PMDeviceConfig.cs 74 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. using System.Xml.Serialization;
  7. namespace MECF.Framework.Common.Config
  8. {
  9. [XmlRoot(ElementName = "IoLP")]
  10. public class IoLPConfig
  11. {
  12. [XmlAttribute(AttributeName = "id")]
  13. public string DeviceName { get; set; }
  14. [XmlAttribute(AttributeName = "display")]
  15. public string Display { get; set; }
  16. [XmlAttribute(AttributeName = "schematicId")]
  17. public string SchematicId { get; set; }
  18. [XmlAttribute(AttributeName = "unit")]
  19. public string Unit { get; set; }
  20. [XmlAttribute(AttributeName = "diLeftClamp")]
  21. public string DiLeftClamp { get; set; }
  22. [XmlAttribute(AttributeName = "diRightClamp")]
  23. public string DiRightClamp { get; set; }
  24. [XmlAttribute(AttributeName = "diLeftRelease")]
  25. public string DiLeftRelease { get; set; }
  26. [XmlAttribute(AttributeName = "diRightRelease")]
  27. public string DiRightRelease { get; set; }
  28. [XmlAttribute(AttributeName = "diInPosition1")]
  29. public string DiInPosition1 { get; set; }
  30. [XmlAttribute(AttributeName = "diInPosition2")]
  31. public string DiInPosition2 { get; set; }
  32. [XmlAttribute(AttributeName = "diInPosition3")]
  33. public string DiInPosition3 { get; set; }
  34. [XmlAttribute(AttributeName = "diDetect")]
  35. public string DiDetect { get; set; }
  36. [XmlAttribute(AttributeName = "doClamp")]
  37. public string DoClamp { get; set; }
  38. [XmlAttribute(AttributeName = "doRelease")]
  39. public string DoRelease { get; set; }
  40. [XmlAttribute(AttributeName = "doPresence")]
  41. public string DoPresence { get; set; }
  42. [XmlAttribute(AttributeName = "doPlacement")]
  43. public string DoPlacement { get; set; }
  44. [XmlAttribute(AttributeName = "doLoad")]
  45. public string DoLoad { get; set; }
  46. [XmlAttribute(AttributeName = "doUnload")]
  47. public string DoUnload { get; set; }
  48. [XmlAttribute(AttributeName = "doManual")]
  49. public string DoManual { get; set; }
  50. [XmlAttribute(AttributeName = "scRootPath")]
  51. public string ScRootPath { get; set; }
  52. }
  53. [XmlRoot(ElementName = "IoLPs")]
  54. public class IoLPs
  55. {
  56. [XmlElement(ElementName = "IoLP")]
  57. public List<IoLPConfig> IoLP { get; set; }
  58. [XmlAttribute(AttributeName = "classType")]
  59. public string ClassType { get; set; }
  60. [XmlAttribute(AttributeName = "assembly")]
  61. public string Assembly { get; set; }
  62. }
  63. [XmlRoot(ElementName = "IoFIMS")]
  64. public class IoFIMSConfig
  65. {
  66. [XmlAttribute(AttributeName = "id")]
  67. public string DeviceName { get; set; }
  68. [XmlAttribute(AttributeName = "display")]
  69. public string Display { get; set; }
  70. [XmlAttribute(AttributeName = "schematicId")]
  71. public string SchematicId { get; set; }
  72. [XmlAttribute(AttributeName = "unit")]
  73. public string Unit { get; set; }
  74. [XmlAttribute(AttributeName = "diLoadComplete")]
  75. public string DiLoadComplete { get; set; }
  76. [XmlAttribute(AttributeName = "diUnloadComplete")]
  77. public string DiUnloadComplete { get; set; }
  78. [XmlAttribute(AttributeName = "diHomeComplete")]
  79. public string DiHomeComplete { get; set; }
  80. [XmlAttribute(AttributeName = "diRunning")]
  81. public string DiRunning { get; set; }
  82. [XmlAttribute(AttributeName = "diAutoManual")]
  83. public string DiAutoManual { get; set; }
  84. [XmlAttribute(AttributeName = "diDock")]
  85. public string DiDock { get; set; }
  86. [XmlAttribute(AttributeName = "diUndock")]
  87. public string DiUndock { get; set; }
  88. [XmlAttribute(AttributeName = "diExist")]
  89. public string DiExist { get; set; }
  90. [XmlAttribute(AttributeName = "diSeal")]
  91. public string DiSeal { get; set; }
  92. [XmlAttribute(AttributeName = "diRelease")]
  93. public string DiRelease { get; set; }
  94. [XmlAttribute(AttributeName = "diDoorOpen")]
  95. public string DiDoorOpen { get; set; }
  96. [XmlAttribute(AttributeName = "diDoorClose")]
  97. public string DiDoorClose { get; set; }
  98. [XmlAttribute(AttributeName = "diLatchOn")]
  99. public string DiLatchOn { get; set; }
  100. [XmlAttribute(AttributeName = "diLatchOff")]
  101. public string DiLatchOff { get; set; }
  102. [XmlAttribute(AttributeName = "diCollisionAvoidanceDown")]
  103. public string DiCollisionAvoidanceDown { get; set; }
  104. [XmlAttribute(AttributeName = "diCollisionAvoidanceUp")]
  105. public string DiCollisionAvoidanceUp { get; set; }
  106. [XmlAttribute(AttributeName = "diN2PurgeValveClosed")]
  107. public string DiN2PurgeValveClosed { get; set; }
  108. [XmlAttribute(AttributeName = "diN2PurgeValveOpened")]
  109. public string DiN2PurgeValveOpened { get; set; }
  110. [XmlAttribute(AttributeName = "diFOUPVacuumSuckingOK")]
  111. public string DiFOUPVacuumSuckingOK { get; set; }
  112. [XmlAttribute(AttributeName = "diFOUPVacuumSuckingAlarm")]
  113. public string DiFOUPVacuumSuckingAlarm { get; set; }
  114. [XmlAttribute(AttributeName = "diWaferOnRobot")]
  115. public string DiWaferOnRobot { get; set; }
  116. [XmlAttribute(AttributeName = "diWaferRobotEX1AxisHomePosition")]
  117. public string DiWaferRobotEX1AxisHomePosition { get; set; }
  118. [XmlAttribute(AttributeName = "diWaferRobotEX2AxisHomePosition")]
  119. public string DiWaferRobotEX2AxisHomePosition { get; set; }
  120. [XmlAttribute(AttributeName = "doLoad")]
  121. public string DoLoad { get; set; }
  122. [XmlAttribute(AttributeName = "doUnload")]
  123. public string DoUnload { get; set; }
  124. [XmlAttribute(AttributeName = "doHome")]
  125. public string DoHome { get; set; }
  126. [XmlAttribute(AttributeName = "doAlarmReset")]
  127. public string DoAlarmReset { get; set; }
  128. [XmlAttribute(AttributeName = "doAutoManual")]
  129. public string DoAutoManual { get; set; }
  130. [XmlAttribute(AttributeName = "doDock")]
  131. public string DoDock { get; set; }
  132. [XmlAttribute(AttributeName = "doUndock")]
  133. public string DoUndock { get; set; }
  134. [XmlAttribute(AttributeName = "doSeal")]
  135. public string DoSeal { get; set; }
  136. [XmlAttribute(AttributeName = "doRelease")]
  137. public string DoRelease { get; set; }
  138. [XmlAttribute(AttributeName = "doDoorOpen")]
  139. public string DoDoorOpen { get; set; }
  140. [XmlAttribute(AttributeName = "doDoorClose")]
  141. public string DoDoorClose { get; set; }
  142. [XmlAttribute(AttributeName = "doLatch1On")]
  143. public string DoLatch1On { get; set; }
  144. [XmlAttribute(AttributeName = "doLatch2On")]
  145. public string DoLatch2On { get; set; }
  146. [XmlAttribute(AttributeName = "doLatch1Off")]
  147. public string DoLatch1Off { get; set; }
  148. [XmlAttribute(AttributeName = "doLatch2Off")]
  149. public string DoLatch2Off { get; set; }
  150. [XmlAttribute(AttributeName = "doCollisionAvoidanceDown")]
  151. public string DoCollisionAvoidanceDown { get; set; }
  152. [XmlAttribute(AttributeName = "doCollisionAvoidanceUp")]
  153. public string DoCollisionAvoidanceUp { get; set; }
  154. [XmlAttribute(AttributeName = "doN2PurgeValveOpen")]
  155. public string DoN2PurgeValveOpen { get; set; }
  156. [XmlAttribute(AttributeName = "doN2PurgeValveClose")]
  157. public string DoN2PurgeValveClose { get; set; }
  158. [XmlAttribute(AttributeName = "doVaccumValveOpen")]
  159. public string DoVaccumValveOpen { get; set; }
  160. [XmlAttribute(AttributeName = "doVaccumValveClose")]
  161. public string DoVaccumValveClose { get; set; }
  162. [XmlAttribute(AttributeName = "scRootPath")]
  163. public string ScRootPath { get; set; }
  164. }
  165. [XmlRoot(ElementName = "IoFIMSs")]
  166. public class IoFIMSs
  167. {
  168. [XmlElement(ElementName = "IoFIMS")]
  169. public List<IoFIMSConfig> IoFIMS { get; set; }
  170. [XmlAttribute(AttributeName = "classType")]
  171. public string ClassType { get; set; }
  172. [XmlAttribute(AttributeName = "assembly")]
  173. public string Assembly { get; set; }
  174. }
  175. [XmlRoot(ElementName = "IoDoor")]
  176. public class IoDoorConfig
  177. {
  178. [XmlAttribute(AttributeName = "id")]
  179. public string DeviceName { get; set; }
  180. [XmlAttribute(AttributeName = "display")]
  181. public string Display { get; set; }
  182. [XmlAttribute(AttributeName = "schematicId")]
  183. public string SchematicId { get; set; }
  184. [XmlAttribute(AttributeName = "unit")]
  185. public string Unit { get; set; }
  186. [XmlAttribute(AttributeName = "diOpen")]
  187. public string DiOpen { get; set; }
  188. [XmlAttribute(AttributeName = "diClose")]
  189. public string DiClose { get; set; }
  190. [XmlAttribute(AttributeName = "doOpen")]
  191. public string DoOpen { get; set; }
  192. [XmlAttribute(AttributeName = "doClose")]
  193. public string DoClose { get; set; }
  194. [XmlAttribute(AttributeName = "scRootPath")]
  195. public string ScRootPath { get; set; }
  196. }
  197. [XmlRoot(ElementName = "IoDoors")]
  198. public class IoDoors
  199. {
  200. [XmlElement(ElementName = "IoDoor")]
  201. public IoDoorConfig IoDoor { get; set; }
  202. [XmlAttribute(AttributeName = "classType")]
  203. public string ClassType { get; set; }
  204. [XmlAttribute(AttributeName = "assembly")]
  205. public string Assembly { get; set; }
  206. }
  207. [XmlRoot(ElementName = "IoShutter")]
  208. public class IoShutterConfig
  209. {
  210. [XmlAttribute(AttributeName = "id")]
  211. public string DeviceName { get; set; }
  212. [XmlAttribute(AttributeName = "display")]
  213. public string Display { get; set; }
  214. [XmlAttribute(AttributeName = "schematicId")]
  215. public string SchematicId { get; set; }
  216. [XmlAttribute(AttributeName = "unit")]
  217. public string Unit { get; set; }
  218. [XmlAttribute(AttributeName = "diOpen")]
  219. public string DiOpen { get; set; }
  220. [XmlAttribute(AttributeName = "diClose")]
  221. public string DiClose { get; set; }
  222. [XmlAttribute(AttributeName = "doOpen")]
  223. public string DoOpen { get; set; }
  224. [XmlAttribute(AttributeName = "doClose")]
  225. public string DoClose { get; set; }
  226. [XmlAttribute(AttributeName = "scRootPath")]
  227. public string ScRootPath { get; set; }
  228. }
  229. [XmlRoot(ElementName = "IoShutters")]
  230. public class IoShutters
  231. {
  232. [XmlElement(ElementName = "IoShutter")]
  233. public List<IoShutterConfig> IoShutter { get; set; }
  234. [XmlAttribute(AttributeName = "classType")]
  235. public string ClassType { get; set; }
  236. [XmlAttribute(AttributeName = "assembly")]
  237. public string Assembly { get; set; }
  238. }
  239. [XmlRoot(ElementName = "IoBufferMotor")]
  240. public class IoBufferMotorConfig
  241. {
  242. [XmlAttribute(AttributeName = "id")]
  243. public string DeviceName { get; set; }
  244. [XmlAttribute(AttributeName = "display")]
  245. public string Display { get; set; }
  246. [XmlAttribute(AttributeName = "schematicId")]
  247. public string SchematicId { get; set; }
  248. [XmlAttribute(AttributeName = "unit")]
  249. public string Unit { get; set; }
  250. [XmlAttribute(AttributeName = "module")]
  251. public string Module { get; set; }
  252. [XmlAttribute(AttributeName = "aiRealPosition")]
  253. public string AiRealPosition { get; set; }
  254. [XmlAttribute(AttributeName = "aiRealSpeed")]
  255. public string AiRealSpeed { get; set; }
  256. [XmlAttribute(AttributeName = "aiRealTorque")]
  257. public string AiRealTorque { get; set; }
  258. [XmlAttribute(AttributeName = "aiTargetPosFb")]
  259. public string AiTargetPosFb { get; set; }
  260. [XmlAttribute(AttributeName = "aiDriverErrorCode")]
  261. public string AiDriverErrorCode { get; set; }
  262. [XmlAttribute(AttributeName = "aiMotionErrorCode")]
  263. public string AiMotionErrorCode { get; set; }
  264. [XmlAttribute(AttributeName = "aoTargetPosition")]
  265. public string AoTargetPosition { get; set; }
  266. [XmlAttribute(AttributeName = "aoSpeed")]
  267. public string AoSpeed { get; set; }
  268. [XmlAttribute(AttributeName = "aoAcc")]
  269. public string AoAcc { get; set; }
  270. [XmlAttribute(AttributeName = "aoDec")]
  271. public string AoDec { get; set; }
  272. [XmlAttribute(AttributeName = "diMoving")]
  273. public string DiMoving { get; set; }
  274. [XmlAttribute(AttributeName = "diSensor1")]
  275. public string DiSensor1 { get; set; }
  276. [XmlAttribute(AttributeName = "diSensor2")]
  277. public string DiSensor2 { get; set; }
  278. [XmlAttribute(AttributeName = "diSensor3")]
  279. public string DiSensor3 { get; set; }
  280. [XmlAttribute(AttributeName = "diSensor4")]
  281. public string DiSensor4 { get; set; }
  282. [XmlAttribute(AttributeName = "diSensor5")]
  283. public string DiSensor5 { get; set; }
  284. [XmlAttribute(AttributeName = "diSensor6")]
  285. public string DiSensor6 { get; set; }
  286. [XmlAttribute(AttributeName = "diSensor7")]
  287. public string DiSensor7 { get; set; }
  288. [XmlAttribute(AttributeName = "diSensor8")]
  289. public string DiSensor8 { get; set; }
  290. [XmlAttribute(AttributeName = "diWarning")]
  291. public string DiWarning { get; set; }
  292. [XmlAttribute(AttributeName = "diAlarm")]
  293. public string DiAlarm { get; set; }
  294. [XmlAttribute(AttributeName = "diPositionA1")]
  295. public string DiPositionA1 { get; set; }
  296. [XmlAttribute(AttributeName = "diPositionB1")]
  297. public string DiPositionB1 { get; set; }
  298. [XmlAttribute(AttributeName = "diPositionC1")]
  299. public string DiPositionC1 { get; set; }
  300. [XmlAttribute(AttributeName = "diPositionD1")]
  301. public string DiPositionD1 { get; set; }
  302. [XmlAttribute(AttributeName = "diPositionA2")]
  303. public string DiPositionA2 { get; set; }
  304. [XmlAttribute(AttributeName = "diPositionB2")]
  305. public string DiPositionB2 { get; set; }
  306. [XmlAttribute(AttributeName = "diPositionC2")]
  307. public string DiPositionC2 { get; set; }
  308. [XmlAttribute(AttributeName = "diPositionD2")]
  309. public string DiPositionD2 { get; set; }
  310. [XmlAttribute(AttributeName = "diPositionA3")]
  311. public string DiPositionA3 { get; set; }
  312. [XmlAttribute(AttributeName = "diPositionB3")]
  313. public string DiPositionB3 { get; set; }
  314. [XmlAttribute(AttributeName = "diPositionC3")]
  315. public string DiPositionC3 { get; set; }
  316. [XmlAttribute(AttributeName = "diPositionD3")]
  317. public string DiPositionD3 { get; set; }
  318. [XmlAttribute(AttributeName = "diPositionA4")]
  319. public string DiPositionA4 { get; set; }
  320. [XmlAttribute(AttributeName = "diPositionB4")]
  321. public string DiPositionB4 { get; set; }
  322. [XmlAttribute(AttributeName = "diPositionC4")]
  323. public string DiPositionC4 { get; set; }
  324. [XmlAttribute(AttributeName = "diPositionD4")]
  325. public string DiPositionD4 { get; set; }
  326. [XmlAttribute(AttributeName = "doServoOn")]
  327. public string DoServoOn { get; set; }
  328. [XmlAttribute(AttributeName = "doStop")]
  329. public string DoStop { get; set; }
  330. [XmlAttribute(AttributeName = "doMove")]
  331. public string DoMove { get; set; }
  332. [XmlAttribute(AttributeName = "doReset")]
  333. public string DoReset { get; set; }
  334. [XmlAttribute(AttributeName = "aioType")]
  335. public string AioType { get; set; }
  336. [XmlAttribute(AttributeName = "scRootPath")]
  337. public string ScRootPath { get; set; }
  338. }
  339. [XmlRoot(ElementName = "IoBufferMotors")]
  340. public class IoBufferMotors
  341. {
  342. [XmlElement(ElementName = "IoBufferMotor")]
  343. public IoBufferMotorConfig IoBufferMotor { get; set; }
  344. [XmlAttribute(AttributeName = "classType")]
  345. public string ClassType { get; set; }
  346. [XmlAttribute(AttributeName = "assembly")]
  347. public string Assembly { get; set; }
  348. }
  349. [XmlRoot(ElementName = "IoFurnaceMotor")]
  350. public class IoFurnaceMotorConfig
  351. {
  352. [XmlAttribute(AttributeName = "id")]
  353. public string DeviceName { get; set; }
  354. [XmlAttribute(AttributeName = "display")]
  355. public string Display { get; set; }
  356. [XmlAttribute(AttributeName = "schematicId")]
  357. public string SchematicId { get; set; }
  358. [XmlAttribute(AttributeName = "unit")]
  359. public string Unit { get; set; }
  360. [XmlAttribute(AttributeName = "module")]
  361. public string Module { get; set; }
  362. [XmlAttribute(AttributeName = "aiRealPosition")]
  363. public string AiRealPosition { get; set; }
  364. [XmlAttribute(AttributeName = "aiRealSpeed")]
  365. public string AiRealSpeed { get; set; }
  366. [XmlAttribute(AttributeName = "aiTargetPosFb")]
  367. public string AiTargetPosFb { get; set; }
  368. [XmlAttribute(AttributeName = "aiDriverErrorCode")]
  369. public string AiDriverErrorCode { get; set; }
  370. [XmlAttribute(AttributeName = "aiMotionErrorCode")]
  371. public string AiMotionErrorCode { get; set; }
  372. [XmlAttribute(AttributeName = "aoTargetPosition")]
  373. public string AoTargetPosition { get; set; }
  374. [XmlAttribute(AttributeName = "aoTargetSpeed")]
  375. public string AoTargetSpeed { get; set; }
  376. [XmlAttribute(AttributeName = "aoAcc")]
  377. public string AoAcc { get; set; }
  378. [XmlAttribute(AttributeName = "aoDec")]
  379. public string AoDec { get; set; }
  380. [XmlAttribute(AttributeName = "diMotorAlarm")]
  381. public string DiMotorAlarm { get; set; }
  382. [XmlAttribute(AttributeName = "diMove")]
  383. public string DiMove { get; set; }
  384. [XmlAttribute(AttributeName = "diPowerOn")]
  385. public string DiPowerOn { get; set; }
  386. [XmlAttribute(AttributeName = "diPowerOnError")]
  387. public string DiPowerOnError { get; set; }
  388. [XmlAttribute(AttributeName = "diStop")]
  389. public string DiStop { get; set; }
  390. [XmlAttribute(AttributeName = "diStopError")]
  391. public string DiStopError { get; set; }
  392. [XmlAttribute(AttributeName = "diHomeDone")]
  393. public string DiHomeDone { get; set; }
  394. [XmlAttribute(AttributeName = "diAlignDone")]
  395. public string DiAlignDone { get; set; }
  396. [XmlAttribute(AttributeName = "diHoming")]
  397. public string DiHoming { get; set; }
  398. [XmlAttribute(AttributeName = "diHomeError")]
  399. public string DiHomeError { get; set; }
  400. [XmlAttribute(AttributeName = "diMoving")]
  401. public string DiMoving { get; set; }
  402. [XmlAttribute(AttributeName = "diMoveError")]
  403. public string DiMoveError { get; set; }
  404. [XmlAttribute(AttributeName = "diHomePosition")]
  405. public string DiHomePosition { get; set; }
  406. [XmlAttribute(AttributeName = "diNegativeLimit")]
  407. public string DiNegativeLimit { get; set; }
  408. [XmlAttribute(AttributeName = "diPositiveLimit")]
  409. public string DiPositiveLimit { get; set; }
  410. [XmlAttribute(AttributeName = "diConveyRelaxAlarm")]
  411. public string DiConveyRelaxAlarm { get; set; }
  412. [XmlAttribute(AttributeName = "diReadyToSwitchOn")]
  413. public string DiReadyToSwitchOn { get; set; }
  414. [XmlAttribute(AttributeName = "diSwitchOn")]
  415. public string DiSwitchOn { get; set; }
  416. [XmlAttribute(AttributeName = "diWarning")]
  417. public string DiWarning { get; set; }
  418. [XmlAttribute(AttributeName = "diAlarm")]
  419. public string DiAlarm { get; set; }
  420. [XmlAttribute(AttributeName = "diPosition1")]
  421. public string DiPosition1 { get; set; }
  422. [XmlAttribute(AttributeName = "diPosition2")]
  423. public string DiPosition2 { get; set; }
  424. [XmlAttribute(AttributeName = "diPosition3")]
  425. public string DiPosition3 { get; set; }
  426. [XmlAttribute(AttributeName = "diUpPosition")]
  427. public string DiUpPosition { get; set; }
  428. [XmlAttribute(AttributeName = "diDownPosition")]
  429. public string DiDownPosition { get; set; }
  430. [XmlAttribute(AttributeName = "doStop")]
  431. public string DoStop { get; set; }
  432. [XmlAttribute(AttributeName = "doHome")]
  433. public string DoHome { get; set; }
  434. [XmlAttribute(AttributeName = "doMove")]
  435. public string DoMove { get; set; }
  436. [XmlAttribute(AttributeName = "doReset")]
  437. public string DoReset { get; set; }
  438. [XmlAttribute(AttributeName = "doServoOn")]
  439. public string DoServoOn { get; set; }
  440. [XmlAttribute(AttributeName = "doInTransfer")]
  441. public string DoInTransfer { get; set; }
  442. [XmlAttribute(AttributeName = "doTransferComplete")]
  443. public string DoTransferComplete { get; set; }
  444. [XmlAttribute(AttributeName = "doStepperDriverStart")]
  445. public string DoStepperDriverStart { get; set; }
  446. [XmlAttribute(AttributeName = "doStepperDriverAllWindingsOff")]
  447. public string DoStepperDriverAllWindingsOff { get; set; }
  448. [XmlAttribute(AttributeName = "doStepperDriverDataSelectionM0")]
  449. public string DoStepperDriverDataSelectionM0 { get; set; }
  450. [XmlAttribute(AttributeName = "doStepperDriverDataSelectionM1")]
  451. public string DoStepperDriverDataSelectionM1 { get; set; }
  452. [XmlAttribute(AttributeName = "doStepperDriverDataSelectionM2")]
  453. public string DoStepperDriverDataSelectionM2 { get; set; }
  454. [XmlAttribute(AttributeName = "doStepperDriverDataSelectionM3")]
  455. public string DoStepperDriverDataSelectionM3 { get; set; }
  456. [XmlAttribute(AttributeName = "doStepperDriverDataSelectionM4")]
  457. public string DoStepperDriverDataSelectionM4 { get; set; }
  458. [XmlAttribute(AttributeName = "doStepperDriverDataSelectionM5")]
  459. public string DoStepperDriverDataSelectionM5 { get; set; }
  460. [XmlAttribute(AttributeName = "doStepperDriverHomeOrPosPrerst")]
  461. public string DoStepperDriverHomeOrPosPrerst { get; set; }
  462. [XmlAttribute(AttributeName = "doCW")]
  463. public string DoCW { get; set; }
  464. [XmlAttribute(AttributeName = "doCCW")]
  465. public string DoCCW { get; set; }
  466. [XmlAttribute(AttributeName = "aioType")]
  467. public string AioType { get; set; }
  468. [XmlAttribute(AttributeName = "scRootPath")]
  469. public string ScRootPath { get; set; }
  470. [XmlAttribute(AttributeName = "aiPowerErrorCode")]
  471. public string AiPowerErrorCode { get; set; }
  472. [XmlAttribute(AttributeName = "aiStopErrorCode")]
  473. public string AiStopErrorCode { get; set; }
  474. [XmlAttribute(AttributeName = "aiHomeErrorCode")]
  475. public string AiHomeErrorCode { get; set; }
  476. [XmlAttribute(AttributeName = "aiMoveAbsErrorCode")]
  477. public string AiMoveAbsErrorCode { get; set; }
  478. [XmlAttribute(AttributeName = "aiJogErrorCode")]
  479. public string AiJogErrorCode { get; set; }
  480. [XmlAttribute(AttributeName = "aiResetErrorCode")]
  481. public string AiResetErrorCode { get; set; }
  482. [XmlAttribute(AttributeName = "aiErrorCode")]
  483. public string AiErrorCode { get; set; }
  484. [XmlAttribute(AttributeName = "diInitializing")]
  485. public string DiInitializing { get; set; }
  486. [XmlAttribute(AttributeName = "diInitDone")]
  487. public string DiInitDone { get; set; }
  488. [XmlAttribute(AttributeName = "diStepperMotorInWorkPosition")]
  489. public string DiStepperMotorInWorkPosition { get; set; }
  490. [XmlAttribute(AttributeName = "diStepperMotorMoving")]
  491. public string DiStepperMotorMoving { get; set; }
  492. [XmlAttribute(AttributeName = "diStepperMotorAlarm")]
  493. public string DiStepperMotorAlarm { get; set; }
  494. [XmlAttribute(AttributeName = "diStepperMotorInArea")]
  495. public string DiStepperMotorInArea { get; set; }
  496. [XmlAttribute(AttributeName = "diStepperMotorInReady")]
  497. public string DiStepperMotorInReady { get; set; }
  498. [XmlAttribute(AttributeName = "diStepperMotorInHomePosition")]
  499. public string DiStepperMotorInHomePosition { get; set; }
  500. [XmlAttribute(AttributeName = "doInit")]
  501. public string DoInit { get; set; }
  502. [XmlAttribute(AttributeName = "doM0")]
  503. public string DoM0 { get; set; }
  504. [XmlAttribute(AttributeName = "doM1")]
  505. public string DoM1 { get; set; }
  506. [XmlAttribute(AttributeName = "doM2")]
  507. public string DoM2 { get; set; }
  508. [XmlAttribute(AttributeName = "doM3")]
  509. public string DoM3 { get; set; }
  510. [XmlAttribute(AttributeName = "doM4")]
  511. public string DoM4 { get; set; }
  512. [XmlAttribute(AttributeName = "doM5")]
  513. public string DoM5 { get; set; }
  514. }
  515. [XmlRoot(ElementName = "IoFurnaceMotors")]
  516. public class IoFurnaceMotors
  517. {
  518. [XmlElement(ElementName = "IoFurnaceMotor")]
  519. public List<IoFurnaceMotorConfig> IoFurnaceMotor { get; set; }
  520. [XmlAttribute(AttributeName = "classType")]
  521. public string ClassType { get; set; }
  522. [XmlAttribute(AttributeName = "assembly")]
  523. public string Assembly { get; set; }
  524. }
  525. [XmlRoot(ElementName = "IoWaferRobot")]
  526. public class IoWaferRobotConfig
  527. {
  528. [XmlAttribute(AttributeName = "id")]
  529. public string DeviceName { get; set; }
  530. [XmlAttribute(AttributeName = "display")]
  531. public string Display { get; set; }
  532. [XmlAttribute(AttributeName = "schematicId")]
  533. public string SchematicId { get; set; }
  534. [XmlAttribute(AttributeName = "unit")]
  535. public string Unit { get; set; }
  536. [XmlAttribute(AttributeName = "diInFIMS1")]
  537. public string DiInFIMS1 { get; set; }
  538. [XmlAttribute(AttributeName = "diInFIMS2")]
  539. public string DiInFIMS2 { get; set; }
  540. [XmlAttribute(AttributeName = "diInBoatRotate")]
  541. public string DiInBoatRotate { get; set; }
  542. [XmlAttribute(AttributeName = "diInBoatBottom")]
  543. public string DiInBoatBottom { get; set; }
  544. [XmlAttribute(AttributeName = "diFIMS1WaferOnRobot")]
  545. public string DiFIMS1WaferOnRobot { get; set; }
  546. [XmlAttribute(AttributeName = "diFIMS2WaferOnRobot")]
  547. public string DiFIMS2WaferOnRobot { get; set; }
  548. [XmlAttribute(AttributeName = "diTPEmo")]
  549. public string DiTPEmo { get; set; }
  550. [XmlAttribute(AttributeName = "diServoOn")]
  551. public string DiServoOn { get; set; }
  552. [XmlAttribute(AttributeName = "diTPStatus")]
  553. public string DiTPStatus { get; set; }
  554. [XmlAttribute(AttributeName = "diRobotPowerOn")]
  555. public string DiRobotPowerOn { get; set; }
  556. [XmlAttribute(AttributeName = "diAlarm")]
  557. public string DiAlarm { get; set; }
  558. [XmlAttribute(AttributeName = "diBlade1WaferPresent")]
  559. public string DiBlade1WaferPresent { get; set; }
  560. [XmlAttribute(AttributeName = "diBlade2WaferPresent")]
  561. public string DiBlade2WaferPresent { get; set; }
  562. [XmlAttribute(AttributeName = "diBlade3WaferPresent")]
  563. public string DiBlade3WaferPresent { get; set; }
  564. [XmlAttribute(AttributeName = "diBlade4WaferPresent")]
  565. public string DiBlade4WaferPresent { get; set; }
  566. [XmlAttribute(AttributeName = "diBlade5WaferPresent")]
  567. public string DiBlade5WaferPresent { get; set; }
  568. [XmlAttribute(AttributeName = "diZAxisHomePosition")]
  569. public string DiZAxisHomePosition { get; set; }
  570. [XmlAttribute(AttributeName = "diYAxisHomePosition")]
  571. public string DiYAxisHomePosition { get; set; }
  572. [XmlAttribute(AttributeName = "diVAxisHomePosition")]
  573. public string DiVAxisHomePosition { get; set; }
  574. [XmlAttribute(AttributeName = "diRunning")]
  575. public string DiRunning { get; set; }
  576. [XmlAttribute(AttributeName = "doAlarmReset")]
  577. public string DoAlarmReset { get; set; }
  578. [XmlAttribute(AttributeName = "doActionHold")]
  579. public string DoActionHold { get; set; }
  580. [XmlAttribute(AttributeName = "doTPEnable")]
  581. public string DoTPEnable { get; set; }
  582. [XmlAttribute(AttributeName = "doFIMS1Interlock")]
  583. public string DoFIMS1Interlock { get; set; }
  584. [XmlAttribute(AttributeName = "doFIMS2Interlock")]
  585. public string DoFIMS2Interlock { get; set; }
  586. [XmlAttribute(AttributeName = "doBoatRotateInterlock")]
  587. public string DoBoatRotateInterlock { get; set; }
  588. [XmlAttribute(AttributeName = "doBoatBottomInterlock")]
  589. public string DoBoatBottomInterlock { get; set; }
  590. [XmlAttribute(AttributeName = "scRootPath")]
  591. public string ScRootPath { get; set; }
  592. }
  593. [XmlRoot(ElementName = "IoWaferRobots")]
  594. public class IoWaferRobots
  595. {
  596. [XmlElement(ElementName = "IoWaferRobot")]
  597. public IoWaferRobotConfig IoWaferRobot { get; set; }
  598. [XmlAttribute(AttributeName = "classType")]
  599. public string ClassType { get; set; }
  600. [XmlAttribute(AttributeName = "assembly")]
  601. public string Assembly { get; set; }
  602. }
  603. [XmlRoot(ElementName = "IoCarrierRobot")]
  604. public class IoCarrierRobotConfig
  605. {
  606. [XmlAttribute(AttributeName = "id")]
  607. public string DeviceName { get; set; }
  608. [XmlAttribute(AttributeName = "display")]
  609. public string Display { get; set; }
  610. [XmlAttribute(AttributeName = "schematicId")]
  611. public string SchematicId { get; set; }
  612. [XmlAttribute(AttributeName = "unit")]
  613. public string Unit { get; set; }
  614. [XmlAttribute(AttributeName = "diInFIMS1")]
  615. public string DiInFIMS1 { get; set; }
  616. [XmlAttribute(AttributeName = "diInFIMS2")]
  617. public string DiInFIMS2 { get; set; }
  618. [XmlAttribute(AttributeName = "diInStockerLayer1")]
  619. public string DiInStockerLayer1 { get; set; }
  620. [XmlAttribute(AttributeName = "diInStockerLayer2")]
  621. public string DiInStockerLayer2 { get; set; }
  622. [XmlAttribute(AttributeName = "diInStockerLayer3")]
  623. public string DiInStockerLayer3 { get; set; }
  624. [XmlAttribute(AttributeName = "diInStockerLayer4")]
  625. public string DiInStockerLayer4 { get; set; }
  626. [XmlAttribute(AttributeName = "diTPEmo")]
  627. public string DiTPEmo { get; set; }
  628. [XmlAttribute(AttributeName = "diServoOn")]
  629. public string DiServoOn { get; set; }
  630. [XmlAttribute(AttributeName = "diTPStatus")]
  631. public string DiTPStatus { get; set; }
  632. [XmlAttribute(AttributeName = "diRobotPowerOn")]
  633. public string DiRobotPowerOn { get; set; }
  634. [XmlAttribute(AttributeName = "diAlarm")]
  635. public string DiAlarm { get; set; }
  636. [XmlAttribute(AttributeName = "diBlade1WaferPresent")]
  637. public string DiBlade1WaferPresent { get; set; }
  638. [XmlAttribute(AttributeName = "diZAxisHomePosition")]
  639. public string DiZAxisHomePosition { get; set; }
  640. [XmlAttribute(AttributeName = "diYAxisHomePosition")]
  641. public string DiYAxisHomePosition { get; set; }
  642. [XmlAttribute(AttributeName = "diRAxisHomePosition")]
  643. public string DiRAxisHomePosition { get; set; }
  644. [XmlAttribute(AttributeName = "diRunning")]
  645. public string DiRunning { get; set; }
  646. [XmlAttribute(AttributeName = "doAlarmReset")]
  647. public string DoAlarmReset { get; set; }
  648. [XmlAttribute(AttributeName = "doActionHold")]
  649. public string DoActionHold { get; set; }
  650. [XmlAttribute(AttributeName = "doTPEnable")]
  651. public string DoTPEnable { get; set; }
  652. [XmlAttribute(AttributeName = "doFIMS1Interlock")]
  653. public string DoFIMS1Interlock { get; set; }
  654. [XmlAttribute(AttributeName = "doFIMS2Interlock")]
  655. public string DoFIMS2Interlock { get; set; }
  656. [XmlAttribute(AttributeName = "doStockerInterlock")]
  657. public string DoStockerInterlock { get; set; }
  658. [XmlAttribute(AttributeName = "scRootPath")]
  659. public string ScRootPath { get; set; }
  660. }
  661. [XmlRoot(ElementName = "IoCarrierRobots")]
  662. public class IoCarrierRobots
  663. {
  664. [XmlElement(ElementName = "IoCarrierRobot")]
  665. public IoCarrierRobotConfig IoCarrierRobot { get; set; }
  666. [XmlAttribute(AttributeName = "classType")]
  667. public string ClassType { get; set; }
  668. [XmlAttribute(AttributeName = "assembly")]
  669. public string Assembly { get; set; }
  670. }
  671. [XmlRoot(ElementName = "IoRF")]
  672. public class IoRFConfig
  673. {
  674. [XmlAttribute(AttributeName = "id")]
  675. public string DeviceName { get; set; }
  676. [XmlAttribute(AttributeName = "display")]
  677. public string Display { get; set; }
  678. [XmlAttribute(AttributeName = "schematicId")]
  679. public string SchematicId { get; set; }
  680. [XmlAttribute(AttributeName = "unit")]
  681. public string Unit { get; set; }
  682. [XmlAttribute(AttributeName = "aiRelfectionPower")]
  683. public string AiRelfectionPower { get; set; }
  684. [XmlAttribute(AttributeName = "aiForwardPower")]
  685. public string AiForwardPower { get; set; }
  686. [XmlAttribute(AttributeName = "diPowerReached")]
  687. public string DiPowerReached { get; set; }
  688. [XmlAttribute(AttributeName = "diAlarm")]
  689. public string DiAlarm { get; set; }
  690. [XmlAttribute(AttributeName = "diRFOnStatus")]
  691. public string DiRFOnStatus { get; set; }
  692. [XmlAttribute(AttributeName = "doReset")]
  693. public string DoReset { get; set; }
  694. [XmlAttribute(AttributeName = "doOnOff")]
  695. public string DoOnOff { get; set; }
  696. [XmlAttribute(AttributeName = "doManualAnalog")]
  697. public string DoManualAnalog { get; set; }
  698. [XmlAttribute(AttributeName = "aoPower")]
  699. public string AoPower { get; set; }
  700. [XmlAttribute(AttributeName = "scRootPath")]
  701. public string ScRootPath { get; set; }
  702. }
  703. [XmlRoot(ElementName = "IoRFs")]
  704. public class IoRFs
  705. {
  706. [XmlElement(ElementName = "IoRF")]
  707. public IoRFConfig IoRF { get; set; }
  708. [XmlAttribute(AttributeName = "classType")]
  709. public string ClassType { get; set; }
  710. [XmlAttribute(AttributeName = "assembly")]
  711. public string Assembly { get; set; }
  712. }
  713. [XmlRoot(ElementName = "IoRFMatch")]
  714. public class IoRFMatchConfig
  715. {
  716. [XmlAttribute(AttributeName = "id")]
  717. public string DeviceName { get; set; }
  718. [XmlAttribute(AttributeName = "display")]
  719. public string Display { get; set; }
  720. [XmlAttribute(AttributeName = "schematicId")]
  721. public string SchematicId { get; set; }
  722. [XmlAttribute(AttributeName = "unit")]
  723. public string Unit { get; set; }
  724. [XmlAttribute(AttributeName = "aiVpp")]
  725. public string AiVpp { get; set; }
  726. [XmlAttribute(AttributeName = "aiVdc")]
  727. public string AiVdc { get; set; }
  728. [XmlAttribute(AttributeName = "aiLoadPosition")]
  729. public string AiLoadPosition { get; set; }
  730. [XmlAttribute(AttributeName = "aiPhase")]
  731. public string AiPhase { get; set; }
  732. [XmlAttribute(AttributeName = "doPresetMemory")]
  733. public string DoPresetMemory { get; set; }
  734. [XmlAttribute(AttributeName = "doPresetStart")]
  735. public string DoPresetStart { get; set; }
  736. [XmlAttribute(AttributeName = "doPresetCH0")]
  737. public string DoPresetCH0 { get; set; }
  738. [XmlAttribute(AttributeName = "doPresetCH1")]
  739. public string DoPresetCH1 { get; set; }
  740. [XmlAttribute(AttributeName = "doPresetCH2")]
  741. public string DoPresetCH2 { get; set; }
  742. [XmlAttribute(AttributeName = "doPresetCH3")]
  743. public string DoPresetCH3 { get; set; }
  744. [XmlAttribute(AttributeName = "doSafty")]
  745. public string DoSafty { get; set; }
  746. [XmlAttribute(AttributeName = "aoLoadPosition")]
  747. public string AoLoadPosition { get; set; }
  748. [XmlAttribute(AttributeName = "aoPhase")]
  749. public string AoPhase { get; set; }
  750. [XmlAttribute(AttributeName = "scRootPath")]
  751. public string ScRootPath { get; set; }
  752. }
  753. [XmlRoot(ElementName = "IoRFMatchs")]
  754. public class IoRFMatchs
  755. {
  756. [XmlElement(ElementName = "IoRFMatch")]
  757. public IoRFMatchConfig IoRFMatch { get; set; }
  758. [XmlAttribute(AttributeName = "classType")]
  759. public string ClassType { get; set; }
  760. [XmlAttribute(AttributeName = "assembly")]
  761. public string Assembly { get; set; }
  762. }
  763. [XmlRoot(ElementName = "IoAPC")]
  764. public class IoAPCConfig
  765. {
  766. [XmlAttribute(AttributeName = "id")]
  767. public string DeviceName { get; set; }
  768. [XmlAttribute(AttributeName = "display")]
  769. public string Display { get; set; }
  770. [XmlAttribute(AttributeName = "schematicId")]
  771. public string SchematicId { get; set; }
  772. [XmlAttribute(AttributeName = "unit")]
  773. public string Unit { get; set; }
  774. [XmlAttribute(AttributeName = "aiValueSensorInput1")]
  775. public string AiValueSensorInput1 { get; set; }
  776. [XmlAttribute(AttributeName = "aiValueSensorInput2")]
  777. public string AiValueSensorInput2 { get; set; }
  778. [XmlAttribute(AttributeName = "aiSelectController")]
  779. public string AiSelectController { get; set; }
  780. [XmlAttribute(AttributeName = "aiPositionActualValue")]
  781. public string AiPositionActualValue { get; set; }
  782. [XmlAttribute(AttributeName = "aiControlModeStatus")]
  783. public string AiControlModeStatus { get; set; }
  784. [XmlAttribute(AttributeName = "aiHomeStatus")]
  785. public string AiHomeStatus { get; set; }
  786. [XmlAttribute(AttributeName = "aiWarningStatus1")]
  787. public string AiWarningStatus1 { get; set; }
  788. [XmlAttribute(AttributeName = "aiWarningStatus2")]
  789. public string AiWarningStatus2 { get; set; }
  790. [XmlAttribute(AttributeName = "aiWarningStatus3")]
  791. public string AiWarningStatus3 { get; set; }
  792. [XmlAttribute(AttributeName = "aiWarningStatus4")]
  793. public string AiWarningStatus4 { get; set; }
  794. [XmlAttribute(AttributeName = "aiWarningStatus5")]
  795. public string AiWarningStatus5 { get; set; }
  796. [XmlAttribute(AttributeName = "aiWarningStatus6")]
  797. public string AiWarningStatus6 { get; set; }
  798. [XmlAttribute(AttributeName = "aiErrorStatus1")]
  799. public string AiErrorStatus1 { get; set; }
  800. [XmlAttribute(AttributeName = "aiErrorStatus2")]
  801. public string AiErrorStatus2 { get; set; }
  802. [XmlAttribute(AttributeName = "aiErrorStatus3")]
  803. public string AiErrorStatus3 { get; set; }
  804. [XmlAttribute(AttributeName = "aiErrorStatus4")]
  805. public string AiErrorStatus4 { get; set; }
  806. [XmlAttribute(AttributeName = "aiValveStatusThreshold")]
  807. public string AiValveStatusThreshold { get; set; }
  808. [XmlAttribute(AttributeName = "aiSlowVacuumModeSetting")]
  809. public string AiSlowVacuumModeSetting { get; set; }
  810. [XmlAttribute(AttributeName = "aiInterlock1")]
  811. public string AiInterlock1 { get; set; }
  812. [XmlAttribute(AttributeName = "aiInterlock2")]
  813. public string AiInterlock2 { get; set; }
  814. [XmlAttribute(AttributeName = "aiInterlock3")]
  815. public string AiInterlock3 { get; set; }
  816. [XmlAttribute(AttributeName = "aiInterlockConstantOfInterlock3")]
  817. public string AiInterlockConstantOfInterlock3 { get; set; }
  818. [XmlAttribute(AttributeName = "aiP1SensorOffsetSetting")]
  819. public string AiP1SensorOffsetSetting { get; set; }
  820. [XmlAttribute(AttributeName = "aiPosMonOffsetSetting")]
  821. public string AiPosMonOffsetSetting { get; set; }
  822. [XmlAttribute(AttributeName = "diP1ZeroOffsetOutRangeAlm")]
  823. public string DiP1ZeroOffsetOutRangeAlm { get; set; }
  824. [XmlAttribute(AttributeName = "diP1ZeroAdjOutRangeAlm")]
  825. public string DiP1ZeroAdjOutRangeAlm { get; set; }
  826. [XmlAttribute(AttributeName = "diP1SpanAdjOutRangeAlm")]
  827. public string DiP1SpanAdjOutRangeAlm { get; set; }
  828. [XmlAttribute(AttributeName = "diP2ZeroOffsetOutRangeAlm")]
  829. public string DiP2ZeroOffsetOutRangeAlm { get; set; }
  830. [XmlAttribute(AttributeName = "diP2ZeroAdjOutRangeAlm")]
  831. public string DiP2ZeroAdjOutRangeAlm { get; set; }
  832. [XmlAttribute(AttributeName = "diP2SpanAdjOutRangeAlm")]
  833. public string DiP2SpanAdjOutRangeAlm { get; set; }
  834. [XmlAttribute(AttributeName = "diP1PressCtrlInterlockAlm")]
  835. public string DiP1PressCtrlInterlockAlm { get; set; }
  836. [XmlAttribute(AttributeName = "diP2PressCtrlInterlockAlm")]
  837. public string DiP2PressCtrlInterlockAlm { get; set; }
  838. [XmlAttribute(AttributeName = "diValveOpenCtrlInterlockAlm")]
  839. public string DiValveOpenCtrlInterlockAlm { get; set; }
  840. [XmlAttribute(AttributeName = "diValveHoldCtrlInterlockAlm")]
  841. public string DiValveHoldCtrlInterlockAlm { get; set; }
  842. [XmlAttribute(AttributeName = "diValveCloseInterlockAlm")]
  843. public string DiValveCloseInterlockAlm { get; set; }
  844. [XmlAttribute(AttributeName = "diAutoTeachingInterlockAlm")]
  845. public string DiAutoTeachingInterlockAlm { get; set; }
  846. [XmlAttribute(AttributeName = "diP1DisconnectionAlm")]
  847. public string DiP1DisconnectionAlm { get; set; }
  848. [XmlAttribute(AttributeName = "diP2DisconnectionAlm")]
  849. public string DiP2DisconnectionAlm { get; set; }
  850. [XmlAttribute(AttributeName = "diPumpStopInterlockAlm")]
  851. public string DiPumpStopInterlockAlm { get; set; }
  852. [XmlAttribute(AttributeName = "diAutoTeachingErr1Alm")]
  853. public string DiAutoTeachingErr1Alm { get; set; }
  854. [XmlAttribute(AttributeName = "diAutoTeachingErr2Alm")]
  855. public string DiAutoTeachingErr2Alm { get; set; }
  856. [XmlAttribute(AttributeName = "doValve")]
  857. public string DoValve { get; set; }
  858. [XmlAttribute(AttributeName = "doVGUnit")]
  859. public string DoVGUnit { get; set; }
  860. [XmlAttribute(AttributeName = "doAoDataReadSysConfig")]
  861. public string DoAoDataReadSysConfig { get; set; }
  862. [XmlAttribute(AttributeName = "doAoDataWriteSysConfig")]
  863. public string DoAoDataWriteSysConfig { get; set; }
  864. [XmlAttribute(AttributeName = "doAoDataReadCusConfig")]
  865. public string DoAoDataReadCusConfig { get; set; }
  866. [XmlAttribute(AttributeName = "doAoDataWriteCusConfig")]
  867. public string DoAoDataWriteCusConfig { get; set; }
  868. [XmlAttribute(AttributeName = "aoZeroResetP1")]
  869. public string AoZeroResetP1 { get; set; }
  870. [XmlAttribute(AttributeName = "aoZeroAdjustP1")]
  871. public string AoZeroAdjustP1 { get; set; }
  872. [XmlAttribute(AttributeName = "aoSpanAdjustP1")]
  873. public string AoSpanAdjustP1 { get; set; }
  874. [XmlAttribute(AttributeName = "aoZeroResetP2")]
  875. public string AoZeroResetP2 { get; set; }
  876. [XmlAttribute(AttributeName = "aoZeroAdjustP2")]
  877. public string AoZeroAdjustP2 { get; set; }
  878. [XmlAttribute(AttributeName = "aoSpanAdjustP2")]
  879. public string AoSpanAdjustP2 { get; set; }
  880. [XmlAttribute(AttributeName = "aoSlowVacuumTargetPressure")]
  881. public string AoSlowVacuumTargetPressure { get; set; }
  882. [XmlAttribute(AttributeName = "aoValveStatusThreshold")]
  883. public string AoValveStatusThreshold { get; set; }
  884. [XmlAttribute(AttributeName = "aoForbidInterlockOutbreak")]
  885. public string AoForbidInterlockOutbreak { get; set; }
  886. [XmlAttribute(AttributeName = "aoSlowVacuumModeSetting")]
  887. public string AoSlowVacuumModeSetting { get; set; }
  888. [XmlAttribute(AttributeName = "aoInterlock1")]
  889. public string AoInterlock1 { get; set; }
  890. [XmlAttribute(AttributeName = "aoInterlock2")]
  891. public string AoInterlock2 { get; set; }
  892. [XmlAttribute(AttributeName = "aoInterlock3")]
  893. public string AoInterlock3 { get; set; }
  894. [XmlAttribute(AttributeName = "aoInterlockConstantOfInterlock3")]
  895. public string AoInterlockConstantOfInterlock3 { get; set; }
  896. [XmlAttribute(AttributeName = "aoP1SensorOffsetSetting")]
  897. public string AoP1SensorOffsetSetting { get; set; }
  898. [XmlAttribute(AttributeName = "aoPosMonOffsetSetting")]
  899. public string AoPosMonOffsetSetting { get; set; }
  900. [XmlAttribute(AttributeName = "aoSensorAdjustReset")]
  901. public string AoSensorAdjustReset { get; set; }
  902. [XmlAttribute(AttributeName = "aoSlowVacuumRate")]
  903. public string AoSlowVacuumRate { get; set; }
  904. [XmlAttribute(AttributeName = "aoSlowVacuumP")]
  905. public string AoSlowVacuumP { get; set; }
  906. [XmlAttribute(AttributeName = "aoSlowVacuumI")]
  907. public string AoSlowVacuumI { get; set; }
  908. [XmlAttribute(AttributeName = "aoSlowVacuumD")]
  909. public string AoSlowVacuumD { get; set; }
  910. [XmlAttribute(AttributeName = "aoSlowVacuumA")]
  911. public string AoSlowVacuumA { get; set; }
  912. [XmlAttribute(AttributeName = "aoControllerModeSelect")]
  913. public string AoControllerModeSelect { get; set; }
  914. [XmlAttribute(AttributeName = "aoSpecifyTargetVacuumPressureControl")]
  915. public string AoSpecifyTargetVacuumPressureControl { get; set; }
  916. [XmlAttribute(AttributeName = "aoSpecifyTargetOpeningForValveOpeningControl")]
  917. public string AoSpecifyTargetOpeningForValveOpeningControl { get; set; }
  918. [XmlAttribute(AttributeName = "aoSpecifyControlMode")]
  919. public string AoSpecifyControlMode { get; set; }
  920. [XmlAttribute(AttributeName = "aoRangeUpperLimitSensorInput")]
  921. public string AoRangeUpperLimitSensorInput { get; set; }
  922. [XmlAttribute(AttributeName = "aoController1")]
  923. public string AoController1 { get; set; }
  924. [XmlAttribute(AttributeName = "aoController1P")]
  925. public string AoController1P { get; set; }
  926. [XmlAttribute(AttributeName = "aoController1I")]
  927. public string AoController1I { get; set; }
  928. [XmlAttribute(AttributeName = "aoController1D")]
  929. public string AoController1D { get; set; }
  930. [XmlAttribute(AttributeName = "aoController1A")]
  931. public string AoController1A { get; set; }
  932. [XmlAttribute(AttributeName = "aoController1CH")]
  933. public string AoController1CH { get; set; }
  934. [XmlAttribute(AttributeName = "aoController1CL")]
  935. public string AoController1CL { get; set; }
  936. [XmlAttribute(AttributeName = "aoController1Offset")]
  937. public string AoController1Offset { get; set; }
  938. [XmlAttribute(AttributeName = "aoController2")]
  939. public string AoController2 { get; set; }
  940. [XmlAttribute(AttributeName = "aoController2P")]
  941. public string AoController2P { get; set; }
  942. [XmlAttribute(AttributeName = "aoController2I")]
  943. public string AoController2I { get; set; }
  944. [XmlAttribute(AttributeName = "aoController2D")]
  945. public string AoController2D { get; set; }
  946. [XmlAttribute(AttributeName = "aoController2A")]
  947. public string AoController2A { get; set; }
  948. [XmlAttribute(AttributeName = "aoController2CH")]
  949. public string AoController2CH { get; set; }
  950. [XmlAttribute(AttributeName = "aoController2CL")]
  951. public string AoController2CL { get; set; }
  952. [XmlAttribute(AttributeName = "aoController2Offset")]
  953. public string AoController2Offset { get; set; }
  954. [XmlAttribute(AttributeName = "aoController3")]
  955. public string AoController3 { get; set; }
  956. [XmlAttribute(AttributeName = "aoController3P")]
  957. public string AoController3P { get; set; }
  958. [XmlAttribute(AttributeName = "aoController3I")]
  959. public string AoController3I { get; set; }
  960. [XmlAttribute(AttributeName = "aoController3D")]
  961. public string AoController3D { get; set; }
  962. [XmlAttribute(AttributeName = "aoController3A")]
  963. public string AoController3A { get; set; }
  964. [XmlAttribute(AttributeName = "aoController3CH")]
  965. public string AoController3CH { get; set; }
  966. [XmlAttribute(AttributeName = "aoController3CL")]
  967. public string AoController3CL { get; set; }
  968. [XmlAttribute(AttributeName = "aoController3Offset")]
  969. public string AoController3Offset { get; set; }
  970. [XmlAttribute(AttributeName = "aoController4")]
  971. public string AoController4 { get; set; }
  972. [XmlAttribute(AttributeName = "aoController4P")]
  973. public string AoController4P { get; set; }
  974. [XmlAttribute(AttributeName = "aoController4I")]
  975. public string AoController4I { get; set; }
  976. [XmlAttribute(AttributeName = "aoController4D")]
  977. public string AoController4D { get; set; }
  978. [XmlAttribute(AttributeName = "aoController4A")]
  979. public string AoController4A { get; set; }
  980. [XmlAttribute(AttributeName = "aoController4CH")]
  981. public string AoController4CH { get; set; }
  982. [XmlAttribute(AttributeName = "aoController4CL")]
  983. public string AoController4CL { get; set; }
  984. [XmlAttribute(AttributeName = "aoController4Offset")]
  985. public string AoController4Offset { get; set; }
  986. [XmlAttribute(AttributeName = "aoController5")]
  987. public string AoController5 { get; set; }
  988. [XmlAttribute(AttributeName = "aoController5P")]
  989. public string AoController5P { get; set; }
  990. [XmlAttribute(AttributeName = "aoController5I")]
  991. public string AoController5I { get; set; }
  992. [XmlAttribute(AttributeName = "aoController5D")]
  993. public string AoController5D { get; set; }
  994. [XmlAttribute(AttributeName = "aoController5A")]
  995. public string AoController5A { get; set; }
  996. [XmlAttribute(AttributeName = "aoController5CH")]
  997. public string AoController5CH { get; set; }
  998. [XmlAttribute(AttributeName = "aoController5CL")]
  999. public string AoController5CL { get; set; }
  1000. [XmlAttribute(AttributeName = "aoController5Offset")]
  1001. public string AoController5Offset { get; set; }
  1002. [XmlAttribute(AttributeName = "aoController6")]
  1003. public string AoController6 { get; set; }
  1004. [XmlAttribute(AttributeName = "aoController6P")]
  1005. public string AoController6P { get; set; }
  1006. [XmlAttribute(AttributeName = "aoController6I")]
  1007. public string AoController6I { get; set; }
  1008. [XmlAttribute(AttributeName = "aoController6D")]
  1009. public string AoController6D { get; set; }
  1010. [XmlAttribute(AttributeName = "aoController6A")]
  1011. public string AoController6A { get; set; }
  1012. [XmlAttribute(AttributeName = "aoController6CH")]
  1013. public string AoController6CH { get; set; }
  1014. [XmlAttribute(AttributeName = "aoController6CL")]
  1015. public string AoController6CL { get; set; }
  1016. [XmlAttribute(AttributeName = "aoController6Offset")]
  1017. public string AoController6Offset { get; set; }
  1018. [XmlAttribute(AttributeName = "aoController7")]
  1019. public string AoController7 { get; set; }
  1020. [XmlAttribute(AttributeName = "aoController7P")]
  1021. public string AoController7P { get; set; }
  1022. [XmlAttribute(AttributeName = "aoController7I")]
  1023. public string AoController7I { get; set; }
  1024. [XmlAttribute(AttributeName = "aoController7D")]
  1025. public string AoController7D { get; set; }
  1026. [XmlAttribute(AttributeName = "aoController7A")]
  1027. public string AoController7A { get; set; }
  1028. [XmlAttribute(AttributeName = "aoController7CH")]
  1029. public string AoController7CH { get; set; }
  1030. [XmlAttribute(AttributeName = "aoController7CL")]
  1031. public string AoController7CL { get; set; }
  1032. [XmlAttribute(AttributeName = "aoController7Offset")]
  1033. public string AoController7Offset { get; set; }
  1034. [XmlAttribute(AttributeName = "aoController8")]
  1035. public string AoController8 { get; set; }
  1036. [XmlAttribute(AttributeName = "aoController8P")]
  1037. public string AoController8P { get; set; }
  1038. [XmlAttribute(AttributeName = "aoController8I")]
  1039. public string AoController8I { get; set; }
  1040. [XmlAttribute(AttributeName = "aoController8D")]
  1041. public string AoController8D { get; set; }
  1042. [XmlAttribute(AttributeName = "aoController8A")]
  1043. public string AoController8A { get; set; }
  1044. [XmlAttribute(AttributeName = "aoController8CH")]
  1045. public string AoController8CH { get; set; }
  1046. [XmlAttribute(AttributeName = "aoController8CL")]
  1047. public string AoController8CL { get; set; }
  1048. [XmlAttribute(AttributeName = "aoController8Offset")]
  1049. public string AoController8Offset { get; set; }
  1050. [XmlAttribute(AttributeName = "aoController9")]
  1051. public string AoController9 { get; set; }
  1052. [XmlAttribute(AttributeName = "aoController9P")]
  1053. public string AoController9P { get; set; }
  1054. [XmlAttribute(AttributeName = "aoController9I")]
  1055. public string AoController9I { get; set; }
  1056. [XmlAttribute(AttributeName = "aoController9D")]
  1057. public string AoController9D { get; set; }
  1058. [XmlAttribute(AttributeName = "aoController9A")]
  1059. public string AoController9A { get; set; }
  1060. [XmlAttribute(AttributeName = "aoController9CH")]
  1061. public string AoController9CH { get; set; }
  1062. [XmlAttribute(AttributeName = "aoController9CL")]
  1063. public string AoController9CL { get; set; }
  1064. [XmlAttribute(AttributeName = "aoController9Offset")]
  1065. public string AoController9Offset { get; set; }
  1066. [XmlAttribute(AttributeName = "aoController10")]
  1067. public string AoController10 { get; set; }
  1068. [XmlAttribute(AttributeName = "aoController10P")]
  1069. public string AoController10P { get; set; }
  1070. [XmlAttribute(AttributeName = "aoController10I")]
  1071. public string AoController10I { get; set; }
  1072. [XmlAttribute(AttributeName = "aoController10D")]
  1073. public string AoController10D { get; set; }
  1074. [XmlAttribute(AttributeName = "aoController10A")]
  1075. public string AoController10A { get; set; }
  1076. [XmlAttribute(AttributeName = "aoController10CH")]
  1077. public string AoController10CH { get; set; }
  1078. [XmlAttribute(AttributeName = "aoController10CL")]
  1079. public string AoController10CL { get; set; }
  1080. [XmlAttribute(AttributeName = "aoController10Offset")]
  1081. public string AoController10Offset { get; set; }
  1082. [XmlAttribute(AttributeName = "scRootPath")]
  1083. public string ScRootPath { get; set; }
  1084. [XmlAttribute(AttributeName = "aioType")]
  1085. public string AioType { get; set; }
  1086. }
  1087. [XmlRoot(ElementName = "IoAPCs")]
  1088. public class IoAPCs
  1089. {
  1090. [XmlElement(ElementName = "IoAPC")]
  1091. public List<IoAPCConfig> IoAPC { get; set; }
  1092. [XmlAttribute(AttributeName = "classType")]
  1093. public string ClassType { get; set; }
  1094. [XmlAttribute(AttributeName = "assembly")]
  1095. public string Assembly { get; set; }
  1096. }
  1097. [XmlRoot(ElementName = "IoPressureMeter")]
  1098. public class IoPressureMeterConfig
  1099. {
  1100. [XmlAttribute(AttributeName = "id")]
  1101. public string DeviceName { get; set; }
  1102. [XmlAttribute(AttributeName = "display")]
  1103. public string Display { get; set; }
  1104. [XmlAttribute(AttributeName = "schematicId")]
  1105. public string SchematicId { get; set; }
  1106. [XmlAttribute(AttributeName = "unit")]
  1107. public string Unit { get; set; }
  1108. [XmlAttribute(AttributeName = "aiFeedback")]
  1109. public string AiFeedback { get; set; }
  1110. [XmlAttribute(AttributeName = "physical")]
  1111. public string Physical { get; set; }
  1112. [XmlAttribute(AttributeName = "scale")]
  1113. public string Scale { get; set; }
  1114. [XmlAttribute(AttributeName = "aioType")]
  1115. public string AioType { get; set; }
  1116. }
  1117. [XmlRoot(ElementName = "IoPressureMeters")]
  1118. public class IoPressureMeters
  1119. {
  1120. [XmlElement(ElementName = "IoPressureMeter")]
  1121. public List<IoPressureMeterConfig> IoPressureMeter { get; set; }
  1122. [XmlAttribute(AttributeName = "classType")]
  1123. public string ClassType { get; set; }
  1124. [XmlAttribute(AttributeName = "assembly")]
  1125. public string Assembly { get; set; }
  1126. }
  1127. [XmlRoot(ElementName = "IoAlarmSignal")]
  1128. public class IoAlarmSignalConfig
  1129. {
  1130. [XmlAttribute(AttributeName = "id")]
  1131. public string DeviceName { get; set; }
  1132. [XmlAttribute(AttributeName = "diSignalsplay")]
  1133. public string DiSignalsplay { get; set; }
  1134. [XmlAttribute(AttributeName = "diSignal")]
  1135. public string DiSignal { get; set; }
  1136. [XmlAttribute(AttributeName = "alarmTrigValue")]
  1137. public bool AlarmTrigValue { get; set; }
  1138. [XmlAttribute(AttributeName = "delay")]
  1139. public float Delay { get; set; }
  1140. [XmlAttribute(AttributeName = "aiSignal")]
  1141. public string AiSignal { get; set; }
  1142. [XmlAttribute(AttributeName = "condition")]
  1143. public string Condition { get; set; }
  1144. [XmlAttribute(AttributeName = "limitValue")]
  1145. public float LimitValue { get; set; }
  1146. }
  1147. [XmlRoot(ElementName = "IoAlarmSignals")]
  1148. public class IoAlarmSignals
  1149. {
  1150. [XmlElement(ElementName = "IoAlarmSignal")]
  1151. public List<IoAlarmSignalConfig> IoAlarmSignal { get; set; }
  1152. [XmlAttribute(AttributeName = "classType")]
  1153. public string ClassType { get; set; }
  1154. [XmlAttribute(AttributeName = "assembly")]
  1155. public string Assembly { get; set; }
  1156. }
  1157. [XmlRoot(ElementName = "IoSensor")]
  1158. public class IoSensorConfig
  1159. {
  1160. [XmlAttribute(AttributeName = "id")]
  1161. public string DeviceName { get; set; }
  1162. [XmlAttribute(AttributeName = "display")]
  1163. public string Display { get; set; }
  1164. [XmlAttribute(AttributeName = "di")]
  1165. public string Di { get; set; }
  1166. }
  1167. [XmlRoot(ElementName = "IoSensors")]
  1168. public class IoSensors
  1169. {
  1170. [XmlElement(ElementName = "IoSensor")]
  1171. public List<IoSensorConfig> IoSensor { get; set; }
  1172. [XmlAttribute(AttributeName = "classType")]
  1173. public string ClassType { get; set; }
  1174. [XmlAttribute(AttributeName = "assembly")]
  1175. public string Assembly { get; set; }
  1176. }
  1177. [XmlRoot(ElementName = "IoTrigger")]
  1178. public class IoTriggerConfig
  1179. {
  1180. [XmlAttribute(AttributeName = "id")]
  1181. public string DeviceName { get; set; }
  1182. [XmlAttribute(AttributeName = "display")]
  1183. public string Display { get; set; }
  1184. [XmlAttribute(AttributeName = "schematicId")]
  1185. public string SchematicId { get; set; }
  1186. [XmlAttribute(AttributeName = "unit")]
  1187. public string Unit { get; set; }
  1188. [XmlAttribute(AttributeName = "doTrigger")]
  1189. public string DoTrigger { get; set; }
  1190. [XmlAttribute(AttributeName = "diFeedback")]
  1191. public string DiFeedback { get; set; }
  1192. [XmlAttribute(AttributeName = "aoTrigger")]
  1193. public string AoTrigger { get; set; }
  1194. }
  1195. [XmlRoot(ElementName = "IoTriggers")]
  1196. public class IoTriggers
  1197. {
  1198. [XmlElement(ElementName = "IoTrigger")]
  1199. public List<IoTriggerConfig> IoTrigger { get; set; }
  1200. [XmlAttribute(AttributeName = "classType")]
  1201. public string ClassType { get; set; }
  1202. [XmlAttribute(AttributeName = "assembly")]
  1203. public string Assembly { get; set; }
  1204. }
  1205. [XmlRoot(ElementName = "IoSignalTower")]
  1206. public class IoSignalTowerConfig
  1207. {
  1208. [XmlAttribute(AttributeName = "module")]
  1209. public string Module { get; set; }
  1210. [XmlAttribute(AttributeName = "id")]
  1211. public string DeviceName { get; set; }
  1212. [XmlAttribute(AttributeName = "display")]
  1213. public string Display { get; set; }
  1214. [XmlAttribute(AttributeName = "schematicId")]
  1215. public string SchematicId { get; set; }
  1216. [XmlAttribute(AttributeName = "doRed")]
  1217. public string DoRed { get; set; }
  1218. [XmlAttribute(AttributeName = "doYellow")]
  1219. public string DoYellow { get; set; }
  1220. [XmlAttribute(AttributeName = "doGreen")]
  1221. public string DoGreen { get; set; }
  1222. [XmlAttribute(AttributeName = "doBlue")]
  1223. public string DoBlue { get; set; }
  1224. [XmlAttribute(AttributeName = "doBuzzer1")]
  1225. public string DoBuzzer1 { get; set; }
  1226. }
  1227. [XmlRoot(ElementName = "IoSignalTowers")]
  1228. public class IoSignalTowers
  1229. {
  1230. [XmlElement(ElementName = "IoSignalTower")]
  1231. public List<IoSignalTowerConfig> IoSignalTower { get; set; }
  1232. [XmlAttribute(AttributeName = "classType")]
  1233. public string ClassType { get; set; }
  1234. [XmlAttribute(AttributeName = "assembly")]
  1235. public string Assembly { get; set; }
  1236. }
  1237. [XmlRoot(ElementName = "IoHeaterBand")]
  1238. public class IoHeaterBandConfig
  1239. {
  1240. [XmlAttribute(AttributeName = "id")]
  1241. public string DeviceName { get; set; }
  1242. [XmlAttribute(AttributeName = "display")]
  1243. public string Display { get; set; }
  1244. [XmlAttribute(AttributeName = "schematicId")]
  1245. public string SchematicId { get; set; }
  1246. [XmlAttribute(AttributeName = "unit")]
  1247. public string Unit { get; set; }
  1248. [XmlAttribute(AttributeName = "module")]
  1249. public string Module { get; set; }
  1250. [XmlAttribute(AttributeName = "aiPV")]
  1251. public string AiPV { get; set; }
  1252. [XmlAttribute(AttributeName = "aiMV")]
  1253. public string AiMV { get; set; }
  1254. [XmlAttribute(AttributeName = "aiControlOutput")]
  1255. public string AiControlOutput { get; set; }
  1256. [XmlAttribute(AttributeName = "aiErrorID")]
  1257. public string AiErrorID { get; set; }
  1258. [XmlAttribute(AttributeName = "aiPID_P")]
  1259. public string AiPIDP { get; set; }
  1260. [XmlAttribute(AttributeName = "aiPID_I")]
  1261. public string AiPIDI { get; set; }
  1262. [XmlAttribute(AttributeName = "aiPID_D")]
  1263. public string AiPIDD { get; set; }
  1264. [XmlAttribute(AttributeName = "doEnable")]
  1265. public string DoEnable { get; set; }
  1266. [XmlAttribute(AttributeName = "doManualControl")]
  1267. public string DoManualControl { get; set; }
  1268. [XmlAttribute(AttributeName = "doAutoTuning")]
  1269. public string DoAutoTuning { get; set; }
  1270. [XmlAttribute(AttributeName = "diControlDoing")]
  1271. public string DiControlDoing { get; set; }
  1272. [XmlAttribute(AttributeName = "diAutoTuningDoing")]
  1273. public string DiAutoTuningDoing { get; set; }
  1274. [XmlAttribute(AttributeName = "diAutoTuningDone")]
  1275. public string DiAutoTuningDone { get; set; }
  1276. [XmlAttribute(AttributeName = "diPIDControlError")]
  1277. public string DiPIDControlError { get; set; }
  1278. [XmlAttribute(AttributeName = "diTimePropControlError")]
  1279. public string DiTimePropControlError { get; set; }
  1280. [XmlAttribute(AttributeName = "aoPID_P")]
  1281. public string AoPIDP { get; set; }
  1282. [XmlAttribute(AttributeName = "aoPID_I")]
  1283. public string AoPIDI { get; set; }
  1284. [XmlAttribute(AttributeName = "aoPID_D")]
  1285. public string AoPIDD { get; set; }
  1286. [XmlAttribute(AttributeName = "aoManualOutput")]
  1287. public string AoManualOutput { get; set; }
  1288. [XmlAttribute(AttributeName = "aoControlPeriodTime")]
  1289. public string AoControlPeriodTime { get; set; }
  1290. [XmlAttribute(AttributeName = "aoSetPoint")]
  1291. public string AoSetPoint { get; set; }
  1292. [XmlAttribute(AttributeName = "aioType")]
  1293. public string AioType { get; set; }
  1294. [XmlAttribute(AttributeName = "aiTemperatureSVFeedback")]
  1295. public string AiTemperatureSVFeedback { get; set; }
  1296. [XmlAttribute(AttributeName = "aiEnableIn")]
  1297. public string AiEnableIn { get; set; }
  1298. [XmlAttribute(AttributeName = "aiAutotuneActivate")]
  1299. public string AiAutotuneActivate { get; set; }
  1300. [XmlAttribute(AttributeName = "aiAlarmHigher")]
  1301. public string AiAlarmHigher { get; set; }
  1302. [XmlAttribute(AttributeName = "aiUpRate")]
  1303. public string AiUpRate { get; set; }
  1304. [XmlAttribute(AttributeName = "aiDownRate")]
  1305. public string AiDownRate { get; set; }
  1306. [XmlAttribute(AttributeName = "aiAlarmLower")]
  1307. public string AiAlarmLower { get; set; }
  1308. [XmlAttribute(AttributeName = "aoUpRate")]
  1309. public string AoUpRate { get; set; }
  1310. [XmlAttribute(AttributeName = "aoDownRate")]
  1311. public string AoDownRate { get; set; }
  1312. [XmlAttribute(AttributeName = "aoEnableIn")]
  1313. public string AoEnableIn { get; set; }
  1314. [XmlAttribute(AttributeName = "aoAutotuneActivate")]
  1315. public string AoAutotuneActivate { get; set; }
  1316. [XmlAttribute(AttributeName = "aoAlarmHigher")]
  1317. public string AoAlarmHigher { get; set; }
  1318. [XmlAttribute(AttributeName = "aoAlarmLower")]
  1319. public string AoAlarmLower { get; set; }
  1320. }
  1321. [XmlRoot(ElementName = "IoHeaterBands")]
  1322. public class IoHeaterBands
  1323. {
  1324. [XmlElement(ElementName = "IoHeaterBand")]
  1325. public List<IoHeaterBandConfig> IoHeaterBand { get; set; }
  1326. [XmlAttribute(AttributeName = "classType")]
  1327. public string ClassType { get; set; }
  1328. [XmlAttribute(AttributeName = "assembly")]
  1329. public string Assembly { get; set; }
  1330. }
  1331. [XmlRoot(ElementName = "IoMFC")]
  1332. public class IoMFCConfig
  1333. {
  1334. [XmlAttribute(AttributeName = "id")]
  1335. public string DeviceName { get; set; }
  1336. [XmlAttribute(AttributeName = "display")]
  1337. public string Display { get; set; }
  1338. [XmlAttribute(AttributeName = "schematicId")]
  1339. public string SchematicId { get; set; }
  1340. [XmlAttribute(AttributeName = "unit")]
  1341. public string Unit { get; set; }
  1342. [XmlAttribute(AttributeName = "aiFlow")]
  1343. public string AiFlow { get; set; }
  1344. [XmlAttribute(AttributeName = "aoFlow")]
  1345. public string AoFlow { get; set; }
  1346. [XmlAttribute(AttributeName = "aoRamp")]
  1347. public string AoRamp { get; set; }
  1348. [XmlAttribute(AttributeName = "aioType")]
  1349. public string AioType { get; set; }
  1350. [XmlAttribute(AttributeName = "scBasePath")]
  1351. public string ScBasePath { get; set; }
  1352. }
  1353. [XmlRoot(ElementName = "IoMFCs")]
  1354. public class IoMFCs
  1355. {
  1356. [XmlElement(ElementName = "IoMFC")]
  1357. public List<IoMFCConfig> IoMFC { get; set; }
  1358. [XmlAttribute(AttributeName = "classType")]
  1359. public string ClassType { get; set; }
  1360. [XmlAttribute(AttributeName = "assembly")]
  1361. public string Assembly { get; set; }
  1362. }
  1363. [XmlRoot(ElementName = "IoMFM")]
  1364. public class IoMFMConfig
  1365. {
  1366. [XmlAttribute(AttributeName = "id")]
  1367. public string DeviceName { get; set; }
  1368. [XmlAttribute(AttributeName = "display")]
  1369. public string Display { get; set; }
  1370. [XmlAttribute(AttributeName = "schematicId")]
  1371. public string SchematicId { get; set; }
  1372. [XmlAttribute(AttributeName = "unit")]
  1373. public string Unit { get; set; }
  1374. [XmlAttribute(AttributeName = "aiFlow")]
  1375. public string AiFlow { get; set; }
  1376. [XmlAttribute(AttributeName = "aoFlow")]
  1377. public string AoFlow { get; set; }
  1378. [XmlAttribute(AttributeName = "aioType")]
  1379. public string AioType { get; set; }
  1380. [XmlAttribute(AttributeName = "scBasePath")]
  1381. public string ScBasePath { get; set; }
  1382. }
  1383. [XmlRoot(ElementName = "IoMFMs")]
  1384. public class IoMFMs
  1385. {
  1386. [XmlElement(ElementName = "IoMFM")]
  1387. public List<IoMFMConfig> IoMFM { get; set; }
  1388. [XmlAttribute(AttributeName = "classType")]
  1389. public string ClassType { get; set; }
  1390. [XmlAttribute(AttributeName = "assembly")]
  1391. public string Assembly { get; set; }
  1392. }
  1393. [XmlRoot(ElementName = "IoFFU")]
  1394. public class IoFFUConfig
  1395. {
  1396. [XmlAttribute(AttributeName = "id")]
  1397. public string DeviceName { get; set; }
  1398. [XmlAttribute(AttributeName = "display")]
  1399. public string Display { get; set; }
  1400. [XmlAttribute(AttributeName = "schematicId")]
  1401. public string SchematicId { get; set; }
  1402. [XmlAttribute(AttributeName = "unit")]
  1403. public string Unit { get; set; }
  1404. [XmlAttribute(AttributeName = "diDataWriteDone")]
  1405. public string DiDataWriteDone { get; set; }
  1406. [XmlAttribute(AttributeName = "diDataWriteError")]
  1407. public string DiDataWriteError { get; set; }
  1408. [XmlAttribute(AttributeName = "diDataReadError")]
  1409. public string DiDataReadError { get; set; }
  1410. [XmlAttribute(AttributeName = "aiGroupNumber")]
  1411. public string AiGroupNumber { get; set; }
  1412. [XmlAttribute(AttributeName = "aiAddressNumber")]
  1413. public string AiAddressNumber { get; set; }
  1414. [XmlAttribute(AttributeName = "aiSwitch")]
  1415. public string AiSwitch { get; set; }
  1416. [XmlAttribute(AttributeName = "aiSetSpeed")]
  1417. public string AiSetSpeed { get; set; }
  1418. [XmlAttribute(AttributeName = "aiMaxSpeed")]
  1419. public string AiMaxSpeed { get; set; }
  1420. [XmlAttribute(AttributeName = "aiReset")]
  1421. public string AiReset { get; set; }
  1422. [XmlAttribute(AttributeName = "aiErrorTimer")]
  1423. public string AiErrorTimer { get; set; }
  1424. [XmlAttribute(AttributeName = "aiCurrentSpeed")]
  1425. public string AiCurrentSpeed { get; set; }
  1426. [XmlAttribute(AttributeName = "aiVoltage")]
  1427. public string AiVoltage { get; set; }
  1428. [XmlAttribute(AttributeName = "aiCurrent")]
  1429. public string AiCurrent { get; set; }
  1430. [XmlAttribute(AttributeName = "aoSwitch")]
  1431. public string AoSwitch { get; set; }
  1432. [XmlAttribute(AttributeName = "aoSetSpeed")]
  1433. public string AoSetSpeed { get; set; }
  1434. [XmlAttribute(AttributeName = "aoReset")]
  1435. public string AoReset { get; set; }
  1436. [XmlAttribute(AttributeName = "doEnable")]
  1437. public string DoEnable { get; set; }
  1438. [XmlAttribute(AttributeName = "doWriteCommand")]
  1439. public string DoWriteCommand { get; set; }
  1440. [XmlAttribute(AttributeName = "aioType")]
  1441. public string AioType { get; set; }
  1442. }
  1443. [XmlRoot(ElementName = "IoFFUs")]
  1444. public class IoFFUs
  1445. {
  1446. [XmlElement(ElementName = "IoFFU")]
  1447. public List<IoFFUConfig> IoFFU { get; set; }
  1448. [XmlAttribute(AttributeName = "classType")]
  1449. public string ClassType { get; set; }
  1450. [XmlAttribute(AttributeName = "assembly")]
  1451. public string Assembly { get; set; }
  1452. }
  1453. [XmlRoot(ElementName = "IoValve")]
  1454. public class IoValveConfig
  1455. {
  1456. [XmlAttribute(AttributeName = "id")]
  1457. public string DeviceName { get; set; }
  1458. [XmlAttribute(AttributeName = "diOpen")]
  1459. public string DiOpen { get; set; }
  1460. [XmlAttribute(AttributeName = "doOpen")]
  1461. public string DoOpen { get; set; }
  1462. [XmlAttribute(AttributeName = "display")]
  1463. public string Display { get; set; }
  1464. [XmlAttribute(AttributeName = "ILKDi")]
  1465. public string DiILK { get; set; }
  1466. [XmlAttribute(AttributeName = "schematicId")]
  1467. public string SchematicId { get; set; }
  1468. [XmlAttribute(AttributeName = "isNc")]
  1469. public bool IsNc { get; set; }
  1470. [XmlAttribute(AttributeName = "isDefaultOpen")]
  1471. public bool IsDefaultOpen { get; set; }
  1472. [XmlAttribute(AttributeName = "diOpenSensor")]
  1473. public string DiOpenSensor { get; set; }
  1474. [XmlAttribute(AttributeName = "diCloseSensor")]
  1475. public string DiCloseSensor { get; set; }
  1476. [XmlAttribute(AttributeName = "doClose")]
  1477. public string DoClose { get; set; }
  1478. }
  1479. [XmlRoot(ElementName = "IoValves")]
  1480. public class IoValves
  1481. {
  1482. [XmlElement(ElementName = "IoValve")]
  1483. public List<IoValveConfig> IoValve { get; set; }
  1484. [XmlAttribute(AttributeName = "classType")]
  1485. public string ClassType { get; set; }
  1486. [XmlAttribute(AttributeName = "assembly")]
  1487. public string Assembly { get; set; }
  1488. }
  1489. [XmlRoot(ElementName = "DeviceModelDefine")]
  1490. public class PMDeviceConfig
  1491. {
  1492. [XmlElement(ElementName = "IoLPs")]
  1493. public IoLPs IoLPs { get; set; }
  1494. [XmlElement(ElementName = "IoFIMSs")]
  1495. public IoFIMSs IoFIMSs { get; set; }
  1496. [XmlElement(ElementName = "IoDoors")]
  1497. public IoDoors IoDoors { get; set; }
  1498. [XmlElement(ElementName = "IoShutters")]
  1499. public IoShutters IoShutters { get; set; }
  1500. [XmlElement(ElementName = "IoBufferMotors")]
  1501. public IoBufferMotors IoBufferMotors { get; set; }
  1502. [XmlElement(ElementName = "IoFurnaceMotors")]
  1503. public IoFurnaceMotors IoFurnaceMotors { get; set; }
  1504. [XmlElement(ElementName = "IoWaferRobots")]
  1505. public IoWaferRobots IoWaferRobots { get; set; }
  1506. [XmlElement(ElementName = "IoCarrierRobots")]
  1507. public IoCarrierRobots IoCarrierRobots { get; set; }
  1508. [XmlElement(ElementName = "IoRFs")]
  1509. public IoRFs IoRFs { get; set; }
  1510. [XmlElement(ElementName = "IoRFMatchs")]
  1511. public IoRFMatchs IoRFMatchs { get; set; }
  1512. [XmlElement(ElementName = "IoAPCs")]
  1513. public IoAPCs IoAPCs { get; set; }
  1514. [XmlElement(ElementName = "IoPressureMeters")]
  1515. public IoPressureMeters IoPressureMeters { get; set; }
  1516. [XmlElement(ElementName = "IoAlarmSignals")]
  1517. public IoAlarmSignals IoAlarmSignals { get; set; }
  1518. [XmlElement(ElementName = "IoSensors")]
  1519. public IoSensors IoSensors { get; set; }
  1520. [XmlElement(ElementName = "IoTriggers")]
  1521. public IoTriggers IoTriggers { get; set; }
  1522. [XmlElement(ElementName = "IoSignalTowers")]
  1523. public IoSignalTowers IoSignalTowers { get; set; }
  1524. [XmlElement(ElementName = "IoHeaterBands")]
  1525. public IoHeaterBands IoHeaterBands { get; set; }
  1526. [XmlElement(ElementName = "IoMFCs")]
  1527. public IoMFCs IoMFCs { get; set; }
  1528. [XmlElement(ElementName = "IoMFMs")]
  1529. public IoMFMs IoMFMs { get; set; }
  1530. [XmlElement(ElementName = "IoFFUs")]
  1531. public IoFFUs IoFFUs { get; set; }
  1532. [XmlElement(ElementName = "IoValves")]
  1533. public IoValves IoValves { get; set; }
  1534. [XmlAttribute(AttributeName = "type")]
  1535. public string Type { get; set; }
  1536. }
  1537. }