using Aitex.Core.RT.DataCenter; using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Unit; using Aitex.Core.RT.Log; using Aitex.Core.RT.SCCore; using Aitex.Core.Util; using DocumentFormat.OpenXml.Packaging; using FurnaceRT.Devices; using FurnaceRT.Equipments.PMs.Devices; using FurnaceRT.Extraction; using MECF.Framework.Common.CommonData.SorterDefines; using MECF.Framework.Common.Equipment; using System; using System.Collections.Generic; using System.Diagnostics; namespace FurnaceRT.Equipments.PMs { /// /// 分布类 定义N2Purge的执行逻辑 /// public partial class PMModule { private R_TRIG _trigN2UpRD = new R_TRIG(); private R_TRIG _trigN2DownRD = new R_TRIG(); private R_TRIG _trigN2AirUpRD = new R_TRIG(); private R_TRIG _trigN2AirDownRD = new R_TRIG(); private R_TRIG _trigSelectN2PurgeModeD = new R_TRIG(); private Dictionary>>> _n2PurgeSequenceAction; private Dictionary> _n2PurgeSequenceStatus; private Dictionary _rTrigDict; private N2PurgeModeEnum _N2PurgeMode = N2PurgeModeEnum.Auto; private double _n2PurgeData = 20; private double _n2ToAirData = 185000; private double _stabilityTime = 30; private Dictionary _allTimeDict = new Dictionary(); private void InitN2PurgeData() { DATA.Subscribe($"{Module}.O2DensityData", () => GetO2DensityData(), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.CheckO2Location", () => GetCheckO2Location(), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.O2SetCheckSetPoint", () => GetO2SetCheckSetPoint(), SubscriptionAttribute.FLAG.IgnoreSaveDB); DATA.Subscribe($"{Module}.N2PurgeMode", () => SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : ""); } private void InitN2PurgeConfigData() { _n2PurgeData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue("System.N2PurgeData") : 20; _n2ToAirData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue("System.N2ToAirData") : 185000; _stabilityTime = SC.ContainsItem($"System.StabilityTime") ? SC.GetValue("System.StabilityTime") : 30; _n2PurgeSequenceAction = ExtractionMethods.GetN2PurgeSequenceAction(); _n2PurgeSequenceStatus = new Dictionary>() { {"N2PurgeAIRTo20PPM",()=> GetN2PurgeAIRTo20PPMStatus()}, {"N2PurgeUnder20PPM",()=> GetN2PurgeUnder20PPMStatus()}, {"AIR",()=> GetN2PurgeAIRStatus()}, {"DoorOpen",()=> GetN2PurgeDoorOpenStatus()}, {"Foup1",()=> GetN2PurgeFoup1Status()}, {"Foup2",()=> GetN2PurgeFoup2Status()}, {N2PurgeModeEnum.Manual_phase1.ToString(),()=> GetN2PurgePhase1() }, {N2PurgeModeEnum.Manual_phase2.ToString(),()=> GetN2PurgePhase2()}, {N2PurgeModeEnum.Manual_phase3.ToString(),()=> GetN2PurgePhase3() }, {N2PurgeModeEnum.Manual_phase4.ToString(),()=> GetN2PurgePhase4() }, }; _allTimeDict = new Dictionary() { {N2PurgeModeEnum.Manual_phase1.ToString(),new Stopwatch() }, {N2PurgeModeEnum.Manual_phase2.ToString(),new Stopwatch()}, {N2PurgeModeEnum.Manual_phase3.ToString(),new Stopwatch()}, {N2PurgeModeEnum.Manual_phase4.ToString(),new Stopwatch() } }; _rTrigDict = new Dictionary(); } private void MonitorN2Purge() { var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : ""; if (string.IsNullOrEmpty(selectN2PurgeMode)) { return; } SetN2PurgeModeAction(selectN2PurgeMode); } private void SetN2PurgeModeAction(string selectN2PurgeMode) { _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), selectN2PurgeMode); switch (_N2PurgeMode) { case N2PurgeModeEnum.Auto: // 自动模式下的操作 break; case N2PurgeModeEnum.ManualMode: break; case N2PurgeModeEnum.N2PurgeMode: ProcessPhase(_trigN2UpRD, N2PurgeModeEnum.Manual_phase1.ToString()); ProcessPhase(_trigN2DownRD, N2PurgeModeEnum.Manual_phase2.ToString()); break; case N2PurgeModeEnum.ATMMode: ProcessPhase(_trigN2AirDownRD, N2PurgeModeEnum.Manual_phase3.ToString()); ProcessPhase(_trigN2AirUpRD, N2PurgeModeEnum.Manual_phase4.ToString()); break; } } bool CheckConditionInTime(string modeKey, int millisecondsTimeout, Func condition) { var stopwatch = _allTimeDict[modeKey]; if (!_allTimeDict[modeKey].IsRunning) { _allTimeDict[modeKey].Restart(); } while (stopwatch.ElapsedMilliseconds < millisecondsTimeout) { if (!condition()) { _allTimeDict[modeKey].Stop(); _allTimeDict[modeKey].Reset(); return false; } } if (stopwatch.ElapsedMilliseconds > millisecondsTimeout) { _allTimeDict[modeKey].Stop(); _allTimeDict[modeKey].Reset(); } return true; } private void ProcessPhase(R_TRIG r_TRIG, string modeKey) { r_TRIG.CLK = CheckConditionInTime(modeKey, (int)_stabilityTime * 1000, () => _n2PurgeSequenceStatus[modeKey].Invoke()); if (r_TRIG.Q) { LOG.Info($"N2PurgeMode Trigger {modeKey}!,O2:{GetO2Density()},time:{_allTimeDict[modeKey].ElapsedMilliseconds}"); SetN2PurgeValveData(modeKey); _allTimeDict[modeKey].Stop(); _allTimeDict[modeKey].Reset(); } } public void RestAllN2PrugeRD() { _trigN2AirDownRD.RST = false; _trigN2AirUpRD.RST = false; _trigN2DownRD.RST = false; _trigN2UpRD.RST = false; } private void SetN2PurgeValveData(string mode) { var value = _n2PurgeSequenceAction[mode]; foreach (var operateItem in value.Item2) { if (operateItem.Item1 is IoMFC) { var ioMFc = (operateItem.Item1 as IoMFC); { ioMFc.SetMfcValue(out _, 0, new object[] { float.Parse(operateItem.Item2.ToString()) }); } } if (operateItem.Item1 is IoValve) { var ioValve = (operateItem.Item1 as IoValve); ioValve.TurnValve(bool.Parse(operateItem.Item2), out _); } if (operateItem.Item1 is IoTrigger) { var ioTrigger = (operateItem.Item1 as IoTrigger); ioTrigger.CheckAndSet(bool.Parse(operateItem.Item2), out _); } } } private bool SetN2PurgeMode(out string reason, int time, object[] param) { reason = string.Empty; var mode = param[0].ToString(); _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode); if (SC.ContainsItem("PM1.SelectN2PurgeMode")) { SC.SetItemValue("PM1.SelectN2PurgeMode", mode); } RestAllN2PrugeRD(); return true; } /// /// 获取当前O2检测位置的设定值 /// /// private string GetO2SetCheckSetPoint() { if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value) { var key = "PM1.N2Purge.N2PurgeLAO2CheckSV"; if (SC.ContainsItem(key)) return SC.GetValue(key).ToString("f3"); } if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value)) { var key = "PM1.N2Purge.N2PurgeFOUPO2CheckSV"; if (SC.ContainsItem(key)) return SC.GetValue(key).ToString("f3"); } return ""; } /// /// 获取当前O2检测位置 /// /// private string GetCheckO2Location() { if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value) return SensorO2DetectSideLA.Display; if (SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) return SensorO2DetectSideFIMS1.Display; if (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value) return SensorO2DetectSideFIMS2.Display; return ""; } /// /// 获取当前O2浓度 /// /// private string GetO2DensityData() { var result = ""; result = ConcentrationO2.FeedBack.ToString("f3"); return result; } private double GetO2Density() { return ConcentrationO2.FeedBack; } private bool GetN2PurgePhase1() { return (GetO2Density() >= _n2PurgeData) && GetLADoorOpenStatus(); } private bool GetN2PurgePhase2() { return (GetO2Density() < _n2PurgeData) && GetLADoorOpenStatus(); } private bool GetN2PurgePhase3() { return GetLADoorOpenStatus(); } private bool GetN2PurgePhase5() { return GetO2Density() >= _n2ToAirData && GetLADoorOpenStatus(); } private bool GetN2PurgePhase4() { return GetO2Density() >= _n2ToAirData; } private bool GetN2PurgeAIRTo20PPMStatus() { return ValveAV202.DOOpen.Value; } private bool GetN2PurgeUnder20PPMStatus(double value = 20) { return ConcentrationO2.Value < value; } private bool GetN2PurgeAIRStatus() { return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false); } private bool GetLADoorOpenStatus() { return (bool)(SensorLADoorSw1?.Value); } private bool GetN2PurgeDoorOpenStatus() { return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false); } private bool GetN2PurgeFoup1Status() { return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS1.IsFoupExist && FIMS1.CollisionAvoidanceUpDownStatus == DeviceStatus.Down; } private bool GetN2PurgeFoup2Status() { return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS2.IsFoupExist && FIMS2.CollisionAvoidanceUpDownStatus == DeviceStatus.Down; ; } public void SetN2PurgeLAO2CheckFirstEnable(bool isEable) { if (TrigN2PurgeLAO2CheckFirstEnable != null && TrigN2PurgeLAO2CheckFirstEnable.Value != isEable) { TrigN2PurgeLAO2CheckFirstEnable.SetTrigger(isEable, out _); } } public void SetN2PurgeFIMS1O2CheckEnable(ModuleName fims, bool isEable) { if (fims == ModuleName.FIMS1 && TrigN2PurgeFIMS1O2CheckEnable != null && TrigN2PurgeFIMS1O2CheckEnable.Value != isEable) { TrigN2PurgeFIMS1O2CheckEnable.SetTrigger(isEable, out _); } if (fims == ModuleName.FIMS2 && TrigN2PurgeFIMS2O2CheckEnable != null && TrigN2PurgeFIMS2O2CheckEnable.Value != isEable) { TrigN2PurgeFIMS2O2CheckEnable.SetTrigger(isEable, out _); } } public void SetN2PurgeProcess(bool isEable) { if (TrigN2PurgeProcess != null && TrigN2PurgeProcess.Value != isEable) { TrigN2PurgeProcess.SetTrigger(isEable, out _); } } public void SetN2PurgeLAO2CheckSV(float value) { if (TrigN2PurgeLAO2CheckSV != null) TrigN2PurgeLAO2CheckSV?.SetAOTrigger(value, out _); } public void SetN2PurgeFOUPO2CheckSV(float value) { if (TrigN2PurgeFOUPO2CheckSV != null) TrigN2PurgeFOUPO2CheckSV?.SetAOTrigger(value, out _); } public void SetAVParameter(ModuleName fims, bool isEable) { if (fims == ModuleName.FIMS1) { var avValve58 = DEVICE.GetDevice($"{ModuleName.PM1}.ValveAV58"); avValve58?.TurnValve(isEable, out _); } if (fims == ModuleName.FIMS2) { var avValve59 = DEVICE.GetDevice($"{ModuleName.PM1}.ValveAV59"); avValve59?.TurnValve(isEable, out _); } } /// /// N2Purge相关时间参数,电气要求设定为秒,实际下发按照毫秒 /// public void SetN2PurgeParameters() { if (SC.ContainsItem("PM1.N2Purge.TransferRoomArrivalWaitTime") && TrigN2PurgeLAO2CheckTime != null) { var time = (float)SC.GetValue("PM1.N2Purge.TransferRoomArrivalWaitTime") * 1000; TrigN2PurgeLAO2CheckTime.SetAOTrigger(time, out _); } if (SC.ContainsItem("PM1.N2Purge.TransferRoomStableWaitTime") && TrigN2PurgeLAO2OverTime != null) { var time = (float)SC.GetValue("PM1.N2Purge.TransferRoomStableWaitTime") * 1000; TrigN2PurgeLAO2OverTime.SetAOTrigger(time, out _); } if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerArrivalWaitTime") && TrigN2PurgeFOUPO2CheckTime != null) { var time = (float)SC.GetValue("PM1.N2Purge.FOUPOpenerArrivalWaitTime") * 1000; TrigN2PurgeFOUPO2CheckTime.SetAOTrigger(time, out _); } if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime") && TrigN2PurgeFOUPO2OverTime != null) { var time = (float)SC.GetValue("PM1.N2Purge.FOUPOpenerStableWaitTime") * 1000; TrigN2PurgeFOUPO2OverTime.SetAOTrigger(time, out _); } if (SC.ContainsItem("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") && TrigN2PurgeExchangeLATOFOUPWaitTime != null) { var time = (float)SC.GetValue("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") * 1000; TrigN2PurgeExchangeLATOFOUPWaitTime.SetAOTrigger(time, out _); } if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") && TrigN2PurgeExchangeFOUPTOLAWaitTime != null) { var time = (float)SC.GetValue("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") * 1000; TrigN2PurgeExchangeFOUPTOLAWaitTime.SetAOTrigger(time, out _); } if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToFOUPTime") && TrigN2PurgeExchangeFOUPTOFOUPWaitTime != null) { var time = (float)SC.GetValue("PM1.N2Purge.O2DetectorFOUPToFOUPTime") * 1000; TrigN2PurgeExchangeFOUPTOFOUPWaitTime.SetAOTrigger(time, out _); } } public void InitN2PurgeMode(string n2PurgeModeStr, bool isN2Purge) { if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode")) { if (!isN2Purge) { SC.SetItemValueFromString("PM1.SelectN2PurgeMode", N2PurgeModeEnum.ManualMode.ToString()); } else { var setValue = GetN2PurgeModeEnumByStr(n2PurgeModeStr); SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue); } RestAllN2PrugeRD(); } } } }