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- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using System.Xml.Serialization;
- namespace MECF.Framework.Common.Config
- {
- [XmlRoot(ElementName = "IoLP")]
- public class IoLPConfig
- {
- [XmlAttribute(AttributeName = "id")]
- public string DeviceName { get; set; }
- [XmlAttribute(AttributeName = "display")]
- public string Display { get; set; }
- [XmlAttribute(AttributeName = "schematicId")]
- public string SchematicId { get; set; }
- [XmlAttribute(AttributeName = "unit")]
- public string Unit { get; set; }
- [XmlAttribute(AttributeName = "diLeftClamp")]
- public string DiLeftClamp { get; set; }
- [XmlAttribute(AttributeName = "diRightClamp")]
- public string DiRightClamp { get; set; }
- [XmlAttribute(AttributeName = "diLeftRelease")]
- public string DiLeftRelease { get; set; }
- [XmlAttribute(AttributeName = "diRightRelease")]
- public string DiRightRelease { get; set; }
- [XmlAttribute(AttributeName = "diInPosition1")]
- public string DiInPosition1 { get; set; }
- [XmlAttribute(AttributeName = "diInPosition2")]
- public string DiInPosition2 { get; set; }
- [XmlAttribute(AttributeName = "diInPosition3")]
- public string DiInPosition3 { get; set; }
- [XmlAttribute(AttributeName = "diDetect")]
- public string DiDetect { get; set; }
- [XmlAttribute(AttributeName = "doClamp")]
- public string DoClamp { get; set; }
- [XmlAttribute(AttributeName = "doRelease")]
- public string DoRelease { get; set; }
- [XmlAttribute(AttributeName = "doPresence")]
- public string DoPresence { get; set; }
- [XmlAttribute(AttributeName = "doPlacement")]
- public string DoPlacement { get; set; }
- [XmlAttribute(AttributeName = "doLoad")]
- public string DoLoad { get; set; }
- [XmlAttribute(AttributeName = "doUnload")]
- public string DoUnload { get; set; }
- [XmlAttribute(AttributeName = "doManual")]
- public string DoManual { get; set; }
- [XmlAttribute(AttributeName = "scRootPath")]
- public string ScRootPath { get; set; }
- }
- [XmlRoot(ElementName = "IoLPs")]
- public class IoLPs
- {
- [XmlElement(ElementName = "IoLP")]
- public List<IoLPConfig> IoLP { get; set; }
- [XmlAttribute(AttributeName = "classType")]
- public string ClassType { get; set; }
- [XmlAttribute(AttributeName = "assembly")]
- public string Assembly { get; set; }
- }
- [XmlRoot(ElementName = "IoFIMS")]
- public class IoFIMSConfig
- {
- [XmlAttribute(AttributeName = "id")]
- public string DeviceName { get; set; }
- [XmlAttribute(AttributeName = "display")]
- public string Display { get; set; }
- [XmlAttribute(AttributeName = "schematicId")]
- public string SchematicId { get; set; }
- [XmlAttribute(AttributeName = "unit")]
- public string Unit { get; set; }
- [XmlAttribute(AttributeName = "diLoadComplete")]
- public string DiLoadComplete { get; set; }
- [XmlAttribute(AttributeName = "diUnloadComplete")]
- public string DiUnloadComplete { get; set; }
- [XmlAttribute(AttributeName = "diHomeComplete")]
- public string DiHomeComplete { get; set; }
- [XmlAttribute(AttributeName = "diRunning")]
- public string DiRunning { get; set; }
- [XmlAttribute(AttributeName = "diAutoManual")]
- public string DiAutoManual { get; set; }
- [XmlAttribute(AttributeName = "diDock")]
- public string DiDock { get; set; }
- [XmlAttribute(AttributeName = "diUndock")]
- public string DiUndock { get; set; }
- [XmlAttribute(AttributeName = "diExist")]
- public string DiExist { get; set; }
- [XmlAttribute(AttributeName = "diSeal")]
- public string DiSeal { get; set; }
- [XmlAttribute(AttributeName = "diRelease")]
- public string DiRelease { get; set; }
- [XmlAttribute(AttributeName = "diDoorOpen")]
- public string DiDoorOpen { get; set; }
- [XmlAttribute(AttributeName = "diDoorClose")]
- public string DiDoorClose { get; set; }
- [XmlAttribute(AttributeName = "diLatchOn")]
- public string DiLatchOn { get; set; }
- [XmlAttribute(AttributeName = "diLatchOff")]
- public string DiLatchOff { get; set; }
- [XmlAttribute(AttributeName = "diCollisionAvoidanceDown")]
- public string DiCollisionAvoidanceDown { get; set; }
- [XmlAttribute(AttributeName = "diCollisionAvoidanceUp")]
- public string DiCollisionAvoidanceUp { get; set; }
- [XmlAttribute(AttributeName = "diN2PurgeValveClosed")]
- public string DiN2PurgeValveClosed { get; set; }
- [XmlAttribute(AttributeName = "diN2PurgeValveOpened")]
- public string DiN2PurgeValveOpened { get; set; }
- [XmlAttribute(AttributeName = "diFOUPVacuumSuckingOK")]
- public string DiFOUPVacuumSuckingOK { get; set; }
- [XmlAttribute(AttributeName = "diFOUPVacuumSuckingAlarm")]
- public string DiFOUPVacuumSuckingAlarm { get; set; }
- [XmlAttribute(AttributeName = "diWaferOnRobot")]
- public string DiWaferOnRobot { get; set; }
- [XmlAttribute(AttributeName = "diWaferRobotEX1AxisHomePosition")]
- public string DiWaferRobotEX1AxisHomePosition { get; set; }
- [XmlAttribute(AttributeName = "diWaferRobotEX2AxisHomePosition")]
- public string DiWaferRobotEX2AxisHomePosition { get; set; }
- [XmlAttribute(AttributeName = "doLoad")]
- public string DoLoad { get; set; }
- [XmlAttribute(AttributeName = "doUnload")]
- public string DoUnload { get; set; }
- [XmlAttribute(AttributeName = "doHome")]
- public string DoHome { get; set; }
- [XmlAttribute(AttributeName = "doAlarmReset")]
- public string DoAlarmReset { get; set; }
- [XmlAttribute(AttributeName = "doAutoManual")]
- public string DoAutoManual { get; set; }
- [XmlAttribute(AttributeName = "doDock")]
- public string DoDock { get; set; }
- [XmlAttribute(AttributeName = "doUndock")]
- public string DoUndock { get; set; }
- [XmlAttribute(AttributeName = "doSeal")]
- public string DoSeal { get; set; }
- [XmlAttribute(AttributeName = "doRelease")]
- public string DoRelease { get; set; }
- [XmlAttribute(AttributeName = "doDoorOpen")]
- public string DoDoorOpen { get; set; }
- [XmlAttribute(AttributeName = "doDoorClose")]
- public string DoDoorClose { get; set; }
- [XmlAttribute(AttributeName = "doLatch1On")]
- public string DoLatch1On { get; set; }
- [XmlAttribute(AttributeName = "doLatch2On")]
- public string DoLatch2On { get; set; }
- [XmlAttribute(AttributeName = "doLatch1Off")]
- public string DoLatch1Off { get; set; }
- [XmlAttribute(AttributeName = "doLatch2Off")]
- public string DoLatch2Off { get; set; }
- [XmlAttribute(AttributeName = "doCollisionAvoidanceDown")]
- public string DoCollisionAvoidanceDown { get; set; }
- [XmlAttribute(AttributeName = "doCollisionAvoidanceUp")]
- public string DoCollisionAvoidanceUp { get; set; }
- [XmlAttribute(AttributeName = "doN2PurgeValveOpen")]
- public string DoN2PurgeValveOpen { get; set; }
- [XmlAttribute(AttributeName = "doN2PurgeValveClose")]
- public string DoN2PurgeValveClose { get; set; }
- [XmlAttribute(AttributeName = "doVaccumValveOpen")]
- public string DoVaccumValveOpen { get; set; }
- [XmlAttribute(AttributeName = "doVaccumValveClose")]
- public string DoVaccumValveClose { get; set; }
- [XmlAttribute(AttributeName = "scRootPath")]
- public string ScRootPath { get; set; }
- }
- [XmlRoot(ElementName = "IoFIMSs")]
- public class IoFIMSs
- {
- [XmlElement(ElementName = "IoFIMS")]
- public List<IoFIMSConfig> IoFIMS { get; set; }
- [XmlAttribute(AttributeName = "classType")]
- public string ClassType { get; set; }
- [XmlAttribute(AttributeName = "assembly")]
- public string Assembly { get; set; }
- }
- [XmlRoot(ElementName = "IoDoor")]
- public class IoDoorConfig
- {
- [XmlAttribute(AttributeName = "id")]
- public string DeviceName { get; set; }
- [XmlAttribute(AttributeName = "display")]
- public string Display { get; set; }
- [XmlAttribute(AttributeName = "schematicId")]
- public string SchematicId { get; set; }
- [XmlAttribute(AttributeName = "unit")]
- public string Unit { get; set; }
- [XmlAttribute(AttributeName = "diOpen")]
- public string DiOpen { get; set; }
- [XmlAttribute(AttributeName = "diClose")]
- public string DiClose { get; set; }
- [XmlAttribute(AttributeName = "doOpen")]
- public string DoOpen { get; set; }
- [XmlAttribute(AttributeName = "doClose")]
- public string DoClose { get; set; }
- [XmlAttribute(AttributeName = "scRootPath")]
- public string ScRootPath { get; set; }
- }
- [XmlRoot(ElementName = "IoDoors")]
- public class IoDoors
- {
- [XmlElement(ElementName = "IoDoor")]
- public IoDoorConfig IoDoor { get; set; }
- [XmlAttribute(AttributeName = "classType")]
- public string ClassType { get; set; }
- [XmlAttribute(AttributeName = "assembly")]
- public string Assembly { get; set; }
- }
- [XmlRoot(ElementName = "IoShutter")]
- public class IoShutterConfig
- {
- [XmlAttribute(AttributeName = "id")]
- public string DeviceName { get; set; }
- [XmlAttribute(AttributeName = "display")]
- public string Display { get; set; }
- [XmlAttribute(AttributeName = "schematicId")]
- public string SchematicId { get; set; }
- [XmlAttribute(AttributeName = "unit")]
- public string Unit { get; set; }
- [XmlAttribute(AttributeName = "diOpen")]
- public string DiOpen { get; set; }
- [XmlAttribute(AttributeName = "diClose")]
- public string DiClose { get; set; }
- [XmlAttribute(AttributeName = "doOpen")]
- public string DoOpen { get; set; }
- [XmlAttribute(AttributeName = "doClose")]
- public string DoClose { get; set; }
- [XmlAttribute(AttributeName = "scRootPath")]
- public string ScRootPath { get; set; }
- }
- [XmlRoot(ElementName = "IoShutters")]
- public class IoShutters
- {
- [XmlElement(ElementName = "IoShutter")]
- public List<IoShutterConfig> IoShutter { get; set; }
- [XmlAttribute(AttributeName = "classType")]
- public string ClassType { get; set; }
- [XmlAttribute(AttributeName = "assembly")]
- public string Assembly { get; set; }
- }
- [XmlRoot(ElementName = "IoBufferMotor")]
- public class IoBufferMotorConfig
- {
- [XmlAttribute(AttributeName = "id")]
- public string DeviceName { get; set; }
- [XmlAttribute(AttributeName = "display")]
- public string Display { get; set; }
- [XmlAttribute(AttributeName = "schematicId")]
- public string SchematicId { get; set; }
- [XmlAttribute(AttributeName = "unit")]
- public string Unit { get; set; }
- [XmlAttribute(AttributeName = "module")]
- public string Module { get; set; }
- [XmlAttribute(AttributeName = "aiRealPosition")]
- public string AiRealPosition { get; set; }
- [XmlAttribute(AttributeName = "aiRealSpeed")]
- public string AiRealSpeed { get; set; }
- [XmlAttribute(AttributeName = "aiRealTorque")]
- public string AiRealTorque { get; set; }
- [XmlAttribute(AttributeName = "aiTargetPosFb")]
- public string AiTargetPosFb { get; set; }
- [XmlAttribute(AttributeName = "aiDriverErrorCode")]
- public string AiDriverErrorCode { get; set; }
- [XmlAttribute(AttributeName = "aiMotionErrorCode")]
- public string AiMotionErrorCode { get; set; }
- [XmlAttribute(AttributeName = "aoTargetPosition")]
- public string AoTargetPosition { get; set; }
- [XmlAttribute(AttributeName = "aoSpeed")]
- public string AoSpeed { get; set; }
- [XmlAttribute(AttributeName = "aoAcc")]
- public string AoAcc { get; set; }
- [XmlAttribute(AttributeName = "aoDec")]
- public string AoDec { get; set; }
- [XmlAttribute(AttributeName = "diMoving")]
- public string DiMoving { get; set; }
- [XmlAttribute(AttributeName = "diSensor1")]
- public string DiSensor1 { get; set; }
- [XmlAttribute(AttributeName = "diSensor2")]
- public string DiSensor2 { get; set; }
- [XmlAttribute(AttributeName = "diSensor3")]
- public string DiSensor3 { get; set; }
- [XmlAttribute(AttributeName = "diSensor4")]
- public string DiSensor4 { get; set; }
- [XmlAttribute(AttributeName = "diSensor5")]
- public string DiSensor5 { get; set; }
- [XmlAttribute(AttributeName = "diSensor6")]
- public string DiSensor6 { get; set; }
- [XmlAttribute(AttributeName = "diSensor7")]
- public string DiSensor7 { get; set; }
- [XmlAttribute(AttributeName = "diSensor8")]
- public string DiSensor8 { get; set; }
- [XmlAttribute(AttributeName = "diWarning")]
- public string DiWarning { get; set; }
- [XmlAttribute(AttributeName = "diAlarm")]
- public string DiAlarm { get; set; }
- [XmlAttribute(AttributeName = "diPositionA1")]
- public string DiPositionA1 { get; set; }
- [XmlAttribute(AttributeName = "diPositionB1")]
- public string DiPositionB1 { get; set; }
- [XmlAttribute(AttributeName = "diPositionC1")]
- public string DiPositionC1 { get; set; }
- [XmlAttribute(AttributeName = "diPositionD1")]
- public string DiPositionD1 { get; set; }
- [XmlAttribute(AttributeName = "diPositionA2")]
- public string DiPositionA2 { get; set; }
- [XmlAttribute(AttributeName = "diPositionB2")]
- public string DiPositionB2 { get; set; }
- [XmlAttribute(AttributeName = "diPositionC2")]
- public string DiPositionC2 { get; set; }
- [XmlAttribute(AttributeName = "diPositionD2")]
- public string DiPositionD2 { get; set; }
- [XmlAttribute(AttributeName = "diPositionA3")]
- public string DiPositionA3 { get; set; }
- [XmlAttribute(AttributeName = "diPositionB3")]
- public string DiPositionB3 { get; set; }
- [XmlAttribute(AttributeName = "diPositionC3")]
- public string DiPositionC3 { get; set; }
- [XmlAttribute(AttributeName = "diPositionD3")]
- public string DiPositionD3 { get; set; }
- [XmlAttribute(AttributeName = "diPositionA4")]
- public string DiPositionA4 { get; set; }
- [XmlAttribute(AttributeName = "diPositionB4")]
- public string DiPositionB4 { get; set; }
- [XmlAttribute(AttributeName = "diPositionC4")]
- public string DiPositionC4 { get; set; }
- [XmlAttribute(AttributeName = "diPositionD4")]
- public string DiPositionD4 { get; set; }
- [XmlAttribute(AttributeName = "doServoOn")]
- public string DoServoOn { get; set; }
- [XmlAttribute(AttributeName = "doStop")]
- public string DoStop { get; set; }
- [XmlAttribute(AttributeName = "doMove")]
- public string DoMove { get; set; }
- [XmlAttribute(AttributeName = "doReset")]
- public string DoReset { get; set; }
- [XmlAttribute(AttributeName = "aioType")]
- public string AioType { get; set; }
- [XmlAttribute(AttributeName = "scRootPath")]
- public string ScRootPath { get; set; }
- }
- [XmlRoot(ElementName = "IoBufferMotors")]
- public class IoBufferMotors
- {
- [XmlElement(ElementName = "IoBufferMotor")]
- public IoBufferMotorConfig IoBufferMotor { get; set; }
- [XmlAttribute(AttributeName = "classType")]
- public string ClassType { get; set; }
- [XmlAttribute(AttributeName = "assembly")]
- public string Assembly { get; set; }
- }
- [XmlRoot(ElementName = "IoFurnaceMotor")]
- public class IoFurnaceMotorConfig
- {
- [XmlAttribute(AttributeName = "id")]
- public string DeviceName { get; set; }
- [XmlAttribute(AttributeName = "display")]
- public string Display { get; set; }
- [XmlAttribute(AttributeName = "schematicId")]
- public string SchematicId { get; set; }
- [XmlAttribute(AttributeName = "unit")]
- public string Unit { get; set; }
- [XmlAttribute(AttributeName = "module")]
- public string Module { get; set; }
- [XmlAttribute(AttributeName = "aiRealPosition")]
- public string AiRealPosition { get; set; }
- [XmlAttribute(AttributeName = "aiRealSpeed")]
- public string AiRealSpeed { get; set; }
- [XmlAttribute(AttributeName = "aiTargetPosFb")]
- public string AiTargetPosFb { get; set; }
- [XmlAttribute(AttributeName = "aiDriverErrorCode")]
- public string AiDriverErrorCode { get; set; }
- [XmlAttribute(AttributeName = "aiMotionErrorCode")]
- public string AiMotionErrorCode { get; set; }
- [XmlAttribute(AttributeName = "aoTargetPosition")]
- public string AoTargetPosition { get; set; }
- [XmlAttribute(AttributeName = "aoTargetSpeed")]
- public string AoTargetSpeed { get; set; }
- [XmlAttribute(AttributeName = "aoAcc")]
- public string AoAcc { get; set; }
- [XmlAttribute(AttributeName = "aoDec")]
- public string AoDec { get; set; }
- [XmlAttribute(AttributeName = "diMotorAlarm")]
- public string DiMotorAlarm { get; set; }
- [XmlAttribute(AttributeName = "diMove")]
- public string DiMove { get; set; }
- [XmlAttribute(AttributeName = "diPowerOn")]
- public string DiPowerOn { get; set; }
- [XmlAttribute(AttributeName = "diPowerOnError")]
- public string DiPowerOnError { get; set; }
- [XmlAttribute(AttributeName = "diStop")]
- public string DiStop { get; set; }
- [XmlAttribute(AttributeName = "diStopError")]
- public string DiStopError { get; set; }
- [XmlAttribute(AttributeName = "diHomeDone")]
- public string DiHomeDone { get; set; }
- [XmlAttribute(AttributeName = "diAlignDone")]
- public string DiAlignDone { get; set; }
- [XmlAttribute(AttributeName = "diHoming")]
- public string DiHoming { get; set; }
- [XmlAttribute(AttributeName = "diHomeError")]
- public string DiHomeError { get; set; }
- [XmlAttribute(AttributeName = "diMoving")]
- public string DiMoving { get; set; }
- [XmlAttribute(AttributeName = "diMoveError")]
- public string DiMoveError { get; set; }
- [XmlAttribute(AttributeName = "diHomePosition")]
- public string DiHomePosition { get; set; }
- [XmlAttribute(AttributeName = "diNegativeLimit")]
- public string DiNegativeLimit { get; set; }
- [XmlAttribute(AttributeName = "diPositiveLimit")]
- public string DiPositiveLimit { get; set; }
- [XmlAttribute(AttributeName = "diConveyRelaxAlarm")]
- public string DiConveyRelaxAlarm { get; set; }
- [XmlAttribute(AttributeName = "diReadyToSwitchOn")]
- public string DiReadyToSwitchOn { get; set; }
- [XmlAttribute(AttributeName = "diSwitchOn")]
- public string DiSwitchOn { get; set; }
- [XmlAttribute(AttributeName = "diWarning")]
- public string DiWarning { get; set; }
- [XmlAttribute(AttributeName = "diAlarm")]
- public string DiAlarm { get; set; }
- [XmlAttribute(AttributeName = "diPosition1")]
- public string DiPosition1 { get; set; }
- [XmlAttribute(AttributeName = "diPosition2")]
- public string DiPosition2 { get; set; }
- [XmlAttribute(AttributeName = "diPosition3")]
- public string DiPosition3 { get; set; }
- [XmlAttribute(AttributeName = "diUpPosition")]
- public string DiUpPosition { get; set; }
- [XmlAttribute(AttributeName = "diDownPosition")]
- public string DiDownPosition { get; set; }
- [XmlAttribute(AttributeName = "doStop")]
- public string DoStop { get; set; }
- [XmlAttribute(AttributeName = "doHome")]
- public string DoHome { get; set; }
- [XmlAttribute(AttributeName = "doMove")]
- public string DoMove { get; set; }
- [XmlAttribute(AttributeName = "doReset")]
- public string DoReset { get; set; }
- [XmlAttribute(AttributeName = "doServoOn")]
- public string DoServoOn { get; set; }
- [XmlAttribute(AttributeName = "doInTransfer")]
- public string DoInTransfer { get; set; }
- [XmlAttribute(AttributeName = "doTransferComplete")]
- public string DoTransferComplete { get; set; }
- [XmlAttribute(AttributeName = "doStepperDriverStart")]
- public string DoStepperDriverStart { get; set; }
- [XmlAttribute(AttributeName = "doStepperDriverAllWindingsOff")]
- public string DoStepperDriverAllWindingsOff { get; set; }
- [XmlAttribute(AttributeName = "doStepperDriverDataSelectionM0")]
- public string DoStepperDriverDataSelectionM0 { get; set; }
- [XmlAttribute(AttributeName = "doStepperDriverDataSelectionM1")]
- public string DoStepperDriverDataSelectionM1 { get; set; }
- [XmlAttribute(AttributeName = "doStepperDriverDataSelectionM2")]
- public string DoStepperDriverDataSelectionM2 { get; set; }
- [XmlAttribute(AttributeName = "doStepperDriverDataSelectionM3")]
- public string DoStepperDriverDataSelectionM3 { get; set; }
- [XmlAttribute(AttributeName = "doStepperDriverDataSelectionM4")]
- public string DoStepperDriverDataSelectionM4 { get; set; }
- [XmlAttribute(AttributeName = "doStepperDriverDataSelectionM5")]
- public string DoStepperDriverDataSelectionM5 { get; set; }
- [XmlAttribute(AttributeName = "doStepperDriverHomeOrPosPrerst")]
- public string DoStepperDriverHomeOrPosPrerst { get; set; }
- [XmlAttribute(AttributeName = "doCW")]
- public string DoCW { get; set; }
- [XmlAttribute(AttributeName = "doCCW")]
- public string DoCCW { get; set; }
- [XmlAttribute(AttributeName = "aioType")]
- public string AioType { get; set; }
- [XmlAttribute(AttributeName = "scRootPath")]
- public string ScRootPath { get; set; }
- [XmlAttribute(AttributeName = "aiPowerErrorCode")]
- public string AiPowerErrorCode { get; set; }
- [XmlAttribute(AttributeName = "aiStopErrorCode")]
- public string AiStopErrorCode { get; set; }
- [XmlAttribute(AttributeName = "aiHomeErrorCode")]
- public string AiHomeErrorCode { get; set; }
- [XmlAttribute(AttributeName = "aiMoveAbsErrorCode")]
- public string AiMoveAbsErrorCode { get; set; }
- [XmlAttribute(AttributeName = "aiJogErrorCode")]
- public string AiJogErrorCode { get; set; }
- [XmlAttribute(AttributeName = "aiResetErrorCode")]
- public string AiResetErrorCode { get; set; }
- [XmlAttribute(AttributeName = "aiErrorCode")]
- public string AiErrorCode { get; set; }
- [XmlAttribute(AttributeName = "diInitializing")]
- public string DiInitializing { get; set; }
- [XmlAttribute(AttributeName = "diInitDone")]
- public string DiInitDone { get; set; }
- [XmlAttribute(AttributeName = "diStepperMotorInWorkPosition")]
- public string DiStepperMotorInWorkPosition { get; set; }
- [XmlAttribute(AttributeName = "diStepperMotorMoving")]
- public string DiStepperMotorMoving { get; set; }
- [XmlAttribute(AttributeName = "diStepperMotorAlarm")]
- public string DiStepperMotorAlarm { get; set; }
- [XmlAttribute(AttributeName = "diStepperMotorInArea")]
- public string DiStepperMotorInArea { get; set; }
- [XmlAttribute(AttributeName = "diStepperMotorInReady")]
- public string DiStepperMotorInReady { get; set; }
- [XmlAttribute(AttributeName = "diStepperMotorInHomePosition")]
- public string DiStepperMotorInHomePosition { get; set; }
- [XmlAttribute(AttributeName = "doInit")]
- public string DoInit { get; set; }
- [XmlAttribute(AttributeName = "doM0")]
- public string DoM0 { get; set; }
- [XmlAttribute(AttributeName = "doM1")]
- public string DoM1 { get; set; }
- [XmlAttribute(AttributeName = "doM2")]
- public string DoM2 { get; set; }
- [XmlAttribute(AttributeName = "doM3")]
- public string DoM3 { get; set; }
- [XmlAttribute(AttributeName = "doM4")]
- public string DoM4 { get; set; }
- [XmlAttribute(AttributeName = "doM5")]
- public string DoM5 { get; set; }
- }
- [XmlRoot(ElementName = "IoFurnaceMotors")]
- public class IoFurnaceMotors
- {
- [XmlElement(ElementName = "IoFurnaceMotor")]
- public List<IoFurnaceMotorConfig> IoFurnaceMotor { get; set; }
- [XmlAttribute(AttributeName = "classType")]
- public string ClassType { get; set; }
- [XmlAttribute(AttributeName = "assembly")]
- public string Assembly { get; set; }
- }
- [XmlRoot(ElementName = "IoWaferRobot")]
- public class IoWaferRobotConfig
- {
- [XmlAttribute(AttributeName = "id")]
- public string DeviceName { get; set; }
- [XmlAttribute(AttributeName = "display")]
- public string Display { get; set; }
- [XmlAttribute(AttributeName = "schematicId")]
- public string SchematicId { get; set; }
- [XmlAttribute(AttributeName = "unit")]
- public string Unit { get; set; }
- [XmlAttribute(AttributeName = "diInFIMS1")]
- public string DiInFIMS1 { get; set; }
- [XmlAttribute(AttributeName = "diInFIMS2")]
- public string DiInFIMS2 { get; set; }
- [XmlAttribute(AttributeName = "diInBoatRotate")]
- public string DiInBoatRotate { get; set; }
- [XmlAttribute(AttributeName = "diInBoatBottom")]
- public string DiInBoatBottom { get; set; }
- [XmlAttribute(AttributeName = "diFIMS1WaferOnRobot")]
- public string DiFIMS1WaferOnRobot { get; set; }
- [XmlAttribute(AttributeName = "diFIMS2WaferOnRobot")]
- public string DiFIMS2WaferOnRobot { get; set; }
- [XmlAttribute(AttributeName = "diTPEmo")]
- public string DiTPEmo { get; set; }
- [XmlAttribute(AttributeName = "diServoOn")]
- public string DiServoOn { get; set; }
- [XmlAttribute(AttributeName = "diTPStatus")]
- public string DiTPStatus { get; set; }
- [XmlAttribute(AttributeName = "diRobotPowerOn")]
- public string DiRobotPowerOn { get; set; }
- [XmlAttribute(AttributeName = "diAlarm")]
- public string DiAlarm { get; set; }
- [XmlAttribute(AttributeName = "diBlade1WaferPresent")]
- public string DiBlade1WaferPresent { get; set; }
- [XmlAttribute(AttributeName = "diBlade2WaferPresent")]
- public string DiBlade2WaferPresent { get; set; }
- [XmlAttribute(AttributeName = "diBlade3WaferPresent")]
- public string DiBlade3WaferPresent { get; set; }
- [XmlAttribute(AttributeName = "diBlade4WaferPresent")]
- public string DiBlade4WaferPresent { get; set; }
- [XmlAttribute(AttributeName = "diBlade5WaferPresent")]
- public string DiBlade5WaferPresent { get; set; }
- [XmlAttribute(AttributeName = "diZAxisHomePosition")]
- public string DiZAxisHomePosition { get; set; }
- [XmlAttribute(AttributeName = "diYAxisHomePosition")]
- public string DiYAxisHomePosition { get; set; }
- [XmlAttribute(AttributeName = "diVAxisHomePosition")]
- public string DiVAxisHomePosition { get; set; }
- [XmlAttribute(AttributeName = "diRunning")]
- public string DiRunning { get; set; }
- [XmlAttribute(AttributeName = "doAlarmReset")]
- public string DoAlarmReset { get; set; }
- [XmlAttribute(AttributeName = "doActionHold")]
- public string DoActionHold { get; set; }
- [XmlAttribute(AttributeName = "doTPEnable")]
- public string DoTPEnable { get; set; }
- [XmlAttribute(AttributeName = "doFIMS1Interlock")]
- public string DoFIMS1Interlock { get; set; }
- [XmlAttribute(AttributeName = "doFIMS2Interlock")]
- public string DoFIMS2Interlock { get; set; }
- [XmlAttribute(AttributeName = "doBoatRotateInterlock")]
- public string DoBoatRotateInterlock { get; set; }
- [XmlAttribute(AttributeName = "doBoatBottomInterlock")]
- public string DoBoatBottomInterlock { get; set; }
- [XmlAttribute(AttributeName = "scRootPath")]
- public string ScRootPath { get; set; }
- }
- [XmlRoot(ElementName = "IoWaferRobots")]
- public class IoWaferRobots
- {
- [XmlElement(ElementName = "IoWaferRobot")]
- public IoWaferRobotConfig IoWaferRobot { get; set; }
- [XmlAttribute(AttributeName = "classType")]
- public string ClassType { get; set; }
- [XmlAttribute(AttributeName = "assembly")]
- public string Assembly { get; set; }
- }
- [XmlRoot(ElementName = "IoCarrierRobot")]
- public class IoCarrierRobotConfig
- {
- [XmlAttribute(AttributeName = "id")]
- public string DeviceName { get; set; }
- [XmlAttribute(AttributeName = "display")]
- public string Display { get; set; }
- [XmlAttribute(AttributeName = "schematicId")]
- public string SchematicId { get; set; }
- [XmlAttribute(AttributeName = "unit")]
- public string Unit { get; set; }
- [XmlAttribute(AttributeName = "diInFIMS1")]
- public string DiInFIMS1 { get; set; }
- [XmlAttribute(AttributeName = "diInFIMS2")]
- public string DiInFIMS2 { get; set; }
- [XmlAttribute(AttributeName = "diInStockerLayer1")]
- public string DiInStockerLayer1 { get; set; }
- [XmlAttribute(AttributeName = "diInStockerLayer2")]
- public string DiInStockerLayer2 { get; set; }
- [XmlAttribute(AttributeName = "diInStockerLayer3")]
- public string DiInStockerLayer3 { get; set; }
- [XmlAttribute(AttributeName = "diInStockerLayer4")]
- public string DiInStockerLayer4 { get; set; }
- [XmlAttribute(AttributeName = "diTPEmo")]
- public string DiTPEmo { get; set; }
- [XmlAttribute(AttributeName = "diServoOn")]
- public string DiServoOn { get; set; }
- [XmlAttribute(AttributeName = "diTPStatus")]
- public string DiTPStatus { get; set; }
- [XmlAttribute(AttributeName = "diRobotPowerOn")]
- public string DiRobotPowerOn { get; set; }
- [XmlAttribute(AttributeName = "diAlarm")]
- public string DiAlarm { get; set; }
- [XmlAttribute(AttributeName = "diBlade1WaferPresent")]
- public string DiBlade1WaferPresent { get; set; }
- [XmlAttribute(AttributeName = "diZAxisHomePosition")]
- public string DiZAxisHomePosition { get; set; }
- [XmlAttribute(AttributeName = "diYAxisHomePosition")]
- public string DiYAxisHomePosition { get; set; }
- [XmlAttribute(AttributeName = "diRAxisHomePosition")]
- public string DiRAxisHomePosition { get; set; }
- [XmlAttribute(AttributeName = "diRunning")]
- public string DiRunning { get; set; }
- [XmlAttribute(AttributeName = "doAlarmReset")]
- public string DoAlarmReset { get; set; }
- [XmlAttribute(AttributeName = "doActionHold")]
- public string DoActionHold { get; set; }
- [XmlAttribute(AttributeName = "doTPEnable")]
- public string DoTPEnable { get; set; }
- [XmlAttribute(AttributeName = "doFIMS1Interlock")]
- public string DoFIMS1Interlock { get; set; }
- [XmlAttribute(AttributeName = "doFIMS2Interlock")]
- public string DoFIMS2Interlock { get; set; }
- [XmlAttribute(AttributeName = "doStockerInterlock")]
- public string DoStockerInterlock { get; set; }
- [XmlAttribute(AttributeName = "scRootPath")]
- public string ScRootPath { get; set; }
- }
- [XmlRoot(ElementName = "IoCarrierRobots")]
- public class IoCarrierRobots
- {
- [XmlElement(ElementName = "IoCarrierRobot")]
- public IoCarrierRobotConfig IoCarrierRobot { get; set; }
- [XmlAttribute(AttributeName = "classType")]
- public string ClassType { get; set; }
- [XmlAttribute(AttributeName = "assembly")]
- public string Assembly { get; set; }
- }
- [XmlRoot(ElementName = "IoRF")]
- public class IoRFConfig
- {
- [XmlAttribute(AttributeName = "id")]
- public string DeviceName { get; set; }
- [XmlAttribute(AttributeName = "display")]
- public string Display { get; set; }
- [XmlAttribute(AttributeName = "schematicId")]
- public string SchematicId { get; set; }
- [XmlAttribute(AttributeName = "unit")]
- public string Unit { get; set; }
- [XmlAttribute(AttributeName = "aiRelfectionPower")]
- public string AiRelfectionPower { get; set; }
- [XmlAttribute(AttributeName = "aiForwardPower")]
- public string AiForwardPower { get; set; }
- [XmlAttribute(AttributeName = "diPowerReached")]
- public string DiPowerReached { get; set; }
- [XmlAttribute(AttributeName = "diAlarm")]
- public string DiAlarm { get; set; }
- [XmlAttribute(AttributeName = "diRFOnStatus")]
- public string DiRFOnStatus { get; set; }
- [XmlAttribute(AttributeName = "doReset")]
- public string DoReset { get; set; }
- [XmlAttribute(AttributeName = "doOnOff")]
- public string DoOnOff { get; set; }
- [XmlAttribute(AttributeName = "doManualAnalog")]
- public string DoManualAnalog { get; set; }
- [XmlAttribute(AttributeName = "aoPower")]
- public string AoPower { get; set; }
- [XmlAttribute(AttributeName = "scRootPath")]
- public string ScRootPath { get; set; }
- }
- [XmlRoot(ElementName = "IoRFs")]
- public class IoRFs
- {
- [XmlElement(ElementName = "IoRF")]
- public IoRFConfig IoRF { get; set; }
- [XmlAttribute(AttributeName = "classType")]
- public string ClassType { get; set; }
- [XmlAttribute(AttributeName = "assembly")]
- public string Assembly { get; set; }
- }
- [XmlRoot(ElementName = "IoRFMatch")]
- public class IoRFMatchConfig
- {
- [XmlAttribute(AttributeName = "id")]
- public string DeviceName { get; set; }
- [XmlAttribute(AttributeName = "display")]
- public string Display { get; set; }
- [XmlAttribute(AttributeName = "schematicId")]
- public string SchematicId { get; set; }
- [XmlAttribute(AttributeName = "unit")]
- public string Unit { get; set; }
- [XmlAttribute(AttributeName = "aiVpp")]
- public string AiVpp { get; set; }
- [XmlAttribute(AttributeName = "aiVdc")]
- public string AiVdc { get; set; }
- [XmlAttribute(AttributeName = "aiLoadPosition")]
- public string AiLoadPosition { get; set; }
- [XmlAttribute(AttributeName = "aiPhase")]
- public string AiPhase { get; set; }
- [XmlAttribute(AttributeName = "doPresetMemory")]
- public string DoPresetMemory { get; set; }
- [XmlAttribute(AttributeName = "doPresetStart")]
- public string DoPresetStart { get; set; }
- [XmlAttribute(AttributeName = "doPresetCH0")]
- public string DoPresetCH0 { get; set; }
- [XmlAttribute(AttributeName = "doPresetCH1")]
- public string DoPresetCH1 { get; set; }
- [XmlAttribute(AttributeName = "doPresetCH2")]
- public string DoPresetCH2 { get; set; }
- [XmlAttribute(AttributeName = "doPresetCH3")]
- public string DoPresetCH3 { get; set; }
- [XmlAttribute(AttributeName = "doSafty")]
- public string DoSafty { get; set; }
- [XmlAttribute(AttributeName = "aoLoadPosition")]
- public string AoLoadPosition { get; set; }
- [XmlAttribute(AttributeName = "aoPhase")]
- public string AoPhase { get; set; }
- [XmlAttribute(AttributeName = "scRootPath")]
- public string ScRootPath { get; set; }
- }
- [XmlRoot(ElementName = "IoRFMatchs")]
- public class IoRFMatchs
- {
- [XmlElement(ElementName = "IoRFMatch")]
- public IoRFMatchConfig IoRFMatch { get; set; }
- [XmlAttribute(AttributeName = "classType")]
- public string ClassType { get; set; }
- [XmlAttribute(AttributeName = "assembly")]
- public string Assembly { get; set; }
- }
- [XmlRoot(ElementName = "IoAPC")]
- public class IoAPCConfig
- {
- [XmlAttribute(AttributeName = "id")]
- public string DeviceName { get; set; }
- [XmlAttribute(AttributeName = "display")]
- public string Display { get; set; }
- [XmlAttribute(AttributeName = "schematicId")]
- public string SchematicId { get; set; }
- [XmlAttribute(AttributeName = "unit")]
- public string Unit { get; set; }
- [XmlAttribute(AttributeName = "aiValueSensorInput1")]
- public string AiValueSensorInput1 { get; set; }
- [XmlAttribute(AttributeName = "aiValueSensorInput2")]
- public string AiValueSensorInput2 { get; set; }
- [XmlAttribute(AttributeName = "aiSelectController")]
- public string AiSelectController { get; set; }
- [XmlAttribute(AttributeName = "aiPositionActualValue")]
- public string AiPositionActualValue { get; set; }
- [XmlAttribute(AttributeName = "aiControlModeStatus")]
- public string AiControlModeStatus { get; set; }
- [XmlAttribute(AttributeName = "aiHomeStatus")]
- public string AiHomeStatus { get; set; }
- [XmlAttribute(AttributeName = "aiWarningStatus1")]
- public string AiWarningStatus1 { get; set; }
- [XmlAttribute(AttributeName = "aiWarningStatus2")]
- public string AiWarningStatus2 { get; set; }
- [XmlAttribute(AttributeName = "aiWarningStatus3")]
- public string AiWarningStatus3 { get; set; }
- [XmlAttribute(AttributeName = "aiWarningStatus4")]
- public string AiWarningStatus4 { get; set; }
- [XmlAttribute(AttributeName = "aiWarningStatus5")]
- public string AiWarningStatus5 { get; set; }
- [XmlAttribute(AttributeName = "aiWarningStatus6")]
- public string AiWarningStatus6 { get; set; }
- [XmlAttribute(AttributeName = "aiErrorStatus1")]
- public string AiErrorStatus1 { get; set; }
- [XmlAttribute(AttributeName = "aiErrorStatus2")]
- public string AiErrorStatus2 { get; set; }
- [XmlAttribute(AttributeName = "aiErrorStatus3")]
- public string AiErrorStatus3 { get; set; }
- [XmlAttribute(AttributeName = "aiErrorStatus4")]
- public string AiErrorStatus4 { get; set; }
- [XmlAttribute(AttributeName = "aiValveStatusThreshold")]
- public string AiValveStatusThreshold { get; set; }
- [XmlAttribute(AttributeName = "aiSlowVacuumModeSetting")]
- public string AiSlowVacuumModeSetting { get; set; }
- [XmlAttribute(AttributeName = "aiInterlock1")]
- public string AiInterlock1 { get; set; }
- [XmlAttribute(AttributeName = "aiInterlock2")]
- public string AiInterlock2 { get; set; }
- [XmlAttribute(AttributeName = "aiInterlock3")]
- public string AiInterlock3 { get; set; }
- [XmlAttribute(AttributeName = "aiInterlockConstantOfInterlock3")]
- public string AiInterlockConstantOfInterlock3 { get; set; }
- [XmlAttribute(AttributeName = "aiP1SensorOffsetSetting")]
- public string AiP1SensorOffsetSetting { get; set; }
- [XmlAttribute(AttributeName = "aiPosMonOffsetSetting")]
- public string AiPosMonOffsetSetting { get; set; }
- [XmlAttribute(AttributeName = "diP1ZeroOffsetOutRangeAlm")]
- public string DiP1ZeroOffsetOutRangeAlm { get; set; }
- [XmlAttribute(AttributeName = "diP1ZeroAdjOutRangeAlm")]
- public string DiP1ZeroAdjOutRangeAlm { get; set; }
- [XmlAttribute(AttributeName = "diP1SpanAdjOutRangeAlm")]
- public string DiP1SpanAdjOutRangeAlm { get; set; }
- [XmlAttribute(AttributeName = "diP2ZeroOffsetOutRangeAlm")]
- public string DiP2ZeroOffsetOutRangeAlm { get; set; }
- [XmlAttribute(AttributeName = "diP2ZeroAdjOutRangeAlm")]
- public string DiP2ZeroAdjOutRangeAlm { get; set; }
- [XmlAttribute(AttributeName = "diP2SpanAdjOutRangeAlm")]
- public string DiP2SpanAdjOutRangeAlm { get; set; }
- [XmlAttribute(AttributeName = "diP1PressCtrlInterlockAlm")]
- public string DiP1PressCtrlInterlockAlm { get; set; }
- [XmlAttribute(AttributeName = "diP2PressCtrlInterlockAlm")]
- public string DiP2PressCtrlInterlockAlm { get; set; }
- [XmlAttribute(AttributeName = "diValveOpenCtrlInterlockAlm")]
- public string DiValveOpenCtrlInterlockAlm { get; set; }
- [XmlAttribute(AttributeName = "diValveHoldCtrlInterlockAlm")]
- public string DiValveHoldCtrlInterlockAlm { get; set; }
- [XmlAttribute(AttributeName = "diValveCloseInterlockAlm")]
- public string DiValveCloseInterlockAlm { get; set; }
- [XmlAttribute(AttributeName = "diAutoTeachingInterlockAlm")]
- public string DiAutoTeachingInterlockAlm { get; set; }
- [XmlAttribute(AttributeName = "diP1DisconnectionAlm")]
- public string DiP1DisconnectionAlm { get; set; }
- [XmlAttribute(AttributeName = "diP2DisconnectionAlm")]
- public string DiP2DisconnectionAlm { get; set; }
- [XmlAttribute(AttributeName = "diPumpStopInterlockAlm")]
- public string DiPumpStopInterlockAlm { get; set; }
- [XmlAttribute(AttributeName = "diAutoTeachingErr1Alm")]
- public string DiAutoTeachingErr1Alm { get; set; }
- [XmlAttribute(AttributeName = "diAutoTeachingErr2Alm")]
- public string DiAutoTeachingErr2Alm { get; set; }
- [XmlAttribute(AttributeName = "doValve")]
- public string DoValve { get; set; }
- [XmlAttribute(AttributeName = "doVGUnit")]
- public string DoVGUnit { get; set; }
- [XmlAttribute(AttributeName = "doAoDataReadSysConfig")]
- public string DoAoDataReadSysConfig { get; set; }
- [XmlAttribute(AttributeName = "doAoDataWriteSysConfig")]
- public string DoAoDataWriteSysConfig { get; set; }
- [XmlAttribute(AttributeName = "doAoDataReadCusConfig")]
- public string DoAoDataReadCusConfig { get; set; }
- [XmlAttribute(AttributeName = "doAoDataWriteCusConfig")]
- public string DoAoDataWriteCusConfig { get; set; }
- [XmlAttribute(AttributeName = "aoZeroResetP1")]
- public string AoZeroResetP1 { get; set; }
- [XmlAttribute(AttributeName = "aoZeroAdjustP1")]
- public string AoZeroAdjustP1 { get; set; }
- [XmlAttribute(AttributeName = "aoSpanAdjustP1")]
- public string AoSpanAdjustP1 { get; set; }
- [XmlAttribute(AttributeName = "aoZeroResetP2")]
- public string AoZeroResetP2 { get; set; }
- [XmlAttribute(AttributeName = "aoZeroAdjustP2")]
- public string AoZeroAdjustP2 { get; set; }
- [XmlAttribute(AttributeName = "aoSpanAdjustP2")]
- public string AoSpanAdjustP2 { get; set; }
- [XmlAttribute(AttributeName = "aoSlowVacuumTargetPressure")]
- public string AoSlowVacuumTargetPressure { get; set; }
- [XmlAttribute(AttributeName = "aoValveStatusThreshold")]
- public string AoValveStatusThreshold { get; set; }
- [XmlAttribute(AttributeName = "aoForbidInterlockOutbreak")]
- public string AoForbidInterlockOutbreak { get; set; }
- [XmlAttribute(AttributeName = "aoSlowVacuumModeSetting")]
- public string AoSlowVacuumModeSetting { get; set; }
- [XmlAttribute(AttributeName = "aoInterlock1")]
- public string AoInterlock1 { get; set; }
- [XmlAttribute(AttributeName = "aoInterlock2")]
- public string AoInterlock2 { get; set; }
- [XmlAttribute(AttributeName = "aoInterlock3")]
- public string AoInterlock3 { get; set; }
- [XmlAttribute(AttributeName = "aoInterlockConstantOfInterlock3")]
- public string AoInterlockConstantOfInterlock3 { get; set; }
- [XmlAttribute(AttributeName = "aoP1SensorOffsetSetting")]
- public string AoP1SensorOffsetSetting { get; set; }
- [XmlAttribute(AttributeName = "aoPosMonOffsetSetting")]
- public string AoPosMonOffsetSetting { get; set; }
- [XmlAttribute(AttributeName = "aoSensorAdjustReset")]
- public string AoSensorAdjustReset { get; set; }
- [XmlAttribute(AttributeName = "aoSlowVacuumRate")]
- public string AoSlowVacuumRate { get; set; }
- [XmlAttribute(AttributeName = "aoSlowVacuumP")]
- public string AoSlowVacuumP { get; set; }
- [XmlAttribute(AttributeName = "aoSlowVacuumI")]
- public string AoSlowVacuumI { get; set; }
- [XmlAttribute(AttributeName = "aoSlowVacuumD")]
- public string AoSlowVacuumD { get; set; }
- [XmlAttribute(AttributeName = "aoSlowVacuumA")]
- public string AoSlowVacuumA { get; set; }
- [XmlAttribute(AttributeName = "aoControllerModeSelect")]
- public string AoControllerModeSelect { get; set; }
- [XmlAttribute(AttributeName = "aoSpecifyTargetVacuumPressureControl")]
- public string AoSpecifyTargetVacuumPressureControl { get; set; }
- [XmlAttribute(AttributeName = "aoSpecifyTargetOpeningForValveOpeningControl")]
- public string AoSpecifyTargetOpeningForValveOpeningControl { get; set; }
- [XmlAttribute(AttributeName = "aoSpecifyControlMode")]
- public string AoSpecifyControlMode { get; set; }
- [XmlAttribute(AttributeName = "aoRangeUpperLimitSensorInput")]
- public string AoRangeUpperLimitSensorInput { get; set; }
- [XmlAttribute(AttributeName = "aoController1")]
- public string AoController1 { get; set; }
- [XmlAttribute(AttributeName = "aoController1P")]
- public string AoController1P { get; set; }
- [XmlAttribute(AttributeName = "aoController1I")]
- public string AoController1I { get; set; }
- [XmlAttribute(AttributeName = "aoController1D")]
- public string AoController1D { get; set; }
- [XmlAttribute(AttributeName = "aoController1A")]
- public string AoController1A { get; set; }
- [XmlAttribute(AttributeName = "aoController1CH")]
- public string AoController1CH { get; set; }
- [XmlAttribute(AttributeName = "aoController1CL")]
- public string AoController1CL { get; set; }
- [XmlAttribute(AttributeName = "aoController1Offset")]
- public string AoController1Offset { get; set; }
- [XmlAttribute(AttributeName = "aoController2")]
- public string AoController2 { get; set; }
- [XmlAttribute(AttributeName = "aoController2P")]
- public string AoController2P { get; set; }
- [XmlAttribute(AttributeName = "aoController2I")]
- public string AoController2I { get; set; }
- [XmlAttribute(AttributeName = "aoController2D")]
- public string AoController2D { get; set; }
- [XmlAttribute(AttributeName = "aoController2A")]
- public string AoController2A { get; set; }
- [XmlAttribute(AttributeName = "aoController2CH")]
- public string AoController2CH { get; set; }
- [XmlAttribute(AttributeName = "aoController2CL")]
- public string AoController2CL { get; set; }
- [XmlAttribute(AttributeName = "aoController2Offset")]
- public string AoController2Offset { get; set; }
- [XmlAttribute(AttributeName = "aoController3")]
- public string AoController3 { get; set; }
- [XmlAttribute(AttributeName = "aoController3P")]
- public string AoController3P { get; set; }
- [XmlAttribute(AttributeName = "aoController3I")]
- public string AoController3I { get; set; }
- [XmlAttribute(AttributeName = "aoController3D")]
- public string AoController3D { get; set; }
- [XmlAttribute(AttributeName = "aoController3A")]
- public string AoController3A { get; set; }
- [XmlAttribute(AttributeName = "aoController3CH")]
- public string AoController3CH { get; set; }
- [XmlAttribute(AttributeName = "aoController3CL")]
- public string AoController3CL { get; set; }
- [XmlAttribute(AttributeName = "aoController3Offset")]
- public string AoController3Offset { get; set; }
- [XmlAttribute(AttributeName = "aoController4")]
- public string AoController4 { get; set; }
- [XmlAttribute(AttributeName = "aoController4P")]
- public string AoController4P { get; set; }
- [XmlAttribute(AttributeName = "aoController4I")]
- public string AoController4I { get; set; }
- [XmlAttribute(AttributeName = "aoController4D")]
- public string AoController4D { get; set; }
- [XmlAttribute(AttributeName = "aoController4A")]
- public string AoController4A { get; set; }
- [XmlAttribute(AttributeName = "aoController4CH")]
- public string AoController4CH { get; set; }
- [XmlAttribute(AttributeName = "aoController4CL")]
- public string AoController4CL { get; set; }
- [XmlAttribute(AttributeName = "aoController4Offset")]
- public string AoController4Offset { get; set; }
- [XmlAttribute(AttributeName = "aoController5")]
- public string AoController5 { get; set; }
- [XmlAttribute(AttributeName = "aoController5P")]
- public string AoController5P { get; set; }
- [XmlAttribute(AttributeName = "aoController5I")]
- public string AoController5I { get; set; }
- [XmlAttribute(AttributeName = "aoController5D")]
- public string AoController5D { get; set; }
- [XmlAttribute(AttributeName = "aoController5A")]
- public string AoController5A { get; set; }
- [XmlAttribute(AttributeName = "aoController5CH")]
- public string AoController5CH { get; set; }
- [XmlAttribute(AttributeName = "aoController5CL")]
- public string AoController5CL { get; set; }
- [XmlAttribute(AttributeName = "aoController5Offset")]
- public string AoController5Offset { get; set; }
- [XmlAttribute(AttributeName = "aoController6")]
- public string AoController6 { get; set; }
- [XmlAttribute(AttributeName = "aoController6P")]
- public string AoController6P { get; set; }
- [XmlAttribute(AttributeName = "aoController6I")]
- public string AoController6I { get; set; }
- [XmlAttribute(AttributeName = "aoController6D")]
- public string AoController6D { get; set; }
- [XmlAttribute(AttributeName = "aoController6A")]
- public string AoController6A { get; set; }
- [XmlAttribute(AttributeName = "aoController6CH")]
- public string AoController6CH { get; set; }
- [XmlAttribute(AttributeName = "aoController6CL")]
- public string AoController6CL { get; set; }
- [XmlAttribute(AttributeName = "aoController6Offset")]
- public string AoController6Offset { get; set; }
- [XmlAttribute(AttributeName = "aoController7")]
- public string AoController7 { get; set; }
- [XmlAttribute(AttributeName = "aoController7P")]
- public string AoController7P { get; set; }
- [XmlAttribute(AttributeName = "aoController7I")]
- public string AoController7I { get; set; }
- [XmlAttribute(AttributeName = "aoController7D")]
- public string AoController7D { get; set; }
- [XmlAttribute(AttributeName = "aoController7A")]
- public string AoController7A { get; set; }
- [XmlAttribute(AttributeName = "aoController7CH")]
- public string AoController7CH { get; set; }
- [XmlAttribute(AttributeName = "aoController7CL")]
- public string AoController7CL { get; set; }
- [XmlAttribute(AttributeName = "aoController7Offset")]
- public string AoController7Offset { get; set; }
- [XmlAttribute(AttributeName = "aoController8")]
- public string AoController8 { get; set; }
- [XmlAttribute(AttributeName = "aoController8P")]
- public string AoController8P { get; set; }
- [XmlAttribute(AttributeName = "aoController8I")]
- public string AoController8I { get; set; }
- [XmlAttribute(AttributeName = "aoController8D")]
- public string AoController8D { get; set; }
- [XmlAttribute(AttributeName = "aoController8A")]
- public string AoController8A { get; set; }
- [XmlAttribute(AttributeName = "aoController8CH")]
- public string AoController8CH { get; set; }
- [XmlAttribute(AttributeName = "aoController8CL")]
- public string AoController8CL { get; set; }
- [XmlAttribute(AttributeName = "aoController8Offset")]
- public string AoController8Offset { get; set; }
- [XmlAttribute(AttributeName = "aoController9")]
- public string AoController9 { get; set; }
- [XmlAttribute(AttributeName = "aoController9P")]
- public string AoController9P { get; set; }
- [XmlAttribute(AttributeName = "aoController9I")]
- public string AoController9I { get; set; }
- [XmlAttribute(AttributeName = "aoController9D")]
- public string AoController9D { get; set; }
- [XmlAttribute(AttributeName = "aoController9A")]
- public string AoController9A { get; set; }
- [XmlAttribute(AttributeName = "aoController9CH")]
- public string AoController9CH { get; set; }
- [XmlAttribute(AttributeName = "aoController9CL")]
- public string AoController9CL { get; set; }
- [XmlAttribute(AttributeName = "aoController9Offset")]
- public string AoController9Offset { get; set; }
- [XmlAttribute(AttributeName = "aoController10")]
- public string AoController10 { get; set; }
- [XmlAttribute(AttributeName = "aoController10P")]
- public string AoController10P { get; set; }
- [XmlAttribute(AttributeName = "aoController10I")]
- public string AoController10I { get; set; }
- [XmlAttribute(AttributeName = "aoController10D")]
- public string AoController10D { get; set; }
- [XmlAttribute(AttributeName = "aoController10A")]
- public string AoController10A { get; set; }
- [XmlAttribute(AttributeName = "aoController10CH")]
- public string AoController10CH { get; set; }
- [XmlAttribute(AttributeName = "aoController10CL")]
- public string AoController10CL { get; set; }
- [XmlAttribute(AttributeName = "aoController10Offset")]
- public string AoController10Offset { get; set; }
- [XmlAttribute(AttributeName = "scRootPath")]
- public string ScRootPath { get; set; }
- [XmlAttribute(AttributeName = "aioType")]
- public string AioType { get; set; }
- }
- [XmlRoot(ElementName = "IoAPCs")]
- public class IoAPCs
- {
- [XmlElement(ElementName = "IoAPC")]
- public List<IoAPCConfig> IoAPC { get; set; }
- [XmlAttribute(AttributeName = "classType")]
- public string ClassType { get; set; }
- [XmlAttribute(AttributeName = "assembly")]
- public string Assembly { get; set; }
- }
- [XmlRoot(ElementName = "IoPressureMeter")]
- public class IoPressureMeterConfig
- {
- [XmlAttribute(AttributeName = "id")]
- public string DeviceName { get; set; }
- [XmlAttribute(AttributeName = "display")]
- public string Display { get; set; }
- [XmlAttribute(AttributeName = "schematicId")]
- public string SchematicId { get; set; }
- [XmlAttribute(AttributeName = "unit")]
- public string Unit { get; set; }
- [XmlAttribute(AttributeName = "aiFeedback")]
- public string AiFeedback { get; set; }
- [XmlAttribute(AttributeName = "physical")]
- public string Physical { get; set; }
- [XmlAttribute(AttributeName = "scale")]
- public string Scale { get; set; }
- [XmlAttribute(AttributeName = "aioType")]
- public string AioType { get; set; }
- }
- [XmlRoot(ElementName = "IoPressureMeters")]
- public class IoPressureMeters
- {
- [XmlElement(ElementName = "IoPressureMeter")]
- public List<IoPressureMeterConfig> IoPressureMeter { get; set; }
- [XmlAttribute(AttributeName = "classType")]
- public string ClassType { get; set; }
- [XmlAttribute(AttributeName = "assembly")]
- public string Assembly { get; set; }
- }
- [XmlRoot(ElementName = "IoAlarmSignal")]
- public class IoAlarmSignalConfig
- {
- [XmlAttribute(AttributeName = "id")]
- public string DeviceName { get; set; }
- [XmlAttribute(AttributeName = "diSignalsplay")]
- public string DiSignalsplay { get; set; }
- [XmlAttribute(AttributeName = "diSignal")]
- public string DiSignal { get; set; }
- [XmlAttribute(AttributeName = "alarmTrigValue")]
- public bool AlarmTrigValue { get; set; }
- [XmlAttribute(AttributeName = "delay")]
- public float Delay { get; set; }
- [XmlAttribute(AttributeName = "aiSignal")]
- public string AiSignal { get; set; }
- [XmlAttribute(AttributeName = "condition")]
- public string Condition { get; set; }
- [XmlAttribute(AttributeName = "limitValue")]
- public float LimitValue { get; set; }
- }
- [XmlRoot(ElementName = "IoAlarmSignals")]
- public class IoAlarmSignals
- {
- [XmlElement(ElementName = "IoAlarmSignal")]
- public List<IoAlarmSignalConfig> IoAlarmSignal { get; set; }
- [XmlAttribute(AttributeName = "classType")]
- public string ClassType { get; set; }
- [XmlAttribute(AttributeName = "assembly")]
- public string Assembly { get; set; }
- }
- [XmlRoot(ElementName = "IoSensor")]
- public class IoSensorConfig
- {
- [XmlAttribute(AttributeName = "id")]
- public string DeviceName { get; set; }
- [XmlAttribute(AttributeName = "display")]
- public string Display { get; set; }
- [XmlAttribute(AttributeName = "di")]
- public string Di { get; set; }
- }
- [XmlRoot(ElementName = "IoSensors")]
- public class IoSensors
- {
- [XmlElement(ElementName = "IoSensor")]
- public List<IoSensorConfig> IoSensor { get; set; }
- [XmlAttribute(AttributeName = "classType")]
- public string ClassType { get; set; }
- [XmlAttribute(AttributeName = "assembly")]
- public string Assembly { get; set; }
- }
- [XmlRoot(ElementName = "IoTrigger")]
- public class IoTriggerConfig
- {
- [XmlAttribute(AttributeName = "id")]
- public string DeviceName { get; set; }
- [XmlAttribute(AttributeName = "display")]
- public string Display { get; set; }
- [XmlAttribute(AttributeName = "schematicId")]
- public string SchematicId { get; set; }
- [XmlAttribute(AttributeName = "unit")]
- public string Unit { get; set; }
- [XmlAttribute(AttributeName = "doTrigger")]
- public string DoTrigger { get; set; }
- [XmlAttribute(AttributeName = "diFeedback")]
- public string DiFeedback { get; set; }
- [XmlAttribute(AttributeName = "aoTrigger")]
- public string AoTrigger { get; set; }
- }
- [XmlRoot(ElementName = "IoTriggers")]
- public class IoTriggers
- {
- [XmlElement(ElementName = "IoTrigger")]
- public List<IoTriggerConfig> IoTrigger { get; set; }
- [XmlAttribute(AttributeName = "classType")]
- public string ClassType { get; set; }
- [XmlAttribute(AttributeName = "assembly")]
- public string Assembly { get; set; }
- }
- [XmlRoot(ElementName = "IoSignalTower")]
- public class IoSignalTowerConfig
- {
- [XmlAttribute(AttributeName = "module")]
- public string Module { get; set; }
- [XmlAttribute(AttributeName = "id")]
- public string DeviceName { get; set; }
- [XmlAttribute(AttributeName = "display")]
- public string Display { get; set; }
- [XmlAttribute(AttributeName = "schematicId")]
- public string SchematicId { get; set; }
- [XmlAttribute(AttributeName = "doRed")]
- public string DoRed { get; set; }
- [XmlAttribute(AttributeName = "doYellow")]
- public string DoYellow { get; set; }
- [XmlAttribute(AttributeName = "doGreen")]
- public string DoGreen { get; set; }
- [XmlAttribute(AttributeName = "doBlue")]
- public string DoBlue { get; set; }
- [XmlAttribute(AttributeName = "doBuzzer1")]
- public string DoBuzzer1 { get; set; }
- }
- [XmlRoot(ElementName = "IoSignalTowers")]
- public class IoSignalTowers
- {
- [XmlElement(ElementName = "IoSignalTower")]
- public List<IoSignalTowerConfig> IoSignalTower { get; set; }
- [XmlAttribute(AttributeName = "classType")]
- public string ClassType { get; set; }
- [XmlAttribute(AttributeName = "assembly")]
- public string Assembly { get; set; }
- }
- [XmlRoot(ElementName = "IoHeaterBand")]
- public class IoHeaterBandConfig
- {
- [XmlAttribute(AttributeName = "id")]
- public string DeviceName { get; set; }
- [XmlAttribute(AttributeName = "display")]
- public string Display { get; set; }
- [XmlAttribute(AttributeName = "schematicId")]
- public string SchematicId { get; set; }
- [XmlAttribute(AttributeName = "unit")]
- public string Unit { get; set; }
- [XmlAttribute(AttributeName = "module")]
- public string Module { get; set; }
- [XmlAttribute(AttributeName = "aiPV")]
- public string AiPV { get; set; }
- [XmlAttribute(AttributeName = "aiMV")]
- public string AiMV { get; set; }
- [XmlAttribute(AttributeName = "aiControlOutput")]
- public string AiControlOutput { get; set; }
- [XmlAttribute(AttributeName = "aiErrorID")]
- public string AiErrorID { get; set; }
- [XmlAttribute(AttributeName = "aiPID_P")]
- public string AiPIDP { get; set; }
- [XmlAttribute(AttributeName = "aiPID_I")]
- public string AiPIDI { get; set; }
- [XmlAttribute(AttributeName = "aiPID_D")]
- public string AiPIDD { get; set; }
- [XmlAttribute(AttributeName = "doEnable")]
- public string DoEnable { get; set; }
- [XmlAttribute(AttributeName = "doManualControl")]
- public string DoManualControl { get; set; }
- [XmlAttribute(AttributeName = "doAutoTuning")]
- public string DoAutoTuning { get; set; }
- [XmlAttribute(AttributeName = "diControlDoing")]
- public string DiControlDoing { get; set; }
- [XmlAttribute(AttributeName = "diAutoTuningDoing")]
- public string DiAutoTuningDoing { get; set; }
- [XmlAttribute(AttributeName = "diAutoTuningDone")]
- public string DiAutoTuningDone { get; set; }
- [XmlAttribute(AttributeName = "diPIDControlError")]
- public string DiPIDControlError { get; set; }
- [XmlAttribute(AttributeName = "diTimePropControlError")]
- public string DiTimePropControlError { get; set; }
- [XmlAttribute(AttributeName = "aoPID_P")]
- public string AoPIDP { get; set; }
- [XmlAttribute(AttributeName = "aoPID_I")]
- public string AoPIDI { get; set; }
- [XmlAttribute(AttributeName = "aoPID_D")]
- public string AoPIDD { get; set; }
- [XmlAttribute(AttributeName = "aoManualOutput")]
- public string AoManualOutput { get; set; }
- [XmlAttribute(AttributeName = "aoControlPeriodTime")]
- public string AoControlPeriodTime { get; set; }
- [XmlAttribute(AttributeName = "aoSetPoint")]
- public string AoSetPoint { get; set; }
- [XmlAttribute(AttributeName = "aioType")]
- public string AioType { get; set; }
- [XmlAttribute(AttributeName = "aiTemperatureSVFeedback")]
- public string AiTemperatureSVFeedback { get; set; }
- [XmlAttribute(AttributeName = "aiEnableIn")]
- public string AiEnableIn { get; set; }
- [XmlAttribute(AttributeName = "aiAutotuneActivate")]
- public string AiAutotuneActivate { get; set; }
- [XmlAttribute(AttributeName = "aiAlarmHigher")]
- public string AiAlarmHigher { get; set; }
- [XmlAttribute(AttributeName = "aiUpRate")]
- public string AiUpRate { get; set; }
- [XmlAttribute(AttributeName = "aiDownRate")]
- public string AiDownRate { get; set; }
- [XmlAttribute(AttributeName = "aiAlarmLower")]
- public string AiAlarmLower { get; set; }
- [XmlAttribute(AttributeName = "aoUpRate")]
- public string AoUpRate { get; set; }
- [XmlAttribute(AttributeName = "aoDownRate")]
- public string AoDownRate { get; set; }
- [XmlAttribute(AttributeName = "aoEnableIn")]
- public string AoEnableIn { get; set; }
- [XmlAttribute(AttributeName = "aoAutotuneActivate")]
- public string AoAutotuneActivate { get; set; }
- [XmlAttribute(AttributeName = "aoAlarmHigher")]
- public string AoAlarmHigher { get; set; }
- [XmlAttribute(AttributeName = "aoAlarmLower")]
- public string AoAlarmLower { get; set; }
- }
- [XmlRoot(ElementName = "IoHeaterBands")]
- public class IoHeaterBands
- {
- [XmlElement(ElementName = "IoHeaterBand")]
- public List<IoHeaterBandConfig> IoHeaterBand { get; set; }
- [XmlAttribute(AttributeName = "classType")]
- public string ClassType { get; set; }
- [XmlAttribute(AttributeName = "assembly")]
- public string Assembly { get; set; }
- }
- [XmlRoot(ElementName = "IoMFC")]
- public class IoMFCConfig
- {
- [XmlAttribute(AttributeName = "id")]
- public string DeviceName { get; set; }
- [XmlAttribute(AttributeName = "display")]
- public string Display { get; set; }
- [XmlAttribute(AttributeName = "schematicId")]
- public string SchematicId { get; set; }
- [XmlAttribute(AttributeName = "unit")]
- public string Unit { get; set; }
- [XmlAttribute(AttributeName = "aiFlow")]
- public string AiFlow { get; set; }
- [XmlAttribute(AttributeName = "aoFlow")]
- public string AoFlow { get; set; }
- [XmlAttribute(AttributeName = "aoRamp")]
- public string AoRamp { get; set; }
- [XmlAttribute(AttributeName = "aioType")]
- public string AioType { get; set; }
- [XmlAttribute(AttributeName = "scBasePath")]
- public string ScBasePath { get; set; }
- }
- [XmlRoot(ElementName = "IoMFCs")]
- public class IoMFCs
- {
- [XmlElement(ElementName = "IoMFC")]
- public List<IoMFCConfig> IoMFC { get; set; }
- [XmlAttribute(AttributeName = "classType")]
- public string ClassType { get; set; }
- [XmlAttribute(AttributeName = "assembly")]
- public string Assembly { get; set; }
- }
- [XmlRoot(ElementName = "IoMFM")]
- public class IoMFMConfig
- {
- [XmlAttribute(AttributeName = "id")]
- public string DeviceName { get; set; }
- [XmlAttribute(AttributeName = "display")]
- public string Display { get; set; }
- [XmlAttribute(AttributeName = "schematicId")]
- public string SchematicId { get; set; }
- [XmlAttribute(AttributeName = "unit")]
- public string Unit { get; set; }
- [XmlAttribute(AttributeName = "aiFlow")]
- public string AiFlow { get; set; }
- [XmlAttribute(AttributeName = "aoFlow")]
- public string AoFlow { get; set; }
- [XmlAttribute(AttributeName = "aioType")]
- public string AioType { get; set; }
- [XmlAttribute(AttributeName = "scBasePath")]
- public string ScBasePath { get; set; }
- }
- [XmlRoot(ElementName = "IoMFMs")]
- public class IoMFMs
- {
- [XmlElement(ElementName = "IoMFM")]
- public List<IoMFMConfig> IoMFM { get; set; }
- [XmlAttribute(AttributeName = "classType")]
- public string ClassType { get; set; }
- [XmlAttribute(AttributeName = "assembly")]
- public string Assembly { get; set; }
- }
- [XmlRoot(ElementName = "IoFFU")]
- public class IoFFUConfig
- {
- [XmlAttribute(AttributeName = "id")]
- public string DeviceName { get; set; }
- [XmlAttribute(AttributeName = "display")]
- public string Display { get; set; }
- [XmlAttribute(AttributeName = "schematicId")]
- public string SchematicId { get; set; }
- [XmlAttribute(AttributeName = "unit")]
- public string Unit { get; set; }
- [XmlAttribute(AttributeName = "diDataWriteDone")]
- public string DiDataWriteDone { get; set; }
- [XmlAttribute(AttributeName = "diDataWriteError")]
- public string DiDataWriteError { get; set; }
- [XmlAttribute(AttributeName = "diDataReadError")]
- public string DiDataReadError { get; set; }
- [XmlAttribute(AttributeName = "aiGroupNumber")]
- public string AiGroupNumber { get; set; }
- [XmlAttribute(AttributeName = "aiAddressNumber")]
- public string AiAddressNumber { get; set; }
- [XmlAttribute(AttributeName = "aiSwitch")]
- public string AiSwitch { get; set; }
- [XmlAttribute(AttributeName = "aiSetSpeed")]
- public string AiSetSpeed { get; set; }
- [XmlAttribute(AttributeName = "aiMaxSpeed")]
- public string AiMaxSpeed { get; set; }
- [XmlAttribute(AttributeName = "aiReset")]
- public string AiReset { get; set; }
- [XmlAttribute(AttributeName = "aiErrorTimer")]
- public string AiErrorTimer { get; set; }
- [XmlAttribute(AttributeName = "aiCurrentSpeed")]
- public string AiCurrentSpeed { get; set; }
- [XmlAttribute(AttributeName = "aiVoltage")]
- public string AiVoltage { get; set; }
- [XmlAttribute(AttributeName = "aiCurrent")]
- public string AiCurrent { get; set; }
- [XmlAttribute(AttributeName = "aoSwitch")]
- public string AoSwitch { get; set; }
- [XmlAttribute(AttributeName = "aoSetSpeed")]
- public string AoSetSpeed { get; set; }
- [XmlAttribute(AttributeName = "aoReset")]
- public string AoReset { get; set; }
- [XmlAttribute(AttributeName = "doEnable")]
- public string DoEnable { get; set; }
- [XmlAttribute(AttributeName = "doWriteCommand")]
- public string DoWriteCommand { get; set; }
- [XmlAttribute(AttributeName = "aioType")]
- public string AioType { get; set; }
- }
- [XmlRoot(ElementName = "IoFFUs")]
- public class IoFFUs
- {
- [XmlElement(ElementName = "IoFFU")]
- public List<IoFFUConfig> IoFFU { get; set; }
- [XmlAttribute(AttributeName = "classType")]
- public string ClassType { get; set; }
- [XmlAttribute(AttributeName = "assembly")]
- public string Assembly { get; set; }
- }
- [XmlRoot(ElementName = "IoValve")]
- public class IoValveConfig
- {
- [XmlAttribute(AttributeName = "id")]
- public string DeviceName { get; set; }
- [XmlAttribute(AttributeName = "diOpen")]
- public string DiOpen { get; set; }
- [XmlAttribute(AttributeName = "doOpen")]
- public string DoOpen { get; set; }
- [XmlAttribute(AttributeName = "display")]
- public string Display { get; set; }
- [XmlAttribute(AttributeName = "ILKDi")]
- public string DiILK { get; set; }
- [XmlAttribute(AttributeName = "schematicId")]
- public string SchematicId { get; set; }
- [XmlAttribute(AttributeName = "isNc")]
- public bool IsNc { get; set; }
- [XmlAttribute(AttributeName = "isDefaultOpen")]
- public bool IsDefaultOpen { get; set; }
- [XmlAttribute(AttributeName = "diOpenSensor")]
- public string DiOpenSensor { get; set; }
- [XmlAttribute(AttributeName = "diCloseSensor")]
- public string DiCloseSensor { get; set; }
- [XmlAttribute(AttributeName = "doClose")]
- public string DoClose { get; set; }
- }
- [XmlRoot(ElementName = "IoValves")]
- public class IoValves
- {
- [XmlElement(ElementName = "IoValve")]
- public List<IoValveConfig> IoValve { get; set; }
- [XmlAttribute(AttributeName = "classType")]
- public string ClassType { get; set; }
- [XmlAttribute(AttributeName = "assembly")]
- public string Assembly { get; set; }
- }
- [XmlRoot(ElementName = "DeviceModelDefine")]
- public class PMDeviceConfig
- {
- [XmlElement(ElementName = "IoLPs")]
- public IoLPs IoLPs { get; set; }
- [XmlElement(ElementName = "IoFIMSs")]
- public IoFIMSs IoFIMSs { get; set; }
- [XmlElement(ElementName = "IoDoors")]
- public IoDoors IoDoors { get; set; }
- [XmlElement(ElementName = "IoShutters")]
- public IoShutters IoShutters { get; set; }
- [XmlElement(ElementName = "IoBufferMotors")]
- public IoBufferMotors IoBufferMotors { get; set; }
- [XmlElement(ElementName = "IoFurnaceMotors")]
- public IoFurnaceMotors IoFurnaceMotors { get; set; }
- [XmlElement(ElementName = "IoWaferRobots")]
- public IoWaferRobots IoWaferRobots { get; set; }
- [XmlElement(ElementName = "IoCarrierRobots")]
- public IoCarrierRobots IoCarrierRobots { get; set; }
- [XmlElement(ElementName = "IoRFs")]
- public IoRFs IoRFs { get; set; }
- [XmlElement(ElementName = "IoRFMatchs")]
- public IoRFMatchs IoRFMatchs { get; set; }
- [XmlElement(ElementName = "IoAPCs")]
- public IoAPCs IoAPCs { get; set; }
- [XmlElement(ElementName = "IoPressureMeters")]
- public IoPressureMeters IoPressureMeters { get; set; }
- [XmlElement(ElementName = "IoAlarmSignals")]
- public IoAlarmSignals IoAlarmSignals { get; set; }
- [XmlElement(ElementName = "IoSensors")]
- public IoSensors IoSensors { get; set; }
- [XmlElement(ElementName = "IoTriggers")]
- public IoTriggers IoTriggers { get; set; }
- [XmlElement(ElementName = "IoSignalTowers")]
- public IoSignalTowers IoSignalTowers { get; set; }
- [XmlElement(ElementName = "IoHeaterBands")]
- public IoHeaterBands IoHeaterBands { get; set; }
- [XmlElement(ElementName = "IoMFCs")]
- public IoMFCs IoMFCs { get; set; }
- [XmlElement(ElementName = "IoMFMs")]
- public IoMFMs IoMFMs { get; set; }
- [XmlElement(ElementName = "IoFFUs")]
- public IoFFUs IoFFUs { get; set; }
- [XmlElement(ElementName = "IoValves")]
- public IoValves IoValves { get; set; }
- [XmlAttribute(AttributeName = "type")]
- public string Type { get; set; }
- }
- }
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