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@@ -167,7 +167,6 @@
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doUnload="DO_FIMS2UnloadCommand"
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doHome="DO_FIMS2HomeCommand"
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doAlarmReset="DO_FIMS2AlarmReset"
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- doAutoManual="DO_FIMS2AutoManualCommand"
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doDock="DO_FIMS2Dock"
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doUndock="DO_FIMS2Undock"
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doSeal="DO_FIMS2Seal"
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@@ -460,7 +459,7 @@
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/>
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</IoCarrierRobots>
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- <IoRFs classType="FurnaceRT.Devices.IoRF" assembly="FurnaceRT">
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+ <!--<IoRFs classType="FurnaceRT.Devices.IoRF" assembly="FurnaceRT">
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<IoRF id="RF" display="RF" schematicId="RF" unit=""
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aiRelfectionPower="AI_RFGeneratorRelfectionPower"
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aiForwardPower="AI_RFGeneratorForwardPower"
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@@ -475,8 +474,8 @@
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scRootPath=""
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/>
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- </IoRFs>
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- <IoRFMatchs classType="FurnaceRT.Devices.IoRFMatch" assembly="FurnaceRT">
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+ </IoRFs>-->
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+ <!--<IoRFMatchs classType="FurnaceRT.Devices.IoRFMatch" assembly="FurnaceRT">
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<IoRFMatch id="RFMatch" display="RFMatch" schematicId="RFMatch" unit=""
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aiVpp="AI_MatchingUnitVppMonitor"
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aiVdc="AI_MatchingUnitVdcMonitor"
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@@ -496,7 +495,7 @@
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scRootPath=""
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/>
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- </IoRFMatchs>
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+ </IoRFMatchs>-->
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<IoAPCs classType="FurnaceRT.Devices.IoAPC" assembly="FurnaceRT">
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<IoAPC id="APC" display="APC" schematicId="APC" unit=""
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aiValueSensorInput1="AI_APCValueSensorInput1"
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@@ -591,7 +590,6 @@
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aoController1CH="AO_APCController1CH"
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aoController1CL="AO_APCController1CL"
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aoController1Offset="AO_APCController1Offset"
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- aoController2="AO_APCController2"
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aoController2P="AO_APCController2P"
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aoController2I="AO_APCController2I"
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aoController2D="AO_APCController2D"
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@@ -599,7 +597,6 @@
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aoController2CH="AO_APCController2CH"
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aoController2CL="AO_APCController2CL"
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aoController2Offset="AO_APCController2Offset"
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- aoController3="AO_APCController3"
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aoController3P="AO_APCController3P"
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aoController3I="AO_APCController3I"
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aoController3D="AO_APCController3D"
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@@ -607,7 +604,6 @@
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aoController3CH="AO_APCController3CH"
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aoController3CL="AO_APCController3CL"
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aoController3Offset="AO_APCController3Offset"
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- aoController4="AO_APCController4"
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aoController4P="AO_APCController4P"
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aoController4I="AO_APCController4I"
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aoController4D="AO_APCController4D"
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@@ -615,7 +611,6 @@
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aoController4CH="AO_APCController4CH"
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aoController4CL="AO_APCController4CL"
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aoController4Offset="AO_APCController4Offset"
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- aoController5="AO_APCController5"
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aoController5P="AO_APCController5P"
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aoController5I="AO_APCController5I"
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aoController5D="AO_APCController5D"
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@@ -623,7 +618,6 @@
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aoController5CH="AO_APCController5CH"
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aoController5CL="AO_APCController5CL"
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aoController5Offset="AO_APCController5Offset"
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- aoController6="AO_APCController6"
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aoController6P="AO_APCController6P"
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aoController6I="AO_APCController6I"
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aoController6D="AO_APCController6D"
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@@ -631,7 +625,6 @@
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aoController6CH="AO_APCController6CH"
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aoController6CL="AO_APCController6CL"
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aoController6Offset="AO_APCController6Offset"
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- aoController7="AO_APCController7"
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aoController7P="AO_APCController7P"
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aoController7I="AO_APCController7I"
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aoController7D="AO_APCController7D"
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@@ -639,7 +632,6 @@
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aoController7CH="AO_APCController7CH"
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aoController7CL="AO_APCController7CL"
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aoController7Offset="AO_APCController7Offset"
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- aoController8="AO_APCController8"
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aoController8P="AO_APCController8P"
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aoController8I="AO_APCController8I"
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aoController8D="AO_APCController8D"
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@@ -647,7 +639,6 @@
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aoController8CH="AO_APCController8CH"
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aoController8CL="AO_APCController8CL"
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aoController8Offset="AO_APCController8Offset"
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- aoController9="AO_APCController9"
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aoController9P="AO_APCController9P"
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aoController9I="AO_APCController9I"
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aoController9D="AO_APCController9D"
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@@ -655,7 +646,6 @@
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aoController9CH="AO_APCController9CH"
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aoController9CL="AO_APCController9CL"
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aoController9Offset="AO_APCController9Offset"
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- aoController10="AO_APCController10"
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aoController10P="AO_APCController10P"
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aoController10I="AO_APCController10I"
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aoController10D="AO_APCController10D"
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@@ -664,7 +654,6 @@
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aoController10CL="AO_APCController10CL"
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aoController10Offset="AO_APCController10Offset"
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- aiController1="AI_APCController1"
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aiController1P="AI_APCController1P"
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aiController1I="AI_APCController1I"
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aiController1D="AI_APCController1D"
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@@ -672,7 +661,6 @@
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aiController1CH="AI_APCController1CH"
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aiController1CL="AI_APCController1CL"
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aiController1Offset="AI_APCController1Offset"
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- aiController2="AI_APCController2"
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aiController2P="AI_APCController2P"
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aiController2I="AI_APCController2I"
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aiController2D="AI_APCController2D"
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@@ -680,7 +668,6 @@
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aiController2CH="AI_APCController2CH"
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aiController2CL="AI_APCController2CL"
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aiController2Offset="AI_APCController2Offset"
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- aiController3="AI_APCController3"
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aiController3P="AI_APCController3P"
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aiController3I="AI_APCController3I"
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aiController3D="AI_APCController3D"
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@@ -688,7 +675,6 @@
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aiController3CH="AI_APCController3CH"
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aiController3CL="AI_APCController3CL"
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aiController3Offset="AI_APCController3Offset"
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- aiController4="AI_APCController4"
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aiController4P="AI_APCController4P"
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aiController4I="AI_APCController4I"
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aiController4D="AI_APCController4D"
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@@ -696,7 +682,6 @@
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aiController4CH="AI_APCController4CH"
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aiController4CL="AI_APCController4CL"
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aiController4Offset="AI_APCController4Offset"
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- aiController5="AI_APCController5"
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aiController5P="AI_APCController5P"
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aiController5I="AI_APCController5I"
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aiController5D="AI_APCController5D"
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@@ -704,7 +689,6 @@
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aiController5CH="AI_APCController5CH"
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aiController5CL="AI_APCController5CL"
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aiController5Offset="AI_APCController5Offset"
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- aiController6="AI_APCController6"
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aiController6P="AI_APCController6P"
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aiController6I="AI_APCController6I"
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aiController6D="AI_APCController6D"
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@@ -712,7 +696,6 @@
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aiController6CH="AI_APCController6CH"
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aiController6CL="AI_APCController6CL"
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aiController6Offset="AI_APCController6Offset"
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- aiController7="AI_APCController7"
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aiController7P="AI_APCController7P"
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aiController7I="AI_APCController7I"
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aiController7D="AI_APCController7D"
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@@ -720,7 +703,6 @@
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aiController7CH="AI_APCController7CH"
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aiController7CL="AI_APCController7CL"
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aiController7Offset="AI_APCController7Offset"
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- aiController8="AI_APCController8"
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aiController8P="AI_APCController8P"
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aiController8I="AI_APCController8I"
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aiController8D="AI_APCController8D"
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@@ -728,7 +710,6 @@
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aiController8CH="AI_APCController8CH"
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aiController8CL="AI_APCController8CL"
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aiController8Offset="AI_APCController8Offset"
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- aiController9="AI_APCController9"
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aiController9P="AI_APCController9P"
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aiController9I="AI_APCController9I"
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aiController9D="AI_APCController9D"
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@@ -736,7 +717,6 @@
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aiController9CH="AI_APCController9CH"
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aiController9CL="AI_APCController9CL"
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aiController9Offset="AI_APCController9Offset"
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- aiController10="AI_APCController10"
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aiController10P="AI_APCController10P"
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aiController10I="AI_APCController10I"
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aiController10D="AI_APCController10D"
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@@ -1048,24 +1028,7 @@
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<IoAlarmSignal id="AlarmSignalPOD1FOUPVacuumSuckingAlarm" diSignalsplay="POD1 FOUP vacuum sucking alarm" diSignal="DI_POD1FOUPVacuumSuckingAlarm" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalPOD2FOUPVacuumSuckingAlarm" diSignalsplay="POD2 FOUP vacuum sucking alarm" diSignal="DI_POD2FOUPVacuumSuckingAlarm" alarmTrigValue="true"/>
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- <IoAlarmSignal id="AlarmSiSourceTANKHeater1INHIBITHIAlarm" diSignalsplay="Si-Source TANK heater1 INHIBIT HI ALARM" diSignal="DI_SiSourceTANKHeater1INHIBITHIALARM" alarmTrigValue="true"/>
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- <IoAlarmSignal id="AlarmSiSourceTANKHeater1INHIBITLOWAlarm" diSignalsplay="Si-Source TANK heater1 INHIBIT LOW ALARM" diSignal="DI_SiSourceTANKHeater1INHIBITLOWALARM" alarmTrigValue="true"/>
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- <IoAlarmSignal id="AlarmSiSourceTANKHeater2INHIBITHIAlarm" diSignalsplay="Si-Source TANK heater2 INHIBIT HI ALARM" diSignal="DI_SiSourceTANKHeater2INHIBITHIALARM" alarmTrigValue="true"/>
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- <IoAlarmSignal id="AlarmSiSourceTANKHeater2INHIBITLOWAlarm" diSignalsplay="Si-Source TANK heater2 INHIBIT LOW ALARM" diSignal="DI_SiSourceTANKHeater2INHIBITLOWALARM" alarmTrigValue="true"/>
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- <IoAlarmSignal id="AlarmSiSourceTANKHeater3INHIBITHIAlarm" diSignalsplay="Si-Source TANK heater3 INHIBIT HI ALARM" diSignal="DI_SiSourceTANKHeater3INHIBITHIALARM" alarmTrigValue="true"/>
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- <IoAlarmSignal id="AlarmSiSourceTANKHeater3INHIBITLOWAlarm" diSignalsplay="Si-Source TANK heater3 INHIBIT LOW ALARM" diSignal="DI_SiSourceTANKHeater3INHIBITLOWALARM" alarmTrigValue="true"/>
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- <IoAlarmSignal id="AlarmSiSourceAVMFCHeaterINHIBITHIAlarm" diSignalsplay="Si-Source AV&MFC heater INHIBIT HI ALARM" diSignal="DI_SiSourceAVMFCHeaterINHIBITHIALARM" alarmTrigValue="true"/>
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- <IoAlarmSignal id="AlarmSiSourceAVMFCHeaterINHIBITLOWAlarm" diSignalsplay="Si-Source AV&MFC heater INHIBIT LOW ALARM" diSignal="DI_SiSourceAVMFCHeaterINHIBITLOWALARM" alarmTrigValue="true"/>
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-
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- <IoAlarmSignal id="AlarmCSourceTANKHeater1INHIBITHIAlarm" diSignalsplay="C-Source TANK heater1 INHIBIT HI ALARM" diSignal="DI_CSourceTANKHeater1INHIBITHIALARM" alarmTrigValue="true"/>
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- <IoAlarmSignal id="AlarmCSourceTANKHeater1INHIBITLOWAlarm" diSignalsplay="C-Source TANK heater1 INHIBIT LOW ALARM" diSignal="DI_CSourceTANKHeater1INHIBITLOWALARM" alarmTrigValue="true"/>
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- <IoAlarmSignal id="AlarmCSourceTANKHeater2INHIBITHIAlarm" diSignalsplay="C-Source TANK heater2 INHIBIT HI ALARM" diSignal="DI_CSourceTANKHeater2INHIBITHIALARM" alarmTrigValue="true"/>
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- <IoAlarmSignal id="AlarmCSourceTANKHeater2INHIBITLOWAlarm" diSignalsplay="C-Source TANK heater2 INHIBIT LOW ALARM" diSignal="DI_CSourceTANKHeater2INHIBITLOWALARM" alarmTrigValue="true"/>
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- <IoAlarmSignal id="AlarmCSourceTANKHeater3INHIBITHIAlarm" diSignalsplay="C-Source TANK heater3 INHIBIT HI ALARM" diSignal="DI_CSourceTANKHeater3INHIBITHIALARM" alarmTrigValue="true"/>
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- <IoAlarmSignal id="AlarmCSourceTANKHeater3INHIBITLOWAlarm" diSignalsplay="C-Source TANK heater3 INHIBIT LOW ALARM" diSignal="DI_CSourceTANKHeater3INHIBITLOWALARM" alarmTrigValue="true"/>
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- <IoAlarmSignal id="AlarmCSourceAVMFCHeaterINHIBITHIAlarm" diSignalsplay="C-Source AV&MFC heater INHIBIT HI ALARM" diSignal="DI_CSourceAVMFCHeaterINHIBITHIALARM" alarmTrigValue="true"/>
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- <IoAlarmSignal id="AlarmCSourceAVMFCHeaterINHIBITLOWAlarm" diSignalsplay="C-Source AV&MFC heater INHIBIT LOW ALARM" diSignal="DI_CSourceAVMFCHeaterINHIBITLOWALARM" alarmTrigValue="true"/>
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-
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+
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</IoAlarmSignals>
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<IoSensors>
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<IoSensor id="SensorEMOReset" display="" di="DI_EMOReset"/>
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@@ -1280,11 +1243,7 @@
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<IoTrigger id="TrigN2PurgeFOUPO2CheckSV" display="" schematicId="" unit="" aoTrigger="AO_FOUPO2CheckSV"/>
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</IoTriggers>
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- <IoTriggers classType="FurnaceRT.Devices.IoTrigger3" assembly="FurnaceRT">
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- <IoTrigger3 id="GASTempOutRangeAlarm" display="GASTempOutRangeAlarm" diFeedback1="DI_TempOutRangeAlarm" diFeedback2="DI_TempOutRangeAlarm" diFeedback3="DI_TempOutRangeAlarm" diFeedback4="DI_TempOutRangeAlarm" schematicId="" unit="" doTrigger="DO_GASTempOutRangeAlarm"/>
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- <IoTrigger3 id="EXHAUSTTempOutRangeAlarm" display="EXHAUSTTempOutRangeAlarm" diFeedback6="DI_TempOutRangeAlarm" diFeedback7="DI_TempOutRangeAlarm" schematicId="" unit="" doTrigger="DO_EXHAUSTTempOutRangeAlarm"/>
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- <IoTrigger3 id="MCLNAlarm" display="MCLNAlarm" diFeedback1="DI_CLNAlarm" diFeedback2="DI_CLNAlarm" diFeedback3="DI_CLNAlarm" diFeedback4="DI_CLNAlarm" diFeedback6="DI_CLNAlarm" diFeedback7="DI_CLNAlarm" schematicId="" unit="" doTrigger="DO_MCLNAlarm"/>
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- </IoTriggers>
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+
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<!--<IoTriggers classType="FurnaceRT.Devices.IoTrigger4" assembly="FurnaceRT">
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<IoTrigger4 id="TrigCapHeaterTemp" display="" aiFeedback="AI_CH15PV" schematicId="" unit="" aoTrigger="AO_CapHeaterTemp"/>
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