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@@ -11041,6 +11041,11 @@
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<ECID id="1060230001" valueType="Ascii" logicalName="FFU.BufferFFU4.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
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<ECID id="1060240001" valueType="Ascii" logicalName="FFU.BufferFFU5.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
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<ECID id="1060250001" valueType="Ascii" logicalName="FFU.BufferFFU6.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
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+ <ECID id="1070010001" valueType="Ascii" logicalName="BufferPurge.FinishCondition" value="" min="" max="" eventTrigger="" units="" description="Purge Finish Condition" isArray="false" />
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+ <ECID id="1070010002" valueType="Ascii" logicalName="BufferPurge.IsEnable" value="" min="" max="" eventTrigger="" units="" description="whether the BufferPurge Function is Available" isArray="false" />
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+ <ECID id="1070010003" valueType="Ascii" logicalName="BufferPurge.NameList" value="" min="" max="" eventTrigger="" units="" description="Purge NameList" isArray="false" />
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+ <ECID id="1070010004" valueType="Ascii" logicalName="BufferPurge.Operation" value="" min="" max="" eventTrigger="" units="" description="Purge Operation Items" isArray="false" />
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+ <ECID id="1070010005" valueType="Ascii" logicalName="BufferPurge.OperationOrder" value="" min="" max="" eventTrigger="" units="" description="BufferPurge excute order" isArray="false" />
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<ECID id="3310000001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.Parameter.P151.Axis" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
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<ECID id="3310000002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.Parameter.P151.SettingItem" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
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<ECID id="3310000003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.Parameter.P151.SetValue" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
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