PMN2Purge.cs 17 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Device.Unit;
  4. using Aitex.Core.RT.Log;
  5. using Aitex.Core.RT.SCCore;
  6. using Aitex.Core.Util;
  7. using DocumentFormat.OpenXml.Packaging;
  8. using FurnaceRT.Devices;
  9. using FurnaceRT.Equipments.PMs.Devices;
  10. using FurnaceRT.Extraction;
  11. using MECF.Framework.Common.CommonData.SorterDefines;
  12. using MECF.Framework.Common.Equipment;
  13. using System;
  14. using System.Collections.Generic;
  15. using System.Diagnostics;
  16. namespace FurnaceRT.Equipments.PMs
  17. {
  18. /// <summary>
  19. /// 分布类 定义N2Purge的执行逻辑
  20. /// </summary>
  21. public partial class PMModule
  22. {
  23. private R_TRIG _trigN2UpRD = new R_TRIG();
  24. private R_TRIG _trigN2DownRD = new R_TRIG();
  25. private R_TRIG _trigN2AirUpRD = new R_TRIG();
  26. private R_TRIG _trigN2AirDownRD = new R_TRIG();
  27. private R_TRIG _trigSelectN2PurgeModeD = new R_TRIG();
  28. private Dictionary<string, Tuple<R_TRIG, List<Tuple<IDevice, string>>>> _n2PurgeSequenceAction;
  29. private Dictionary<string, Func<bool>> _n2PurgeSequenceStatus;
  30. private Dictionary<string, R_TRIG> _rTrigDict;
  31. private N2PurgeModeEnum _N2PurgeMode = N2PurgeModeEnum.Auto;
  32. private double _n2PurgeData = 20;
  33. private double _n2ToAirData = 185000;
  34. private double _stabilityTime = 30;
  35. private Dictionary<string, Stopwatch> _allTimeDict = new Dictionary<string, Stopwatch>();
  36. private void InitN2PurgeData()
  37. {
  38. DATA.Subscribe($"{Module}.O2DensityData", () => GetO2DensityData(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  39. DATA.Subscribe($"{Module}.CheckO2Location", () => GetCheckO2Location(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  40. DATA.Subscribe($"{Module}.O2SetCheckSetPoint", () => GetO2SetCheckSetPoint(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  41. DATA.Subscribe($"{Module}.N2PurgeMode", () => SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "");
  42. }
  43. private void InitN2PurgeConfigData()
  44. {
  45. _n2PurgeData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2PurgeData") : 20;
  46. _n2ToAirData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2ToAirData") : 185000;
  47. _stabilityTime = SC.ContainsItem($"System.StabilityTime") ? SC.GetValue<double>("System.StabilityTime") : 30;
  48. _n2PurgeSequenceAction = ExtractionMethods.GetN2PurgeSequenceAction();
  49. _n2PurgeSequenceStatus = new Dictionary<string, Func<bool>>()
  50. {
  51. {"N2PurgeAIRTo20PPM",()=> GetN2PurgeAIRTo20PPMStatus()},
  52. {"N2PurgeUnder20PPM",()=> GetN2PurgeUnder20PPMStatus()},
  53. {"AIR",()=> GetN2PurgeAIRStatus()},
  54. {"DoorOpen",()=> GetN2PurgeDoorOpenStatus()},
  55. {"Foup1",()=> GetN2PurgeFoup1Status()},
  56. {"Foup2",()=> GetN2PurgeFoup2Status()},
  57. {N2PurgeModeEnum.Manual_phase1.ToString(),()=> GetN2PurgePhase1() },
  58. {N2PurgeModeEnum.Manual_phase2.ToString(),()=> GetN2PurgePhase2()},
  59. {N2PurgeModeEnum.Manual_phase3.ToString(),()=> GetN2PurgePhase3() },
  60. {N2PurgeModeEnum.Manual_phase4.ToString(),()=> GetN2PurgePhase4() },
  61. };
  62. _allTimeDict = new Dictionary<string, Stopwatch>()
  63. {
  64. {N2PurgeModeEnum.Manual_phase1.ToString(),new Stopwatch() },
  65. {N2PurgeModeEnum.Manual_phase2.ToString(),new Stopwatch()},
  66. {N2PurgeModeEnum.Manual_phase3.ToString(),new Stopwatch()},
  67. {N2PurgeModeEnum.Manual_phase4.ToString(),new Stopwatch() }
  68. };
  69. _rTrigDict = new Dictionary<string, R_TRIG>();
  70. }
  71. private void MonitorN2Purge()
  72. {
  73. var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
  74. if (string.IsNullOrEmpty(selectN2PurgeMode))
  75. {
  76. return;
  77. }
  78. SetN2PurgeModeAction(selectN2PurgeMode);
  79. }
  80. private void SetN2PurgeModeAction(string selectN2PurgeMode)
  81. {
  82. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), selectN2PurgeMode);
  83. switch (_N2PurgeMode)
  84. {
  85. case N2PurgeModeEnum.Auto:
  86. // 自动模式下的操作
  87. break;
  88. case N2PurgeModeEnum.ManualMode:
  89. break;
  90. case N2PurgeModeEnum.N2PurgeMode:
  91. ProcessPhase(_trigN2UpRD, N2PurgeModeEnum.Manual_phase1.ToString());
  92. ProcessPhase(_trigN2DownRD, N2PurgeModeEnum.Manual_phase2.ToString());
  93. break;
  94. case N2PurgeModeEnum.ATMMode:
  95. ProcessPhase(_trigN2AirDownRD, N2PurgeModeEnum.Manual_phase3.ToString());
  96. ProcessPhase(_trigN2AirUpRD, N2PurgeModeEnum.Manual_phase4.ToString());
  97. break;
  98. }
  99. }
  100. bool CheckConditionInTime(string modeKey, int millisecondsTimeout, Func<bool> condition)
  101. {
  102. var stopwatch = _allTimeDict[modeKey];
  103. if (!_allTimeDict[modeKey].IsRunning)
  104. {
  105. _allTimeDict[modeKey].Restart();
  106. }
  107. while (stopwatch.ElapsedMilliseconds < millisecondsTimeout)
  108. {
  109. if (!condition())
  110. {
  111. _allTimeDict[modeKey].Stop();
  112. _allTimeDict[modeKey].Reset();
  113. return false;
  114. }
  115. }
  116. if (stopwatch.ElapsedMilliseconds > millisecondsTimeout)
  117. {
  118. _allTimeDict[modeKey].Stop();
  119. _allTimeDict[modeKey].Reset();
  120. }
  121. return true;
  122. }
  123. private void ProcessPhase(R_TRIG r_TRIG, string modeKey)
  124. {
  125. r_TRIG.CLK = CheckConditionInTime(modeKey, (int)_stabilityTime * 1000, () => _n2PurgeSequenceStatus[modeKey].Invoke());
  126. if (r_TRIG.Q)
  127. {
  128. LOG.Info($"N2PurgeMode Trigger {modeKey}!,O2:{GetO2Density()},time:{_allTimeDict[modeKey].ElapsedMilliseconds}");
  129. SetN2PurgeValveData(modeKey);
  130. _allTimeDict[modeKey].Stop();
  131. _allTimeDict[modeKey].Reset();
  132. }
  133. }
  134. public void RestAllN2PrugeRD()
  135. {
  136. _trigN2AirDownRD.RST = false;
  137. _trigN2AirUpRD.RST = false;
  138. _trigN2DownRD.RST = false;
  139. _trigN2UpRD.RST = false;
  140. }
  141. private void SetN2PurgeValveData(string mode)
  142. {
  143. var value = _n2PurgeSequenceAction[mode];
  144. foreach (var operateItem in value.Item2)
  145. {
  146. if (operateItem.Item1 is IoMFC)
  147. {
  148. var ioMFc = (operateItem.Item1 as IoMFC);
  149. { ioMFc.SetMfcValue(out _, 0, new object[] { float.Parse(operateItem.Item2.ToString()) }); }
  150. }
  151. if (operateItem.Item1 is IoValve)
  152. {
  153. var ioValve = (operateItem.Item1 as IoValve);
  154. ioValve.TurnValve(bool.Parse(operateItem.Item2), out _);
  155. }
  156. if (operateItem.Item1 is IoTrigger)
  157. {
  158. var ioTrigger = (operateItem.Item1 as IoTrigger);
  159. ioTrigger.CheckAndSet(bool.Parse(operateItem.Item2), out _);
  160. }
  161. }
  162. }
  163. private bool SetN2PurgeMode(out string reason, int time, object[] param)
  164. {
  165. reason = string.Empty;
  166. var mode = param[0].ToString();
  167. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
  168. if (SC.ContainsItem("PM1.SelectN2PurgeMode"))
  169. {
  170. SC.SetItemValue("PM1.SelectN2PurgeMode", mode);
  171. }
  172. RestAllN2PrugeRD();
  173. return true;
  174. }
  175. /// <summary>
  176. /// 获取当前O2检测位置的设定值
  177. /// </summary>
  178. /// <returns></returns>
  179. private string GetO2SetCheckSetPoint()
  180. {
  181. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  182. {
  183. var key = "PM1.N2Purge.N2PurgeLAO2CheckSV";
  184. if (SC.ContainsItem(key))
  185. return SC.GetValue<double>(key).ToString("f3");
  186. }
  187. if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
  188. {
  189. var key = "PM1.N2Purge.N2PurgeFOUPO2CheckSV";
  190. if (SC.ContainsItem(key))
  191. return SC.GetValue<double>(key).ToString("f3");
  192. }
  193. return "";
  194. }
  195. /// <summary>
  196. /// 获取当前O2检测位置
  197. /// </summary>
  198. /// <returns></returns>
  199. private string GetCheckO2Location()
  200. {
  201. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  202. return SensorO2DetectSideLA.Display;
  203. if (SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value)
  204. return SensorO2DetectSideFIMS1.Display;
  205. if (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value)
  206. return SensorO2DetectSideFIMS2.Display;
  207. return "";
  208. }
  209. /// <summary>
  210. /// 获取当前O2浓度
  211. /// </summary>
  212. /// <returns></returns>
  213. private string GetO2DensityData()
  214. {
  215. var result = "";
  216. result = ConcentrationO2.FeedBack.ToString("f3");
  217. return result;
  218. }
  219. private double GetO2Density()
  220. {
  221. return ConcentrationO2.FeedBack;
  222. }
  223. private bool GetN2PurgePhase1()
  224. {
  225. return (GetO2Density() >= _n2PurgeData) && GetLADoorOpenStatus();
  226. }
  227. private bool GetN2PurgePhase2()
  228. {
  229. return (GetO2Density() < _n2PurgeData) && GetLADoorOpenStatus();
  230. }
  231. private bool GetN2PurgePhase3()
  232. {
  233. return GetLADoorOpenStatus();
  234. }
  235. private bool GetN2PurgePhase5()
  236. {
  237. return GetO2Density() >= _n2ToAirData && GetLADoorOpenStatus();
  238. }
  239. private bool GetN2PurgePhase4()
  240. {
  241. return GetO2Density() >= _n2ToAirData;
  242. }
  243. private bool GetN2PurgeAIRTo20PPMStatus()
  244. {
  245. return ValveAV202.DOOpen.Value;
  246. }
  247. private bool GetN2PurgeUnder20PPMStatus(double value = 20)
  248. {
  249. return ConcentrationO2.Value < value;
  250. }
  251. private bool GetN2PurgeAIRStatus()
  252. {
  253. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  254. }
  255. private bool GetLADoorOpenStatus()
  256. {
  257. return (bool)(SensorLADoorSw1?.Value);
  258. }
  259. private bool GetN2PurgeDoorOpenStatus()
  260. {
  261. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  262. }
  263. private bool GetN2PurgeFoup1Status()
  264. {
  265. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS1.IsFoupExist && FIMS1.CollisionAvoidanceUpDownStatus == DeviceStatus.Down;
  266. }
  267. private bool GetN2PurgeFoup2Status()
  268. {
  269. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS2.IsFoupExist && FIMS2.CollisionAvoidanceUpDownStatus == DeviceStatus.Down; ;
  270. }
  271. public void SetN2PurgeLAO2CheckFirstEnable(bool isEable)
  272. {
  273. if (TrigN2PurgeLAO2CheckFirstEnable != null && TrigN2PurgeLAO2CheckFirstEnable.Value != isEable)
  274. {
  275. TrigN2PurgeLAO2CheckFirstEnable.SetTrigger(isEable, out _);
  276. }
  277. }
  278. public void SetN2PurgeFIMS1O2CheckEnable(ModuleName fims, bool isEable)
  279. {
  280. if (fims == ModuleName.FIMS1 && TrigN2PurgeFIMS1O2CheckEnable != null && TrigN2PurgeFIMS1O2CheckEnable.Value != isEable)
  281. {
  282. TrigN2PurgeFIMS1O2CheckEnable.SetTrigger(isEable, out _);
  283. }
  284. if (fims == ModuleName.FIMS2 && TrigN2PurgeFIMS2O2CheckEnable != null && TrigN2PurgeFIMS2O2CheckEnable.Value != isEable)
  285. {
  286. TrigN2PurgeFIMS2O2CheckEnable.SetTrigger(isEable, out _);
  287. }
  288. }
  289. public void SetN2PurgeProcess(bool isEable)
  290. {
  291. if (TrigN2PurgeProcess != null && TrigN2PurgeProcess.Value != isEable)
  292. {
  293. TrigN2PurgeProcess.SetTrigger(isEable, out _);
  294. }
  295. }
  296. public void SetN2PurgeLAO2CheckSV(float value)
  297. {
  298. if (TrigN2PurgeLAO2CheckSV != null)
  299. TrigN2PurgeLAO2CheckSV?.SetAOTrigger(value, out _);
  300. }
  301. public void SetN2PurgeFOUPO2CheckSV(float value)
  302. {
  303. if (TrigN2PurgeFOUPO2CheckSV != null)
  304. TrigN2PurgeFOUPO2CheckSV?.SetAOTrigger(value, out _);
  305. }
  306. public void SetAVParameter(ModuleName fims, bool isEable)
  307. {
  308. if (fims == ModuleName.FIMS1)
  309. {
  310. var avValve58 = DEVICE.GetDevice<IoValve>($"{ModuleName.PM1}.ValveAV58");
  311. avValve58?.TurnValve(isEable, out _);
  312. }
  313. if (fims == ModuleName.FIMS2)
  314. {
  315. var avValve59 = DEVICE.GetDevice<IoValve>($"{ModuleName.PM1}.ValveAV59");
  316. avValve59?.TurnValve(isEable, out _);
  317. }
  318. }
  319. /// <summary>
  320. /// N2Purge相关时间参数,电气要求设定为秒,实际下发按照毫秒
  321. /// </summary>
  322. public void SetN2PurgeParameters()
  323. {
  324. if (SC.ContainsItem("PM1.N2Purge.TransferRoomArrivalWaitTime") && TrigN2PurgeLAO2CheckTime != null)
  325. {
  326. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomArrivalWaitTime") * 1000;
  327. TrigN2PurgeLAO2CheckTime.SetAOTrigger(time, out _);
  328. }
  329. if (SC.ContainsItem("PM1.N2Purge.TransferRoomStableWaitTime") && TrigN2PurgeLAO2OverTime != null)
  330. {
  331. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomStableWaitTime") * 1000;
  332. TrigN2PurgeLAO2OverTime.SetAOTrigger(time, out _);
  333. }
  334. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerArrivalWaitTime") && TrigN2PurgeFOUPO2CheckTime != null)
  335. {
  336. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerArrivalWaitTime") * 1000;
  337. TrigN2PurgeFOUPO2CheckTime.SetAOTrigger(time, out _);
  338. }
  339. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime") && TrigN2PurgeFOUPO2OverTime != null)
  340. {
  341. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerStableWaitTime") * 1000;
  342. TrigN2PurgeFOUPO2OverTime.SetAOTrigger(time, out _);
  343. }
  344. if (SC.ContainsItem("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") && TrigN2PurgeExchangeLATOFOUPWaitTime != null)
  345. {
  346. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") * 1000;
  347. TrigN2PurgeExchangeLATOFOUPWaitTime.SetAOTrigger(time, out _);
  348. }
  349. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") && TrigN2PurgeExchangeFOUPTOLAWaitTime != null)
  350. {
  351. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") * 1000;
  352. TrigN2PurgeExchangeFOUPTOLAWaitTime.SetAOTrigger(time, out _);
  353. }
  354. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToFOUPTime") && TrigN2PurgeExchangeFOUPTOFOUPWaitTime != null)
  355. {
  356. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToFOUPTime") * 1000;
  357. TrigN2PurgeExchangeFOUPTOFOUPWaitTime.SetAOTrigger(time, out _);
  358. }
  359. }
  360. public void InitN2PurgeMode(string n2PurgeModeStr, bool isN2Purge)
  361. {
  362. if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue<bool>("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode"))
  363. {
  364. if (!isN2Purge)
  365. {
  366. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", N2PurgeModeEnum.ManualMode.ToString());
  367. }
  368. else
  369. {
  370. var setValue = GetN2PurgeModeEnumByStr(n2PurgeModeStr);
  371. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue);
  372. }
  373. RestAllN2PrugeRD();
  374. }
  375. }
  376. }
  377. }