PMN2Purge.cs 47 KB

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  1. using Aitex.Core.RT.DataCenter;
  2. using Aitex.Core.RT.Device;
  3. using Aitex.Core.RT.Device.Unit;
  4. using Aitex.Core.RT.IOCore;
  5. using Aitex.Core.RT.Log;
  6. using Aitex.Core.RT.SCCore;
  7. using Aitex.Core.Util;
  8. using DocumentFormat.OpenXml.Packaging;
  9. using DocumentFormat.OpenXml.Spreadsheet;
  10. using FurnaceRT.Devices;
  11. using FurnaceRT.Equipments.PMs.Devices;
  12. using FurnaceRT.Equipments.Systems;
  13. using FurnaceRT.Extraction;
  14. using MECF.Framework.Common.CommonData.SorterDefines;
  15. using MECF.Framework.Common.Equipment;
  16. using MECF.Framework.Common.Tolerance;
  17. using MECF.Framework.Common.Utilities;
  18. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.TDK;
  19. using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
  20. using System;
  21. using System.Collections.Generic;
  22. using System.Diagnostics;
  23. using System.Linq;
  24. namespace FurnaceRT.Equipments.PMs
  25. {
  26. /// <summary>
  27. /// 分布类 定义N2Purge的执行逻辑
  28. /// </summary>
  29. public partial class PMModule
  30. {
  31. private R_TRIG _trigN2UpRD = new R_TRIG();
  32. private R_TRIG _trigN2DownRD = new R_TRIG();
  33. private R_TRIG _trigN2AirUpRD = new R_TRIG();
  34. private R_TRIG _trigN2AirDownRD = new R_TRIG();
  35. private R_TRIG _trigN2AirDownTwoRD = new R_TRIG();
  36. private R_TRIG _trigSelectN2PurgeModeD = new R_TRIG();
  37. private FilterChecker _filterChecker = new FilterChecker();
  38. private R_TRIG tank1_TRIG = new R_TRIG();
  39. private R_TRIG tank2_TRIG = new R_TRIG();
  40. private Dictionary<string, Tuple<R_TRIG, List<Tuple<IDevice, string>>>> _n2PurgeSequenceAction;
  41. private Dictionary<string, Func<bool>> _n2PurgeSequenceStatus;
  42. private Dictionary<string, R_TRIG> _rTrigDict;
  43. private N2PurgeModeEnum _N2PurgeMode = N2PurgeModeEnum.Auto;
  44. private double _n2PurgeData = 20;
  45. private double _n2ToAirData = 185000;
  46. private N2PurgeModeEnum _currentPhase;
  47. private double _manualPhase2StabilityTime = 0;
  48. private double _manualPhase4StabilityTime = 0;
  49. private bool _enableAbortN2purge = true;
  50. private int _phase1CycleCount = 0;
  51. private int _phase1CycleCountSC = 0;
  52. private bool _canSwitchToPhase2 = true;
  53. private FilterChecker _filterCheckerTank1 = new FilterChecker();
  54. private FilterChecker _filterCheckerTank2 = new FilterChecker();
  55. private Dictionary<string, Stopwatch> _allTimeDict = new Dictionary<string, Stopwatch>();
  56. private void InitN2PurgeData()
  57. {
  58. DATA.Subscribe($"{Module}.N2PurgeLimitData", () => GetN2PurgeLimitData());
  59. DATA.Subscribe($"{Module}.O2DensityData", () => ConcentrationO2.Value.ToString("f3"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  60. DATA.Subscribe($"{Module}.CheckO2Location", () => GetCheckO2Location(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  61. DATA.Subscribe($"{Module}.O2SetCheckSetPoint", () => GetO2SetCheckSetPoint(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
  62. DATA.Subscribe($"{Module}.N2PurgeMode", () => SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "");
  63. var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
  64. if (!string.IsNullOrEmpty(selectN2PurgeMode))
  65. {
  66. if (selectN2PurgeMode != _N2PurgeMode.ToString())
  67. {
  68. SetN2PurgeModeAction(selectN2PurgeMode);
  69. }
  70. }
  71. var currentPhase = SC.ContainsItem("PM1.SelectN2PurgeModePhase") ? SC.GetStringValue("PM1.SelectN2PurgeModePhase") : "";
  72. if (!string.IsNullOrEmpty(currentPhase))
  73. {
  74. var enumCurrentPhase = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), currentPhase);
  75. _currentPhase = enumCurrentPhase;
  76. }
  77. _filterCheckerTank1.CheckInterval = 1;
  78. _filterCheckerTank2.CheckInterval = 1;
  79. }
  80. private void InitN2PurgeConfigData()
  81. {
  82. _n2PurgeData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2PurgeData") : 20;
  83. _n2ToAirData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2ToAirData") : 185000;
  84. _enableAbortN2purge = SC.ContainsItem($"PM1.N2Purge.EnableAbortN2purge") ? SC.GetValue<bool>("PM1.N2Purge.EnableAbortN2purge") : false;
  85. _manualPhase2StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase2.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase2.StabilityTime") : 0;
  86. _manualPhase4StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase4.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase4.StabilityTime") : 0;
  87. _phase1CycleCountSC = SC.ContainsItem($"PM1.N2Purge.Manual_phase1.CycleCount") ? SC.GetValue<int>("PM1.N2Purge.Manual_phase1.CycleCount") : 0;
  88. _n2PurgeSequenceAction = ExtractionMethods.GetN2PurgeSequenceAction();
  89. _n2PurgeSequenceStatus = new Dictionary<string, Func<bool>>()
  90. {
  91. {"N2PurgeAIRTo20PPM",()=> GetN2PurgeAIRTo20PPMStatus()},
  92. {"N2PurgeUnder20PPM",()=> GetN2PurgeUnder20PPMStatus()},
  93. {"AIR",()=> GetN2PurgeAIRStatus()},
  94. {"DoorOpen",()=> GetN2PurgeDoorOpenStatus()},
  95. {"Foup1",()=> GetN2PurgeFoup1Status()},
  96. {"Foup2",()=> GetN2PurgeFoup2Status()},
  97. {N2PurgeModeEnum.Manual_phase1.ToString(),()=> CheckN2PurgePhase1() },
  98. {N2PurgeModeEnum.Manual_phase2.ToString(),()=> CheckN2PurgePhase2()},
  99. {N2PurgeModeEnum.Manual_phase3.ToString(),()=> CheckN2PurgePhase3() },
  100. {N2PurgeModeEnum.Manual_phase4.ToString(),()=> CheckN2PurgePhase4() },
  101. {N2PurgeModeEnum.Manual_phase5.ToString(),()=> CheckN2PurgePhase5() },
  102. };
  103. _allTimeDict = new Dictionary<string, Stopwatch>()
  104. {
  105. {N2PurgeModeEnum.Manual_phase1.ToString(),new Stopwatch() },
  106. {N2PurgeModeEnum.Manual_phase2.ToString(),new Stopwatch()},
  107. {N2PurgeModeEnum.Manual_phase3.ToString(),new Stopwatch()},
  108. {N2PurgeModeEnum.Manual_phase4.ToString(),new Stopwatch() },
  109. {N2PurgeModeEnum.Manual_phase5.ToString(),new Stopwatch() }
  110. };
  111. _rTrigDict = new Dictionary<string, R_TRIG>();
  112. }
  113. private void MonitorN2Purge()
  114. {
  115. var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
  116. if (string.IsNullOrEmpty(selectN2PurgeMode))
  117. {
  118. return;
  119. }
  120. SetN2PurgeModeAction(selectN2PurgeMode);
  121. }
  122. private void MonitorTank1LeakAgeExec()
  123. {
  124. _filterCheckerTank1.Monitor(SensorHCDTANKH != null && SensorHCDTANKH.Value);
  125. if (_filterCheckerTank1.Trig)
  126. {
  127. LOG.Info($"SensorHCDTANKH trigger:{SensorHCDTANKH.Value}");
  128. SetHREFEnable(new object[1] { false });
  129. ValveAV113?.TurnValve(false, out _);
  130. }
  131. if ((SensorHCDTANKH != null && SensorHCDTANKH.Value) && TrigSIREFON.Value)
  132. {
  133. LOG.Info($"SensorHCDTANKH trigger:{SensorHCDTANKH.Value},TrigCREFON:{TrigSIREFON.Value}");
  134. SetHREFEnable(new object[1] { false });
  135. ValveAV113?.TurnValve(false, out _);
  136. }
  137. }
  138. public bool SetHREFEnable(object[] param)
  139. {
  140. if (param == null || param.Length <= 0)
  141. return true;
  142. bool.TryParse(param[0].ToString(), out bool isEnable);
  143. if (isEnable)
  144. {
  145. if (SensorHREFILK != null && SensorHREFILK.Value)
  146. {
  147. TrigSIREFON?.CheckAndSet(isEnable, out _);
  148. }
  149. }
  150. else
  151. {
  152. TrigSIREFON?.CheckAndSet(isEnable, out _);
  153. }
  154. return true;
  155. }
  156. private void MonitorTank2LeakAgeExec()
  157. {
  158. _filterCheckerTank2.Monitor(SensorCSOURCETANKH != null && SensorCSOURCETANKH.Value);
  159. if (_filterCheckerTank2.Trig)
  160. {
  161. LOG.Info($"SensorCSOURCETANKH trigger:{SensorCSOURCETANKH.Value}");
  162. SetCREFEnable(new object[1] { false });
  163. ValveAV121?.TurnValve(false, out _);
  164. }
  165. if ((SensorCSOURCETANKH != null && SensorCSOURCETANKH.Value) && (TrigCREFON != null && TrigCREFON.Value))
  166. {
  167. LOG.Info($"SensorCSOURCETANKH trigger:{SensorCSOURCETANKH.Value},TrigCREFON:{TrigCREFON.Value}");
  168. SetCREFEnable(new object[1] { false });
  169. ValveAV121?.TurnValve(false, out _);
  170. }
  171. }
  172. public bool SetCREFEnable(object[] param)
  173. {
  174. if (param == null || param.Length <= 0)
  175. return true;
  176. bool.TryParse(param[0].ToString(), out bool isEnable);
  177. if (isEnable)
  178. {
  179. if (SensorCREFILK != null && SensorCREFILK.Value)
  180. {
  181. TrigCREFON?.CheckAndSet(isEnable, out _);
  182. }
  183. }
  184. else
  185. {
  186. TrigCREFON?.CheckAndSet(isEnable, out _);
  187. }
  188. return true;
  189. }
  190. public void SetN2PurgeModePhase(string setValue)
  191. {
  192. if (SC.ContainsItem("PM1.N2PurgeModePhase"))
  193. {
  194. var data = SC.GetStringValue("PM1.N2PurgeModePhase");
  195. if (data != setValue)
  196. {
  197. SC.SetItemValue("PM1.N2PurgeModePhase", setValue);
  198. }
  199. }
  200. }
  201. /// <summary>
  202. /// TODO:这里展示数据的逻辑 不正确,待明确逻辑
  203. /// </summary>
  204. /// <returns></returns>
  205. private double GetN2PurgeLimitData()
  206. {
  207. if (_N2PurgeMode == N2PurgeModeEnum.N2PurgeMode)
  208. {
  209. if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
  210. {
  211. if (SC.ContainsItem("PM1.N2PurgeModePhase"))
  212. {
  213. var n2PurgeModePhase = SC.GetStringValue("PM1.N2PurgeModePhase");
  214. if (n2PurgeModePhase == N2PurgeModeEnum.WaferCharge.ToString())
  215. {
  216. return (float)SC.GetValue<double>("PM1.N2Purge.WaferCharge.FOUPO2CheckSV");
  217. }
  218. else if (n2PurgeModePhase == N2PurgeModeEnum.FoupEnter.ToString())
  219. {
  220. return (float)SC.GetValue<double>("PM1.N2Purge.FoupEnter.FOUPO2CheckSV");
  221. }
  222. else if (n2PurgeModePhase == N2PurgeModeEnum.WaferDisCharge.ToString())
  223. {
  224. return (float)SC.GetValue<double>("PM1.N2Purge.WaferDisCharge.FOUPO2CheckSV");
  225. }
  226. return (float)SC.GetValue<double>("System.N2PurgeData");
  227. }
  228. }
  229. if (CheckIsLASide())
  230. {
  231. if (SC.ContainsItem("PM1.N2PurgeModePhase"))
  232. {
  233. var n2PurgeModePhase = SC.GetStringValue("PM1.N2PurgeModePhase");
  234. if (n2PurgeModePhase == N2PurgeModeEnum.BoatLoad.ToString())
  235. {
  236. return (float)SC.GetValue<double>("PM1.N2Purge.BoatLoad.LAO2CheckSV");
  237. }
  238. if (n2PurgeModePhase == N2PurgeModeEnum.BoatUnLoad.ToString())
  239. {
  240. return (float)SC.GetValue<double>("PM1.N2Purge.BoatUnLoad.LAO2CheckSV");
  241. }
  242. if (n2PurgeModePhase == N2PurgeModeEnum.FoupEnter.ToString())
  243. {
  244. return (float)SC.GetValue<double>("PM1.N2Purge.FoupEnter.LAO2CheckSV");
  245. }
  246. if (n2PurgeModePhase == N2PurgeModeEnum.WaferCharge.ToString())
  247. {
  248. return (float)SC.GetValue<double>("PM1.N2Purge.WaferCharge.LAO2CheckSV");
  249. }
  250. if (n2PurgeModePhase == N2PurgeModeEnum.WaferDisCharge.ToString())
  251. {
  252. return (float)SC.GetValue<double>("PM1.N2Purge.WaferDisCharge.LAO2CheckSV");
  253. }
  254. if (n2PurgeModePhase == N2PurgeModeEnum.Idle.ToString())
  255. {
  256. return (float)SC.GetValue<double>("System.N2PurgeData");
  257. }
  258. return (float)SC.GetValue<double>("System.N2PurgeData");
  259. }
  260. }
  261. return _n2PurgeData;
  262. }
  263. if (_N2PurgeMode == N2PurgeModeEnum.ATMMode)
  264. {
  265. return _n2ToAirData;
  266. }
  267. return ConcentrationO2.Value;
  268. }
  269. private void SetN2PurgeModeAction(string selectN2PurgeMode)
  270. {
  271. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), selectN2PurgeMode);
  272. if (_N2PurgeMode == N2PurgeModeEnum.N2PurgeMode)
  273. {
  274. if (_currentPhase == N2PurgeModeEnum.Manual_phase1)
  275. {
  276. _filterChecker.CheckInterval = 3;
  277. _filterChecker.Monitor(CheckN2PurgePhase2());
  278. if (_filterChecker.Trig && _canSwitchToPhase2)
  279. {
  280. LOG.Info($" N2PurgeMode Trigger from Manual_phase1 to Manual_phase2,O2:{ConcentrationO2.Value}");
  281. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase2.ToString());
  282. }
  283. }
  284. else if (_currentPhase == N2PurgeModeEnum.Manual_phase2)
  285. {
  286. if (!_allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].IsRunning && _canSwitchToPhase2)
  287. {
  288. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  289. }
  290. var second = _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Elapsed.TotalSeconds;
  291. if (second >= _manualPhase2StabilityTime)
  292. {
  293. if (CheckN2PurgePhase1())
  294. {
  295. LOG.Info($"N2PurgeMode Trigger Manual_phase1 was triggered {second} seconds later,O2:{ConcentrationO2.Value}");
  296. N2PurgeFaileAlarm.Set();
  297. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  298. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Stop();
  299. _canSwitchToPhase2 = false;
  300. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
  301. }
  302. if (CheckN2PurgePhase2())
  303. {
  304. LOG.Info($"N2PurgeMode Trigger Hold Manual_phase2 was triggered {second} seconds later,O2:{ConcentrationO2.Value}");
  305. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
  306. _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Stop();
  307. _canSwitchToPhase2 = false;
  308. }
  309. }
  310. }
  311. else
  312. {
  313. if (CheckN2PurgePhase1())
  314. {
  315. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase1,O2:{ConcentrationO2.Value}");
  316. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
  317. }
  318. else if (CheckN2PurgePhase2())
  319. {
  320. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase2,O2:{ConcentrationO2.Value}");
  321. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase2.ToString());
  322. }
  323. }
  324. }
  325. if (_N2PurgeMode == N2PurgeModeEnum.ATMMode)
  326. {
  327. if (_currentPhase == N2PurgeModeEnum.Manual_phase3)
  328. {
  329. var checkResult = CheckN2PurgePhase4();
  330. if (!_allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].IsRunning)
  331. {
  332. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Restart();
  333. }
  334. var second = _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Elapsed.TotalSeconds;
  335. if (second >= _manualPhase4StabilityTime && checkResult)
  336. {
  337. LOG.Info($"N2PurgeMode Trigger from Manual_phase3 to Manual_phase4 is triggered {second} seconds later,O2:{ConcentrationO2.Value}");
  338. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
  339. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Restart();
  340. _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Stop();
  341. }
  342. }
  343. else if (_currentPhase == N2PurgeModeEnum.Manual_phase4)
  344. {
  345. if (CheckN2PurgePhase5())
  346. {
  347. LOG.Info($"N2PurgeMode Trigger from Manual_phase4 to Manual_phase5,O2:{ConcentrationO2.Value}");
  348. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase5.ToString());
  349. }
  350. //if (CheckN2PurgePhase3( ))
  351. //{
  352. // LOG.Info($"N2PurgeMode Trigger from Manual_phase4 to Manual_phase3,O2:{o2Value}");
  353. // SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
  354. //}
  355. }
  356. else if (_currentPhase == N2PurgeModeEnum.Manual_phase5)
  357. {
  358. if (CheckN2PurgePhase4())
  359. {
  360. LOG.Info($"N2PurgeMode Trigger from Manual_phase5 to Manual_phase4,O2:{ConcentrationO2.Value}");
  361. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
  362. }
  363. //if (CheckN2PurgePhase3( ))
  364. //{
  365. // LOG.Info($"N2PurgeMode Trigger from Manual_phase5 to Manual_phase3,O2:{o2Value}");
  366. // SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
  367. //}
  368. }
  369. else
  370. {
  371. if (CheckN2PurgePhase3())
  372. {
  373. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase3,O2:{ConcentrationO2.Value}");
  374. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
  375. return;
  376. }
  377. if (CheckN2PurgePhase5())
  378. {
  379. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase5,O2:{ConcentrationO2.Value}");
  380. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase5.ToString());
  381. return;
  382. }
  383. if (CheckN2PurgePhase4())
  384. {
  385. LOG.Info($"N2PurgeMode Trigger Directly triggered Manual_phase4,O2:{ConcentrationO2.Value}");
  386. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
  387. return;
  388. }
  389. }
  390. }
  391. if (_N2PurgeMode == N2PurgeModeEnum.ManualMode || _N2PurgeMode == N2PurgeModeEnum.Auto)
  392. {
  393. _currentPhase = _N2PurgeMode;
  394. }
  395. //switch (_N2PurgeMode)
  396. //{
  397. // case N2PurgeModeEnum.Auto:
  398. // // 自动模式下的操作
  399. // break;
  400. // case N2PurgeModeEnum.ManualMode:
  401. // break;
  402. // case N2PurgeModeEnum.N2PurgeMode:
  403. // ProcessPhase(_trigN2UpRD, N2PurgeModeEnum.Manual_phase1.ToString());
  404. // ProcessPhase(_trigN2DownRD, N2PurgeModeEnum.Manual_phase2.ToString(), _manualPhase2NeedCheck, (int)(_manualPhase2StabilityTime * 1000));
  405. // break;
  406. // case N2PurgeModeEnum.ATMMode:
  407. // ProcessPhase(_trigN2AirDownRD, N2PurgeModeEnum.Manual_phase3.ToString());
  408. // ProcessPhase(_trigN2AirUpRD, N2PurgeModeEnum.Manual_phase4.ToString(), _manualPhase4NeedCheck, (int)(_manualPhase4StabilityTime * 1000));
  409. // ProcessPhase(_trigN2AirDownTwoRD, N2PurgeModeEnum.Manual_phase5.ToString());
  410. // break;
  411. //}
  412. }
  413. bool CheckConditionInTime(string modeKey, int millisecondsTimeout, Func<bool> condition)
  414. {
  415. var stopwatch = _allTimeDict[modeKey];
  416. if (!_allTimeDict[modeKey].IsRunning)
  417. {
  418. _allTimeDict[modeKey].Restart();
  419. }
  420. while (stopwatch.ElapsedMilliseconds < millisecondsTimeout)
  421. {
  422. if (!_allTimeDict[modeKey].IsRunning)
  423. {
  424. return true;
  425. }
  426. if (!condition())
  427. {
  428. _allTimeDict[modeKey].Stop();
  429. _allTimeDict[modeKey].Reset();
  430. return false;
  431. }
  432. }
  433. if (stopwatch.ElapsedMilliseconds > millisecondsTimeout)
  434. {
  435. _allTimeDict[modeKey].Stop();
  436. _allTimeDict[modeKey].Reset();
  437. }
  438. return true;
  439. }
  440. private void ProcessPhase(R_TRIG r_TRIG, string modeKey, bool needCheck = false, int time = 0)
  441. {
  442. r_TRIG.CLK = needCheck ? (CheckConditionInTime(modeKey, time, () => _n2PurgeSequenceStatus[modeKey].Invoke())) : _n2PurgeSequenceStatus[modeKey].Invoke();
  443. if (r_TRIG.Q)
  444. {
  445. LOG.Info($"N2PurgeMode Trigger {modeKey}!,O2:{ConcentrationO2.Value},time:{_allTimeDict[modeKey].ElapsedMilliseconds}");
  446. SetN2PurgeValveData(modeKey);
  447. _allTimeDict[modeKey].Stop();
  448. _allTimeDict[modeKey].Reset();
  449. }
  450. }
  451. public void RestAllN2PrugeRD()
  452. {
  453. _trigN2AirDownRD.RST = false;
  454. _trigN2AirUpRD.RST = false;
  455. _trigN2DownRD.RST = false;
  456. _trigN2UpRD.RST = false;
  457. foreach (var item in _allTimeDict)
  458. {
  459. item.Value.Stop();
  460. item.Value.Reset();
  461. }
  462. _canSwitchToPhase2 = true;
  463. }
  464. public void SetN2PurgeValveData(string mode, string msg = "")
  465. {
  466. var value = _n2PurgeSequenceAction[mode];
  467. _currentPhase = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
  468. if (SC.ContainsItem("PM1.SelectN2PurgeModePhase"))
  469. {
  470. SC.SetItemValue("PM1.SelectN2PurgeModePhase", mode);
  471. }
  472. foreach (var operateItem in value.Item2)
  473. {
  474. if (operateItem.Item1 is IoMFC)
  475. {
  476. var ioMFc = (operateItem.Item1 as IoMFC);
  477. { ioMFc.SetMfcValue(out _, 0, new object[] { float.Parse(operateItem.Item2.ToString()) }); }
  478. }
  479. if (operateItem.Item1 is IoValve)
  480. {
  481. var ioValve = (operateItem.Item1 as IoValve);
  482. ioValve.TurnValve(bool.Parse(operateItem.Item2), out _);
  483. }
  484. if (operateItem.Item1 is IoTrigger)
  485. {
  486. var ioTrigger = (operateItem.Item1 as IoTrigger);
  487. ioTrigger.CheckAndSet(bool.Parse(operateItem.Item2), out _);
  488. }
  489. }
  490. }
  491. private bool SetN2PurgeMode(out string reason, int time, object[] param)
  492. {
  493. reason = string.Empty;
  494. var mode = param[0].ToString();
  495. _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
  496. if (SC.ContainsItem("PM1.SelectN2PurgeMode"))
  497. {
  498. SC.SetItemValue("PM1.SelectN2PurgeMode", mode);
  499. }
  500. RestAllN2PrugeRD();
  501. return true;
  502. }
  503. /// <summary>
  504. /// 获取当前O2检测位置的设定值
  505. /// TODO:这里展示数据的逻辑也不正确,待明确逻辑
  506. /// </summary>
  507. /// <returns></returns>
  508. private string GetO2SetCheckSetPoint()
  509. {
  510. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  511. {
  512. var key = "PM1.N2Purge.N2PurgeLAO2CheckSV";
  513. if (SC.ContainsItem(key))
  514. return SC.GetValue<double>(key).ToString("f3");
  515. }
  516. if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
  517. {
  518. var key = "PM1.N2Purge.N2PurgeFOUPO2CheckSV";
  519. if (SC.ContainsItem(key))
  520. return SC.GetValue<double>(key).ToString("f3");
  521. }
  522. return "";
  523. }
  524. /// <summary>
  525. /// 获取当前O2检测位置
  526. /// </summary>
  527. /// <returns></returns>
  528. private string GetCheckO2Location()
  529. {
  530. if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
  531. return SensorO2DetectSideLA.Display;
  532. if (SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value)
  533. return SensorO2DetectSideFIMS1.Display;
  534. if (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value)
  535. return SensorO2DetectSideFIMS2.Display;
  536. return "";
  537. }
  538. /// <summary>
  539. /// 获取当前O2浓度
  540. /// </summary>
  541. /// <returns></returns>
  542. public bool CheckIsLASide()
  543. {
  544. if (SensorO2DetectSideLA == null)
  545. {
  546. return false;
  547. }
  548. return SensorO2DetectSideLA.Value;
  549. }
  550. private bool CheckN2PurgePhase1()
  551. {
  552. return ((int)ConcentrationO2.Value >= _n2PurgeData) && GetLADoorOpenStatus() && CheckIsLASide();
  553. }
  554. private bool CheckN2PurgePhase2()
  555. {
  556. return ((int)ConcentrationO2.Value < _n2PurgeData) && GetLADoorOpenStatus() && CheckIsLASide();
  557. }
  558. private bool CheckN2PurgePhase3()
  559. {
  560. return ((int)ConcentrationO2.Value) < _n2ToAirData && GetLADoorOpenStatus() && CheckIsLASide();
  561. }
  562. private bool CheckN2PurgePhase5()
  563. {
  564. return ((int)ConcentrationO2.Value) >= _n2ToAirData && !GetLADoorOpenStatus() && CheckIsLASide();
  565. }
  566. private bool CheckN2PurgePhase4()
  567. {
  568. return (((int)ConcentrationO2.Value)) >= _n2ToAirData && GetLADoorOpenStatus() && CheckIsLASide();
  569. }
  570. private bool GetN2PurgeAIRTo20PPMStatus()
  571. {
  572. return ValveAV202.DOOpen.Value;
  573. }
  574. public bool GetN2PurgeUnder20PPMStatus(double value = 20)
  575. {
  576. return ConcentrationO2.Value < value;
  577. }
  578. private bool GetN2PurgeAIRStatus()
  579. {
  580. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  581. }
  582. private bool GetLADoorOpenStatus()
  583. {
  584. return (bool)(SensorLADoorSw1?.Value);
  585. }
  586. private bool GetN2PurgeDoorOpenStatus()
  587. {
  588. return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
  589. }
  590. private bool GetN2PurgeFoup1Status()
  591. {
  592. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS1.IsFoupExist && FIMS1.CollisionAvoidanceUpDownStatus == DeviceStatus.Down;
  593. }
  594. private bool GetN2PurgeFoup2Status()
  595. {
  596. return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS2.IsFoupExist && FIMS2.CollisionAvoidanceUpDownStatus == DeviceStatus.Down; ;
  597. }
  598. public bool IsAbortN2purge()
  599. {
  600. if (!_enableAbortN2purge)
  601. {
  602. return false;
  603. }
  604. if (SensorSL02001gasboxdoorsw11.Value || SensorSL02001gasboxdoorsw12.Value || SensorSL02002gasboxdoorsw11.Value || SensorSL02002gasboxdoorsw12.Value || SensorSL05002LAdoorsw2.Value || SensorSL05004LAfurnacedoorsw.Value)
  605. {
  606. return true;
  607. }
  608. return false;
  609. }
  610. public void SetN2PurgeLAO2CheckFirstEnable(bool isEable)
  611. {
  612. if (TrigN2PurgeLAO2CheckFirstEnable != null && TrigN2PurgeLAO2CheckFirstEnable.Value != isEable)
  613. {
  614. TrigN2PurgeLAO2CheckFirstEnable.SetTrigger(isEable, out _);
  615. }
  616. }
  617. public void SetN2PurgeFIMS1O2CheckEnable(ModuleName fims, bool isEable)
  618. {
  619. if (fims == ModuleName.FIMS1 && TrigN2PurgeFIMS1O2CheckEnable != null && TrigN2PurgeFIMS1O2CheckEnable.Value != isEable)
  620. {
  621. TrigN2PurgeFIMS1O2CheckEnable.SetTrigger(isEable, out _);
  622. }
  623. if (fims == ModuleName.FIMS2 && TrigN2PurgeFIMS2O2CheckEnable != null && TrigN2PurgeFIMS2O2CheckEnable.Value != isEable)
  624. {
  625. TrigN2PurgeFIMS2O2CheckEnable.SetTrigger(isEable, out _);
  626. }
  627. }
  628. public void SetN2PurgeProcess(bool isEable)
  629. {
  630. if (TrigN2PurgeProcess != null && TrigN2PurgeProcess.Value != isEable)
  631. {
  632. TrigN2PurgeProcess.SetTrigger(isEable, out _);
  633. }
  634. }
  635. public void SetN2PurgeLAO2CheckSV(float value)
  636. {
  637. if (TrigN2PurgeLAO2CheckSV != null)
  638. TrigN2PurgeLAO2CheckSV?.SetAOTrigger(value, out _);
  639. }
  640. public void SetN2PurgeFOUPO2CheckSV(float value)
  641. {
  642. if (TrigN2PurgeFOUPO2CheckSV != null)
  643. TrigN2PurgeFOUPO2CheckSV?.SetAOTrigger(value, out _);
  644. }
  645. /// <summary>
  646. /// N2Purge相关时间参数,电气要求设定为秒,实际下发按照毫秒
  647. /// </summary>
  648. public void SetN2PurgeParameters(string n2PurgeModeEnum)
  649. {
  650. if (SC.ContainsItem("PM1.N2Purge.TransferRoomArrivalWaitTime") && TrigN2PurgeLAO2CheckTime != null)
  651. {
  652. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomArrivalWaitTime");
  653. TrigN2PurgeLAO2CheckTime.SetAOTrigger(time, out _);
  654. }
  655. if (SC.ContainsItem("PM1.N2Purge.TransferRoomStableWaitTime") && TrigN2PurgeLAO2OverTime != null)
  656. {
  657. var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomStableWaitTime");
  658. TrigN2PurgeLAO2OverTime.SetAOTrigger(time, out _);
  659. }
  660. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerArrivalWaitTime") && TrigN2PurgeFOUPO2CheckTime != null)
  661. {
  662. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerArrivalWaitTime");
  663. TrigN2PurgeFOUPO2CheckTime.SetAOTrigger(time, out _);
  664. }
  665. if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime") && TrigN2PurgeFOUPO2OverTime != null)
  666. {
  667. var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerStableWaitTime");
  668. TrigN2PurgeFOUPO2OverTime.SetAOTrigger(time, out _);
  669. }
  670. if (SC.ContainsItem("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") && TrigN2PurgeExchangeLATOFOUPWaitTime != null)
  671. {
  672. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime");
  673. TrigN2PurgeExchangeLATOFOUPWaitTime.SetAOTrigger(time, out _);
  674. }
  675. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") && TrigN2PurgeExchangeFOUPTOLAWaitTime != null)
  676. {
  677. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime");
  678. TrigN2PurgeExchangeFOUPTOLAWaitTime.SetAOTrigger(time, out _);
  679. }
  680. if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToFOUPTime") && TrigN2PurgeExchangeFOUPTOFOUPWaitTime != null)
  681. {
  682. var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToFOUPTime");
  683. TrigN2PurgeExchangeFOUPTOFOUPWaitTime.SetAOTrigger(time, out _);
  684. }
  685. SetN2PurgeModePhase(n2PurgeModeEnum);
  686. //这2个SV下发值应该根据什么阶段下发什么值
  687. if (n2PurgeModeEnum == N2PurgeModeEnum.WaferCharge.ToString())
  688. {
  689. SetN2PurgeFOUPO2CheckSV((float)GetWaferChargeFOUPO2CheckSV());
  690. SetN2PurgeLAO2CheckSV((float)GetWaferChargeLAO2CheckSV());
  691. if (GetWaferChargeLAN2purgeConfig())
  692. {
  693. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
  694. RestAllN2PrugeRD();
  695. }
  696. }
  697. if (n2PurgeModeEnum == N2PurgeModeEnum.FoupEnter.ToString())
  698. {
  699. SetN2PurgeFOUPO2CheckSV((float)GetFoupEnterFOUPO2CheckSV());
  700. SetN2PurgeLAO2CheckSV((float)GetFoupEnterLAO2CheckSV());
  701. if (GetFoupEnterLAN2purgeConfig())
  702. {
  703. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
  704. RestAllN2PrugeRD();
  705. }
  706. }
  707. if (n2PurgeModeEnum == N2PurgeModeEnum.WaferDisCharge.ToString())
  708. {
  709. SetN2PurgeFOUPO2CheckSV((float)GetWaferDisChargeFOUPO2CheckSV());
  710. SetN2PurgeLAO2CheckSV((float)GetWaferDisChargeLAO2CheckSV());
  711. if (GetWaferDisChargeLAN2purgeConfig())
  712. {
  713. SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
  714. RestAllN2PrugeRD();
  715. }
  716. }
  717. }
  718. /// <summary>
  719. /// Job start的时候,就根据Process的配置判定是否需要进行LA压氧
  720. /// </summary>
  721. /// <param name="n2PurgeModeStr"></param>
  722. public void InitN2PurgeMode(string n2PurgeModeStr)
  723. {
  724. if (string.IsNullOrEmpty(n2PurgeModeStr))
  725. return;
  726. if (n2PurgeModeStr.ToLower() == "none")
  727. return;
  728. if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue<bool>("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode"))
  729. {
  730. var setValue = GetN2PurgeModeEnumByStr(n2PurgeModeStr);
  731. SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue);
  732. RestAllN2PrugeRD();
  733. }
  734. }
  735. public bool CheckFimsIsNeedOxygenPressure(bool fimsN2PurgeConfig, string recipeN2PurgeModeStr, out bool isCheckO2, bool isCheckRecipeHeader = true)
  736. {
  737. isCheckO2 = false;
  738. var currectN2PurgeModel = GetLACurrectN2purgeMode();
  739. if (isCheckRecipeHeader)
  740. {
  741. if (string.IsNullOrEmpty(recipeN2PurgeModeStr))
  742. return false;
  743. if (recipeN2PurgeModeStr.ToLower().Equals("n2 purge"))
  744. {
  745. recipeN2PurgeModeStr = N2PurgeModeEnum.N2PurgeMode.ToString();
  746. }
  747. if (recipeN2PurgeModeStr.ToLower().Contains("atm"))
  748. {
  749. recipeN2PurgeModeStr = IsATMMode(recipeN2PurgeModeStr);
  750. }
  751. var n2PurgeEnum = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), recipeN2PurgeModeStr);
  752. if (n2PurgeEnum == N2PurgeModeEnum.ATMMode)
  753. return false;
  754. if (n2PurgeEnum == N2PurgeModeEnum.N2PurgeMode)
  755. {
  756. if (currectN2PurgeModel == N2PurgeModeEnum.N2PurgeMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ATMMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ManualMode.ToString())
  757. {
  758. if (fimsN2PurgeConfig)
  759. {
  760. isCheckO2 = true;
  761. return true;
  762. }
  763. else
  764. {
  765. return false;
  766. }
  767. }
  768. }
  769. if (n2PurgeEnum == N2PurgeModeEnum.None)
  770. {
  771. if (currectN2PurgeModel == N2PurgeModeEnum.ATMMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ManualMode.ToString())
  772. {
  773. return false;
  774. }
  775. if (currectN2PurgeModel == N2PurgeModeEnum.N2PurgeMode.ToString())
  776. {
  777. if (fimsN2PurgeConfig)
  778. {
  779. isCheckO2 = true;
  780. return true;
  781. }
  782. else
  783. {
  784. return false;
  785. }
  786. }
  787. }
  788. }
  789. else
  790. {
  791. if (currectN2PurgeModel == N2PurgeModeEnum.N2PurgeMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ManualMode.ToString())
  792. {
  793. if (fimsN2PurgeConfig)
  794. {
  795. isCheckO2 = true;
  796. return true;
  797. }
  798. else
  799. {
  800. return false;
  801. }
  802. }
  803. if (currectN2PurgeModel == N2PurgeModeEnum.ATMMode.ToString())
  804. {
  805. return false;
  806. }
  807. }
  808. return false;
  809. }
  810. public bool CheckLAIsNeedOxygenPressure(string recipeN2PurgeModeStr)
  811. {
  812. if (string.IsNullOrEmpty(recipeN2PurgeModeStr))
  813. return false;
  814. if (recipeN2PurgeModeStr.ToLower() == "none")
  815. return false;
  816. if (recipeN2PurgeModeStr.ToLower() == "atm")
  817. {
  818. recipeN2PurgeModeStr = N2PurgeModeEnum.ATMMode.ToString();
  819. }
  820. if (recipeN2PurgeModeStr.ToLower().Contains("n2"))
  821. {
  822. recipeN2PurgeModeStr = N2PurgeModeEnum.N2PurgeMode.ToString();
  823. }
  824. var n2PurgeEnum = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), recipeN2PurgeModeStr);
  825. if (n2PurgeEnum == N2PurgeModeEnum.N2PurgeMode || n2PurgeEnum == N2PurgeModeEnum.ATMMode)
  826. return true;
  827. return false;
  828. }
  829. /// <summary>
  830. /// boat Move时候是否Check氧气浓度
  831. /// </summary>
  832. /// <param name="n2PurgeModeEnumStr"></param>
  833. /// <param name="isProcessing"></param>
  834. /// <param name="limitO2Data"></param>
  835. /// <returns></returns>
  836. public bool CheckBoatMoveIsNeedOxygenPressure(string n2PurgeModeEnumStr, bool isProcessing, out double limitO2Data)
  837. {
  838. limitO2Data = 0;
  839. if (!CheckIsLASide())
  840. return false;
  841. if (!isProcessing)
  842. return false;
  843. if (n2PurgeModeEnumStr == N2PurgeModeEnum.BoatLoad.ToString())
  844. {
  845. var isCheckO2Enbale = GetBoatLoadCheckO2DensityConfig();
  846. limitO2Data = GetBoatLoadLAO2CheckSV();
  847. return isCheckO2Enbale;
  848. }
  849. if (n2PurgeModeEnumStr == N2PurgeModeEnum.BoatUnLoad.ToString())
  850. {
  851. var isCheckO2Enbale = GetBoatUnLoadCheckO2DensityConfig();
  852. limitO2Data = GetBoatUnLoadLAO2CheckSV();
  853. return isCheckO2Enbale;
  854. }
  855. return false;
  856. }
  857. public string GetN2PurgeModeEnumByStr(string str)
  858. {
  859. if ((str == N2PurgeModeEnum.ATMMode.ToString()) || (str == N2PurgeModeEnum.ATMMode.ToDescription()) || (str.StartsWith("ATM")))
  860. {
  861. return N2PurgeModeEnum.ATMMode.ToString();
  862. }
  863. else if ((str == N2PurgeModeEnum.N2PurgeMode.ToString()) || (str == N2PurgeModeEnum.N2PurgeMode.ToDescription()) || (str.StartsWith("N2")))
  864. {
  865. return N2PurgeModeEnum.N2PurgeMode.ToString();
  866. }
  867. else
  868. {
  869. return GetLACurrectN2purgeMode();
  870. }
  871. }
  872. public string IsATMMode(string str)
  873. {
  874. if ((str == N2PurgeModeEnum.ATMMode.ToString()) || (str == N2PurgeModeEnum.ATMMode.ToDescription()) || (str.StartsWith("ATM")))
  875. {
  876. return N2PurgeModeEnum.ATMMode.ToString();
  877. }
  878. return str;
  879. }
  880. public string GetLACurrectN2purgeMode()
  881. {
  882. return SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : N2PurgeModeEnum.ManualMode.ToString();
  883. }
  884. #region FoupEnter
  885. public double GetFoupEnterLAO2CheckSV()
  886. {
  887. return SC.ContainsItem("PM1.N2Purge.FoupEnter.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.FoupEnter.LAO2CheckSV") : 20;
  888. }
  889. public double GetFoupEnterFOUPO2CheckSV()
  890. {
  891. return SC.ContainsItem("PM1.N2Purge.FoupEnter.FOUPO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.FoupEnter.FOUPO2CheckSV") : 20;
  892. }
  893. public bool GetFoupEnterFIMSN2purgeConfig()
  894. {
  895. return SC.ContainsItem("PM1.N2Purge.FoupEnter.FOUPN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.FoupEnter.FOUPN2PurgeEnable") : false;
  896. }
  897. public bool GetFoupEnterLAN2purgeConfig()
  898. {
  899. return SC.ContainsItem("PM1.N2Purge.FoupEnter.TransferRoomN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.FoupEnter.TransferRoomN2PurgeEnable") : false;
  900. }
  901. #endregion
  902. #region WaferCharge
  903. public double GetWaferChargeLAO2CheckSV()
  904. {
  905. return SC.ContainsItem("PM1.N2Purge.WaferCharge.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferCharge.LAO2CheckSV") : 20;
  906. }
  907. public double GetWaferChargeFOUPO2CheckSV()
  908. {
  909. return SC.ContainsItem("PM1.N2Purge.WaferCharge.FOUPO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferCharge.FOUPO2CheckSV") : 20;
  910. }
  911. public bool GetWaferChargeFIMSN2purgeConfig()
  912. {
  913. return SC.ContainsItem("PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable") : false;
  914. }
  915. public bool GetWaferChargeLAN2purgeConfig()
  916. {
  917. return SC.ContainsItem("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable") : false;
  918. }
  919. #endregion
  920. #region WaferDisCharge
  921. public double GetWaferDisChargeLAO2CheckSV()
  922. {
  923. return SC.ContainsItem("PM1.N2Purge.WaferDisCharge.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferDisCharge.LAO2CheckSV") : 20;
  924. }
  925. public double GetWaferDisChargeFOUPO2CheckSV()
  926. {
  927. return SC.ContainsItem("PM1.N2Purge.WaferDisCharge.FOUPO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferDisCharge.FOUPO2CheckSV") : 20;
  928. }
  929. public bool GetWaferDisChargeFIMSN2purgeConfig()
  930. {
  931. return SC.ContainsItem("PM1.N2Purge.WaferDisCharge.FOUPN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.WaferDisCharge.FOUPN2PurgeEnable") : false;
  932. }
  933. public bool GetWaferDisChargeLAN2purgeConfig()
  934. {
  935. return SC.ContainsItem("PM1.N2Purge.WaferDisCharge.TransferRoomN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.WaferDisCharge.TransferRoomN2PurgeEnable") : false;
  936. }
  937. #endregion
  938. #region Boat Load
  939. public double GetBoatLoadLAO2CheckSV()
  940. {
  941. return SC.ContainsItem("PM1.N2Purge.BoatLoad.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.BoatLoad.LAO2CheckSV") : 20;
  942. }
  943. public bool GetBoatLoadCheckO2DensityConfig()
  944. {
  945. return SC.ContainsItem("PM1.N2Purge.BoatLoad.TransferRoomO2DensityCheckEnable") ? SC.GetValue<bool>("PM1.N2Purge.BoatLoad.TransferRoomO2DensityCheckEnable") : false;
  946. }
  947. public bool GetBoatLoadEAxisInhibitEnableConfig()
  948. {
  949. return SC.ContainsItem("PM1.N2Purge.BoatLoad.EAxisInhibitEnable") ? SC.GetValue<bool>("PM1.N2Purge.BoatLoad.EAxisInhibitEnable") : false;
  950. }
  951. public bool GetBoatLoadLAN2purgeConfig()
  952. {
  953. return SC.ContainsItem("PM1.N2Purge.BoatLoad.TransferRoomN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.BoatLoad.TransferRoomN2PurgeEnable") : false;
  954. }
  955. #endregion
  956. #region BoatUnLoad
  957. public bool GetBoatUnLoadCheckO2DensityConfig()
  958. {
  959. return SC.ContainsItem("PM1.N2Purge.BoatUnLoad.TransferRoomO2DensityCheckEnable") ? SC.GetValue<bool>("PM1.N2Purge.BoatUnLoad.TransferRoomO2DensityCheckEnable") : false;
  960. }
  961. public bool GetBoatUnLoadEAxisInhibitEnableConfig()
  962. {
  963. return SC.ContainsItem("PM1.N2Purge.BoatUnLoad.EAxisInhibitEnable") ? SC.GetValue<bool>("PM1.N2Purge.BoatUnLoad.EAxisInhibitEnable") : false;
  964. }
  965. public double GetBoatUnLoadLAO2CheckSV()
  966. {
  967. return SC.ContainsItem("PM1.N2Purge.BoatUnLoad.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.BoatUnLoad.LAO2CheckSV") : 20;
  968. }
  969. public bool GetBoatUnLoadLAN2purgeConfig()
  970. {
  971. return SC.ContainsItem("PM1.N2Purge.BoatUnLoad.TransferRoomN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.BoatUnLoad.TransferRoomN2PurgeEnable") : false;
  972. }
  973. #endregion
  974. }
  975. }