|
@@ -477,6 +477,10 @@
|
|
|
doStockerInterlock="DO_FOUPRobotBufferInterlock"
|
|
|
aoRobotActionCommand="AO_FOUPRobotActionCommand"
|
|
|
aiRobotActionCommand="AI_FOUPRobotActionCommand"
|
|
|
+
|
|
|
+ diRobotHome1="DI_FTRHome1"
|
|
|
+ diRobotHome2="DI_FTRHome2"
|
|
|
+ diRobotHome3="DI_FTRHome3"
|
|
|
|
|
|
scRootPath=""
|
|
|
/>
|
|
@@ -1050,7 +1054,7 @@
|
|
|
<IoAlarmSignal id="AlarmSignalLDS2MinorWarning" diSignalsplay="LDS2 minor warning" diSignal="DI_LDS2MinorWarning" alarmTrigValue="true"/>
|
|
|
<IoAlarmSignal id="AlarmSignalLDS2LiquidLowWarning" diSignalsplay="LDS2 liquid low warning" diSignal="DI_LDS2LiquidLowWarning" alarmTrigValue="true"/>
|
|
|
<IoAlarmSignal id="AlarmSignalLDS2TankBlankAlarm" diSignalsplay="LDS2 tank blank alarm" diSignal="DI_LDS2TankBlankAlarm" alarmTrigValue="true"/>
|
|
|
-
|
|
|
+
|
|
|
<IoAlarmSignal id="AlarmSignalSL05001LAdoorsw1" diSignalsplay="safe module:SL05001 LA door sw1" diSignal="DI_SL05001LAdoorsw1" alarmTrigValue="false" />
|
|
|
|
|
|
</IoAlarmSignals>
|
|
@@ -1261,7 +1265,7 @@
|
|
|
<IoTrigger id="TrigMS520" display="" schematicId="" unit="" doTrigger="DO_MS520"/>
|
|
|
<IoTrigger id="TrigMS521" display="" schematicId="" unit="" doTrigger="DO_MS521"/>
|
|
|
<IoTrigger id="TrigMS522" display="" schematicId="" unit="" doTrigger="DO_MS522"/>
|
|
|
-
|
|
|
+
|
|
|
<IoTrigger id="TrigBufferN2PurageEN" display="" schematicId="" unit="" doTrigger="DO_BufferN2PurageEN"/>
|
|
|
<IoTrigger id="TrigBufferPurgeTime" display="" schematicId="" unit="" aoTrigger="AO_BufferPurgeTimeSV" />
|
|
|
|