| 
															
																@@ -167,7 +167,6 @@ 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					doUnload="DO_FIMS2UnloadCommand"
 
															 | 
															
															 | 
															
																 					doUnload="DO_FIMS2UnloadCommand"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					doHome="DO_FIMS2HomeCommand"
 
															 | 
															
															 | 
															
																 					doHome="DO_FIMS2HomeCommand"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					doAlarmReset="DO_FIMS2AlarmReset"
 
															 | 
															
															 | 
															
																 					doAlarmReset="DO_FIMS2AlarmReset"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																-					doAutoManual="DO_FIMS2AutoManualCommand"
 
															 | 
															
															 | 
															
																 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					doDock="DO_FIMS2Dock"
 
															 | 
															
															 | 
															
																 					doDock="DO_FIMS2Dock"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					doUndock="DO_FIMS2Undock"
 
															 | 
															
															 | 
															
																 					doUndock="DO_FIMS2Undock"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					doSeal="DO_FIMS2Seal"
 
															 | 
															
															 | 
															
																 					doSeal="DO_FIMS2Seal"
 
															 | 
														
													
												
											
												
													
														
															 | 
															
																@@ -460,7 +459,7 @@ 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 	    />
 
															 | 
															
															 | 
															
																 	    />
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 	</IoCarrierRobots>
 
															 | 
															
															 | 
															
																 	</IoCarrierRobots>
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 
 
															 | 
															
															 | 
															
																 
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																-	<IoRFs classType="FurnaceRT.Devices.IoRF" assembly="FurnaceRT">
 
															 | 
															
															 | 
															
																 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 
															 | 
															
															 | 
															
																+	<!--<IoRFs classType="FurnaceRT.Devices.IoRF" assembly="FurnaceRT">
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 		<IoRF id="RF" display="RF" schematicId="RF" unit=""
 
															 | 
															
															 | 
															
																 		<IoRF id="RF" display="RF" schematicId="RF" unit=""
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aiRelfectionPower="AI_RFGeneratorRelfectionPower"
 
															 | 
															
															 | 
															
																 					aiRelfectionPower="AI_RFGeneratorRelfectionPower"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aiForwardPower="AI_RFGeneratorForwardPower"
 
															 | 
															
															 | 
															
																 					aiForwardPower="AI_RFGeneratorForwardPower"
 
															 | 
														
													
												
											
												
													
														
															 | 
															
																@@ -475,8 +474,8 @@ 
															 | 
														
													
												
													
														
															| 
															 | 
															
																           
 
															 | 
															
															 | 
															
																           
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					scRootPath=""
 
															 | 
															
															 | 
															
																 					scRootPath=""
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				/>
 
															 | 
															
															 | 
															
																 				/>
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																-	</IoRFs>
 
															 | 
															
															 | 
															
																 
															 | 
														
													
												
													
														
															| 
															 | 
															
																-	<IoRFMatchs classType="FurnaceRT.Devices.IoRFMatch" assembly="FurnaceRT">
 
															 | 
															
															 | 
															
																 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 
															 | 
															
															 | 
															
																+	</IoRFs>-->
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 
															 | 
															
															 | 
															
																+	<!--<IoRFMatchs classType="FurnaceRT.Devices.IoRFMatch" assembly="FurnaceRT">
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 		<IoRFMatch id="RFMatch" display="RFMatch" schematicId="RFMatch" unit=""
 
															 | 
															
															 | 
															
																 		<IoRFMatch id="RFMatch" display="RFMatch" schematicId="RFMatch" unit=""
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aiVpp="AI_MatchingUnitVppMonitor"
 
															 | 
															
															 | 
															
																 					aiVpp="AI_MatchingUnitVppMonitor"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aiVdc="AI_MatchingUnitVdcMonitor"
 
															 | 
															
															 | 
															
																 					aiVdc="AI_MatchingUnitVdcMonitor"
 
															 | 
														
													
												
											
												
													
														
															 | 
															
																@@ -496,7 +495,7 @@ 
															 | 
														
													
												
													
														
															| 
															 | 
															
																           
 
															 | 
															
															 | 
															
																           
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					scRootPath=""
 
															 | 
															
															 | 
															
																 					scRootPath=""
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				/>
 
															 | 
															
															 | 
															
																 				/>
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																-	</IoRFMatchs>
 
															 | 
															
															 | 
															
																 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 
															 | 
															
															 | 
															
																+	</IoRFMatchs>-->
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 	<IoAPCs classType="FurnaceRT.Devices.IoAPC" assembly="FurnaceRT">
 
															 | 
															
															 | 
															
																 	<IoAPCs classType="FurnaceRT.Devices.IoAPC" assembly="FurnaceRT">
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 		<IoAPC id="APC" display="APC" schematicId="APC" unit=""
 
															 | 
															
															 | 
															
																 		<IoAPC id="APC" display="APC" schematicId="APC" unit=""
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aiValueSensorInput1="AI_APCValueSensorInput1"
 
															 | 
															
															 | 
															
																 					aiValueSensorInput1="AI_APCValueSensorInput1"
 
															 | 
														
													
												
											
												
													
														
															 | 
															
																@@ -591,7 +590,6 @@ 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController1CH="AO_APCController1CH"
 
															 | 
															
															 | 
															
																 					aoController1CH="AO_APCController1CH"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController1CL="AO_APCController1CL"
 
															 | 
															
															 | 
															
																 					aoController1CL="AO_APCController1CL"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController1Offset="AO_APCController1Offset"
 
															 | 
															
															 | 
															
																 					aoController1Offset="AO_APCController1Offset"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																-					aoController2="AO_APCController2"
 
															 | 
															
															 | 
															
																 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController2P="AO_APCController2P"
 
															 | 
															
															 | 
															
																 					aoController2P="AO_APCController2P"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController2I="AO_APCController2I"
 
															 | 
															
															 | 
															
																 					aoController2I="AO_APCController2I"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController2D="AO_APCController2D"
 
															 | 
															
															 | 
															
																 					aoController2D="AO_APCController2D"
 
															 | 
														
													
												
											
												
													
														
															 | 
															
																@@ -599,7 +597,6 @@ 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController2CH="AO_APCController2CH"
 
															 | 
															
															 | 
															
																 					aoController2CH="AO_APCController2CH"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController2CL="AO_APCController2CL"
 
															 | 
															
															 | 
															
																 					aoController2CL="AO_APCController2CL"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController2Offset="AO_APCController2Offset"
 
															 | 
															
															 | 
															
																 					aoController2Offset="AO_APCController2Offset"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																-					aoController3="AO_APCController3"
 
															 | 
															
															 | 
															
																 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController3P="AO_APCController3P"
 
															 | 
															
															 | 
															
																 					aoController3P="AO_APCController3P"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController3I="AO_APCController3I"
 
															 | 
															
															 | 
															
																 					aoController3I="AO_APCController3I"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController3D="AO_APCController3D"
 
															 | 
															
															 | 
															
																 					aoController3D="AO_APCController3D"
 
															 | 
														
													
												
											
												
													
														
															 | 
															
																@@ -607,7 +604,6 @@ 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController3CH="AO_APCController3CH"
 
															 | 
															
															 | 
															
																 					aoController3CH="AO_APCController3CH"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController3CL="AO_APCController3CL"
 
															 | 
															
															 | 
															
																 					aoController3CL="AO_APCController3CL"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController3Offset="AO_APCController3Offset"
 
															 | 
															
															 | 
															
																 					aoController3Offset="AO_APCController3Offset"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																-					aoController4="AO_APCController4"
 
															 | 
															
															 | 
															
																 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController4P="AO_APCController4P"
 
															 | 
															
															 | 
															
																 					aoController4P="AO_APCController4P"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController4I="AO_APCController4I"
 
															 | 
															
															 | 
															
																 					aoController4I="AO_APCController4I"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController4D="AO_APCController4D"
 
															 | 
															
															 | 
															
																 					aoController4D="AO_APCController4D"
 
															 | 
														
													
												
											
												
													
														
															 | 
															
																@@ -615,7 +611,6 @@ 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController4CH="AO_APCController4CH"
 
															 | 
															
															 | 
															
																 					aoController4CH="AO_APCController4CH"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController4CL="AO_APCController4CL"
 
															 | 
															
															 | 
															
																 					aoController4CL="AO_APCController4CL"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController4Offset="AO_APCController4Offset"
 
															 | 
															
															 | 
															
																 					aoController4Offset="AO_APCController4Offset"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																-					aoController5="AO_APCController5"
 
															 | 
															
															 | 
															
																 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController5P="AO_APCController5P"
 
															 | 
															
															 | 
															
																 					aoController5P="AO_APCController5P"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController5I="AO_APCController5I"
 
															 | 
															
															 | 
															
																 					aoController5I="AO_APCController5I"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController5D="AO_APCController5D"
 
															 | 
															
															 | 
															
																 					aoController5D="AO_APCController5D"
 
															 | 
														
													
												
											
												
													
														
															 | 
															
																@@ -623,7 +618,6 @@ 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController5CH="AO_APCController5CH"
 
															 | 
															
															 | 
															
																 					aoController5CH="AO_APCController5CH"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController5CL="AO_APCController5CL"
 
															 | 
															
															 | 
															
																 					aoController5CL="AO_APCController5CL"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController5Offset="AO_APCController5Offset"
 
															 | 
															
															 | 
															
																 					aoController5Offset="AO_APCController5Offset"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																-					aoController6="AO_APCController6"
 
															 | 
															
															 | 
															
																 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController6P="AO_APCController6P"
 
															 | 
															
															 | 
															
																 					aoController6P="AO_APCController6P"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController6I="AO_APCController6I"
 
															 | 
															
															 | 
															
																 					aoController6I="AO_APCController6I"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController6D="AO_APCController6D"
 
															 | 
															
															 | 
															
																 					aoController6D="AO_APCController6D"
 
															 | 
														
													
												
											
												
													
														
															 | 
															
																@@ -631,7 +625,6 @@ 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController6CH="AO_APCController6CH"
 
															 | 
															
															 | 
															
																 					aoController6CH="AO_APCController6CH"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController6CL="AO_APCController6CL"
 
															 | 
															
															 | 
															
																 					aoController6CL="AO_APCController6CL"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController6Offset="AO_APCController6Offset"
 
															 | 
															
															 | 
															
																 					aoController6Offset="AO_APCController6Offset"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																-					aoController7="AO_APCController7"
 
															 | 
															
															 | 
															
																 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController7P="AO_APCController7P"
 
															 | 
															
															 | 
															
																 					aoController7P="AO_APCController7P"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController7I="AO_APCController7I"
 
															 | 
															
															 | 
															
																 					aoController7I="AO_APCController7I"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController7D="AO_APCController7D"
 
															 | 
															
															 | 
															
																 					aoController7D="AO_APCController7D"
 
															 | 
														
													
												
											
												
													
														
															 | 
															
																@@ -639,7 +632,6 @@ 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController7CH="AO_APCController7CH"
 
															 | 
															
															 | 
															
																 					aoController7CH="AO_APCController7CH"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController7CL="AO_APCController7CL"
 
															 | 
															
															 | 
															
																 					aoController7CL="AO_APCController7CL"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController7Offset="AO_APCController7Offset"
 
															 | 
															
															 | 
															
																 					aoController7Offset="AO_APCController7Offset"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																-					aoController8="AO_APCController8"
 
															 | 
															
															 | 
															
																 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController8P="AO_APCController8P"
 
															 | 
															
															 | 
															
																 					aoController8P="AO_APCController8P"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController8I="AO_APCController8I"
 
															 | 
															
															 | 
															
																 					aoController8I="AO_APCController8I"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController8D="AO_APCController8D"
 
															 | 
															
															 | 
															
																 					aoController8D="AO_APCController8D"
 
															 | 
														
													
												
											
												
													
														
															 | 
															
																@@ -647,7 +639,6 @@ 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController8CH="AO_APCController8CH"
 
															 | 
															
															 | 
															
																 					aoController8CH="AO_APCController8CH"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController8CL="AO_APCController8CL"
 
															 | 
															
															 | 
															
																 					aoController8CL="AO_APCController8CL"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController8Offset="AO_APCController8Offset"
 
															 | 
															
															 | 
															
																 					aoController8Offset="AO_APCController8Offset"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																-					aoController9="AO_APCController9"
 
															 | 
															
															 | 
															
																 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController9P="AO_APCController9P"
 
															 | 
															
															 | 
															
																 					aoController9P="AO_APCController9P"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController9I="AO_APCController9I"
 
															 | 
															
															 | 
															
																 					aoController9I="AO_APCController9I"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController9D="AO_APCController9D"
 
															 | 
															
															 | 
															
																 					aoController9D="AO_APCController9D"
 
															 | 
														
													
												
											
												
													
														
															 | 
															
																@@ -655,7 +646,6 @@ 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController9CH="AO_APCController9CH"
 
															 | 
															
															 | 
															
																 					aoController9CH="AO_APCController9CH"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController9CL="AO_APCController9CL"
 
															 | 
															
															 | 
															
																 					aoController9CL="AO_APCController9CL"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController9Offset="AO_APCController9Offset"
 
															 | 
															
															 | 
															
																 					aoController9Offset="AO_APCController9Offset"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																-					aoController10="AO_APCController10"
 
															 | 
															
															 | 
															
																 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController10P="AO_APCController10P"
 
															 | 
															
															 | 
															
																 					aoController10P="AO_APCController10P"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController10I="AO_APCController10I"
 
															 | 
															
															 | 
															
																 					aoController10I="AO_APCController10I"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController10D="AO_APCController10D"
 
															 | 
															
															 | 
															
																 					aoController10D="AO_APCController10D"
 
															 | 
														
													
												
											
												
													
														
															 | 
															
																@@ -664,7 +654,6 @@ 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController10CL="AO_APCController10CL"
 
															 | 
															
															 | 
															
																 					aoController10CL="AO_APCController10CL"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 					aoController10Offset="AO_APCController10Offset"
 
															 | 
															
															 | 
															
																 					aoController10Offset="AO_APCController10Offset"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																           
 
															 | 
															
															 | 
															
																           
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																-			   	aiController1="AI_APCController1"
 
															 | 
															
															 | 
															
																 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController1P="AI_APCController1P"
 
															 | 
															
															 | 
															
																 				aiController1P="AI_APCController1P"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController1I="AI_APCController1I"
 
															 | 
															
															 | 
															
																 				aiController1I="AI_APCController1I"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController1D="AI_APCController1D"
 
															 | 
															
															 | 
															
																 				aiController1D="AI_APCController1D"
 
															 | 
														
													
												
											
												
													
														
															 | 
															
																@@ -672,7 +661,6 @@ 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController1CH="AI_APCController1CH"
 
															 | 
															
															 | 
															
																 				aiController1CH="AI_APCController1CH"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController1CL="AI_APCController1CL"
 
															 | 
															
															 | 
															
																 				aiController1CL="AI_APCController1CL"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController1Offset="AI_APCController1Offset"
 
															 | 
															
															 | 
															
																 				aiController1Offset="AI_APCController1Offset"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																-				aiController2="AI_APCController2"
 
															 | 
															
															 | 
															
																 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController2P="AI_APCController2P"
 
															 | 
															
															 | 
															
																 				aiController2P="AI_APCController2P"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController2I="AI_APCController2I"
 
															 | 
															
															 | 
															
																 				aiController2I="AI_APCController2I"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController2D="AI_APCController2D"
 
															 | 
															
															 | 
															
																 				aiController2D="AI_APCController2D"
 
															 | 
														
													
												
											
												
													
														
															 | 
															
																@@ -680,7 +668,6 @@ 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController2CH="AI_APCController2CH"
 
															 | 
															
															 | 
															
																 				aiController2CH="AI_APCController2CH"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController2CL="AI_APCController2CL"
 
															 | 
															
															 | 
															
																 				aiController2CL="AI_APCController2CL"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController2Offset="AI_APCController2Offset"
 
															 | 
															
															 | 
															
																 				aiController2Offset="AI_APCController2Offset"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																-				aiController3="AI_APCController3"
 
															 | 
															
															 | 
															
																 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController3P="AI_APCController3P"
 
															 | 
															
															 | 
															
																 				aiController3P="AI_APCController3P"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController3I="AI_APCController3I"
 
															 | 
															
															 | 
															
																 				aiController3I="AI_APCController3I"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController3D="AI_APCController3D"
 
															 | 
															
															 | 
															
																 				aiController3D="AI_APCController3D"
 
															 | 
														
													
												
											
												
													
														
															 | 
															
																@@ -688,7 +675,6 @@ 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController3CH="AI_APCController3CH"
 
															 | 
															
															 | 
															
																 				aiController3CH="AI_APCController3CH"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController3CL="AI_APCController3CL"
 
															 | 
															
															 | 
															
																 				aiController3CL="AI_APCController3CL"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController3Offset="AI_APCController3Offset"
 
															 | 
															
															 | 
															
																 				aiController3Offset="AI_APCController3Offset"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																-				aiController4="AI_APCController4"
 
															 | 
															
															 | 
															
																 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController4P="AI_APCController4P"
 
															 | 
															
															 | 
															
																 				aiController4P="AI_APCController4P"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController4I="AI_APCController4I"
 
															 | 
															
															 | 
															
																 				aiController4I="AI_APCController4I"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController4D="AI_APCController4D"
 
															 | 
															
															 | 
															
																 				aiController4D="AI_APCController4D"
 
															 | 
														
													
												
											
												
													
														
															 | 
															
																@@ -696,7 +682,6 @@ 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController4CH="AI_APCController4CH"
 
															 | 
															
															 | 
															
																 				aiController4CH="AI_APCController4CH"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController4CL="AI_APCController4CL"
 
															 | 
															
															 | 
															
																 				aiController4CL="AI_APCController4CL"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController4Offset="AI_APCController4Offset"
 
															 | 
															
															 | 
															
																 				aiController4Offset="AI_APCController4Offset"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																-				aiController5="AI_APCController5"
 
															 | 
															
															 | 
															
																 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController5P="AI_APCController5P"
 
															 | 
															
															 | 
															
																 				aiController5P="AI_APCController5P"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController5I="AI_APCController5I"
 
															 | 
															
															 | 
															
																 				aiController5I="AI_APCController5I"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController5D="AI_APCController5D"
 
															 | 
															
															 | 
															
																 				aiController5D="AI_APCController5D"
 
															 | 
														
													
												
											
												
													
														
															 | 
															
																@@ -704,7 +689,6 @@ 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController5CH="AI_APCController5CH"
 
															 | 
															
															 | 
															
																 				aiController5CH="AI_APCController5CH"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController5CL="AI_APCController5CL"
 
															 | 
															
															 | 
															
																 				aiController5CL="AI_APCController5CL"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController5Offset="AI_APCController5Offset"
 
															 | 
															
															 | 
															
																 				aiController5Offset="AI_APCController5Offset"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																-				aiController6="AI_APCController6"
 
															 | 
															
															 | 
															
																 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController6P="AI_APCController6P"
 
															 | 
															
															 | 
															
																 				aiController6P="AI_APCController6P"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController6I="AI_APCController6I"
 
															 | 
															
															 | 
															
																 				aiController6I="AI_APCController6I"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController6D="AI_APCController6D"
 
															 | 
															
															 | 
															
																 				aiController6D="AI_APCController6D"
 
															 | 
														
													
												
											
												
													
														
															 | 
															
																@@ -712,7 +696,6 @@ 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController6CH="AI_APCController6CH"
 
															 | 
															
															 | 
															
																 				aiController6CH="AI_APCController6CH"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController6CL="AI_APCController6CL"
 
															 | 
															
															 | 
															
																 				aiController6CL="AI_APCController6CL"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController6Offset="AI_APCController6Offset"
 
															 | 
															
															 | 
															
																 				aiController6Offset="AI_APCController6Offset"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																-				aiController7="AI_APCController7"
 
															 | 
															
															 | 
															
																 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController7P="AI_APCController7P"
 
															 | 
															
															 | 
															
																 				aiController7P="AI_APCController7P"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController7I="AI_APCController7I"
 
															 | 
															
															 | 
															
																 				aiController7I="AI_APCController7I"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController7D="AI_APCController7D"
 
															 | 
															
															 | 
															
																 				aiController7D="AI_APCController7D"
 
															 | 
														
													
												
											
												
													
														
															 | 
															
																@@ -720,7 +703,6 @@ 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController7CH="AI_APCController7CH"
 
															 | 
															
															 | 
															
																 				aiController7CH="AI_APCController7CH"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController7CL="AI_APCController7CL"
 
															 | 
															
															 | 
															
																 				aiController7CL="AI_APCController7CL"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController7Offset="AI_APCController7Offset"
 
															 | 
															
															 | 
															
																 				aiController7Offset="AI_APCController7Offset"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																-				aiController8="AI_APCController8"
 
															 | 
															
															 | 
															
																 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController8P="AI_APCController8P"
 
															 | 
															
															 | 
															
																 				aiController8P="AI_APCController8P"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController8I="AI_APCController8I"
 
															 | 
															
															 | 
															
																 				aiController8I="AI_APCController8I"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController8D="AI_APCController8D"
 
															 | 
															
															 | 
															
																 				aiController8D="AI_APCController8D"
 
															 | 
														
													
												
											
												
													
														
															 | 
															
																@@ -728,7 +710,6 @@ 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController8CH="AI_APCController8CH"
 
															 | 
															
															 | 
															
																 				aiController8CH="AI_APCController8CH"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController8CL="AI_APCController8CL"
 
															 | 
															
															 | 
															
																 				aiController8CL="AI_APCController8CL"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController8Offset="AI_APCController8Offset"
 
															 | 
															
															 | 
															
																 				aiController8Offset="AI_APCController8Offset"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																-				aiController9="AI_APCController9"
 
															 | 
															
															 | 
															
																 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController9P="AI_APCController9P"
 
															 | 
															
															 | 
															
																 				aiController9P="AI_APCController9P"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController9I="AI_APCController9I"
 
															 | 
															
															 | 
															
																 				aiController9I="AI_APCController9I"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController9D="AI_APCController9D"
 
															 | 
															
															 | 
															
																 				aiController9D="AI_APCController9D"
 
															 | 
														
													
												
											
												
													
														
															 | 
															
																@@ -736,7 +717,6 @@ 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController9CH="AI_APCController9CH"
 
															 | 
															
															 | 
															
																 				aiController9CH="AI_APCController9CH"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController9CL="AI_APCController9CL"
 
															 | 
															
															 | 
															
																 				aiController9CL="AI_APCController9CL"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController9Offset="AI_APCController9Offset"
 
															 | 
															
															 | 
															
																 				aiController9Offset="AI_APCController9Offset"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																-				aiController10="AI_APCController10"
 
															 | 
															
															 | 
															
																 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController10P="AI_APCController10P"
 
															 | 
															
															 | 
															
																 				aiController10P="AI_APCController10P"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController10I="AI_APCController10I"
 
															 | 
															
															 | 
															
																 				aiController10I="AI_APCController10I"
 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 				aiController10D="AI_APCController10D"
 
															 | 
															
															 | 
															
																 				aiController10D="AI_APCController10D"
 
															 | 
														
													
												
											
												
													
														
															 | 
															
																@@ -1048,24 +1028,7 @@ 
															 | 
														
													
												
													
														
															| 
															 | 
															
																 		<IoAlarmSignal id="AlarmSignalPOD1FOUPVacuumSuckingAlarm"		diSignalsplay="POD1 FOUP vacuum sucking alarm"			diSignal="DI_POD1FOUPVacuumSuckingAlarm"		alarmTrigValue="true"/>
 
															 | 
															
															 | 
															
																 		<IoAlarmSignal id="AlarmSignalPOD1FOUPVacuumSuckingAlarm"		diSignalsplay="POD1 FOUP vacuum sucking alarm"			diSignal="DI_POD1FOUPVacuumSuckingAlarm"		alarmTrigValue="true"/>
 
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																 		<IoAlarmSignal id="AlarmSignalPOD2FOUPVacuumSuckingAlarm"		diSignalsplay="POD2 FOUP vacuum sucking alarm"			diSignal="DI_POD2FOUPVacuumSuckingAlarm"		alarmTrigValue="true"/>
 
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																 		<IoAlarmSignal id="AlarmSignalPOD2FOUPVacuumSuckingAlarm"		diSignalsplay="POD2 FOUP vacuum sucking alarm"			diSignal="DI_POD2FOUPVacuumSuckingAlarm"		alarmTrigValue="true"/>
 
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																-		<IoAlarmSignal id="AlarmSiSourceTANKHeater1INHIBITHIAlarm"		diSignalsplay="Si-Source TANK heater1 INHIBIT HI ALARM"			diSignal="DI_SiSourceTANKHeater1INHIBITHIALARM"		alarmTrigValue="true"/>
 
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																-		<IoAlarmSignal id="AlarmSiSourceTANKHeater1INHIBITLOWAlarm"		diSignalsplay="Si-Source TANK heater1 INHIBIT LOW ALARM"			diSignal="DI_SiSourceTANKHeater1INHIBITLOWALARM"		alarmTrigValue="true"/>
 
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																-		<IoAlarmSignal id="AlarmSiSourceTANKHeater2INHIBITHIAlarm"		diSignalsplay="Si-Source TANK heater2 INHIBIT HI ALARM"			diSignal="DI_SiSourceTANKHeater2INHIBITHIALARM"		alarmTrigValue="true"/>
 
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																-		<IoAlarmSignal id="AlarmSiSourceTANKHeater2INHIBITLOWAlarm"		diSignalsplay="Si-Source TANK heater2 INHIBIT LOW ALARM"			diSignal="DI_SiSourceTANKHeater2INHIBITLOWALARM"		alarmTrigValue="true"/>
 
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																-		<IoAlarmSignal id="AlarmSiSourceTANKHeater3INHIBITHIAlarm"		diSignalsplay="Si-Source TANK heater3 INHIBIT HI ALARM"			diSignal="DI_SiSourceTANKHeater3INHIBITHIALARM"		alarmTrigValue="true"/>
 
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																-		<IoAlarmSignal id="AlarmSiSourceTANKHeater3INHIBITLOWAlarm"		diSignalsplay="Si-Source TANK heater3 INHIBIT LOW ALARM"			diSignal="DI_SiSourceTANKHeater3INHIBITLOWALARM"		alarmTrigValue="true"/>
 
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																-		<IoAlarmSignal id="AlarmSiSourceAVMFCHeaterINHIBITHIAlarm"		diSignalsplay="Si-Source AV&MFC heater INHIBIT HI ALARM"			diSignal="DI_SiSourceAVMFCHeaterINHIBITHIALARM"		alarmTrigValue="true"/>
 
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																-		<IoAlarmSignal id="AlarmSiSourceAVMFCHeaterINHIBITLOWAlarm"		diSignalsplay="Si-Source AV&MFC heater INHIBIT LOW ALARM"			diSignal="DI_SiSourceAVMFCHeaterINHIBITLOWALARM"		alarmTrigValue="true"/>
 
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																-		<IoAlarmSignal id="AlarmCSourceTANKHeater1INHIBITHIAlarm"		diSignalsplay="C-Source TANK heater1 INHIBIT HI ALARM"			diSignal="DI_CSourceTANKHeater1INHIBITHIALARM"		alarmTrigValue="true"/>
 
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																-		<IoAlarmSignal id="AlarmCSourceTANKHeater1INHIBITLOWAlarm"		diSignalsplay="C-Source TANK heater1 INHIBIT LOW ALARM"			diSignal="DI_CSourceTANKHeater1INHIBITLOWALARM"		alarmTrigValue="true"/>
 
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																-		<IoAlarmSignal id="AlarmCSourceTANKHeater2INHIBITHIAlarm"		diSignalsplay="C-Source TANK heater2 INHIBIT HI ALARM"			diSignal="DI_CSourceTANKHeater2INHIBITHIALARM"		alarmTrigValue="true"/>
 
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																-		<IoAlarmSignal id="AlarmCSourceTANKHeater2INHIBITLOWAlarm"		diSignalsplay="C-Source TANK heater2 INHIBIT LOW ALARM"			diSignal="DI_CSourceTANKHeater2INHIBITLOWALARM"		alarmTrigValue="true"/>
 
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																-		<IoAlarmSignal id="AlarmCSourceTANKHeater3INHIBITHIAlarm"		diSignalsplay="C-Source TANK heater3 INHIBIT HI ALARM"			diSignal="DI_CSourceTANKHeater3INHIBITHIALARM"		alarmTrigValue="true"/>
 
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																-		<IoAlarmSignal id="AlarmCSourceTANKHeater3INHIBITLOWAlarm"		diSignalsplay="C-Source TANK heater3 INHIBIT LOW ALARM"			diSignal="DI_CSourceTANKHeater3INHIBITLOWALARM"		alarmTrigValue="true"/>
 
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																-		<IoAlarmSignal id="AlarmCSourceAVMFCHeaterINHIBITHIAlarm"		diSignalsplay="C-Source AV&MFC heater INHIBIT HI ALARM"			diSignal="DI_CSourceAVMFCHeaterINHIBITHIALARM"		alarmTrigValue="true"/>
 
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																-		<IoAlarmSignal id="AlarmCSourceAVMFCHeaterINHIBITLOWAlarm"		diSignalsplay="C-Source AV&MFC heater INHIBIT LOW ALARM"			diSignal="DI_CSourceAVMFCHeaterINHIBITLOWALARM"		alarmTrigValue="true"/>
 
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																 	</IoAlarmSignals>
 
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																 	</IoAlarmSignals>
 
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																 	<IoSensors>
 
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																 	<IoSensors>
 
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																 		<IoSensor id="SensorEMOReset" display="" di="DI_EMOReset"/>
 
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																 		<IoSensor id="SensorEMOReset" display="" di="DI_EMOReset"/>
 
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																@@ -1280,11 +1243,7 @@ 
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																 		<IoTrigger id="TrigN2PurgeFOUPO2CheckSV" display="" schematicId="" unit="" aoTrigger="AO_FOUPO2CheckSV"/>
 
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																 		<IoTrigger id="TrigN2PurgeFOUPO2CheckSV" display="" schematicId="" unit="" aoTrigger="AO_FOUPO2CheckSV"/>
 
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																 	</IoTriggers>
 
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																 	</IoTriggers>
 
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																-	<IoTriggers classType="FurnaceRT.Devices.IoTrigger3" assembly="FurnaceRT">
 
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																-		<IoTrigger3 id="GASTempOutRangeAlarm" display="GASTempOutRangeAlarm" diFeedback1="DI_TempOutRangeAlarm" diFeedback2="DI_TempOutRangeAlarm" diFeedback3="DI_TempOutRangeAlarm"  diFeedback4="DI_TempOutRangeAlarm" schematicId="" unit="" doTrigger="DO_GASTempOutRangeAlarm"/>
 
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																-		<IoTrigger3 id="EXHAUSTTempOutRangeAlarm" display="EXHAUSTTempOutRangeAlarm" diFeedback6="DI_TempOutRangeAlarm" diFeedback7="DI_TempOutRangeAlarm" schematicId="" unit="" doTrigger="DO_EXHAUSTTempOutRangeAlarm"/>
 
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																-		<IoTrigger3 id="MCLNAlarm" display="MCLNAlarm" diFeedback1="DI_CLNAlarm" diFeedback2="DI_CLNAlarm" diFeedback3="DI_CLNAlarm"  diFeedback4="DI_CLNAlarm" diFeedback6="DI_CLNAlarm"  diFeedback7="DI_CLNAlarm"  schematicId="" unit="" doTrigger="DO_MCLNAlarm"/>
 
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																-	</IoTriggers>
 
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																 	<!--<IoTriggers classType="FurnaceRT.Devices.IoTrigger4" assembly="FurnaceRT">
 
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																 	<!--<IoTriggers classType="FurnaceRT.Devices.IoTrigger4" assembly="FurnaceRT">
 
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															 | 
															
																 		<IoTrigger4 id="TrigCapHeaterTemp" display="" aiFeedback="AI_CH15PV"  schematicId="" unit="" aoTrigger="AO_CapHeaterTemp"/>
 
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															 | 
															
																 		<IoTrigger4 id="TrigCapHeaterTemp" display="" aiFeedback="AI_CH15PV"  schematicId="" unit="" aoTrigger="AO_CapHeaterTemp"/>
 
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