxSV</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>PV</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>128</BitOffs></SubItem><SubItem><Name>SV</Name><Type>LREAL</Type><BitSize>64</BitSize><BitOffs>192</BitOffs></SubItem></DataType><DataType><Name>SVINT</Name><BitSize>64</BitSize><SubItem><Name>MinSV</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>MaxSV</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>16</BitOffs></SubItem><SubItem><Name>PV</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>32</BitOffs></SubItem><SubItem><Name>SV</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>48</BitOffs></SubItem></DataType><DataType><Name>ConfigMfcVer</Name><BitSize>1472</BitSize><SubItem><Name>BasePressure</Name><Type>SVLREAL</Type><BitSize>256</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>PumpingTime</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>256</BitOffs></SubItem><SubItem><Name>GasFlowTime</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>320</BitOffs></SubItem><SubItem><Name>HoldTime</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>384</BitOffs></SubItem><SubItem><Name>TargetPressure</Name><Type>SVLREAL</Type><BitSize>256</BitSize><BitOffs>448</BitOffs></SubItem><SubItem><Name>MaxDeviation</Name><Type>SVLREAL</Type><BitSize>256</BitSize><BitOffs>704</BitOffs></SubItem><SubItem><Name>PressureStableTolerance</Name><Type>SVLREAL</Type><BitSize>256</BitSize><BitOffs>960</BitOffs></SubItem><SubItem><Name>FlowStableTolerance</Name><Type>SVLREAL</Type><BitSize>256</BitSize><BitOffs>1216</BitOffs></SubItem></DataType><DataType><Name>ConfigChiller</Name><BitSize>1792</BitSize><SubItem><Name>Enable</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>MFG</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>16</BitOffs></SubItem><SubItem><Name>CommType</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>80</BitOffs></SubItem><SubItem><Name>Port</Name><Type>STRING(80)</Type><BitSize>648</BitSize><BitOffs>144</BitOffs></SubItem><SubItem><Name>TempOffset</Name><Type>SVLREAL</Type><BitSize>256</BitSize><BitOffs>832</BitOffs></SubItem><SubItem><Name>MaxLimit</Name><Type>SVLREAL</Type><BitSize>256</BitSize><BitOffs>1088</BitOffs></SubItem><SubItem><Name>MinLimit</Name><Type>SVLREAL</Type><BitSize>256</BitSize><BitOffs>1344</BitOffs></SubItem><SubItem><Name>EnableAlarmTolerance</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>1600</BitOffs></SubItem><SubItem><Name>ToleranceAlarmRange</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>1616</BitOffs></SubItem><SubItem><Name>ToleranceAlarmTime</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>1680</BitOffs></SubItem></DataType><DataType><Name>ConfigDryPump</Name><BitSize>1152</BitSize><SubItem><Name>MFG</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>CommType</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>Port</Name><Type>STRING(80)</Type><BitSize>648</BitSize><BitOffs>128</BitOffs></SubItem><SubItem><Name>ChamberForlinePressureTolerance</Name><Type>SVLREAL</Type><BitSize>256</BitSize><BitOffs>832</BitOffs></SubItem><SubItem><Name>ChamberForlinePressureTimeout</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>1088</BitOffs></SubItem></DataType><DataType><Name>ConfigMfcGas</Name><BitSize>1728</BitSize><SubItem><Name>Enable</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>GasName</Name><Type>STRING(80)</Type><BitSize>648</BitSize><BitOffs>8</BitOffs></SubItem><SubItem><Name>N2Scale</Name><Type>SVLREAL</Type><BitSize>256</BitSize><BitOffs>704</BitOffs></SubItem><SubItem><Name>ScaleFactor</Name><Type>SVLREAL</Type><BitSize>256</BitSize><BitOffs>960</BitOffs></SubItem><SubItem><Name>DefaultSV</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>1216</BitOffs></SubItem><SubItem><Name>FlowRegulationFactor</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>1280</BitOffs></SubItem><SubItem><Name>EnableAlarm</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>1344</BitOffs></SubItem><SubItem><Name>AlarmRange</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>1360</BitOffs></SubItem><SubItem><Name>AlarmTime</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>1424</BitOffs></SubItem><SubItem><Name>WarningRange</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>1488</BitOffs></SubItem><SubItem><Name>WarningTime</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>1552</BitOffs></SubItem><SubItem><Name>WriteMode</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>1616</BitOffs></SubItem></DataType><DataType><Name>ConfigPump</Name><BitSize>2560</BitSize><SubItem><Name>LeakRate</Name><Type>SVLREAL</Type><BitSize>256</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>LeakCheckPumpingTime</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>256</BitOffs></SubItem><SubItem><Name>LeakCheckHoldTime</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>320</BitOffs></SubItem><SubItem><Name>PumpBasePressure</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>384</BitOffs></SubItem><SubItem><Name>LeakCheckBasePressur</Name><Type>SVLREAL</Type><BitSize>256</BitSize><BitOffs>448</BitOffs></SubItem><SubItem><Name>LeakCheckGasLineNums</Name><Type>STRING(80)</Type><BitSize>648</BitSize><BitOffs>704</BitOffs></SubItem><SubItem><Name>PumpTimeLimit</Name><Type>SVLREAL</Type><BitSize>256</BitSize><BitOffs>1408</BitOffs></SubItem><SubItem><Name>PumpValveDelay</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>1664</BitOffs></SubItem><SubItem><Name>PumpCrossingPressure</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>1728</BitOffs></SubItem><SubItem><Name>PumpVHe2FlowPressure</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>1792</BitOffs></SubItem><SubItem><Name>LoadLockPumpBasePressure</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>1856</BitOffs></SubItem><SubItem><Name>LoadLockPumpTimeLimit</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>1920</BitOffs></SubItem><SubItem><Name>LoadLockPurgeVentPressure</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>1984</BitOffs></SubItem><SubItem><Name>LoadLockPurgeCycleCount</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>2048</BitOffs></SubItem><SubItem><Name>LoadLockPurgePumpTime</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>2112</BitOffs></SubItem><SubItem><Name>LoadLockLeakCheckPumpTime</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>2176</BitOffs></SubItem><SubItem><Name>LoadLockLeakCheckWaitTime</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>2240</BitOffs></SubItem><SubItem><Name>LoadLockLeakRate</Name><Type>SVLREAL</Type><BitSize>256</BitSize><BitOffs>2304</BitOffs></SubItem></DataType><DataType><Name>ConfigPurge</Name><BitSize>640</BitSize><SubItem><Name>PurgeCycleCount</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>PurgeVentPressure</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>PurgePumpPressure</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>128</BitOffs></SubItem><SubItem><Name>PurgeVentTimeLimit</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>192</BitOffs></SubItem><SubItem><Name>PurgePumpTimeLimit</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>256</BitOffs></SubItem><SubItem><Name>PurgeVentStableTime</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>320</BitOffs></SubItem><SubItem><Name>PurgePumpTime</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>384</BitOffs></SubItem><SubItem><Name>GasPurgeCycleCount</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>448</BitOffs></SubItem><SubItem><Name>GasPurgeFlowTime</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>512</BitOffs></SubItem><SubItem><Name>GasPurgePumpTime</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>576</BitOffs></SubItem></DataType><DataType><Name>ConfigHeater</Name><BitSize>272</BitSize><SubItem><Name>HeaterTolerance_Enable</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>HeaterAlarmRange</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>16</BitOffs></SubItem><SubItem><Name>HeaterAlarmTime</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>80</BitOffs></SubItem><SubItem><Name>HeaterWarningRange</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>144</BitOffs></SubItem><SubItem><Name>HeaterWarningTime</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>208</BitOffs></SubItem></DataType><DataType><Name>ConfigElectrostaticVoltageSource</Name><BitSize>648</BitSize><SubItem><Name>Port</Name><Type>STRING(80)</Type><BitSize>648</BitSize><BitOffs>0</BitOffs></SubItem></DataType><DataType><Name>ConfigTurboPump</Name><BitSize>1024</BitSize><SubItem><Name>Port</Name><Type>STRING(80)</Type><BitSize>648</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>ChamberForelinePressureThreshold</Name><Type>SVLREAL</Type><BitSize>256</BitSize><BitOffs>704</BitOffs></SubItem><SubItem><Name>ChamberForelinePressureTimeout</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>960</BitOffs></SubItem></DataType><DataType><Name>ConfigPendulumValve</Name><BitSize>912</BitSize><SubItem><Name>Port</Name><Type>STRING(80)</Type><BitSize>648</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>PressureFullRange</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>656</BitOffs></SubItem><SubItem><Name>ForelinePressureLimit</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>720</BitOffs></SubItem><SubItem><Name>ChamberPressureLimit</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>784</BitOffs></SubItem><SubItem><Name>TurboPumpSpeedLimit</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>848</BitOffs></SubItem></DataType><DataType><Name>ConfigIdleClean</Name><BitSize>1568</BitSize><SubItem><Name>Option</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>IdleCleanRecipe</Name><Type>STRING(80)</Type><BitSize>648</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>IdleCleanTime</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>720</BitOffs></SubItem><SubItem><Name>IdleCleanWaferCount</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>784</BitOffs></SubItem><SubItem><Name>WaferCountSinceLastClean</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>848</BitOffs></SubItem><SubItem><Name>LastRunTime</Name><Type>STRING(80)</Type><BitSize>648</BitSize><BitOffs>912</BitOffs></SubItem></DataType><DataType><Name>ConfigEPD</Name><BitSize>800</BitSize><SubItem><Name>IsEnabled</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>ChannelNumber</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>16</BitOffs></SubItem><SubItem><Name>IPAdress</Name><Type>STRING(80)</Type><BitSize>648</BitSize><BitOffs>80</BitOffs></SubItem><SubItem><Name>EPDType</Name><Type>SVINT</Type><BitSize>64</BitSize><BitOffs>736</BitOffs></SubItem></DataType><DataType><Name>ConfigHighTempChiller</Name><BitSize>2816</BitSize><SubItem><Name>LiftServoPosition1</Name><Type>SVLREAL</Type><BitSize>256</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>LiftServoPosition2</Name><Type>SVLREAL</Type><BitSize>256</BitSize><BitOffs>256</BitOffs></SubItem><SubItem><Name>LiftServoPosition3</Name><Type>SVLREAL</Type><BitSize>256</BitSize><BitOffs>512</BitOffs></SubItem><SubItem><Name>LiftServoPosition4</Name><Type>SVLREAL</Type><BitSize>256</BitSize><BitOffs>768</BitOffs></SubItem><SubItem><Name>LiftServoPosition5</Name><Type>SVLREAL</Type><BitSize>256</BitSize><BitOffs>1024</BitOffs></SubItem><SubItem><Name>OriginSearchHighSpeed</Name><Type>SVLREAL</Type><BitSize>256</BitSize><BitOffs>1280</BitOffs></SubItem><SubItem><Name>OriginSearchLowSpeed</Name><Type>SVLREAL</Type><BitSize>256</BitSize><BitOffs>1536</BitOffs></SubItem><SubItem><Name>AbsMoveSpeed</Name><Type>SVLREAL</Type><BitSize>256</BitSize><BitOffs>1792</BitOffs></SubItem><SubItem><Name>MaxMoveSpeed</Name><Type>SVLREAL</Type><BitSize>256</BitSize><BitOffs>2048</BitOffs></SubItem><SubItem><Name>SoftDownLimit</Name><Type>SVLREAL</Type><BitSize>256</BitSize><BitOffs>2304</BitOffs></SubItem><SubItem><Name>SoftUpLimit</Name><Type>SVLREAL</Type><BitSize>256</BitSize><BitOffs>2560</BitOffs></SubItem></DataType><DataType><Name>STR_PID</Name><BitSize>192</BitSize><SubItem><Name>P</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>I</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>32</BitOffs></SubItem><SubItem><Name>D</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>DP</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>96</BitOffs></SubItem><SubItem><Name>Feedforward</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>128</BitOffs></SubItem><SubItem><Name>Output_Limit</Name><Type>REAL</Type><BitSize>32</BitSize><BitOffs>160</BitOffs></SubItem></DataType><DataType><Name>PLC_TO_SPLC</Name><BitSize>96</BitSize><SubItem><Name>Lid_Temp_OK</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>Chamber_Temp_OK</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>8</BitOffs></SubItem><SubItem><Name>APC_Temp_OK</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>16</BitOffs></SubItem><SubItem><Name>Gate_Valve_Temp_OK</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>24</BitOffs></SubItem><SubItem><Name>Gas_Line_Temp_OK</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>32</BitOffs></SubItem><SubItem><Name>TMP_Interlock_OK</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>40</BitOffs></SubItem><SubItem><Name>PS1_Interlock_OK</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>48</BitOffs></SubItem><SubItem><Name>PS2_Interlock_OK</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>56</BitOffs></SubItem><SubItem><Name>VG101_LOWER_10Torr</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>SPLC_ErrorAcknowledgement</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>72</BitOffs></SubItem><SubItem><Name>SPLC_Restart</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>80</BitOffs></SubItem><SubItem><Name>SPLC_Run</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>88</BitOffs></SubItem></DataType><DataType><Name>Warning</Name><BitSize>320</BitSize><SubItem><Name>PRESSURE</Name><Type>BOOL</Type><Comment><![CDATA[PRESSURE_Alarm:BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>MFC1</Name><Type>BOOL</Type><Comment><![CDATA[MFC1_Alarm:BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>8</BitOffs></SubItem><SubItem><Name>MFC2</Name><Type>BOOL</Type><Comment><![CDATA[MFC2_Alarm:BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>16</BitOffs></SubItem><SubItem><Name>MFC3</Name><Type>BOOL</Type><Comment><![CDATA[MFC3_Alarm:BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>24</BitOffs></SubItem><SubItem><Name>MFC4</Name><Type>BOOL</Type><Comment><![CDATA[MFC4_Alarm:BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>32</BitOffs></SubItem><SubItem><Name>MFC5</Name><Type>BOOL</Type><Comment><![CDATA[MFC5_Alarm:BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>40</BitOffs></SubItem><SubItem><Name>MFC6</Name><Type>BOOL</Type><Comment><![CDATA[MFC6_Alarm:BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>48</BitOffs></SubItem><SubItem><Name>MFC7</Name><Type>BOOL</Type><Comment><![CDATA[MFC7_Alarm:BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>56</BitOffs></SubItem><SubItem><Name>MFC8</Name><Type>BOOL</Type><Comment><![CDATA[MFC8_Alarm:BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>MFC9</Name><Type>BOOL</Type><Comment><![CDATA[MFC9_Alarm:BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>72</BitOffs></SubItem><SubItem><Name>WALL_TEMP</Name><Type>BOOL</Type><Comment><![CDATA[WALL_TEMP_Alarm:BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>80</BitOffs></SubItem><SubItem><Name>LID_TEMP</Name><Type>BOOL</Type><Comment><![CDATA[LID_TEMP_Alarm:BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>88</BitOffs></SubItem><SubItem><Name>STAGE_EDGE_TEMP</Name><Type>BOOL</Type><Comment><![CDATA[STAGE_EDGE_TEMP_Alarm:BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>96</BitOffs></SubItem><SubItem><Name>STAGE_CENTER_TEMP</Name><Type>BOOL</Type><Comment><![CDATA[STAGE_CENTER_TEMP_ALARM: BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>104</BitOffs></SubItem><SubItem><Name>CHILLER1</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>112</BitOffs></SubItem><SubItem><Name>CHILLER2</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>120</BitOffs></SubItem><SubItem><Name>OpenCloseSlitValveTimeout</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>128</BitOffs></SubItem><SubItem><Name>Gas1FlowPressureOutOfRange</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>136</BitOffs></SubItem><SubItem><Name>Gas2FlowPressureOutOfRange</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>144</BitOffs></SubItem><SubItem><Name>Gas3FlowPressureOutOfRange</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>152</BitOffs></SubItem><SubItem><Name>Gas4FlowPressureOutOfRange</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>160</BitOffs></SubItem><SubItem><Name>Gas5FlowPressureOutOfRange</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>168</BitOffs></SubItem><SubItem><Name>Gas6FlowPressureOutOfRange</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>176</BitOffs></SubItem><SubItem><Name>Gas7FlowPressureOutOfRange</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>184</BitOffs></SubItem><SubItem><Name>Gas8FlowPressureOutOfRange</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>192</BitOffs></SubItem><SubItem><Name>Gas9FlowPressureOutOfRange</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>200</BitOffs></SubItem><SubItem><Name>TOLERANCE_PRESSURE</Name><Type>BOOL</Type><Comment><![CDATA[PROCESS TOLERANCE]]></Comment><BitSize>8</BitSize><BitOffs>208</BitOffs></SubItem><SubItem><Name>TOLERANCE_MFC1</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>216</BitOffs></SubItem><SubItem><Name>TOLERANCE_MFC2</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>224</BitOffs></SubItem><SubItem><Name>TOLERANCE_MFC3</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>232</BitOffs></SubItem><SubItem><Name>TOLERANCE_MFC4</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>240</BitOffs></SubItem><SubItem><Name>TOLERANCE_MFC5</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>248</BitOffs></SubItem><SubItem><Name>TOLERANCE_MFC6</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>256</BitOffs></SubItem><SubItem><Name>TOLERANCE_MFC7</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>264</BitOffs></SubItem><SubItem><Name>TOLERANCE_MFC8</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>272</BitOffs></SubItem><SubItem><Name>TOLERANCE_MFC9</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>280</BitOffs></SubItem><SubItem><Name>TOLERANCE_WALL_TEMP</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>288</BitOffs></SubItem><SubItem><Name>TOLERANCE_LID_TEMP</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>296</BitOffs></SubItem><SubItem><Name>TOLERANCE_STAGE_EDGE_TEMP</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>304</BitOffs></SubItem><SubItem><Name>TOLERANCE_STAGE_CENTER_TEMP</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>312</BitOffs></SubItem></DataType><DataType><Name>Alarm</Name><BitSize>400</BitSize><SubItem><Name>PRESSURE</Name><Type>BOOL</Type><Comment><![CDATA[PRESSURE_Warning:BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>MFC1</Name><Type>BOOL</Type><Comment><![CDATA[MFC1_Warning:BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>8</BitOffs></SubItem><SubItem><Name>MFC2</Name><Type>BOOL</Type><Comment><![CDATA[MFC2_Warning:BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>16</BitOffs></SubItem><SubItem><Name>MFC3</Name><Type>BOOL</Type><Comment><![CDATA[MFC3_Warning:BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>24</BitOffs></SubItem><SubItem><Name>MFC4</Name><Type>BOOL</Type><Comment><![CDATA[MFC4_Warning:BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>32</BitOffs></SubItem><SubItem><Name>MFC5</Name><Type>BOOL</Type><Comment><![CDATA[MFC5_Warning:BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>40</BitOffs></SubItem><SubItem><Name>MFC6</Name><Type>BOOL</Type><Comment><![CDATA[MFC6_Warning:BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>48</BitOffs></SubItem><SubItem><Name>MFC7</Name><Type>BOOL</Type><Comment><![CDATA[MFC7_Warning:BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>56</BitOffs></SubItem><SubItem><Name>MFC8</Name><Type>BOOL</Type><Comment><![CDATA[MFC8_Warning:BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>MFC9</Name><Type>BOOL</Type><Comment><![CDATA[MFC9_Warning:BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>72</BitOffs></SubItem><SubItem><Name>WALL_TEMP</Name><Type>BOOL</Type><Comment><![CDATA[WALL_TEMP_Warning:BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>80</BitOffs></SubItem><SubItem><Name>LID_TEMP</Name><Type>BOOL</Type><Comment><![CDATA[LID_TEMP_Warning:BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>88</BitOffs></SubItem><SubItem><Name>STAGE_EDGE_TEMP</Name><Type>BOOL</Type><Comment><![CDATA[STAGE_EDGE_TEMP_Warning:BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>96</BitOffs></SubItem><SubItem><Name>STAGE_CENTER_TEMP</Name><Type>BOOL</Type><Comment><![CDATA[STAGE_CENTER_TEMP_Warning: BOOL;]]></Comment><BitSize>8</BitSize><BitOffs>104</BitOffs></SubItem><SubItem><Name>Gas1FlowPressureOutOfRange</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>112</BitOffs></SubItem><SubItem><Name>Gas2FlowPressureOutOfRange</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>120</BitOffs></SubItem><SubItem><Name>Gas3FlowPressureOutOfRange</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>128</BitOffs></SubItem><SubItem><Name>Gas4FlowPressureOutOfRange</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>136</BitOffs></SubItem><SubItem><Name>Gas5FlowPressureOutOfRange</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>144</BitOffs></SubItem><SubItem><Name>Gas6FlowPressureOutOfRange</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>152</BitOffs></SubItem><SubItem><Name>Gas7FlowPressureOutOfRange</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>160</BitOffs></SubItem><SubItem><Name>Gas8FlowPressureOutOfRange</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>168</BitOffs></SubItem><SubItem><Name>Gas9FlowPressureOutOfRange</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>176</BitOffs></SubItem><SubItem><Name>TurboN2PurgePressureOutOfRange</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>184</BitOffs></SubItem><SubItem><Name>PrepareTransferTimerout</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>192</BitOffs></SubItem><SubItem><Name>TransferWaferTimeout</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>200</BitOffs></SubItem><SubItem><Name>OpenGasValveTimeout</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>208</BitOffs></SubItem><SubItem><Name>CloseGasValveTimeout</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>216</BitOffs></SubItem><SubItem><Name>OpenCloseSlitValveTimeout</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>224</BitOffs></SubItem><SubItem><Name>ATMCheckTimeout</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>232</BitOffs></SubItem><SubItem><Name>PLC</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>240</BitOffs></SubItem><SubItem><Name>DRY_PUMP</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>248</BitOffs></SubItem><SubItem><Name>PENDULUM_VALVE</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>256</BitOffs></SubItem><SubItem><Name>TURBO_PUMP</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>264</BitOffs></SubItem><SubItem><Name>CHILLER1</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>272</BitOffs></SubItem><SubItem><Name>CHILLER2</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>280</BitOffs></SubItem><SubItem><Name>TOLERANCE_PRESSURE</Name><Type>BOOL</Type><Comment><![CDATA[PROCESS TOLERANCE]]></Comment><BitSize>8</BitSize><BitOffs>288</BitOffs></SubItem><SubItem><Name>TOLERANCE_MFC1</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>296</BitOffs></SubItem><SubItem><Name>TOLERANCE_MFC2</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>304</BitOffs></SubItem><SubItem><Name>TOLERANCE_MFC3</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>312</BitOffs></SubItem><SubItem><Name>TOLERANCE_MFC4</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>320</BitOffs></SubItem><SubItem><Name>TOLERANCE_MFC5</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>328</BitOffs></SubItem><SubItem><Name>TOLERANCE_MFC6</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>336</BitOffs></SubItem><SubItem><Name>TOLERANCE_MFC7</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>344</BitOffs></SubItem><SubItem><Name>TOLERANCE_MFC8</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>352</BitOffs></SubItem><SubItem><Name>TOLERANCE_MFC9</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>360</BitOffs></SubItem><SubItem><Name>TOLERANCE_WALL_TEMP</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>368</BitOffs></SubItem><SubItem><Name>TOLERANCE_LID_TEMP</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>376</BitOffs></SubItem><SubItem><Name>TOLERANCE_STAGE_EDGE_TEMP</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>384</BitOffs></SubItem><SubItem><Name>TOLERANCE_STAGE_CENTER_TEMP</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>392</BitOffs></SubItem></DataType><DataType><Name>Info</Name><BitSize>720</BitSize><SubItem><Name>Warning</Name><Type>Warning</Type><BitSize>320</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>Alarm</Name><Type>Alarm</Type><BitSize>400</BitSize><BitOffs>320</BitOffs></SubItem></DataType><DataType><Name>ProcessRecipeFeedBack</Name><BitSize>64</BitSize><SubItem><Name>ProcessStart</Name><Type>BOOL</Type><Comment><![CDATA[start process]]></Comment><BitSize>8</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>ProcessFinished</Name><Type>BOOL</Type><Comment><![CDATA[finish process]]></Comment><BitSize>8</BitSize><BitOffs>8</BitOffs></SubItem><SubItem><Name>ProcessError</Name><Type>INT</Type><Comment><![CDATA[0:	1:	2:]]></Comment><BitSize>16</BitSize><BitOffs>16</BitOffs></SubItem><SubItem><Name>CurrentStepNo</Name><Type>INT</Type><Comment><![CDATA[current step No]]></Comment><BitSize>16</BitSize><BitOffs>32</BitOffs></SubItem><SubItem><Name>CurrentStepstart</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>48</BitOffs></SubItem><SubItem><Name>CurrentStepFinished</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>56</BitOffs></SubItem></DataType><DataType><Name GUID="{5456DAC5-9FA5-4A6B-B497-840FCC690FDD}" Namespace="PLC" TcBaseType="true">PlcLicenseInfo</Name><BitSize>1024</BitSize><SubItem><Name>LicenseId</Name><Type GUID="{18071995-0000-0000-0000-000000000021}">GUID</Type><BitSize>128</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>Instances</Name><Type GUID="{18071995-0000-0000-0000-000000000008}">UDINT</Type><BitSize>32</BitSize><BitOffs>128</BitOffs></SubItem><SubItem><Name>LicenseName</Name><Type GUID="{18071995-0000-0000-0000-00010000005F}">STRING(95)</Type><BitSize>768</BitSize><BitOffs>256</BitOffs></SubItem></DataType><DataType><Name GUID="{4591E628-DBCE-4E33-AE0B-7EB853AA256E}" Namespace="PLC" TcBaseType="true">EPlcPersistentStatus</Name><BitSize>8</BitSize><BaseType GUID="{18071995-0000-0000-0000-000000000002}">USINT</BaseType><EnumInfo><Text><![CDATA[PS_None]]></Text><Enum>0</Enum></EnumInfo><EnumInfo><Text><![CDATA[PS_All]]></Text><Enum>1</Enum></EnumInfo><EnumInfo><Text><![CDATA[PS_Partial]]></Text><Enum>2</Enum></EnumInfo></DataType><DataType><Name GUID="{941FDF6E-37CE-4C30-AA23-3236AFA461E2}" Namespace="PLC" TcBaseType="true">PlcAppSystemInfo</Name><BitSize>2048</BitSize><SubItem><Name>ObjId</Name><Type GUID="{18071995-0000-0000-0000-00000000000F}">OTCID</Type><BitSize>32</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>TaskCnt</Name><Type GUID="{18071995-0000-0000-0000-000000000008}">UDINT</Type><BitSize>32</BitSize><BitOffs>32</BitOffs></SubItem><SubItem><Name>OnlineChangeCnt</Name><Type GUID="{18071995-0000-0000-0000-000000000008}">UDINT</Type><BitSize>32</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>Flags</Name><Type GUID="{18071995-0000-0000-0000-000000000007}">DWORD</Type><BitSize>32</BitSize><BitOffs>96</BitOffs></SubItem><SubItem><Name>AdsPort</Name><Type GUID="{18071995-0000-0000-0000-000000000005}">UINT</Type><BitSize>16</BitSize><BitOffs>128</BitOffs></SubItem><SubItem><Name>BootDataLoaded</Name><Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type><BitSize>8</BitSize><BitOffs>144</BitOffs></SubItem><SubItem><Name>OldBootData</Name><Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type><BitSize>8</BitSize><BitOffs>152</BitOffs></SubItem><SubItem><Name>AppTimestamp</Name><Type GUID="{18071995-0000-0000-0000-00000000004C}">DT</Type><BitSize>32</BitSize><BitOffs>160</BitOffs></SubItem><SubItem><Name>KeepOutputsOnBP</Name><Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type><BitSize>8</BitSize><BitOffs>192</BitOffs></SubItem><SubItem><Name>ShutdownInProgress</Name><Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type><BitSize>8</BitSize><BitOffs>200</BitOffs></SubItem><SubItem><Name>LicensesPending</Name><Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type><BitSize>8</BitSize><BitOffs>208</BitOffs></SubItem><SubItem><Name>BSODOccured</Name><Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type><BitSize>8</BitSize><BitOffs>216</BitOffs></SubItem><SubItem><Name>LoggedIn</Name><Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type><BitSize>8</BitSize><BitOffs>224</BitOffs></SubItem><SubItem><Name>PersistentStatus</Name><Type GUID="{4591E628-DBCE-4E33-AE0B-7EB853AA256E}" Namespace="PLC">EPlcPersistentStatus</Type><BitSize>8</BitSize><BitOffs>232</BitOffs></SubItem><SubItem><Name>TComSrvPtr</Name><Type GUID="{00000030-0000-0000-E000-000000000064}">ITComObjectServer</Type><BitSize X64="64">32</BitSize><BitOffs>256</BitOffs><Properties><Property><Name>TcComInterface</Name></Property></Properties></SubItem><SubItem><Name>AppName</Name><Type GUID="{18071995-0000-0000-0000-00010000003F}">STRING(63)</Type><BitSize>512</BitSize><BitOffs>512</BitOffs></SubItem><SubItem><Name>ProjectName</Name><Type GUID="{18071995-0000-0000-0000-00010000003F}">STRING(63)</Type><BitSize>512</BitSize><BitOffs>1024</BitOffs></SubItem><Hides><Hide GUID="{D91E046A-A488-4D27-8D43-0F3C40ED5081}" /><Hide GUID="{5DCEB2BC-E196-43AD-80B7-EBACF31A430B}" /><Hide GUID="{1B9FDDE4-B3B7-4F0F-AB14-24EDC2F643E7}" /><Hide GUID="{C1C52E30-BC0B-44CA-BF39-E2FE7F2D145C}" /><Hide GUID="{5C8FF47F-7F83-4493-8D21-F1FF8A08F75A}" /></Hides></DataType><DataType><Name GUID="{56294066-FFF7-46F3-8206-FA06A30B13BA}" Namespace="PLC" TcBaseType="true">PlcTaskSystemInfo</Name><BitSize>1024</BitSize><SubItem><Name>ObjId</Name><Type GUID="{18071995-0000-0000-0000-00000000000F}">OTCID</Type><BitSize>32</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>CycleTime</Name><Type GUID="{18071995-0000-0000-0000-000000000008}">UDINT</Type><BitSize>32</BitSize><BitOffs>32</BitOffs></SubItem><SubItem><Name>Priority</Name><Type GUID="{18071995-0000-0000-0000-000000000005}">UINT</Type><BitSize>16</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>AdsPort</Name><Type GUID="{18071995-0000-0000-0000-000000000005}">UINT</Type><BitSize>16</BitSize><BitOffs>80</BitOffs></SubItem><SubItem><Name>CycleCount</Name><Type GUID="{18071995-0000-0000-0000-000000000008}">UDINT</Type><BitSize>32</BitSize><BitOffs>96</BitOffs></SubItem><SubItem><Name>DcTaskTime</Name><Type GUID="{18071995-0000-0000-0000-00000000000C}">LINT</Type><BitSize>64</BitSize><BitOffs>128</BitOffs></SubItem><SubItem><Name>LastExecTime</Name><Type GUID="{18071995-0000-0000-0000-000000000008}">UDINT</Type><BitSize>32</BitSize><BitOffs>192</BitOffs></SubItem><SubItem><Name>FirstCycle</Name><Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type><BitSize>8</BitSize><BitOffs>224</BitOffs></SubItem><SubItem><Name>CycleTimeExceeded</Name><Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type><BitSize>8</BitSize><BitOffs>232</BitOffs></SubItem><SubItem><Name>InCallAfterOutputUpdate</Name><Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type><BitSize>8</BitSize><BitOffs>240</BitOffs></SubItem><SubItem><Name>RTViolation</Name><Type GUID="{18071995-0000-0000-0000-000000000030}">BOOL</Type><BitSize>8</BitSize><BitOffs>248</BitOffs></SubItem><SubItem><Name>TaskName</Name><Type GUID="{18071995-0000-0000-0000-00010000003F}">STRING(63)</Type><BitSize>512</BitSize><BitOffs>512</BitOffs></SubItem><Hides><Hide GUID="{6A76D020-03A2-465C-A678-C341951E9EF3}" /><Hide GUID="{6F7D679F-72A0-4831-A7F1-085F839743ED}" /></Hides></DataType><DataType><Name>_Implicit_KindOfTask</Name><BitSize>16</BitSize><BaseType>INT</BaseType><EnumInfo><Text>_implicit_cyclic</Text><Enum>0</Enum></EnumInfo><EnumInfo><Text>_implicit_event</Text><Enum>1</Enum></EnumInfo><EnumInfo><Text>_implicit_external</Text><Enum>2</Enum></EnumInfo><EnumInfo><Text>_implicit_freewheeling</Text><Enum>3</Enum></EnumInfo><Properties><Property><Name>hide</Name></Property><Property><Name>generate_implicit_init_function</Name></Property></Properties></DataType><DataType><Name>_Implicit_Jitter_Distribution</Name><BitSize>48</BitSize><SubItem><Name>wRangeMax</Name><Type>WORD</Type><BitSize>16</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>wCountJitterNeg</Name><Type>WORD</Type><BitSize>16</BitSize><BitOffs>16</BitOffs></SubItem><SubItem><Name>wCountJitterPos</Name><Type>WORD</Type><BitSize>16</BitSize><BitOffs>32</BitOffs></SubItem><Properties><Property><Name>hide</Name></Property></Properties></DataType><DataType><Name>_Implicit_Task_Info</Name><BitSize>896</BitSize><SubItem><Name>dwVersion</Name><Type>DWORD</Type><BitSize>32</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>pszName</Name><Type PointerTo="1">STRING(80)</Type><BitSize>64</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>nPriority</Name><Type>INT</Type><BitSize>16</BitSize><BitOffs>128</BitOffs></SubItem><SubItem><Name>KindOf</Name><Type>_Implicit_KindOfTask</Type><BitSize>16</BitSize><BitOffs>144</BitOffs></SubItem><SubItem><Name>bWatchdog</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>160</BitOffs></SubItem><SubItem><Name>bProfilingTask</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>168</BitOffs></SubItem><SubItem><Name>dwEventFunctionPointer</Name><Type PointerTo="1">BYTE</Type><BitSize>64</BitSize><BitOffs>192</BitOffs></SubItem><SubItem><Name>pszExternalEvent</Name><Type PointerTo="1">STRING(80)</Type><BitSize>64</BitSize><BitOffs>256</BitOffs></SubItem><SubItem><Name>dwTaskEntryFunctionPointer</Name><Type PointerTo="1">BYTE</Type><BitSize>64</BitSize><BitOffs>320</BitOffs></SubItem><SubItem><Name>dwWatchdogSensitivity</Name><Type>DWORD</Type><BitSize>32</BitSize><BitOffs>384</BitOffs></SubItem><SubItem><Name>dwInterval</Name><Type>DWORD</Type><BitSize>32</BitSize><BitOffs>416</BitOffs></SubItem><SubItem><Name>dwWatchdogTime</Name><Type>DWORD</Type><BitSize>32</BitSize><BitOffs>448</BitOffs></SubItem><SubItem><Name>dwLastCycleTime</Name><Type>DWORD</Type><BitSize>32</BitSize><BitOffs>480</BitOffs></SubItem><SubItem><Name>dwAverageCycleTime</Name><Type>DWORD</Type><BitSize>32</BitSize><BitOffs>512</BitOffs></SubItem><SubItem><Name>dwMaxCycleTime</Name><Type>DWORD</Type><BitSize>32</BitSize><BitOffs>544</BitOffs></SubItem><SubItem><Name>dwMinCycleTime</Name><Type>DWORD</Type><BitSize>32</BitSize><BitOffs>576</BitOffs></SubItem><SubItem><Name>diJitter</Name><Type>DINT</Type><BitSize>32</BitSize><BitOffs>608</BitOffs></SubItem><SubItem><Name>diJitterMin</Name><Type>DINT</Type><BitSize>32</BitSize><BitOffs>640</BitOffs></SubItem><SubItem><Name>diJitterMax</Name><Type>DINT</Type><BitSize>32</BitSize><BitOffs>672</BitOffs></SubItem><SubItem><Name>dwCycleCount</Name><Type>DWORD</Type><BitSize>32</BitSize><BitOffs>704</BitOffs></SubItem><SubItem><Name>wTaskStatus</Name><Type>WORD</Type><BitSize>16</BitSize><BitOffs>736</BitOffs></SubItem><SubItem><Name>wNumOfJitterDistributions</Name><Type>WORD</Type><BitSize>16</BitSize><BitOffs>752</BitOffs></SubItem><SubItem><Name>pJitterDistribution</Name><Type PointerTo="1">_Implicit_Jitter_Distribution</Type><BitSize>64</BitSize><BitOffs>768</BitOffs></SubItem><SubItem><Name>bWithinSPSTimeSlicing</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>832</BitOffs></SubItem><SubItem><Name>byDummy</Name><Type>BYTE</Type><BitSize>8</BitSize><BitOffs>840</BitOffs></SubItem><SubItem><Name>bShouldBlock</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>848</BitOffs></SubItem><SubItem><Name>bActive</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>856</BitOffs></SubItem><SubItem><Name>dwIECCycleCount</Name><Type>DWORD</Type><BitSize>32</BitSize><BitOffs>864</BitOffs></SubItem><Properties><Property><Name>hide</Name></Property></Properties></DataType><DataType><Name>SPLC_TO_PLC</Name><BitSize>184</BitSize><SubItem><Name>EV1_EN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>0</BitOffs></SubItem><SubItem><Name>EV2_EN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>8</BitOffs></SubItem><SubItem><Name>EV3_EN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>16</BitOffs></SubItem><SubItem><Name>EV4_EN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>24</BitOffs></SubItem><SubItem><Name>HTR_APC_EN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>32</BitOffs></SubItem><SubItem><Name>HTR_CHAMBER_EN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>40</BitOffs></SubItem><SubItem><Name>HTR_FORLINE_EN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>48</BitOffs></SubItem><SubItem><Name>HTR_GAS_BOX</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>56</BitOffs></SubItem><SubItem><Name>HTR_GATE_VALVE</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>64</BitOffs></SubItem><SubItem><Name>HTR_LID</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>72</BitOffs></SubItem><SubItem><Name>PROCESS_EN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>80</BitOffs></SubItem><SubItem><Name>DRY_PUMP_PW_EN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>88</BitOffs></SubItem><SubItem><Name>TMP_PW_EN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>96</BitOffs></SubItem><SubItem><Name>TRANSFER_EN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>104</BitOffs></SubItem><SubItem><Name>VALVE_ACID_EXHAUST_OPEN_EN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>112</BitOffs></SubItem><SubItem><Name>VALVE_CM_OPEN_EN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>120</BitOffs></SubItem><SubItem><Name>VALVE_DRY_PUMP_EN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>128</BitOffs></SubItem><SubItem><Name>VALVE_TMP_BACK_OPEN_EN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>136</BitOffs></SubItem><SubItem><Name>VALVE_APC_OPEN_EN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>144</BitOffs></SubItem><SubItem><Name>WAFER_MOVING_IN_EN</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>152</BitOffs></SubItem><SubItem><Name>Status_Lid</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>160</BitOffs></SubItem><SubItem><Name>SPLC_Com_err</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>168</BitOffs></SubItem><SubItem><Name>SPLC_FB_Err</Name><Type>BOOL</Type><BitSize>8</BitSize><BitOffs>176</BitOffs></SubItem></DataType></DataTypes><Modules><Module GUID="{D5EA4ABF-7810-4317-B828-283A9FD58378}" TcSmClass="TComPlcObjDef" TargetPlatform="TwinCAT RT (x64)"><Name>PLC</Name><CLSID ClassFactory="TcPlc30">{08500001-0000-0000-F000-000000000064}</CLSID><Licenses><License><LicenseId>{1eebbaaa-51e1-4750-9d6a-7b04116ea32b}</LicenseId><Comment>TF4110 Temperature Controller</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License><License><LicenseId>{777f1598-583b-4503-99bb-7c02e0abd97e}</LicenseId><Comment>TF4100 TC3 Controller Toolbox</Comment></License></Licenses><Contexts><Context><Id NeedCalleeCall="true">0</Id><Name>PlcTask</Name><ManualConfig><OTCID>#x02010030</OTCID></ManualConfig></Context></Contexts><Parameters /><DataAreas><DataArea><AreaNo AreaType="InputDst" CreateSymbols="true">0</AreaNo><Name>PlcTask Inputs</Name><ContextId>0</ContextId><ByteSize>851968</ByteSize><Symbol><Name>ECC.CHAMBER_IN</Name><Comment><![CDATA[HW_IO]]></Comment><BitSize>832</BitSize><BaseType>CHAMBER_IN</BaseType><Properties><Property><Name>TcAddressType</Name><Value>Input</Value></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3693376</BitOffs></Symbol><Symbol><Name>ECC.IGS_IN</Name><BitSize>704</BitSize><BaseType>IGS_IN</BaseType><Properties><Property><Name>TcAddressType</Name><Value>Input</Value></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3694624</BitOffs></Symbol><Symbol><Name>ECC.MFC_PV</Name><Comment><![CDATA[MFC]]></Comment><BitSize>2240</BitSize><BaseType>STR_FCSP700_INPUT</BaseType><ArrayInfo><LBound>1</LBound><Elements>10</Elements></ArrayInfo><Properties><Property><Name>TcAddressType</Name><Value>Input</Value></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3695488</BitOffs></Symbol><Symbol><Name>ECC.APC_PV</Name><Comment><![CDATA[APC VALVE]]></Comment><BitSize>224</BitSize><BaseType>VAT_IN</BaseType><Properties><Property><Name>TcAddressType</Name><Value>Input</Value></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3699136</BitOffs></Symbol><Symbol><Name>ECC.TURBO_PV</Name><BitSize>112</BitSize><BaseType>TMP_IN</BaseType><Properties><Property><Name>TcAddressType</Name><Value>Input</Value></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3699552</BitOffs></Symbol><Symbol><Name>ECC.VG103_PV</Name><Comment><![CDATA[CDG PG/VG]]></Comment><BitSize>192</BitSize><BaseType>STR_CDG200D</BaseType><Properties><Property><Name>TcAddressType</Name><Value>Input</Value></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3699680</BitOffs></Symbol><Symbol><Name>ECC.VG101_PV</Name><BitSize>192</BitSize><BaseType>STR_CDG200D</BaseType><Properties><Property><Name>TcAddressType</Name><Value>Input</Value></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3699872</BitOffs></Symbol><Symbol><Name>ECC.VG102_PV</Name><BitSize>192</BitSize><BaseType>STR_CDG200D</BaseType><Properties><Property><Name>TcAddressType</Name><Value>Input</Value></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3700064</BitOffs></Symbol><Symbol><Name>ECC.BA1_PV</Name><BitSize>224</BitSize><BaseType>STR_BPG400</BaseType><Properties><Property><Name>TcAddressType</Name><Value>Input</Value></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3700256</BitOffs></Symbol><Symbol><Name>ECC.VG104_PV</Name><BitSize>192</BitSize><BaseType>STR_CDG200D</BaseType><Properties><Property><Name>TcAddressType</Name><Value>Input</Value></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3700480</BitOffs></Symbol><Symbol><Name>ECC.CHILLER1_PV</Name><Comment><![CDATA[CHILLER]]></Comment><BitSize>288</BitSize><BaseType>CHILLER_IN</BaseType><Properties><Property><Name>TcAddressType</Name><Value>Input</Value></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3700672</BitOffs></Symbol><Symbol><Name>ECC.CHILLER2_PV</Name><BitSize>288</BitSize><BaseType>CHILLER_IN</BaseType><Properties><Property><Name>TcAddressType</Name><Value>Input</Value></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3701248</BitOffs></Symbol><Symbol><Name>GV_IL.SPLC_TO_PLC</Name><BitSize>184</BitSize><BaseType>SPLC_TO_PLC</BaseType><Properties><Property><Name>TcAddressType</Name><Value>Input</Value></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4857536</BitOffs></Symbol></DataArea><DataArea><AreaNo AreaType="OutputSrc" CreateSymbols="true">1</AreaNo><Name>PlcTask Outputs</Name><ContextId>0</ContextId><ByteSize>851968</ByteSize><Symbol><Name>ECC.TURBO_SV</Name><Comment><![CDATA[TMP]]></Comment><BitSize>8</BitSize><BaseType>TMP_OUT</BaseType><Properties><Property><Name>TcAddressType</Name><Value>Output</Value></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3235176</BitOffs></Symbol><Symbol><Name>ECC.CHAMBER_OUT</Name><BitSize>416</BitSize><BaseType>CHAMBER_OUT</BaseType><Properties><Property><Name>TcAddressType</Name><Value>Output</Value></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3694208</BitOffs></Symbol><Symbol><Name>ECC.IGS_OUT</Name><BitSize>160</BitSize><BaseType>IGS_OUT</BaseType><Properties><Property><Name>TcAddressType</Name><Value>Output</Value></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3695328</BitOffs></Symbol><Symbol><Name>ECC.MFC_SV</Name><BitSize>1280</BitSize><BaseType>STR_FCSP700_OUTPUT</BaseType><ArrayInfo><LBound>1</LBound><Elements>10</Elements></ArrayInfo><Properties><Property><Name>TcAddressType</Name><Value>Output</Value></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3697728</BitOffs></Symbol><Symbol><Name>ECC.EV1</Name><Comment><![CDATA[EV]]></Comment><BitSize>32</BitSize><BaseType>STR_EX260_SEC</BaseType><Properties><Property><Name>TcAddressType</Name><Value>Output</Value></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3699008</BitOffs></Symbol><Symbol><Name>ECC.EV2</Name><BitSize>32</BitSize><BaseType>STR_EX260_SEC</BaseType><Properties><Property><Name>TcAddressType</Name><Value>Output</Value></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3699040</BitOffs></Symbol><Symbol><Name>ECC.EV3</Name><BitSize>32</BitSize><BaseType>STR_EX260_SEC</BaseType><Properties><Property><Name>TcAddressType</Name><Value>Output</Value></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3699072</BitOffs></Symbol><Symbol><Name>ECC.EV4</Name><BitSize>32</BitSize><BaseType>STR_EX260_SEC</BaseType><Properties><Property><Name>TcAddressType</Name><Value>Output</Value></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3699104</BitOffs></Symbol><Symbol><Name>ECC.APC_SV</Name><BitSize>192</BitSize><BaseType>VAT_OUT</BaseType><Properties><Property><Name>TcAddressType</Name><Value>Output</Value></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3699360</BitOffs></Symbol><Symbol><Name>ECC.CHILLER1_SV</Name><BitSize>288</BitSize><BaseType>CHILLER_OUT</BaseType><Properties><Property><Name>TcAddressType</Name><Value>Output</Value></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3700960</BitOffs></Symbol><Symbol><Name>ECC.CHILLER2_SV</Name><BitSize>288</BitSize><BaseType>CHILLER_OUT</BaseType><Properties><Property><Name>TcAddressType</Name><Value>Output</Value></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3701536</BitOffs></Symbol><Symbol><Name>GV_IL.PLC_TO_SPLC</Name><BitSize>96</BitSize><BaseType>PLC_TO_SPLC</BaseType><Properties><Property><Name>TcAddressType</Name><Value>Output</Value></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4192248</BitOffs></Symbol></DataArea><DataArea><AreaNo AreaType="Internal" CreateSymbols="true">3</AreaNo><Name>PlcTask Internal</Name><ContextId>0</ContextId><ByteSize>851968</ByteSize><Symbol><Name>Global_Version.stLibVersion_Tc2_ControllerToolbox</Name><BitSize>288</BitSize><BaseType GUID="{6F5942ED-BFA1-497D-8225-23C6DAAD0A09}">ST_LibVersion</BaseType><Default><SubItem><Name>.iMajor</Name><Value>3</Value></SubItem><SubItem><Name>.iMinor</Name><Value>6</Value></SubItem><SubItem><Name>.iBuild</Name><Value>1</Value></SubItem><SubItem><Name>.iRevision</Name><Value>0</Value></SubItem><SubItem><Name>.nFlags</Name><Value>1</Value></SubItem><SubItem><Name>.sVersion</Name><String>3.6.1.0</String></SubItem></Default><Properties><Property><Name>const_non_replaced</Name></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3072000</BitOffs></Symbol><Symbol><Name>Global_Variables.nCTRL_LOGGER_DATA_ARRAY_SIZE</Name><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>10</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3072288</BitOffs></Symbol><Symbol><Name>Global_Variables.AMSPORT_LOGGER</Name><Comment><![CDATA[ Logger ]]></Comment><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>100</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3072304</BitOffs></Symbol><Symbol><Name>Global_Variables.stCtrl_GLOBAL_CycleTimeInterpretation</Name><BitSize>128</BitSize><BaseType Namespace="Tc2_ControllerToolbox">ST_CTRL_CYCLE_TIME_INTERPRETATION</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3072320</BitOffs></Symbol><Symbol><Name>Global_Version.stLibVersion_Tc2_Standard</Name><BitSize>288</BitSize><BaseType GUID="{6F5942ED-BFA1-497D-8225-23C6DAAD0A09}">ST_LibVersion</BaseType><Default><SubItem><Name>.iMajor</Name><Value>3</Value></SubItem><SubItem><Name>.iMinor</Name><Value>4</Value></SubItem><SubItem><Name>.iBuild</Name><Value>5</Value></SubItem><SubItem><Name>.iRevision</Name><Value>0</Value></SubItem><SubItem><Name>.nFlags</Name><Value>1</Value></SubItem><SubItem><Name>.sVersion</Name><String>3.4.5.0</String></SubItem></Default><Properties><Property><Name>const_non_replaced</Name></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3072448</BitOffs></Symbol><Symbol><Name>Global_Version.stLibVersion_Tc2_System</Name><BitSize>288</BitSize><BaseType GUID="{6F5942ED-BFA1-497D-8225-23C6DAAD0A09}">ST_LibVersion</BaseType><Default><SubItem><Name>.iMajor</Name><Value>3</Value></SubItem><SubItem><Name>.iMinor</Name><Value>6</Value></SubItem><SubItem><Name>.iBuild</Name><Value>4</Value></SubItem><SubItem><Name>.iRevision</Name><Value>0</Value></SubItem><SubItem><Name>.nFlags</Name><Value>1</Value></SubItem><SubItem><Name>.sVersion</Name><String>3.6.4.0</String></SubItem></Default><Properties><Property><Name>const_non_replaced</Name></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3072736</BitOffs></Symbol><Symbol><Name>Global_Variables.AMSPORT_EVENTLOG</Name><Comment><![CDATA[ Event logger ]]></Comment><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>110</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073024</BitOffs></Symbol><Symbol><Name>Global_Variables.AMSPORT_R0_RTIME</Name><Comment><![CDATA[ R0 Real time ]]></Comment><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>200</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073040</BitOffs></Symbol><Symbol><Name>Global_Variables.AMSPORT_R0_IO</Name><Comment><![CDATA[ I/O Driver ]]></Comment><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>300</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073056</BitOffs></Symbol><Symbol><Name>Global_Variables.AMSPORT_R0_NC</Name><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>500</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073072</BitOffs></Symbol><Symbol><Name>Global_Variables.AMSPORT_R0_NCSAF</Name><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>501</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073088</BitOffs></Symbol><Symbol><Name>Global_Variables.AMSPORT_R0_NCSVB</Name><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>511</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073104</BitOffs></Symbol><Symbol><Name>Global_Variables.AMSPORT_R0_ISG</Name><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>550</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073120</BitOffs></Symbol><Symbol><Name>Global_Variables.AMSPORT_R0_CNC</Name><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>600</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073136</BitOffs></Symbol><Symbol><Name>Global_Variables.AMSPORT_R0_LINE</Name><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>700</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073152</BitOffs></Symbol><Symbol><Name>Global_Variables.AMSPORT_R0_PLC</Name><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>800</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073168</BitOffs></Symbol><Symbol><Name>Global_Variables.AMSPORT_R0_PLC_RTS1</Name><Comment><![CDATA[ TwinCAT v2.xx first PLC runtime system ]]></Comment><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>801</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073184</BitOffs></Symbol><Symbol><Name>Global_Variables.AMSPORT_R0_PLC_RTS2</Name><Comment><![CDATA[ TwinCAT v2.xx second PLC runtime system ]]></Comment><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>811</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073200</BitOffs></Symbol><Symbol><Name>Global_Variables.AMSPORT_R0_PLC_RTS3</Name><Comment><![CDATA[ TwinCAT v2.xx third PLC runtime system ]]></Comment><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>821</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073216</BitOffs></Symbol><Symbol><Name>Global_Variables.AMSPORT_R0_PLC_RTS4</Name><Comment><![CDATA[ TwinCAT v2.xx fourth PLC runtime system ]]></Comment><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>831</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073232</BitOffs></Symbol><Symbol><Name>Global_Variables.AMSPORT_R0_CAM</Name><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>900</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073248</BitOffs></Symbol><Symbol><Name>Global_Variables.AMSPORT_R0_CAMTOOL</Name><Comment><![CDATA[ Camming tool ]]></Comment><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>950</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073264</BitOffs></Symbol><Symbol><Name>Global_Variables.AMSPORT_R3_SYSSERV</Name><Comment><![CDATA[ TwinCAT System Service ]]></Comment><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>10000</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073280</BitOffs></Symbol><Symbol><Name>Global_Variables.AMSPORT_R3_SCOPESERVER</Name><Comment><![CDATA[ TwinCAT Scope Server ]]></Comment><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>14001</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073296</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSSTATE_INVALID</Name><Comment><![CDATA[ Invalid ADS state ]]></Comment><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>0</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073312</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSSTATE_IDLE</Name><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>1</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073328</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSSTATE_RESET</Name><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>2</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073344</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSSTATE_INIT</Name><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>3</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073360</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSSTATE_START</Name><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>4</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073376</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSSTATE_RUN</Name><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>5</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073392</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSSTATE_STOP</Name><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>6</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073408</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSSTATE_SAVECFG</Name><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>7</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073424</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSSTATE_LOADCFG</Name><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>8</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073440</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSSTATE_POWERFAILURE</Name><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>9</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073456</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSSTATE_POWERGOOD</Name><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>10</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073472</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSSTATE_ERROR</Name><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>11</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073488</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSSTATE_SHUTDOWN</Name><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>12</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073504</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSSTATE_SUSPEND</Name><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>13</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073520</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSSTATE_RESUME</Name><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>14</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073536</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSSTATE_CONFIG</Name><Comment><![CDATA[ System is in config mode ]]></Comment><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>15</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073552</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSSTATE_RECONFIG</Name><Comment><![CDATA[ System should restart in config mode ]]></Comment><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>16</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073568</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSSTATE_STOPPING</Name><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>17</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073584</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSSTATE_INCOMPATIBLE</Name><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>18</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073600</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSSTATE_EXCEPTION</Name><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>19</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073616</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSSTATE_MAXSTATES</Name><Comment><![CDATA[ Max. number of available ads states ]]></Comment><BitSize>16</BitSize><BaseType>UINT</BaseType><Default><Value>20</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073632</BitOffs></Symbol><Symbol><Name>Global_Variables.BOOTDATAFLAGS_RETAIN_LOADED</Name><Comment><![CDATA[ Retain data loaded ]]></Comment><BitSize>8</BitSize><BaseType>BYTE</BaseType><Default><Value>1</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073648</BitOffs></Symbol><Symbol><Name>Global_Variables.BOOTDATAFLAGS_RETAIN_INVALID</Name><Comment><![CDATA[ Retain data is invalid ]]></Comment><BitSize>8</BitSize><BaseType>BYTE</BaseType><Default><Value>2</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073656</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSIGRP_SYMTAB</Name><Comment><![CDATA[ Symbol table ]]></Comment><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>61440</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073664</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSIGRP_SYMNAME</Name><Comment><![CDATA[ Symbol name ]]></Comment><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>61441</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073696</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSIGRP_SYMVAL</Name><Comment><![CDATA[ Symbol value ]]></Comment><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>61442</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073728</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSIGRP_SYM_HNDBYNAME</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>61443</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073760</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSIGRP_SYM_VALBYNAME</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>61444</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073792</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSIGRP_SYM_VALBYHND</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>61445</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073824</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSIGRP_SYM_RELEASEHND</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>61446</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073856</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSIGRP_SYM_INFOBYNAME</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>61447</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073888</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSIGRP_SYM_VERSION</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>61448</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073920</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSIGRP_SYM_INFOBYNAMEEX</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>61449</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073952</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSIGRP_SYM_DOWNLOAD</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>61450</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3073984</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSIGRP_SYM_UPLOAD</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>61451</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074016</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSIGRP_SYM_UPLOADINFO</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>61452</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074048</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSIGRP_SYMNOTE</Name><Comment><![CDATA[ Notification of named handle ]]></Comment><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>61456</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074080</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSIGRP_IOIMAGE_RWIB</Name><Comment><![CDATA[ Read/write input BYTE(S) ]]></Comment><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>61472</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074112</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSIGRP_IOIMAGE_RWIX</Name><Comment><![CDATA[ Read/write input bit ]]></Comment><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>61473</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074144</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSIGRP_IOIMAGE_RISIZE</Name><Comment><![CDATA[ Read input size (in BYTE) ]]></Comment><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>61477</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074176</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSIGRP_IOIMAGE_RWOB</Name><Comment><![CDATA[ Read/write output BYTE(S) ]]></Comment><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>61488</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074208</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSIGRP_IOIMAGE_RWOX</Name><Comment><![CDATA[ Read/write output bit ]]></Comment><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>61489</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074240</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSIGRP_IOIMAGE_ROSIZE</Name><Comment><![CDATA[ Read/write output bit ]]></Comment><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>61493</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074272</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSIGRP_IOIMAGE_CLEARI</Name><Comment><![CDATA[ Write inputs TO null ]]></Comment><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>61504</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074304</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSIGRP_IOIMAGE_CLEARO</Name><Comment><![CDATA[ Write outputs TO null ]]></Comment><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>61520</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074336</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSIGRP_IOIMAGE_RWIOB</Name><Comment><![CDATA[ Read input AND write output BYTE(S)  ADS-READWRITE ]]></Comment><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>61536</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074368</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSIGRP_DEVICE_DATA</Name><Comment><![CDATA[ State, name, etc... ]]></Comment><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>61696</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074400</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSIOFFS_DEVDATA_ADSSTATE</Name><Comment><![CDATA[ Ads state OF device ]]></Comment><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>0</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074432</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSIOFFS_DEVDATA_DEVSTATE</Name><Comment><![CDATA[ Device state ]]></Comment><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>2</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074464</BitOffs></Symbol><Symbol><Name>Global_Variables.SYSTEMSERVICE_OPENCREATE</Name><Comment><![CDATA[ Open and if not existing create ]]></Comment><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>100</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074496</BitOffs></Symbol><Symbol><Name>Global_Variables.SYSTEMSERVICE_OPENREAD</Name><Comment><![CDATA[ Open existing for read access ]]></Comment><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>101</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074528</BitOffs></Symbol><Symbol><Name>Global_Variables.SYSTEMSERVICE_OPENWRITE</Name><Comment><![CDATA[ Open existing for write access ]]></Comment><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>102</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074560</BitOffs></Symbol><Symbol><Name>Global_Variables.SYSTEMSERVICE_CREATEFILE</Name><Comment><![CDATA[ Create ]]></Comment><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>110</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074592</BitOffs></Symbol><Symbol><Name>Global_Variables.SYSTEMSERVICE_CLOSEHANDLE</Name><Comment><![CDATA[ Close ]]></Comment><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>111</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074624</BitOffs></Symbol><Symbol><Name>Global_Variables.SYSTEMSERVICE_FOPEN</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>120</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074656</BitOffs></Symbol><Symbol><Name>Global_Variables.SYSTEMSERVICE_FCLOSE</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>121</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074688</BitOffs></Symbol><Symbol><Name>Global_Variables.SYSTEMSERVICE_FREAD</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>122</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074720</BitOffs></Symbol><Symbol><Name>Global_Variables.SYSTEMSERVICE_FWRITE</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>123</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074752</BitOffs></Symbol><Symbol><Name>Global_Variables.SYSTEMSERVICE_FSEEK</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>124</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074784</BitOffs></Symbol><Symbol><Name>Global_Variables.SYSTEMSERVICE_FTELL</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>125</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074816</BitOffs></Symbol><Symbol><Name>Global_Variables.SYSTEMSERVICE_FGETS</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>126</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074848</BitOffs></Symbol><Symbol><Name>Global_Variables.SYSTEMSERVICE_FPUTS</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>127</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074880</BitOffs></Symbol><Symbol><Name>Global_Variables.SYSTEMSERVICE_FSCANF</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>128</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074912</BitOffs></Symbol><Symbol><Name>Global_Variables.SYSTEMSERVICE_FPRINTF</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>129</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074944</BitOffs></Symbol><Symbol><Name>Global_Variables.SYSTEMSERVICE_FEOF</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>130</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3074976</BitOffs></Symbol><Symbol><Name>Global_Variables.SYSTEMSERVICE_FDELETE</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>131</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075008</BitOffs></Symbol><Symbol><Name>Global_Variables.SYSTEMSERVICE_FRENAME</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>132</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075040</BitOffs></Symbol><Symbol><Name>Global_Variables.SYSTEMSERVICE_MKDIR</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>138</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075072</BitOffs></Symbol><Symbol><Name>Global_Variables.SYSTEMSERVICE_RMDIR</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>139</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075104</BitOffs></Symbol><Symbol><Name>Global_Variables.SYSTEMSERVICE_REG_HKEYLOCALMACHINE</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>200</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075136</BitOffs></Symbol><Symbol><Name>Global_Variables.SYSTEMSERVICE_SENDEMAIL</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>300</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075168</BitOffs></Symbol><Symbol><Name>Global_Variables.SYSTEMSERVICE_TIMESERVICES</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>400</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075200</BitOffs></Symbol><Symbol><Name>Global_Variables.SYSTEMSERVICE_STARTPROCESS</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>500</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075232</BitOffs></Symbol><Symbol><Name>Global_Variables.SYSTEMSERVICE_CHANGENETID</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>600</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075264</BitOffs></Symbol><Symbol><Name>Global_Variables.TIMESERVICE_DATEANDTIME</Name><Comment><![CDATA[ Date/time ]]></Comment><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>1</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075296</BitOffs></Symbol><Symbol><Name>Global_Variables.TIMESERVICE_SYSTEMTIMES</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>2</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075328</BitOffs></Symbol><Symbol><Name>Global_Variables.TIMESERVICE_RTCTIMEDIFF</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>3</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075360</BitOffs></Symbol><Symbol><Name>Global_Variables.TIMESERVICE_ADJUSTTIMETORTC</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>4</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075392</BitOffs></Symbol><Symbol><Name>Global_Variables.TIMESERVICE_TIMEZONINFORMATION</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>6</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075424</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSLOG_MSGTYPE_HINT</Name><Comment><![CDATA[ Hint icon ]]></Comment><BitSize>32</BitSize><BaseType>DWORD</BaseType><Default><Value>1</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075456</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSLOG_MSGTYPE_WARN</Name><Comment><![CDATA[ Warning icon ]]></Comment><BitSize>32</BitSize><BaseType>DWORD</BaseType><Default><Value>2</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075488</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSLOG_MSGTYPE_ERROR</Name><Comment><![CDATA[ Error icon ]]></Comment><BitSize>32</BitSize><BaseType>DWORD</BaseType><Default><Value>4</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075520</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSLOG_MSGTYPE_LOG</Name><Comment><![CDATA[ Write message to log file ]]></Comment><BitSize>32</BitSize><BaseType>DWORD</BaseType><Default><Value>16</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075552</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSLOG_MSGTYPE_MSGBOX</Name><Comment><![CDATA[ View message in message box ]]></Comment><BitSize>32</BitSize><BaseType>DWORD</BaseType><Default><Value>32</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075584</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSLOG_MSGTYPE_RESOURCE</Name><BitSize>32</BitSize><BaseType>DWORD</BaseType><Default><Value>64</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075616</BitOffs></Symbol><Symbol><Name>Global_Variables.ADSLOG_MSGTYPE_STRING</Name><BitSize>32</BitSize><BaseType>DWORD</BaseType><Default><Value>128</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075648</BitOffs></Symbol><Symbol><Name>Global_Variables.BOOTDATAFLAGS_RETAIN_REQUESTED</Name><BitSize>8</BitSize><BaseType>BYTE</BaseType><Default><Value>4</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075680</BitOffs></Symbol><Symbol><Name>Global_Variables.BOOTDATAFLAGS_PERSISTENT_LOADED</Name><Comment><![CDATA[ Persistent data loaded ]]></Comment><BitSize>8</BitSize><BaseType>BYTE</BaseType><Default><Value>16</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075688</BitOffs></Symbol><Symbol><Name>Global_Variables.BOOTDATAFLAGS_PERSISTENT_INVALID</Name><Comment><![CDATA[ Persistent data is invalid ]]></Comment><BitSize>8</BitSize><BaseType>BYTE</BaseType><Default><Value>32</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075696</BitOffs></Symbol><Symbol><Name>Global_Variables.SYSTEMSTATEFLAGS_BSOD</Name><Comment><![CDATA[ Blue screen of death ]]></Comment><BitSize>8</BitSize><BaseType>BYTE</BaseType><Default><Value>1</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075704</BitOffs></Symbol><Symbol><Name>Global_Variables.SYSTEMSTATEFLAGS_RTVIOLATION</Name><Comment><![CDATA[ Realtime violation - latency time ]]></Comment><BitSize>8</BitSize><BaseType>BYTE</BaseType><Default><Value>2</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075712</BitOffs></Symbol><Symbol><Name>Global_Variables.nWatchdogTime</Name><Comment><![CDATA[ Watchdog time. Depending of g_WatchdogConfig : seconds or minutes ]]></Comment><BitSize>8</BitSize><BaseType>BYTE</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075720</BitOffs></Symbol><Symbol><Name>Global_Variables.TCEVENTFLAG_PRIOCLASS</Name><Comment><![CDATA[ Event class/priority	through textformatter]]></Comment><BitSize>16</BitSize><BaseType>WORD</BaseType><Default><Value>16</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075728</BitOffs></Symbol><Symbol><Name>Global_Variables.FOPEN_MODEREAD</Name><Comment><![CDATA["r": Opens for reading. If the file does not exist or cannot be found, the call fails.]]></Comment><BitSize>32</BitSize><BaseType>DWORD</BaseType><Default><Value>1</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075744</BitOffs></Symbol><Symbol><Name>Global_Variables.FOPEN_MODEWRITE</Name><Comment><![CDATA["w": Opens an empty file for writing. If the given file exists, its contents are destroyed.]]></Comment><BitSize>32</BitSize><BaseType>DWORD</BaseType><Default><Value>2</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075776</BitOffs></Symbol><Symbol><Name>Global_Variables.FOPEN_MODEAPPEND</Name><Comment><![CDATA["a": Opens for writing at the end of the file (appending) without removing the EOF marker before writing new data to the file; creates the file first if it doesnot exist.]]></Comment><BitSize>32</BitSize><BaseType>DWORD</BaseType><Default><Value>4</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075808</BitOffs></Symbol><Symbol><Name>Global_Variables.FOPEN_MODEPLUS</Name><Comment><![CDATA["+": Opens for reading and writing]]></Comment><BitSize>32</BitSize><BaseType>DWORD</BaseType><Default><Value>8</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075840</BitOffs></Symbol><Symbol><Name>Global_Variables.FOPEN_MODEBINARY</Name><Comment><![CDATA["b": Open in binary (untranslated) mode.]]></Comment><BitSize>32</BitSize><BaseType>DWORD</BaseType><Default><Value>16</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075872</BitOffs></Symbol><Symbol><Name>Global_Variables.FOPEN_MODETEXT</Name><Comment><![CDATA["t": Open in text (translated) mode.]]></Comment><BitSize>32</BitSize><BaseType>DWORD</BaseType><Default><Value>32</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3075904</BitOffs></Symbol><Symbol><Name>Global_Variables.TCEVENTFLAG_FMTSELF</Name><Comment><![CDATA[ Format in message ]]></Comment><BitSize>16</BitSize><BaseType>WORD</BaseType><Default><Value>32</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3076160</BitOffs></Symbol><Symbol><Name>Global_Variables.TCEVENTFLAG_LOG</Name><Comment><![CDATA[ Write to log file ]]></Comment><BitSize>16</BitSize><BaseType>WORD</BaseType><Default><Value>64</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3076176</BitOffs></Symbol><Symbol><Name>Global_Variables.TCEVENTFLAG_MSGBOX</Name><Comment><![CDATA[ Display message box ]]></Comment><BitSize>16</BitSize><BaseType>WORD</BaseType><Default><Value>128</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3076192</BitOffs></Symbol><Symbol><Name>Global_Variables.TCEVENTFLAG_SRCID</Name><Comment><![CDATA[ Src id instead of source name ]]></Comment><BitSize>16</BitSize><BaseType>WORD</BaseType><Default><Value>256</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3076208</BitOffs></Symbol><Symbol><Name>Global_Variables.TCEVENTFLAG_AUTOFMTALL</Name><BitSize>16</BitSize><BaseType>WORD</BaseType><Default><Value>4096</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3076224</BitOffs></Symbol><Symbol><Name>Global_Variables.TCEVENTSTATE_INVALID</Name><Comment><![CDATA[ Event object is not initialized ]]></Comment><BitSize>16</BitSize><BaseType>WORD</BaseType><Default><Value>0</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3076240</BitOffs></Symbol><Symbol><Name>Global_Variables.TCEVENTSTATE_SIGNALED</Name><Comment><![CDATA[ Event object is in a signaled state ]]></Comment><BitSize>16</BitSize><BaseType>WORD</BaseType><Default><Value>1</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3076256</BitOffs></Symbol><Symbol><Name>Global_Variables.TCEVENTSTATE_RESET</Name><Comment><![CDATA[ Event object is in a reset state ]]></Comment><BitSize>16</BitSize><BaseType>WORD</BaseType><Default><Value>2</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3076272</BitOffs></Symbol><Symbol><Name>Global_Variables.TCEVENTSTATE_CONFIRMED</Name><Comment><![CDATA[ Event object is confirmed but not reset ]]></Comment><BitSize>16</BitSize><BaseType>WORD</BaseType><Default><Value>16</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3076288</BitOffs></Symbol><Symbol><Name>Global_Variables.TCEVENTSTATE_RESETCON</Name><Comment><![CDATA[ Event object is confirmed and reset ]]></Comment><BitSize>16</BitSize><BaseType>WORD</BaseType><Default><Value>18</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3076304</BitOffs></Symbol><Symbol><Name>Global_Variables.TCEVENT_SRCNAMESIZE</Name><BitSize>16</BitSize><BaseType>INT</BaseType><Default><Value>15</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3076320</BitOffs></Symbol><Symbol><Name>Global_Variables.TCEVENT_FMTPRGSIZE</Name><BitSize>16</BitSize><BaseType>INT</BaseType><Default><Value>31</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3076336</BitOffs></Symbol><Symbol><Name>Global_Variables.PI</Name><BitSize>64</BitSize><BaseType>LREAL</BaseType><Default><Value>3.14159265358979</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3076352</BitOffs></Symbol><Symbol><Name>Global_Variables.DEFAULT_ADS_TIMEOUT</Name><Comment><![CDATA[ Default ADS timeout value ]]></Comment><BitSize>32</BitSize><BaseType>TIME</BaseType><Default><DateTime>5000</DateTime></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3076416</BitOffs></Symbol><Symbol><Name>Global_Variables.MAX_STRING_LENGTH</Name><Comment><![CDATA[ Max. length of T_MaxString (inclusive null delimiter) ]]></Comment><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>255</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3076448</BitOffs></Symbol><Symbol><Name>Global_Variables.eWatchdogConfig</Name><BitSize>16</BitSize><BaseType Namespace="Tc2_System">E_WATCHDOG_TIME_CONFIG</BaseType><Default><EnumText>E_WATCHDOG_TIME_CONFIG.eWATCHDOG_TIME_DISABLED</EnumText></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3077024</BitOffs></Symbol><Symbol><Name>Global_Constants.EMPTY_SEVERITY</Name><BitSize>16</BitSize><BaseType GUID="{B57D3F4A-0836-49B0-81C3-BED5F4817EC9}">TcEventSeverity</BaseType><Default><EnumText>TcEventSeverity.Verbose</EnumText></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3077040</BitOffs></Symbol><Symbol><Name>Global_Version.stLibVersion_Tc3_Module</Name><BitSize>288</BitSize><BaseType GUID="{6F5942ED-BFA1-497D-8225-23C6DAAD0A09}">ST_LibVersion</BaseType><Default><SubItem><Name>.iMajor</Name><Value>3</Value></SubItem><SubItem><Name>.iMinor</Name><Value>4</Value></SubItem><SubItem><Name>.iBuild</Name><Value>5</Value></SubItem><SubItem><Name>.iRevision</Name><Value>0</Value></SubItem><SubItem><Name>.nFlags</Name><Value>1</Value></SubItem><SubItem><Name>.sVersion</Name><String>3.4.5.0</String></SubItem></Default><Properties><Property><Name>const_non_replaced</Name></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3077056</BitOffs></Symbol><Symbol><Name>Global_Version.stLibVersion_Tc2_Utilities</Name><BitSize>288</BitSize><BaseType GUID="{6F5942ED-BFA1-497D-8225-23C6DAAD0A09}">ST_LibVersion</BaseType><Default><SubItem><Name>.iMajor</Name><Value>3</Value></SubItem><SubItem><Name>.iMinor</Name><Value>6</Value></SubItem><SubItem><Name>.iBuild</Name><Value>1</Value></SubItem><SubItem><Name>.iRevision</Name><Value>0</Value></SubItem><SubItem><Name>.nFlags</Name><Value>1</Value></SubItem><SubItem><Name>.sVersion</Name><String>3.6.1.0</String></SubItem></Default><Properties><Property><Name>const_non_replaced</Name></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3077696</BitOffs></Symbol><Symbol><Name>Global_Constants.EMPTY_EVENT_CLASS</Name><BitSize>128</BitSize><BaseType GUID="{18071995-0000-0000-0000-000000000021}">GUID</BaseType><Default><SubItem><Name>.Data1</Name><Value>0</Value></SubItem><SubItem><Name>.Data2</Name><Value>0</Value></SubItem><SubItem><Name>.Data3</Name><Value>0</Value></SubItem><SubItem><Name>.Data4[0]</Name><Value>0</Value></SubItem><SubItem><Name>.Data4[1]</Name><Value>0</Value></SubItem><SubItem><Name>.Data4[2]</Name><Value>0</Value></SubItem><SubItem><Name>.Data4[3]</Name><Value>0</Value></SubItem><SubItem><Name>.Data4[4]</Name><Value>0</Value></SubItem><SubItem><Name>.Data4[5]</Name><Value>0</Value></SubItem><SubItem><Name>.Data4[6]</Name><Value>0</Value></SubItem><SubItem><Name>.Data4[7]</Name><Value>0</Value></SubItem></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3077984</BitOffs></Symbol><Symbol><Name>Global_Constants.EMPTY_EVENT_ID</Name><BitSize>32</BitSize><BaseType>UDINT</BaseType><Default><Value>0</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3078112</BitOffs></Symbol><Symbol><Name>Global_Constants.SUCCESS_EVENT</Name><BitSize>192</BitSize><BaseType GUID="{6925E8D1-EDCA-47DD-B80C-A6329A85D63D}">TcEventEntry</BaseType><Default><SubItem><Name>.uuidEventClass.Data1</Name><Value>0</Value></SubItem><SubItem><Name>.uuidEventClass.Data2</Name><Value>0</Value></SubItem><SubItem><Name>.uuidEventClass.Data3</Name><Value>0</Value></SubItem><SubItem><Name>.uuidEventClass.Data4[0]</Name><Value>0</Value></SubItem><SubItem><Name>.uuidEventClass.Data4[1]</Name><Value>0</Value></SubItem><SubItem><Name>.uuidEventClass.Data4[2]</Name><Value>0</Value></SubItem><SubItem><Name>.uuidEventClass.Data4[3]</Name><Value>0</Value></SubItem><SubItem><Name>.uuidEventClass.Data4[4]</Name><Value>0</Value></SubItem><SubItem><Name>.uuidEventClass.Data4[5]</Name><Value>0</Value></SubItem><SubItem><Name>.uuidEventClass.Data4[6]</Name><Value>0</Value></SubItem><SubItem><Name>.uuidEventClass.Data4[7]</Name><Value>0</Value></SubItem><SubItem><Name>.nEventID</Name><Value>0</Value></SubItem><SubItem><Name>.eSeverity</Name><EnumText>Global_Constants.EMPTY_SEVERITY</EnumText></SubItem></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3078144</BitOffs></Symbol><Symbol><Name>GVL.nLangId_OnlineMonitoring</Name><Comment><![CDATA[ language id for online monitoring; English(US)=1033 ; German(Germany)=1031]]></Comment><BitSize>32</BitSize><BaseType>DINT</BaseType><Default><Value>1033</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3078336</BitOffs></Symbol><Symbol><Name>ParameterList.cSourceNameSize</Name><Comment><![CDATA[ size [bytes] for source names (recommended is a size between 128 and 512)]]></Comment><BitSize>32</BitSize><BaseType>UDINT (81..10000)</BaseType><Default><Value>256</Value></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3078368</BitOffs></Symbol><Symbol><Name>Global_Version.stLibVersion_Tc3_EventLogger</Name><BitSize>288</BitSize><BaseType GUID="{6F5942ED-BFA1-497D-8225-23C6DAAD0A09}">ST_LibVersion</BaseType><Default><SubItem><Name>.iMajor</Name><Value>3</Value></SubItem><SubItem><Name>.iMinor</Name><Value>3</Value></SubItem><SubItem><Name>.iBuild</Name><Value>7</Value></SubItem><SubItem><Name>.iRevision</Name><Value>0</Value></SubItem><SubItem><Name>.nFlags</Name><Value>1</Value></SubItem><SubItem><Name>.sVersion</Name><String>3.3.7.0</String></SubItem></Default><Properties><Property><Name>const_non_replaced</Name></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3078400</BitOffs></Symbol><Symbol><Name>Global_Version.stLibVersion_Tc2_SUPS</Name><BitSize>288</BitSize><BaseType GUID="{6F5942ED-BFA1-497D-8225-23C6DAAD0A09}">ST_LibVersion</BaseType><Default><SubItem><Name>.iMajor</Name><Value>3</Value></SubItem><SubItem><Name>.iMinor</Name><Value>3</Value></SubItem><SubItem><Name>.iBuild</Name><Value>8</Value></SubItem><SubItem><Name>.iRevision</Name><Value>0</Value></SubItem><SubItem><Name>.nFlags</Name><Value>0</Value></SubItem><SubItem><Name>.sVersion</Name><String>3.3.8.0</String></SubItem></Default><Properties><Property><Name>const_non_replaced</Name></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3078688</BitOffs></Symbol><Symbol><Name>Global_Variables.eGlobalSUpsState</Name><Comment><![CDATA[ current ups state of S-UPS ]]></Comment><BitSize>16</BitSize><BaseType Namespace="Tc2_SUPS">E_S_UPS_State</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3079168</BitOffs></Symbol><Symbol><Name>MAIN.ENABLE</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><BitOffs>3079184</BitOffs></Symbol><Symbol><Name>MAIN.PROCESS_EN</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><BitOffs>3079192</BitOffs></Symbol><Symbol><Name>MAIN.PROCESS_RUN</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><BitOffs>3079200</BitOffs></Symbol><Symbol><Name>MAIN.PROCESS_STOP</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><BitOffs>3079208</BitOffs></Symbol><Symbol><Name>MAIN.P_NO</Name><BitSize>16</BitSize><BaseType>INT</BaseType><BitOffs>3079216</BitOffs></Symbol><Symbol><Name>MAIN.PROCESS</Name><Comment><![CDATA[RECIPE]]></Comment><BitSize>36672</BitSize><BaseType>PROCESS</BaseType><BitOffs>3091008</BitOffs></Symbol><Symbol><Name>MAIN.CYCLE_EN</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><BitOffs>3127680</BitOffs></Symbol><Symbol><Name>MAIN.NEXTSTEP_EN</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><BitOffs>3127688</BitOffs></Symbol><Symbol><Name>MAIN.CYCLE_NUM</Name><BitSize>16</BitSize><BaseType>INT</BaseType><BitOffs>3127696</BitOffs></Symbol><Symbol><Name>MAIN.CYCLE_START_STEP_NO</Name><BitSize>16</BitSize><BaseType>INT</BaseType><BitOffs>3127712</BitOffs></Symbol><Symbol><Name>MAIN.STEP_NO</Name><BitSize>16</BitSize><BaseType>INT</BaseType><BitOffs>3127728</BitOffs></Symbol><Symbol><Name>MAIN.UPS</Name><BitSize>74624</BitSize><BaseType Namespace="Tc2_SUPS">FB_S_UPS_BAPI</BaseType><BitOffs>3127744</BitOffs></Symbol><Symbol><Name>IL.RANGE_PG_PS1</Name><BitSize>1280</BitSize><BaseType>RANGEJD</BaseType><BitOffs>3202752</BitOffs></Symbol><Symbol><Name>IL.RANGE_PG_PS2</Name><BitSize>1280</BitSize><BaseType>RANGEJD</BaseType><BitOffs>3204032</BitOffs></Symbol><Symbol><Name>IL.RANGE_PG_PS3</Name><BitSize>1280</BitSize><BaseType>RANGEJD</BaseType><BitOffs>3205312</BitOffs></Symbol><Symbol><Name>IL.RANGE_PG_PS4</Name><BitSize>1280</BitSize><BaseType>RANGEJD</BaseType><BitOffs>3206592</BitOffs></Symbol><Symbol><Name>IL.RANGE_PG_PS5</Name><BitSize>1280</BitSize><BaseType>RANGEJD</BaseType><BitOffs>3207872</BitOffs></Symbol><Symbol><Name>IL.RANGE_PG_PS6</Name><BitSize>1280</BitSize><BaseType>RANGEJD</BaseType><BitOffs>3209152</BitOffs></Symbol><Symbol><Name>IL.RANGE_PG_PS7</Name><BitSize>1280</BitSize><BaseType>RANGEJD</BaseType><BitOffs>3210432</BitOffs></Symbol><Symbol><Name>IL.RANGE_PG_PS8</Name><BitSize>1280</BitSize><BaseType>RANGEJD</BaseType><BitOffs>3211712</BitOffs></Symbol><Symbol><Name>IL.RANGE_PG_PS9</Name><BitSize>1280</BitSize><BaseType>RANGEJD</BaseType><BitOffs>3212992</BitOffs></Symbol><Symbol><Name>IL.RANGE_MFC1</Name><BitSize>1280</BitSize><BaseType>RANGEJD</BaseType><BitOffs>3214272</BitOffs></Symbol><Symbol><Name>IL.RANGE_MFC2</Name><BitSize>1280</BitSize><BaseType>RANGEJD</BaseType><BitOffs>3215552</BitOffs></Symbol><Symbol><Name>IL.RANGE_MFC3</Name><BitSize>1280</BitSize><BaseType>RANGEJD</BaseType><BitOffs>3216832</BitOffs></Symbol><Symbol><Name>IL.RANGE_MFC4</Name><BitSize>1280</BitSize><BaseType>RANGEJD</BaseType><BitOffs>3218112</BitOffs></Symbol><Symbol><Name>IL.RANGE_MFC5</Name><BitSize>1280</BitSize><BaseType>RANGEJD</BaseType><BitOffs>3219392</BitOffs></Symbol><Symbol><Name>IL.RANGE_MFC6</Name><BitSize>1280</BitSize><BaseType>RANGEJD</BaseType><BitOffs>3220672</BitOffs></Symbol><Symbol><Name>IL.RANGE_MFC7</Name><BitSize>1280</BitSize><BaseType>RANGEJD</BaseType><BitOffs>3221952</BitOffs></Symbol><Symbol><Name>IL.RANGE_MFC8</Name><BitSize>1280</BitSize><BaseType>RANGEJD</BaseType><BitOffs>3223232</BitOffs></Symbol><Symbol><Name>IL.RANGE_MFC9</Name><BitSize>1280</BitSize><BaseType>RANGEJD</BaseType><BitOffs>3224512</BitOffs></Symbol><Symbol><Name>IL.RANGE_CHAMBER_HEATER1</Name><BitSize>1280</BitSize><BaseType>RANGEJD</BaseType><BitOffs>3225792</BitOffs></Symbol><Symbol><Name>IL.RANGE_CHAMBER_HEATER2</Name><BitSize>1280</BitSize><BaseType>RANGEJD</BaseType><BitOffs>3227072</BitOffs></Symbol><Symbol><Name>IL.RANGE_CHAMBER_HEATER3</Name><BitSize>1280</BitSize><BaseType>RANGEJD</BaseType><BitOffs>3228352</BitOffs></Symbol><Symbol><Name>IL.RANGE_LID_HEATER</Name><BitSize>1280</BitSize><BaseType>RANGEJD</BaseType><BitOffs>3229632</BitOffs></Symbol><Symbol><Name>IL.RANGE_STAGE_EDGE_HEATER</Name><BitSize>1280</BitSize><BaseType>RANGEJD</BaseType><BitOffs>3230912</BitOffs></Symbol><Symbol><Name>IL.RANGE_STAGE_CENTER_HEATER</Name><BitSize>1280</BitSize><BaseType>RANGEJD</BaseType><BitOffs>3232192</BitOffs></Symbol><Symbol><Name>IL.TON_PrepareTransfer</Name><Comment><![CDATA[INTERLOCK	]]></Comment><BitSize>256</BitSize><BaseType Namespace="Tc2_Standard">TON</BaseType><BitOffs>3233472</BitOffs></Symbol><Symbol><Name>IL.TON_TransferWafer</Name><BitSize>256</BitSize><BaseType Namespace="Tc2_Standard">TON</BaseType><BitOffs>3233728</BitOffs></Symbol><Symbol><Name>IL.TON_OpenGasValve</Name><BitSize>256</BitSize><BaseType Namespace="Tc2_Standard">TON</BaseType><BitOffs>3233984</BitOffs></Symbol><Symbol><Name>IL.TON_CloseGasValve</Name><BitSize>256</BitSize><BaseType Namespace="Tc2_Standard">TON</BaseType><BitOffs>3234240</BitOffs></Symbol><Symbol><Name>IL.TON_OpenCloseSlitValve</Name><BitSize>256</BitSize><BaseType Namespace="Tc2_Standard">TON</BaseType><BitOffs>3234496</BitOffs></Symbol><Symbol><Name>IL.ALWAYS_TRUE</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Default><Bool>true</Bool></Default><BitOffs>3234752</BitOffs></Symbol><Symbol><Name>IL.VALVE_ITL_BYPASS</Name><BitSize>400</BitSize><BaseType>BOOL</BaseType><ArrayInfo><LBound>1</LBound><Elements>50</Elements></ArrayInfo><BitOffs>3234760</BitOffs></Symbol><Symbol><Name>GV.TURBO_PUMP_POWER_ON</Name><Comment><![CDATA[POWER]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3235184</BitOffs></Symbol><Symbol><Name>GV.PENDULUM_VALVE_HEATER_POWER_ON</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3235192</BitOffs></Symbol><Symbol><Name>Temp.H_LID</Name><BitSize>73600</BitSize><BaseType>Temp_controller</BaseType><ArrayInfo><LBound>1</LBound><Elements>10</Elements></ArrayInfo><BitOffs>3237056</BitOffs></Symbol><Symbol><Name>Temp.H_CHAMBER</Name><BitSize>73600</BitSize><BaseType>Temp_controller</BaseType><ArrayInfo><LBound>1</LBound><Elements>10</Elements></ArrayInfo><BitOffs>3310656</BitOffs></Symbol><Symbol><Name>Temp.H_PEN_VALVE</Name><BitSize>7360</BitSize><BaseType>Temp_controller</BaseType><BitOffs>3384256</BitOffs></Symbol><Symbol><Name>Temp.H_GATE_VALVE</Name><BitSize>7360</BitSize><BaseType>Temp_controller</BaseType><BitOffs>3391616</BitOffs></Symbol><Symbol><Name>Temp.H_IGS</Name><BitSize>73600</BitSize><BaseType>Temp_controller</BaseType><ArrayInfo><LBound>1</LBound><Elements>10</Elements></ArrayInfo><BitOffs>3398976</BitOffs></Symbol><Symbol><Name>Temp.H_TAPE</Name><BitSize>73600</BitSize><BaseType>Temp_controller</BaseType><ArrayInfo><LBound>1</LBound><Elements>10</Elements></ArrayInfo><BitOffs>3472576</BitOffs></Symbol><Symbol><Name>Temp.H_FORELINE</Name><BitSize>147200</BitSize><BaseType>Temp_controller</BaseType><ArrayInfo><LBound>1</LBound><Elements>20</Elements></ArrayInfo><BitOffs>3546176</BitOffs></Symbol><Symbol><Name>GV.LID_HEATER_POWER_ON</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3699664</BitOffs></Symbol><Symbol><Name>GV.CHAMBER_HEATER_POWER_ON</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3699672</BitOffs></Symbol><Symbol><Name>GV.NDI</Name><Comment><![CDATA[************************HW-IO******************************************]]></Comment><BitSize>904</BitSize><BaseType>STR_NDI</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3701824</BitOffs></Symbol><Symbol><Name>GV.NDO</Name><BitSize>392</BitSize><BaseType>STR_NDO</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3702728</BitOffs></Symbol><Symbol><Name>GV.IGS_HEATER_POWER_ON</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3703120</BitOffs></Symbol><Symbol><Name>GV.TAPE_HEATER_POWER_ON</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3703128</BitOffs></Symbol><Symbol><Name>GV.AI</Name><BitSize>2560</BitSize><BaseType>STR_AI</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3703136</BitOffs></Symbol><Symbol><Name>GV.AO</Name><BitSize>1504</BitSize><BaseType>STR_AO</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3705696</BitOffs></Symbol><Symbol><Name>GV.FORELINE_HEATER_POWER_ON</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3707200</BitOffs></Symbol><Symbol><Name>GV.GATE_VALVE_HEATER_POWER_ON</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3707208</BitOffs></Symbol><Symbol><Name>GV.LID_HEATER_AUTO_TUNE_EN</Name><Comment><![CDATA[HEATER	]]></Comment><BitSize>80</BitSize><BaseType>BOOL</BaseType><ArrayInfo><LBound>1</LBound><Elements>10</Elements></ArrayInfo><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3707216</BitOffs></Symbol><Symbol><Name>GV.CHAMBER_HEATER_AUTO_TUNE_EN</Name><BitSize>80</BitSize><BaseType>BOOL</BaseType><ArrayInfo><LBound>1</LBound><Elements>10</Elements></ArrayInfo><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3707296</BitOffs></Symbol><Symbol><Name>GV.PEN_VALVE_HEATER_AUTO_TUNE_EN</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3707376</BitOffs></Symbol><Symbol><Name>GV.GATE_VALVE_HEATER_AUTO_TUNE_EN</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3707384</BitOffs></Symbol><Symbol><Name>GV.IGS_HEATER_AUTO_TUNE_EN</Name><BitSize>80</BitSize><BaseType>BOOL</BaseType><ArrayInfo><LBound>1</LBound><Elements>10</Elements></ArrayInfo><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3707392</BitOffs></Symbol><Symbol><Name>GV.TAPE_HEATER_AUTO_TUNE_EN</Name><BitSize>80</BitSize><BaseType>BOOL</BaseType><ArrayInfo><LBound>1</LBound><Elements>10</Elements></ArrayInfo><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3707472</BitOffs></Symbol><Symbol><Name>GV.FORELINE_HEATER_AUTO_TUNE_EN</Name><BitSize>160</BitSize><BaseType>BOOL</BaseType><ArrayInfo><LBound>1</LBound><Elements>20</Elements></ArrayInfo><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3707552</BitOffs></Symbol><Symbol><Name>GV.LID_HEATER_AUTO_TUNE_OUTPUT</Name><BitSize>320</BitSize><BaseType>REAL</BaseType><ArrayInfo><LBound>1</LBound><Elements>10</Elements></ArrayInfo><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3707712</BitOffs></Symbol><Symbol><Name>GV.CHAMBER_HEATER_AUTO_TUNE_OUTPUT</Name><BitSize>320</BitSize><BaseType>REAL</BaseType><ArrayInfo><LBound>1</LBound><Elements>10</Elements></ArrayInfo><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3708032</BitOffs></Symbol><Symbol><Name>GV.PEN_VALVE_HEATER_AUTO_TUNE_OUTPUT</Name><BitSize>32</BitSize><BaseType>REAL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3708352</BitOffs></Symbol><Symbol><Name>GV.GATE_VALVE_HEATER_AUTO_TUNE_OUTPUT</Name><BitSize>32</BitSize><BaseType>REAL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3708384</BitOffs></Symbol><Symbol><Name>GV.IGS_HEATER_AUTO_TUNE_OUTPUT</Name><BitSize>320</BitSize><BaseType>REAL</BaseType><ArrayInfo><LBound>1</LBound><Elements>10</Elements></ArrayInfo><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3708416</BitOffs></Symbol><Symbol><Name>GV.TAPE_HEATER_AUTO_TUNE_OUTPUT</Name><BitSize>320</BitSize><BaseType>REAL</BaseType><ArrayInfo><LBound>1</LBound><Elements>10</Elements></ArrayInfo><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3708736</BitOffs></Symbol><Symbol><Name>GV.FORELINE_HEATER_AUTO_TUNE_OUTPUT</Name><BitSize>640</BitSize><BaseType>REAL</BaseType><ArrayInfo><LBound>1</LBound><Elements>20</Elements></ArrayInfo><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3709056</BitOffs></Symbol><Symbol><Name>GV.LID_HEATER_SSR_ON</Name><BitSize>80</BitSize><BaseType>BOOL</BaseType><ArrayInfo><LBound>1</LBound><Elements>10</Elements></ArrayInfo><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3709696</BitOffs></Symbol><Symbol><Name>GV.CHAMBER_HEATER_SSR_ON</Name><BitSize>80</BitSize><BaseType>BOOL</BaseType><ArrayInfo><LBound>1</LBound><Elements>10</Elements></ArrayInfo><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3709776</BitOffs></Symbol><Symbol><Name>GV.PEN_VALVE_HEATER_SSR_ON</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3709856</BitOffs></Symbol><Symbol><Name>GV.GATE_VALVE_SSR_ON</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3709864</BitOffs></Symbol><Symbol><Name>GV.IGS_HEATER_SSR_ON</Name><BitSize>80</BitSize><BaseType>BOOL</BaseType><ArrayInfo><LBound>1</LBound><Elements>10</Elements></ArrayInfo><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3709872</BitOffs></Symbol><Symbol><Name>GV.TAPE_HEATER_SSR_ON</Name><BitSize>80</BitSize><BaseType>BOOL</BaseType><ArrayInfo><LBound>1</LBound><Elements>10</Elements></ArrayInfo><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3709952</BitOffs></Symbol><Symbol><Name>GV.FORELINE_HEATER_SSR_ON</Name><BitSize>160</BitSize><BaseType>BOOL</BaseType><ArrayInfo><LBound>1</LBound><Elements>20</Elements></ArrayInfo><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3710032</BitOffs></Symbol><Symbol><Name>GV.ALARM_OCC</Name><Comment><![CDATA[INTERLOCK]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3710192</BitOffs></Symbol><Symbol><Name>GV.WARNING_OCC</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3710200</BitOffs></Symbol><Symbol><Name>GV.PMConfig</Name><Comment><![CDATA[UI-Config]]></Comment><BitSize>1536</BitSize><BaseType>ConfigPM</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3710208</BitOffs></Symbol><Symbol><Name>GV.MFCVerification</Name><BitSize>1472</BitSize><BaseType>ConfigMfcVer</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3711744</BitOffs></Symbol><Symbol><Name>GV.Chiller</Name><BitSize>1792</BitSize><BaseType>ConfigChiller</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3713216</BitOffs></Symbol><Symbol><Name>GV.InnerChiller</Name><BitSize>1792</BitSize><BaseType>ConfigChiller</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3715008</BitOffs></Symbol><Symbol><Name>GV.OuterChiller</Name><BitSize>1792</BitSize><BaseType>ConfigChiller</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3716800</BitOffs></Symbol><Symbol><Name>GV.TopChiller</Name><BitSize>1792</BitSize><BaseType>ConfigChiller</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3718592</BitOffs></Symbol><Symbol><Name>GV.DryPump</Name><BitSize>1152</BitSize><BaseType>ConfigDryPump</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3720384</BitOffs></Symbol><Symbol><Name>GV.Mfcgas1</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3721536</BitOffs></Symbol><Symbol><Name>GV.Mfcgas2</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3723264</BitOffs></Symbol><Symbol><Name>GV.Mfcgas3</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3724992</BitOffs></Symbol><Symbol><Name>GV.Mfcgas4</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3726720</BitOffs></Symbol><Symbol><Name>GV.Mfcgas5</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3728448</BitOffs></Symbol><Symbol><Name>GV.Mfcgas6</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3730176</BitOffs></Symbol><Symbol><Name>GV.Mfcgas7</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3731904</BitOffs></Symbol><Symbol><Name>GV.Mfcgas8</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3733632</BitOffs></Symbol><Symbol><Name>GV.Mfcgas9</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3735360</BitOffs></Symbol><Symbol><Name>GV.Mfcgas10</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3737088</BitOffs></Symbol><Symbol><Name>GV.Mfcgas11</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3738816</BitOffs></Symbol><Symbol><Name>GV.Mfcgas12</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3740544</BitOffs></Symbol><Symbol><Name>GV.MfcN2</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3742272</BitOffs></Symbol><Symbol><Name>GV.MfcHe</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3744000</BitOffs></Symbol><Symbol><Name>GV.Pump</Name><BitSize>2560</BitSize><BaseType>ConfigPump</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3745728</BitOffs></Symbol><Symbol><Name>GV.Purge</Name><BitSize>640</BitSize><BaseType>ConfigPurge</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3748288</BitOffs></Symbol><Symbol><Name>GV.PendulumHeater</Name><BitSize>272</BitSize><BaseType>ConfigHeater</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3748928</BitOffs></Symbol><Symbol><Name>GV.LidHeater</Name><BitSize>272</BitSize><BaseType>ConfigHeater</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3749200</BitOffs></Symbol><Symbol><Name>GV.ChamberHeater</Name><BitSize>272</BitSize><BaseType>ConfigHeater</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3749472</BitOffs></Symbol><Symbol><Name>GV.IGSHeater</Name><BitSize>272</BitSize><BaseType>ConfigHeater</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3749744</BitOffs></Symbol><Symbol><Name>GV.TapeHeater</Name><BitSize>272</BitSize><BaseType>ConfigHeater</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3750016</BitOffs></Symbol><Symbol><Name>GV.ForelineHeater</Name><BitSize>272</BitSize><BaseType>ConfigHeater</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3750288</BitOffs></Symbol><Symbol><Name>GV.ElectrostaticVoltageSource</Name><BitSize>648</BitSize><BaseType>ConfigElectrostaticVoltageSource</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3750560</BitOffs></Symbol><Symbol><Name>GV.Process_Start</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3751208</BitOffs></Symbol><Symbol><Name>GV.Step_Num</Name><Comment><![CDATA[UI-RECIPE]]></Comment><BitSize>16</BitSize><BaseType>INT</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3751216</BitOffs></Symbol><Symbol><Name>GV.TurboPump</Name><BitSize>1024</BitSize><BaseType>ConfigTurboPump</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3751232</BitOffs></Symbol><Symbol><Name>GV.PendulumValve</Name><BitSize>912</BitSize><BaseType>ConfigPendulumValve</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3752256</BitOffs></Symbol><Symbol><Name>GV.IdleClean</Name><BitSize>1568</BitSize><BaseType>ConfigIdleClean</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3753168</BitOffs></Symbol><Symbol><Name>GV.EPD</Name><BitSize>800</BitSize><BaseType>ConfigEPD</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3754736</BitOffs></Symbol><Symbol><Name>GV.TurboN2PurgePressure</Name><Comment><![CDATA[PS103	]]></Comment><BitSize>16</BitSize><BaseType>INT</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3755536</BitOffs></Symbol><Symbol><Name>GV.Process_Stop</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3755552</BitOffs></Symbol><Symbol><Name>GV_IL.PRESSURE_WARNING</Name><Comment><![CDATA[Tolerance]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3755560</BitOffs></Symbol><Symbol><Name>GV_IL.PRESSURE_ALARM</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3755568</BitOffs></Symbol><Symbol><Name>GV_IL.MFC1_WARNING</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3755576</BitOffs></Symbol><Symbol><Name>GV.HighTemperatureChiller</Name><BitSize>2816</BitSize><BaseType>ConfigHighTempChiller</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3755584</BitOffs></Symbol><Symbol><Name>GV.SetpArray</Name><BitSize>420800</BitSize><BaseType>RecipeEachStep</BaseType><ArrayInfo><LBound>1</LBound><Elements>100</Elements></ArrayInfo><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>3758400</BitOffs></Symbol><Symbol><Name>GV_H.LID_HEATER_PID</Name><BitSize>1920</BitSize><BaseType>STR_PID</BaseType><ArrayInfo><LBound>1</LBound><Elements>10</Elements></ArrayInfo><Properties><Property><Name>TcPersistent</Name></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4179200</BitOffs></Symbol><Symbol><Name>GV_H.CHAMBER_HEATER_PID</Name><BitSize>1920</BitSize><BaseType>STR_PID</BaseType><ArrayInfo><LBound>1</LBound><Elements>10</Elements></ArrayInfo><Properties><Property><Name>TcPersistent</Name></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4181120</BitOffs></Symbol><Symbol><Name>GV_H.PEN_VALVE_HEATER_PID</Name><BitSize>192</BitSize><BaseType>STR_PID</BaseType><Properties><Property><Name>TcPersistent</Name></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4183040</BitOffs></Symbol><Symbol><Name>GV_H.GATE_VALVE_HEATER_PID</Name><BitSize>192</BitSize><BaseType>STR_PID</BaseType><Properties><Property><Name>TcPersistent</Name></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4183232</BitOffs></Symbol><Symbol><Name>GV_H.IGS_HEATER_PID</Name><BitSize>1920</BitSize><BaseType>STR_PID</BaseType><ArrayInfo><LBound>1</LBound><Elements>10</Elements></ArrayInfo><Properties><Property><Name>TcPersistent</Name></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4183424</BitOffs></Symbol><Symbol><Name>GV_H.TAPE_HEATER_PID</Name><BitSize>1920</BitSize><BaseType>STR_PID</BaseType><ArrayInfo><LBound>1</LBound><Elements>10</Elements></ArrayInfo><Properties><Property><Name>TcPersistent</Name></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4185344</BitOffs></Symbol><Symbol><Name>GV_H.FORELINE_HEATER_PID</Name><BitSize>3840</BitSize><BaseType>STR_PID</BaseType><ArrayInfo><LBound>1</LBound><Elements>20</Elements></ArrayInfo><Properties><Property><Name>TcPersistent</Name></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4187264</BitOffs></Symbol><Symbol><Name>GV_IL.MFC1_Alarm</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191104</BitOffs></Symbol><Symbol><Name>GV_IL.MFC2_WARNING</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191112</BitOffs></Symbol><Symbol><Name>GV_IL.MFC2_Alarm</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191120</BitOffs></Symbol><Symbol><Name>GV_IL.MFC3_WARNING</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191128</BitOffs></Symbol><Symbol><Name>GV_IL.MFC3_Alarm</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191136</BitOffs></Symbol><Symbol><Name>GV_IL.MFC4_WARNING</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191144</BitOffs></Symbol><Symbol><Name>GV_IL.MFC4_Alarm</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191152</BitOffs></Symbol><Symbol><Name>GV_IL.MFC5_WARNING</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191160</BitOffs></Symbol><Symbol><Name>GV_IL.MFC5_Alarm</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191168</BitOffs></Symbol><Symbol><Name>GV_IL.MFC6_WARNING</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191176</BitOffs></Symbol><Symbol><Name>GV_IL.MFC6_Alarm</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191184</BitOffs></Symbol><Symbol><Name>GV_IL.MFC7_WARNING</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191192</BitOffs></Symbol><Symbol><Name>GV_IL.MFC7_Alarm</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191200</BitOffs></Symbol><Symbol><Name>GV_IL.MFC8_WARNING</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191208</BitOffs></Symbol><Symbol><Name>GV_IL.MFC8_Alarm</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191216</BitOffs></Symbol><Symbol><Name>GV_IL.MFC9_WARNING</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191224</BitOffs></Symbol><Symbol><Name>GV_IL.MFC9_Alarm</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191232</BitOffs></Symbol><Symbol><Name>GV_IL.WALL_TEMP_WARNING</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191240</BitOffs></Symbol><Symbol><Name>GV_IL.WALL_TEMP_Alarm</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191248</BitOffs></Symbol><Symbol><Name>GV_IL.LID_TEMP_WARNING</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191256</BitOffs></Symbol><Symbol><Name>GV_IL.LID_TEMP_Alarm</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191264</BitOffs></Symbol><Symbol><Name>GV_IL.STAGE_EDGE_TEMP_WARNING</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191272</BitOffs></Symbol><Symbol><Name>GV_IL.STAGE_EDGE_TEMP_Alarm</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191280</BitOffs></Symbol><Symbol><Name>GV_IL.STAGE_CENTER_TEMP_WARNING</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191288</BitOffs></Symbol><Symbol><Name>GV_IL.STAGE_CENTER_TEMP_ALARM</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191296</BitOffs></Symbol><Symbol><Name>GV_IL.STATUS_PrepareTransfer</Name><Comment><![CDATA[INTERLOCK]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191304</BitOffs></Symbol><Symbol><Name>GV_IL.STATUS_TransferWafer</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191312</BitOffs></Symbol><Symbol><Name>GV_IL.STATUS_OpenGasValve</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191320</BitOffs></Symbol><Symbol><Name>GV_IL.STATUS_CloseGasValve</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191328</BitOffs></Symbol><Symbol><Name>GV_IL.STATUS_OpenCloseSlitValve</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191336</BitOffs></Symbol><Symbol><Name>GV_IL.AV1_EN</Name><Comment><![CDATA[	MFC1前气动阀(N2-1)	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191344</BitOffs></Symbol><Symbol><Name>GV_IL.AV2_EN</Name><Comment><![CDATA[	MFC1前气动阀(N2-3)	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191352</BitOffs></Symbol><Symbol><Name>GV_IL.AV3_EN</Name><Comment><![CDATA[	MFC1后气动阀	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191360</BitOffs></Symbol><Symbol><Name>GV_IL.AV4_EN</Name><Comment><![CDATA[	MFC2前气动阀(N2-1)	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191368</BitOffs></Symbol><Symbol><Name>GV_IL.AV5_EN</Name><Comment><![CDATA[	MFC2前气动阀(NH3)	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191376</BitOffs></Symbol><Symbol><Name>GV_IL.AV6_EN</Name><Comment><![CDATA[	MFC2后气动阀	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191384</BitOffs></Symbol><Symbol><Name>GV_IL.AV7_EN</Name><Comment><![CDATA[	MFC3前气动阀(N2-1)	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191392</BitOffs></Symbol><Symbol><Name>GV_IL.AV8_EN</Name><Comment><![CDATA[	MFC3前气动阀(NH3)	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191400</BitOffs></Symbol><Symbol><Name>GV_IL.AV9_EN</Name><Comment><![CDATA[	MFC3后气动阀	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191408</BitOffs></Symbol><Symbol><Name>GV_IL.AV10_EN</Name><Comment><![CDATA[	N2-1 总进气阀	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191416</BitOffs></Symbol><Symbol><Name>GV_IL.AV11_EN</Name><Comment><![CDATA[	MFC1,2,3 BYPASS阀(N2-1)	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191424</BitOffs></Symbol><Symbol><Name>GV_IL.AV12_EN</Name><Comment><![CDATA[	N2-2 总进气阀	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191432</BitOffs></Symbol><Symbol><Name>GV_IL.AV13_EN</Name><Comment><![CDATA[	MFC5,6,7 BYPASS阀(N2-2)	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191440</BitOffs></Symbol><Symbol><Name>GV_IL.AV14_EN</Name><Comment><![CDATA[	MFC5前气动阀(N2-2)	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191448</BitOffs></Symbol><Symbol><Name>GV_IL.AV15_EN</Name><Comment><![CDATA[	MFC5前气动阀(HF)	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191456</BitOffs></Symbol><Symbol><Name>GV_IL.AV16_EN</Name><Comment><![CDATA[	MFC5后气动阀	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191464</BitOffs></Symbol><Symbol><Name>GV_IL.AV17_EN</Name><Comment><![CDATA[	OF前气动阀(N2-2)	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191472</BitOffs></Symbol><Symbol><Name>GV_IL.AV18_EN</Name><Comment><![CDATA[	OF前气动阀(HF)	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191480</BitOffs></Symbol><Symbol><Name>GV_IL.AV19_EN</Name><Comment><![CDATA[	OF后气动阀	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191488</BitOffs></Symbol><Symbol><Name>GV_IL.AV20_EN</Name><Comment><![CDATA[	MFC6前气动阀(N2-2)	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191496</BitOffs></Symbol><Symbol><Name>GV_IL.AV21_EN</Name><Comment><![CDATA[	MFC6前气动阀(Ar)	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191504</BitOffs></Symbol><Symbol><Name>GV_IL.AV22_EN</Name><Comment><![CDATA[	MFC6后气动阀	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191512</BitOffs></Symbol><Symbol><Name>GV_IL.AV23_EN</Name><Comment><![CDATA[	MFC7前气动阀(N2-2)	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191520</BitOffs></Symbol><Symbol><Name>GV_IL.AV24_EN</Name><Comment><![CDATA[	MFC7前气动阀(Ar)	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191528</BitOffs></Symbol><Symbol><Name>GV_IL.AV25_EN</Name><Comment><![CDATA[	MFC7后气动阀	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191536</BitOffs></Symbol><Symbol><Name>GV_IL.AV26_EN</Name><Comment><![CDATA[	Chamber总进气阀(NH3,N2)	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191544</BitOffs></Symbol><Symbol><Name>GV_IL.AV27_EN</Name><Comment><![CDATA[	Chamber总进气阀(HF,Ar)	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191552</BitOffs></Symbol><Symbol><Name>GV_IL.AV101_EN</Name><Comment><![CDATA[	Dry Pump至Chamber	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191560</BitOffs></Symbol><Symbol><Name>GV_IL.AV102_EN</Name><Comment><![CDATA[	Dry Pump至TMP	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191568</BitOffs></Symbol><Symbol><Name>GV_IL.AV103_EN</Name><Comment><![CDATA[	TMP N2 Purge	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191576</BitOffs></Symbol><Symbol><Name>GV_IL.AV104_EN</Name><Comment><![CDATA[	VG103压力计前置保护阀	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191584</BitOffs></Symbol><Symbol><Name>GV_IL.AV105_EN</Name><Comment><![CDATA[	BA01压力计前置保护阀	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191592</BitOffs></Symbol><Symbol><Name>GV_IL.AV106_EN</Name><Comment><![CDATA[	酸排阀	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191600</BitOffs></Symbol><Symbol><Name>GV_IL.APC_EN</Name><Comment><![CDATA[	APC Open	使能]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191608</BitOffs></Symbol><Symbol><Name>GV_IL.AV1_EN_Bypass</Name><Comment><![CDATA[	MFC1前气动阀(N2-1)	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191616</BitOffs></Symbol><Symbol><Name>GV_IL.AV2_EN_Bypass</Name><Comment><![CDATA[	MFC1前气动阀(N2-3)	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191624</BitOffs></Symbol><Symbol><Name>GV_IL.AV3_EN_Bypass</Name><Comment><![CDATA[	MFC1后气动阀	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191632</BitOffs></Symbol><Symbol><Name>GV_IL.AV4_EN_Bypass</Name><Comment><![CDATA[	MFC2前气动阀(N2-1)	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191640</BitOffs></Symbol><Symbol><Name>GV_IL.AV5_EN_Bypass</Name><Comment><![CDATA[	MFC2前气动阀(NH3)	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191648</BitOffs></Symbol><Symbol><Name>GV_IL.AV6_EN_Bypass</Name><Comment><![CDATA[	MFC2后气动阀	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191656</BitOffs></Symbol><Symbol><Name>GV_IL.AV7_EN_Bypass</Name><Comment><![CDATA[	MFC3前气动阀(N2-1)	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191664</BitOffs></Symbol><Symbol><Name>GV_IL.AV8_EN_Bypass</Name><Comment><![CDATA[	MFC3前气动阀(NH3)	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191672</BitOffs></Symbol><Symbol><Name>GV_IL.AV9_EN_Bypass</Name><Comment><![CDATA[	MFC3后气动阀	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191680</BitOffs></Symbol><Symbol><Name>GV_IL.AV10_EN_Bypass</Name><Comment><![CDATA[	N2-1 总进气阀	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191688</BitOffs></Symbol><Symbol><Name>GV_IL.AV11_EN_Bypass</Name><Comment><![CDATA[	MFC1,2,3 BYPASS阀(N2-1)	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191696</BitOffs></Symbol><Symbol><Name>GV_IL.AV12_EN_Bypass</Name><Comment><![CDATA[	N2-2 总进气阀	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191704</BitOffs></Symbol><Symbol><Name>GV_IL.AV13_EN_Bypass</Name><Comment><![CDATA[	MFC5,6,7 BYPASS阀(N2-2)	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191712</BitOffs></Symbol><Symbol><Name>GV_IL.AV14_EN_Bypass</Name><Comment><![CDATA[	MFC5前气动阀(N2-2)	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191720</BitOffs></Symbol><Symbol><Name>GV_IL.AV15_EN_Bypass</Name><Comment><![CDATA[	MFC5前气动阀(HF)	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191728</BitOffs></Symbol><Symbol><Name>GV_IL.AV16_EN_Bypass</Name><Comment><![CDATA[	MFC5后气动阀	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191736</BitOffs></Symbol><Symbol><Name>GV_IL.AV17_EN_Bypass</Name><Comment><![CDATA[	OF前气动阀(N2-2)	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191744</BitOffs></Symbol><Symbol><Name>GV_IL.AV18_EN_Bypass</Name><Comment><![CDATA[	OF前气动阀(HF)	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191752</BitOffs></Symbol><Symbol><Name>GV_IL.AV19_EN_Bypass</Name><Comment><![CDATA[	OF后气动阀	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191760</BitOffs></Symbol><Symbol><Name>GV_IL.AV20_EN_Bypass</Name><Comment><![CDATA[	MFC6前气动阀(N2-2)	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191768</BitOffs></Symbol><Symbol><Name>GV_IL.AV21_EN_Bypass</Name><Comment><![CDATA[	MFC6前气动阀(Ar)	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191776</BitOffs></Symbol><Symbol><Name>GV_IL.AV22_EN_Bypass</Name><Comment><![CDATA[	MFC6后气动阀	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191784</BitOffs></Symbol><Symbol><Name>GV_IL.AV23_EN_Bypass</Name><Comment><![CDATA[	MFC7前气动阀(N2-2)	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191792</BitOffs></Symbol><Symbol><Name>GV_IL.AV24_EN_Bypass</Name><Comment><![CDATA[	MFC7前气动阀(Ar)	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191800</BitOffs></Symbol><Symbol><Name>GV_IL.AV25_EN_Bypass</Name><Comment><![CDATA[	MFC7后气动阀	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191808</BitOffs></Symbol><Symbol><Name>GV_IL.AV26_EN_Bypass</Name><Comment><![CDATA[	Chamber总进气阀(NH3,N2)	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191816</BitOffs></Symbol><Symbol><Name>GV_IL.AV27_EN_Bypass</Name><Comment><![CDATA[	Chamber总进气阀(HF,Ar)	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191824</BitOffs></Symbol><Symbol><Name>GV_IL.AV101_EN_Bypass</Name><Comment><![CDATA[	Dry Pump至Chamber	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191832</BitOffs></Symbol><Symbol><Name>GV_IL.AV102_EN_Bypass</Name><Comment><![CDATA[	Dry Pump至TMP	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191840</BitOffs></Symbol><Symbol><Name>GV_IL.AV103_EN_Bypass</Name><Comment><![CDATA[	TMP N2 Purge	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191848</BitOffs></Symbol><Symbol><Name>GV_IL.AV104_EN_Bypass</Name><Comment><![CDATA[	VG103压力计前置保护阀	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191856</BitOffs></Symbol><Symbol><Name>GV_IL.AV105_EN_Bypass</Name><Comment><![CDATA[	BA01压力计前置保护阀	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191864</BitOffs></Symbol><Symbol><Name>GV_IL.AV106_EN_Bypass</Name><Comment><![CDATA[	酸排阀	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191872</BitOffs></Symbol><Symbol><Name>GV_IL.APC_EN_Bypass</Name><Comment><![CDATA[	APC Open	使能Bypass]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191880</BitOffs></Symbol><Symbol><Name>GV_IL.HTR_APC_EN</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191888</BitOffs></Symbol><Symbol><Name>GV_IL.HTR_CHAMBER_EN</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191896</BitOffs></Symbol><Symbol><Name>GV_IL.HTR_FORLINE_EN</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191904</BitOffs></Symbol><Symbol><Name>GV_IL.HTR_GAS_BOX_EN</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191912</BitOffs></Symbol><Symbol><Name>GV_IL.HTR_GATE_VALVE_EN</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191920</BitOffs></Symbol><Symbol><Name>GV_IL.HTR_LID_EN</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191928</BitOffs></Symbol><Symbol><Name>GV_IL.HTR_APC_EN_Bypass</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191936</BitOffs></Symbol><Symbol><Name>GV_IL.HTR_CHAMBER_EN_Bypass</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191944</BitOffs></Symbol><Symbol><Name>GV_IL.HTR_FORLINE_EN_Bypass</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191952</BitOffs></Symbol><Symbol><Name>GV_IL.HTR_GAS_BOX_EN_Bypass</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191960</BitOffs></Symbol><Symbol><Name>GV_IL.HTR_GATE_VALVE_EN_Bypass</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191968</BitOffs></Symbol><Symbol><Name>GV_IL.HTR_LID_EN_Bypass</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191976</BitOffs></Symbol><Symbol><Name>GV_IL.Process_RUN</Name><Comment><![CDATA[PROCESS]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191984</BitOffs></Symbol><Symbol><Name>GV_IL.Process_Stop</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4191992</BitOffs></Symbol><Symbol><Name>GV_IL.Lid_Temp_OT_Bypass</Name><Comment><![CDATA[SPLC]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4192000</BitOffs></Symbol><Symbol><Name>GV_IL.Chamber_Temp_OT_Bypass</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4192008</BitOffs></Symbol><Symbol><Name>GV_IL.APC_Temp_OT_Bypass</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4192016</BitOffs></Symbol><Symbol><Name>GV_IL.Gate_Valve_Temp_OT_Bypass</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4192024</BitOffs></Symbol><Symbol><Name>GV_IL.Gas_Line_Temp_OT_Bypass</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4192032</BitOffs></Symbol><Symbol><Name>GV_IL.TMP_ALARM_Bypass</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4192040</BitOffs></Symbol><Symbol><Name>GV_IL.PS1_ALM_Bypass</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4192048</BitOffs></Symbol><Symbol><Name>GV_IL.PS2_ALM_Bypass</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4192056</BitOffs></Symbol><Symbol><Name>GV_IL.SPLC_manual_ErrorAck</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4192064</BitOffs></Symbol><Symbol><Name>UI.Process_Start</Name><Comment><![CDATA[PROCESS]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4192344</BitOffs></Symbol><Symbol><Name>PM.HeartBeat</Name><BitSize>32</BitSize><BaseType>REAL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4192352</BitOffs></Symbol><Symbol><Name>PM.NDI</Name><Comment><![CDATA[HW]]></Comment><BitSize>904</BitSize><BaseType>STR_NDI</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4192384</BitOffs></Symbol><Symbol><Name>UI.Process_Stop</Name><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4193288</BitOffs></Symbol><Symbol><Name>UI.Step_Num</Name><Comment><![CDATA[RECIPE]]></Comment><BitSize>16</BitSize><BaseType>INT</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4193296</BitOffs></Symbol><Symbol><Name>PM.AI</Name><BitSize>2560</BitSize><BaseType>STR_AI</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4193312</BitOffs></Symbol><Symbol><Name>PM.Info</Name><Comment><![CDATA[SYSTEM]]></Comment><BitSize>720</BitSize><BaseType>Info</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4195872</BitOffs></Symbol><Symbol><Name>PM.ProcessFeedBack</Name><BitSize>64</BitSize><BaseType>ProcessRecipeFeedBack</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4196592</BitOffs></Symbol><Symbol><Name>UI.TurboN2PurgePressure</Name><Comment><![CDATA[PS103	]]></Comment><BitSize>16</BitSize><BaseType>INT</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4196656</BitOffs></Symbol><Symbol><Name>UI.HeartBeat</Name><BitSize>32</BitSize><BaseType>REAL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4196672</BitOffs></Symbol><Symbol><Name>UI.NDO</Name><Comment><![CDATA[HW]]></Comment><BitSize>392</BitSize><BaseType>STR_NDO</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4196704</BitOffs></Symbol><Symbol><Name>UI.Warning_And_Alarm_RST</Name><Comment><![CDATA[*********************READ**************
	Process_Finished:BOOL;
WARNING&ALARM]]></Comment><BitSize>8</BitSize><BaseType>BOOL</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4197096</BitOffs></Symbol><Symbol><Name>UI.AO</Name><BitSize>1504</BitSize><BaseType>STR_AO</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4197120</BitOffs></Symbol><Symbol><Name>UI.PMConfig</Name><Comment><![CDATA[Config]]></Comment><BitSize>1536</BitSize><BaseType>ConfigPM</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4198656</BitOffs></Symbol><Symbol><Name>UI.MFCVerification</Name><BitSize>1472</BitSize><BaseType>ConfigMfcVer</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4200192</BitOffs></Symbol><Symbol><Name>UI.Chiller</Name><BitSize>1792</BitSize><BaseType>ConfigChiller</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4201664</BitOffs></Symbol><Symbol><Name>UI.InnerChiller</Name><BitSize>1792</BitSize><BaseType>ConfigChiller</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4203456</BitOffs></Symbol><Symbol><Name>UI.OuterChiller</Name><BitSize>1792</BitSize><BaseType>ConfigChiller</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4205248</BitOffs></Symbol><Symbol><Name>UI.TopChiller</Name><BitSize>1792</BitSize><BaseType>ConfigChiller</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4207040</BitOffs></Symbol><Symbol><Name>UI.DryPump</Name><BitSize>1152</BitSize><BaseType>ConfigDryPump</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4208832</BitOffs></Symbol><Symbol><Name>UI.Mfcgas1</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4209984</BitOffs></Symbol><Symbol><Name>UI.Mfcgas2</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4211712</BitOffs></Symbol><Symbol><Name>UI.Mfcgas3</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4213440</BitOffs></Symbol><Symbol><Name>UI.Mfcgas4</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4215168</BitOffs></Symbol><Symbol><Name>UI.Mfcgas5</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4216896</BitOffs></Symbol><Symbol><Name>UI.Mfcgas6</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4218624</BitOffs></Symbol><Symbol><Name>UI.Mfcgas7</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4220352</BitOffs></Symbol><Symbol><Name>UI.Mfcgas8</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4222080</BitOffs></Symbol><Symbol><Name>UI.Mfcgas9</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4223808</BitOffs></Symbol><Symbol><Name>UI.Mfcgas10</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4225536</BitOffs></Symbol><Symbol><Name>UI.Mfcgas11</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4227264</BitOffs></Symbol><Symbol><Name>UI.Mfcgas12</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4228992</BitOffs></Symbol><Symbol><Name>UI.MfcN2</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4230720</BitOffs></Symbol><Symbol><Name>UI.MfcHe</Name><BitSize>1728</BitSize><BaseType>ConfigMfcGas</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4232448</BitOffs></Symbol><Symbol><Name>UI.Pump</Name><BitSize>2560</BitSize><BaseType>ConfigPump</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4234176</BitOffs></Symbol><Symbol><Name>UI.Purge</Name><BitSize>640</BitSize><BaseType>ConfigPurge</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4236736</BitOffs></Symbol><Symbol><Name>UI.PendulumHeater</Name><BitSize>272</BitSize><BaseType>ConfigHeater</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4237376</BitOffs></Symbol><Symbol><Name>UI.LidHeater</Name><BitSize>272</BitSize><BaseType>ConfigHeater</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4237648</BitOffs></Symbol><Symbol><Name>UI.ChamberHeater</Name><BitSize>272</BitSize><BaseType>ConfigHeater</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4237920</BitOffs></Symbol><Symbol><Name>UI.IGSHeater</Name><BitSize>272</BitSize><BaseType>ConfigHeater</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4238192</BitOffs></Symbol><Symbol><Name>UI.TapeHeater</Name><BitSize>272</BitSize><BaseType>ConfigHeater</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4238464</BitOffs></Symbol><Symbol><Name>UI.ForelineHeater</Name><BitSize>272</BitSize><BaseType>ConfigHeater</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4238736</BitOffs></Symbol><Symbol><Name>UI.ElectrostaticVoltageSource</Name><BitSize>648</BitSize><BaseType>ConfigElectrostaticVoltageSource</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4239008</BitOffs></Symbol><Symbol><Name>UI.TurboPump</Name><BitSize>1024</BitSize><BaseType>ConfigTurboPump</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4239680</BitOffs></Symbol><Symbol><Name>UI.PendulumValve</Name><BitSize>912</BitSize><BaseType>ConfigPendulumValve</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4240704</BitOffs></Symbol><Symbol><Name>UI.IdleClean</Name><BitSize>1568</BitSize><BaseType>ConfigIdleClean</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4241616</BitOffs></Symbol><Symbol><Name>UI.EPD</Name><BitSize>800</BitSize><BaseType>ConfigEPD</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4243184</BitOffs></Symbol><Symbol><Name>UI.HighTemperatureChiller</Name><BitSize>2816</BitSize><BaseType>ConfigHighTempChiller</BaseType><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4244032</BitOffs></Symbol><Symbol><Name>UI.SetpArray</Name><BitSize>420800</BitSize><BaseType>RecipeEachStep</BaseType><ArrayInfo><LBound>1</LBound><Elements>100</Elements></ArrayInfo><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4246848</BitOffs></Symbol><Symbol><Name>TwinCAT_LicenseInfoVarList._LicenseInfo</Name><BitSize>2048</BitSize><BaseType GUID="{5456DAC5-9FA5-4A6B-B497-840FCC690FDD}">PlcLicenseInfo</BaseType><ArrayInfo><LBound>1</LBound><Elements>2</Elements></ArrayInfo><Default><SubItem><Name>[1].LicenseId.Data1</Name><Value>518765226</Value></SubItem><SubItem><Name>[1].LicenseId.Data2</Name><Value>20961</Value></SubItem><SubItem><Name>[1].LicenseId.Data3</Name><Value>18256</Value></SubItem><SubItem><Name>[1].LicenseId.Data4[0]</Name><Value>157</Value></SubItem><SubItem><Name>[1].LicenseId.Data4[1]</Name><Value>106</Value></SubItem><SubItem><Name>[1].LicenseId.Data4[2]</Name><Value>123</Value></SubItem><SubItem><Name>[1].LicenseId.Data4[3]</Name><Value>4</Value></SubItem><SubItem><Name>[1].LicenseId.Data4[4]</Name><Value>17</Value></SubItem><SubItem><Name>[1].LicenseId.Data4[5]</Name><Value>110</Value></SubItem><SubItem><Name>[1].LicenseId.Data4[6]</Name><Value>163</Value></SubItem><SubItem><Name>[1].LicenseId.Data4[7]</Name><Value>43</Value></SubItem><SubItem><Name>[1].Instances</Name><Value>0</Value></SubItem><SubItem><Name>[1].LicenseName</Name><String>TF4110 Temperature Controller</String></SubItem><SubItem><Name>[2].LicenseId.Data1</Name><Value>2004817304</Value></SubItem><SubItem><Name>[2].LicenseId.Data2</Name><Value>22587</Value></SubItem><SubItem><Name>[2].LicenseId.Data3</Name><Value>17667</Value></SubItem><SubItem><Name>[2].LicenseId.Data4[0]</Name><Value>153</Value></SubItem><SubItem><Name>[2].LicenseId.Data4[1]</Name><Value>187</Value></SubItem><SubItem><Name>[2].LicenseId.Data4[2]</Name><Value>124</Value></SubItem><SubItem><Name>[2].LicenseId.Data4[3]</Name><Value>2</Value></SubItem><SubItem><Name>[2].LicenseId.Data4[4]</Name><Value>224</Value></SubItem><SubItem><Name>[2].LicenseId.Data4[5]</Name><Value>171</Value></SubItem><SubItem><Name>[2].LicenseId.Data4[6]</Name><Value>217</Value></SubItem><SubItem><Name>[2].LicenseId.Data4[7]</Name><Value>126</Value></SubItem><SubItem><Name>[2].Instances</Name><Value>0</Value></SubItem><SubItem><Name>[2].LicenseName</Name><String>TF4100 TC3 Controller Toolbox</String></SubItem></Default><Properties><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4667808</BitOffs></Symbol><Symbol><Name>TwinCAT_SystemInfoVarList._TaskPouOid_PlcTask</Name><BitSize>32</BitSize><BaseType GUID="{18071995-0000-0000-0000-00000000000F}">OTCID</BaseType><Properties><Property><Name>no_init</Name></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4669856</BitOffs></Symbol><Symbol><Name>TwinCAT_SystemInfoVarList._AppInfo</Name><BitSize>2048</BitSize><BaseType GUID="{941FDF6E-37CE-4C30-AA23-3236AFA461E2}">PlcAppSystemInfo</BaseType><Properties><Property><Name>no_init</Name></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4669888</BitOffs></Symbol><Symbol><Name>TwinCAT_SystemInfoVarList._TaskInfo</Name><BitSize>1024</BitSize><BaseType GUID="{56294066-FFF7-46F3-8206-FA06A30B13BA}">PlcTaskSystemInfo</BaseType><ArrayInfo><LBound>1</LBound><Elements>1</Elements></ArrayInfo><Properties><Property><Name>no_init</Name></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4671936</BitOffs></Symbol><Symbol><Name>TwinCAT_SystemInfoVarList._TaskOid_PlcTask</Name><BitSize>32</BitSize><BaseType GUID="{18071995-0000-0000-0000-00000000000F}">OTCID</BaseType><Properties><Property><Name>no_init</Name></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4672960</BitOffs></Symbol><Symbol><Name>TwinCAT_SystemInfoVarList.__PlcTask</Name><BitSize>896</BitSize><BaseType>_Implicit_Task_Info</BaseType><Default><SubItem><Name>.dwVersion</Name><Value>2</Value></SubItem></Default><Properties><Property><Name>TcContextName</Name><Value>PlcTask</Value></Property><Property><Name>TcVarGlobal</Name></Property></Properties><BitOffs>4673024</BitOffs></Symbol></DataArea></DataAreas><Deployment /><EventClasses /><Properties><Property><Name>ApplicationName</Name><Value>Port_851</Value></Property><Property><Name>ChangeDate</Name><Value>2025-05-26T15:59:45</Value></Property><Property><Name>GeneratedCodeSize</Name><Value>180224</Value></Property><Property><Name>GlobalDataSize</Name><Value>225280</Value></Property></Properties></Module></Modules></TcModuleClass>