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@@ -413,7 +413,7 @@
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diBlade5WaferPresent="DI_WaferRobotWafer5Checked"
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diZAxisHomePosition="DI_WaferRobotZAxisHomePosition"
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- diYAxisHomePosition="DI_WaferRobotTHAxisHomePosition"
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+ diYAxisHomePosition="DI_WaferRobotYAxisHomePosition"
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diVAxisHomePosition="DI_WaferRobotPAxisHomePosition"
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diRunning="DI_WaferRobotRunning"
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@@ -736,16 +736,15 @@
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<IoPressureMeter id="PressureGLBoxPG4" display="GLBoxPG4Pressure" schematicId="GLBoxPG4Pressure" unit="Mpa" aiFeedback="AI_GLBoxPG4Pressure" physical="0,15000" scale="-0.1,1" aioType="float"/>
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<IoPressureMeter id="PressureGLBoxPG5" display="GLBoxPG5Pressure" schematicId="GLBoxPG5Pressure" unit="Mpa" aiFeedback="AI_GLBoxPG5Pressure" physical="0,15000" scale="-0.1,1" aioType="float"/>
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<IoPressureMeter id="PressureGLBoxPG6" display="GLBoxPG6Pressure" schematicId="GLBoxPG6Pressure" unit="Mpa" aiFeedback="AI_GLBoxPG6Pressure" physical="0,15000" scale="-0.1,1" aioType="float"/>
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- <IoPressureMeter id="ConcentrationO2" display="O2Concentration" schematicId="O2Concentration" unit="ppm" aiFeedback="AI_O2Concentration" scale="0,10" physical="0,15000" aioType="float"/>
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+ <IoPressureMeter id="ConcentrationO2" display="O2Concentration" schematicId="O2Concentration" unit="ppm" aiFeedback="AI_O2Concentration" scale="0,10" physical="0,15000" aioType="float"/>
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<IoPressureMeter id="HeatingExhaustMS1" display="HeatingExhaustMS1" schematicId="HeatingExhaustMS1" unit="pa" aiFeedback="AI_HeatingExhaustMS1" physical="0,15000" scale="0,200" aioType="float"/>
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<IoPressureMeter id="GasBoxExhaustMS2" display="GasBoxExhaustMS2" schematicId="GasBoxExhaustMS2" unit="pa" aiFeedback="AI_GasBoxExhaustMS2" physical="0,15000" scale="0,200" aioType="float"/>
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<IoPressureMeter id="ScavengerExhaustMS3" display="ScavengerExhaustMS3" schematicId="ScavengerExhaustMS3" unit="pa" aiFeedback="AI_ScavengerExhaustMS3" physical="0,15000" scale="0,200" aioType="float"/>
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<IoPressureMeter id="ExhaustBoxExhaustMS4" display="ExhaustBoxExhaustMS4" schematicId="ExhaustBoxExhaustMS4" unit="pa" aiFeedback="AI_ExhaustBoxExhaustMS4" physical="0,15000" scale="0,200" aioType="float"/>
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<IoPressureMeter id="LoadingAreaExhaustMS5" display="LoadingAreaExhaustMS5" schematicId="LoadingAreaExhaustMS5" unit="pa" aiFeedback="AI_LoadingAreaExhaustMS5" physical="0,15000" scale="0,200" aioType="float"/>
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- <IoPressureMeter id="FrontBodyExhaustMS6" display="FrontBodyExhaustMS6" schematicId="FrontBodyExhaustMS6" unit="pa" aiFeedback="AI_FrontBodyExhaustMS6" physical="0,15000" scale="0,200" aioType="float"/>
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- <IoPressureMeter id="LAExhaustMS7" display="LAExhaustMS7" schematicId="LAExhaustMS7" unit="pa" aiFeedback="AI_LAExhaustMS7" physical="0,15000" scale="0,500" aioType="float"/>
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- <IoPressureMeter id="RHCExhaustMS8" display="RHCExhaustMS8" schematicId="RHCExhaustMS8" unit="kPa" aiFeedback="AI_RHCExhaustMS8" physical="0,15000" scale="0,2" aioType="float"/>
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+ <IoPressureMeter id="LAExhaustMS7" display="LAExhaustMS7" schematicId="LAExhaustMS7" unit="pa" aiFeedback="AI_CommonExhaustMS7" physical="0,15000" scale="0,500" aioType="float"/>
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+ <IoPressureMeter id="RHCExhaustMS8" display="RHCExhaustMS8" schematicId="RHCExhaustMS8" unit="kPa" aiFeedback="AI_LSCUpExhaustMS8" physical="0,15000" scale="0,2" aioType="float"/>
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<IoPressureMeter id="PS11" display="PS11" schematicId="PS11" unit="MPa" aiFeedback="AI_PS11Value" physical="1500,7500" scale="0,1" aioType="float"/>
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<IoPressureMeter id="RHCFlowFL901" display="RHCFlowFL901" schematicId="RHCFlowFL901" unit="L" aiFeedback="AI_RHCFlowFL901" physical="0,30000" scale="0,40" aioType="float"/>
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@@ -755,19 +754,19 @@
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<IoPressureMeter id="CoolingWaterFlowOfFlangeFL905" display="CoolingWaterFlowOfFlangeFL905" schematicId="CoolingWaterFlowOfFlangeFL905" unit="L" aiFeedback="AI_CoolingWaterFlowOfFlangeFL905" physical="0,30000" scale="0,4" aioType="float"/>
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<IoPressureMeter id="CoolingWaterFlowOfLoadingAreaFL906" display="CoolingWaterFlowOfLoadingAreaFL906" schematicId="CoolingWaterFlowOfLoadingAreaFL906" unit="L" aiFeedback="AI_CoolingWaterFlowOfLoadingAreaFL906" physical="0,30000" scale="0,16" aioType="float"/>
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- <IoPressureMeter id="PG12" display="PG12" schematicId="PG12" unit="psig" aiFeedback="AI_PG12AnalogValue" physical="0,15000" scale="0,100" aioType="float"/>
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- <IoPressureMeter id="PG13" display="PG13" schematicId="PG13" unit="psig" aiFeedback="AI_PG13AnalogValue" physical="0,15000" scale="0,100" aioType="float"/>
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+ <IoPressureMeter id="PG12" display="PG12" schematicId="PG12" unit="psig" aiFeedback="AI_PG12Pressure" physical="0,15000" scale="0,100" aioType="float"/>
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+ <IoPressureMeter id="PG13" display="PG13" schematicId="PG13" unit="psig" aiFeedback="AI_PG13Pressure" physical="0,15000" scale="0,100" aioType="float"/>
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<IoPressureMeter id="PS13" display="PS13" schematicId="PS13" unit="kPa" aiFeedback="AI_PS13AnalogValue" physical="0,30000" scale="0,98.1" aioType="float"/>
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<IoPressureMeter id="PS17" display="PS17" schematicId="PS17" unit="MPa" aiFeedback="AI_PS17Value" physical="900,7500" scale="-0.1,1" aioType="float"/>
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- <IoPressureMeter id="VG12AnalogValue" display="VG12AnalogValue" schematicId="VG12AnalogValue" unit="Pa" aiFeedback="AI_VG12AnalogValue" physical="0,15000" scale="0,1330" aioType="float"/>
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- <IoPressureMeter id="DG1AnalogValue" display="DG1AnalogValue" schematicId="DG1AnalogValue" unit="Pa" aiFeedback="AI_DG1AnalogValue" physical="0,15000" scale="-500,500" aioType="float"/>
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- <IoPressureMeter id="PS14AnalogValue" display="PS14AnalogValue" schematicId="PS14AnalogValue" unit="kPa" aiFeedback="AI_PS14AnalogValue" physical="1500,7500" scale="-99.9,99.9" aioType="float"/>
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+ <IoPressureMeter id="DG1AnalogValue" display="DG1AnalogValue" schematicId="DG1AnalogValue" unit="Pa" aiFeedback="AI_DG1Pressure" physical="0,15000" scale="-500,500" aioType="float"/>
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+ <IoPressureMeter id="PS14AnalogValue" display="PS14AnalogValue" schematicId="PS14AnalogValue" unit="kPa" aiFeedback="AI_PS14Pressure" physical="1500,7500" scale="-99.9,99.9" aioType="float"/>
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<IoPressureMeter id="VG11" display="VG11" schematicId="VG11" unit="Torr" aiFeedback="AI_VG11Pressure" physical="0,15000" scale="0,1000" aioType="float" unSigned="True"/>
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<IoPressureMeter id="VG12" display="VG12" schematicId="VG12" unit="Torr" aiFeedback="AI_VG12Pressure" physical="0,15000" scale="0,1000" aioType="float"/>
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<IoPressureMeter id="VG13" display="VG13" schematicId="VG13" unit="Torr" aiFeedback="AI_VG13Pressure" physical="0,15000" scale="0,1000" aioType="float" unSigned="True"/>
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<IoPressureMeter id="VG21" display="VG21" schematicId="VG21" unit="Torr" aiFeedback="AI_VG21Pressure" physical="0,15000" scale="0,1000" aioType="float"/>
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<IoPressureMeter id="VG22" display="VG22" schematicId="VG22" unit="Torr" aiFeedback="AI_VG22Pressure" physical="0,15000" scale="0,1000" aioType="float"/>
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+ <IoPressureMeter id="VG33" display="VG33" schematicId="VG33" unit="Torr" aiFeedback="AI_VG33Pressure" physical="0,15000" scale="0,1000" aioType="float"/>
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<IoPressureMeter id="N24PurgePressure" display="N24PurgePressure" schematicId="N24PurgePressure" unit="psig" aiFeedback="AI_N24PurgePressure" physical="0,15000" scale="0,150" aioType="float"/>
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<IoPressureMeter id="N25PurgePressure" display="N25PurgePressure" schematicId="N25PurgePressure" unit="psig" aiFeedback="AI_N25PurgePressure" physical="0,15000" scale="0,150" aioType="float"/>
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@@ -891,7 +890,7 @@
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- <IoAlarmSignal id="AlarmSignalFBFrontDoorSwitch" diSignalsplay="FBFrontDoorSwitch" diSignal="DI_FBFrontDoorSwitch" alarmTrigValue="true"/>
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+ <IoAlarmSignal id="AlarmSignalFBFrontDoorSwitch" diSignalsplay="FBFrontDoorSwitch" diSignal="DI_Frontbodydoorswitch" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalGLBoxPG1CNT1Alarm" diSignalsplay="GLBoxPG1CNT1Alarm" diSignal="DI_GLBoxPG1CNT1Alarm" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalGLBoxPG1CNT2Alarm" diSignalsplay="GLBoxPG1CNT2Alarm" diSignal="DI_GLBoxPG1CNT2Alarm" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalGLBoxPG2CNT1Alarm" diSignalsplay="GLBoxPG2CNT1Alarm" diSignal="DI_GLBoxPG2CNT1Alarm" alarmTrigValue="true"/>
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@@ -948,14 +947,11 @@
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<IoAlarmSignal id="AlarmSignalCoolingWaterPressureOut1" diSignalsplay="CoolingWaterPressureOut1" diSignal="DI_CoolingWaterPressureOut1" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalCoolingWaterPressureOut2" diSignalsplay="CoolingWaterPressureOut2" diSignal="DI_CoolingWaterPressureOut2" alarmTrigValue="true"/>
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- <IoAlarmSignal id="AlarmSignalAirFlowFL70" diSignalsplay="AirFlowFL70" diSignal="DI_AirFlowFL70" alarmTrigValue="true"/>
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- <IoAlarmSignal id="AlarmSignalAirFlowFL71" diSignalsplay="AirFlowFL71" diSignal="DI_AirFlowFL71" alarmTrigValue="true"/>
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- <IoAlarmSignal id="AlarmSignalAirFlowFL72" diSignalsplay="AirFlowFL72" diSignal="DI_AirFlowFL72" alarmTrigValue="true"/>
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+
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<IoAlarmSignal id="AlarmSignalWaterFlowFL61" diSignalsplay="WaterFlowFL61" diSignal="DI_WaterFlowFL61" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalWaterFlowFL62" diSignalsplay="WaterFlowFL62" diSignal="DI_WaterFlowFL62" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalUPSFault" diSignalsplay="UPSFault" diSignal="DI_UPSFault" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalK141UPSAlarm" diSignalsplay="UPSAlarm" diSignal="DI_K141UPSAlarm" alarmTrigValue="true"/>
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- <IoAlarmSignal id="AlarmSignalK169UPSAlarm" diSignalsplay="UPSAlarm" diSignal="DI_K169UPSAlarm" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalN2PurgeBOXPG14CNT1" diSignalsplay="N2PurgeBOXPG14CNT1" diSignal="DI_N2PurgeBOXPG14CNT1" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalN2PurgeBOXPG14CNT2" diSignalsplay="N2PurgeBOXPG14CNT2" diSignal="DI_N2PurgeBOXPG14CNT2" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalN2PurgeBOXPG15CNT1" diSignalsplay="N2PurgeBOXPG15CNT1" diSignal="DI_N2PurgeBOXPG15CNT1" alarmTrigValue="true"/>
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@@ -969,7 +965,6 @@
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- <IoAlarmSignal id="AlarmSignalRFAlarm" diSignalsplay="RFAlarm" diSignal="DI_RFAlarm" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalForelineHeaterJacketLightAlarm" diSignalsplay="ForelineHeaterJacketLightAlarm" diSignal="DI_ForelineHeaterJacketLightAlarm" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalForelineHeaterJacketHeavyAlarm" diSignalsplay="ForelineHeaterJacketHeavyAlarm" diSignal="DI_ForelineHeaterJacketHeavyAlarm" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalScrubberWarning" diSignalsplay="ScrubberWarning" diSignal="DI_ScrubberWarning" alarmTrigValue="true"/>
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@@ -1016,7 +1011,7 @@
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<IoAlarmSignal id="AlarmSignalVaccum1PumpAlarm" diSignalsplay="Vaccum1 Pump Alarm" diSignal="DI_Vaccum1PumpAlarm" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalVaccum2PumpWarning" diSignalsplay="Vaccum2 Pump Warning" diSignal="DI_Vaccum2PumpWarning" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalVaccum2PumpAlarm" diSignalsplay="Vaccum2 Pump Alarm" diSignal="DI_Vaccum2PumpAlarm" alarmTrigValue="true"/>
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- <IoAlarmSignal id="AlarmSignalHotN2Alarm" diSignalsplay="HOT N2 ALARM" diSignal="DI_HotN2Alarm" alarmTrigValue="true"/>
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+
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<IoAlarmSignal id="AlarmSignalLDS1MajorAlarm" diSignalsplay="LDS1 major alarm" diSignal="DI_LDS1MajorAlarm" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalLDS1MinorWarning" diSignalsplay="LDS1 minor warning" diSignal="DI_LDS1MinorWarning" alarmTrigValue="true"/>
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<IoAlarmSignal id="AlarmSignalLDS1liquidLowWarning" diSignalsplay="LDS1 liquid low warning" diSignal="DI_LDS1liquidLowWarning" alarmTrigValue="true"/>
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@@ -1311,7 +1306,7 @@
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aoSetSpeed="AO_FFU1SetSpeed"
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aoReset="AO_FFU1Reset"
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- doEnable="DO_FFU1Enable"
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+ doEnable=""
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doWriteCommand="DO_FFU1WriteCommand"
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aioType="float"
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@@ -1336,7 +1331,7 @@
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aoSetSpeed="AO_FFU2SetSpeed"
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aoReset="AO_FFU2Reset"
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- doEnable="DO_FFU2Enable"
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+ doEnable=""
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doWriteCommand="DO_FFU2WriteCommand"
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aioType="float"
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@@ -1361,7 +1356,7 @@
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aoSetSpeed="AO_FFU3SetSpeed"
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aoReset="AO_FFU3Reset"
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- doEnable="DO_FFU3Enable"
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+ doEnable=""
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doWriteCommand="DO_FFU3WriteCommand"
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aioType="float"
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@@ -1386,7 +1381,7 @@
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aoSetSpeed="AO_FFU4SetSpeed"
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aoReset="AO_FFU4Reset"
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- doEnable="DO_FFU4Enable"
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+ doEnable=""
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doWriteCommand="DO_FFU4WriteCommand"
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aioType="float"
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@@ -1411,7 +1406,7 @@
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aoSetSpeed="AO_FFU5SetSpeed"
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aoReset="AO_FFU5Reset"
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- doEnable="DO_FFU5Enable"
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+ doEnable=""
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doWriteCommand="DO_FFU5WriteCommand"
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aioType="float"
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@@ -1436,7 +1431,7 @@
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aoSetSpeed="AO_FFU6SetSpeed"
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aoReset="AO_FFU6Reset"
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- doEnable="DO_FFU6Enable"
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+ doEnable=""
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doWriteCommand="DO_FFU6WriteCommand"
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aioType="float"
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@@ -1461,7 +1456,7 @@
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aoSetSpeed="AO_FFU7SetSpeed"
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aoReset="AO_FFU7Reset"
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- doEnable="DO_FFU7Enable"
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+ doEnable=""
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doWriteCommand="DO_FFU7WriteCommand"
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aioType="float"
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@@ -1486,7 +1481,7 @@
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aoSetSpeed="AO_FFU8SetSpeed"
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aoReset="AO_FFU8Reset"
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- doEnable="DO_FFU8Enable"
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+ doEnable=""
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doWriteCommand="DO_FFU8WriteCommand"
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aioType="float"
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@@ -1511,7 +1506,7 @@
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aoSetSpeed="AO_FFU9SetSpeed"
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aoReset="AO_FFU9Reset"
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- doEnable="DO_FFU9Enable"
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+ doEnable=""
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doWriteCommand="DO_FFU9WriteCommand"
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aioType="float"
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