ST_LibVersion288iMajorUINT160iMinorUINT1616iBuildUINT1632iRevisionUINT1648nFlagsDWORD3264sVersionSTRING(23)19296ST_CTRL_CYCLE_TIME_INTERPRETATION128bInterpretCycleTimeAsTicksBOOL80fBaseTimeLREAL6464hideE_WATCHDOG_TIME_CONFIG16INTeWATCHDOG_TIME_DISABLED0eWATCHDOG_TIME_SECONDS1eWATCHDOG_TIME_MINUTES2TcEventSeverity16INT01234plcAttribute_qualified_onlyplcAttribute_strictTcEventEntryFlags8BYTE0#x1plcAttribute_qualified_onlyTcEventEntry192uuidEventClassGUID1280nEventIdUDINT32128eSeverityTcEventSeverity16160eFlagsTcEventEntryFlags8176UDINT (81..10000)32UDINTLowerBorder81UpperBorder10000E_S_UPS_State16INTeSUPS_PowerOK0eSUPS_PowerFailure1eSUPS_WritePersistentData2eSUPS_QuickShutdown3eSUPS_WaitForRecover4eSUPS_WaitForPowerOFF5LstPressure1456ToleranceModeSTRING(80)6480ToleranceDelayTimeINT16656PressureUnitModeSTRING(80)648672StartValueINT161328StartValueWarningRangeINT161344StartValueAlarmRangeINT161360ValvePositionPresetINT161376EnableRampBOOL81392HoldTimeINT161408RampTimeINT161424TargetValueINT161440LstGas1104ToleranceModeSTRING(80)6480ToleranceDelayTimeINT16656Gas1INT16672Gas1WarningRangeINT16688Gas1AlarmRangeINT16704Gas2INT16720Gas2WarningRangeINT16736Gas2AlarmRangeINT16752Gas3INT16768Gas3WarningRangeINT16784Gas3AlarmRangeINT16800Gas4INT16816Gas4WarningRangeINT16832Gas4AlarmRangeINT16848Gas5INT16864Gas5WarningRangeINT16880Gas5AlarmRangeINT16896Gas6INT16912Gas6WarningRangeINT16928Gas6AlarmRangeINT16944Gas7INT16960Gas7WarningRangeINT16976Gas7AlarmRangeINT16992Gas8INT161008Gas8WarningRangeINT161024Gas8AlarmRangeINT161040Gas9INT161056Gas9WarningRangeINT161072Gas9AlarmRangeINT161088LstHeater864ToleranceModeSTRING(80)6480ToleranceDelayTimeINT16656WallTempINT16672WallTempWaningRangeINT16688WallTempAlarmRangeINT16704LidTempINT16720LidTempWaningRangeINT16736LidTempAlarmRangeINT16752StageEdgeTempINT16768StageEdgeTempWaningRangeINT16784StageEdgeTempAlarmRangeINT16800StageCenterTempINT16816StageCenterTempWaningRangeINT16832StageCenterTempAlarmRangeINT16848Lst3424PressureLstPressure14560GASLstGas11041456HeaterLstHeater8642560RecipeEachStep4208StepNoINT160CompletionSTRING(80)64816StepTimeINT16672AddTimeINT16688CycleStartBOOL8704CycleEndBOOL8712CycleNumberINT16720Lifter_UpBOOL8736AdjustTargetStepNoINT16752Lifter_DownBOOL8768LstUnitLst3424784TON256INBOOL864ItemTypeInputPTTIME3296ItemTypeInputQBOOL8128ItemTypeOutputETTIME32160ItemTypeOutputMBOOL8192StartTimeTIME32224PouTypeFunctionBlockTolerance2752ENABLEBOOL864ItemTypeInputSTEP_TYPESTRING(80)64872ItemTypeInputSTEP_TIMEINT16720ItemTypeInputTOL_VBOOL8736ItemTypeInputTOL_PBOOL8744ItemTypeInputSVINT16752ItemTypeInputPVREAL32768ItemTypeInputWARNING_RANGEINT16800ItemTypeInputALARM_RANGEINT16816ItemTypeInputDELAY_TIMEINT16832ItemTypeInputSTABLE_TIMEINT16848ItemTypeInputRSTBOOL8864ItemTypeInputSTU_WARNINGBOOL8872ItemTypeOutputSTU_ALARMBOOL8880ItemTypeOutputSTABLE_DONEBOOL8888ItemTypeOutputSV_SUB_WARNING_RANGEINT16896SV_ADD_WARNING_RANGEINT16912SV_DIV_WARNING_RANGEINT16928SV_MUL_WARNING_RANGEINT16944SV_SUB_ALARM_RANGEINT16960SV_ADD_ALARM_RANGEINT16976SV_DIV_ALARM_RANGEINT16992SV_MUL_ALARM_RANGEINT161008STU_WARNING_VBOOL81024STU_WARNING_PBOOL81032STU_ALARM_VBOOL81040STU_ALARM_PBOOL81048TON_DELAY_TIMETON2561088TON_DELAY_TIME_PTINT161344TON_ALARM_PTON2561408TON_ALARM_VTON2561664TON_WARNING_PTON2561920TON_WARNING_VTON2562176TON_STABLETON2562432TON_STABLE_INBOOL82688PouTypeFunctionBlockR_TRIG128CLKBOOL864ItemTypeInputQBOOL872ItemTypeOutputMBOOL880conditionalshowPouTypeFunctionBlockconditionalshow_all_localsPROCESS36672ENABLEBOOL864ItemTypeInputNEXTSTEP_ENBOOL872ItemTypeInputAlarm_RSTBOOL880ItemTypeInputPMStableTimeINT1696ItemTypeInputSTEP_DATARecipeEachStep4208112ItemTypeInputAPC_PRESSUREREAL324320ItemTypeOutputAPC_POSITIONREAL324352ItemTypeOutputAPC_CONTROL_MODESINT84384ItemTypeOutputMFC1_SVREAL324416ItemTypeOutputMFC2_SVREAL324448ItemTypeOutputMFC3_SVREAL324480ItemTypeOutputMFC4_SVREAL324512ItemTypeOutputMFC5_SVREAL324544ItemTypeOutputMFC6_SVREAL324576ItemTypeOutputMFC7_SVREAL324608ItemTypeOutputMFC8_SVREAL324640ItemTypeOutputMFC9_SVREAL324672ItemTypeOutputWALL_TEMPREAL324704ItemTypeOutputLID_TEMPREAL324736ItemTypeOutputSTAGE_EDGE_TEMPINT164768ItemTypeOutputSTAGE_CENTER_TEMPINT164784ItemTypeOutputSTEP_TIME_OUTBOOL84800ItemTypeOutputSTEP_ERRBOOL84808ItemTypeOutputNEXTSTEPBOOL84816ItemTypeOutputPRESSURE_WARNINGBOOL84824ItemTypeOutputPRESSURE_ALARMBOOL84832ItemTypeOutputMFC1_WARNINGBOOL84840ItemTypeOutputMFC1_AlarmBOOL84848ItemTypeOutputMFC2_WARNINGBOOL84856ItemTypeOutputMFC2_AlarmBOOL84864ItemTypeOutputMFC3_WARNINGBOOL84872ItemTypeOutputMFC3_AlarmBOOL84880ItemTypeOutputMFC4_WARNINGBOOL84888ItemTypeOutputMFC4_AlarmBOOL84896ItemTypeOutputMFC5_WARNINGBOOL84904ItemTypeOutputMFC5_AlarmBOOL84912ItemTypeOutputMFC6_WARNINGBOOL84920ItemTypeOutputMFC6_AlarmBOOL84928ItemTypeOutputMFC7_WARNINGBOOL84936ItemTypeOutputMFC7_AlarmBOOL84944ItemTypeOutputMFC8_WARNINGBOOL84952ItemTypeOutputMFC8_AlarmBOOL84960ItemTypeOutputMFC9_WARNINGBOOL84968ItemTypeOutputMFC9_AlarmBOOL84976ItemTypeOutputWALL_TEMP_WARNINGBOOL84984ItemTypeOutputWALL_TEMP_AlarmBOOL84992ItemTypeOutputLID_TEMP_WARNINGBOOL85000ItemTypeOutputLID_TEMP_AlarmBOOL85008ItemTypeOutputSTAGE_EDGE_TEMP_WARNINGBOOL85016ItemTypeOutputSTAGE_EDGE_TEMP_AlarmBOOL85024ItemTypeOutputSTAGE_CENTER_TEMP_WARNINGBOOL85032ItemTypeOutputSTAGE_CENTER_TEMP_ALARMBOOL85040ItemTypeOutputSTEP_TIMETON2565056STEP_TIME_DONEBOOL85312COMPLETIONINT165328TOL_PRESSURE_PERCENTTolerance27525376TOL_PRESSURE_VALUE_ENBOOL88128TOL_PRESSURE_PERCENT_ENBOOL88136TOL_MFC1_PERCENTTolerance27528192TOL_MFC2_PERCENTTolerance275210944TOL_MFC3_PERCENTTolerance275213696TOL_MFC5_PERCENTTolerance275216448TOL_MFC6_PERCENTTolerance275219200TOL_MFC7_PERCENTTolerance275221952TOL_MFC_VALUE_ENBOOL824704TOL_MFC_PERCENT_ENBOOL824712TOL_WALL_TEMP_PERCENTTolerance275224768TOL_LID_TEMP_PERCENTTolerance275227520TOL_STAGE_EDGE_TEMP_PERCENTTolerance275230272TOL_STAGE_CENTER_TEMP_PERCENTTolerance275233024TOL_HEATER_VALUE_ENBOOL835776TOL_HEATER_PERCENT_ENBOOL835784TON_STEP_TIMETON25635840TON_STEP_TIME_ENBOOL836096WARNING_OCCBOOL836104ALARM_OCCBOOL836112iINT1636128STABLE_DONEBOOL836144EN_TRIGR_TRIG12836160TON_STABLE_PROCESSTON25636288CHAMBER_TEMP_MIN_VALUEREAL3236544STAGE_EDGE_TEMP_MIN_VALUEREAL3236576STAGE_CENTER_TEMP_MIN_VALUEREAL3236608PouTypeFunctionBlockT_AmsNetID192STRING(23)E_S_UPS_Mode16INTeSUPS_WrPersistData_Shutdown0eSUPS_WrPersistData_NoShutdown1eSUPS_ImmediateShutdown2eSUPS_CheckPowerStatus3E_PersistentMode16INTSPDM_2PASS0SPDM_VAR_BOOST1T_U64KAFFINITY64lowerDWORD3200higherDWORD32320conditionalshowT_AmsPort16UINTADSRDWRTEX1792NETIDT_AmsNetID19264ItemTypeInputPORTT_AmsPort16256ItemTypeInputIDXGRPUDINT32288ItemTypeInputIDXOFFSUDINT32320ItemTypeInputWRITELENUDINT32352ItemTypeInputREADLENUDINT32384ItemTypeInputSRCADDRPVOID64448ItemTypeInputTcIgnorePersistentDESTADDRPVOID64512ItemTypeInputTcIgnorePersistentWRTRDBOOL8576ItemTypeInputTMOUTTIME326085000ItemTypeInputBUSYBOOL8640ItemTypeOutputERRBOOL8648ItemTypeOutputERRIDUDINT32672ItemTypeOutputCOUNT_RUDINT32704ItemTypeOutputPouTypeFunctionBlockhide_all_localsST_AdsBaDevApiIoCtlModifier128affinityT_U64KAFFINITY640.lower0.higher0flagsDWORD3264rsrvDWORD3296conditionalshowST_AdsBaDevApiHead192indexGroupUDINT320indexOffsetUDINT3232modifierST_AdsBaDevApiIoCtlModifier12864conditionalshowST_AdsBaDevApiReq8416headST_AdsBaDevApiHead1920inDataBYTE010258200192conditionalshowFB_BaDeviceIoControl11200sNetIDT_AmsNetID19264ItemTypeInputaffinityT_U64KAFFINITY64256.lower0.higher0ItemTypeInputnModifierUDINT323200ItemTypeInputnIdxGrpUDINT32352ItemTypeInputnIdxOffsUDINT32384ItemTypeInputcbWriteLenUDINT32416ItemTypeInputcbReadLenUDINT32448ItemTypeInputpWriteBuffPVOID64512ItemTypeInputpReadBuffPVOID64576ItemTypeInputbExecuteBOOL8640ItemTypeInputtTimeoutTIME326725000ItemTypeInputbBusyBOOL8704ItemTypeOutputbErrorBOOL8712ItemTypeOutputnErrIDUDINT32736ItemTypeOutputcbReadUDINT32768ItemTypeOutputfbRWADSRDWRTEX1792832.PORT10000.IDXGRP1100.IDXOFFS0reqST_AdsBaDevApiReq84162624stateBYTE811040rtrigR_TRIG12811072PouTypeFunctionBlockhideFB_BaGenGetVersion11840sNetIDT_AmsNetID19264ItemTypeInputbExecuteBOOL8256ItemTypeInputtTimeoutTIME322885000ItemTypeInputbBusyBOOL8320ItemTypeOutputbErrorBOOL8328ItemTypeOutputnErrIDUDINT32352ItemTypeOutputnVersionBYTE8384ItemTypeOutputnRevisionBYTE8392ItemTypeOutputnBuildWORD16400ItemTypeOutputfbCtrlFB_BaDeviceIoControl11200448.nModifier0.affinity.lower0.affinity.higher0.nIdxGrp0.nIdxOffs0rtrigR_TRIG12811648stateBYTE811776rspDWORD3211808PouTypeFunctionBlockhideADSWRITE1344NETIDT_AmsNetID19264ItemTypeInputPORTT_AmsPort16256ItemTypeInputIDXGRPUDINT32288ItemTypeInputIDXOFFSUDINT32320ItemTypeInputLENUDINT32352ItemTypeInputSRCADDRPVOID64384ItemTypeInputTcIgnorePersistentWRITEBOOL8448ItemTypeInputTMOUTTIME324805000ItemTypeInputBUSYBOOL8512ItemTypeOutputERRBOOL8520ItemTypeOutputERRIDUDINT32544ItemTypeOutputPouTypeFunctionBlockhide_all_localsFB_WritePersistentData1728NETIDT_AmsNetID19264ItemTypeInputPORTUINT16256ItemTypeInputSTARTBOOL8272ItemTypeInputTMOUTTIME322885000ItemTypeInputMODEE_PersistentMode16320E_PersistentMode.SPDM_2PASSItemTypeInputBUSYBOOL8336ItemTypeOutputERRBOOL8344ItemTypeOutputERRIDUDINT32352ItemTypeOutputfbAdsWriteADSWRITE1344384.IDXGRP139460625.IDXOFFS0conditionalshowPouTypeFunctionBlockconditionalshow_all_localsADSWRTCTL1344NETIDT_AmsNetID19264ItemTypeInputPORTT_AmsPort16256ItemTypeInputADSSTATEUINT16272ItemTypeInputDEVSTATEUINT16288ItemTypeInputLENUDINT32320ItemTypeInputSRCADDRPVOID64384ItemTypeInputTcIgnorePersistentWRITEBOOL8448ItemTypeInputTMOUTTIME324805000ItemTypeInputBUSYBOOL8512ItemTypeOutputERRBOOL8520ItemTypeOutputERRIDUDINT32544ItemTypeOutputPouTypeFunctionBlockhide_all_localsFB_NT_QuickShutdown1920NETIDT_AmsNetID19264ItemTypeInputSTARTBOOL8256ItemTypeInputTMOUTTIME322885000ItemTypeInputBUSYBOOL8320ItemTypeOutputERRBOOL8328ItemTypeOutputERRIDUDINT32352ItemTypeOutputADSWRTCTL1ADSWRTCTL1344384RisingEdgeR_TRIG1281728DELAYDWORD3218564294967295PouTypeFunctionBlockconditionalshowST_WD_GPIO_InfoEx192nTypeUINT160nLengthUINT1616nFlagsWORD1632nReserved2UINT1648nAddressDWORD3264nReserved3DWORD3296nBitmaskDWORD32128nReserved4DWORD32160FB_S_UPS_BAPI74624sNetIDT_AmsNetID19264ItemTypeInputiPLCPortUINT16256ItemTypeInputtTimeoutTIME322885000ItemTypeInputeUpsModeE_S_UPS_Mode16320E_S_UPS_Mode.eSUPS_WrPersistData_ShutdownItemTypeInputePersistentModeE_PersistentMode16336E_PersistentMode.SPDM_2PASSItemTypeInputtRecoverTimeTIME3235210000ItemTypeInputbPowerFailDetectBOOL8384ItemTypeOutputeStateE_S_UPS_State16400E_S_UPS_State.eSUPS_PowerOKItemTypeOutputnCapacityBYTE84160ItemTypeOutputbBusyBOOL8424ItemTypeOutputbErrorBOOL8432ItemTypeOutputnErrIDUDINT32448ItemTypeOutputfbSUpsGetGpioInfoFB_BaDeviceIoControl11200512.nModifier0.affinity.lower0.affinity.higher0.nIdxGrp20480.nIdxOffs161conditionalshownSUpsGetGpioInfoDWORD3211712conditionalshownGpioStateINT1611744conditionalshowfbSUpsGetStateFB_BaDeviceIoControl1120011776.nModifier0.affinity.lower0.affinity.higher0.nIdxGrp20480.nIdxOffs1conditionalshownCapacityRspBYTE822976conditionalshowbChargingBOOL822984conditionalshowbDischargingBOOL822992conditionalshownGetStateINT1623008conditionalshownUpsStateINT1623024conditionalshowfbUpsStateTimerTON25623040.INtrueconditionalshowfbStartupTimerTON25623296.INtrue.PT0conditionalshownInitStateINT1623552conditionalshowdxValueDWORD3223584conditionalshowdxStatusDWORD3223616conditionalshowdxBitMaskDWORD3223648conditionalshownBitNoBYTE823680conditionalshowbBitLevelBOOL823688conditionalshowbStatusBOOL823696conditionalshowbLowActiveBOOL823704conditionalshowbHighActiveBOOL823712conditionalshowbOldSupsVersionBOOL823720trueconditionalshowfbSUpsEnableFB_BaDeviceIoControl1120023744.nModifier0.affinity.lower0.affinity.higher0.nIdxGrp20480.nIdxOffs0conditionalshowbSUpsBOOL834944trueconditionalshowbSUpsEnableBOOL834952trueconditionalshownEnableStateINT1634960conditionalshowbEnableNotSupportedBOOL834976conditionalshowfbSUpsStatusFB_BaDeviceIoControl1120035008.nModifier0.affinity.lower0.affinity.higher0.nIdxGrp20480.nIdxOffs1conditionalshownSUpsStatusBYTE8462080conditionalshowbSUpsStatusBOOL846216trueconditionalshowfbSUpsGetRevisionFB_BaDeviceIoControl1120046272.nModifier0.affinity.lower0.affinity.higher0.nIdxGrp20480.nIdxOffs2conditionalshownSUpsVersionDataBYTE032457472conditionalshowbSUpsGetRevisionBOOL857496trueconditionalshowsSupsVersionSTRING(15)12857504conditionalshownRevisionStateINT1657632conditionalshowfbBaGenGetVersionFB_BaGenGetVersion1184057664conditionalshowbBaGenGetVersionBOOL869504trueconditionalshownVersionBYTE869512conditionalshownRevisionBYTE869520conditionalshownBuildWORD1669536conditionalshowsBaVersionSTRING(15)12869552conditionalshowbOldBaVersionBOOL869680trueconditionalshowbPowerFailDetectPrevBOOL869688conditionalshowbPowerOKInFirstCycleBOOL869696conditionalshowfbWritePersistentDataFB_WritePersistentData172869760conditionalshowfbNT_QuickShutdownFB_NT_QuickShutdown192071488conditionalshowWaitForOffTimerTON25673408conditionalshowbFirstCycleBOOL873664trueconditionalshowpAddress1BYTE6473728conditionalshowdxValue1BYTE873792conditionalshowdxBitMask1BYTE873800conditionalshowpAddress2WORD6473856conditionalshowdxValue2WORD1673920conditionalshowdxBitMask2WORD1673936conditionalshowpAddress4DWORD6473984conditionalshowdxValue4DWORD3274048conditionalshowdxBitMask4DWORD3274080conditionalshowpAddress8LWORD6474112conditionalshowdxValue8LWORD6474176conditionalshowdxBitMask8LWORD6474240conditionalshowbUseInfoBOOL874304TcPersistentconditionalshownIoAddrUDINT3274336TcPersistentconditionalshownOffsetBYTE874368TcPersistentconditionalshownParamsBYTE874376TcPersistentconditionalshowbUseInfoExBOOL874384TcPersistentconditionalshowstGpioInfoExST_WD_GPIO_InfoEx19274400TcPersistentconditionalshowPouTypeFunctionBlockconditionalshow_all_localsRANGEJD1280ENABLEBOOL864ItemTypeInputSVLREAL64128ItemTypeInputPVLREAL64192ItemTypeInputRANGE_ALARM_HLREAL64256ItemTypeInputRANGE_ALARM_LLREAL64320ItemTypeInputRANGE_WARNING_HLREAL64384ItemTypeInputRANGE_WARNING_LLREAL64448ItemTypeInputTIME_ALARMLREAL64512ItemTypeInputTIME_WARNINGLREAL64576ItemTypeInputALARMBOOL8640ItemTypeOutputWARNINGBOOL8648ItemTypeOutputTON_ALARMTON256704TON_WARNINGTON256960STATUS_ALARMBOOL81216STATUS_WARNINGBOOL81224PouTypeFunctionBlockE_CTRL_MODE16INTeCTRL_MODE_IDLE0eCTRL_MODE_PASSIVE1eCTRL_MODE_ACTIVE2eCTRL_MODE_RESET3eCTRL_MODE_MANUAL4eCTRL_MODE_TUNE5eCTRL_MODE_SELFTEST6eCTRL_MODE_SYNC_MOVEMENT7eCTRL_MODE_FREEZE8E_CTRL_STATE16INTeCTRL_STATE_IDLE0eCTRL_STATE_PASSIVE1eCTRL_STATE_ACTIVE2eCTRL_STATE_RESET3eCTRL_STATE_MANUAL4eCTRL_STATE_TUNING5eCTRL_STATE_TUNED6eCTRL_STATE_SELFTEST7eCTRL_STATE_ERROR8eCTRL_STATE_SYNC_MOVEMENT9eCTRL_STATE_FREEZE10E_CTRL_ERRORCODES16INTeCTRL_ERROR_NOERROR0eCTRL_ERROR_INVALIDTASKCYCLETIME1eCTRL_ERROR_INVALIDCTRLCYCLETIME2eCTRL_ERROR_INVALIDPARAM3eCTRL_ERROR_INVALIDPARAM_Tv4eCTRL_ERROR_INVALIDPARAM_Td5eCTRL_ERROR_INVALIDPARAM_Tn6eCTRL_ERROR_INVALIDPARAM_Ti7eCTRL_ERROR_INVALIDPARAM_fHystereisisRange8eCTRL_ERROR_INVALIDPARAM_fPosOutOn_Off9eCTRL_ERROR_INVALIDPARAM_fNegOutOn_Off10eCTRL_ERROR_INVALIDPARAM_TableDescription11eCTRL_ERROR_INVALIDPARAM_TableData12eCTRL_ERROR_INVALIDPARAM_DataTableADR13eCTRL_ERROR_INVALIDPARAM_T014eCTRL_ERROR_INVALIDPARAM_T115eCTRL_ERROR_INVALIDPARAM_T216eCTRL_ERROR_INVALIDPARAM_T317eCTRL_ERROR_INVALIDPARAM_Theta18eCTRL_ERROR_INVALIDPARAM_nOrder19eCTRL_ERROR_INVALIDPARAM_Tt20eCTRL_ERROR_INVALIDPARAM_Tu21eCTRL_ERROR_INVALIDPARAM_Tg22eCTRL_ERROR_INVALIDPARAM_infinite_slope23eCTRL_ERROR_INVALIDPARAM_fMaxIsLessThanfMin24eCTRL_ERROR_INVALIDPARAM_fOutMaxLimitIsLessThanfOutMinLimit25eCTRL_ERROR_INVALIDPARAM_fOuterWindow26eCTRL_ERROR_INVALIDPARAM_fInnerWindow27eCTRL_ERROR_INVALIDPARAM_fOuterWindowIsLessThanfInnerWindow28eCTRL_ERROR_INVALIDPARAM_fDeadBandInput29eCTRL_ERROR_INVALIDPARAM_fDeadBandOutput30eCTRL_ERROR_INVALIDPARAM_PWM_Cycletime31eCTRL_ERROR_INVALIDPARAM_no_Parameterset32eCTRL_ERROR_INVALIDPARAM_fOutOn33eCTRL_ERROR_INVALIDPARAM_fOutOff34eCTRL_ERROR_INVALIDPARAM_fGain35eCTRL_ERROR_INVALIDPARAM_fOffset36eCTRL_ERROR_MODE_NOT_SUPPORTED37eCTRL_ERROR_INVALIDPARAM_Tv_heating38eCTRL_ERROR_INVALIDPARAM_Td_heating39eCTRL_ERROR_INVALIDPARAM_Tn_heating40eCTRL_ERROR_INVALIDPARAM_Tv_cooling41eCTRL_ERROR_INVALIDPARAM_Td_cooling42eCTRL_ERROR_INVALIDPARAM_Tn_cooling43eCTRL_ERROR_RANGE_NOT_SUPPORTED44eCTRL_ERROR_INVALIDPARAM_nParameterChangeCycleTicks45eCTRL_ERROR_ParameterEstimationFailed46eCTRL_ERROR_NoiseLevelToHigh47eCTRL_ERROR_INTERNAL_ERROR_048eCTRL_ERROR_INTERNAL_ERROR_149eCTRL_ERROR_INTERNAL_ERROR_250eCTRL_ERROR_INTERNAL_ERROR_351eCTRL_ERROR_INTERNAL_ERROR_452eCTRL_ERROR_INTERNAL_ERROR_553eCTRL_ERROR_INTERNAL_ERROR_654eCTRL_ERROR_INTERNAL_ERROR_755eCTRL_ERROR_INTERNAL_ERROR_856eCTRL_ERROR_INTERNAL_ERROR_957eCTRL_ERROR_INVALIDPARAM_WorkArrayADR58eCTRL_ERROR_INVALIDPARAM_tOnTime59eCTRL_ERROR_INVALIDPARAM_tOffTime60eCTRL_ERROR_INVALIDPARAM_nMaxMovingPulses61eCTRL_ERROR_INVALIDPARAM_nAdditionalPulsesAtLimits62eCTRL_ERROR_INVALIDPARAM_fCtrlOutMax_Min63eCTRL_ERROR_INVALIDPARAM_fDeltaMax64eCTRL_ERROR_INVALIDPARAM_tMovingTime65eCTRL_ERROR_INVALIDPARAM_tDeadTime66eCTRL_ERROR_INVALIDPARAM_tAdditionalMoveTimeAtLimits67eCTRL_ERROR_INVALIDPARAM_fThreshold68eCTRL_ERROR_MEMCPY69eCTRL_ERROR_MEMSET70eCTRL_ERROR_INVALIDPARAM_nNumberOfColumns71eCTRL_ERROR_FileClose72eCTRL_ERROR_FileOpen73eCTRL_ERROR_FileWrite74eCTRL_ERROR_INVALIDPARAM_fVeloNeg75eCTRL_ERROR_INVALIDPARAM_fVeloPos76eCTRL_ERROR_INVALIDPARAM_DeadBandInput77eCTRL_ERROR_INVALIDPARAM_DeadBandOutput78eCTRL_ERROR_INVALIDPARAM_CycleDuration79eCTRL_ERROR_INVALIDPARAM_tStart80eCTRL_ERROR_INVALIDPARAM_StepHeigthTuningToLow81eCTRL_ERROR_INVALIDPARAM_fMinLimitIsLessThanZero82eCTRL_ERROR_INVALIDPARAM_fMaxLimitIsGreaterThan10083eCTRL_ERROR_INVALIDPARAM_fStepSize84eCTRL_ERROR_INVALIDPARAM_fOkRangeIsLessOrEqualZero85eCTRL_ERROR_INVALIDPARAM_fForceRangeIsLessOrEqualfOkRange86eCTRL_ERROR_INVALIDPWMPeriod87eCTRL_ERROR_INVALIDPARAM_tMinimumPulseTime88eCTRL_ERROR_FileDelete89eCTRL_ERROR_INVALIDPARAM_nNumberOfPwmOutputs90eCTRL_ERROR_INVALIDPARAM_nPwmInputArray_SIZEOF91eCTRL_ERROR_INVALIDPARAM_nPwmOutputArray_SIZEOF92eCTRL_ERROR_INVALIDPARAM_nPwmWaitTimesConfig_SIZEOF93eCTRL_ERROR_INVALIDPARAM_nPwmInternalData_SIZEOF94eCTRL_ERROR_SIZEOF95eCTRL_ERROR_INVALIDPARAM_nOrderOfTheTransferfunction96eCTRL_ERROR_INVALIDPARAM_nNumeratorArray_SIZEOF97eCTRL_ERROR_INVALIDPARAM_nDenominatorArray_SIZEOF98eCTRL_ERROR_INVALIDPARAM_a_n_IsZero99eCTRL_ERROR_INVALIDPARAM_WorkArraySIZEOF100eCTRL_ERROR_INVALIDPARAM_MOVINGRANGE_MIN_MAX101eCTRL_ERROR_INVALIDPARAM_MOVINGTIME102eCTRL_ERROR_INVALIDPARAM_DEADTIME103eCTRL_ERROR_INVALIDPARAM_fMinLimitIsGreaterThanfMaxLimit104eCTRL_ERROR_INVALIDPARAM_DataTableSIZEOF105eCTRL_ERROR_INVALIDPARAM_OutputVectorDescription106eCTRL_ERROR_TaskCycleTimeIsLessThanOneMillisecond107eCTRL_ERROR_INVALIDPARAM_nMinMovingPulses108eCTRL_ERROR_INVALIDPARAM_fAcceleration109eCTRL_ERROR_INVALIDPARAM_fDeceleration110eCTRL_ERROR_INVALIDPARAM_StartAndTargetPos111eCTRL_ERROR_INVALIDPARAM_fVelocity112eCTRL_ERROR_INVALIDPARAM_fTargetPos113eCTRL_ERROR_INVALIDPARAM_fStartPos114eCTRL_ERROR_INVALIDPARAM_fMovingLength115eCTRL_ERROR_NT_GetTime116eCTRL_ERROR_INVALIDPARAM_No3PhaseSolutionPossible117eCTRL_ERROR_INVALIDPARAM_fStartVelo118eCTRL_ERROR_INVALIDPARAM_fTargetVelo119eCTRL_ERROR_INVALID_NEW_PARAMETER_TYPE120eCTRL_ERROR_INVALIDPARAM_fBaseTime121eCTRL_ERROR_INVALIDPARAM_nOrderOfTheTransferfunction_SIZEOF122eCTRL_ERROR_INVALIDPARAM_nFilterOrder124eCTRL_ERROR_INVALIDPARAM_nCoefficientsArray_a_SIZEOF125eCTRL_ERROR_INVALIDPARAM_nCoefficientsArray_b_SIZEOF126eCTRL_ERROR_INVALIDPARAM_nDigitalFiterData_SIZEOF127eCTRL_ERROR_INVALIDPARAM_nLogBuffer_SIZEOF128eCTRL_ERROR_LogBufferOverflow129eCTRL_ERROR_INVALIDPARAM_nLogBuffer_ADR130eCTRL_ERROR_INVALIDPARAM_nCoefficientsArray_a_ADR131eCTRL_ERROR_INVALIDPARAM_nCoefficientsArray_b_ADR132eCTRL_ERROR_INVALIDPARAM_nPwmInputArray_ADR133eCTRL_ERROR_INVALIDPARAM_nPwmOutputArray_ADR134eCTRL_ERROR_INVALIDPARAM_nPwmWaitTimesConfig_ADR135eCTRL_ERROR_INVALIDPARAM_nPwmInternalData_ADR136eCTRL_ERROR_INVALIDPARAM_nDigitalFiterData_ADR137eCTRL_ERROR_INVALIDPARAM_nNumeratorArray_ADR138eCTRL_ERROR_INVALIDPARAM_nDenominatorArray_ADR139eCTRL_ERROR_INVALIDPARAM_nTransferfunction1Data_ADR140eCTRL_ERROR_INVALIDPARAM_nTransferfunction2Data_ADR141eCTRL_ERROR_FileSeek142eCTRL_ERROR_INVALIDPARAM_AmbientTempMaxIsLessThanAmbientTempMin143eCTRL_ERROR_INVALIDPARAM_ForerunTempMaxIsLessThanForerunTempMin144eCTRL_ERROR_INVALIDLOGCYCLETIME145eCTRL_ERROR_INVALIDVERSION_TcControllerToolbox146eCTRL_ERROR_INVALIDPARAM_Bandwidth147eCTRL_ERROR_INVALIDPARAM_NotchFrequency148eCTRL_ERROR_INVALIDPARAM_DampingCoefficient149eCTRL_ERROR_INVALIDPARAM_fKpIsLessThanZero150eCTRL_ERROR_INVALIDPARAM_nSamplesToFilter151ST_CTRL_PID_PARAMS448tCtrlCycleTimeTIME3200tTaskCycleTimeTIME32320fKpLREAL64640tTnTIME321280tTvTIME321600tTdTIME321920fOutMaxLimitLREAL642561E+38fOutMinLimitLREAL64320-1E+38bPInTheFeedbackPathBOOL8384falsebDInTheFeedbackPathBOOL8392falsebARWOnIPartOnlyBOOL8400falseFB_License64PouTypeFunctionBlockhideFB_CTRL_PID2944fSetpointValueLREAL6464ItemTypeInputfActualValueLREAL64128ItemTypeInputfManSyncValueLREAL64192ItemTypeInputbSyncBOOL8256ItemTypeInputeModeE_CTRL_MODE16272ItemTypeInputbHoldBOOL8288ItemTypeInputfOutLREAL64320ItemTypeOutputbARWactiveBOOL8384ItemTypeOutputeStateE_CTRL_STATE16400ItemTypeOutputeErrorIdE_CTRL_ERRORCODES16416ItemTypeOutputbErrorBOOL8432ItemTypeOutputstParamsST_CTRL_PID_PARAMS64448ItemTypeInOutstInternalParamsST_CTRL_PID_PARAMS448512stInternalCycleTimeInterpretationST_CTRL_CYCLE_TIME_INTERPRETATION128960bFirstInitBOOL81088truebFirstCallAfterAStateChangeBOOL81096falsefD_ILREAL641152fC_DLREAL641216fD_DLREAL641280fTaskCycleTimeLREAL641344fCtrlCycleTimeLREAL641408fHalfCtrlCycleTimeLREAL641472fTnLREAL641536fTvLREAL641600fTdLREAL641664bIPartEnabledBOOL81728bDPartEnabledBOOL81736fSyncValueInternalLREAL641792fLimitValueLREAL641856fELREAL6419200fE_1LREAL6419840fY_PLREAL6420480fY_ILREAL6421120fY_I_1LREAL6421760fY_DLREAL6422400fY_D_1LREAL6423040fYLREAL6423680fY_1LREAL6424320fActValLREAL6424960fActVal_1LREAL6425600nCtrlCycleTicksUDINT322624nActCtrlCycleTickUDINT322656eMode_oldE_CTRL_MODE162688bMaxLimitReachedBOOL82704bMinLimitReachedBOOL82712bSyncRequestBOOL82720fbR_TRIGR_TRIG1282752fbLicenseFB_License642880M_ErrorM_ResetM_ManualM_ActiveM_StateChangeM_PassiveM_InitPouTypeFunctionBlockPID_AutoTune896PVREAL3264ItemTypeInputAutoTuneActiveBOOL896ItemTypeInputStepResponseAmplitudeREAL3212820ItemTypeInputOutputREAL32160ItemTypeOutputKpREAL32192ItemTypeOutputKiREAL32224ItemTypeOutputKdREAL32256ItemTypeOutputDoneBOOL8288ItemTypeOutputStepResponseStartTimeREAL323200StepResponsePVStartREAL32352StepResponsePVEndREAL32384StepResponseTimeREAL32416KuREAL32448TuREAL32480CurrentTimeREAL32512NT_TimeTIME32544D_DecTON256576monitorREAL32832PouTypeFunctionBlockTemp_controller7360ENABLEBOOL864ItemTypeInputAUTO_TUNEBOOL872ItemTypeInputAUTO_TUNE_OUTPUTREAL3296ItemTypeInputTEMP_SVREAL32128ItemTypeInputTEMP_ACTUALREAL32160ItemTypeInputTEMP_RATEREAL32192ItemTypeInputPID_PREAL32224ItemTypeInputPID_IREAL32256ItemTypeInputPID_DREAL32288ItemTypeInputPID_DpREAL32320ItemTypeInputPID_FeedforwardREAL32352ItemTypeInputPID_Output_LimitREAL32384ItemTypeInputPID_AUTO_TUNE_PREAL32416ItemTypeOutputPID_AUTO_TUNE_IREAL32448ItemTypeOutputPID_AUTO_TUNE_DREAL32480ItemTypeOutputPID_AUTO_TUNE_DONEBOOL8512ItemTypeOutputSCR_OUTREAL32544ItemTypeOutputSSR_ONBOOL8576ItemTypeOutputSAMPLING_TIMETIME32608T#1SPID_NMFB_CTRL_PID2944640PID_PARAMSST_CTRL_PID_PARAMS4483584PID_MODEE_CTRL_MODE164032PID_OUTPUTLREAL644096PID_FUC_STATEE_CTRL_STATE164160PID_ERRIDE_CTRL_ERRORCODES164176PID_ERRBOOL84192PID_TASKTIMETIME324224T#800MSPID_CYCLETIMETIME324256T#800MSSSR_ON_PERCENTREAL324288TEMP_DATA_ARRREAL1103204320FIRST_RUNR_TRIG1284672SAMPLING_TON1TON2564800SAMPLING_TON2TON2565056SAMPLING_TON1_ENBOOL85312SAMPLING_TON2_ENBOOL85320TEMP_AVERAGEREAL325344iINT165376SSR_ON_TIMETIME325408SSR_RESET_TIMETIME325440SSR_ON_TONTON2565504SSR_RESET_TONTON2565760SSR_ON_ENABLEBOOL86016SSR_RESET_ENABLEBOOL86024PID_AUTO_TUNEPID_AutoTune8966080TON_FOR_RATETON2566976CACHE_TEMP_SVREAL327232TEMP_SV_TO_PIDREAL327264EACH_STEP_TEMPREAL327296PouTypeFunctionBlockCHAMBER_IN832C02BOOL1161280C03BOOL116128128C04INT18128256C05INT18128384C06INT1464512C11BOOL1864576C12BOOL1432640C13BOOL1432672C15INT18128704IGS_IN704C32INT14640C33INT146464C34INT1464128C35INT1464192C36BOOL116128256C37BOOL116128384C38BOOL1432512C39BOOL1432544C40INT18128576STR_FCSP700_INPUT224Active_Exception_StatusUSINT80Flow_ReadingREAL3232Pressure_ReadingREAL3264Temperature_ReadingREAL3296Position_ReadbackREAL32128Position_SetpointREAL32160WcStateBIT1192InputToggleBIT1193StateUINT16208VAT_IN224Actual_PressureREAL320Pressure_Sensor_1REAL3232Pressure_Sensor_2REAL3264Actual_PositionREAL3296Control_ModeSINT8128Error_NumberUINT16144General_StatusUINT16160General_WarningsUINT16176Extended_WarningsUINT16192TMP_IN112RotationBIT10NormalBIT11AccelerationBIT12Deceleration_Includes_BrakingBIT13Remote_LocalBIT14Turbo_Low_SpeedBIT15AlarmBIT16WarningBIT17Turbo_SpeedINT1616Turbo_CurrentINT1632Turbo_pump_temperatureINT1648VibrationHINT1664VibrationBINT1680VibrationZINT1696STR_CDG200D192Reading_Valid1BOOL80Overrange_Exceeded1BOOL88Underrange_Exceeded1BOOL816Sensor_Value1REAL3232Reading_Valid2BOOL864Overrange_Exceeded2BOOL872Underrange_Exceeded2BOOL880Sensor_Value2REAL3296Active_Exception_StatusUSINT8128Trip_Point_Output_All_InstaUDINT32160STR_BPG400224Combination_Gauge_Reading_Valid_Module_1BIT10Combination_Gauge_Overrange_Exceeded_Module_1BIT11Combination_Gauge_Underrange_Exceeded_Module_1BIT12Combination_Gauge_Active_Value_Module_1REAL3232Combination_Gauge_Active_Sensor_Number_Module_1UINT1664Combin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321344Chamber_Temp2REAL321376Chamber_Temp3REAL321408Chamber_Temp_MonitorREAL321440Stage_Temp1REAL321472Stage_Temp2REAL321504Stage_Temp3REAL321536Stage_Temp4REAL321568PG_PS1_ValueREAL321600PG_PS2_ValueREAL321632PG_PS3_ValueREAL321664PG_PS4_ValueREAL321696PG_PS5_ValueREAL321728PG_PS6_ValueREAL321760PG_PS7_ValueREAL321792PG_PS8_ValueREAL321824PG_PS9_ValueREAL321856PS1_ValueREAL321888PS2_ValueREAL321920MS1_ValueREAL321952GD01_ValueREAL321984GD02_ValueREAL322016APCVAT_IN2242048TMPTMP_IN1122272VG103_PVREAL322400VG101_PVREAL322432VG102_PVREAL322464BA1_PVREAL322496VG104_PVREAL322528STR_AO1504MFC1_Flow_SetpointREAL320MFC1_Rate_SetpointREAL3232MFC2_Flow_SetpointREAL3264MFC2_Rate_SetpointREAL3296MFC3_Flow_SetpointREAL32128MFC3_Rate_SetpointREAL32160MFC4_Flow_SetpointREAL32192MFC4_Rate_SetpointREAL32224MFC5_Flow_SetpointREAL32256MFC5_Rate_SetpointREAL32288MFC6_Flow_SetpointREAL32320MFC6_Rate_SetpointREAL32352MFC7_Flow_SetpointREAL32384MFC7_Rate_SetpointREAL32416LID_Temp_SVREAL32448Chamber_Temp1_SVREAL32480Chamber_Temp2_SVREAL32512Chamber_Temp3_SVREAL32544AV102_Temp_SVREAL32576AV101_Temp_SVREAL32608AV106_Temp_SVREAL32640BA01_Temp_SVREAL32672VG103_Pipe_Temp_SVREAL32704Exhaust1_6_Temp_SVREAL32736Exhaust7_8_Temp_SVREAL32768VG101_Pipe_Temp_SVREAL32800Gate_Valve_Temp_SVREAL32832APC_Temp_SVREAL32864TMP_Temp_SVREAL32896Tape_Temp1_SVREAL32928Tape_Temp2_SVREAL32960Tape_Temp3_SVREAL32992IGS_Temp1_SVREAL321024IGS_Temp2_SVREAL321056Chiller_Temp1_SVREAL321088Chiller_Temp2_SVREAL321120Stage_Temp1_SVREAL321152Stage_Temp2_SVREAL321184Chiller1_OnREAL321216Chiller2_OnREAL321248APCVAT_OUT1921280TMPTMP_OUT81472ConfigPM1536TurboN2PressureINT160PrepareTransferTimeoutINT1616TransferWaferTimeoutINT1632OpenGasValveTimeoutINT1648CloseGasValveTimeoutINT1664OpenCloseSlitValveTimeoutINT1680GasFlowPressureAlarmRangeLREAL64128GasFlowPressureAlarmTimeLREAL64192GasFlowPressureWarningRangeLREAL64256GasFlowPressureWarningTimeLREAL64320EnableThrottleValveBOOL8384ValveHeaterSetPointLimitINT16400ForeLineHeaterSetPointLimitINT16416CheckSubstrateTempTimeoutINT16432CheckATMTimeoutINT16448OverVentTimeUINT16464ChamberBasePressureThresholdUDINT32480ChamberBaseTemperatureThresholdLREAL64512ProcessPressureOffsetLREAL64576PickDelayTimeINT16640PlaceDelayTimeINT16656ChamberLabelSTRING(80)648672WallHeaterSetPointLimitINT161328PendulumHeaterSetPointLimitINT161344EnableWallHeaterBOOL81360EnableGridHeaterBOOL81368RecipeRunningModeINT161376ForelineInterlockPressureLREAL641408IsEnableRecipeExtensionBOOL81472ControlPressureSetPointINT161488ControlPressureN2FlowSetPointINT161504PMStableTimeINT161520SVLREAL256MinSVLREAL640MaxSVLREAL6464PVLREAL64128SVLREAL64192SVINT64MinSVINT160MaxSVINT1616PVINT1632SVINT1648ConfigMfcVer1472BasePressureSVLREAL2560PumpingTimeSVINT64256GasFlowTimeSVINT64320HoldTimeSVINT64384TargetPressureSVLREAL256448MaxDeviationSVLREAL256704PressureStableToleranceSVLREAL256960FlowStableToleranceSVLREAL2561216ConfigChiller1792EnableBOOL80MFGSVINT6416CommTypeSVINT6480PortSTRING(80)648144TempOffsetSVLREAL256832MaxLimitSVLREAL2561088MinLimitSVLREAL2561344EnableAlarmToleranceBOOL81600ToleranceAlarmRangeSVINT641616ToleranceAlarmTimeSVINT641680ConfigDryPump1152MFGSVINT640CommTypeSVINT6464PortSTRING(80)648128ChamberForlinePressureToleranceSVLREAL256832ChamberForlinePressureTimeoutSVINT641088ConfigMfcGas1728EnableBOOL80GasNameSTRING(80)6488N2ScaleSVLREAL256704ScaleFactorSVLREAL256960DefaultSVSVINT641216FlowRegulationFactorSVINT641280EnableAlarmBOOL81344AlarmRangeSVINT641360AlarmTimeSVINT641424WarningRangeSVINT641488WarningTimeSVINT641552WriteModeSVINT641616ConfigPump2560LeakRateSVLREAL2560LeakCheckPumpingTimeSVINT64256LeakCheckHoldTimeSVINT64320PumpBasePressureSVINT64384LeakCheckBasePressurSVLREAL256448LeakCheckGasLineNumsSTRING(80)648704PumpTimeLimitSVLREAL2561408PumpValveDelaySVINT641664PumpCrossingPressureSVINT641728PumpVHe2FlowPressureSVINT641792LoadLockPumpBasePressureSVINT641856LoadLockPumpTimeLimitSVINT641920LoadLockPurgeVentPressureSVINT641984LoadLockPurgeCycleCountSVINT642048LoadLockPurgePumpTimeSVINT642112LoadLockLeakCheckPumpTimeSVINT642176LoadLockLeakCheckWaitTimeSVINT642240LoadLockLeakRateSVLREAL2562304ConfigPurge640PurgeCycleCountSVINT640PurgeVentPressureSVINT6464PurgePumpPressureSVINT64128PurgeVentTimeLimitSVINT64192PurgePumpTimeLimitSVINT64256PurgeVentStableTimeSVINT64320PurgePumpTimeSVINT64384GasPurgeCycleCountSVINT64448GasPurgeFlowTimeSVINT64512GasPurgePumpTimeSVINT64576ConfigHeater272HeaterTolerance_EnableBOOL80HeaterAlarmRangeSVINT6416HeaterAlarmTimeSVINT6480HeaterWarningRangeSVINT64144HeaterWarningTimeSVINT64208ConfigElectrostaticVoltageSource648PortSTRING(80)6480ConfigTurboPump1024PortSTRING(80)6480ChamberForelinePressureThresholdSVLREAL256704ChamberForelinePressureTimeoutSVINT64960ConfigPendulumValve912PortSTRING(80)6480PressureFullRangeSVINT64656ForelinePressureLimitSVINT64720ChamberPressureLimitSVINT64784TurboPumpSpeedLimitSVINT64848ConfigIdleClean1568OptionSVINT640IdleCleanRecipeSTRING(80)64864IdleCleanTimeSVINT64720IdleCleanWaferCountSVINT64784WaferCountSinceLastCleanSVINT64848LastRunTimeSTRING(80)648912ConfigEPD800IsEnabledBOOL80ChannelNumberSVINT6416IPAdressSTRING(80)64880EPDTypeSVINT64736ConfigHighTempChiller2816LiftServoPosition1SVLREAL2560LiftServoPosition2SVLREAL256256LiftServoPosition3SVLREAL256512LiftServoPosition4SVLREAL256768LiftServoPosition5SVLREAL2561024OriginSearchHighSpeedSVLREAL2561280OriginSearchLowSpeedSVLREAL2561536AbsMoveSpeedSVLREAL2561792MaxMoveSpeedSVLREAL2562048SoftDownLimitSVLREAL2562304SoftUpLimitSVLREAL2562560STR_PID192PREAL320IREAL3232DREAL3264DPREAL3296FeedforwardREAL32128Output_LimitREAL32160PLC_TO_SPLC96Lid_Temp_OKBOOL80Chamber_Temp_OKBOOL88APC_Temp_OKBOOL816Gate_Valve_Temp_OKBOOL824Gas_Line_Temp_OKBOOL832TMP_Interlock_OKBOOL840PS1_Interlock_OKBOOL848PS2_Interlock_OKBOOL856VG101_LOWER_10TorrBOOL864SPLC_ErrorAcknowledgementBOOL872SPLC_RestartBOOL880SPLC_RunBOOL888Warning320PRESSUREBOOL80MFC1BOOL88MFC2BOOL816MFC3BOOL824MFC4BOOL832MFC5BOOL840MFC6BOOL848MFC7BOOL856MFC8BOOL864MFC9BOOL872WALL_TEMPBOOL880LID_TEMPBOOL888STAGE_EDGE_TEMPBOOL896STAGE_CENTER_TEMPBOOL8104CHILLER1BOOL8112CHILLER2BOOL8120OpenCloseSlitValveTimeoutBOOL8128Gas1FlowPressureOutOfRangeBOOL8136Gas2FlowPressureOutOfRangeBOOL8144Gas3FlowPressureOutOfRangeBOOL8152Gas4FlowPressureOutOfRangeBOOL8160Gas5FlowPressureOutOfRangeBOOL8168Gas6FlowPressureOutOfRangeBOOL8176Gas7FlowPressureOutOfRangeBOOL8184Gas8FlowPressureOutOfRangeBOOL8192Gas9FlowPressureOutOfRangeBOOL8200TOLERANCE_PRESSUREBOOL8208TOLERANCE_MFC1BOOL8216TOLERANCE_MFC2BOOL8224TOLERANCE_MFC3BOOL8232TOLERANCE_MFC4BOOL8240TOLERANCE_MFC5BOOL8248TOLERANCE_MFC6BOOL8256TOLERANCE_MFC7BOOL8264TOLERANCE_MFC8BOOL8272TOLERANCE_MFC9BOOL8280TOLERANCE_WALL_TEMPBOOL8288TOLERANCE_LID_TEMPBOOL8296TOLERANCE_STAGE_EDGE_TEMPBOOL8304TOLERANCE_STAGE_CENTER_TEMPBOOL8312Alarm400PRESSUREBOOL80MFC1BOOL88MFC2BOOL816MFC3BOOL824MFC4BOOL832MFC5BOOL840MFC6BOOL848MFC7BOOL856MFC8BOOL864MFC9BOOL872WALL_TEMPBOOL880LID_TEMPBOOL888STAGE_EDGE_TEMPBOOL896STAGE_CENTER_TEMPBOOL8104Gas1FlowPressureOutOfRangeBOOL8112Gas2FlowPressureOutOfRangeBOOL8120Gas3FlowPressureOutOfRangeBOOL8128Gas4FlowPressureOutOfRangeBOOL8136Gas5FlowPressureOutOfRangeBOOL8144Gas6FlowPressureOutOfRangeBOOL8152Gas7FlowPressureOutOfRangeBOOL8160Gas8FlowPressureOutOfRangeBOOL8168Gas9FlowPressureOutOfRangeBOOL8176TurboN2PurgePressureOutOfRangeBOOL8184PrepareTransferTimeroutBOOL8192TransferWaferTimeoutBOOL8200OpenGasValveTimeoutBOOL8208CloseGasValveTimeoutBOOL8216OpenCloseSlitValveTimeoutBOOL8224ATMCheckTimeoutBOOL8232PLCBOOL8240DRY_PUMPBOOL8248PENDULUM_VALVEBOOL8256TURBO_PUMPBOOL8264CHILLER1BOOL8272CHILLER2BOOL8280TOLERANCE_PRESSUREBOOL8288TOLERANCE_MFC1BOOL8296TOLERANCE_MFC2BOOL8304TOLERANCE_MFC3BOOL8312TOLERANCE_MFC4BOOL8320TOLERANCE_MFC5BOOL8328TOLERANCE_MFC6BOOL8336TOLERANCE_MFC7BOOL8344TOLERANCE_MFC8BOOL8352TOLERANCE_MFC9BOOL8360TOLERANCE_WALL_TEMPBOOL8368TOLERANCE_LID_TEMPBOOL8376TOLERANCE_STAGE_EDGE_TEMPBOOL8384TOLERANCE_STAGE_CENTER_TEMPBOOL8392Info720WarningWarning3200AlarmAlarm400320ProcessRecipeFeedBack64ProcessStartBOOL80ProcessFinishedBOOL88ProcessErrorINT1616CurrentStepNoINT1632CurrentStepstartBOOL848CurrentStepFinishedBOOL856PlcLicenseInfo1024LicenseIdGUID1280InstancesUDINT32128LicenseNameSTRING(95)768256EPlcPersistentStatus8USINT012PlcAppSystemInfo2048ObjIdOTCID320TaskCntUDINT3232OnlineChangeCntUDINT3264FlagsDWORD3296AdsPortUINT16128BootDataLoadedBOOL8144OldBootDataBOOL8152AppTimestampDT32160KeepOutputsOnBPBOOL8192ShutdownInProgressBOOL8200LicensesPendingBOOL8208BSODOccuredBOOL8216LoggedInBOOL8224PersistentStatusEPlcPersistentStatus8232TComSrvPtrITComObjectServer32256TcComInterfaceAppNameSTRING(63)512512ProjectNameSTRING(63)5121024PlcTaskSystemInfo1024ObjIdOTCID320CycleTimeUDINT3232PriorityUINT1664AdsPortUINT1680CycleCountUDINT3296DcTaskTimeLINT64128LastExecTimeUDINT32192FirstCycleBOOL8224CycleTimeExceededBOOL8232InCallAfterOutputUpdateBOOL8240RTViolationBOOL8248TaskNameSTRING(63)512512_Implicit_KindOfTask16INT_implicit_cyclic0_implicit_event1_implicit_external2_implicit_freewheeling3hidegenerate_implicit_init_function_Implicit_Jitter_Distribution48wRangeMaxWORD160wCountJitterNegWORD1616wCountJitterPosWORD1632hide_Implicit_Task_Info896dwVersionDWORD320pszNameSTRING(80)6464nPriorityINT16128KindOf_Implicit_KindOfTask16144bWatchdogBOOL8160bProfilingTaskBOOL8168dwEventFunctionPointerBYTE64192pszExternalEventSTRING(80)64256dwTaskEntryFunctionPointerBYTE64320dwWatchdogSensitivityDWORD32384dwIntervalDWORD32416dwWatchdogTimeDWORD32448dwLastCycleTimeDWORD32480dwAverageCycleTimeDWORD32512dwMaxCycleTimeDWORD32544dwMinCycleTimeDWORD32576diJitterDINT32608diJitterMinDINT32640diJitterMaxDINT32672dwCycleCountDWORD32704wTaskStatusWORD16736wNumOfJitterDistributionsWORD16752pJitterDistribution_Implicit_Jitter_Distribution64768bWithinSPSTimeSlicingBOOL8832byDummyBYTE8840bShouldBlockBOOL8848bActiveBOOL8856dwIECCycleCountDWORD32864hideSPLC_TO_PLC184EV1_ENBOOL80EV2_ENBOOL88EV3_ENBOOL816EV4_ENBOOL824HTR_APC_ENBOOL832HTR_CHAMBER_ENBOOL840HTR_FORLINE_ENBOOL848HTR_GAS_BOXBOOL856HTR_GATE_VALVEBOOL864HTR_LIDBOOL872PROCESS_ENBOOL880DRY_PUMP_PW_ENBOOL888TMP_PW_ENBOOL896TRANSFER_ENBOOL8104VALVE_ACID_EXHAUST_OPEN_ENBOOL8112VALVE_CM_OPEN_ENBOOL8120VALVE_DRY_PUMP_ENBOOL8128VALVE_TMP_BACK_OPEN_ENBOOL8136VALVE_APC_OPEN_ENBOOL8144WAFER_MOVING_IN_ENBOOL8152Status_LidBOOL8160SPLC_Com_errBOOL8168SPLC_FB_ErrBOOL8176PLC{08500001-0000-0000-F000-000000000064}{1eebbaaa-51e1-4750-9d6a-7b04116ea32b}TF4110 Temperature Controller{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox{777f1598-583b-4503-99bb-7c02e0abd97e}TF4100 TC3 Controller Toolbox0PlcTask#x020100300PlcTask Inputs0851968ECC.CHAMBER_IN832CHAMBER_INTcAddressTypeInputTcVarGlobal3693376ECC.IGS_IN704IGS_INTcAddressTypeInputTcVarGlobal3694624ECC.MFC_PV2240STR_FCSP700_INPUT110TcAddressTypeInputTcVarGlobal3695488ECC.APC_PV224VAT_INTcAddressTypeInputTcVarGlobal3699136ECC.TURBO_PV112TMP_INTcAddressTypeInputTcVarGlobal3699552ECC.VG103_PV192STR_CDG200DTcAddressTypeInputTcVarGlobal3699680ECC.VG101_PV192STR_CDG200DTcAddressTypeInputTcVarGlobal3699872ECC.VG102_PV192STR_CDG200DTcAddressTypeInputTcVarGlobal3700064ECC.BA1_PV224STR_BPG400TcAddressTypeInputTcVarGlobal3700256ECC.VG104_PV192STR_CDG200DTcAddressTypeInputTcVarGlobal3700480ECC.CHILLER1_PV288CHILLER_INTcAddressTypeInputTcVarGlobal3700672ECC.CHILLER2_PV288CHILLER_INTcAddressTypeInputTcVarGlobal3701248GV_IL.SPLC_TO_PLC184SPLC_TO_PLCTcAddressTypeInputTcVarGlobal48575361PlcTask Outputs0851968ECC.TURBO_SV8TMP_OUTTcAddressTypeOutputTcVarGlobal3235176ECC.CHAMBER_OUT416CHAMBER_OUTTcAddressTypeOutputTcVarGlobal3694208ECC.IGS_OUT160IGS_OUTTcAddressTypeOutputTcVarGlobal3695328ECC.MFC_SV1280STR_FCSP700_OUTPUT110TcAddressTypeOutputTcVarGlobal3697728ECC.EV132STR_EX260_SECTcAddressTypeOutputTcVarGlobal3699008ECC.EV232STR_EX260_SECTcAddressTypeOutputTcVarGlobal3699040ECC.EV332STR_EX260_SECTcAddressTypeOutputTcVarGlobal3699072ECC.EV432STR_EX260_SECTcAddressTypeOutputTcVarGlobal3699104ECC.APC_SV192VAT_OUTTcAddressTypeOutputTcVarGlobal3699360ECC.CHILLER1_SV288CHILLER_OUTTcAddressTypeOutputTcVarGlobal3700960ECC.CHILLER2_SV288CHILLER_OUTTcAddressTypeOutputTcVarGlobal3701536GV_IL.PLC_TO_SPLC96PLC_TO_SPLCTcAddressTypeOutputTcVarGlobal41922483PlcTask Internal0851968Global_Version.stLibVersion_Tc2_ControllerToolbox288ST_LibVersion.iMajor3.iMinor6.iBuild1.iRevision0.nFlags1.sVersion3.6.1.0const_non_replacedTcVarGlobal3072000Global_Variables.nCTRL_LOGGER_DATA_ARRAY_SIZE16UINT10TcVarGlobal3072288Global_Variables.AMSPORT_LOGGER16UINT100TcVarGlobal3072304Global_Variables.stCtrl_GLOBAL_CycleTimeInterpretation128ST_CTRL_CYCLE_TIME_INTERPRETATIONTcVarGlobal3072320Global_Version.stLibVersion_Tc2_Standard288ST_LibVersion.iMajor3.iMinor4.iBuild5.iRevision0.nFlags1.sVersion3.4.5.0const_non_replacedTcVarGlobal3072448Global_Version.stLibVersion_Tc2_System288ST_LibVersion.iMajor3.iMinor6.iBuild4.iRevision0.nFlags1.sVersion3.6.4.0const_non_replacedTcVarGlobal3072736Global_Variables.AMSPORT_EVENTLOG16UINT110TcVarGlobal3073024Global_Variables.AMSPORT_R0_RTIME16UINT200TcVarGlobal3073040Global_Variables.AMSPORT_R0_IO16UINT300TcVarGlobal3073056Global_Variables.AMSPORT_R0_NC16UINT500TcVarGlobal3073072Global_Variables.AMSPORT_R0_NCSAF16UINT501TcVarGlobal3073088Global_Variables.AMSPORT_R0_NCSVB16UINT511TcVarGlobal3073104Global_Variables.AMSPORT_R0_ISG16UINT550TcVarGlobal3073120Global_Variables.AMSPORT_R0_CNC16UINT600TcVarGlobal3073136Global_Variables.AMSPORT_R0_LINE16UINT700TcVarGlobal3073152Global_Variables.AMSPORT_R0_PLC16UINT800TcVarGlobal3073168Global_Variables.AMSPORT_R0_PLC_RTS116UINT801TcVarGlobal3073184Global_Variables.AMSPORT_R0_PLC_RTS216UINT811TcVarGlobal3073200Global_Variables.AMSPORT_R0_PLC_RTS316UINT821TcVarGlobal3073216Global_Variables.AMSPORT_R0_PLC_RTS416UINT831TcVarGlobal3073232Global_Variables.AMSPORT_R0_CAM16UINT900TcVarGlobal3073248Global_Variables.AMSPORT_R0_CAMTOOL16UINT950TcVarGlobal3073264Global_Variables.AMSPORT_R3_SYSSERV16UINT10000TcVarGlobal3073280Global_Variables.AMSPORT_R3_SCOPESERVER16UINT14001TcVarGlobal3073296Global_Variables.ADSSTATE_INVALID16UINT0TcVarGlobal3073312Global_Variables.ADSSTATE_IDLE16UINT1TcVarGlobal3073328Global_Variables.ADSSTATE_RESET16UINT2TcVarGlobal3073344Global_Variables.ADSSTATE_INIT16UINT3TcVarGlobal3073360Global_Variables.ADSSTATE_START16UINT4TcVarGlobal3073376Global_Variables.ADSSTATE_RUN16UINT5TcVarGlobal3073392Global_Variables.ADSSTATE_STOP16UINT6TcVarGlobal3073408Global_Variables.ADSSTATE_SAVECFG16UINT7TcVarGlobal3073424Global_Variables.ADSSTATE_LOADCFG16UINT8TcVarGlobal3073440Global_Variables.ADSSTATE_POWERFAILURE16UINT9TcVarGlobal3073456Global_Variables.ADSSTATE_POWERGOOD16UINT10TcVarGlobal3073472Global_Variables.ADSSTATE_ERROR16UINT11TcVarGlobal3073488Global_Variables.ADSSTATE_SHUTDOWN16UINT12TcVarGlobal3073504Global_Variables.ADSSTATE_SUSPEND16UINT13TcVarGlobal3073520Global_Variables.ADSSTATE_RESUME16UINT14TcVarGlobal3073536Global_Variables.ADSSTATE_CONFIG16UINT15TcVarGlobal3073552Global_Variables.ADSSTATE_RECONFIG16UINT16TcVarGlobal3073568Global_Variables.ADSSTATE_STOPPING16UINT17TcVarGlobal3073584Global_Variables.ADSSTATE_INCOMPATIBLE16UINT18TcVarGlobal3073600Global_Variables.ADSSTATE_EXCEPTION16UINT19TcVarGlobal3073616Global_Variables.ADSSTATE_MAXSTATES16UINT20TcVarGlobal3073632Global_Variables.BOOTDATAFLAGS_RETAIN_LOADED8BYTE1TcVarGlobal3073648Global_Variables.BOOTDATAFLAGS_RETAIN_INVALID8BYTE2TcVarGlobal3073656Global_Variables.ADSIGRP_SYMTAB32UDINT61440TcVarGlobal3073664Global_Variables.ADSIGRP_SYMNAME32UDINT61441TcVarGlobal3073696Global_Variables.ADSIGRP_SYMVAL32UDINT61442TcVarGlobal3073728Global_Variables.ADSIGRP_SYM_HNDBYNAME32UDINT61443TcVarGlobal3073760Global_Variables.ADSIGRP_SYM_VALBYNAME32UDINT61444TcVarGlobal3073792Global_Variables.ADSIGRP_SYM_VALBYHND32UDINT61445TcVarGlobal3073824Global_Variables.ADSIGRP_SYM_RELEASEHND32UDINT61446TcVarGlobal3073856Global_Variables.ADSIGRP_SYM_INFOBYNAME32UDINT61447TcVarGlobal3073888Global_Variables.ADSIGRP_SYM_VERSION32UDINT61448TcVarGlobal3073920Global_Variables.ADSIGRP_SYM_INFOBYNAMEEX32UDINT61449TcVarGlobal3073952Global_Variables.ADSIGRP_SYM_DOWNLOAD32UDINT61450TcVarGlobal3073984Global_Variables.ADSIGRP_SYM_UPLOAD32UDINT61451TcVarGlobal3074016Global_Variables.ADSIGRP_SYM_UPLOADINFO32UDINT61452TcVarGlobal3074048Global_Variables.ADSIGRP_SYMNOTE32UDINT61456TcVarGlobal3074080Global_Variables.ADSIGRP_IOIMAGE_RWIB32UDINT61472TcVarGlobal3074112Global_Variables.ADSIGRP_IOIMAGE_RWIX32UDINT61473TcVarGlobal3074144Global_Variables.ADSIGRP_IOIMAGE_RISIZE32UDINT61477TcVarGlobal3074176Global_Variables.ADSIGRP_IOIMAGE_RWOB32UDINT61488TcVarGlobal3074208Global_Variables.ADSIGRP_IOIMAGE_RWOX32UDINT61489TcVarGlobal3074240Global_Variables.ADSIGRP_IOIMAGE_ROSIZE32UDINT61493TcVarGlobal3074272Global_Variables.ADSIGRP_IOIMAGE_CLEARI32UDINT61504TcVarGlobal3074304Global_Variables.ADSIGRP_IOIMAGE_CLEARO32UDINT61520TcVarGlobal3074336Global_Variables.ADSIGRP_IOIMAGE_RWIOB32UDINT61536TcVarGlobal3074368Global_Variables.ADSIGRP_DEVICE_DATA32UDINT61696TcVarGlobal3074400Global_Variables.ADSIOFFS_DEVDATA_ADSSTATE32UDINT0TcVarGlobal3074432Global_Variables.ADSIOFFS_DEVDATA_DEVSTATE32UDINT2TcVarGlobal3074464Global_Variables.SYSTEMSERVICE_OPENCREATE32UDINT100TcVarGlobal3074496Global_Variables.SYSTEMSERVICE_OPENREAD32UDINT101TcVarGlobal3074528Global_Variables.SYSTEMSERVICE_OPENWRITE32UDINT102TcVarGlobal3074560Global_Variables.SYSTEMSERVICE_CREATEFILE32UDINT110TcVarGlobal3074592Global_Variables.SYSTEMSERVICE_CLOSEHANDLE32UDINT111TcVarGlobal3074624Global_Variables.SYSTEMSERVICE_FOPEN32UDINT120TcVarGlobal3074656Global_Variables.SYSTEMSERVICE_FCLOSE32UDINT121TcVarGlobal3074688Global_Variables.SYSTEMSERVICE_FREAD32UDINT122TcVarGlobal3074720Global_Variables.SYSTEMSERVICE_FWRITE32UDINT123TcVarGlobal3074752Global_Variables.SYSTEMSERVICE_FSEEK32UDINT124TcVarGlobal3074784Global_Variables.SYSTEMSERVICE_FTELL32UDINT125TcVarGlobal3074816Global_Variables.SYSTEMSERVICE_FGETS32UDINT126TcVarGlobal3074848Global_Variables.SYSTEMSERVICE_FPUTS32UDINT127TcVarGlobal3074880Global_Variables.SYSTEMSERVICE_FSCANF32UDINT128TcVarGlobal3074912Global_Variables.SYSTEMSERVICE_FPRINTF32UDINT129TcVarGlobal3074944Global_Variables.SYSTEMSERVICE_FEOF32UDINT130TcVarGlobal3074976Global_Variables.SYSTEMSERVICE_FDELETE32UDINT131TcVarGlobal3075008Global_Variables.SYSTEMSERVICE_FRENAME32UDINT132TcVarGlobal3075040Global_Variables.SYSTEMSERVICE_MKDIR32UDINT138TcVarGlobal3075072Global_Variables.SYSTEMSERVICE_RMDIR32UDINT139TcVarGlobal3075104Global_Variables.SYSTEMSERVICE_REG_HKEYLOCALMACHINE32UDINT200TcVarGlobal3075136Global_Variables.SYSTEMSERVICE_SENDEMAIL32UDINT300TcVarGlobal3075168Global_Variables.SYSTEMSERVICE_TIMESERVICES32UDINT400TcVarGlobal3075200Global_Variables.SYSTEMSERVICE_STARTPROCESS32UDINT500TcVarGlobal3075232Global_Variables.SYSTEMSERVICE_CHANGENETID32UDINT600TcVarGlobal3075264Global_Variables.TIMESERVICE_DATEANDTIME32UDINT1TcVarGlobal3075296Global_Variables.TIMESERVICE_SYSTEMTIMES32UDINT2TcVarGlobal3075328Global_Variables.TIMESERVICE_RTCTIMEDIFF32UDINT3TcVarGlobal3075360Global_Variables.TIMESERVICE_ADJUSTTIMETORTC32UDINT4TcVarGlobal3075392Global_Variables.TIMESERVICE_TIMEZONINFORMATION32UDINT6TcVarGlobal3075424Global_Variables.ADSLOG_MSGTYPE_HINT32DWORD1TcVarGlobal3075456Global_Variables.ADSLOG_MSGTYPE_WARN32DWORD2TcVarGlobal3075488Global_Variables.ADSLOG_MSGTYPE_ERROR32DWORD4TcVarGlobal3075520Global_Variables.ADSLOG_MSGTYPE_LOG32DWORD16TcVarGlobal3075552Global_Variables.ADSLOG_MSGTYPE_MSGBOX32DWORD32TcVarGlobal3075584Global_Variables.ADSLOG_MSGTYPE_RESOURCE32DWORD64TcVarGlobal3075616Global_Variables.ADSLOG_MSGTYPE_STRING32DWORD128TcVarGlobal3075648Global_Variables.BOOTDATAFLAGS_RETAIN_REQUESTED8BYTE4TcVarGlobal3075680Global_Variables.BOOTDATAFLAGS_PERSISTENT_LOADED8BYTE16TcVarGlobal3075688Global_Variables.BOOTDATAFLAGS_PERSISTENT_INVALID8BYTE32TcVarGlobal3075696Global_Variables.SYSTEMSTATEFLAGS_BSOD8BYTE1TcVarGlobal3075704Global_Variables.SYSTEMSTATEFLAGS_RTVIOLATION8BYTE2TcVarGlobal3075712Global_Variables.nWatchdogTime8BYTETcVarGlobal3075720Global_Variables.TCEVENTFLAG_PRIOCLASS16WORD16TcVarGlobal3075728Global_Variables.FOPEN_MODEREAD32DWORD1TcVarGlobal3075744Global_Variables.FOPEN_MODEWRITE32DWORD2TcVarGlobal3075776Global_Variables.FOPEN_MODEAPPEND32DWORD4TcVarGlobal3075808Global_Variables.FOPEN_MODEPLUS32DWORD8TcVarGlobal3075840Global_Variables.FOPEN_MODEBINARY32DWORD16TcVarGlobal3075872Global_Variables.FOPEN_MODETEXT32DWORD32TcVarGlobal3075904Global_Variables.TCEVENTFLAG_FMTSELF16WORD32TcVarGlobal3076160Global_Variables.TCEVENTFLAG_LOG16WORD64TcVarGlobal3076176Global_Variables.TCEVENTFLAG_MSGBOX16WORD128TcVarGlobal3076192Global_Variables.TCEVENTFLAG_SRCID16WORD256TcVarGlobal3076208Global_Variables.TCEVENTFLAG_AUTOFMTALL16WORD4096TcVarGlobal3076224Global_Variables.TCEVENTSTATE_INVALID16WORD0TcVarGlobal3076240Global_Variables.TCEVENTSTATE_SIGNALED16WORD1TcVarGlobal3076256Global_Variables.TCEVENTSTATE_RESET16WORD2TcVarGlobal3076272Global_Variables.TCEVENTSTATE_CONFIRMED16WORD16TcVarGlobal3076288Global_Variables.TCEVENTSTATE_RESETCON16WORD18TcVarGlobal3076304Global_Variables.TCEVENT_SRCNAMESIZE16INT15TcVarGlobal3076320Global_Variables.TCEVENT_FMTPRGSIZE16INT31TcVarGlobal3076336Global_Variables.PI64LREAL3.14159265358979TcVarGlobal3076352Global_Variables.DEFAULT_ADS_TIMEOUT32TIME5000TcVarGlobal3076416Global_Variables.MAX_STRING_LENGTH32UDINT255TcVarGlobal3076448Global_Variables.eWatchdogConfig16E_WATCHDOG_TIME_CONFIGE_WATCHDOG_TIME_CONFIG.eWATCHDOG_TIME_DISABLEDTcVarGlobal3077024Global_Constants.EMPTY_SEVERITY16TcEventSeverityTcEventSeverity.VerboseTcVarGlobal3077040Global_Version.stLibVersion_Tc3_Module288ST_LibVersion.iMajor3.iMinor4.iBuild5.iRevision0.nFlags1.sVersion3.4.5.0const_non_replacedTcVarGlobal3077056Global_Version.stLibVersion_Tc2_Utilities288ST_LibVersion.iMajor3.iMinor6.iBuild1.iRevision0.nFlags1.sVersion3.6.1.0const_non_replacedTcVarGlobal3077696Global_Constants.EMPTY_EVENT_CLASS128GUID.Data10.Data20.Data30.Data4[0]0.Data4[1]0.Data4[2]0.Data4[3]0.Data4[4]0.Data4[5]0.Data4[6]0.Data4[7]0TcVarGlobal3077984Global_Constants.EMPTY_EVENT_ID32UDINT0TcVarGlobal3078112Global_Constants.SUCCESS_EVENT192TcEventEntry.uuidEventClass.Data10.uuidEventClass.Data20.uuidEventClass.Data30.uuidEventClass.Data4[0]0.uuidEventClass.Data4[1]0.uuidEventClass.Data4[2]0.uuidEventClass.Data4[3]0.uuidEventClass.Data4[4]0.uuidEventClass.Data4[5]0.uuidEventClass.Data4[6]0.uuidEventClass.Data4[7]0.nEventID0.eSeverityGlobal_Constants.EMPTY_SEVERITYTcVarGlobal3078144GVL.nLangId_OnlineMonitoring32DINT1033TcVarGlobal3078336ParameterList.cSourceNameSize32UDINT (81..10000)256TcVarGlobal3078368Global_Version.stLibVersion_Tc3_EventLogger288ST_LibVersion.iMajor3.iMinor3.iBuild7.iRevision0.nFlags1.sVersion3.3.7.0const_non_replacedTcVarGlobal3078400Global_Version.stLibVersion_Tc2_SUPS288ST_LibVersion.iMajor3.iMinor3.iBuild8.iRevision0.nFlags0.sVersion3.3.8.0const_non_replacedTcVarGlobal3078688Global_Variables.eGlobalSUpsState16E_S_UPS_StateTcVarGlobal3079168MAIN.ENABLE8BOOL3079184MAIN.PROCESS_EN8BOOL3079192MAIN.PROCESS_RUN8BOOL3079200MAIN.PROCESS_STOP8BOOL3079208MAIN.P_NO16INT3079216MAIN.PROCESS36672PROCESS3091008MAIN.CYCLE_EN8BOOL3127680MAIN.NEXTSTEP_EN8BOOL3127688MAIN.CYCLE_NUM16INT3127696MAIN.CYCLE_START_STEP_NO16INT3127712MAIN.STEP_NO16INT3127728MAIN.UPS74624FB_S_UPS_BAPI3127744IL.RANGE_PG_PS11280RANGEJD3202752IL.RANGE_PG_PS21280RANGEJD3204032IL.RANGE_PG_PS31280RANGEJD3205312IL.RANGE_PG_PS41280RANGEJD3206592IL.RANGE_PG_PS51280RANGEJD3207872IL.RANGE_PG_PS61280RANGEJD3209152IL.RANGE_PG_PS71280RANGEJD3210432IL.RANGE_PG_PS81280RANGEJD3211712IL.RANGE_PG_PS91280RANGEJD3212992IL.RANGE_MFC11280RANGEJD3214272IL.RANGE_MFC21280RANGEJD3215552IL.RANGE_MFC31280RANGEJD3216832IL.RANGE_MFC41280RANGEJD3218112IL.RANGE_MFC51280RANGEJD3219392IL.RANGE_MFC61280RANGEJD3220672IL.RANGE_MFC71280RANGEJD3221952IL.RANGE_MFC81280RANGEJD3223232IL.RANGE_MFC91280RANGEJD3224512IL.RANGE_CHAMBER_HEATER11280RANGEJD3225792IL.RANGE_CHAMBER_HEATER21280RANGEJD3227072IL.RANGE_CHAMBER_HEATER31280RANGEJD3228352IL.RANGE_LID_HEATER1280RANGEJD3229632IL.RANGE_STAGE_EDGE_HEATER1280RANGEJD3230912IL.RANGE_STAGE_CENTER_HEATER1280RANGEJD3232192IL.TON_PrepareTransfer256TON3233472IL.TON_TransferWafer256TON3233728IL.TON_OpenGasValve256TON3233984IL.TON_CloseGasValve256TON3234240IL.TON_OpenCloseSlitValve256TON3234496IL.ALWAYS_TRUE8BOOLtrue3234752IL.VALVE_ITL_BYPASS400BOOL1503234760GV.TURBO_PUMP_POWER_ON8BOOLTcVarGlobal3235184GV.PENDULUM_VALVE_HEATER_POWER_ON8BOOLTcVarGlobal3235192Temp.H_LID73600Temp_controller1103237056Temp.H_CHAMBER73600Temp_controller1103310656Temp.H_PEN_VALVE7360Temp_controller3384256Temp.H_GATE_VALVE7360Temp_controller3391616Temp.H_IGS73600Temp_controller1103398976Temp.H_TAPE73600Temp_controller1103472576Temp.H_FORELINE147200Temp_controller1203546176GV.LID_HEATER_POWER_ON8BOOLTcVarGlobal3699664GV.CHAMBER_HEATER_POWER_ON8BOOLTcVarGlobal3699672GV.NDI904STR_NDITcVarGlobal3701824GV.NDO392STR_NDOTcVarGlobal3702728GV.IGS_HEATER_POWER_ON8BOOLTcVarGlobal3703120GV.TAPE_HEATER_POWER_ON8BOOLTcVarGlobal3703128GV.AI2560STR_AITcVarGlobal3703136GV.AO1504STR_AOTcVarGlobal3705696GV.FORELINE_HEATER_POWER_ON8BOOLTcVarGlobal3707200GV.GATE_VALVE_HEATER_POWER_ON8BOOLTcVarGlobal3707208GV.LID_HEATER_AUTO_TUNE_EN80BOOL110TcVarGlobal3707216GV.CHAMBER_HEATER_AUTO_TUNE_EN80BOOL110TcVarGlobal3707296GV.PEN_VALVE_HEATER_AUTO_TUNE_EN8BOOLTcVarGlobal3707376GV.GATE_VALVE_HEATER_AUTO_TUNE_EN8BOOLTcVarGlobal3707384GV.IGS_HEATER_AUTO_TUNE_EN80BOOL110TcVarGlobal3707392GV.TAPE_HEATER_AUTO_TUNE_EN80BOOL110TcVarGlobal3707472GV.FORELINE_HEATER_AUTO_TUNE_EN160BOOL120TcVarGlobal3707552GV.LID_HEATER_AUTO_TUNE_OUTPUT320REAL110TcVarGlobal3707712GV.CHAMBER_HEATER_AUTO_TUNE_OUTPUT320REAL110TcVarGlobal3708032GV.PEN_VALVE_HEATER_AUTO_TUNE_OUTPUT32REALTcVarGlobal3708352GV.GATE_VALVE_HEATER_AUTO_TUNE_OUTPUT32REALTcVarGlobal3708384GV.IGS_HEATER_AUTO_TUNE_OUTPUT320REAL110TcVarGlobal3708416GV.TAPE_HEATER_AUTO_TUNE_OUTPUT320REAL110TcVarGlobal3708736GV.FORELINE_HEATER_AUTO_TUNE_OUTPUT640REAL120TcVarGlobal3709056GV.LID_HEATER_SSR_ON80BOOL110TcVarGlobal3709696GV.CHAMBER_HEATER_SSR_ON80BOOL110TcVarGlobal3709776GV.PEN_VALVE_HEATER_SSR_ON8BOOLTcVarGlobal3709856GV.GATE_VALVE_SSR_ON8BOOLTcVarGlobal3709864GV.IGS_HEATER_SSR_ON80BOOL110TcVarGlobal3709872GV.TAPE_HEATER_SSR_ON80BOOL110TcVarGlobal3709952GV.FORELINE_HEATER_SSR_ON160BOOL120TcVarGlobal3710032GV.ALARM_OCC8BOOLTcVarGlobal3710192GV.WARNING_OCC8BOOLTcVarGlobal3710200GV.PMConfig1536ConfigPMTcVarGlobal3710208GV.MFCVerification1472ConfigMfcVerTcVarGlobal3711744GV.Chiller1792ConfigChillerTcVarGlobal3713216GV.InnerChiller1792ConfigChillerTcVarGlobal3715008GV.OuterChiller1792ConfigChillerTcVarGlobal3716800GV.TopChiller1792ConfigChillerTcVarGlobal3718592GV.DryPump1152ConfigDryPumpTcVarGlobal3720384GV.Mfcgas11728ConfigMfcGasTcVarGlobal3721536GV.Mfcgas21728ConfigMfcGasTcVarGlobal3723264GV.Mfcgas31728ConfigMfcGasTcVarGlobal3724992GV.Mfcgas41728ConfigMfcGasTcVarGlobal3726720GV.Mfcgas51728ConfigMfcGasTcVarGlobal3728448GV.Mfcgas61728ConfigMfcGasTcVarGlobal3730176GV.Mfcgas71728ConfigMfcGasTcVarGlobal3731904GV.Mfcgas81728ConfigMfcGasTcVarGlobal3733632GV.Mfcgas91728ConfigMfcGasTcVarGlobal3735360GV.Mfcgas101728ConfigMfcGasTcVarGlobal3737088GV.Mfcgas111728ConfigMfcGasTcVarGlobal3738816GV.Mfcgas121728ConfigMfcGasTcVarGlobal3740544GV.MfcN21728ConfigMfcGasTcVarGlobal3742272GV.MfcHe1728ConfigMfcGasTcVarGlobal3744000GV.Pump2560ConfigPumpTcVarGlobal3745728GV.Purge640ConfigPurgeTcVarGlobal3748288GV.PendulumHeater272ConfigHeaterTcVarGlobal3748928GV.LidHeater272ConfigHeaterTcVarGlobal3749200GV.ChamberHeater272ConfigHeaterTcVarGlobal374947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