| 12345678910111213141516171819202122232425262728293031323334353637383940414243444546474849505152535455565758596061626364656667686970717273747576777879808182838485868788899091929394959697989910010110210310410510610710810911011111211311411511611711811912012112212312412512612712812913013113213313413513613713813914014114214314414514614714814915015115215315415515615715815916016116216316416516616716816917017117217317417517617717817918018118218318418518618718818919019119219319419519619719819920020120220320420520620720820921021121221321421521621721821922022122222322422522622722822923023123223323423523623723823924024124224324424524624724824925025125225325425525625725825926026126226326426526626726826927027127227327427527627727827928028128228328428528628728828929029129229329429529629729829930030130230330430530630730830931031131231331431531631731831932032132232332432532632732832933033133233333433533633733833934034134234334434534634734834935035135235335435535635735835936036136236336436536636736836937037137237337437537637737837938038138238338438538638738838939039139239339439539639739839940040140240340440540640740840941041141241341441541641741841942042142242342442542642742842943043143243343443543643743843944044144244344444544644744844945045145245345445545645745845946046146246346446546646746846947047147247347447547647747847948048148248348448548648748848949049149249349449549649749849950050150250350450550650750850951051151251351451551651751851952052152252352452552652752852953053153253353453553653753853954054154254354454554654754854955055155255355455555655755855956056156256356456556656756856957057157257357457557657757857958058158258358458558658758858959059159259359459559659759859960060160260360460560660760860961061161261361461561661761861962062162262362462562662762862963063163263363463563663763863964064164264364464564664764864965065165265365465565665765865966066166266366466566666766866967067167267367467567667767867968068168268368468568668768868969069169269369469569669769869970070170270370470570670770870971071171271371471571671771871972072172272372472572672772872973073173273373473573673773873974074174274374474574674774874975075175275375475575675775875976076176276376476576676776876977077177277377477577677777877978078178278378478578678778878979079179279379479579679779879980080180280380480580680780880981081181281381481581681781881982082182282382482582682782882983083183283383483583683783883984084184284384484584684784884985085185285385485585685785885986086186286386486586686786886987087187287387487587687787887988088188288388488588688788888989089189289389489589689789889990090190290390490590690790890991091191291391491591691791891992092192292392492592692792892993093193293393493593693793893994094194294394494594694794894995095195295395495595695795895996096196296396496596696796896997097197297397497597697797897998098198298398498598698798898999099199299399499599699799899910001001100210031004100510061007100810091010101110121013101410151016101710181019102010211022102310241025102610271028102910301031103210331034103510361037103810391040104110421043104410451046104710481049105010511052105310541055105610571058105910601061106210631064106510661067106810691070107110721073107410751076107710781079108010811082108310841085108610871088108910901091109210931094109510961097109810991100110111021103110411051106110711081109111011111112111311141115111611171118111911201121112211231124 | 
							- using Aitex.Core.RT.DataCenter;
 
- using Aitex.Core.RT.Device;
 
- using Aitex.Core.RT.Device.Unit;
 
- using Aitex.Core.RT.IOCore;
 
- using Aitex.Core.RT.Log;
 
- using Aitex.Core.RT.SCCore;
 
- using Aitex.Core.Util;
 
- using DocumentFormat.OpenXml.Packaging;
 
- using DocumentFormat.OpenXml.Spreadsheet;
 
- using FurnaceRT.Devices;
 
- using FurnaceRT.Equipments.PMs.Devices;
 
- using FurnaceRT.Equipments.Systems;
 
- using FurnaceRT.Extraction;
 
- using MECF.Framework.Common.CommonData.SorterDefines;
 
- using MECF.Framework.Common.Equipment;
 
- using MECF.Framework.Common.Tolerance;
 
- using MECF.Framework.Common.Utilities;
 
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.TDK;
 
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs;
 
- using System;
 
- using System.Collections.Generic;
 
- using System.Diagnostics;
 
- using System.Linq;
 
- namespace FurnaceRT.Equipments.PMs
 
- {
 
-     /// <summary>
 
-     /// 分布类 定义N2Purge的执行逻辑
 
-     /// </summary>
 
-     public partial class PMModule
 
-     {
 
-         private R_TRIG _trigN2UpRD = new R_TRIG();
 
-         private R_TRIG _trigN2DownRD = new R_TRIG();
 
-         private R_TRIG _trigN2AirUpRD = new R_TRIG();
 
-         private R_TRIG _trigN2AirDownRD = new R_TRIG();
 
-         private R_TRIG _trigN2AirDownTwoRD = new R_TRIG();
 
-         private R_TRIG _trigSelectN2PurgeModeD = new R_TRIG();
 
-         private FilterChecker _filterChecker = new FilterChecker();
 
-         private R_TRIG tank1_TRIG = new R_TRIG();
 
-         private R_TRIG tank2_TRIG = new R_TRIG();
 
-         private Dictionary<string, Tuple<R_TRIG, List<Tuple<IDevice, string>>>> _n2PurgeSequenceAction;
 
-         private Dictionary<string, Func<bool>> _n2PurgeSequenceStatus;
 
-         private Dictionary<string, R_TRIG> _rTrigDict;
 
-         private N2PurgeModeEnum _N2PurgeMode = N2PurgeModeEnum.Auto;
 
-         private double _n2PurgeData = 20;
 
-         private double _n2ToAirData = 185000;
 
-         private N2PurgeModeEnum _currentPhase;
 
-         private double _manualPhase2StabilityTime = 0;
 
-         private double _manualPhase4StabilityTime = 0;
 
-         private bool _enableAbortN2purge = true;
 
-         private int _phase1CycleCount = 0;
 
-         private int _phase1CycleCountSC = 0;
 
-         private bool _canSwitchToPhase2 = true;
 
-         private FilterChecker _filterCheckerTank1 = new FilterChecker();
 
-         private FilterChecker _filterCheckerTank2 = new FilterChecker();
 
-         private Dictionary<string, Stopwatch> _allTimeDict = new Dictionary<string, Stopwatch>();
 
-         private void InitN2PurgeData()
 
-         {
 
-             DATA.Subscribe($"{Module}.N2PurgeLimitData", () => GetN2PurgeLimitData());
 
-             DATA.Subscribe($"{Module}.O2DensityData", () => ConcentrationO2.Value.ToString("f3"), SubscriptionAttribute.FLAG.IgnoreSaveDB);
 
-             DATA.Subscribe($"{Module}.CheckO2Location", () => GetCheckO2Location(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
 
-             DATA.Subscribe($"{Module}.O2SetCheckSetPoint", () => GetO2SetCheckSetPoint(), SubscriptionAttribute.FLAG.IgnoreSaveDB);
 
-             DATA.Subscribe($"{Module}.N2PurgeMode", () => SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "");
 
-             var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
 
-             if (!string.IsNullOrEmpty(selectN2PurgeMode))
 
-             {
 
-                 if (selectN2PurgeMode != _N2PurgeMode.ToString())
 
-                 {
 
-                     SetN2PurgeModeAction(selectN2PurgeMode);
 
-                 }
 
-             }
 
-             var currentPhase = SC.ContainsItem("PM1.SelectN2PurgeModePhase") ? SC.GetStringValue("PM1.SelectN2PurgeModePhase") : "";
 
-             if (!string.IsNullOrEmpty(currentPhase))
 
-             {
 
-                 var enumCurrentPhase = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), currentPhase);
 
-                 _currentPhase = enumCurrentPhase;
 
-             }
 
-             _filterCheckerTank1.CheckInterval = 1;
 
-             _filterCheckerTank2.CheckInterval = 1;
 
-         }
 
-         private void InitN2PurgeConfigData()
 
-         {
 
-             _n2PurgeData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2PurgeData") : 20;
 
-             _n2ToAirData = SC.ContainsItem($"System.N2PurgeData") ? SC.GetValue<double>("System.N2ToAirData") : 185000;
 
-             _enableAbortN2purge = SC.ContainsItem($"PM1.N2Purge.EnableAbortN2purge") ? SC.GetValue<bool>("PM1.N2Purge.EnableAbortN2purge") : false;
 
-             _manualPhase2StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase2.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase2.StabilityTime") : 0;
 
-             _manualPhase4StabilityTime = SC.ContainsItem($"PM1.N2Purge.Manual_phase4.StabilityTime") ? SC.GetValue<double>("PM1.N2Purge.Manual_phase4.StabilityTime") : 0;
 
-             _phase1CycleCountSC = SC.ContainsItem($"PM1.N2Purge.Manual_phase1.CycleCount") ? SC.GetValue<int>("PM1.N2Purge.Manual_phase1.CycleCount") : 0;
 
-             _n2PurgeSequenceAction = ExtractionMethods.GetN2PurgeSequenceAction();
 
-             _n2PurgeSequenceStatus = new Dictionary<string, Func<bool>>()
 
-             {
 
-                 {"N2PurgeAIRTo20PPM",()=> GetN2PurgeAIRTo20PPMStatus()},
 
-                 {"N2PurgeUnder20PPM",()=> GetN2PurgeUnder20PPMStatus()},
 
-                 {"AIR",()=> GetN2PurgeAIRStatus()},
 
-                 {"DoorOpen",()=> GetN2PurgeDoorOpenStatus()},
 
-                 {"Foup1",()=> GetN2PurgeFoup1Status()},
 
-                 {"Foup2",()=> GetN2PurgeFoup2Status()},
 
-                 {N2PurgeModeEnum.Manual_phase1.ToString(),()=>  CheckN2PurgePhase1() },
 
-                 {N2PurgeModeEnum.Manual_phase2.ToString(),()=>  CheckN2PurgePhase2()},
 
-                 {N2PurgeModeEnum.Manual_phase3.ToString(),()=>  CheckN2PurgePhase3() },
 
-                 {N2PurgeModeEnum.Manual_phase4.ToString(),()=>  CheckN2PurgePhase4() },
 
-                 {N2PurgeModeEnum.Manual_phase5.ToString(),()=>  CheckN2PurgePhase5() },
 
-             };
 
-             _allTimeDict = new Dictionary<string, Stopwatch>()
 
-             {
 
-                 {N2PurgeModeEnum.Manual_phase1.ToString(),new Stopwatch() },
 
-                 {N2PurgeModeEnum.Manual_phase2.ToString(),new Stopwatch()},
 
-                 {N2PurgeModeEnum.Manual_phase3.ToString(),new Stopwatch()},
 
-                 {N2PurgeModeEnum.Manual_phase4.ToString(),new Stopwatch() },
 
-                 {N2PurgeModeEnum.Manual_phase5.ToString(),new Stopwatch() }
 
-             };
 
-             _rTrigDict = new Dictionary<string, R_TRIG>();
 
-         }
 
-         private void MonitorN2Purge()
 
-         {
 
-             var selectN2PurgeMode = SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : "";
 
-             if (string.IsNullOrEmpty(selectN2PurgeMode))
 
-             {
 
-                 return;
 
-             }
 
-             SetN2PurgeModeAction(selectN2PurgeMode);
 
-         }
 
-         private void MonitorTank1LeakAgeExec()
 
-         {
 
-             _filterCheckerTank1.Monitor(SensorHCDTANKH != null && SensorHCDTANKH.Value);
 
-             if (_filterCheckerTank1.Trig)
 
-             {
 
-                 LOG.Info($"SensorHCDTANKH trigger:{SensorHCDTANKH.Value}");
 
-                 SetHREFEnable(new object[1] { false });
 
-                 ValveAV113?.TurnValve(false, out _);
 
-             }
 
-             if ((SensorHCDTANKH != null && SensorHCDTANKH.Value) && TrigSIREFON.Value)
 
-             {
 
-                 LOG.Info($"SensorHCDTANKH trigger:{SensorHCDTANKH.Value},TrigCREFON:{TrigSIREFON.Value}");
 
-                 SetHREFEnable(new object[1] { false });
 
-                 ValveAV113?.TurnValve(false, out _);
 
-             }
 
-         }
 
-         public bool SetHREFEnable(object[] param)
 
-         {
 
-             if (param == null || param.Length <= 0)
 
-                 return true;
 
-             bool.TryParse(param[0].ToString(), out bool isEnable);
 
-             if (isEnable)
 
-             {
 
-                 if (SensorHREFILK != null && SensorHREFILK.Value)
 
-                 {
 
-                     TrigSIREFON?.CheckAndSet(isEnable, out _);
 
-                 }
 
-             }
 
-             else
 
-             {
 
-                 TrigSIREFON?.CheckAndSet(isEnable, out _);
 
-             }
 
-             return true;
 
-         }
 
-         private void MonitorTank2LeakAgeExec()
 
-         {
 
-             _filterCheckerTank2.Monitor(SensorCSOURCETANKH != null && SensorCSOURCETANKH.Value);
 
-             if (_filterCheckerTank2.Trig)
 
-             {
 
-                 LOG.Info($"SensorCSOURCETANKH trigger:{SensorCSOURCETANKH.Value}");
 
-                 SetCREFEnable(new object[1] { false });
 
-                 ValveAV121?.TurnValve(false, out _);
 
-             }
 
-             if ((SensorCSOURCETANKH != null && SensorCSOURCETANKH.Value) && (TrigCREFON != null && TrigCREFON.Value))
 
-             {
 
-                 LOG.Info($"SensorCSOURCETANKH trigger:{SensorCSOURCETANKH.Value},TrigCREFON:{TrigCREFON.Value}");
 
-                 SetCREFEnable(new object[1] { false });
 
-                 ValveAV121?.TurnValve(false, out _);
 
-             }
 
-         }
 
-         public bool SetCREFEnable(object[] param)
 
-         {
 
-             if (param == null || param.Length <= 0)
 
-                 return true;
 
-             bool.TryParse(param[0].ToString(), out bool isEnable);
 
-             if (isEnable)
 
-             {
 
-                 if (SensorCREFILK != null && SensorCREFILK.Value)
 
-                 {
 
-                     TrigCREFON?.CheckAndSet(isEnable, out _);
 
-                 }
 
-             }
 
-             else
 
-             {
 
-                 TrigCREFON?.CheckAndSet(isEnable, out _);
 
-             }
 
-             return true;
 
-         }
 
-         public void SetN2PurgeModePhase(string setValue)
 
-         {
 
-             if (SC.ContainsItem("PM1.N2PurgeModePhase"))
 
-             {
 
-                 var data = SC.GetStringValue("PM1.N2PurgeModePhase");
 
-                 if (data != setValue)
 
-                 {
 
-                     SC.SetItemValue("PM1.N2PurgeModePhase", setValue);
 
-                 }
 
-             }
 
-         }
 
-         /// <summary>
 
-         /// TODO:这里展示数据的逻辑 不正确,待明确逻辑
 
-         /// </summary>
 
-         /// <returns></returns>
 
-         private double GetN2PurgeLimitData()
 
-         {
 
-             if (_N2PurgeMode == N2PurgeModeEnum.N2PurgeMode)
 
-             {
 
-                 if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
 
-                 {
 
-                     if (SC.ContainsItem("PM1.N2PurgeModePhase"))
 
-                     {
 
-                         var n2PurgeModePhase = SC.GetStringValue("PM1.N2PurgeModePhase");
 
-                         if (n2PurgeModePhase == N2PurgeModeEnum.WaferCharge.ToString())
 
-                         {
 
-                             return (float)SC.GetValue<double>("PM1.N2Purge.WaferCharge.FOUPO2CheckSV");
 
-                         }
 
-                         else if (n2PurgeModePhase == N2PurgeModeEnum.FoupEnter.ToString())
 
-                         {
 
-                             return (float)SC.GetValue<double>("PM1.N2Purge.FoupEnter.FOUPO2CheckSV");
 
-                         }
 
-                         else if (n2PurgeModePhase == N2PurgeModeEnum.WaferDisCharge.ToString())
 
-                         {
 
-                             return (float)SC.GetValue<double>("PM1.N2Purge.WaferDisCharge.FOUPO2CheckSV");
 
-                         }
 
-                         return (float)SC.GetValue<double>("System.N2PurgeData");
 
-                     }
 
-                 }
 
-                 if (CheckIsLASide())
 
-                 {
 
-                     if (SC.ContainsItem("PM1.N2PurgeModePhase"))
 
-                     {
 
-                         var n2PurgeModePhase = SC.GetStringValue("PM1.N2PurgeModePhase");
 
-                         if (n2PurgeModePhase == N2PurgeModeEnum.BoatLoad.ToString())
 
-                         {
 
-                             return (float)SC.GetValue<double>("PM1.N2Purge.BoatLoad.LAO2CheckSV");
 
-                         }
 
-                         if (n2PurgeModePhase == N2PurgeModeEnum.BoatUnLoad.ToString())
 
-                         {
 
-                             return (float)SC.GetValue<double>("PM1.N2Purge.BoatUnLoad.LAO2CheckSV");
 
-                         }
 
-                         if (n2PurgeModePhase == N2PurgeModeEnum.FoupEnter.ToString())
 
-                         {
 
-                             return (float)SC.GetValue<double>("PM1.N2Purge.FoupEnter.LAO2CheckSV");
 
-                         }
 
-                         if (n2PurgeModePhase == N2PurgeModeEnum.WaferCharge.ToString())
 
-                         {
 
-                             return (float)SC.GetValue<double>("PM1.N2Purge.WaferCharge.LAO2CheckSV");
 
-                         }
 
-                         if (n2PurgeModePhase == N2PurgeModeEnum.WaferDisCharge.ToString())
 
-                         {
 
-                             return (float)SC.GetValue<double>("PM1.N2Purge.WaferDisCharge.LAO2CheckSV");
 
-                         }
 
-                         if (n2PurgeModePhase == N2PurgeModeEnum.Idle.ToString())
 
-                         {
 
-                             return (float)SC.GetValue<double>("System.N2PurgeData");
 
-                         }
 
-                         return (float)SC.GetValue<double>("System.N2PurgeData");
 
-                     }
 
-                 }
 
-                 return _n2PurgeData;
 
-             }
 
-             if (_N2PurgeMode == N2PurgeModeEnum.ATMMode)
 
-             {
 
-                 return _n2ToAirData;
 
-             }
 
-             return ConcentrationO2.Value;
 
-         }
 
-         private void SetN2PurgeModeAction(string selectN2PurgeMode)
 
-         {
 
-             _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), selectN2PurgeMode);
 
-             if (_N2PurgeMode == N2PurgeModeEnum.N2PurgeMode)
 
-             {
 
-                 if (_currentPhase == N2PurgeModeEnum.Manual_phase1)
 
-                 {
 
-                     _filterChecker.CheckInterval = 3;
 
-                     _filterChecker.Monitor(CheckN2PurgePhase2());
 
-                     if (_filterChecker.Trig && _canSwitchToPhase2)
 
-                     {
 
-                         LOG.Info($" N2PurgeMode Trigger from Manual_phase1 to Manual_phase2,O2:{ConcentrationO2.Value}");
 
-                         SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase2.ToString());
 
-                     }
 
-                 }
 
-                 else if (_currentPhase == N2PurgeModeEnum.Manual_phase2)
 
-                 {
 
-                     if (!_allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].IsRunning && _canSwitchToPhase2)
 
-                     {
 
-                         _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
 
-                     }
 
-                     var second = _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Elapsed.TotalSeconds;
 
-                     if (second >= _manualPhase2StabilityTime)
 
-                     {
 
-                         if (CheckN2PurgePhase1())
 
-                         {
 
-                             LOG.Info($"N2PurgeMode Trigger Manual_phase1 was triggered {second} seconds later,O2:{ConcentrationO2.Value}");
 
-                             N2PurgeFaileAlarm.Set();
 
-                             _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
 
-                             _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Stop();
 
-                             _canSwitchToPhase2 = false;
 
-                             SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
 
-                         }
 
-                         if (CheckN2PurgePhase2())
 
-                         {
 
-                             LOG.Info($"N2PurgeMode Trigger Hold Manual_phase2 was triggered {second} seconds later,O2:{ConcentrationO2.Value}");
 
-                             _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Restart();
 
-                             _allTimeDict[N2PurgeModeEnum.Manual_phase2.ToString()].Stop();
 
-                             _canSwitchToPhase2 = false;
 
-                         }
 
-                     }
 
-                 }
 
-                 else
 
-                 {
 
-                     if (CheckN2PurgePhase1())
 
-                     {
 
-                         LOG.Info($"N2PurgeMode Trigger Directly  triggered Manual_phase1,O2:{ConcentrationO2.Value}");
 
-                         SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
 
-                     }
 
-                     else if (CheckN2PurgePhase2())
 
-                     {
 
-                         LOG.Info($"N2PurgeMode Trigger Directly  triggered Manual_phase2,O2:{ConcentrationO2.Value}");
 
-                         SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase2.ToString());
 
-                     }
 
-                 }
 
-             }
 
-             if (_N2PurgeMode == N2PurgeModeEnum.ATMMode)
 
-             {
 
-                 if (_currentPhase == N2PurgeModeEnum.Manual_phase3)
 
-                 {
 
-                     var checkResult = CheckN2PurgePhase4();
 
-                     if (!_allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].IsRunning)
 
-                     {
 
-                         _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Restart();
 
-                     }
 
-                     var second = _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Elapsed.TotalSeconds;
 
-                     if (second >= _manualPhase4StabilityTime && checkResult)
 
-                     {
 
-                         LOG.Info($"N2PurgeMode Trigger from  Manual_phase3 to Manual_phase4 is triggered {second} seconds later,O2:{ConcentrationO2.Value}");
 
-                         SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
 
-                         _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Restart();
 
-                         _allTimeDict[N2PurgeModeEnum.Manual_phase4.ToString()].Stop();
 
-                     }
 
-                 }
 
-                 else if (_currentPhase == N2PurgeModeEnum.Manual_phase4)
 
-                 {
 
-                     if (CheckN2PurgePhase5())
 
-                     {
 
-                         LOG.Info($"N2PurgeMode Trigger from Manual_phase4 to Manual_phase5,O2:{ConcentrationO2.Value}");
 
-                         SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase5.ToString());
 
-                     }
 
-                     //if (CheckN2PurgePhase3( ))
 
-                     //{
 
-                     //    LOG.Info($"N2PurgeMode Trigger from Manual_phase4 to Manual_phase3,O2:{o2Value}");
 
-                     //    SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
 
-                     //}
 
-                 }
 
-                 else if (_currentPhase == N2PurgeModeEnum.Manual_phase5)
 
-                 {
 
-                     if (CheckN2PurgePhase4())
 
-                     {
 
-                         LOG.Info($"N2PurgeMode Trigger from Manual_phase5 to Manual_phase4,O2:{ConcentrationO2.Value}");
 
-                         SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
 
-                     }
 
-                     //if (CheckN2PurgePhase3( ))
 
-                     //{
 
-                     //    LOG.Info($"N2PurgeMode Trigger from Manual_phase5 to Manual_phase3,O2:{o2Value}");
 
-                     //    SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
 
-                     //}
 
-                 }
 
-                 else
 
-                 {
 
-                     if (CheckN2PurgePhase3())
 
-                     {
 
-                         LOG.Info($"N2PurgeMode Trigger Directly  triggered Manual_phase3,O2:{ConcentrationO2.Value}");
 
-                         SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase3.ToString());
 
-                         return;
 
-                     }
 
-                     if (CheckN2PurgePhase5())
 
-                     {
 
-                         LOG.Info($"N2PurgeMode Trigger Directly  triggered Manual_phase5,O2:{ConcentrationO2.Value}");
 
-                         SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase5.ToString());
 
-                         return;
 
-                     }
 
-                     if (CheckN2PurgePhase4())
 
-                     {
 
-                         LOG.Info($"N2PurgeMode Trigger Directly  triggered Manual_phase4,O2:{ConcentrationO2.Value}");
 
-                         SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase4.ToString());
 
-                         return;
 
-                     }
 
-                 }
 
-             }
 
-             if (_N2PurgeMode == N2PurgeModeEnum.ManualMode || _N2PurgeMode == N2PurgeModeEnum.Auto)
 
-             {
 
-                 _currentPhase = _N2PurgeMode;
 
-             }
 
-             //switch (_N2PurgeMode)
 
-             //{
 
-             //    case N2PurgeModeEnum.Auto:
 
-             //        // 自动模式下的操作
 
-             //        break;
 
-             //    case N2PurgeModeEnum.ManualMode:
 
-             //        break;
 
-             //    case N2PurgeModeEnum.N2PurgeMode:
 
-             //        ProcessPhase(_trigN2UpRD, N2PurgeModeEnum.Manual_phase1.ToString());
 
-             //        ProcessPhase(_trigN2DownRD, N2PurgeModeEnum.Manual_phase2.ToString(), _manualPhase2NeedCheck, (int)(_manualPhase2StabilityTime * 1000));
 
-             //        break;
 
-             //    case N2PurgeModeEnum.ATMMode:
 
-             //        ProcessPhase(_trigN2AirDownRD, N2PurgeModeEnum.Manual_phase3.ToString());
 
-             //        ProcessPhase(_trigN2AirUpRD, N2PurgeModeEnum.Manual_phase4.ToString(), _manualPhase4NeedCheck, (int)(_manualPhase4StabilityTime * 1000));
 
-             //        ProcessPhase(_trigN2AirDownTwoRD, N2PurgeModeEnum.Manual_phase5.ToString());
 
-             //        break;
 
-             //}
 
-         }
 
-         bool CheckConditionInTime(string modeKey, int millisecondsTimeout, Func<bool> condition)
 
-         {
 
-             var stopwatch = _allTimeDict[modeKey];
 
-             if (!_allTimeDict[modeKey].IsRunning)
 
-             {
 
-                 _allTimeDict[modeKey].Restart();
 
-             }
 
-             while (stopwatch.ElapsedMilliseconds < millisecondsTimeout)
 
-             {
 
-                 if (!_allTimeDict[modeKey].IsRunning)
 
-                 {
 
-                     return true;
 
-                 }
 
-                 if (!condition())
 
-                 {
 
-                     _allTimeDict[modeKey].Stop();
 
-                     _allTimeDict[modeKey].Reset();
 
-                     return false;
 
-                 }
 
-             }
 
-             if (stopwatch.ElapsedMilliseconds > millisecondsTimeout)
 
-             {
 
-                 _allTimeDict[modeKey].Stop();
 
-                 _allTimeDict[modeKey].Reset();
 
-             }
 
-             return true;
 
-         }
 
-         private void ProcessPhase(R_TRIG r_TRIG, string modeKey, bool needCheck = false, int time = 0)
 
-         {
 
-             r_TRIG.CLK = needCheck ? (CheckConditionInTime(modeKey, time, () => _n2PurgeSequenceStatus[modeKey].Invoke())) : _n2PurgeSequenceStatus[modeKey].Invoke();
 
-             if (r_TRIG.Q)
 
-             {
 
-                 LOG.Info($"N2PurgeMode Trigger {modeKey}!,O2:{ConcentrationO2.Value},time:{_allTimeDict[modeKey].ElapsedMilliseconds}");
 
-                 SetN2PurgeValveData(modeKey);
 
-                 _allTimeDict[modeKey].Stop();
 
-                 _allTimeDict[modeKey].Reset();
 
-             }
 
-         }
 
-         public void RestAllN2PrugeRD()
 
-         {
 
-             _trigN2AirDownRD.RST = false;
 
-             _trigN2AirUpRD.RST = false;
 
-             _trigN2DownRD.RST = false;
 
-             _trigN2UpRD.RST = false;
 
-             foreach (var item in _allTimeDict)
 
-             {
 
-                 item.Value.Stop();
 
-                 item.Value.Reset();
 
-             }
 
-             _canSwitchToPhase2 = true;
 
-         }
 
-         public void SetN2PurgeValveData(string mode, string msg = "")
 
-         {
 
-             var value = _n2PurgeSequenceAction[mode];
 
-             _currentPhase = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
 
-             if (SC.ContainsItem("PM1.SelectN2PurgeModePhase"))
 
-             {
 
-                 SC.SetItemValue("PM1.SelectN2PurgeModePhase", mode);
 
-             }
 
-             foreach (var operateItem in value.Item2)
 
-             {
 
-                 if (operateItem.Item1 is IoMFC)
 
-                 {
 
-                     var ioMFc = (operateItem.Item1 as IoMFC);
 
-                     { ioMFc.SetMfcValue(out _, 0, new object[] { float.Parse(operateItem.Item2.ToString()) }); }
 
-                 }
 
-                 if (operateItem.Item1 is IoValve)
 
-                 {
 
-                     var ioValve = (operateItem.Item1 as IoValve);
 
-                     ioValve.TurnValve(bool.Parse(operateItem.Item2), out _);
 
-                 }
 
-                 if (operateItem.Item1 is IoTrigger)
 
-                 {
 
-                     var ioTrigger = (operateItem.Item1 as IoTrigger);
 
-                     ioTrigger.CheckAndSet(bool.Parse(operateItem.Item2), out _);
 
-                 }
 
-             }
 
-         }
 
-         private bool SetN2PurgeMode(out string reason, int time, object[] param)
 
-         {
 
-             reason = string.Empty;
 
-             var mode = param[0].ToString();
 
-             _N2PurgeMode = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), mode);
 
-             if (SC.ContainsItem("PM1.SelectN2PurgeMode"))
 
-             {
 
-                 SC.SetItemValue("PM1.SelectN2PurgeMode", mode);
 
-             }
 
-             RestAllN2PrugeRD();
 
-             return true;
 
-         }
 
-         /// <summary>
 
-         /// 获取当前O2检测位置的设定值
 
-         /// TODO:这里展示数据的逻辑也不正确,待明确逻辑
 
-         /// </summary>
 
-         /// <returns></returns>
 
-         private string GetO2SetCheckSetPoint()
 
-         {
 
-             if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
 
-             {
 
-                 var key = "PM1.N2Purge.N2PurgeLAO2CheckSV";
 
-                 if (SC.ContainsItem(key))
 
-                     return SC.GetValue<double>(key).ToString("f3");
 
-             }
 
-             if ((SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value) || (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value))
 
-             {
 
-                 var key = "PM1.N2Purge.N2PurgeFOUPO2CheckSV";
 
-                 if (SC.ContainsItem(key))
 
-                     return SC.GetValue<double>(key).ToString("f3");
 
-             }
 
-             return "";
 
-         }
 
-         /// <summary>
 
-         /// 获取当前O2检测位置
 
-         /// </summary>
 
-         /// <returns></returns>
 
-         private string GetCheckO2Location()
 
-         {
 
-             if (SensorO2DetectSideLA != null && SensorO2DetectSideLA.Value)
 
-                 return SensorO2DetectSideLA.Display;
 
-             if (SensorO2DetectSideFIMS1 != null && SensorO2DetectSideFIMS1.Value)
 
-                 return SensorO2DetectSideFIMS1.Display;
 
-             if (SensorO2DetectSideFIMS2 != null && SensorO2DetectSideFIMS2.Value)
 
-                 return SensorO2DetectSideFIMS2.Display;
 
-             return "";
 
-         }
 
-         /// <summary>
 
-         /// 获取当前O2浓度
 
-         /// </summary>
 
-         /// <returns></returns>
 
-         public bool CheckIsLASide()
 
-         {
 
-             if (SensorO2DetectSideLA == null)
 
-             {
 
-                 return false;
 
-             }
 
-             return SensorO2DetectSideLA.Value;
 
-         }
 
-         private bool CheckN2PurgePhase1()
 
-         {
 
-             return ((int)ConcentrationO2.Value >= _n2PurgeData) && GetLADoorOpenStatus() && CheckIsLASide();
 
-         }
 
-         private bool CheckN2PurgePhase2()
 
-         {
 
-             return ((int)ConcentrationO2.Value < _n2PurgeData) && GetLADoorOpenStatus() && CheckIsLASide();
 
-         }
 
-         private bool CheckN2PurgePhase3()
 
-         {
 
-             return ((int)ConcentrationO2.Value) < _n2ToAirData && GetLADoorOpenStatus() && CheckIsLASide();
 
-         }
 
-         private bool CheckN2PurgePhase5()
 
-         {
 
-             return ((int)ConcentrationO2.Value) >= _n2ToAirData && !GetLADoorOpenStatus() && CheckIsLASide();
 
-         }
 
-         private bool CheckN2PurgePhase4()
 
-         {
 
-             return (((int)ConcentrationO2.Value)) >= _n2ToAirData && GetLADoorOpenStatus() && CheckIsLASide();
 
-         }
 
-         private bool GetN2PurgeAIRTo20PPMStatus()
 
-         {
 
-             return ValveAV202.DOOpen.Value;
 
-         }
 
-         public bool GetN2PurgeUnder20PPMStatus(double value = 20)
 
-         {
 
-             return ConcentrationO2.Value < value;
 
-         }
 
-         private bool GetN2PurgeAIRStatus()
 
-         {
 
-             return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
 
-         }
 
-         private bool GetLADoorOpenStatus()
 
-         {
 
-             return (bool)(SensorLADoorSw1?.Value);
 
-         }
 
-         private bool GetN2PurgeDoorOpenStatus()
 
-         {
 
-             return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
 
-         }
 
-         private bool GetN2PurgeFoup1Status()
 
-         {
 
-             return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS1.IsFoupExist && FIMS1.CollisionAvoidanceUpDownStatus == DeviceStatus.Down;
 
-         }
 
-         private bool GetN2PurgeFoup2Status()
 
-         {
 
-             return GetN2PurgeAIRTo20PPMStatus() && GetN2PurgeUnder20PPMStatus() && FIMS2.IsFoupExist && FIMS2.CollisionAvoidanceUpDownStatus == DeviceStatus.Down; ;
 
-         }
 
-         public bool IsAbortN2purge()
 
-         {
 
-             if (!_enableAbortN2purge)
 
-             {
 
-                 return false;
 
-             }
 
-             if (SensorSL02001gasboxdoorsw11.Value || SensorSL02001gasboxdoorsw12.Value || SensorSL02002gasboxdoorsw11.Value || SensorSL02002gasboxdoorsw12.Value || SensorSL05002LAdoorsw2.Value || SensorSL05004LAfurnacedoorsw.Value)
 
-             {
 
-                 return true;
 
-             }
 
-             return false;
 
-         }
 
-         public void SetN2PurgeLAO2CheckFirstEnable(bool isEable)
 
-         {
 
-             if (TrigN2PurgeLAO2CheckFirstEnable != null && TrigN2PurgeLAO2CheckFirstEnable.Value != isEable)
 
-             {
 
-                 TrigN2PurgeLAO2CheckFirstEnable.SetTrigger(isEable, out _);
 
-             }
 
-         }
 
-         public void SetN2PurgeFIMS1O2CheckEnable(ModuleName fims, bool isEable)
 
-         {
 
-             if (fims == ModuleName.FIMS1 && TrigN2PurgeFIMS1O2CheckEnable != null && TrigN2PurgeFIMS1O2CheckEnable.Value != isEable)
 
-             {
 
-                 TrigN2PurgeFIMS1O2CheckEnable.SetTrigger(isEable, out _);
 
-             }
 
-             if (fims == ModuleName.FIMS2 && TrigN2PurgeFIMS2O2CheckEnable != null && TrigN2PurgeFIMS2O2CheckEnable.Value != isEable)
 
-             {
 
-                 TrigN2PurgeFIMS2O2CheckEnable.SetTrigger(isEable, out _);
 
-             }
 
-         }
 
-         public void SetN2PurgeProcess(bool isEable)
 
-         {
 
-             if (TrigN2PurgeProcess != null && TrigN2PurgeProcess.Value != isEable)
 
-             {
 
-                 TrigN2PurgeProcess.SetTrigger(isEable, out _);
 
-             }
 
-         }
 
-         public void SetN2PurgeLAO2CheckSV(float value)
 
-         {
 
-             if (TrigN2PurgeLAO2CheckSV != null)
 
-                 TrigN2PurgeLAO2CheckSV?.SetAOTrigger(value, out _);
 
-         }
 
-         public void SetN2PurgeFOUPO2CheckSV(float value)
 
-         {
 
-             if (TrigN2PurgeFOUPO2CheckSV != null)
 
-                 TrigN2PurgeFOUPO2CheckSV?.SetAOTrigger(value, out _);
 
-         }
 
-         /// <summary>
 
-         /// N2Purge相关时间参数,电气要求设定为秒,实际下发按照毫秒
 
-         /// </summary>
 
-         public void SetN2PurgeParameters(string n2PurgeModeEnum)
 
-         {
 
-             if (SC.ContainsItem("PM1.N2Purge.TransferRoomArrivalWaitTime") && TrigN2PurgeLAO2CheckTime != null)
 
-             {
 
-                 var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomArrivalWaitTime");
 
-                 TrigN2PurgeLAO2CheckTime.SetAOTrigger(time, out _);
 
-             }
 
-             if (SC.ContainsItem("PM1.N2Purge.TransferRoomStableWaitTime") && TrigN2PurgeLAO2OverTime != null)
 
-             {
 
-                 var time = (float)SC.GetValue<double>("PM1.N2Purge.TransferRoomStableWaitTime");
 
-                 TrigN2PurgeLAO2OverTime.SetAOTrigger(time, out _);
 
-             }
 
-             if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerArrivalWaitTime") && TrigN2PurgeFOUPO2CheckTime != null)
 
-             {
 
-                 var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerArrivalWaitTime");
 
-                 TrigN2PurgeFOUPO2CheckTime.SetAOTrigger(time, out _);
 
-             }
 
-             if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime") && TrigN2PurgeFOUPO2OverTime != null)
 
-             {
 
-                 var time = (float)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerStableWaitTime");
 
-                 TrigN2PurgeFOUPO2OverTime.SetAOTrigger(time, out _);
 
-             }
 
-             if (SC.ContainsItem("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime") && TrigN2PurgeExchangeLATOFOUPWaitTime != null)
 
-             {
 
-                 var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorTransferRoomToFOUPTime");
 
-                 TrigN2PurgeExchangeLATOFOUPWaitTime.SetAOTrigger(time, out _);
 
-             }
 
-             if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime") && TrigN2PurgeExchangeFOUPTOLAWaitTime != null)
 
-             {
 
-                 var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToTransferRoomTime");
 
-                 TrigN2PurgeExchangeFOUPTOLAWaitTime.SetAOTrigger(time, out _);
 
-             }
 
-             if (SC.ContainsItem("PM1.N2Purge.O2DetectorFOUPToFOUPTime") && TrigN2PurgeExchangeFOUPTOFOUPWaitTime != null)
 
-             {
 
-                 var time = (float)SC.GetValue<double>("PM1.N2Purge.O2DetectorFOUPToFOUPTime");
 
-                 TrigN2PurgeExchangeFOUPTOFOUPWaitTime.SetAOTrigger(time, out _);
 
-             }
 
-             SetN2PurgeModePhase(n2PurgeModeEnum);
 
-             //这2个SV下发值应该根据什么阶段下发什么值
 
-             if (n2PurgeModeEnum == N2PurgeModeEnum.WaferCharge.ToString())
 
-             {
 
-                 SetN2PurgeFOUPO2CheckSV((float)GetWaferChargeFOUPO2CheckSV());
 
-                 SetN2PurgeLAO2CheckSV((float)GetWaferChargeLAO2CheckSV());
 
-                 if (GetWaferChargeLAN2purgeConfig())
 
-                 {
 
-                     SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
 
-                     RestAllN2PrugeRD();
 
-                 }
 
-             }
 
-             if (n2PurgeModeEnum == N2PurgeModeEnum.FoupEnter.ToString())
 
-             {
 
-                 SetN2PurgeFOUPO2CheckSV((float)GetFoupEnterFOUPO2CheckSV());
 
-                 SetN2PurgeLAO2CheckSV((float)GetFoupEnterLAO2CheckSV());
 
-                 if (GetFoupEnterLAN2purgeConfig())
 
-                 {
 
-                     SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
 
-                     RestAllN2PrugeRD();
 
-                 }
 
-             }
 
-             if (n2PurgeModeEnum == N2PurgeModeEnum.WaferDisCharge.ToString())
 
-             {
 
-                 SetN2PurgeFOUPO2CheckSV((float)GetWaferDisChargeFOUPO2CheckSV());
 
-                 SetN2PurgeLAO2CheckSV((float)GetWaferDisChargeLAO2CheckSV());
 
-                 if (GetWaferDisChargeLAN2purgeConfig())
 
-                 {
 
-                     SetN2PurgeValveData(N2PurgeModeEnum.Manual_phase1.ToString());
 
-                     RestAllN2PrugeRD();
 
-                 }
 
-             }
 
-         }
 
-         /// <summary>
 
-         /// Job start的时候,就根据Process的配置判定是否需要进行LA压氧
 
-         /// </summary>
 
-         /// <param name="n2PurgeModeStr"></param>
 
-         public void InitN2PurgeMode(string n2PurgeModeStr)
 
-         {
 
-             if (string.IsNullOrEmpty(n2PurgeModeStr))
 
-                 return;
 
-             if (n2PurgeModeStr.ToLower() == "none")
 
-                 return;
 
-             if (SC.ContainsItem("PM1.RecipeRelevancyN2Purge") && SC.GetValue<bool>("PM1.RecipeRelevancyN2Purge") && SC.ContainsItem("PM1.SelectN2PurgeMode"))
 
-             {
 
-                 var setValue = GetN2PurgeModeEnumByStr(n2PurgeModeStr);
 
-                 SC.SetItemValueFromString("PM1.SelectN2PurgeMode", setValue);
 
-                 RestAllN2PrugeRD();
 
-             }
 
-         }
 
-         public bool CheckFimsIsNeedOxygenPressure(bool fimsN2PurgeConfig, string recipeN2PurgeModeStr, out bool isCheckO2, bool isCheckRecipeHeader = true)
 
-         {
 
-             isCheckO2 = false;
 
-             var currectN2PurgeModel = GetLACurrectN2purgeMode();
 
-             if (isCheckRecipeHeader)
 
-             {
 
-                 if (string.IsNullOrEmpty(recipeN2PurgeModeStr))
 
-                     return false;
 
-                 if (recipeN2PurgeModeStr.ToLower().Equals("n2 purge"))
 
-                 {
 
-                     recipeN2PurgeModeStr = N2PurgeModeEnum.N2PurgeMode.ToString();
 
-                 }
 
-                 if (recipeN2PurgeModeStr.ToLower().Contains("atm"))
 
-                 {
 
-                     recipeN2PurgeModeStr = IsATMMode(recipeN2PurgeModeStr);
 
-                 }
 
-                 var n2PurgeEnum = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), recipeN2PurgeModeStr);
 
-                 if (n2PurgeEnum == N2PurgeModeEnum.ATMMode)
 
-                     return false;
 
-                 if (n2PurgeEnum == N2PurgeModeEnum.N2PurgeMode)
 
-                 {
 
-                     if (currectN2PurgeModel == N2PurgeModeEnum.N2PurgeMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ATMMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ManualMode.ToString())
 
-                     {
 
-                         if (fimsN2PurgeConfig)
 
-                         {
 
-                             isCheckO2 = true;
 
-                             return true;
 
-                         }
 
-                         else
 
-                         {
 
-                             return false;
 
-                         }
 
-                     }
 
-                 }
 
-                 if (n2PurgeEnum == N2PurgeModeEnum.None)
 
-                 {
 
-                     if (currectN2PurgeModel == N2PurgeModeEnum.ATMMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ManualMode.ToString())
 
-                     {
 
-                         return false;
 
-                     }
 
-                     if (currectN2PurgeModel == N2PurgeModeEnum.N2PurgeMode.ToString())
 
-                     {
 
-                         if (fimsN2PurgeConfig)
 
-                         {
 
-                             isCheckO2 = true;
 
-                             return true;
 
-                         }
 
-                         else
 
-                         {
 
-                             return false;
 
-                         }
 
-                     }
 
-                 }
 
-             }
 
-             else
 
-             {
 
-                 if (currectN2PurgeModel == N2PurgeModeEnum.N2PurgeMode.ToString() || currectN2PurgeModel == N2PurgeModeEnum.ManualMode.ToString())
 
-                 {
 
-                     if (fimsN2PurgeConfig)
 
-                     {
 
-                         isCheckO2 = true;
 
-                         return true;
 
-                     }
 
-                     else
 
-                     {
 
-                         return false;
 
-                     }
 
-                 }
 
-                 if (currectN2PurgeModel == N2PurgeModeEnum.ATMMode.ToString())
 
-                 {
 
-                     return false;
 
-                 }
 
-             }
 
-             return false;
 
-         }
 
-         public bool CheckLAIsNeedOxygenPressure(string recipeN2PurgeModeStr)
 
-         {
 
-             if (string.IsNullOrEmpty(recipeN2PurgeModeStr))
 
-                 return false;
 
-             if (recipeN2PurgeModeStr.ToLower() == "none")
 
-                 return false;
 
-             if (recipeN2PurgeModeStr.ToLower() == "atm")
 
-             {
 
-                 recipeN2PurgeModeStr = N2PurgeModeEnum.ATMMode.ToString();
 
-             }
 
-             if (recipeN2PurgeModeStr.ToLower().Contains("n2"))
 
-             {
 
-                 recipeN2PurgeModeStr = N2PurgeModeEnum.N2PurgeMode.ToString();
 
-             }
 
-             var n2PurgeEnum = (N2PurgeModeEnum)Enum.Parse(typeof(N2PurgeModeEnum), recipeN2PurgeModeStr);
 
-             if (n2PurgeEnum == N2PurgeModeEnum.N2PurgeMode || n2PurgeEnum == N2PurgeModeEnum.ATMMode)
 
-                 return true;
 
-             return false;
 
-         }
 
-         /// <summary>
 
-         /// boat Move时候是否Check氧气浓度
 
-         /// </summary>
 
-         /// <param name="n2PurgeModeEnumStr"></param>
 
-         /// <param name="isProcessing"></param>
 
-         /// <param name="limitO2Data"></param>
 
-         /// <returns></returns>
 
-         public bool CheckBoatMoveIsNeedOxygenPressure(string n2PurgeModeEnumStr, bool isProcessing, out double limitO2Data)
 
-         {
 
-             limitO2Data = 0;
 
-             if (!CheckIsLASide())
 
-                 return false;
 
-             if (!isProcessing)
 
-                 return false;
 
-             if (n2PurgeModeEnumStr == N2PurgeModeEnum.BoatLoad.ToString())
 
-             {
 
-                 var isCheckO2Enbale = GetBoatLoadCheckO2DensityConfig();
 
-                 limitO2Data = GetBoatLoadLAO2CheckSV();
 
-                 return isCheckO2Enbale;
 
-             }
 
-             if (n2PurgeModeEnumStr == N2PurgeModeEnum.BoatUnLoad.ToString())
 
-             {
 
-                 var isCheckO2Enbale = GetBoatUnLoadCheckO2DensityConfig();
 
-                 limitO2Data = GetBoatUnLoadLAO2CheckSV();
 
-                 return isCheckO2Enbale;
 
-             }
 
-             return false;
 
-         }
 
-         public string GetN2PurgeModeEnumByStr(string str)
 
-         {
 
-             if ((str == N2PurgeModeEnum.ATMMode.ToString()) || (str == N2PurgeModeEnum.ATMMode.ToDescription()) || (str.StartsWith("ATM")))
 
-             {
 
-                 return N2PurgeModeEnum.ATMMode.ToString();
 
-             }
 
-             else if ((str == N2PurgeModeEnum.N2PurgeMode.ToString()) || (str == N2PurgeModeEnum.N2PurgeMode.ToDescription()) || (str.StartsWith("N2")))
 
-             {
 
-                 return N2PurgeModeEnum.N2PurgeMode.ToString();
 
-             }
 
-             else
 
-             {
 
-                 return GetLACurrectN2purgeMode();
 
-             }
 
-         }
 
-         public string IsATMMode(string str)
 
-         {
 
-             if ((str == N2PurgeModeEnum.ATMMode.ToString()) || (str == N2PurgeModeEnum.ATMMode.ToDescription()) || (str.StartsWith("ATM")))
 
-             {
 
-                 return N2PurgeModeEnum.ATMMode.ToString();
 
-             }
 
-             return str;
 
-         }
 
-         public string GetLACurrectN2purgeMode()
 
-         {
 
-             return SC.ContainsItem("PM1.SelectN2PurgeMode") ? SC.GetStringValue("PM1.SelectN2PurgeMode") : N2PurgeModeEnum.ManualMode.ToString();
 
-         }
 
-         #region FoupEnter
 
-         public double GetFoupEnterLAO2CheckSV()
 
-         {
 
-             return SC.ContainsItem("PM1.N2Purge.FoupEnter.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.FoupEnter.LAO2CheckSV") : 20;
 
-         }
 
-         public double GetFoupEnterFOUPO2CheckSV()
 
-         {
 
-             return SC.ContainsItem("PM1.N2Purge.FoupEnter.FOUPO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.FoupEnter.FOUPO2CheckSV") : 20;
 
-         }
 
-         public bool GetFoupEnterFIMSN2purgeConfig()
 
-         {
 
-             return SC.ContainsItem("PM1.N2Purge.FoupEnter.FOUPN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.FoupEnter.FOUPN2PurgeEnable") : false;
 
-         }
 
-         public bool GetFoupEnterLAN2purgeConfig()
 
-         {
 
-             return SC.ContainsItem("PM1.N2Purge.FoupEnter.TransferRoomN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.FoupEnter.TransferRoomN2PurgeEnable") : false;
 
-         }
 
-         #endregion
 
-         #region WaferCharge
 
-         public double GetWaferChargeLAO2CheckSV()
 
-         {
 
-             return SC.ContainsItem("PM1.N2Purge.WaferCharge.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferCharge.LAO2CheckSV") : 20;
 
-         }
 
-         public double GetWaferChargeFOUPO2CheckSV()
 
-         {
 
-             return SC.ContainsItem("PM1.N2Purge.WaferCharge.FOUPO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferCharge.FOUPO2CheckSV") : 20;
 
-         }
 
-         public bool GetWaferChargeFIMSN2purgeConfig()
 
-         {
 
-             return SC.ContainsItem("PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable") : false;
 
-         }
 
-         public bool GetWaferChargeLAN2purgeConfig()
 
-         {
 
-             return SC.ContainsItem("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.WaferCharge.TransferRoomN2PurgeEnable") : false;
 
-         }
 
-         #endregion
 
-         #region WaferDisCharge
 
-         public double GetWaferDisChargeLAO2CheckSV()
 
-         {
 
-             return SC.ContainsItem("PM1.N2Purge.WaferDisCharge.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferDisCharge.LAO2CheckSV") : 20;
 
-         }
 
-         public double GetWaferDisChargeFOUPO2CheckSV()
 
-         {
 
-             return SC.ContainsItem("PM1.N2Purge.WaferDisCharge.FOUPO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.WaferDisCharge.FOUPO2CheckSV") : 20;
 
-         }
 
-         public bool GetWaferDisChargeFIMSN2purgeConfig()
 
-         {
 
-             return SC.ContainsItem("PM1.N2Purge.WaferDisCharge.FOUPN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.WaferDisCharge.FOUPN2PurgeEnable") : false;
 
-         }
 
-         public bool GetWaferDisChargeLAN2purgeConfig()
 
-         {
 
-             return SC.ContainsItem("PM1.N2Purge.WaferDisCharge.TransferRoomN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.WaferDisCharge.TransferRoomN2PurgeEnable") : false;
 
-         }
 
-         #endregion
 
-         #region Boat Load
 
-         public double GetBoatLoadLAO2CheckSV()
 
-         {
 
-             return SC.ContainsItem("PM1.N2Purge.BoatLoad.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.BoatLoad.LAO2CheckSV") : 20;
 
-         }
 
-         public bool GetBoatLoadCheckO2DensityConfig()
 
-         {
 
-             return SC.ContainsItem("PM1.N2Purge.BoatLoad.TransferRoomO2DensityCheckEnable") ? SC.GetValue<bool>("PM1.N2Purge.BoatLoad.TransferRoomO2DensityCheckEnable") : false;
 
-         }
 
-         public bool GetBoatLoadEAxisInhibitEnableConfig()
 
-         {
 
-             return SC.ContainsItem("PM1.N2Purge.BoatLoad.EAxisInhibitEnable") ? SC.GetValue<bool>("PM1.N2Purge.BoatLoad.EAxisInhibitEnable") : false;
 
-         }
 
-         public bool GetBoatLoadLAN2purgeConfig()
 
-         {
 
-             return SC.ContainsItem("PM1.N2Purge.BoatLoad.TransferRoomN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.BoatLoad.TransferRoomN2PurgeEnable") : false;
 
-         }
 
-         #endregion
 
-         #region BoatUnLoad
 
-         public bool GetBoatUnLoadCheckO2DensityConfig()
 
-         {
 
-             return SC.ContainsItem("PM1.N2Purge.BoatUnLoad.TransferRoomO2DensityCheckEnable") ? SC.GetValue<bool>("PM1.N2Purge.BoatUnLoad.TransferRoomO2DensityCheckEnable") : false;
 
-         }
 
-         public bool GetBoatUnLoadEAxisInhibitEnableConfig()
 
-         {
 
-             return SC.ContainsItem("PM1.N2Purge.BoatUnLoad.EAxisInhibitEnable") ? SC.GetValue<bool>("PM1.N2Purge.BoatUnLoad.EAxisInhibitEnable") : false;
 
-         }
 
-         public double GetBoatUnLoadLAO2CheckSV()
 
-         {
 
-             return SC.ContainsItem("PM1.N2Purge.BoatUnLoad.LAO2CheckSV") ? SC.GetValue<double>("PM1.N2Purge.BoatUnLoad.LAO2CheckSV") : 20;
 
-         }
 
-         public bool GetBoatUnLoadLAN2purgeConfig()
 
-         {
 
-             return SC.ContainsItem("PM1.N2Purge.BoatUnLoad.TransferRoomN2PurgeEnable") ? SC.GetValue<bool>("PM1.N2Purge.BoatUnLoad.TransferRoomN2PurgeEnable") : false;
 
-         }
 
-         #endregion
 
-     }
 
- }
 
 
  |