PMScheduleMaintenance.cs 21 KB

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  1. using Aitex.Core.Common;
  2. using Aitex.Core.Common.DeviceData;
  3. using Aitex.Core.RT.DataCenter;
  4. using Aitex.Core.RT.Event;
  5. using Aitex.Core.RT.IOCore;
  6. using Aitex.Core.RT.Log;
  7. using Aitex.Core.RT.OperationCenter;
  8. using Aitex.Core.RT.Routine;
  9. using Aitex.Core.RT.SCCore;
  10. using Aitex.Core.UI.Control;
  11. using Aitex.Core.Util;
  12. using DocumentFormat.OpenXml.VariantTypes;
  13. using FurnaceRT.Equipments.Systems;
  14. using MECF.Framework.Common.CommonData.EnumData;
  15. using MECF.Framework.Common.DataCenter;
  16. using MECF.Framework.Common.Equipment;
  17. using MECF.Framework.Common.Event;
  18. using MECF.Framework.Common.OperationCenter;
  19. using MECF.Framework.Common.Utilities;
  20. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  21. using System;
  22. using System.Collections;
  23. using System.Collections.Generic;
  24. using System.Diagnostics;
  25. using System.Linq;
  26. using System.Runtime.Remoting.Metadata.W3cXsd2001;
  27. namespace FurnaceRT.Equipments.PMs
  28. {
  29. public partial class PMModule
  30. {
  31. private void InitScheduleMaintenance()
  32. {
  33. new ScheduleMaintenanceData(MaintenanceItemEnum.SDCarrierUseFreq.ToString(), "Times", "CarrierWafer.SieDummy", "Carrier Kind", "Side Dummy");
  34. new ScheduleMaintenanceData(MaintenanceItemEnum.SDWaferThickness.ToString(), "Å", "CarrierWafer.SieDummy", "Carrier Kind", "Side Dummy");
  35. new ScheduleMaintenanceData(MaintenanceItemEnum.SDUsableDummyWafer.ToString(), "Sheets", "CarrierWafer.SieDummy", "Carrier Kind", "Side Dummy");
  36. new ScheduleMaintenanceData(MaintenanceItemEnum.SDBufferRackStayTime.ToString(), "h:m", "CarrierWafer.SieDummy", "Carrier Kind", "Side Dummy");
  37. new ScheduleMaintenanceData(MaintenanceItemEnum.SDWaferUserTime.ToString(), "h:m", "CarrierWafer.SieDummy", "Carrier Kind", "Side Dummy");
  38. new ScheduleMaintenanceData(MaintenanceItemEnum.FDCarrierUseFreq.ToString(), "Times", "CarrierWafer.FillDummy", "Carrier Kind", "Fill Dummy");
  39. new ScheduleMaintenanceData(MaintenanceItemEnum.FDWaferThickness.ToString(), "Å", "CarrierWafer.FillDummy", "Carrier Kind", "Fill Dummy");
  40. new ScheduleMaintenanceData(MaintenanceItemEnum.FDUsableDummyWafer.ToString(), "Sheets", "CarrierWafer.FillDummy", "Carrier Kind", "Fill Dummy");
  41. new ScheduleMaintenanceData(MaintenanceItemEnum.FDBufferRackStayTime.ToString(), "h:m", "CarrierWafer.FillDummy", "Carrier Kind", "Fill Dummy");
  42. new ScheduleMaintenanceData(MaintenanceItemEnum.FDWaferUserTime.ToString(), "h:m", "CarrierWafer.FillDummy", "Carrier Kind", "Fill Dummy");
  43. new ScheduleMaintenanceData(MaintenanceItemEnum.BoatRecipeThickness1.ToString(), "Å", "Boat");
  44. new ScheduleMaintenanceData(MaintenanceItemEnum.BoatTCUseTime.ToString(), "h:m", "Boat");
  45. new ScheduleMaintenanceData(MaintenanceItemEnum.BoatCKDUseTime.ToString(), "h:m", "Boat");
  46. new ScheduleMaintenanceData(MaintenanceItemEnum.BoatPUMPUseTime.ToString(), "h:m", "Boat");
  47. new ScheduleMaintenanceData(MaintenanceItemEnum.NonOperationTime1.ToString(), "h:m", "Conditioning");
  48. new ScheduleMaintenanceData(MaintenanceItemEnum.NonOperationTime2.ToString(), "h:m", "Conditioning");
  49. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeExecuteFreq.ToString(), "Times", "Reactor.Recipe", "Select Recipe");
  50. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeThickness.ToString(), "Å", "Reactor.Recipe", "Select Recipe");
  51. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteFreq1.ToString(), "Times", "Reactor.StepRunFreq", "Step ID");
  52. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteFreq2.ToString(), "Times", "Reactor.StepRunFreq", "Step ID");
  53. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteFreq3.ToString(), "Times", "Reactor.StepRunFreq", "Step ID");
  54. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteTime1.ToString(), "h:m", "Reactor.StepRunTime", "Step ID");
  55. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteTime2.ToString(), "h:m", "Reactor.StepRunTime", "Step ID");
  56. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteTime3.ToString(), "h:m", "Reactor.StepRunTime", "Step ID");
  57. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteTime4.ToString(), "h:m", "Reactor.StepRunTime", "Step ID");
  58. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteTime5.ToString(), "h:m", "Reactor.StepRunTime", "Step ID");
  59. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteTime6.ToString(), "h:m", "Reactor.StepRunTime", "Step ID");
  60. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteTime7.ToString(), "h:m", "Reactor.StepRunTime", "Step ID");
  61. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteTime8.ToString(), "h:m", "Reactor.StepRunTime", "Step ID");
  62. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeThickness1_Step.ToString(), "Å", "Reactor.StepThickness", "Step Group");
  63. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeThickness2_Step.ToString(), "Å", "Reactor.StepThickness", "Step Group");
  64. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeThickness3_Step.ToString(), "Å", "Reactor.StepThickness", "Step Group");
  65. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeThickness4_Step.ToString(), "Å", "Reactor.StepThickness", "Step Group");
  66. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeThickness5_Step.ToString(), "Å", "Reactor.StepThickness", "Step Group");
  67. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeThickness6_Step.ToString(), "Å", "Reactor.StepThickness", "Step Group");
  68. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeThickness7_Step.ToString(), "Å", "Reactor.StepThickness", "Step Group");
  69. new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeThickness8_Step.ToString(), "Å", "Reactor.StepThickness", "Step Group");
  70. }
  71. public void MaintenanceProcessingCommandExec(string maintenanceProcessing, AlarmReportItem alarmReportItem)
  72. {
  73. if (Enum.TryParse<MaintenanceProcessingCommandEnum>(maintenanceProcessing, out var command))
  74. {
  75. switch (command)
  76. {
  77. case MaintenanceProcessingCommandEnum.None:
  78. break;
  79. case MaintenanceProcessingCommandEnum.AlarmReport:
  80. alarmReportItem?.Exec();
  81. break;
  82. case MaintenanceProcessingCommandEnum.JobAutoStart:
  83. break;
  84. case MaintenanceProcessingCommandEnum.JobProhibition:
  85. break;
  86. case MaintenanceProcessingCommandEnum.JobManualStart:
  87. break;
  88. }
  89. }
  90. }
  91. #region Carrier/Wafer
  92. public void UpdateSEDWafer()
  93. {
  94. var ccc = BinarySerializer<Dictionary<ModuleName, Dictionary<int, WaferInfo>>>.FromStream("WaferManager");
  95. if (ccc == null)
  96. return;
  97. List<WaferInfo> waferInfos = new List<WaferInfo>();
  98. foreach (var moduleWafers in ccc)
  99. {
  100. waferInfos.AddRange(moduleWafers.Value.Select(a => a.Value));
  101. }
  102. if (waferInfos.Any(a => a.WaferType == WaferType.ED))
  103. {
  104. var maxEDUseCount = waferInfos.Where(a => a.WaferType == WaferType.ED).Max(a => a.UseCount);
  105. var maxEDUseThick = waferInfos.Where(a => a.WaferType == WaferType.ED).Max(a => a.UseThick);
  106. var maxEDUseTime = waferInfos.Where(a => a.WaferType == WaferType.ED).Max(a => a.UseTime);
  107. if (Singleton<ScheduleMaintenanceDataManager>.Instance.Item.TryGetValue(MaintenanceItemEnum.FDCarrierUseFreq.ToString(), out var FDCarrierUseFreq))
  108. Singleton<ScheduleMaintenanceDataManager>.Instance.SetValue(FDCarrierUseFreq.Item, maxEDUseCount);
  109. if (Singleton<ScheduleMaintenanceDataManager>.Instance.Item.TryGetValue(MaintenanceItemEnum.FDWaferThickness.ToString(), out var FDWaferThickness))
  110. Singleton<ScheduleMaintenanceDataManager>.Instance.SetValue(FDWaferThickness.Item, maxEDUseThick);
  111. if (Singleton<ScheduleMaintenanceDataManager>.Instance.Item.TryGetValue(MaintenanceItemEnum.FDWaferUserTime.ToString(), out var FDWaferUserTime))
  112. Singleton<ScheduleMaintenanceDataManager>.Instance.SetValue(FDWaferUserTime.Item, maxEDUseTime);
  113. }
  114. if (waferInfos.Any(a => a.WaferType == WaferType.SD))
  115. {
  116. var maxSDUseCount = waferInfos.Where(a => a.WaferType == WaferType.SD).Max(a => a.UseCount);
  117. var maxSDUseThick = waferInfos.Where(a => a.WaferType == WaferType.SD).Max(a => a.UseThick);
  118. var maxSDUseTime = waferInfos.Where(a => a.WaferType == WaferType.SD).Max(a => a.UseTime);
  119. if (Singleton<ScheduleMaintenanceDataManager>.Instance.Item.TryGetValue(MaintenanceItemEnum.SDCarrierUseFreq.ToString(), out var SDCarrierUseFreq))
  120. Singleton<ScheduleMaintenanceDataManager>.Instance.SetValue(SDCarrierUseFreq.Item, maxSDUseCount);
  121. if (Singleton<ScheduleMaintenanceDataManager>.Instance.Item.TryGetValue(MaintenanceItemEnum.SDWaferThickness.ToString(), out var SDWaferThickness))
  122. Singleton<ScheduleMaintenanceDataManager>.Instance.SetValue(SDWaferThickness.Item, maxSDUseThick);
  123. if (Singleton<ScheduleMaintenanceDataManager>.Instance.Item.TryGetValue(MaintenanceItemEnum.SDWaferUserTime.ToString(), out var SDWaferUserTime))
  124. Singleton<ScheduleMaintenanceDataManager>.Instance.SetValue(SDWaferUserTime.Item, maxSDUseTime);
  125. }
  126. }
  127. #endregion
  128. /// <summary>
  129. /// 根据RecipeStep +StepGroup统计 累计膜厚
  130. /// </summary>
  131. /// <param name="recipeName"></param>
  132. public void UpdateRecipeStepGroupThickness(string stepName, float thickness)
  133. {
  134. if (string.IsNullOrEmpty(stepName) || thickness <= 0)
  135. return;
  136. var stepNo = stepName.Split(':').FirstOrDefault();
  137. var list = Singleton<ScheduleMaintenanceDataManager>.Instance.Item.Values
  138. .Where(a => !string.IsNullOrEmpty(a.AdditionInformationDisplaySupplement))
  139. .Where(a => a.Path == $"{DataItemEnum.Reactor}.{ReactorsEnum.StepThickness}")
  140. .Where(a => a.AdditionInformationDisplaySupplement.Split(',').Contains(stepNo))
  141. .ToList();
  142. if (list == null || list.Count == 0)
  143. return;
  144. foreach (var item in list)
  145. {
  146. if (item == null)
  147. continue;
  148. Singleton<ScheduleMaintenanceDataManager>.Instance.Increase(item.Item, thickness);
  149. if (item.CurrentValue > item.StartValue && item.CurrentValue < item.LimitValue)
  150. MaintenanceProcessingCommandExec(item.MaintenanceProcessing, new AlarmReportItem(Singleton<EquipmentManager>.Instance.ReatorStepThicknessWarning.Set, $"more than {item.StartValue} Å"));
  151. if (item.CurrentValue >= item.LimitValue)
  152. MaintenanceProcessingCommandExec(item.MaintenanceProcessing, new AlarmReportItem(Singleton<EquipmentManager>.Instance.ReatorStepThicknessAlarm.Set, $"more than {item.LimitValue} Å"));
  153. }
  154. }
  155. /// <summary>
  156. /// 根据RecipeStep统计 Step执行Time 累计时间
  157. /// </summary>
  158. /// <param name="recipeName"></param>
  159. public void UpdateRecipeStepRunTime(string stepName, double stepTime)
  160. {
  161. if (string.IsNullOrEmpty(stepName) || stepTime <= 0)
  162. return;
  163. var stepNo = stepName.Split(':').FirstOrDefault();
  164. var list = Singleton<ScheduleMaintenanceDataManager>.Instance.Item.Values.Where(a => a.Path == $"{DataItemEnum.Reactor}.{ReactorsEnum.StepRunTime}" && a.AdditionInformationDisplay == stepNo).ToList();
  165. if (list == null || list.Count == 0)
  166. return;
  167. foreach (var item in list)
  168. {
  169. if (item == null)
  170. continue;
  171. var data = Math.Round(stepTime, 1, MidpointRounding.AwayFromZero);
  172. Singleton<ScheduleMaintenanceDataManager>.Instance.Increase(item.Item, (float)data);
  173. }
  174. }
  175. /// <summary>
  176. /// 根据RecipeStep统计 Step执行 累计次数
  177. /// </summary>
  178. /// <param name="recipeName"></param>
  179. public void UpdateRecipeStepFre(string stepName)
  180. {
  181. if (string.IsNullOrEmpty(stepName))
  182. return;
  183. var stepNo = stepName.Split(':').FirstOrDefault();
  184. var list = Singleton<ScheduleMaintenanceDataManager>.Instance.Item.Values.Where(a => a.Path == $"{DataItemEnum.Reactor}.{ReactorsEnum.StepRunFreq}" && a.AdditionInformationDisplay == stepNo).ToList();
  185. if (list == null || list.Count == 0)
  186. return;
  187. foreach (var item in list)
  188. {
  189. if (item == null)
  190. continue;
  191. Singleton<ScheduleMaintenanceDataManager>.Instance.Increase(item.Item);
  192. }
  193. }
  194. /// <summary>
  195. /// 根据RecipeName统计 Recipe执行 累计次数
  196. /// </summary>
  197. /// <param name="processRecipeName"></param>
  198. public void UpdateRecipeFre(string recipeName)
  199. {
  200. if (string.IsNullOrEmpty(recipeName))
  201. return;
  202. var item = Singleton<ScheduleMaintenanceDataManager>.Instance.Item.Values.Where(a => a.Item == MaintenanceItemEnum.RecipeExecuteFreq.ToString() && a.Path == $"{DataItemEnum.Reactor}.{ReactorsEnum.Recipe}" && a.AdditionInformationDisplay == recipeName).FirstOrDefault();
  203. if (item == null)
  204. return;
  205. if (item != null && item.Item == MaintenanceItemEnum.RecipeExecuteFreq.ToString())
  206. Singleton<ScheduleMaintenanceDataManager>.Instance.Increase(item.Item);
  207. }
  208. /// <summary>
  209. /// 根据RecipeName统计累计膜厚
  210. /// </summary>
  211. /// <param name="recipeName"></param>
  212. /// <param name="thickness"></param>
  213. public void UpdateRecipeThickness(string recipeName, float thickness)
  214. {
  215. if (string.IsNullOrEmpty(recipeName) || thickness <= 0)
  216. return;
  217. var item = Singleton<ScheduleMaintenanceDataManager>.Instance.Item.Values.Where(a => a.Item == MaintenanceItemEnum.RecipeThickness.ToString() && a.Path == $"{DataItemEnum.Reactor}.{ReactorsEnum.Recipe}" && a.AdditionInformationDisplay == recipeName).FirstOrDefault();
  218. if (item == null)
  219. return;
  220. if (item != null && item.Item == MaintenanceItemEnum.RecipeThickness.ToString())
  221. Singleton<ScheduleMaintenanceDataManager>.Instance.Increase(item.Item, thickness);
  222. }
  223. /// <summary>
  224. /// 检查 RecipeStep 累计时间是否超限
  225. /// </summary>
  226. /// <param name="stepName"></param>
  227. /// <param name="isPause"></param>
  228. public void CheckRecipeStepTimeMoreThan(string stepName, out bool isPause)
  229. {
  230. var stepNo = stepName.Split(':').FirstOrDefault();
  231. var item = Singleton<ScheduleMaintenanceDataManager>.Instance.Item.Values
  232. .Where(a => a.Path == $"{DataItemEnum.Reactor}.{ReactorsEnum.StepRunFreq}" && a.AdditionInformationDisplay == stepNo)
  233. .FirstOrDefault();
  234. CheckRecipeMoreThan(
  235. stepNo,
  236. Singleton<EquipmentManager>.Instance.ReatorStepRunTimeWarning.Set,
  237. Singleton<EquipmentManager>.Instance.ReatorStepRunTimeAlarm.Set,
  238. item,
  239. "HH:mm",
  240. out isPause);
  241. }
  242. /// <summary>
  243. /// RecipeStep 累计次数是否超限
  244. /// </summary>
  245. /// <param name="stepName"></param>
  246. /// <param name="isPause"></param>
  247. public void CheckRecipeStepFreqMoreThan(string stepName, out bool isPause)
  248. {
  249. var stepNo = stepName.Split(':').FirstOrDefault();
  250. var item = Singleton<ScheduleMaintenanceDataManager>.Instance.Item.Values
  251. .Where(a => a.Path == $"{DataItemEnum.Reactor}.{ReactorsEnum.StepRunFreq}" && a.AdditionInformationDisplay == stepNo)
  252. .FirstOrDefault();
  253. CheckRecipeMoreThan(
  254. stepNo,
  255. Singleton<EquipmentManager>.Instance.ReatorStepRunFreqWarning.Set,
  256. Singleton<EquipmentManager>.Instance.ReatorStepRunFreqAlarm.Set,
  257. item,
  258. "times",
  259. out isPause);
  260. }
  261. /// <summary>
  262. /// 检查Recipe执行 累计次数是否超限
  263. /// </summary>
  264. /// <param name="recipeName"></param>
  265. /// <param name="isPause"></param>
  266. public void CheckRecipeExecuteFreqMoreThan(string recipeName, out bool isPause)
  267. {
  268. var item = Singleton<ScheduleMaintenanceDataManager>.Instance.Item.Values
  269. .FirstOrDefault(a =>
  270. a.Item == MaintenanceItemEnum.RecipeExecuteFreq.ToString() &&
  271. a.Path == $"{DataItemEnum.Reactor}.{ReactorsEnum.Recipe}" &&
  272. a.AdditionInformationDisplay == recipeName);
  273. CheckRecipeMoreThan(
  274. recipeName,
  275. Singleton<EquipmentManager>.Instance.RecipeExecuteFreqWarning.Set,
  276. Singleton<EquipmentManager>.Instance.RecipeExecuteFreqAlarm.Set,
  277. item,
  278. "times",
  279. out isPause, true);
  280. }
  281. /// <summary>
  282. /// 检查Recipe执行 累计膜厚是否超限
  283. /// </summary>
  284. /// <param name="recipeName"></param>
  285. /// <param name="isPause"></param>
  286. public void CheckRecipeThicknessMoreThan(string recipeName, out bool isPause)
  287. {
  288. var item = Singleton<ScheduleMaintenanceDataManager>.Instance.Item.Values
  289. .FirstOrDefault(a =>
  290. a.Item == MaintenanceItemEnum.RecipeThickness.ToString() &&
  291. a.Path == $"{DataItemEnum.Reactor}.{ReactorsEnum.Recipe}" &&
  292. a.AdditionInformationDisplay == recipeName);
  293. CheckRecipeMoreThan(
  294. recipeName,
  295. Singleton<EquipmentManager>.Instance.RecipeThicknessWarning.Set,
  296. Singleton<EquipmentManager>.Instance.RecipeThicknessAlarm.Set,
  297. item,
  298. "Å",
  299. out isPause,true);
  300. }
  301. private void CheckRecipeMoreThan(
  302. string recipeName,
  303. Action<string> warningSetId,
  304. Action<string> alarmSetId,
  305. ScheduleMaintenanceDataItem item,
  306. string unit,
  307. out bool isPause,
  308. bool isEnableJobAutoStart = false)
  309. {
  310. isPause = false;
  311. if (string.IsNullOrEmpty(recipeName))
  312. return;
  313. if (item == null || !Enum.TryParse<MaintenanceProcessingCommandEnum>(item.MaintenanceProcessing, out var command))
  314. return;
  315. string message = $"{item.AdditionInformationDisplay} {item.CurrentValue} more than {item.StartValue} {unit}";
  316. string nullMessage = $"No recipe file associated, unable to trigger JobAutoStart";
  317. var warningAction = new AlarmReportItem(warningSetId, message);
  318. var alarmAction = new AlarmReportItem(alarmSetId, message);
  319. if (item.CurrentValue > item.StartValue && item.CurrentValue < item.LimitValue && command != MaintenanceProcessingCommandEnum.None)
  320. {
  321. warningAction.Exec();
  322. }
  323. if (item.CurrentValue >= item.LimitValue)
  324. {
  325. ExecuteAlarm(alarmAction, ref isPause);
  326. if (isEnableJobAutoStart)
  327. {
  328. switch (command)
  329. {
  330. case MaintenanceProcessingCommandEnum.JobAutoStart:
  331. if (string.IsNullOrEmpty(item.AssociationProcessRecipeName))
  332. {
  333. ExecuteAlarm(new AlarmReportItem(alarmSetId, nullMessage), ref isPause);
  334. return;
  335. }
  336. CheckToPostMessage((int)MSG.RunOtherRecipe, item.AssociationProcessRecipeName, "Process");
  337. break;
  338. }
  339. }
  340. }
  341. }
  342. private void ExecuteAlarm(AlarmReportItem alarmAction, ref bool isPause)
  343. {
  344. alarmAction.Exec();
  345. isPause = true;
  346. }
  347. }
  348. }