using Aitex.Core.Common; using Aitex.Core.Common.DeviceData; using Aitex.Core.RT.DataCenter; using Aitex.Core.RT.Event; using Aitex.Core.RT.IOCore; using Aitex.Core.RT.Log; using Aitex.Core.RT.OperationCenter; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using Aitex.Core.UI.Control; using Aitex.Core.Util; using DocumentFormat.OpenXml.VariantTypes; using FurnaceRT.Equipments.Systems; using MECF.Framework.Common.CommonData.EnumData; using MECF.Framework.Common.DataCenter; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.Event; using MECF.Framework.Common.OperationCenter; using MECF.Framework.Common.Utilities; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs; using System; using System.Collections; using System.Collections.Generic; using System.Diagnostics; using System.Linq; using System.Runtime.Remoting.Metadata.W3cXsd2001; namespace FurnaceRT.Equipments.PMs { public partial class PMModule { private void InitScheduleMaintenance() { new ScheduleMaintenanceData(MaintenanceItemEnum.SDCarrierUseFreq.ToString(), "Times", "CarrierWafer.SieDummy", "Carrier Kind", "Side Dummy"); new ScheduleMaintenanceData(MaintenanceItemEnum.SDWaferThickness.ToString(), "Å", "CarrierWafer.SieDummy", "Carrier Kind", "Side Dummy"); new ScheduleMaintenanceData(MaintenanceItemEnum.SDUsableDummyWafer.ToString(), "Sheets", "CarrierWafer.SieDummy", "Carrier Kind", "Side Dummy"); new ScheduleMaintenanceData(MaintenanceItemEnum.SDBufferRackStayTime.ToString(), "h:m", "CarrierWafer.SieDummy", "Carrier Kind", "Side Dummy"); new ScheduleMaintenanceData(MaintenanceItemEnum.SDWaferUserTime.ToString(), "h:m", "CarrierWafer.SieDummy", "Carrier Kind", "Side Dummy"); new ScheduleMaintenanceData(MaintenanceItemEnum.FDCarrierUseFreq.ToString(), "Times", "CarrierWafer.FillDummy", "Carrier Kind", "Fill Dummy"); new ScheduleMaintenanceData(MaintenanceItemEnum.FDWaferThickness.ToString(), "Å", "CarrierWafer.FillDummy", "Carrier Kind", "Fill Dummy"); new ScheduleMaintenanceData(MaintenanceItemEnum.FDUsableDummyWafer.ToString(), "Sheets", "CarrierWafer.FillDummy", "Carrier Kind", "Fill Dummy"); new ScheduleMaintenanceData(MaintenanceItemEnum.FDBufferRackStayTime.ToString(), "h:m", "CarrierWafer.FillDummy", "Carrier Kind", "Fill Dummy"); new ScheduleMaintenanceData(MaintenanceItemEnum.FDWaferUserTime.ToString(), "h:m", "CarrierWafer.FillDummy", "Carrier Kind", "Fill Dummy"); new ScheduleMaintenanceData(MaintenanceItemEnum.BoatRecipeThickness1.ToString(), "Å", "Boat"); new ScheduleMaintenanceData(MaintenanceItemEnum.BoatTCUseTime.ToString(), "h:m", "Boat"); new ScheduleMaintenanceData(MaintenanceItemEnum.BoatCKDUseTime.ToString(), "h:m", "Boat"); new ScheduleMaintenanceData(MaintenanceItemEnum.BoatPUMPUseTime.ToString(), "h:m", "Boat"); new ScheduleMaintenanceData(MaintenanceItemEnum.NonOperationTime1.ToString(), "h:m", "Conditioning"); new ScheduleMaintenanceData(MaintenanceItemEnum.NonOperationTime2.ToString(), "h:m", "Conditioning"); new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeExecuteFreq.ToString(), "Times", "Reactor.Recipe", "Select Recipe"); new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeThickness.ToString(), "Å", "Reactor.Recipe", "Select Recipe"); new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteFreq1.ToString(), "Times", "Reactor.StepRunFreq", "Step ID"); new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteFreq2.ToString(), "Times", "Reactor.StepRunFreq", "Step ID"); new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteFreq3.ToString(), "Times", "Reactor.StepRunFreq", "Step ID"); new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteTime1.ToString(), "h:m", "Reactor.StepRunTime", "Step ID"); new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteTime2.ToString(), "h:m", "Reactor.StepRunTime", "Step ID"); new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteTime3.ToString(), "h:m", "Reactor.StepRunTime", "Step ID"); new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteTime4.ToString(), "h:m", "Reactor.StepRunTime", "Step ID"); new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteTime5.ToString(), "h:m", "Reactor.StepRunTime", "Step ID"); new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteTime6.ToString(), "h:m", "Reactor.StepRunTime", "Step ID"); new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteTime7.ToString(), "h:m", "Reactor.StepRunTime", "Step ID"); new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeStepExecuteTime8.ToString(), "h:m", "Reactor.StepRunTime", "Step ID"); new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeThickness1_Step.ToString(), "Å", "Reactor.StepThickness", "Step Group"); new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeThickness2_Step.ToString(), "Å", "Reactor.StepThickness", "Step Group"); new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeThickness3_Step.ToString(), "Å", "Reactor.StepThickness", "Step Group"); new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeThickness4_Step.ToString(), "Å", "Reactor.StepThickness", "Step Group"); new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeThickness5_Step.ToString(), "Å", "Reactor.StepThickness", "Step Group"); new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeThickness6_Step.ToString(), "Å", "Reactor.StepThickness", "Step Group"); new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeThickness7_Step.ToString(), "Å", "Reactor.StepThickness", "Step Group"); new ScheduleMaintenanceData(MaintenanceItemEnum.RecipeThickness8_Step.ToString(), "Å", "Reactor.StepThickness", "Step Group"); } public void MaintenanceProcessingCommandExec(string maintenanceProcessing, AlarmReportItem alarmReportItem) { if (Enum.TryParse(maintenanceProcessing, out var command)) { switch (command) { case MaintenanceProcessingCommandEnum.None: break; case MaintenanceProcessingCommandEnum.AlarmReport: alarmReportItem?.Exec(); break; case MaintenanceProcessingCommandEnum.JobAutoStart: break; case MaintenanceProcessingCommandEnum.JobProhibition: break; case MaintenanceProcessingCommandEnum.JobManualStart: break; } } } #region Carrier/Wafer public void UpdateSEDWafer() { var ccc = BinarySerializer>>.FromStream("WaferManager"); if (ccc == null) return; List waferInfos = new List(); foreach (var moduleWafers in ccc) { waferInfos.AddRange(moduleWafers.Value.Select(a => a.Value)); } if (waferInfos.Any(a => a.WaferType == WaferType.ED)) { var maxEDUseCount = waferInfos.Where(a => a.WaferType == WaferType.ED).Max(a => a.UseCount); var maxEDUseThick = waferInfos.Where(a => a.WaferType == WaferType.ED).Max(a => a.UseThick); var maxEDUseTime = waferInfos.Where(a => a.WaferType == WaferType.ED).Max(a => a.UseTime); if (Singleton.Instance.Item.TryGetValue(MaintenanceItemEnum.FDCarrierUseFreq.ToString(), out var FDCarrierUseFreq)) Singleton.Instance.SetValue(FDCarrierUseFreq.Item, maxEDUseCount); if (Singleton.Instance.Item.TryGetValue(MaintenanceItemEnum.FDWaferThickness.ToString(), out var FDWaferThickness)) Singleton.Instance.SetValue(FDWaferThickness.Item, maxEDUseThick); if (Singleton.Instance.Item.TryGetValue(MaintenanceItemEnum.FDWaferUserTime.ToString(), out var FDWaferUserTime)) Singleton.Instance.SetValue(FDWaferUserTime.Item, maxEDUseTime); } if (waferInfos.Any(a => a.WaferType == WaferType.SD)) { var maxSDUseCount = waferInfos.Where(a => a.WaferType == WaferType.SD).Max(a => a.UseCount); var maxSDUseThick = waferInfos.Where(a => a.WaferType == WaferType.SD).Max(a => a.UseThick); var maxSDUseTime = waferInfos.Where(a => a.WaferType == WaferType.SD).Max(a => a.UseTime); if (Singleton.Instance.Item.TryGetValue(MaintenanceItemEnum.SDCarrierUseFreq.ToString(), out var SDCarrierUseFreq)) Singleton.Instance.SetValue(SDCarrierUseFreq.Item, maxSDUseCount); if (Singleton.Instance.Item.TryGetValue(MaintenanceItemEnum.SDWaferThickness.ToString(), out var SDWaferThickness)) Singleton.Instance.SetValue(SDWaferThickness.Item, maxSDUseThick); if (Singleton.Instance.Item.TryGetValue(MaintenanceItemEnum.SDWaferUserTime.ToString(), out var SDWaferUserTime)) Singleton.Instance.SetValue(SDWaferUserTime.Item, maxSDUseTime); } } #endregion /// /// 根据RecipeStep +StepGroup统计 累计膜厚 /// /// public void UpdateRecipeStepGroupThickness(string stepName, float thickness) { if (string.IsNullOrEmpty(stepName) || thickness <= 0) return; var stepNo = stepName.Split(':').FirstOrDefault(); var list = Singleton.Instance.Item.Values .Where(a => !string.IsNullOrEmpty(a.AdditionInformationDisplaySupplement)) .Where(a => a.Path == $"{DataItemEnum.Reactor}.{ReactorsEnum.StepThickness}") .Where(a => a.AdditionInformationDisplaySupplement.Split(',').Contains(stepNo)) .ToList(); if (list == null || list.Count == 0) return; foreach (var item in list) { if (item == null) continue; Singleton.Instance.Increase(item.Item, thickness); if (item.CurrentValue > item.StartValue && item.CurrentValue < item.LimitValue) MaintenanceProcessingCommandExec(item.MaintenanceProcessing, new AlarmReportItem(Singleton.Instance.ReatorStepThicknessWarning.Set, $"more than {item.StartValue} Å")); if (item.CurrentValue >= item.LimitValue) MaintenanceProcessingCommandExec(item.MaintenanceProcessing, new AlarmReportItem(Singleton.Instance.ReatorStepThicknessAlarm.Set, $"more than {item.LimitValue} Å")); } } /// /// 根据RecipeStep统计 Step执行Time 累计时间 /// /// public void UpdateRecipeStepRunTime(string stepName, double stepTime) { if (string.IsNullOrEmpty(stepName) || stepTime <= 0) return; var stepNo = stepName.Split(':').FirstOrDefault(); var list = Singleton.Instance.Item.Values.Where(a => a.Path == $"{DataItemEnum.Reactor}.{ReactorsEnum.StepRunTime}" && a.AdditionInformationDisplay == stepNo).ToList(); if (list == null || list.Count == 0) return; foreach (var item in list) { if (item == null) continue; var data = Math.Round(stepTime, 1, MidpointRounding.AwayFromZero); Singleton.Instance.Increase(item.Item, (float)data); } } /// /// 根据RecipeStep统计 Step执行 累计次数 /// /// public void UpdateRecipeStepFre(string stepName) { if (string.IsNullOrEmpty(stepName)) return; var stepNo = stepName.Split(':').FirstOrDefault(); var list = Singleton.Instance.Item.Values.Where(a => a.Path == $"{DataItemEnum.Reactor}.{ReactorsEnum.StepRunFreq}" && a.AdditionInformationDisplay == stepNo).ToList(); if (list == null || list.Count == 0) return; foreach (var item in list) { if (item == null) continue; Singleton.Instance.Increase(item.Item); } } /// /// 根据RecipeName统计 Recipe执行 累计次数 /// /// public void UpdateRecipeFre(string recipeName) { if (string.IsNullOrEmpty(recipeName)) return; var item = Singleton.Instance.Item.Values.Where(a => a.Item == MaintenanceItemEnum.RecipeExecuteFreq.ToString() && a.Path == $"{DataItemEnum.Reactor}.{ReactorsEnum.Recipe}" && a.AdditionInformationDisplay == recipeName).FirstOrDefault(); if (item == null) return; if (item != null && item.Item == MaintenanceItemEnum.RecipeExecuteFreq.ToString()) Singleton.Instance.Increase(item.Item); } /// /// 根据RecipeName统计累计膜厚 /// /// /// public void UpdateRecipeThickness(string recipeName, float thickness) { if (string.IsNullOrEmpty(recipeName) || thickness <= 0) return; var item = Singleton.Instance.Item.Values.Where(a => a.Item == MaintenanceItemEnum.RecipeThickness.ToString() && a.Path == $"{DataItemEnum.Reactor}.{ReactorsEnum.Recipe}" && a.AdditionInformationDisplay == recipeName).FirstOrDefault(); if (item == null) return; if (item != null && item.Item == MaintenanceItemEnum.RecipeThickness.ToString()) Singleton.Instance.Increase(item.Item, thickness); } /// /// 检查 RecipeStep 累计时间是否超限 /// /// /// public void CheckRecipeStepTimeMoreThan(string stepName, out bool isPause) { var stepNo = stepName.Split(':').FirstOrDefault(); var item = Singleton.Instance.Item.Values .Where(a => a.Path == $"{DataItemEnum.Reactor}.{ReactorsEnum.StepRunFreq}" && a.AdditionInformationDisplay == stepNo) .FirstOrDefault(); CheckRecipeMoreThan( stepNo, Singleton.Instance.ReatorStepRunTimeWarning.Set, Singleton.Instance.ReatorStepRunTimeAlarm.Set, item, "HH:mm", out isPause); } /// /// RecipeStep 累计次数是否超限 /// /// /// public void CheckRecipeStepFreqMoreThan(string stepName, out bool isPause) { var stepNo = stepName.Split(':').FirstOrDefault(); var item = Singleton.Instance.Item.Values .Where(a => a.Path == $"{DataItemEnum.Reactor}.{ReactorsEnum.StepRunFreq}" && a.AdditionInformationDisplay == stepNo) .FirstOrDefault(); CheckRecipeMoreThan( stepNo, Singleton.Instance.ReatorStepRunFreqWarning.Set, Singleton.Instance.ReatorStepRunFreqAlarm.Set, item, "times", out isPause); } /// /// 检查Recipe执行 累计次数是否超限 /// /// /// public void CheckRecipeExecuteFreqMoreThan(string recipeName, out bool isPause) { var item = Singleton.Instance.Item.Values .FirstOrDefault(a => a.Item == MaintenanceItemEnum.RecipeExecuteFreq.ToString() && a.Path == $"{DataItemEnum.Reactor}.{ReactorsEnum.Recipe}" && a.AdditionInformationDisplay == recipeName); CheckRecipeMoreThan( recipeName, Singleton.Instance.RecipeExecuteFreqWarning.Set, Singleton.Instance.RecipeExecuteFreqAlarm.Set, item, "times", out isPause, true); } /// /// 检查Recipe执行 累计膜厚是否超限 /// /// /// public void CheckRecipeThicknessMoreThan(string recipeName, out bool isPause) { var item = Singleton.Instance.Item.Values .FirstOrDefault(a => a.Item == MaintenanceItemEnum.RecipeThickness.ToString() && a.Path == $"{DataItemEnum.Reactor}.{ReactorsEnum.Recipe}" && a.AdditionInformationDisplay == recipeName); CheckRecipeMoreThan( recipeName, Singleton.Instance.RecipeThicknessWarning.Set, Singleton.Instance.RecipeThicknessAlarm.Set, item, "Å", out isPause,true); } private void CheckRecipeMoreThan( string recipeName, Action warningSetId, Action alarmSetId, ScheduleMaintenanceDataItem item, string unit, out bool isPause, bool isEnableJobAutoStart = false) { isPause = false; if (string.IsNullOrEmpty(recipeName)) return; if (item == null || !Enum.TryParse(item.MaintenanceProcessing, out var command)) return; string message = $"{item.AdditionInformationDisplay} {item.CurrentValue} more than {item.StartValue} {unit}"; string nullMessage = $"No recipe file associated, unable to trigger JobAutoStart"; var warningAction = new AlarmReportItem(warningSetId, message); var alarmAction = new AlarmReportItem(alarmSetId, message); if (item.CurrentValue > item.StartValue && item.CurrentValue < item.LimitValue && command != MaintenanceProcessingCommandEnum.None) { warningAction.Exec(); } if (item.CurrentValue >= item.LimitValue) { ExecuteAlarm(alarmAction, ref isPause); if (isEnableJobAutoStart) { switch (command) { case MaintenanceProcessingCommandEnum.JobAutoStart: if (string.IsNullOrEmpty(item.AssociationProcessRecipeName)) { ExecuteAlarm(new AlarmReportItem(alarmSetId, nullMessage), ref isPause); return; } CheckToPostMessage((int)MSG.RunOtherRecipe, item.AssociationProcessRecipeName, "Process"); break; } } } } private void ExecuteAlarm(AlarmReportItem alarmAction, ref bool isPause) { alarmAction.Exec(); isPause = true; } } }