update n2purge 事件

update io描述

Furnace/FurnaceRT/Config/FurnaceGemModel.xml

@@ -2299,6 +2299,7 @@
     <SVID id="339820001" valueType="F8" logicalName="PM1.TrigN2PurgeFOUPO2CheckTime.AOValue" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="339830001" valueType="F8" logicalName="PM1.TrigN2PurgeFOUPO2OverTime.AOValue" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="339840001" valueType="F8" logicalName="PM1.TrigN2PurgeLAO2OverTime.AOValue" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339850001" valueType="F8" logicalName="PM1.VG33.Value" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="630010001" valueType="Boolean" logicalName="Stocker1.CassetteHasWafer" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="630010002" valueType="Boolean" logicalName="Stocker1.FoupPresent" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="630010003" valueType="Boolean" logicalName="Stocker1.IsError" value="" eventTrigger="" units="" description="" isArray="false" />
@@ -11919,6 +11920,8 @@
     <ALID id="330011010" logicalName="PM1.AlarmSignalWTRenable1" description="WTR enable1" category="EquipmentStatusWarning" enabled="false" eventSet="1330011010" eventClear="2330011010" />
     <ALID id="330011011" logicalName="PM1.AlarmSignalWTRenable2" description="WTR enable2" category="EquipmentStatusWarning" enabled="false" eventSet="1330011011" eventClear="2330011011" />
     <ALID id="330011012" logicalName="PM1.AlarmSignalWTRinterlockreset" description="WTR interlock reset" category="EquipmentStatusWarning" enabled="false" eventSet="1330011012" eventClear="2330011012" />
+    <ALID id="330011013" logicalName="PM1.VG33ToleranceAlarm" description="VG33 tolerance alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330011013" eventClear="2330011013" />
+    <ALID id="330011014" logicalName="PM1.VG33ToleranceWarning" description="VG33 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330011014" eventClear="2330011014" />
     <ALID id="330020001" logicalName="PM1.AlarmHighLimit.AI_APCExternalHeaterTempPV" description="APC external heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020001" eventClear="2330020001" />
     <ALID id="330020002" logicalName="PM1.AlarmHighLimit.AI_APCRingHeaterTempPV" description="APC ring heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020002" eventClear="2330020002" />
     <ALID id="330020003" logicalName="PM1.AlarmHighLimit.AI_CapHeaterTempPV" description="Cap heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020003" eventClear="2330020003" />

Furnace/FurnaceRT/Config/IO/ELK/DeviceModelPM.xml

@@ -413,7 +413,7 @@
 					diBlade5WaferPresent="DI_WaferRobotWafer5Checked"
 					
 					diZAxisHomePosition="DI_WaferRobotZAxisHomePosition"
-					diYAxisHomePosition="DI_WaferRobotTHAxisHomePosition"
+					diYAxisHomePosition="DI_WaferRobotYAxisHomePosition"
 					diVAxisHomePosition="DI_WaferRobotPAxisHomePosition"
 					diRunning="DI_WaferRobotRunning"
 					         
@@ -736,16 +736,15 @@
 		<IoPressureMeter id="PressureGLBoxPG4" display="GLBoxPG4Pressure"  schematicId="GLBoxPG4Pressure" unit="Mpa" aiFeedback="AI_GLBoxPG4Pressure"  physical="0,15000" scale="-0.1,1" aioType="float"/>
 		<IoPressureMeter id="PressureGLBoxPG5" display="GLBoxPG5Pressure"  schematicId="GLBoxPG5Pressure" unit="Mpa" aiFeedback="AI_GLBoxPG5Pressure"  physical="0,15000" scale="-0.1,1" aioType="float"/>
 		<IoPressureMeter id="PressureGLBoxPG6" display="GLBoxPG6Pressure"  schematicId="GLBoxPG6Pressure" unit="Mpa" aiFeedback="AI_GLBoxPG6Pressure"  physical="0,15000" scale="-0.1,1" aioType="float"/>
-			<IoPressureMeter id="ConcentrationO2" display="O2Concentration"  schematicId="O2Concentration" unit="ppm" aiFeedback="AI_O2Concentration"  scale="0,10" physical="0,15000" aioType="float"/>
+		<IoPressureMeter id="ConcentrationO2" display="O2Concentration"  schematicId="O2Concentration" unit="ppm" aiFeedback="AI_O2Concentration"  scale="0,10" physical="0,15000" aioType="float"/>
 
 		<IoPressureMeter id="HeatingExhaustMS1" display="HeatingExhaustMS1"  schematicId="HeatingExhaustMS1" unit="pa" aiFeedback="AI_HeatingExhaustMS1"  physical="0,15000" scale="0,200" aioType="float"/>
 		<IoPressureMeter id="GasBoxExhaustMS2" display="GasBoxExhaustMS2"  schematicId="GasBoxExhaustMS2" unit="pa" aiFeedback="AI_GasBoxExhaustMS2"  physical="0,15000" scale="0,200" aioType="float"/>
 		<IoPressureMeter id="ScavengerExhaustMS3" display="ScavengerExhaustMS3"  schematicId="ScavengerExhaustMS3" unit="pa" aiFeedback="AI_ScavengerExhaustMS3"  physical="0,15000" scale="0,200" aioType="float"/>
 		<IoPressureMeter id="ExhaustBoxExhaustMS4" display="ExhaustBoxExhaustMS4"  schematicId="ExhaustBoxExhaustMS4" unit="pa" aiFeedback="AI_ExhaustBoxExhaustMS4"  physical="0,15000" scale="0,200" aioType="float"/>
 		<IoPressureMeter id="LoadingAreaExhaustMS5" display="LoadingAreaExhaustMS5"  schematicId="LoadingAreaExhaustMS5" unit="pa" aiFeedback="AI_LoadingAreaExhaustMS5"  physical="0,15000" scale="0,200" aioType="float"/>
-		<IoPressureMeter id="FrontBodyExhaustMS6" display="FrontBodyExhaustMS6"  schematicId="FrontBodyExhaustMS6" unit="pa" aiFeedback="AI_FrontBodyExhaustMS6"  physical="0,15000" scale="0,200" aioType="float"/>
-		<IoPressureMeter id="LAExhaustMS7" display="LAExhaustMS7"  schematicId="LAExhaustMS7" unit="pa" aiFeedback="AI_LAExhaustMS7"  physical="0,15000" scale="0,500" aioType="float"/>
-		<IoPressureMeter id="RHCExhaustMS8" display="RHCExhaustMS8"  schematicId="RHCExhaustMS8" unit="kPa" aiFeedback="AI_RHCExhaustMS8"  physical="0,15000" scale="0,2" aioType="float"/>
+		<IoPressureMeter id="LAExhaustMS7" display="LAExhaustMS7"  schematicId="LAExhaustMS7" unit="pa" aiFeedback="AI_CommonExhaustMS7"  physical="0,15000" scale="0,500" aioType="float"/>
+		<IoPressureMeter id="RHCExhaustMS8" display="RHCExhaustMS8"  schematicId="RHCExhaustMS8" unit="kPa" aiFeedback="AI_LSCUpExhaustMS8"  physical="0,15000" scale="0,2" aioType="float"/>
 		<IoPressureMeter id="PS11" display="PS11"  schematicId="PS11" unit="MPa" aiFeedback="AI_PS11Value"  physical="1500,7500" scale="0,1" aioType="float"/>
 
 		<IoPressureMeter id="RHCFlowFL901" display="RHCFlowFL901"  schematicId="RHCFlowFL901" unit="L" aiFeedback="AI_RHCFlowFL901"  physical="0,30000" scale="0,40" aioType="float"/>
@@ -755,19 +754,19 @@
 		<IoPressureMeter id="CoolingWaterFlowOfFlangeFL905" display="CoolingWaterFlowOfFlangeFL905"  schematicId="CoolingWaterFlowOfFlangeFL905" unit="L" aiFeedback="AI_CoolingWaterFlowOfFlangeFL905"  physical="0,30000" scale="0,4" aioType="float"/>
 		<IoPressureMeter id="CoolingWaterFlowOfLoadingAreaFL906" display="CoolingWaterFlowOfLoadingAreaFL906"  schematicId="CoolingWaterFlowOfLoadingAreaFL906" unit="L" aiFeedback="AI_CoolingWaterFlowOfLoadingAreaFL906"  physical="0,30000" scale="0,16" aioType="float"/>
 
-		<IoPressureMeter id="PG12" display="PG12"  schematicId="PG12" unit="psig" aiFeedback="AI_PG12AnalogValue"  physical="0,15000" scale="0,100" aioType="float"/>
-		<IoPressureMeter id="PG13" display="PG13"  schematicId="PG13" unit="psig" aiFeedback="AI_PG13AnalogValue"  physical="0,15000" scale="0,100" aioType="float"/>
+		<IoPressureMeter id="PG12" display="PG12"  schematicId="PG12" unit="psig" aiFeedback="AI_PG12Pressure"  physical="0,15000" scale="0,100" aioType="float"/>
+		<IoPressureMeter id="PG13" display="PG13"  schematicId="PG13" unit="psig" aiFeedback="AI_PG13Pressure"  physical="0,15000" scale="0,100" aioType="float"/>
 		<IoPressureMeter id="PS13" display="PS13"  schematicId="PS13" unit="kPa" aiFeedback="AI_PS13AnalogValue"  physical="0,30000" scale="0,98.1" aioType="float"/>
 		<IoPressureMeter id="PS17" display="PS17"  schematicId="PS17" unit="MPa" aiFeedback="AI_PS17Value"  physical="900,7500" scale="-0.1,1" aioType="float"/>
-		<IoPressureMeter id="VG12AnalogValue" display="VG12AnalogValue"  schematicId="VG12AnalogValue" unit="Pa" aiFeedback="AI_VG12AnalogValue"  physical="0,15000" scale="0,1330" aioType="float"/>
-		<IoPressureMeter id="DG1AnalogValue" display="DG1AnalogValue"  schematicId="DG1AnalogValue" unit="Pa" aiFeedback="AI_DG1AnalogValue"  physical="0,15000" scale="-500,500" aioType="float"/>
-		<IoPressureMeter id="PS14AnalogValue" display="PS14AnalogValue"  schematicId="PS14AnalogValue" unit="kPa" aiFeedback="AI_PS14AnalogValue"  physical="1500,7500" scale="-99.9,99.9" aioType="float"/>
+		<IoPressureMeter id="DG1AnalogValue" display="DG1AnalogValue"  schematicId="DG1AnalogValue" unit="Pa" aiFeedback="AI_DG1Pressure"  physical="0,15000" scale="-500,500" aioType="float"/>
+		<IoPressureMeter id="PS14AnalogValue" display="PS14AnalogValue"  schematicId="PS14AnalogValue" unit="kPa" aiFeedback="AI_PS14Pressure"  physical="1500,7500" scale="-99.9,99.9" aioType="float"/>
 
 		<IoPressureMeter id="VG11" display="VG11"  schematicId="VG11" unit="Torr" aiFeedback="AI_VG11Pressure"  physical="0,15000" scale="0,1000" aioType="float" unSigned="True"/>
 		<IoPressureMeter id="VG12" display="VG12"  schematicId="VG12" unit="Torr" aiFeedback="AI_VG12Pressure"  physical="0,15000" scale="0,1000" aioType="float"/>
 		<IoPressureMeter id="VG13" display="VG13"  schematicId="VG13" unit="Torr" aiFeedback="AI_VG13Pressure"  physical="0,15000" scale="0,1000" aioType="float" unSigned="True"/>
 		<IoPressureMeter id="VG21" display="VG21"  schematicId="VG21" unit="Torr" aiFeedback="AI_VG21Pressure"  physical="0,15000" scale="0,1000" aioType="float"/>
 		<IoPressureMeter id="VG22" display="VG22"  schematicId="VG22" unit="Torr" aiFeedback="AI_VG22Pressure"  physical="0,15000" scale="0,1000" aioType="float"/>
+		<IoPressureMeter id="VG33" display="VG33"  schematicId="VG33" unit="Torr" aiFeedback="AI_VG33Pressure"  physical="0,15000" scale="0,1000" aioType="float"/>
 
 		<IoPressureMeter id="N24PurgePressure" display="N24PurgePressure"  schematicId="N24PurgePressure" unit="psig" aiFeedback="AI_N24PurgePressure"  physical="0,15000" scale="0,150" aioType="float"/>
 		<IoPressureMeter id="N25PurgePressure" display="N25PurgePressure"  schematicId="N25PurgePressure" unit="psig" aiFeedback="AI_N25PurgePressure"  physical="0,15000" scale="0,150" aioType="float"/>
@@ -891,7 +890,7 @@
 
 
 
-		<IoAlarmSignal id="AlarmSignalFBFrontDoorSwitch"		diSignalsplay="FBFrontDoorSwitch"			diSignal="DI_FBFrontDoorSwitch"		alarmTrigValue="true"/>
+		<IoAlarmSignal id="AlarmSignalFBFrontDoorSwitch"		diSignalsplay="FBFrontDoorSwitch"			diSignal="DI_Frontbodydoorswitch"		alarmTrigValue="true"/>
 		<IoAlarmSignal id="AlarmSignalGLBoxPG1CNT1Alarm"		diSignalsplay="GLBoxPG1CNT1Alarm"			diSignal="DI_GLBoxPG1CNT1Alarm"		alarmTrigValue="true"/>
 		<IoAlarmSignal id="AlarmSignalGLBoxPG1CNT2Alarm"		diSignalsplay="GLBoxPG1CNT2Alarm"			diSignal="DI_GLBoxPG1CNT2Alarm"		alarmTrigValue="true"/>
 		<IoAlarmSignal id="AlarmSignalGLBoxPG2CNT1Alarm"		diSignalsplay="GLBoxPG2CNT1Alarm"			diSignal="DI_GLBoxPG2CNT1Alarm"		alarmTrigValue="true"/>
@@ -948,14 +947,11 @@
 
 		<IoAlarmSignal id="AlarmSignalCoolingWaterPressureOut1"		diSignalsplay="CoolingWaterPressureOut1"			diSignal="DI_CoolingWaterPressureOut1"		alarmTrigValue="true"/>
 		<IoAlarmSignal id="AlarmSignalCoolingWaterPressureOut2"		diSignalsplay="CoolingWaterPressureOut2"			diSignal="DI_CoolingWaterPressureOut2"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalAirFlowFL70"		diSignalsplay="AirFlowFL70"			diSignal="DI_AirFlowFL70"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalAirFlowFL71"		diSignalsplay="AirFlowFL71"			diSignal="DI_AirFlowFL71"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalAirFlowFL72"		diSignalsplay="AirFlowFL72"			diSignal="DI_AirFlowFL72"		alarmTrigValue="true"/>
+
 		<IoAlarmSignal id="AlarmSignalWaterFlowFL61"		diSignalsplay="WaterFlowFL61"			diSignal="DI_WaterFlowFL61"		alarmTrigValue="true"/>
 		<IoAlarmSignal id="AlarmSignalWaterFlowFL62"		diSignalsplay="WaterFlowFL62"			diSignal="DI_WaterFlowFL62"		alarmTrigValue="true"/>
 		<IoAlarmSignal id="AlarmSignalUPSFault"		diSignalsplay="UPSFault"			diSignal="DI_UPSFault"		alarmTrigValue="true"/>
 		<IoAlarmSignal id="AlarmSignalK141UPSAlarm"		diSignalsplay="UPSAlarm"			diSignal="DI_K141UPSAlarm"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalK169UPSAlarm"		diSignalsplay="UPSAlarm"			diSignal="DI_K169UPSAlarm"		alarmTrigValue="true"/>
 		<IoAlarmSignal id="AlarmSignalN2PurgeBOXPG14CNT1"		diSignalsplay="N2PurgeBOXPG14CNT1"			diSignal="DI_N2PurgeBOXPG14CNT1"		alarmTrigValue="true"/>
 		<IoAlarmSignal id="AlarmSignalN2PurgeBOXPG14CNT2"		diSignalsplay="N2PurgeBOXPG14CNT2"			diSignal="DI_N2PurgeBOXPG14CNT2"		alarmTrigValue="true"/>
 		<IoAlarmSignal id="AlarmSignalN2PurgeBOXPG15CNT1"		diSignalsplay="N2PurgeBOXPG15CNT1"			diSignal="DI_N2PurgeBOXPG15CNT1"		alarmTrigValue="true"/>
@@ -969,7 +965,6 @@
 
 
 	
-		<IoAlarmSignal id="AlarmSignalRFAlarm"		diSignalsplay="RFAlarm"			diSignal="DI_RFAlarm"		alarmTrigValue="true"/>
 		<IoAlarmSignal id="AlarmSignalForelineHeaterJacketLightAlarm"		diSignalsplay="ForelineHeaterJacketLightAlarm"			diSignal="DI_ForelineHeaterJacketLightAlarm"		alarmTrigValue="true"/>
 		<IoAlarmSignal id="AlarmSignalForelineHeaterJacketHeavyAlarm"		diSignalsplay="ForelineHeaterJacketHeavyAlarm"			diSignal="DI_ForelineHeaterJacketHeavyAlarm"		alarmTrigValue="true"/>
 		<IoAlarmSignal id="AlarmSignalScrubberWarning"		diSignalsplay="ScrubberWarning"			diSignal="DI_ScrubberWarning"		alarmTrigValue="true"/>
@@ -1016,7 +1011,7 @@
 		<IoAlarmSignal id="AlarmSignalVaccum1PumpAlarm"		diSignalsplay="Vaccum1 Pump Alarm"			diSignal="DI_Vaccum1PumpAlarm"		alarmTrigValue="true"/>
 		<IoAlarmSignal id="AlarmSignalVaccum2PumpWarning"		diSignalsplay="Vaccum2 Pump Warning"			diSignal="DI_Vaccum2PumpWarning"		alarmTrigValue="true"/>
 		<IoAlarmSignal id="AlarmSignalVaccum2PumpAlarm"		diSignalsplay="Vaccum2 Pump Alarm"			diSignal="DI_Vaccum2PumpAlarm"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalHotN2Alarm"		diSignalsplay="HOT N2 ALARM"			diSignal="DI_HotN2Alarm"		alarmTrigValue="true"/>
+	
 		<IoAlarmSignal id="AlarmSignalLDS1MajorAlarm"		diSignalsplay="LDS1 major alarm"			diSignal="DI_LDS1MajorAlarm"		alarmTrigValue="true"/>
 		<IoAlarmSignal id="AlarmSignalLDS1MinorWarning"		diSignalsplay="LDS1 minor warning"			diSignal="DI_LDS1MinorWarning"		alarmTrigValue="true"/>
 		<IoAlarmSignal id="AlarmSignalLDS1liquidLowWarning"		diSignalsplay="LDS1 liquid low warning"			diSignal="DI_LDS1liquidLowWarning"		alarmTrigValue="true"/>
@@ -1311,7 +1306,7 @@
 					aoSetSpeed="AO_FFU1SetSpeed"
 					aoReset="AO_FFU1Reset"
 				
-					doEnable="DO_FFU1Enable"
+					doEnable=""
 					doWriteCommand="DO_FFU1WriteCommand"
 			   
 					aioType="float"
@@ -1336,7 +1331,7 @@
 					aoSetSpeed="AO_FFU2SetSpeed"
 					aoReset="AO_FFU2Reset"
 				
-					doEnable="DO_FFU2Enable"
+					doEnable=""
 					doWriteCommand="DO_FFU2WriteCommand"
 			   
 					aioType="float"
@@ -1361,7 +1356,7 @@
 					aoSetSpeed="AO_FFU3SetSpeed"
 					aoReset="AO_FFU3Reset"
 				
-					doEnable="DO_FFU3Enable"
+					doEnable=""
 					doWriteCommand="DO_FFU3WriteCommand"
 			   
 					aioType="float"
@@ -1386,7 +1381,7 @@
 					aoSetSpeed="AO_FFU4SetSpeed"
 					aoReset="AO_FFU4Reset"
 				
-					doEnable="DO_FFU4Enable"
+					doEnable=""
 					doWriteCommand="DO_FFU4WriteCommand"
 			   
 					aioType="float"
@@ -1411,7 +1406,7 @@
 					aoSetSpeed="AO_FFU5SetSpeed"
 					aoReset="AO_FFU5Reset"
 				
-					doEnable="DO_FFU5Enable"
+					doEnable=""
 					doWriteCommand="DO_FFU5WriteCommand"
 			   
 					aioType="float"
@@ -1436,7 +1431,7 @@
 					aoSetSpeed="AO_FFU6SetSpeed"
 					aoReset="AO_FFU6Reset"
 				
-					doEnable="DO_FFU6Enable"
+					doEnable=""
 					doWriteCommand="DO_FFU6WriteCommand"
 			   
 					aioType="float"
@@ -1461,7 +1456,7 @@
 					aoSetSpeed="AO_FFU7SetSpeed"
 					aoReset="AO_FFU7Reset"
 				
-					doEnable="DO_FFU7Enable"
+					doEnable=""
 					doWriteCommand="DO_FFU7WriteCommand"
 			   
 					aioType="float"
@@ -1486,7 +1481,7 @@
 					aoSetSpeed="AO_FFU8SetSpeed"
 					aoReset="AO_FFU8Reset"
 				
-					doEnable="DO_FFU8Enable"
+					doEnable=""
 					doWriteCommand="DO_FFU8WriteCommand"
 			   
 					aioType="float"
@@ -1511,7 +1506,7 @@
 					aoSetSpeed="AO_FFU9SetSpeed"
 					aoReset="AO_FFU9Reset"
 				
-					doEnable="DO_FFU9Enable"
+					doEnable=""
 					doWriteCommand="DO_FFU9WriteCommand"
 			   
 					aioType="float"

Furnace/FurnaceRT/Config/IO/ELK/_ioDefinePM.xml

@@ -384,7 +384,7 @@
 		<DI_ITEM Index="1851"   Name="DI_WaferRobotYAxisHomePosition"                                      BufferOffset="1851"                                      Addr="D115.11"                      Description="Wafer Robot Axis-TH Home Position  (Axis-Y)"                       />
 		<DI_ITEM Index="1852"   Name="DI_WaferRobotEX1AxisHomePosition"                                      BufferOffset="1852"                                      Addr="D115.12"                      Description="Wafer Robot Axis-EX1 Home Position  (Axis-X1)"                       />
 		<DI_ITEM Index="1853"   Name="DI_WaferRobotEX2AxisHomePosition"                                      BufferOffset="1853"                                      Addr="D115.13"                      Description="Wafer Robot Axis-EX2 Home Position (Axis-X4)"                       />
-		<DI_ITEM Index="1854"   Name="DI_WaferRobotVAxisHomePosition"                                      BufferOffset="1854"                                      Addr="D115.14"                      Description="Wafer Robot Axis-P Home Hosition (Axis-V)"                       />
+		<DI_ITEM Index="1854"   Name="DI_WaferRobotPAxisHomePosition"                                      BufferOffset="1854"                                      Addr="D115.14"                      Description="Wafer Robot Axis-P Home Hosition (Axis-V)"                       />
 		<DI_ITEM Index="1855"   Name="DI_WaferRobotRunning"                                      BufferOffset="1855"                                      Addr="D115.15"                      Description="Wafer Robot Running"                       />
 
 		<DI_ITEM Index="1856"   Name="DI_LP1FOUPLeftClamp"                                      BufferOffset="1856"                                      Addr="D116.0"                      Description="AGV loadport1 FOUP left clamp"                       />
@@ -1142,7 +1142,7 @@
 		<DO_ITEM Index="1501"   Name="DO_LP2FOUPClamp"                                      BufferOffset="1501"                                      Addr="D1093.13"                      Description="loadport 2 FOUP clamp"                       />
 		<DO_ITEM Index="1504"   Name="DO_loadport1E84REQ"                                      BufferOffset="1504"                                      Addr="D1094.00"                      Description="loadport 1 E84 REQ"                       />
 		<DO_ITEM Index="1505"   Name="DO_loadport1E84UREQ"                                      BufferOffset="1505"                                      Addr="D1094.01"                      Description="loadport 1 E84 UREQ"                       />
-		<DO_ITEM Index="1506"   Name="DO_loadport1E84Ready"                                      BufferOffset="1506"                                      Addr="D1094.03"                      Description="loadport 1 E84 ready"                       />
+		<DO_ITEM Index="1506"   Name="DO_loadport1E84Ready"                                      BufferOffset="1507"                                      Addr="D1094.03"                      Description="loadport 1 E84 ready"                       />
 		<DO_ITEM Index="1510"   Name="DO_loadport1E84HOAVBL"                                      BufferOffset="1510"                                      Addr="D1094.06"                      Description="loadport 1 E84 HO_AVBL"                       />
 		<DO_ITEM Index="1511"   Name="DO_loadport1E84ES"                                      BufferOffset="1511"                                      Addr="D1094.07"                      Description="loadport 1 E84 ES"                       />
 		<DO_ITEM Index="1512"   Name="DO_loadport2E84REQ"                                      BufferOffset="1512"                                      Addr="D1094.08"                      Description="loadport 2 E84 REQ"                       />
@@ -1428,11 +1428,13 @@
 		<AI_ITEM Index="104"    Name="AI_VG21Pressure"                                      BufferOffset="104"                                      Addr="D5208"                      Description="VG21 pressure"                       />
 		<AI_ITEM Index="105"    Name="AI_DG1Pressure"                                      BufferOffset="105"                                      Addr="D5210"                      Description="DG1 pressure"                       />
 		<AI_ITEM Index="106"    Name="AI_PG12Pressure"                                      BufferOffset="106"                                      Addr="D5212"                      Description="PG12 pressure"                       />
+		<AI_ITEM Index="108"    Name="AI_PG13Pressure"                                      BufferOffset="108"                                      Addr="D5216"                      Description="PG14 pressure"                       />
 		<AI_ITEM Index="109"    Name="AI_PS14Pressure"                                      BufferOffset="109"                                      Addr="D5218"                      Description="PS14 pressure"                       />
 		<AI_ITEM Index="192"    Name="AI_N24PurgePressure"                                      BufferOffset="192"                                      Addr="D5384"                      Description="N2-4 purge pressure(PG14)"                       />
 		<AI_ITEM Index="193"    Name="AI_N25PurgePressure"                                      BufferOffset="193"                                      Addr="D5386"                      Description="N2-5 purge pressure(PG15)"                       />
 		<AI_ITEM Index="194"    Name="AI_N26PurgePressure"                                      BufferOffset="194"                                      Addr="D5388"                      Description="N2-6 purge pressure(PG16)"                       />
 		<AI_ITEM Index="195"    Name="AI_N27PurgePressure"                                      BufferOffset="195"                                      Addr="D5390"                      Description="N2-7 purge pressure(PG70)"                       />
+		<AI_ITEM Index="196"    Name="AI_PS17Value"                                      BufferOffset="196"                                      Addr="D5392"                      Description="N2-7 purge pressure(PG17)"                       />
 		<AI_ITEM Index="197"    Name="AI_N28PurgePressure"                                      BufferOffset="197"                                      Addr="D5394"                      Description="N2-8 purge pressuree(PG13)"                       />
 		<AI_ITEM Index="320"    Name="AI_BufferTargetPosFb"                                      BufferOffset="320"                                      Addr="D5640"                      Description="Buffer Target Pos Feedback"                       />
 		<AI_ITEM Index="321"    Name="AI_BufferMotionErrID"                                      BufferOffset="321"                                      Addr="D5642"                      Description="Buffer Motio Err ID"                       />
@@ -1675,7 +1677,7 @@
 		<AI_ITEM Index="2119"   Name="AI_APCController10D"                                      BufferOffset="2119"                                      Addr="D9238"                      Description="Controller 10 D"                       />
 		<AI_ITEM Index="2120"   Name="AI_APCController10A"                                      BufferOffset="2120"                                      Addr="D9240"                      Description="Controller 10 A"                       />
 		<AI_ITEM Index="2121"   Name="AI_APCController10CH"                                      BufferOffset="2121"                                      Addr="D9242"                      Description="CH(air pressure exhaust threshold value 1) for Process Controller 10"                       />
-		<AI_ITEM Index="2122"   Name="AI_APCController0CL"                                      BufferOffset="2122"                                      Addr="D9244"                      Description="CL(air pressure exhaust threshold value 2) for Process Controller 10"                       />
+		<AI_ITEM Index="2122"   Name="AI_APCController10CL"                                      BufferOffset="2122"                                      Addr="D9244"                      Description="CL(air pressure exhaust threshold value 2) for Process Controller 10"                       />
 		<AI_ITEM Index="2123"   Name="AI_APCController10Offset"                                      BufferOffset="2123"                                      Addr="D9246"                      Description="OFFSET for Pocess Controller 10"                       />
 		<AI_ITEM Index="2125"   Name="AI_MFC816AI"                                      BufferOffset="2125"                                      Addr="D9250"                      Description="MFC816AI(4A)"                       />
 		<AI_ITEM Index="2126"   Name="AI_MFC817AI"                                      BufferOffset="2126"                                      Addr="D9252"                      Description="MFC817AI(4B)"                       />

Furnace/FurnaceSimulator/Config/ELK/_ioDefinePM.xml

@@ -384,7 +384,7 @@
 		<DI_ITEM Index="1851"   Name="DI_WaferRobotYAxisHomePosition"                                      BufferOffset="1851"                                      Addr="D115.11"                      Description="Wafer Robot Axis-TH Home Position  (Axis-Y)"                       />
 		<DI_ITEM Index="1852"   Name="DI_WaferRobotEX1AxisHomePosition"                                      BufferOffset="1852"                                      Addr="D115.12"                      Description="Wafer Robot Axis-EX1 Home Position  (Axis-X1)"                       />
 		<DI_ITEM Index="1853"   Name="DI_WaferRobotEX2AxisHomePosition"                                      BufferOffset="1853"                                      Addr="D115.13"                      Description="Wafer Robot Axis-EX2 Home Position (Axis-X4)"                       />
-		<DI_ITEM Index="1854"   Name="DI_WaferRobotVAxisHomePosition"                                      BufferOffset="1854"                                      Addr="D115.14"                      Description="Wafer Robot Axis-P Home Hosition (Axis-V)"                       />
+		<DI_ITEM Index="1854"   Name="DI_WaferRobotPAxisHomePosition"                                      BufferOffset="1854"                                      Addr="D115.14"                      Description="Wafer Robot Axis-P Home Hosition (Axis-V)"                       />
 		<DI_ITEM Index="1855"   Name="DI_WaferRobotRunning"                                      BufferOffset="1855"                                      Addr="D115.15"                      Description="Wafer Robot Running"                       />
 
 		<DI_ITEM Index="1856"   Name="DI_LP1FOUPLeftClamp"                                      BufferOffset="1856"                                      Addr="D116.0"                      Description="AGV loadport1 FOUP left clamp"                       />
@@ -1142,7 +1142,7 @@
 		<DO_ITEM Index="1501"   Name="DO_LP2FOUPClamp"                                      BufferOffset="1501"                                      Addr="D1093.13"                      Description="loadport 2 FOUP clamp"                       />
 		<DO_ITEM Index="1504"   Name="DO_loadport1E84REQ"                                      BufferOffset="1504"                                      Addr="D1094.00"                      Description="loadport 1 E84 REQ"                       />
 		<DO_ITEM Index="1505"   Name="DO_loadport1E84UREQ"                                      BufferOffset="1505"                                      Addr="D1094.01"                      Description="loadport 1 E84 UREQ"                       />
-		<DO_ITEM Index="1506"   Name="DO_loadport1E84Ready"                                      BufferOffset="1506"                                      Addr="D1094.03"                      Description="loadport 1 E84 ready"                       />
+		<DO_ITEM Index="1506"   Name="DO_loadport1E84Ready"                                      BufferOffset="1507"                                      Addr="D1094.03"                      Description="loadport 1 E84 ready"                       />
 		<DO_ITEM Index="1510"   Name="DO_loadport1E84HOAVBL"                                      BufferOffset="1510"                                      Addr="D1094.06"                      Description="loadport 1 E84 HO_AVBL"                       />
 		<DO_ITEM Index="1511"   Name="DO_loadport1E84ES"                                      BufferOffset="1511"                                      Addr="D1094.07"                      Description="loadport 1 E84 ES"                       />
 		<DO_ITEM Index="1512"   Name="DO_loadport2E84REQ"                                      BufferOffset="1512"                                      Addr="D1094.08"                      Description="loadport 2 E84 REQ"                       />
@@ -1428,11 +1428,13 @@
 		<AI_ITEM Index="104"    Name="AI_VG21Pressure"                                      BufferOffset="104"                                      Addr="D5208"                      Description="VG21 pressure"                       />
 		<AI_ITEM Index="105"    Name="AI_DG1Pressure"                                      BufferOffset="105"                                      Addr="D5210"                      Description="DG1 pressure"                       />
 		<AI_ITEM Index="106"    Name="AI_PG12Pressure"                                      BufferOffset="106"                                      Addr="D5212"                      Description="PG12 pressure"                       />
+		<AI_ITEM Index="108"    Name="AI_PG13Pressure"                                      BufferOffset="108"                                      Addr="D5216"                      Description="PG14 pressure"                       />
 		<AI_ITEM Index="109"    Name="AI_PS14Pressure"                                      BufferOffset="109"                                      Addr="D5218"                      Description="PS14 pressure"                       />
 		<AI_ITEM Index="192"    Name="AI_N24PurgePressure"                                      BufferOffset="192"                                      Addr="D5384"                      Description="N2-4 purge pressure(PG14)"                       />
 		<AI_ITEM Index="193"    Name="AI_N25PurgePressure"                                      BufferOffset="193"                                      Addr="D5386"                      Description="N2-5 purge pressure(PG15)"                       />
 		<AI_ITEM Index="194"    Name="AI_N26PurgePressure"                                      BufferOffset="194"                                      Addr="D5388"                      Description="N2-6 purge pressure(PG16)"                       />
 		<AI_ITEM Index="195"    Name="AI_N27PurgePressure"                                      BufferOffset="195"                                      Addr="D5390"                      Description="N2-7 purge pressure(PG70)"                       />
+		<AI_ITEM Index="196"    Name="AI_PS17Value"                                      BufferOffset="196"                                      Addr="D5392"                      Description="N2-7 purge pressure(PG17)"                       />
 		<AI_ITEM Index="197"    Name="AI_N28PurgePressure"                                      BufferOffset="197"                                      Addr="D5394"                      Description="N2-8 purge pressuree(PG13)"                       />
 		<AI_ITEM Index="320"    Name="AI_BufferTargetPosFb"                                      BufferOffset="320"                                      Addr="D5640"                      Description="Buffer Target Pos Feedback"                       />
 		<AI_ITEM Index="321"    Name="AI_BufferMotionErrID"                                      BufferOffset="321"                                      Addr="D5642"                      Description="Buffer Motio Err ID"                       />
@@ -1675,7 +1677,7 @@
 		<AI_ITEM Index="2119"   Name="AI_APCController10D"                                      BufferOffset="2119"                                      Addr="D9238"                      Description="Controller 10 D"                       />
 		<AI_ITEM Index="2120"   Name="AI_APCController10A"                                      BufferOffset="2120"                                      Addr="D9240"                      Description="Controller 10 A"                       />
 		<AI_ITEM Index="2121"   Name="AI_APCController10CH"                                      BufferOffset="2121"                                      Addr="D9242"                      Description="CH(air pressure exhaust threshold value 1) for Process Controller 10"                       />
-		<AI_ITEM Index="2122"   Name="AI_APCController0CL"                                      BufferOffset="2122"                                      Addr="D9244"                      Description="CL(air pressure exhaust threshold value 2) for Process Controller 10"                       />
+		<AI_ITEM Index="2122"   Name="AI_APCController10CL"                                      BufferOffset="2122"                                      Addr="D9244"                      Description="CL(air pressure exhaust threshold value 2) for Process Controller 10"                       />
 		<AI_ITEM Index="2123"   Name="AI_APCController10Offset"                                      BufferOffset="2123"                                      Addr="D9246"                      Description="OFFSET for Pocess Controller 10"                       />
 		<AI_ITEM Index="2125"   Name="AI_MFC816AI"                                      BufferOffset="2125"                                      Addr="D9250"                      Description="MFC816AI(4A)"                       />
 		<AI_ITEM Index="2126"   Name="AI_MFC817AI"                                      BufferOffset="2126"                                      Addr="D9252"                      Description="MFC817AI(4B)"                       />

Furnace/FurnaceSimulator/Config/_ioDefinePM.xml

@@ -384,7 +384,7 @@
 		<DI_ITEM Index="1851"   Name="DI_WaferRobotYAxisHomePosition"                                      BufferOffset="1851"                                      Addr="D115.11"                      Description="Wafer Robot Axis-TH Home Position  (Axis-Y)"                       />
 		<DI_ITEM Index="1852"   Name="DI_WaferRobotEX1AxisHomePosition"                                      BufferOffset="1852"                                      Addr="D115.12"                      Description="Wafer Robot Axis-EX1 Home Position  (Axis-X1)"                       />
 		<DI_ITEM Index="1853"   Name="DI_WaferRobotEX2AxisHomePosition"                                      BufferOffset="1853"                                      Addr="D115.13"                      Description="Wafer Robot Axis-EX2 Home Position (Axis-X4)"                       />
-		<DI_ITEM Index="1854"   Name="DI_WaferRobotVAxisHomePosition"                                      BufferOffset="1854"                                      Addr="D115.14"                      Description="Wafer Robot Axis-P Home Hosition (Axis-V)"                       />
+		<DI_ITEM Index="1854"   Name="DI_WaferRobotPAxisHomePosition"                                      BufferOffset="1854"                                      Addr="D115.14"                      Description="Wafer Robot Axis-P Home Hosition (Axis-V)"                       />
 		<DI_ITEM Index="1855"   Name="DI_WaferRobotRunning"                                      BufferOffset="1855"                                      Addr="D115.15"                      Description="Wafer Robot Running"                       />
 
 		<DI_ITEM Index="1856"   Name="DI_LP1FOUPLeftClamp"                                      BufferOffset="1856"                                      Addr="D116.0"                      Description="AGV loadport1 FOUP left clamp"                       />
@@ -1142,7 +1142,7 @@
 		<DO_ITEM Index="1501"   Name="DO_LP2FOUPClamp"                                      BufferOffset="1501"                                      Addr="D1093.13"                      Description="loadport 2 FOUP clamp"                       />
 		<DO_ITEM Index="1504"   Name="DO_loadport1E84REQ"                                      BufferOffset="1504"                                      Addr="D1094.00"                      Description="loadport 1 E84 REQ"                       />
 		<DO_ITEM Index="1505"   Name="DO_loadport1E84UREQ"                                      BufferOffset="1505"                                      Addr="D1094.01"                      Description="loadport 1 E84 UREQ"                       />
-		<DO_ITEM Index="1506"   Name="DO_loadport1E84Ready"                                      BufferOffset="1506"                                      Addr="D1094.03"                      Description="loadport 1 E84 ready"                       />
+		<DO_ITEM Index="1506"   Name="DO_loadport1E84Ready"                                      BufferOffset="1507"                                      Addr="D1094.03"                      Description="loadport 1 E84 ready"                       />
 		<DO_ITEM Index="1510"   Name="DO_loadport1E84HOAVBL"                                      BufferOffset="1510"                                      Addr="D1094.06"                      Description="loadport 1 E84 HO_AVBL"                       />
 		<DO_ITEM Index="1511"   Name="DO_loadport1E84ES"                                      BufferOffset="1511"                                      Addr="D1094.07"                      Description="loadport 1 E84 ES"                       />
 		<DO_ITEM Index="1512"   Name="DO_loadport2E84REQ"                                      BufferOffset="1512"                                      Addr="D1094.08"                      Description="loadport 2 E84 REQ"                       />
@@ -1428,11 +1428,13 @@
 		<AI_ITEM Index="104"    Name="AI_VG21Pressure"                                      BufferOffset="104"                                      Addr="D5208"                      Description="VG21 pressure"                       />
 		<AI_ITEM Index="105"    Name="AI_DG1Pressure"                                      BufferOffset="105"                                      Addr="D5210"                      Description="DG1 pressure"                       />
 		<AI_ITEM Index="106"    Name="AI_PG12Pressure"                                      BufferOffset="106"                                      Addr="D5212"                      Description="PG12 pressure"                       />
+		<AI_ITEM Index="108"    Name="AI_PG13Pressure"                                      BufferOffset="108"                                      Addr="D5216"                      Description="PG14 pressure"                       />
 		<AI_ITEM Index="109"    Name="AI_PS14Pressure"                                      BufferOffset="109"                                      Addr="D5218"                      Description="PS14 pressure"                       />
 		<AI_ITEM Index="192"    Name="AI_N24PurgePressure"                                      BufferOffset="192"                                      Addr="D5384"                      Description="N2-4 purge pressure(PG14)"                       />
 		<AI_ITEM Index="193"    Name="AI_N25PurgePressure"                                      BufferOffset="193"                                      Addr="D5386"                      Description="N2-5 purge pressure(PG15)"                       />
 		<AI_ITEM Index="194"    Name="AI_N26PurgePressure"                                      BufferOffset="194"                                      Addr="D5388"                      Description="N2-6 purge pressure(PG16)"                       />
 		<AI_ITEM Index="195"    Name="AI_N27PurgePressure"                                      BufferOffset="195"                                      Addr="D5390"                      Description="N2-7 purge pressure(PG70)"                       />
+		<AI_ITEM Index="196"    Name="AI_PS17Value"                                      BufferOffset="196"                                      Addr="D5392"                      Description="N2-7 purge pressure(PG17)"                       />
 		<AI_ITEM Index="197"    Name="AI_N28PurgePressure"                                      BufferOffset="197"                                      Addr="D5394"                      Description="N2-8 purge pressuree(PG13)"                       />
 		<AI_ITEM Index="320"    Name="AI_BufferTargetPosFb"                                      BufferOffset="320"                                      Addr="D5640"                      Description="Buffer Target Pos Feedback"                       />
 		<AI_ITEM Index="321"    Name="AI_BufferMotionErrID"                                      BufferOffset="321"                                      Addr="D5642"                      Description="Buffer Motio Err ID"                       />
@@ -1675,7 +1677,7 @@
 		<AI_ITEM Index="2119"   Name="AI_APCController10D"                                      BufferOffset="2119"                                      Addr="D9238"                      Description="Controller 10 D"                       />
 		<AI_ITEM Index="2120"   Name="AI_APCController10A"                                      BufferOffset="2120"                                      Addr="D9240"                      Description="Controller 10 A"                       />
 		<AI_ITEM Index="2121"   Name="AI_APCController10CH"                                      BufferOffset="2121"                                      Addr="D9242"                      Description="CH(air pressure exhaust threshold value 1) for Process Controller 10"                       />
-		<AI_ITEM Index="2122"   Name="AI_APCController0CL"                                      BufferOffset="2122"                                      Addr="D9244"                      Description="CL(air pressure exhaust threshold value 2) for Process Controller 10"                       />
+		<AI_ITEM Index="2122"   Name="AI_APCController10CL"                                      BufferOffset="2122"                                      Addr="D9244"                      Description="CL(air pressure exhaust threshold value 2) for Process Controller 10"                       />
 		<AI_ITEM Index="2123"   Name="AI_APCController10Offset"                                      BufferOffset="2123"                                      Addr="D9246"                      Description="OFFSET for Pocess Controller 10"                       />
 		<AI_ITEM Index="2125"   Name="AI_MFC816AI"                                      BufferOffset="2125"                                      Addr="D9250"                      Description="MFC816AI(4A)"                       />
 		<AI_ITEM Index="2126"   Name="AI_MFC817AI"                                      BufferOffset="2126"                                      Addr="D9252"                      Description="MFC817AI(4B)"                       />

Furnace/FurnaceUI/Views/Operations/Maintenances/N2PurgeStatusView.xaml

@@ -1472,6 +1472,7 @@
                             <deviceControl:AITGasIIIValve
                                 Canvas.Left="325"
                                 Canvas.Top="194"
+                               Command="{Binding CmdSetValve}"
                                 Width="{StaticResource AITGasValve_Size}"
                                 Height="{StaticResource AITGasValve_Size}"
                                 DeviceData="{Binding ValveAV66}"
@@ -1485,6 +1486,7 @@
                                 Width="{StaticResource AITGasValve_Size}"
                                 Height="{StaticResource AITGasValve_Size}"
                                 DeviceData="{Binding ValveAV64}"
+                                   Command="{Binding CmdSetValve}"
                                 GasStateType="{Binding SelectedGasStateType}"
                                 IsEnabled="{Binding IsManagerPermission}"
                                 IsShowSwitchDialog="False"
@@ -1495,6 +1497,7 @@
                                 Width="{StaticResource AITGasValve_Size}"
                                 Height="{StaticResource AITGasValve_Size}"
                                 DeviceData="{Binding ValveAV63}"
+                                   Command="{Binding CmdSetValve}"
                                 GasStateType="{Binding SelectedGasStateType}"
                                 IsEnabled="{Binding IsManagerPermission}"
                                 IsShowSwitchDialog="False"
@@ -1505,6 +1508,7 @@
                                 Width="{StaticResource AITGasValve_Size}"
                                 Height="{StaticResource AITGasValve_Size}"
                                 DeviceData="{Binding ValveAV65}"
+                                   Command="{Binding CmdSetValve}"
                                 GasStateType="{Binding SelectedGasStateType}"
                                 IsEnabled="{Binding IsManagerPermission}"
                                 IsShowSwitchDialog="False"
@@ -1515,6 +1519,7 @@
                                 Width="{StaticResource AITGasValve_Size}"
                                 Height="{StaticResource AITGasValve_Size}"
                                 DeviceData="{Binding ValveAV68}"
+                                   Command="{Binding CmdSetValve}"
                                 GasStateType="{Binding SelectedGasStateType}"
                                 IsEnabled="{Binding IsManagerPermission}"
                                 IsShowSwitchDialog="False"
@@ -1525,6 +1530,7 @@
                                 Width="{StaticResource AITGasValve_Size}"
                                 Height="{StaticResource AITGasValve_Size}"
                                 DeviceData="{Binding ValveAV59}"
+                                   Command="{Binding CmdSetValve}"
                                 GasStateType="{Binding SelectedGasStateType}"
                                 IsEnabled="{Binding IsManagerPermission}"
                                 IsShowSwitchDialog="False"
@@ -1535,6 +1541,7 @@
                                 Width="{StaticResource AITGasValve_Size}"
                                 Height="{StaticResource AITGasValve_Size}"
                                 DeviceData="{Binding ValveAV58}"
+                                   Command="{Binding CmdSetValve}"
                                 GasStateType="{Binding SelectedGasStateType}"
                                 IsEnabled="{Binding IsManagerPermission}"
                                 IsShowSwitchDialog="False"
@@ -1545,6 +1552,7 @@
                                 Width="{StaticResource AITGasValve_Size}"
                                 Height="{StaticResource AITGasValve_Size}"
                                 DeviceData="{Binding ValveAV57}"
+                                   Command="{Binding CmdSetValve}"
                                 GasStateType="{Binding SelectedGasStateType}"
                                 IsEnabled="{Binding IsManagerPermission}"
                                 IsShowSwitchDialog="False"
@@ -1555,6 +1563,7 @@
                                 Width="{StaticResource AITGasValve_Size}"
                                 Height="{StaticResource AITGasValve_Size}"
                                 DeviceData="{Binding ValveAV56}"
+                                   Command="{Binding CmdSetValve}"
                                 GasStateType="{Binding SelectedGasStateType}"
                                 IsEnabled="{Binding IsManagerPermission}"
                                 IsShowSwitchDialog="False"

Furnace/FurnaceUI/Views/Operations/Maintenances/N2PurgeStatusViewModel.cs

@@ -636,7 +636,8 @@ namespace FurnaceUI.Views.Operations.Maintenances
             object[] args = (object[])param;
             if (args.Length == 3)
             {
-                InvokeClient.Instance.Service.DoOperation($"{args[0]}.{args[1]}", args[2]);
+                InvokeClient.Instance.Service.DoOperation($"PM1.{args[0]}.{AITValveOperation.GVTurnValve}", args[2]);
+
             }
         }