using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; using System.Xml.Serialization; namespace MECF.Framework.Common.Config { [XmlRoot(ElementName = "IoLP")] public class IoLPConfig { [XmlAttribute(AttributeName = "id")] public string DeviceName { get; set; } [XmlAttribute(AttributeName = "display")] public string Display { get; set; } [XmlAttribute(AttributeName = "schematicId")] public string SchematicId { get; set; } [XmlAttribute(AttributeName = "unit")] public string Unit { get; set; } [XmlAttribute(AttributeName = "diLeftClamp")] public string DiLeftClamp { get; set; } [XmlAttribute(AttributeName = "diRightClamp")] public string DiRightClamp { get; set; } [XmlAttribute(AttributeName = "diLeftRelease")] public string DiLeftRelease { get; set; } [XmlAttribute(AttributeName = "diRightRelease")] public string DiRightRelease { get; set; } [XmlAttribute(AttributeName = "diInPosition1")] public string DiInPosition1 { get; set; } [XmlAttribute(AttributeName = "diInPosition2")] public string DiInPosition2 { get; set; } [XmlAttribute(AttributeName = "diInPosition3")] public string DiInPosition3 { get; set; } [XmlAttribute(AttributeName = "diDetect")] public string DiDetect { get; set; } [XmlAttribute(AttributeName = "doClamp")] public string DoClamp { get; set; } [XmlAttribute(AttributeName = "doRelease")] public string DoRelease { get; set; } [XmlAttribute(AttributeName = "doPresence")] public string DoPresence { get; set; } [XmlAttribute(AttributeName = "doPlacement")] public string DoPlacement { get; set; } [XmlAttribute(AttributeName = "doLoad")] public string DoLoad { get; set; } [XmlAttribute(AttributeName = "doUnload")] public string DoUnload { get; set; } [XmlAttribute(AttributeName = "doManual")] public string DoManual { get; set; } [XmlAttribute(AttributeName = "scRootPath")] public string ScRootPath { get; set; } } [XmlRoot(ElementName = "IoLPs")] public class IoLPs { [XmlElement(ElementName = "IoLP")] public List IoLP { get; set; } [XmlAttribute(AttributeName = "classType")] public string ClassType { get; set; } [XmlAttribute(AttributeName = "assembly")] public string Assembly { get; set; } } [XmlRoot(ElementName = "IoFIMS")] public class IoFIMSConfig { [XmlAttribute(AttributeName = "id")] public string DeviceName { get; set; } [XmlAttribute(AttributeName = "display")] public string Display { get; set; } [XmlAttribute(AttributeName = "schematicId")] public string SchematicId { get; set; } [XmlAttribute(AttributeName = "unit")] public string Unit { get; set; } [XmlAttribute(AttributeName = "diLoadComplete")] public string DiLoadComplete { get; set; } [XmlAttribute(AttributeName = "diUnloadComplete")] public string DiUnloadComplete { get; set; } [XmlAttribute(AttributeName = "diHomeComplete")] public string DiHomeComplete { get; set; } [XmlAttribute(AttributeName = "diRunning")] public string DiRunning { get; set; } [XmlAttribute(AttributeName = "diAutoManual")] public string DiAutoManual { get; set; } [XmlAttribute(AttributeName = "diDock")] public string DiDock { get; set; } [XmlAttribute(AttributeName = "diUndock")] public string DiUndock { get; set; } [XmlAttribute(AttributeName = "diExist")] public string DiExist { get; set; } [XmlAttribute(AttributeName = "diSeal")] public string DiSeal { get; set; } [XmlAttribute(AttributeName = "diRelease")] public string DiRelease { get; set; } [XmlAttribute(AttributeName = "diDoorOpen")] public string DiDoorOpen { get; set; } [XmlAttribute(AttributeName = "diDoorClose")] public string DiDoorClose { get; set; } [XmlAttribute(AttributeName = "diLatchOn")] public string DiLatchOn { get; set; } [XmlAttribute(AttributeName = "diLatchOff")] public string DiLatchOff { get; set; } [XmlAttribute(AttributeName = "diCollisionAvoidanceDown")] public string DiCollisionAvoidanceDown { get; set; } [XmlAttribute(AttributeName = "diCollisionAvoidanceUp")] public string DiCollisionAvoidanceUp { get; set; } [XmlAttribute(AttributeName = "diN2PurgeValveClosed")] public string DiN2PurgeValveClosed { get; set; } [XmlAttribute(AttributeName = "diN2PurgeValveOpened")] public string DiN2PurgeValveOpened { get; set; } [XmlAttribute(AttributeName = "diFOUPVacuumSuckingOK")] public string DiFOUPVacuumSuckingOK { get; set; } [XmlAttribute(AttributeName = "diFOUPVacuumSuckingAlarm")] public string DiFOUPVacuumSuckingAlarm { get; set; } [XmlAttribute(AttributeName = "diWaferOnRobot")] public string DiWaferOnRobot { get; set; } [XmlAttribute(AttributeName = "diWaferRobotEX1AxisHomePosition")] public string DiWaferRobotEX1AxisHomePosition { get; set; } [XmlAttribute(AttributeName = "diWaferRobotEX2AxisHomePosition")] public string DiWaferRobotEX2AxisHomePosition { get; set; } [XmlAttribute(AttributeName = "doLoad")] public string DoLoad { get; set; } [XmlAttribute(AttributeName = "doUnload")] public string DoUnload { get; set; } [XmlAttribute(AttributeName = "doHome")] public string DoHome { get; set; } [XmlAttribute(AttributeName = "doAlarmReset")] public string DoAlarmReset { get; set; } [XmlAttribute(AttributeName = "doAutoManual")] public string DoAutoManual { get; set; } [XmlAttribute(AttributeName = "doDock")] public string DoDock { get; set; } [XmlAttribute(AttributeName = "doUndock")] public string DoUndock { get; set; } [XmlAttribute(AttributeName = "doSeal")] public string DoSeal { get; set; } [XmlAttribute(AttributeName = "doRelease")] public string DoRelease { get; set; } [XmlAttribute(AttributeName = "doDoorOpen")] public string DoDoorOpen { get; set; } [XmlAttribute(AttributeName = "doDoorClose")] public string DoDoorClose { get; set; } [XmlAttribute(AttributeName = "doLatch1On")] public string DoLatch1On { get; set; } [XmlAttribute(AttributeName = "doLatch2On")] public string DoLatch2On { get; set; } [XmlAttribute(AttributeName = "doLatch1Off")] public string DoLatch1Off { get; set; } [XmlAttribute(AttributeName = "doLatch2Off")] public string DoLatch2Off { get; set; } [XmlAttribute(AttributeName = "doCollisionAvoidanceDown")] public string DoCollisionAvoidanceDown { get; set; } [XmlAttribute(AttributeName = "doCollisionAvoidanceUp")] public string DoCollisionAvoidanceUp { get; set; } [XmlAttribute(AttributeName = "doN2PurgeValveOpen")] public string DoN2PurgeValveOpen { get; set; } [XmlAttribute(AttributeName = "doN2PurgeValveClose")] public string DoN2PurgeValveClose { get; set; } [XmlAttribute(AttributeName = "doVaccumValveOpen")] public string DoVaccumValveOpen { get; set; } [XmlAttribute(AttributeName = "doVaccumValveClose")] public string DoVaccumValveClose { get; set; } [XmlAttribute(AttributeName = "scRootPath")] public string ScRootPath { get; set; } } [XmlRoot(ElementName = "IoFIMSs")] public class IoFIMSs { [XmlElement(ElementName = "IoFIMS")] public List IoFIMS { get; set; } [XmlAttribute(AttributeName = "classType")] public string ClassType { get; set; } [XmlAttribute(AttributeName = "assembly")] public string Assembly { get; set; } } [XmlRoot(ElementName = "IoDoor")] public class IoDoorConfig { [XmlAttribute(AttributeName = "id")] public string DeviceName { get; set; } [XmlAttribute(AttributeName = "display")] public string Display { get; set; } [XmlAttribute(AttributeName = "schematicId")] public string SchematicId { get; set; } [XmlAttribute(AttributeName = "unit")] public string Unit { get; set; } [XmlAttribute(AttributeName = "diOpen")] public string DiOpen { get; set; } [XmlAttribute(AttributeName = "diClose")] public string DiClose { get; set; } [XmlAttribute(AttributeName = "doOpen")] public string DoOpen { get; set; } [XmlAttribute(AttributeName = "doClose")] public string DoClose { get; set; } [XmlAttribute(AttributeName = "scRootPath")] public string ScRootPath { get; set; } } [XmlRoot(ElementName = "IoDoors")] public class IoDoors { [XmlElement(ElementName = "IoDoor")] public IoDoorConfig IoDoor { get; set; } [XmlAttribute(AttributeName = "classType")] public string ClassType { get; set; } [XmlAttribute(AttributeName = "assembly")] public string Assembly { get; set; } } [XmlRoot(ElementName = "IoShutter")] public class IoShutterConfig { [XmlAttribute(AttributeName = "id")] public string DeviceName { get; set; } [XmlAttribute(AttributeName = "display")] public string Display { get; set; } [XmlAttribute(AttributeName = "schematicId")] public string SchematicId { get; set; } [XmlAttribute(AttributeName = "unit")] public string Unit { get; set; } [XmlAttribute(AttributeName = "diOpen")] public string DiOpen { get; set; } [XmlAttribute(AttributeName = "diClose")] public string DiClose { get; set; } [XmlAttribute(AttributeName = "doOpen")] public string DoOpen { get; set; } [XmlAttribute(AttributeName = "doClose")] public string DoClose { get; set; } [XmlAttribute(AttributeName = "scRootPath")] public string ScRootPath { get; set; } } [XmlRoot(ElementName = "IoShutters")] public class IoShutters { [XmlElement(ElementName = "IoShutter")] public List IoShutter { get; set; } [XmlAttribute(AttributeName = "classType")] public string ClassType { get; set; } [XmlAttribute(AttributeName = "assembly")] public string Assembly { get; set; } } [XmlRoot(ElementName = "IoBufferMotor")] public class IoBufferMotorConfig { [XmlAttribute(AttributeName = "id")] public string DeviceName { get; set; } [XmlAttribute(AttributeName = "display")] public string Display { get; set; } [XmlAttribute(AttributeName = "schematicId")] public string SchematicId { get; set; } [XmlAttribute(AttributeName = "unit")] public string Unit { get; set; } [XmlAttribute(AttributeName = "module")] public string Module { get; set; } [XmlAttribute(AttributeName = "aiRealPosition")] public string AiRealPosition { get; set; } [XmlAttribute(AttributeName = "aiRealSpeed")] public string AiRealSpeed { get; set; } [XmlAttribute(AttributeName = "aiRealTorque")] public string AiRealTorque { get; set; } [XmlAttribute(AttributeName = "aiTargetPosFb")] public string AiTargetPosFb { get; set; } [XmlAttribute(AttributeName = "aiDriverErrorCode")] public string AiDriverErrorCode { get; set; } [XmlAttribute(AttributeName = "aiMotionErrorCode")] public string AiMotionErrorCode { get; set; } [XmlAttribute(AttributeName = "aoTargetPosition")] public string AoTargetPosition { get; set; } [XmlAttribute(AttributeName = "aoSpeed")] public string AoSpeed { get; set; } [XmlAttribute(AttributeName = "aoAcc")] public string AoAcc { get; set; } [XmlAttribute(AttributeName = "aoDec")] public string AoDec { get; set; } [XmlAttribute(AttributeName = "diMoving")] public string DiMoving { get; set; } [XmlAttribute(AttributeName = "diSensor1")] public string DiSensor1 { get; set; } [XmlAttribute(AttributeName = "diSensor2")] public string DiSensor2 { get; set; } [XmlAttribute(AttributeName = "diSensor3")] public string DiSensor3 { get; set; } [XmlAttribute(AttributeName = "diSensor4")] public string DiSensor4 { get; set; } [XmlAttribute(AttributeName = "diSensor5")] public string DiSensor5 { get; set; } [XmlAttribute(AttributeName = "diSensor6")] public string DiSensor6 { get; set; } [XmlAttribute(AttributeName = "diSensor7")] public string DiSensor7 { get; set; } [XmlAttribute(AttributeName = "diSensor8")] public string DiSensor8 { get; set; } [XmlAttribute(AttributeName = "diWarning")] public string DiWarning { get; set; } [XmlAttribute(AttributeName = "diAlarm")] public string DiAlarm { get; set; } [XmlAttribute(AttributeName = "diPositionA1")] public string DiPositionA1 { get; set; } [XmlAttribute(AttributeName = "diPositionB1")] public string DiPositionB1 { get; set; } [XmlAttribute(AttributeName = "diPositionC1")] public string DiPositionC1 { get; set; } [XmlAttribute(AttributeName = "diPositionD1")] public string DiPositionD1 { get; set; } [XmlAttribute(AttributeName = "diPositionA2")] public string DiPositionA2 { get; set; } [XmlAttribute(AttributeName = "diPositionB2")] public string DiPositionB2 { get; set; } [XmlAttribute(AttributeName = "diPositionC2")] public string DiPositionC2 { get; set; } [XmlAttribute(AttributeName = "diPositionD2")] public string DiPositionD2 { get; set; } [XmlAttribute(AttributeName = "diPositionA3")] public string DiPositionA3 { get; set; } [XmlAttribute(AttributeName = "diPositionB3")] public string DiPositionB3 { get; set; } [XmlAttribute(AttributeName = "diPositionC3")] public string DiPositionC3 { get; set; } [XmlAttribute(AttributeName = "diPositionD3")] public string DiPositionD3 { get; set; } [XmlAttribute(AttributeName = "diPositionA4")] public string DiPositionA4 { get; set; } [XmlAttribute(AttributeName = "diPositionB4")] public string DiPositionB4 { get; set; } [XmlAttribute(AttributeName = "diPositionC4")] public string DiPositionC4 { get; set; } [XmlAttribute(AttributeName = "diPositionD4")] public string DiPositionD4 { get; set; } [XmlAttribute(AttributeName = "doServoOn")] public string DoServoOn { get; set; } [XmlAttribute(AttributeName = "doStop")] public string DoStop { get; set; } [XmlAttribute(AttributeName = "doMove")] public string DoMove { get; set; } [XmlAttribute(AttributeName = "doReset")] public string DoReset { get; set; } [XmlAttribute(AttributeName = "aioType")] public string AioType { get; set; } [XmlAttribute(AttributeName = "scRootPath")] public string ScRootPath { get; set; } } [XmlRoot(ElementName = "IoBufferMotors")] public class IoBufferMotors { [XmlElement(ElementName = "IoBufferMotor")] public IoBufferMotorConfig IoBufferMotor { get; set; } [XmlAttribute(AttributeName = "classType")] public string ClassType { get; set; } [XmlAttribute(AttributeName = "assembly")] public string Assembly { get; set; } } [XmlRoot(ElementName = "IoFurnaceMotor")] public class IoFurnaceMotorConfig { [XmlAttribute(AttributeName = "id")] public string DeviceName { get; set; } [XmlAttribute(AttributeName = "display")] public string Display { get; set; } [XmlAttribute(AttributeName = "schematicId")] public string SchematicId { get; set; } [XmlAttribute(AttributeName = "unit")] public string Unit { get; set; } [XmlAttribute(AttributeName = "module")] public string Module { get; set; } [XmlAttribute(AttributeName = "aiRealPosition")] public string AiRealPosition { get; set; } [XmlAttribute(AttributeName = "aiRealSpeed")] public string AiRealSpeed { get; set; } [XmlAttribute(AttributeName = "aiTargetPosFb")] public string AiTargetPosFb { get; set; } [XmlAttribute(AttributeName = "aiDriverErrorCode")] public string AiDriverErrorCode { get; set; } [XmlAttribute(AttributeName = "aiMotionErrorCode")] public string AiMotionErrorCode { get; set; } [XmlAttribute(AttributeName = "aoTargetPosition")] public string AoTargetPosition { get; set; } [XmlAttribute(AttributeName = "aoTargetSpeed")] public string AoTargetSpeed { get; set; } [XmlAttribute(AttributeName = "aoAcc")] public string AoAcc { get; set; } [XmlAttribute(AttributeName = "aoDec")] public string AoDec { get; set; } [XmlAttribute(AttributeName = "diMotorAlarm")] public string DiMotorAlarm { get; set; } [XmlAttribute(AttributeName = "diMove")] public string DiMove { get; set; } [XmlAttribute(AttributeName = "diPowerOn")] public string DiPowerOn { get; set; } [XmlAttribute(AttributeName = "diPowerOnError")] public string DiPowerOnError { get; set; } [XmlAttribute(AttributeName = "diStop")] public string DiStop { get; set; } [XmlAttribute(AttributeName = "diStopError")] public string DiStopError { get; set; } [XmlAttribute(AttributeName = "diHomeDone")] public string DiHomeDone { get; set; } [XmlAttribute(AttributeName = "diAlignDone")] public string DiAlignDone { get; set; } [XmlAttribute(AttributeName = "diHoming")] public string DiHoming { get; set; } [XmlAttribute(AttributeName = "diHomeError")] public string DiHomeError { get; set; } [XmlAttribute(AttributeName = "diMoving")] public string DiMoving { get; set; } [XmlAttribute(AttributeName = "diMoveError")] public string DiMoveError { get; set; } [XmlAttribute(AttributeName = "diHomePosition")] public string DiHomePosition { get; set; } [XmlAttribute(AttributeName = "diNegativeLimit")] public string DiNegativeLimit { get; set; } [XmlAttribute(AttributeName = "diPositiveLimit")] public string DiPositiveLimit { get; set; } [XmlAttribute(AttributeName = "diConveyRelaxAlarm")] public string DiConveyRelaxAlarm { get; set; } [XmlAttribute(AttributeName = "diReadyToSwitchOn")] public string DiReadyToSwitchOn { get; set; } [XmlAttribute(AttributeName = "diSwitchOn")] public string DiSwitchOn { get; set; } [XmlAttribute(AttributeName = "diWarning")] public string DiWarning { get; set; } [XmlAttribute(AttributeName = "diAlarm")] public string DiAlarm { get; set; } [XmlAttribute(AttributeName = "diPosition1")] public string DiPosition1 { get; set; } [XmlAttribute(AttributeName = "diPosition2")] public string DiPosition2 { get; set; } [XmlAttribute(AttributeName = "diPosition3")] public string DiPosition3 { get; set; } [XmlAttribute(AttributeName = "diUpPosition")] public string DiUpPosition { get; set; } [XmlAttribute(AttributeName = "diDownPosition")] public string DiDownPosition { get; set; } [XmlAttribute(AttributeName = "doStop")] public string DoStop { get; set; } [XmlAttribute(AttributeName = "doHome")] public string DoHome { get; set; } [XmlAttribute(AttributeName = "doMove")] public string DoMove { get; set; } [XmlAttribute(AttributeName = "doReset")] public string DoReset { get; set; } [XmlAttribute(AttributeName = "doServoOn")] public string DoServoOn { get; set; } [XmlAttribute(AttributeName = "doInTransfer")] public string DoInTransfer { get; set; } [XmlAttribute(AttributeName = "doTransferComplete")] public string DoTransferComplete { get; set; } [XmlAttribute(AttributeName = "doStepperDriverStart")] public string DoStepperDriverStart { get; set; } [XmlAttribute(AttributeName = "doStepperDriverAllWindingsOff")] public string DoStepperDriverAllWindingsOff { get; set; } [XmlAttribute(AttributeName = "doStepperDriverDataSelectionM0")] public string DoStepperDriverDataSelectionM0 { get; set; } [XmlAttribute(AttributeName = "doStepperDriverDataSelectionM1")] public string DoStepperDriverDataSelectionM1 { get; set; } [XmlAttribute(AttributeName = "doStepperDriverDataSelectionM2")] public string DoStepperDriverDataSelectionM2 { get; set; } [XmlAttribute(AttributeName = "doStepperDriverDataSelectionM3")] public string DoStepperDriverDataSelectionM3 { get; set; } [XmlAttribute(AttributeName = "doStepperDriverDataSelectionM4")] public string DoStepperDriverDataSelectionM4 { get; set; } [XmlAttribute(AttributeName = "doStepperDriverDataSelectionM5")] public string DoStepperDriverDataSelectionM5 { get; set; } [XmlAttribute(AttributeName = "doStepperDriverHomeOrPosPrerst")] public string DoStepperDriverHomeOrPosPrerst { get; set; } [XmlAttribute(AttributeName = "doCW")] public string DoCW { get; set; } [XmlAttribute(AttributeName = "doCCW")] public string DoCCW { get; set; } [XmlAttribute(AttributeName = "aioType")] public string AioType { get; set; } [XmlAttribute(AttributeName = "scRootPath")] public string ScRootPath { get; set; } [XmlAttribute(AttributeName = "aiPowerErrorCode")] public string AiPowerErrorCode { get; set; } [XmlAttribute(AttributeName = "aiStopErrorCode")] public string AiStopErrorCode { get; set; } [XmlAttribute(AttributeName = "aiHomeErrorCode")] public string AiHomeErrorCode { get; set; } [XmlAttribute(AttributeName = "aiMoveAbsErrorCode")] public string AiMoveAbsErrorCode { get; set; } [XmlAttribute(AttributeName = "aiJogErrorCode")] public string AiJogErrorCode { get; set; } [XmlAttribute(AttributeName = "aiResetErrorCode")] public string AiResetErrorCode { get; set; } [XmlAttribute(AttributeName = "aiErrorCode")] public string AiErrorCode { get; set; } [XmlAttribute(AttributeName = "diInitializing")] public string DiInitializing { get; set; } [XmlAttribute(AttributeName = "diInitDone")] public string DiInitDone { get; set; } [XmlAttribute(AttributeName = "diStepperMotorInWorkPosition")] public string DiStepperMotorInWorkPosition { get; set; } [XmlAttribute(AttributeName = "diStepperMotorMoving")] public string DiStepperMotorMoving { get; set; } [XmlAttribute(AttributeName = "diStepperMotorAlarm")] public string DiStepperMotorAlarm { get; set; } [XmlAttribute(AttributeName = "diStepperMotorInArea")] public string DiStepperMotorInArea { get; set; } [XmlAttribute(AttributeName = "diStepperMotorInReady")] public string DiStepperMotorInReady { get; set; } [XmlAttribute(AttributeName = "diStepperMotorInHomePosition")] public string DiStepperMotorInHomePosition { get; set; } [XmlAttribute(AttributeName = "doInit")] public string DoInit { get; set; } [XmlAttribute(AttributeName = "doM0")] public string DoM0 { get; set; } [XmlAttribute(AttributeName = "doM1")] public string DoM1 { get; set; } [XmlAttribute(AttributeName = "doM2")] public string DoM2 { get; set; } [XmlAttribute(AttributeName = "doM3")] public string DoM3 { get; set; } [XmlAttribute(AttributeName = "doM4")] public string DoM4 { get; set; } [XmlAttribute(AttributeName = "doM5")] public string DoM5 { get; set; } } [XmlRoot(ElementName = "IoFurnaceMotors")] public class IoFurnaceMotors { [XmlElement(ElementName = "IoFurnaceMotor")] public List IoFurnaceMotor { get; set; } [XmlAttribute(AttributeName = "classType")] public string ClassType { get; set; } [XmlAttribute(AttributeName = "assembly")] public string Assembly { get; set; } } [XmlRoot(ElementName = "IoWaferRobot")] public class IoWaferRobotConfig { [XmlAttribute(AttributeName = "id")] public string DeviceName { get; set; } [XmlAttribute(AttributeName = "display")] public string Display { get; set; } [XmlAttribute(AttributeName = "schematicId")] public string SchematicId { get; set; } [XmlAttribute(AttributeName = "unit")] public string Unit { get; set; } [XmlAttribute(AttributeName = "diInFIMS1")] public string DiInFIMS1 { get; set; } [XmlAttribute(AttributeName = "diInFIMS2")] public string DiInFIMS2 { get; set; } [XmlAttribute(AttributeName = "diInBoatRotate")] public string DiInBoatRotate { get; set; } [XmlAttribute(AttributeName = "diInBoatBottom")] public string DiInBoatBottom { get; set; } [XmlAttribute(AttributeName = "diFIMS1WaferOnRobot")] public string DiFIMS1WaferOnRobot { get; set; } [XmlAttribute(AttributeName = "diFIMS2WaferOnRobot")] public string DiFIMS2WaferOnRobot { get; set; } [XmlAttribute(AttributeName = "diTPEmo")] public string DiTPEmo { get; set; } [XmlAttribute(AttributeName = "diServoOn")] public string DiServoOn { get; set; } [XmlAttribute(AttributeName = "diTPStatus")] public string DiTPStatus { get; set; } [XmlAttribute(AttributeName = "diRobotPowerOn")] public string DiRobotPowerOn { get; set; } [XmlAttribute(AttributeName = "diAlarm")] public string DiAlarm { get; set; } [XmlAttribute(AttributeName = "diBlade1WaferPresent")] public string DiBlade1WaferPresent { get; set; } [XmlAttribute(AttributeName = "diBlade2WaferPresent")] public string DiBlade2WaferPresent { get; set; } [XmlAttribute(AttributeName = "diBlade3WaferPresent")] public string DiBlade3WaferPresent { get; set; } [XmlAttribute(AttributeName = "diBlade4WaferPresent")] public string DiBlade4WaferPresent { get; set; } [XmlAttribute(AttributeName = "diBlade5WaferPresent")] public string DiBlade5WaferPresent { get; set; } [XmlAttribute(AttributeName = "diZAxisHomePosition")] public string DiZAxisHomePosition { get; set; } [XmlAttribute(AttributeName = "diYAxisHomePosition")] public string DiYAxisHomePosition { get; set; } [XmlAttribute(AttributeName = "diVAxisHomePosition")] public string DiVAxisHomePosition { get; set; } [XmlAttribute(AttributeName = "diRunning")] public string DiRunning { get; set; } [XmlAttribute(AttributeName = "doAlarmReset")] public string DoAlarmReset { get; set; } [XmlAttribute(AttributeName = "doActionHold")] public string DoActionHold { get; set; } [XmlAttribute(AttributeName = "doTPEnable")] public string DoTPEnable { get; set; } [XmlAttribute(AttributeName = "doFIMS1Interlock")] public string DoFIMS1Interlock { get; set; } [XmlAttribute(AttributeName = "doFIMS2Interlock")] public string DoFIMS2Interlock { get; set; } [XmlAttribute(AttributeName = "doBoatRotateInterlock")] public string DoBoatRotateInterlock { get; set; } [XmlAttribute(AttributeName = "doBoatBottomInterlock")] public string DoBoatBottomInterlock { get; set; } [XmlAttribute(AttributeName = "scRootPath")] public string ScRootPath { get; set; } } [XmlRoot(ElementName = "IoWaferRobots")] public class IoWaferRobots { [XmlElement(ElementName = "IoWaferRobot")] public IoWaferRobotConfig IoWaferRobot { get; set; } [XmlAttribute(AttributeName = "classType")] public string ClassType { get; set; } [XmlAttribute(AttributeName = "assembly")] public string Assembly { get; set; } } [XmlRoot(ElementName = "IoCarrierRobot")] public class IoCarrierRobotConfig { [XmlAttribute(AttributeName = "id")] public string DeviceName { get; set; } [XmlAttribute(AttributeName = "display")] public string Display { get; set; } [XmlAttribute(AttributeName = "schematicId")] public string SchematicId { get; set; } [XmlAttribute(AttributeName = "unit")] public string Unit { get; set; } [XmlAttribute(AttributeName = "diInFIMS1")] public string DiInFIMS1 { get; set; } [XmlAttribute(AttributeName = "diInFIMS2")] public string DiInFIMS2 { get; set; } [XmlAttribute(AttributeName = "diInStockerLayer1")] public string DiInStockerLayer1 { get; set; } [XmlAttribute(AttributeName = "diInStockerLayer2")] public string DiInStockerLayer2 { get; set; } [XmlAttribute(AttributeName = "diInStockerLayer3")] public string DiInStockerLayer3 { get; set; } [XmlAttribute(AttributeName = "diInStockerLayer4")] public string DiInStockerLayer4 { get; set; } [XmlAttribute(AttributeName = "diTPEmo")] public string DiTPEmo { get; set; } [XmlAttribute(AttributeName = "diServoOn")] public string DiServoOn { get; set; } [XmlAttribute(AttributeName = "diTPStatus")] public string DiTPStatus { get; set; } [XmlAttribute(AttributeName = "diRobotPowerOn")] public string DiRobotPowerOn { get; set; } [XmlAttribute(AttributeName = "diAlarm")] public string DiAlarm { get; set; } [XmlAttribute(AttributeName = "diBlade1WaferPresent")] public string DiBlade1WaferPresent { get; set; } [XmlAttribute(AttributeName = "diZAxisHomePosition")] public string DiZAxisHomePosition { get; set; } [XmlAttribute(AttributeName = "diYAxisHomePosition")] public string DiYAxisHomePosition { get; set; } [XmlAttribute(AttributeName = "diRAxisHomePosition")] public string DiRAxisHomePosition { get; set; } [XmlAttribute(AttributeName = "diRunning")] public string DiRunning { get; set; } [XmlAttribute(AttributeName = "doAlarmReset")] public string DoAlarmReset { get; set; } [XmlAttribute(AttributeName = "doActionHold")] public string DoActionHold { get; set; } [XmlAttribute(AttributeName = "doTPEnable")] public string DoTPEnable { get; set; } [XmlAttribute(AttributeName = "doFIMS1Interlock")] public string DoFIMS1Interlock { get; set; } [XmlAttribute(AttributeName = "doFIMS2Interlock")] public string DoFIMS2Interlock { get; set; } [XmlAttribute(AttributeName = "doStockerInterlock")] public string DoStockerInterlock { get; set; } [XmlAttribute(AttributeName = "scRootPath")] public string ScRootPath { get; set; } } [XmlRoot(ElementName = "IoCarrierRobots")] public class IoCarrierRobots { [XmlElement(ElementName = "IoCarrierRobot")] public IoCarrierRobotConfig IoCarrierRobot { get; set; } [XmlAttribute(AttributeName = "classType")] public string ClassType { get; set; } [XmlAttribute(AttributeName = "assembly")] public string Assembly { get; set; } } [XmlRoot(ElementName = "IoRF")] public class IoRFConfig { [XmlAttribute(AttributeName = "id")] public string DeviceName { get; set; } [XmlAttribute(AttributeName = "display")] public string Display { get; set; } [XmlAttribute(AttributeName = "schematicId")] public string SchematicId { get; set; } [XmlAttribute(AttributeName = "unit")] public string Unit { get; set; } [XmlAttribute(AttributeName = "aiRelfectionPower")] public string AiRelfectionPower { get; set; } [XmlAttribute(AttributeName = "aiForwardPower")] public string AiForwardPower { get; set; } [XmlAttribute(AttributeName = "diPowerReached")] public string DiPowerReached { get; set; } [XmlAttribute(AttributeName = "diAlarm")] public string DiAlarm { get; set; } [XmlAttribute(AttributeName = "diRFOnStatus")] public string DiRFOnStatus { get; set; } [XmlAttribute(AttributeName = "doReset")] public string DoReset { get; set; } [XmlAttribute(AttributeName = "doOnOff")] public string DoOnOff { get; set; } [XmlAttribute(AttributeName = "doManualAnalog")] public string DoManualAnalog { get; set; } [XmlAttribute(AttributeName = "aoPower")] public string AoPower { get; set; } [XmlAttribute(AttributeName = "scRootPath")] public string ScRootPath { get; set; } } [XmlRoot(ElementName = "IoRFs")] public class IoRFs { [XmlElement(ElementName = "IoRF")] public IoRFConfig IoRF { get; set; } [XmlAttribute(AttributeName = "classType")] public string ClassType { get; set; } [XmlAttribute(AttributeName = "assembly")] public string Assembly { get; set; } } [XmlRoot(ElementName = "IoRFMatch")] public class IoRFMatchConfig { [XmlAttribute(AttributeName = "id")] public string DeviceName { get; set; } [XmlAttribute(AttributeName = "display")] public string Display { get; set; } [XmlAttribute(AttributeName = "schematicId")] public string SchematicId { get; set; } [XmlAttribute(AttributeName = "unit")] public string Unit { get; set; } [XmlAttribute(AttributeName = "aiVpp")] public string AiVpp { get; set; } [XmlAttribute(AttributeName = "aiVdc")] public string AiVdc { get; set; } [XmlAttribute(AttributeName = "aiLoadPosition")] public string AiLoadPosition { get; set; } [XmlAttribute(AttributeName = "aiPhase")] public string AiPhase { get; set; } [XmlAttribute(AttributeName = "doPresetMemory")] public string DoPresetMemory { get; set; } [XmlAttribute(AttributeName = "doPresetStart")] public string DoPresetStart { get; set; } [XmlAttribute(AttributeName = "doPresetCH0")] public string DoPresetCH0 { get; set; } [XmlAttribute(AttributeName = "doPresetCH1")] public string DoPresetCH1 { get; set; } [XmlAttribute(AttributeName = "doPresetCH2")] public string DoPresetCH2 { get; set; } [XmlAttribute(AttributeName = "doPresetCH3")] public string DoPresetCH3 { get; set; } [XmlAttribute(AttributeName = "doSafty")] public string DoSafty { get; set; } [XmlAttribute(AttributeName = "aoLoadPosition")] public string AoLoadPosition { get; set; } [XmlAttribute(AttributeName = "aoPhase")] public string AoPhase { get; set; } [XmlAttribute(AttributeName = "scRootPath")] public string ScRootPath { get; set; } } [XmlRoot(ElementName = "IoRFMatchs")] public class IoRFMatchs { [XmlElement(ElementName = "IoRFMatch")] public IoRFMatchConfig IoRFMatch { get; set; } [XmlAttribute(AttributeName = "classType")] public string ClassType { get; set; } [XmlAttribute(AttributeName = "assembly")] public string Assembly { get; set; } } [XmlRoot(ElementName = "IoAPC")] public class IoAPCConfig { [XmlAttribute(AttributeName = "id")] public string DeviceName { get; set; } [XmlAttribute(AttributeName = "display")] public string Display { get; set; } [XmlAttribute(AttributeName = "schematicId")] public string SchematicId { get; set; } [XmlAttribute(AttributeName = "unit")] public string Unit { get; set; } [XmlAttribute(AttributeName = "aiValueSensorInput1")] public string AiValueSensorInput1 { get; set; } [XmlAttribute(AttributeName = "aiValueSensorInput2")] public string AiValueSensorInput2 { get; set; } [XmlAttribute(AttributeName = "aiSelectController")] public string AiSelectController { get; set; } [XmlAttribute(AttributeName = "aiPositionActualValue")] public string AiPositionActualValue { get; set; } [XmlAttribute(AttributeName = "aiControlModeStatus")] public string AiControlModeStatus { get; set; } [XmlAttribute(AttributeName = "aiHomeStatus")] public string AiHomeStatus { get; set; } [XmlAttribute(AttributeName = "aiWarningStatus1")] public string AiWarningStatus1 { get; set; } [XmlAttribute(AttributeName = "aiWarningStatus2")] public string AiWarningStatus2 { get; set; } [XmlAttribute(AttributeName = "aiWarningStatus3")] public string AiWarningStatus3 { get; set; } [XmlAttribute(AttributeName = "aiWarningStatus4")] public string AiWarningStatus4 { get; set; } [XmlAttribute(AttributeName = "aiWarningStatus5")] public string AiWarningStatus5 { get; set; } [XmlAttribute(AttributeName = "aiWarningStatus6")] public string AiWarningStatus6 { get; set; } [XmlAttribute(AttributeName = "aiErrorStatus1")] public string AiErrorStatus1 { get; set; } [XmlAttribute(AttributeName = "aiErrorStatus2")] public string AiErrorStatus2 { get; set; } [XmlAttribute(AttributeName = "aiErrorStatus3")] public string AiErrorStatus3 { get; set; } [XmlAttribute(AttributeName = "aiErrorStatus4")] public string AiErrorStatus4 { get; set; } [XmlAttribute(AttributeName = "aiValveStatusThreshold")] public string AiValveStatusThreshold { get; set; } [XmlAttribute(AttributeName = "aiSlowVacuumModeSetting")] public string AiSlowVacuumModeSetting { get; set; } [XmlAttribute(AttributeName = "aiInterlock1")] public string AiInterlock1 { get; set; } [XmlAttribute(AttributeName = "aiInterlock2")] public string AiInterlock2 { get; set; } [XmlAttribute(AttributeName = "aiInterlock3")] public string AiInterlock3 { get; set; } [XmlAttribute(AttributeName = "aiInterlockConstantOfInterlock3")] public string AiInterlockConstantOfInterlock3 { get; set; } [XmlAttribute(AttributeName = "aiP1SensorOffsetSetting")] public string AiP1SensorOffsetSetting { get; set; } [XmlAttribute(AttributeName = "aiPosMonOffsetSetting")] public string AiPosMonOffsetSetting { get; set; } [XmlAttribute(AttributeName = "diP1ZeroOffsetOutRangeAlm")] public string DiP1ZeroOffsetOutRangeAlm { get; set; } [XmlAttribute(AttributeName = "diP1ZeroAdjOutRangeAlm")] public string DiP1ZeroAdjOutRangeAlm { get; set; } [XmlAttribute(AttributeName = "diP1SpanAdjOutRangeAlm")] public string DiP1SpanAdjOutRangeAlm { get; set; } [XmlAttribute(AttributeName = "diP2ZeroOffsetOutRangeAlm")] public string DiP2ZeroOffsetOutRangeAlm { get; set; } [XmlAttribute(AttributeName = "diP2ZeroAdjOutRangeAlm")] public string DiP2ZeroAdjOutRangeAlm { get; set; } [XmlAttribute(AttributeName = "diP2SpanAdjOutRangeAlm")] public string DiP2SpanAdjOutRangeAlm { get; set; } [XmlAttribute(AttributeName = "diP1PressCtrlInterlockAlm")] public string DiP1PressCtrlInterlockAlm { get; set; } [XmlAttribute(AttributeName = "diP2PressCtrlInterlockAlm")] public string DiP2PressCtrlInterlockAlm { get; set; } [XmlAttribute(AttributeName = "diValveOpenCtrlInterlockAlm")] public string DiValveOpenCtrlInterlockAlm { get; set; } [XmlAttribute(AttributeName = "diValveHoldCtrlInterlockAlm")] public string DiValveHoldCtrlInterlockAlm { get; set; } [XmlAttribute(AttributeName = "diValveCloseInterlockAlm")] public string DiValveCloseInterlockAlm { get; set; } [XmlAttribute(AttributeName = "diAutoTeachingInterlockAlm")] public string DiAutoTeachingInterlockAlm { get; set; } [XmlAttribute(AttributeName = "diP1DisconnectionAlm")] public string DiP1DisconnectionAlm { get; set; } [XmlAttribute(AttributeName = "diP2DisconnectionAlm")] public string DiP2DisconnectionAlm { get; set; } [XmlAttribute(AttributeName = "diPumpStopInterlockAlm")] public string DiPumpStopInterlockAlm { get; set; } [XmlAttribute(AttributeName = "diAutoTeachingErr1Alm")] public string DiAutoTeachingErr1Alm { get; set; } [XmlAttribute(AttributeName = "diAutoTeachingErr2Alm")] public string DiAutoTeachingErr2Alm { get; set; } [XmlAttribute(AttributeName = "doValve")] public string DoValve { get; set; } [XmlAttribute(AttributeName = "doVGUnit")] public string DoVGUnit { get; set; } [XmlAttribute(AttributeName = "doAoDataReadSysConfig")] public string DoAoDataReadSysConfig { get; set; } [XmlAttribute(AttributeName = "doAoDataWriteSysConfig")] public string DoAoDataWriteSysConfig { get; set; } [XmlAttribute(AttributeName = "doAoDataReadCusConfig")] public string DoAoDataReadCusConfig { get; set; } [XmlAttribute(AttributeName = "doAoDataWriteCusConfig")] public string DoAoDataWriteCusConfig { get; set; } [XmlAttribute(AttributeName = "aoZeroResetP1")] public string AoZeroResetP1 { get; set; } [XmlAttribute(AttributeName = "aoZeroAdjustP1")] public string AoZeroAdjustP1 { get; set; } [XmlAttribute(AttributeName = "aoSpanAdjustP1")] public string AoSpanAdjustP1 { get; set; } [XmlAttribute(AttributeName = "aoZeroResetP2")] public string AoZeroResetP2 { get; set; } [XmlAttribute(AttributeName = "aoZeroAdjustP2")] public string AoZeroAdjustP2 { get; set; } [XmlAttribute(AttributeName = "aoSpanAdjustP2")] public string AoSpanAdjustP2 { get; set; } [XmlAttribute(AttributeName = "aoSlowVacuumTargetPressure")] public string AoSlowVacuumTargetPressure { get; set; } [XmlAttribute(AttributeName = "aoValveStatusThreshold")] public string AoValveStatusThreshold { get; set; } [XmlAttribute(AttributeName = "aoForbidInterlockOutbreak")] public string AoForbidInterlockOutbreak { get; set; } [XmlAttribute(AttributeName = "aoSlowVacuumModeSetting")] public string AoSlowVacuumModeSetting { get; set; } [XmlAttribute(AttributeName = "aoInterlock1")] public string AoInterlock1 { get; set; } [XmlAttribute(AttributeName = "aoInterlock2")] public string AoInterlock2 { get; set; } [XmlAttribute(AttributeName = "aoInterlock3")] public string AoInterlock3 { get; set; } [XmlAttribute(AttributeName = "aoInterlockConstantOfInterlock3")] public string AoInterlockConstantOfInterlock3 { get; set; } [XmlAttribute(AttributeName = "aoP1SensorOffsetSetting")] public string AoP1SensorOffsetSetting { get; set; } [XmlAttribute(AttributeName = "aoPosMonOffsetSetting")] public string AoPosMonOffsetSetting { get; set; } [XmlAttribute(AttributeName = "aoSensorAdjustReset")] public string AoSensorAdjustReset { get; set; } [XmlAttribute(AttributeName = "aoSlowVacuumRate")] public string AoSlowVacuumRate { get; set; } [XmlAttribute(AttributeName = "aoSlowVacuumP")] public string AoSlowVacuumP { get; set; } [XmlAttribute(AttributeName = "aoSlowVacuumI")] public string AoSlowVacuumI { get; set; } [XmlAttribute(AttributeName = "aoSlowVacuumD")] public string AoSlowVacuumD { get; set; } [XmlAttribute(AttributeName = "aoSlowVacuumA")] public string AoSlowVacuumA { get; set; } [XmlAttribute(AttributeName = "aoControllerModeSelect")] public string AoControllerModeSelect { get; set; } [XmlAttribute(AttributeName = "aoSpecifyTargetVacuumPressureControl")] public string AoSpecifyTargetVacuumPressureControl { get; set; } [XmlAttribute(AttributeName = "aoSpecifyTargetOpeningForValveOpeningControl")] public string AoSpecifyTargetOpeningForValveOpeningControl { get; set; } [XmlAttribute(AttributeName = "aoSpecifyControlMode")] public string AoSpecifyControlMode { get; set; } [XmlAttribute(AttributeName = "aoRangeUpperLimitSensorInput")] public string AoRangeUpperLimitSensorInput { get; set; } [XmlAttribute(AttributeName = "aoController1")] public string AoController1 { get; set; } [XmlAttribute(AttributeName = "aoController1P")] public string AoController1P { get; set; } [XmlAttribute(AttributeName = "aoController1I")] public string AoController1I { get; set; } [XmlAttribute(AttributeName = "aoController1D")] public string AoController1D { get; set; } [XmlAttribute(AttributeName = "aoController1A")] public string AoController1A { get; set; } [XmlAttribute(AttributeName = "aoController1CH")] public string AoController1CH { get; set; } [XmlAttribute(AttributeName = "aoController1CL")] public string AoController1CL { get; set; } [XmlAttribute(AttributeName = "aoController1Offset")] public string AoController1Offset { get; set; } [XmlAttribute(AttributeName = "aoController2")] public string AoController2 { get; set; } [XmlAttribute(AttributeName = "aoController2P")] public string AoController2P { get; set; } [XmlAttribute(AttributeName = "aoController2I")] public string AoController2I { get; set; } [XmlAttribute(AttributeName = "aoController2D")] public string AoController2D { get; set; } [XmlAttribute(AttributeName = "aoController2A")] public string AoController2A { get; set; } [XmlAttribute(AttributeName = "aoController2CH")] public string AoController2CH { get; set; } [XmlAttribute(AttributeName = "aoController2CL")] public string AoController2CL { get; set; } [XmlAttribute(AttributeName = "aoController2Offset")] public string AoController2Offset { get; set; } [XmlAttribute(AttributeName = "aoController3")] public string AoController3 { get; set; } [XmlAttribute(AttributeName = "aoController3P")] public string AoController3P { get; set; } [XmlAttribute(AttributeName = "aoController3I")] public string AoController3I { get; set; } [XmlAttribute(AttributeName = "aoController3D")] public string AoController3D { get; set; } [XmlAttribute(AttributeName = "aoController3A")] public string AoController3A { get; set; } [XmlAttribute(AttributeName = "aoController3CH")] public string AoController3CH { get; set; } [XmlAttribute(AttributeName = "aoController3CL")] public string AoController3CL { get; set; } [XmlAttribute(AttributeName = "aoController3Offset")] public string AoController3Offset { get; set; } [XmlAttribute(AttributeName = "aoController4")] public string AoController4 { get; set; } [XmlAttribute(AttributeName = "aoController4P")] public string AoController4P { get; set; } [XmlAttribute(AttributeName = "aoController4I")] public string AoController4I { get; set; } [XmlAttribute(AttributeName = "aoController4D")] public string AoController4D { get; set; } [XmlAttribute(AttributeName = "aoController4A")] public string AoController4A { get; set; } [XmlAttribute(AttributeName = "aoController4CH")] public string AoController4CH { get; set; } [XmlAttribute(AttributeName = "aoController4CL")] public string AoController4CL { get; set; } [XmlAttribute(AttributeName = "aoController4Offset")] public string AoController4Offset { get; set; } [XmlAttribute(AttributeName = "aoController5")] public string AoController5 { get; set; } [XmlAttribute(AttributeName = "aoController5P")] public string AoController5P { get; set; } [XmlAttribute(AttributeName = "aoController5I")] public string AoController5I { get; set; } [XmlAttribute(AttributeName = "aoController5D")] public string AoController5D { get; set; } [XmlAttribute(AttributeName = "aoController5A")] public string AoController5A { get; set; } [XmlAttribute(AttributeName = "aoController5CH")] public string AoController5CH { get; set; } [XmlAttribute(AttributeName = "aoController5CL")] public string AoController5CL { get; set; } [XmlAttribute(AttributeName = "aoController5Offset")] public string AoController5Offset { get; set; } [XmlAttribute(AttributeName = "aoController6")] public string AoController6 { get; set; } [XmlAttribute(AttributeName = "aoController6P")] public string AoController6P { get; set; } [XmlAttribute(AttributeName = "aoController6I")] public string AoController6I { get; set; } [XmlAttribute(AttributeName = "aoController6D")] public string AoController6D { get; set; } [XmlAttribute(AttributeName = "aoController6A")] public string AoController6A { get; set; } [XmlAttribute(AttributeName = "aoController6CH")] public string AoController6CH { get; set; } [XmlAttribute(AttributeName = "aoController6CL")] public string AoController6CL { get; set; } [XmlAttribute(AttributeName = "aoController6Offset")] public string AoController6Offset { get; set; } [XmlAttribute(AttributeName = "aoController7")] public string AoController7 { get; set; } [XmlAttribute(AttributeName = "aoController7P")] public string AoController7P { get; set; } [XmlAttribute(AttributeName = "aoController7I")] public string AoController7I { get; set; } [XmlAttribute(AttributeName = "aoController7D")] public string AoController7D { get; set; } [XmlAttribute(AttributeName = "aoController7A")] public string AoController7A { get; set; } [XmlAttribute(AttributeName = "aoController7CH")] public string AoController7CH { get; set; } [XmlAttribute(AttributeName = "aoController7CL")] public string AoController7CL { get; set; } [XmlAttribute(AttributeName = "aoController7Offset")] public string AoController7Offset { get; set; } [XmlAttribute(AttributeName = "aoController8")] public string AoController8 { get; set; } [XmlAttribute(AttributeName = "aoController8P")] public string AoController8P { get; set; } [XmlAttribute(AttributeName = "aoController8I")] public string AoController8I { get; set; } [XmlAttribute(AttributeName = "aoController8D")] public string AoController8D { get; set; } [XmlAttribute(AttributeName = "aoController8A")] public string AoController8A { get; set; } [XmlAttribute(AttributeName = "aoController8CH")] public string AoController8CH { get; set; } [XmlAttribute(AttributeName = "aoController8CL")] public string AoController8CL { get; set; } [XmlAttribute(AttributeName = "aoController8Offset")] public string AoController8Offset { get; set; } [XmlAttribute(AttributeName = "aoController9")] public string AoController9 { get; set; } [XmlAttribute(AttributeName = "aoController9P")] public string AoController9P { get; set; } [XmlAttribute(AttributeName = "aoController9I")] public string AoController9I { get; set; } [XmlAttribute(AttributeName = "aoController9D")] public string AoController9D { get; set; } [XmlAttribute(AttributeName = "aoController9A")] public string AoController9A { get; set; } [XmlAttribute(AttributeName = "aoController9CH")] public string AoController9CH { get; set; } [XmlAttribute(AttributeName = "aoController9CL")] public string AoController9CL { get; set; } [XmlAttribute(AttributeName = "aoController9Offset")] public string AoController9Offset { get; set; } [XmlAttribute(AttributeName = "aoController10")] public string AoController10 { get; set; } [XmlAttribute(AttributeName = "aoController10P")] public string AoController10P { get; set; } [XmlAttribute(AttributeName = "aoController10I")] public string AoController10I { get; set; } [XmlAttribute(AttributeName = "aoController10D")] public string AoController10D { get; set; } [XmlAttribute(AttributeName = "aoController10A")] public string AoController10A { get; set; } [XmlAttribute(AttributeName = "aoController10CH")] public string AoController10CH { get; set; } [XmlAttribute(AttributeName = "aoController10CL")] public string AoController10CL { get; set; } [XmlAttribute(AttributeName = "aoController10Offset")] public string AoController10Offset { get; set; } [XmlAttribute(AttributeName = "scRootPath")] public string ScRootPath { get; set; } [XmlAttribute(AttributeName = "aioType")] public string AioType { get; set; } } [XmlRoot(ElementName = "IoAPCs")] public class IoAPCs { [XmlElement(ElementName = "IoAPC")] public List IoAPC { get; set; } [XmlAttribute(AttributeName = "classType")] public string ClassType { get; set; } [XmlAttribute(AttributeName = "assembly")] public string Assembly { get; set; } } [XmlRoot(ElementName = "IoPressureMeter")] public class IoPressureMeterConfig { [XmlAttribute(AttributeName = "id")] public string DeviceName { get; set; } [XmlAttribute(AttributeName = "display")] public string Display { get; set; } [XmlAttribute(AttributeName = "schematicId")] public string SchematicId { get; set; } [XmlAttribute(AttributeName = "unit")] public string Unit { get; set; } [XmlAttribute(AttributeName = "aiFeedback")] public string AiFeedback { get; set; } [XmlAttribute(AttributeName = "physical")] public string Physical { get; set; } [XmlAttribute(AttributeName = "scale")] public string Scale { get; set; } [XmlAttribute(AttributeName = "aioType")] public string AioType { get; set; } } [XmlRoot(ElementName = "IoPressureMeters")] public class IoPressureMeters { [XmlElement(ElementName = "IoPressureMeter")] public List IoPressureMeter { get; set; } [XmlAttribute(AttributeName = "classType")] public string ClassType { get; set; } [XmlAttribute(AttributeName = "assembly")] public string Assembly { get; set; } } [XmlRoot(ElementName = "IoAlarmSignal")] public class IoAlarmSignalConfig { [XmlAttribute(AttributeName = "id")] public string DeviceName { get; set; } [XmlAttribute(AttributeName = "diSignalsplay")] public string DiSignalsplay { get; set; } [XmlAttribute(AttributeName = "diSignal")] public string DiSignal { get; set; } [XmlAttribute(AttributeName = "alarmTrigValue")] public bool AlarmTrigValue { get; set; } [XmlAttribute(AttributeName = "delay")] public float Delay { get; set; } [XmlAttribute(AttributeName = "aiSignal")] public string AiSignal { get; set; } [XmlAttribute(AttributeName = "condition")] public string Condition { get; set; } [XmlAttribute(AttributeName = "limitValue")] public float LimitValue { get; set; } } [XmlRoot(ElementName = "IoAlarmSignals")] public class IoAlarmSignals { [XmlElement(ElementName = "IoAlarmSignal")] public List IoAlarmSignal { get; set; } [XmlAttribute(AttributeName = "classType")] public string ClassType { get; set; } [XmlAttribute(AttributeName = "assembly")] public string Assembly { get; set; } } [XmlRoot(ElementName = "IoSensor")] public class IoSensorConfig { [XmlAttribute(AttributeName = "id")] public string DeviceName { get; set; } [XmlAttribute(AttributeName = "display")] public string Display { get; set; } [XmlAttribute(AttributeName = "di")] public string Di { get; set; } } [XmlRoot(ElementName = "IoSensors")] public class IoSensors { [XmlElement(ElementName = "IoSensor")] public List IoSensor { get; set; } [XmlAttribute(AttributeName = "classType")] public string ClassType { get; set; } [XmlAttribute(AttributeName = "assembly")] public string Assembly { get; set; } } [XmlRoot(ElementName = "IoTrigger")] public class IoTriggerConfig { [XmlAttribute(AttributeName = "id")] public string DeviceName { get; set; } [XmlAttribute(AttributeName = "display")] public string Display { get; set; } [XmlAttribute(AttributeName = "schematicId")] public string SchematicId { get; set; } [XmlAttribute(AttributeName = "unit")] public string Unit { get; set; } [XmlAttribute(AttributeName = "doTrigger")] public string DoTrigger { get; set; } [XmlAttribute(AttributeName = "diFeedback")] public string DiFeedback { get; set; } [XmlAttribute(AttributeName = "aoTrigger")] public string AoTrigger { get; set; } } [XmlRoot(ElementName = "IoTriggers")] public class IoTriggers { [XmlElement(ElementName = "IoTrigger")] public List IoTrigger { get; set; } [XmlAttribute(AttributeName = "classType")] public string ClassType { get; set; } [XmlAttribute(AttributeName = "assembly")] public string Assembly { get; set; } } [XmlRoot(ElementName = "IoSignalTower")] public class IoSignalTowerConfig { [XmlAttribute(AttributeName = "module")] public string Module { get; set; } [XmlAttribute(AttributeName = "id")] public string DeviceName { get; set; } [XmlAttribute(AttributeName = "display")] public string Display { get; set; } [XmlAttribute(AttributeName = "schematicId")] public string SchematicId { get; set; } [XmlAttribute(AttributeName = "doRed")] public string DoRed { get; set; } [XmlAttribute(AttributeName = "doYellow")] public string DoYellow { get; set; } [XmlAttribute(AttributeName = "doGreen")] public string DoGreen { get; set; } [XmlAttribute(AttributeName = "doBlue")] public string DoBlue { get; set; } [XmlAttribute(AttributeName = "doBuzzer1")] public string DoBuzzer1 { get; set; } } [XmlRoot(ElementName = "IoSignalTowers")] public class IoSignalTowers { [XmlElement(ElementName = "IoSignalTower")] public List IoSignalTower { get; set; } [XmlAttribute(AttributeName = "classType")] public string ClassType { get; set; } [XmlAttribute(AttributeName = "assembly")] public string Assembly { get; set; } } [XmlRoot(ElementName = "IoHeaterBand")] public class IoHeaterBandConfig { [XmlAttribute(AttributeName = "id")] public string DeviceName { get; set; } [XmlAttribute(AttributeName = "display")] public string Display { get; set; } [XmlAttribute(AttributeName = "schematicId")] public string SchematicId { get; set; } [XmlAttribute(AttributeName = "unit")] public string Unit { get; set; } [XmlAttribute(AttributeName = "module")] public string Module { get; set; } [XmlAttribute(AttributeName = "aiPV")] public string AiPV { get; set; } [XmlAttribute(AttributeName = "aiMV")] public string AiMV { get; set; } [XmlAttribute(AttributeName = "aiControlOutput")] public string AiControlOutput { get; set; } [XmlAttribute(AttributeName = "aiErrorID")] public string AiErrorID { get; set; } [XmlAttribute(AttributeName = "aiPID_P")] public string AiPIDP { get; set; } [XmlAttribute(AttributeName = "aiPID_I")] public string AiPIDI { get; set; } [XmlAttribute(AttributeName = "aiPID_D")] public string AiPIDD { get; set; } [XmlAttribute(AttributeName = "doEnable")] public string DoEnable { get; set; } [XmlAttribute(AttributeName = "doManualControl")] public string DoManualControl { get; set; } [XmlAttribute(AttributeName = "doAutoTuning")] public string DoAutoTuning { get; set; } [XmlAttribute(AttributeName = "diControlDoing")] public string DiControlDoing { get; set; } [XmlAttribute(AttributeName = "diAutoTuningDoing")] public string DiAutoTuningDoing { get; set; } [XmlAttribute(AttributeName = "diAutoTuningDone")] public string DiAutoTuningDone { get; set; } [XmlAttribute(AttributeName = "diPIDControlError")] public string DiPIDControlError { get; set; } [XmlAttribute(AttributeName = "diTimePropControlError")] public string DiTimePropControlError { get; set; } [XmlAttribute(AttributeName = "aoPID_P")] public string AoPIDP { get; set; } [XmlAttribute(AttributeName = "aoPID_I")] public string AoPIDI { get; set; } [XmlAttribute(AttributeName = "aoPID_D")] public string AoPIDD { get; set; } [XmlAttribute(AttributeName = "aoManualOutput")] public string AoManualOutput { get; set; } [XmlAttribute(AttributeName = "aoControlPeriodTime")] public string AoControlPeriodTime { get; set; } [XmlAttribute(AttributeName = "aoSetPoint")] public string AoSetPoint { get; set; } [XmlAttribute(AttributeName = "aioType")] public string AioType { get; set; } [XmlAttribute(AttributeName = "aiTemperatureSVFeedback")] public string AiTemperatureSVFeedback { get; set; } [XmlAttribute(AttributeName = "aiEnableIn")] public string AiEnableIn { get; set; } [XmlAttribute(AttributeName = "aiAutotuneActivate")] public string AiAutotuneActivate { get; set; } [XmlAttribute(AttributeName = "aiAlarmHigher")] public string AiAlarmHigher { get; set; } [XmlAttribute(AttributeName = "aiUpRate")] public string AiUpRate { get; set; } [XmlAttribute(AttributeName = "aiDownRate")] public string AiDownRate { get; set; } [XmlAttribute(AttributeName = "aiAlarmLower")] public string AiAlarmLower { get; set; } [XmlAttribute(AttributeName = "aoUpRate")] public string AoUpRate { get; set; } [XmlAttribute(AttributeName = "aoDownRate")] public string AoDownRate { get; set; } [XmlAttribute(AttributeName = "aoEnableIn")] public string AoEnableIn { get; set; } [XmlAttribute(AttributeName = "aoAutotuneActivate")] public string AoAutotuneActivate { get; set; } [XmlAttribute(AttributeName = "aoAlarmHigher")] public string AoAlarmHigher { get; set; } [XmlAttribute(AttributeName = "aoAlarmLower")] public string AoAlarmLower { get; set; } } [XmlRoot(ElementName = "IoHeaterBands")] public class IoHeaterBands { [XmlElement(ElementName = "IoHeaterBand")] public List IoHeaterBand { get; set; } [XmlAttribute(AttributeName = "classType")] public string ClassType { get; set; } [XmlAttribute(AttributeName = "assembly")] public string Assembly { get; set; } } [XmlRoot(ElementName = "IoMFC")] public class IoMFCConfig { [XmlAttribute(AttributeName = "id")] public string DeviceName { get; set; } [XmlAttribute(AttributeName = "display")] public string Display { get; set; } [XmlAttribute(AttributeName = "schematicId")] public string SchematicId { get; set; } [XmlAttribute(AttributeName = "unit")] public string Unit { get; set; } [XmlAttribute(AttributeName = "aiFlow")] public string AiFlow { get; set; } [XmlAttribute(AttributeName = "aoFlow")] public string AoFlow { get; set; } [XmlAttribute(AttributeName = "aoRamp")] public string AoRamp { get; set; } [XmlAttribute(AttributeName = "aioType")] public string AioType { get; set; } [XmlAttribute(AttributeName = "scBasePath")] public string ScBasePath { get; set; } } [XmlRoot(ElementName = "IoMFCs")] public class IoMFCs { [XmlElement(ElementName = "IoMFC")] public List IoMFC { get; set; } [XmlAttribute(AttributeName = "classType")] public string ClassType { get; set; } [XmlAttribute(AttributeName = "assembly")] public string Assembly { get; set; } } [XmlRoot(ElementName = "IoMFM")] public class IoMFMConfig { [XmlAttribute(AttributeName = "id")] public string DeviceName { get; set; } [XmlAttribute(AttributeName = "display")] public string Display { get; set; } [XmlAttribute(AttributeName = "schematicId")] public string SchematicId { get; set; } [XmlAttribute(AttributeName = "unit")] public string Unit { get; set; } [XmlAttribute(AttributeName = "aiFlow")] public string AiFlow { get; set; } [XmlAttribute(AttributeName = "aoFlow")] public string AoFlow { get; set; } [XmlAttribute(AttributeName = "aioType")] public string AioType { get; set; } [XmlAttribute(AttributeName = "scBasePath")] public string ScBasePath { get; set; } } [XmlRoot(ElementName = "IoMFMs")] public class IoMFMs { [XmlElement(ElementName = "IoMFM")] public List IoMFM { get; set; } [XmlAttribute(AttributeName = "classType")] public string ClassType { get; set; } [XmlAttribute(AttributeName = "assembly")] public string Assembly { get; set; } } [XmlRoot(ElementName = "IoFFU")] public class IoFFUConfig { [XmlAttribute(AttributeName = "id")] public string DeviceName { get; set; } [XmlAttribute(AttributeName = "display")] public string Display { get; set; } [XmlAttribute(AttributeName = "schematicId")] public string SchematicId { get; set; } [XmlAttribute(AttributeName = "unit")] public string Unit { get; set; } [XmlAttribute(AttributeName = "diDataWriteDone")] public string DiDataWriteDone { get; set; } [XmlAttribute(AttributeName = "diDataWriteError")] public string DiDataWriteError { get; set; } [XmlAttribute(AttributeName = "diDataReadError")] public string DiDataReadError { get; set; } [XmlAttribute(AttributeName = "aiGroupNumber")] public string AiGroupNumber { get; set; } [XmlAttribute(AttributeName = "aiAddressNumber")] public string AiAddressNumber { get; set; } [XmlAttribute(AttributeName = "aiSwitch")] public string AiSwitch { get; set; } [XmlAttribute(AttributeName = "aiSetSpeed")] public string AiSetSpeed { get; set; } [XmlAttribute(AttributeName = "aiMaxSpeed")] public string AiMaxSpeed { get; set; } [XmlAttribute(AttributeName = "aiReset")] public string AiReset { get; set; } [XmlAttribute(AttributeName = "aiErrorTimer")] public string AiErrorTimer { get; set; } [XmlAttribute(AttributeName = "aiCurrentSpeed")] public string AiCurrentSpeed { get; set; } [XmlAttribute(AttributeName = "aiVoltage")] public string AiVoltage { get; set; } [XmlAttribute(AttributeName = "aiCurrent")] public string AiCurrent { get; set; } [XmlAttribute(AttributeName = "aoSwitch")] public string AoSwitch { get; set; } [XmlAttribute(AttributeName = "aoSetSpeed")] public string AoSetSpeed { get; set; } [XmlAttribute(AttributeName = "aoReset")] public string AoReset { get; set; } [XmlAttribute(AttributeName = "doEnable")] public string DoEnable { get; set; } [XmlAttribute(AttributeName = "doWriteCommand")] public string DoWriteCommand { get; set; } [XmlAttribute(AttributeName = "aioType")] public string AioType { get; set; } } [XmlRoot(ElementName = "IoFFUs")] public class IoFFUs { [XmlElement(ElementName = "IoFFU")] public List IoFFU { get; set; } [XmlAttribute(AttributeName = "classType")] public string ClassType { get; set; } [XmlAttribute(AttributeName = "assembly")] public string Assembly { get; set; } } [XmlRoot(ElementName = "IoValve")] public class IoValveConfig { [XmlAttribute(AttributeName = "id")] public string DeviceName { get; set; } [XmlAttribute(AttributeName = "diOpen")] public string DiOpen { get; set; } [XmlAttribute(AttributeName = "doOpen")] public string DoOpen { get; set; } [XmlAttribute(AttributeName = "display")] public string Display { get; set; } [XmlAttribute(AttributeName = "ILKDi")] public string DiILK { get; set; } [XmlAttribute(AttributeName = "schematicId")] public string SchematicId { get; set; } [XmlAttribute(AttributeName = "isNc")] public bool IsNc { get; set; } [XmlAttribute(AttributeName = "isDefaultOpen")] public bool IsDefaultOpen { get; set; } [XmlAttribute(AttributeName = "diOpenSensor")] public string DiOpenSensor { get; set; } [XmlAttribute(AttributeName = "diCloseSensor")] public string DiCloseSensor { get; set; } [XmlAttribute(AttributeName = "doClose")] public string DoClose { get; set; } } [XmlRoot(ElementName = "IoValves")] public class IoValves { [XmlElement(ElementName = "IoValve")] public List IoValve { get; set; } [XmlAttribute(AttributeName = "classType")] public string ClassType { get; set; } [XmlAttribute(AttributeName = "assembly")] public string Assembly { get; set; } } [XmlRoot(ElementName = "DeviceModelDefine")] public class PMDeviceConfig { [XmlElement(ElementName = "IoLPs")] public IoLPs IoLPs { get; set; } [XmlElement(ElementName = "IoFIMSs")] public IoFIMSs IoFIMSs { get; set; } [XmlElement(ElementName = "IoDoors")] public IoDoors IoDoors { get; set; } [XmlElement(ElementName = "IoShutters")] public IoShutters IoShutters { get; set; } [XmlElement(ElementName = "IoBufferMotors")] public IoBufferMotors IoBufferMotors { get; set; } [XmlElement(ElementName = "IoFurnaceMotors")] public IoFurnaceMotors IoFurnaceMotors { get; set; } [XmlElement(ElementName = "IoWaferRobots")] public IoWaferRobots IoWaferRobots { get; set; } [XmlElement(ElementName = "IoCarrierRobots")] public IoCarrierRobots IoCarrierRobots { get; set; } [XmlElement(ElementName = "IoRFs")] public IoRFs IoRFs { get; set; } [XmlElement(ElementName = "IoRFMatchs")] public IoRFMatchs IoRFMatchs { get; set; } [XmlElement(ElementName = "IoAPCs")] public IoAPCs IoAPCs { get; set; } [XmlElement(ElementName = "IoPressureMeters")] public IoPressureMeters IoPressureMeters { get; set; } [XmlElement(ElementName = "IoAlarmSignals")] public IoAlarmSignals IoAlarmSignals { get; set; } [XmlElement(ElementName = "IoSensors")] public IoSensors IoSensors { get; set; } [XmlElement(ElementName = "IoTriggers")] public IoTriggers IoTriggers { get; set; } [XmlElement(ElementName = "IoSignalTowers")] public IoSignalTowers IoSignalTowers { get; set; } [XmlElement(ElementName = "IoHeaterBands")] public IoHeaterBands IoHeaterBands { get; set; } [XmlElement(ElementName = "IoMFCs")] public IoMFCs IoMFCs { get; set; } [XmlElement(ElementName = "IoMFMs")] public IoMFMs IoMFMs { get; set; } [XmlElement(ElementName = "IoFFUs")] public IoFFUs IoFFUs { get; set; } [XmlElement(ElementName = "IoValves")] public IoValves IoValves { get; set; } [XmlAttribute(AttributeName = "type")] public string Type { get; set; } } }