优化LP

git-svn-id: http://10.4.3.168:50001/svn/Furnace@97 dbcde07d-dcf5-c148-8a84-ac3097b7778e

Furnace/FurnaceRT/Config/FurnaceGemModel.xml

@@ -785,6 +785,7 @@
     <SVID id="332190045" valueType="Ascii" logicalName="PM1.SubRecipeCurrentLoopCount" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="332190046" valueType="Ascii" logicalName="PM1.SubRecipeLoopCount" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="332190047" valueType="Boolean" logicalName="PM1.RunningMode" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="332190048" valueType="Boolean" logicalName="PM1.EnableMinics" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="332200001" valueType="Boolean" logicalName="PM1.CMNT.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="332200002" valueType="Boolean" logicalName="PM1.CMNT.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="332210001" valueType="F8" logicalName="PM1.ConcentrationO2.Value" value="" eventTrigger="" units="" description="" isArray="false" />
@@ -2175,6 +2176,122 @@
     <SVID id="338650001" valueType="Boolean" logicalName="PM1.SensorO2DetectSideFIMS1.Value" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="338660001" valueType="Boolean" logicalName="PM1.SensorO2DetectSideFIMS2.Value" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="338670001" valueType="Boolean" logicalName="PM1.SensorO2DetectSideLA.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338680001" valueType="Boolean" logicalName="PM1.IoValve.ValveAV201.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338680002" valueType="Boolean" logicalName="PM1.IoValve.ValveAV201.Status" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338690001" valueType="Boolean" logicalName="PM1.IoValve.ValveAV202.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338690002" valueType="Boolean" logicalName="PM1.IoValve.ValveAV202.Status" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338700001" valueType="Boolean" logicalName="PM1.IoValve.ValveSV227.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338700002" valueType="Boolean" logicalName="PM1.IoValve.ValveSV227.Status" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338710001" valueType="Boolean" logicalName="PM1.ValveAV201.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338710002" valueType="Boolean" logicalName="PM1.ValveAV201.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338720001" valueType="Boolean" logicalName="PM1.ValveAV202.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338720002" valueType="Boolean" logicalName="PM1.ValveAV202.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338730001" valueType="Boolean" logicalName="PM1.ValveSV227.Feedback" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338730002" valueType="Boolean" logicalName="PM1.ValveSV227.SetPoint" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338740001" valueType="Boolean" logicalName="PM1.AlarmSignal100Vtransformerpoweron.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338750001" valueType="Boolean" logicalName="PM1.AlarmSignalAC100Vtransformerpowerswitch.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338760001" valueType="Boolean" logicalName="PM1.AlarmSignalAC100Vtransformertempsw.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338770001" valueType="Boolean" logicalName="PM1.AlarmSignalAxisCRmotorEDM.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338780001" valueType="Boolean" logicalName="PM1.AlarmSignalAxisCRmotorenable1.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338790001" valueType="Boolean" logicalName="PM1.AlarmSignalAxisCRmotorenable2.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338800001" valueType="Boolean" logicalName="PM1.AlarmSignalAxisEmotorEDM.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338810001" valueType="Boolean" logicalName="PM1.AlarmSignalAxisEmotorenable1.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338820001" valueType="Boolean" logicalName="PM1.AlarmSignalAxisEmotorenable2.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338830001" valueType="Boolean" logicalName="PM1.AlarmSignalBlowerpoweronoff.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338840001" valueType="Boolean" logicalName="PM1.AlarmSignalCapheaterenable.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338850001" valueType="Boolean" logicalName="PM1.AlarmSignalEMO01001powerboxEMO.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338860001" valueType="Boolean" logicalName="PM1.AlarmSignalEMO02001gasboxEMO.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338870001" valueType="Boolean" logicalName="PM1.AlarmSignalEMO04001frontbodyEMO.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338880001" valueType="Boolean" logicalName="PM1.AlarmSignalExternalEMO.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338890001" valueType="Boolean" logicalName="PM1.AlarmSignalFouprobotEMS.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338900001" valueType="Boolean" logicalName="PM1.AlarmSignalFrontbodydoorswitch.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338910001" valueType="Boolean" logicalName="PM1.AlarmSignalFrontbodyinterlockbuttonled.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338920001" valueType="Boolean" logicalName="PM1.AlarmSignalFrontbodyinterlockresetbutton.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338930001" valueType="Boolean" logicalName="PM1.AlarmSignalFrontbodyIOshuttersw.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338940001" valueType="Boolean" logicalName="PM1.AlarmSignalFS101waterflowalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338950001" valueType="Boolean" logicalName="PM1.AlarmSignalFTRenable1.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338960001" valueType="Boolean" logicalName="PM1.AlarmSignalFTRenable2.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338970001" valueType="Boolean" logicalName="PM1.AlarmSignalFTRinterlockreset.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338980001" valueType="Boolean" logicalName="PM1.AlarmSignalFurnacepoweronoff.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="338990001" valueType="Boolean" logicalName="PM1.AlarmSignalFurnacepoweronswitch.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339000001" valueType="Boolean" logicalName="PM1.AlarmSignalFurnacetransformertempsw.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339010001" valueType="Boolean" logicalName="PM1.AlarmSignalGasboxexhaustpressurealarm1st.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339020001" valueType="Boolean" logicalName="PM1.AlarmSignalGasboxexhaustpressurealarm2nd.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339030001" valueType="Boolean" logicalName="PM1.AlarmSignalGasboxinterlockbuttonled.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339040001" valueType="Boolean" logicalName="PM1.AlarmSignalGasboxinterlockresetbutton.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339050001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02001fault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339060001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02001HCL1gasleak1stalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339070001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02001HCL1gasleak2ndalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339080001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02002fault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339090001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02002HCL2gasleak1stalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339100001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02002HCL2gasleak2ndalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339110001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02003fault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339120001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02003NH31gasleak1stalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339130001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02003NH31gasleak2ndalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339140001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02004fault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339150001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02004NH32gasleak1stalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339160001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02004NH32gasleak2ndalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339170001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02005F21gasleak1stalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339180001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02005F21gasleak2ndalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339190001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02005fault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339200001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02006F22gasleak1stalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339210001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02006F22gasleak2ndalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339220001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02006fault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339230001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02007fault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339240001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02007NO1gasleak1stalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339250001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02007NO1gasleak2ndalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339260001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02008fault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339270001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02008NO2gasleak1stalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339280001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02008NO2gasleak2ndalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339290001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02009C3H61gasleak1stalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339300001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02009C3H61gasleak2ndalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339310001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02009fault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339320001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02010C3H62gasleak1stalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339330001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02010C3H62gasleak2ndalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339340001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02010fault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339350001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02011DMA1gasleak1stalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339360001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02011DMA1gasleak2ndalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339370001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02011fault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339380001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02012DMA2gasleak1stalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339390001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02012DMA2gasleak2ndalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339400001" valueType="Boolean" logicalName="PM1.AlarmSignalGD02012fault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339410001" valueType="Boolean" logicalName="PM1.AlarmSignalHPMvalvepoweronoff.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339420001" valueType="Boolean" logicalName="PM1.AlarmSignalLD02001LSCleakalarm.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339430001" valueType="Boolean" logicalName="PM1.AlarmSignalLD03001exhaustboxwaterleakupside.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339440001" valueType="Boolean" logicalName="PM1.AlarmSignalLD03002waterleakdownside.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339450001" valueType="Boolean" logicalName="PM1.AlarmSignalLD05001Magneticfluidleak.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339460001" valueType="Boolean" logicalName="PM1.AlarmSignalLD05002Coolingwaterleak.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339470001" valueType="Boolean" logicalName="PM1.AlarmSignalLD05003RHCleak.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339480001" valueType="Boolean" logicalName="PM1.AlarmSignalLightcurtainfault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339490001" valueType="Boolean" logicalName="PM1.AlarmSignalLightcurtainidel.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339500001" valueType="Boolean" logicalName="PM1.AlarmSignalLightcurtainOSSD1.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339510001" valueType="Boolean" logicalName="PM1.AlarmSignalLightcurtainOSSD2.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339520001" valueType="Boolean" logicalName="PM1.AlarmSignalLoadingareaEMS.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339530001" valueType="Boolean" logicalName="PM1.AlarmSignalPowerboxfiredetector.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339540001" valueType="Boolean" logicalName="PM1.AlarmSignalPowerboxinterlockbuttonled.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339550001" valueType="Boolean" logicalName="PM1.AlarmSignalPowerboxinterlockresetbutton.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339560001" valueType="Boolean" logicalName="PM1.AlarmSignalSCRONOFFSWITCH.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339570001" valueType="Boolean" logicalName="PM1.AlarmSignalSL02001gasboxdoorsw11.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339580001" valueType="Boolean" logicalName="PM1.AlarmSignalSL02001gasboxdoorsw12.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339590001" valueType="Boolean" logicalName="PM1.AlarmSignalSL02002gasboxdoorsw11.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339600001" valueType="Boolean" logicalName="PM1.AlarmSignalSL02002gasboxdoorsw12.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339610001" valueType="Boolean" logicalName="PM1.AlarmSignalSL05001LAdoorsw1.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339620001" valueType="Boolean" logicalName="PM1.AlarmSignalSL05002LAdoorsw2.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339630001" valueType="Boolean" logicalName="PM1.AlarmSignalSL05004LAfurnacedoorsw.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339640001" valueType="Boolean" logicalName="PM1.AlarmSignalSMK01001detectorfault.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339650001" valueType="Boolean" logicalName="PM1.AlarmSignalSMK01001detectoroperator.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339660001" valueType="Boolean" logicalName="PM1.AlarmSignalTS05001FFUtempsw.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339670001" valueType="Boolean" logicalName="PM1.AlarmSignalTS05002Capinsidetempsw.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339680001" valueType="Boolean" logicalName="PM1.AlarmSignalTS05003Capoutsidetempsw.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339690001" valueType="Boolean" logicalName="PM1.AlarmSignalTS05004Raxisrotationtempsw.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339700001" valueType="Boolean" logicalName="PM1.AlarmSignalTS05005RHCtempsw.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339710001" valueType="Boolean" logicalName="PM1.AlarmSignalTS05006furnacetempsw.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339720001" valueType="Boolean" logicalName="PM1.AlarmSignalVFD01001EDM.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339730001" valueType="Boolean" logicalName="PM1.AlarmSignalVFDenable.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339740001" valueType="Boolean" logicalName="PM1.AlarmSignalWaferrobotEMS.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339750001" valueType="Boolean" logicalName="PM1.AlarmSignalWTRenable1.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339760001" valueType="Boolean" logicalName="PM1.AlarmSignalWTRenable2.Value" value="" eventTrigger="" units="" description="" isArray="false" />
+    <SVID id="339770001" valueType="Boolean" logicalName="PM1.AlarmSignalWTRinterlockreset.Value" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="630010001" valueType="Boolean" logicalName="Stocker1.CassetteHasWafer" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="630010002" valueType="Boolean" logicalName="Stocker1.FoupPresent" value="" eventTrigger="" units="" description="" isArray="false" />
     <SVID id="630010003" valueType="Boolean" logicalName="Stocker1.IsError" value="" eventTrigger="" units="" description="" isArray="false" />
@@ -8267,6 +8384,26 @@
     <ECID id="1010060022" valueType="Ascii" logicalName="LoadPort.LP4.RFIDNoteNo" value="" min="" max="" eventTrigger="" units="" description="RFID NoteNo" isArray="false" />
     <ECID id="1010060023" valueType="Ascii" logicalName="LoadPort.LP4.StartPage" value="" min="" max="" eventTrigger="" units="" description="RFID Read Start Page" isArray="false" />
     <ECID id="1010060024" valueType="Ascii" logicalName="LoadPort.LP4.StopBits" value="" min="" max="" eventTrigger="" units="" description="StopBits" isArray="false" />
+    <ECID id="1020010001" valueType="Ascii" logicalName="FFU.FFU1.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
+    <ECID id="1020020001" valueType="Ascii" logicalName="FFU.FFU10.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
+    <ECID id="1020030001" valueType="Ascii" logicalName="FFU.FFU11.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
+    <ECID id="1020040001" valueType="Ascii" logicalName="FFU.FFU12.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
+    <ECID id="1020050001" valueType="Ascii" logicalName="FFU.FFU13.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
+    <ECID id="1020060001" valueType="Ascii" logicalName="FFU.FFU14.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
+    <ECID id="1020070001" valueType="Ascii" logicalName="FFU.FFU15.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
+    <ECID id="1020080001" valueType="Ascii" logicalName="FFU.FFU16.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
+    <ECID id="1020090001" valueType="Ascii" logicalName="FFU.FFU17.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
+    <ECID id="1020100001" valueType="Ascii" logicalName="FFU.FFU18.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
+    <ECID id="1020110001" valueType="Ascii" logicalName="FFU.FFU2.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
+    <ECID id="1020120001" valueType="Ascii" logicalName="FFU.FFU3.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
+    <ECID id="1020130001" valueType="Ascii" logicalName="FFU.FFU4.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
+    <ECID id="1020140001" valueType="Ascii" logicalName="FFU.FFU5.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
+    <ECID id="1020150001" valueType="Ascii" logicalName="FFU.FFU6.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
+    <ECID id="1020160001" valueType="Ascii" logicalName="FFU.FFU7.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
+    <ECID id="1020170001" valueType="Ascii" logicalName="FFU.FFU8.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
+    <ECID id="1020180001" valueType="Ascii" logicalName="FFU.FFU9.SetSpeed" value="" min="" max="" eventTrigger="" units="" description=" set speed" isArray="false" />
+    <ECID id="1020190001" valueType="Ascii" logicalName="FFU.HSPEED" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="1020190002" valueType="Ascii" logicalName="FFU.LSPEED" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3310000001" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.Parameter.P151.Axis" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3310000002" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.Parameter.P151.SettingItem" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3310000003" valueType="Ascii" logicalName="PM1.RecipeEditParameter.WaferRobotParameter.Parameter.P151.SetValue" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
@@ -9269,6 +9406,7 @@
     <ECID id="3312110010" valueType="Ascii" logicalName="PM1.N2Purge.AIR.ValveLADamper" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312110011" valueType="Ascii" logicalName="PM1.N2Purge.AIR.ValveSV61" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312110012" valueType="Ascii" logicalName="PM1.N2Purge.AIR.ValveSV62" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312110013" valueType="Ascii" logicalName="PM1.N2Purge.AIR.ValveAV201" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312120001" valueType="Ascii" logicalName="PM1.N2Purge.BoatLoad.EAxisInhibitEnable" value="" min="" max="" eventTrigger="" units="" description="E Axis Inhibit Enable" isArray="false" />
     <ECID id="3312120002" valueType="Ascii" logicalName="PM1.N2Purge.BoatLoad.FoupInhibitEnable" value="" min="" max="" eventTrigger="" units="" description="Foup Inhibit Enable When boatloading" isArray="false" />
     <ECID id="3312120003" valueType="Ascii" logicalName="PM1.N2Purge.BoatLoad.TransferRoomN2PurgeEnable" value="" min="" max="" eventTrigger="" units="" description="LA N2 Purge Charge Enable" isArray="false" />
@@ -9291,6 +9429,7 @@
     <ECID id="3312140010" valueType="Ascii" logicalName="PM1.N2Purge.DoorOpen.ValveLADamper" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312140011" valueType="Ascii" logicalName="PM1.N2Purge.DoorOpen.ValveSV61" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312140012" valueType="Ascii" logicalName="PM1.N2Purge.DoorOpen.ValveSV62" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312140013" valueType="Ascii" logicalName="PM1.N2Purge.DoorOpen.ValveAV201" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312150001" valueType="Ascii" logicalName="PM1.N2Purge.Foup1.ValveAV56" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312150002" valueType="Ascii" logicalName="PM1.N2Purge.Foup1.ValveAV57" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312150003" valueType="Ascii" logicalName="PM1.N2Purge.Foup1.ValveAV58" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
@@ -9303,6 +9442,7 @@
     <ECID id="3312150010" valueType="Ascii" logicalName="PM1.N2Purge.Foup1.ValveLADamper" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312150011" valueType="Ascii" logicalName="PM1.N2Purge.Foup1.ValveSV61" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312150012" valueType="Ascii" logicalName="PM1.N2Purge.Foup1.ValveSV62" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312150013" valueType="Ascii" logicalName="PM1.N2Purge.Foup1.ValveAV201" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312160001" valueType="Ascii" logicalName="PM1.N2Purge.Foup2.ValveAV56" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312160002" valueType="Ascii" logicalName="PM1.N2Purge.Foup2.ValveAV57" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312160003" valueType="Ascii" logicalName="PM1.N2Purge.Foup2.ValveAV58" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
@@ -9315,6 +9455,7 @@
     <ECID id="3312160010" valueType="Ascii" logicalName="PM1.N2Purge.Foup2.ValveLADamper" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312160011" valueType="Ascii" logicalName="PM1.N2Purge.Foup2.ValveSV61" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312160012" valueType="Ascii" logicalName="PM1.N2Purge.Foup2.ValveSV62" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312160013" valueType="Ascii" logicalName="PM1.N2Purge.Foup2.ValveAV201" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312170001" valueType="Ascii" logicalName="PM1.N2Purge.FoupEnter.FOUPN2PurgeCancelEnable" value="" min="" max="" eventTrigger="" units="" description="FOUP N2 Purge Cancel Enable When Foup Enter" isArray="false" />
     <ECID id="3312170002" valueType="Ascii" logicalName="PM1.N2Purge.FoupEnter.FOUPN2PurgeEnable" value="" min="" max="" eventTrigger="" units="" description="FOUP N2 Purge Enable When Foup Enter" isArray="false" />
     <ECID id="3312170003" valueType="Ascii" logicalName="PM1.N2Purge.FoupEnter.TransferRoomN2PurgeEnable" value="" min="" max="" eventTrigger="" units="" description="LA N2 Purge  Enable When Foup Enter" isArray="false" />
@@ -9332,6 +9473,12 @@
     <ECID id="3312190009" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase1.ValveAV65" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312190010" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase1.ValveSV531" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312190011" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase1.ValveSV532" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312190012" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase1.TrigMS520" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312190013" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase1.TrigMS521" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312190014" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase1.TrigMS522" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312190015" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase1.ValveAV201" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312190016" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase1.ValveAV66" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312190017" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase1.ValveSV227" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312200001" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase2.MFC51" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312200002" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase2.TrigMS501" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312200003" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase2.TrigMS502" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
@@ -9343,6 +9490,12 @@
     <ECID id="3312200009" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase2.ValveAV65" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312200010" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase2.ValveSV531" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312200011" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase2.ValveSV532" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312200012" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase2.TrigMS520" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312200013" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase2.TrigMS521" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312200014" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase2.TrigMS522" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312200015" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase2.ValveAV201" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312200016" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase2.ValveAV66" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312200017" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase2.ValveSV227" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312210001" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase3.MFC51" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312210002" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase3.TrigMS501" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312210003" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase3.TrigMS502" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
@@ -9354,6 +9507,12 @@
     <ECID id="3312210009" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase3.ValveAV65" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312210010" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase3.ValveSV531" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312210011" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase3.ValveSV532" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312210012" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase3.TrigMS520" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312210013" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase3.TrigMS521" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312210014" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase3.TrigMS522" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312210015" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase3.ValveAV201" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312210016" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase3.ValveAV66" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312210017" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase3.ValveSV227" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312220001" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase4.TrigMS501" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312220002" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase4.TrigMS502" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312220003" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase4.TrigMS503" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
@@ -9364,6 +9523,12 @@
     <ECID id="3312220008" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase4.ValveAV65" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312220009" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase4.ValveSV531" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312220010" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase4.ValveSV532" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312220011" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase4.TrigMS520" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312220012" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase4.TrigMS521" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312220013" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase4.TrigMS522" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312220014" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase4.ValveAV201" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312220015" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase4.ValveAV66" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312220016" valueType="Ascii" logicalName="PM1.N2Purge.Manual_phase4.ValveSV227" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312230001" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeAIRTo20PPM.ValveAV56" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312230002" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeAIRTo20PPM.ValveAV57" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312230003" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeAIRTo20PPM.ValveAV58" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
@@ -9376,6 +9541,7 @@
     <ECID id="3312230010" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeAIRTo20PPM.ValveLADamper" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312230011" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeAIRTo20PPM.ValveSV61" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312230012" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeAIRTo20PPM.ValveSV62" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312230013" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeAIRTo20PPM.ValveAV201" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312240001" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveAV56" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312240002" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveAV57" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312240003" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveAV58" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
@@ -9388,6 +9554,7 @@
     <ECID id="3312240010" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveLADamper" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312240011" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveSV61" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312240012" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveSV62" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
+    <ECID id="3312240013" valueType="Ascii" logicalName="PM1.N2Purge.N2PurgeUnder20PPM.ValveAV201" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312250001" valueType="Ascii" logicalName="PM1.N2Purge.ResetAll.MFC51" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312250002" valueType="Ascii" logicalName="PM1.N2Purge.ResetAll.TrigLAinternalaircyclefan1switch" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
     <ECID id="3312250003" valueType="Ascii" logicalName="PM1.N2Purge.ResetAll.TrigLAinternalaircyclefan2switch" value="" min="" max="" eventTrigger="" units="" description="" isArray="false" />
@@ -11594,6 +11761,113 @@
     <ALID id="330010903" logicalName="PM1.WaterFlowFS116ToleranceWarning" description="WaterFlowFS116 tolerance warning " category="EquipmentStatusWarning" enabled="false" eventSet="1330010903" eventClear="2330010903" />
     <ALID id="330010904" logicalName="PM1.AlarmSignaAPCCommAlarm" description="APC Comm Alarm Trigger " category="EquipmentStatusWarning" enabled="false" eventSet="1330010904" eventClear="2330010904" />
     <ALID id="330010905" logicalName="PM1.ExecuteAbortRecipeFailAlarm" description="PM1 execute abort recipe fail alarm " category="EquipmentStatusWarning" enabled="false" eventSet="1330010905" eventClear="2330010905" />
+    <ALID id="330010906" logicalName="PM1.ValveAV201 InterlockAlarm" description="ValveAV201 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010906" eventClear="2330010906" />
+    <ALID id="330010907" logicalName="PM1.ValveAV202 InterlockAlarm" description="ValveAV202 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010907" eventClear="2330010907" />
+    <ALID id="330010908" logicalName="PM1.ValveSV227 InterlockAlarm" description="ValveSV227 Interlock alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010908" eventClear="2330010908" />
+    <ALID id="330010909" logicalName="PM1.AlarmSignal100Vtransformerpoweron" description="100V transformer power on" category="EquipmentStatusWarning" enabled="false" eventSet="1330010909" eventClear="2330010909" />
+    <ALID id="330010910" logicalName="PM1.AlarmSignalAC100Vtransformerpowerswitch" description="AC100V transformer power switch" category="EquipmentStatusWarning" enabled="false" eventSet="1330010910" eventClear="2330010910" />
+    <ALID id="330010911" logicalName="PM1.AlarmSignalAC100Vtransformertempsw" description="AC100V transformer temp sw" category="EquipmentStatusWarning" enabled="false" eventSet="1330010911" eventClear="2330010911" />
+    <ALID id="330010912" logicalName="PM1.AlarmSignalAxisCRmotorEDM" description="Axis-CR motor EDM" category="EquipmentStatusWarning" enabled="false" eventSet="1330010912" eventClear="2330010912" />
+    <ALID id="330010913" logicalName="PM1.AlarmSignalAxisCRmotorenable1" description="Axis-CR motor enable1" category="EquipmentStatusWarning" enabled="false" eventSet="1330010913" eventClear="2330010913" />
+    <ALID id="330010914" logicalName="PM1.AlarmSignalAxisCRmotorenable2" description="Axis-CR motor enable2" category="EquipmentStatusWarning" enabled="false" eventSet="1330010914" eventClear="2330010914" />
+    <ALID id="330010915" logicalName="PM1.AlarmSignalAxisEmotorEDM" description="Axis-E motor EDM" category="EquipmentStatusWarning" enabled="false" eventSet="1330010915" eventClear="2330010915" />
+    <ALID id="330010916" logicalName="PM1.AlarmSignalAxisEmotorenable1" description="Axis-E motor enable1" category="EquipmentStatusWarning" enabled="false" eventSet="1330010916" eventClear="2330010916" />
+    <ALID id="330010917" logicalName="PM1.AlarmSignalAxisEmotorenable2" description="Axis-E motor enable2" category="EquipmentStatusWarning" enabled="false" eventSet="1330010917" eventClear="2330010917" />
+    <ALID id="330010918" logicalName="PM1.AlarmSignalBlowerpoweronoff" description="Blower power on/off" category="EquipmentStatusWarning" enabled="false" eventSet="1330010918" eventClear="2330010918" />
+    <ALID id="330010919" logicalName="PM1.AlarmSignalCapheaterenable" description="Cap heater enable" category="EquipmentStatusWarning" enabled="false" eventSet="1330010919" eventClear="2330010919" />
+    <ALID id="330010920" logicalName="PM1.AlarmSignalEMO01001powerboxEMO" description="EMO01001 power box EMO" category="EquipmentStatusWarning" enabled="false" eventSet="1330010920" eventClear="2330010920" />
+    <ALID id="330010921" logicalName="PM1.AlarmSignalEMO02001gasboxEMO" description="EMO02001 gas box EMO" category="EquipmentStatusWarning" enabled="false" eventSet="1330010921" eventClear="2330010921" />
+    <ALID id="330010922" logicalName="PM1.AlarmSignalEMO04001frontbodyEMO" description="EMO04001 frontbody EMO" category="EquipmentStatusWarning" enabled="false" eventSet="1330010922" eventClear="2330010922" />
+    <ALID id="330010923" logicalName="PM1.AlarmSignalExternalEMO" description="External EMO" category="EquipmentStatusWarning" enabled="false" eventSet="1330010923" eventClear="2330010923" />
+    <ALID id="330010924" logicalName="PM1.AlarmSignalFouprobotEMS" description="Foup robot EMS" category="EquipmentStatusWarning" enabled="false" eventSet="1330010924" eventClear="2330010924" />
+    <ALID id="330010925" logicalName="PM1.AlarmSignalFrontbodydoorswitch" description="Front body door switch" category="EquipmentStatusWarning" enabled="false" eventSet="1330010925" eventClear="2330010925" />
+    <ALID id="330010926" logicalName="PM1.AlarmSignalFrontbodyinterlockbuttonled" description="Frontbody interlock button led" category="EquipmentStatusWarning" enabled="false" eventSet="1330010926" eventClear="2330010926" />
+    <ALID id="330010927" logicalName="PM1.AlarmSignalFrontbodyinterlockresetbutton" description="Front body interlock reset button" category="EquipmentStatusWarning" enabled="false" eventSet="1330010927" eventClear="2330010927" />
+    <ALID id="330010928" logicalName="PM1.AlarmSignalFrontbodyIOshuttersw" description="Front body I/O shutter sw" category="EquipmentStatusWarning" enabled="false" eventSet="1330010928" eventClear="2330010928" />
+    <ALID id="330010929" logicalName="PM1.AlarmSignalFS101waterflowalarm" description="FS101 water flow alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010929" eventClear="2330010929" />
+    <ALID id="330010930" logicalName="PM1.AlarmSignalFTRenable1" description="FTR enable1" category="EquipmentStatusWarning" enabled="false" eventSet="1330010930" eventClear="2330010930" />
+    <ALID id="330010931" logicalName="PM1.AlarmSignalFTRenable2" description="FTR enable2" category="EquipmentStatusWarning" enabled="false" eventSet="1330010931" eventClear="2330010931" />
+    <ALID id="330010932" logicalName="PM1.AlarmSignalFTRinterlockreset" description="FTR interlock reset" category="EquipmentStatusWarning" enabled="false" eventSet="1330010932" eventClear="2330010932" />
+    <ALID id="330010933" logicalName="PM1.AlarmSignalFurnacepoweronoff" description="Furnace power on/off" category="EquipmentStatusWarning" enabled="false" eventSet="1330010933" eventClear="2330010933" />
+    <ALID id="330010934" logicalName="PM1.AlarmSignalFurnacepoweronswitch" description="Furnace power on switch" category="EquipmentStatusWarning" enabled="false" eventSet="1330010934" eventClear="2330010934" />
+    <ALID id="330010935" logicalName="PM1.AlarmSignalFurnacetransformertempsw" description="Furnace transformer temp sw" category="EquipmentStatusWarning" enabled="false" eventSet="1330010935" eventClear="2330010935" />
+    <ALID id="330010936" logicalName="PM1.AlarmSignalGasboxexhaustpressurealarm1st" description="Gas box exhaust pressure alarm 1st" category="EquipmentStatusWarning" enabled="false" eventSet="1330010936" eventClear="2330010936" />
+    <ALID id="330010937" logicalName="PM1.AlarmSignalGasboxexhaustpressurealarm2nd" description="Gas box exhaust pressure alarm 2nd" category="EquipmentStatusWarning" enabled="false" eventSet="1330010937" eventClear="2330010937" />
+    <ALID id="330010938" logicalName="PM1.AlarmSignalGasboxinterlockbuttonled" description="Gas box interlock button led" category="EquipmentStatusWarning" enabled="false" eventSet="1330010938" eventClear="2330010938" />
+    <ALID id="330010939" logicalName="PM1.AlarmSignalGasboxinterlockresetbutton" description="Gas box interlock reset button" category="EquipmentStatusWarning" enabled="false" eventSet="1330010939" eventClear="2330010939" />
+    <ALID id="330010940" logicalName="PM1.AlarmSignalGD02001fault" description="GD02001 fault" category="EquipmentStatusWarning" enabled="false" eventSet="1330010940" eventClear="2330010940" />
+    <ALID id="330010941" logicalName="PM1.AlarmSignalGD02001HCL1gasleak1stalarm" description="GD02001 HCL-1 gas leak 1st alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010941" eventClear="2330010941" />
+    <ALID id="330010942" logicalName="PM1.AlarmSignalGD02001HCL1gasleak2ndalarm" description="GD02001 HCL-1 gas leak 2nd alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010942" eventClear="2330010942" />
+    <ALID id="330010943" logicalName="PM1.AlarmSignalGD02002fault" description="GD02002 fault" category="EquipmentStatusWarning" enabled="false" eventSet="1330010943" eventClear="2330010943" />
+    <ALID id="330010944" logicalName="PM1.AlarmSignalGD02002HCL2gasleak1stalarm" description="GD02002 HCL-2 gas leak 1st alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010944" eventClear="2330010944" />
+    <ALID id="330010945" logicalName="PM1.AlarmSignalGD02002HCL2gasleak2ndalarm" description="GD02002 HCL-2 gas leak 2nd alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010945" eventClear="2330010945" />
+    <ALID id="330010946" logicalName="PM1.AlarmSignalGD02003fault" description="GD02003 fault" category="EquipmentStatusWarning" enabled="false" eventSet="1330010946" eventClear="2330010946" />
+    <ALID id="330010947" logicalName="PM1.AlarmSignalGD02003NH31gasleak1stalarm" description="GD02003 NH3-1 gas leak 1st alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010947" eventClear="2330010947" />
+    <ALID id="330010948" logicalName="PM1.AlarmSignalGD02003NH31gasleak2ndalarm" description="GD02003 NH3-1 gas leak 2nd alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010948" eventClear="2330010948" />
+    <ALID id="330010949" logicalName="PM1.AlarmSignalGD02004fault" description="GD02004 fault" category="EquipmentStatusWarning" enabled="false" eventSet="1330010949" eventClear="2330010949" />
+    <ALID id="330010950" logicalName="PM1.AlarmSignalGD02004NH32gasleak1stalarm" description="GD02004 NH3-2 gas leak 1st alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010950" eventClear="2330010950" />
+    <ALID id="330010951" logicalName="PM1.AlarmSignalGD02004NH32gasleak2ndalarm" description="GD02004 NH3-2 gas leak 2nd alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010951" eventClear="2330010951" />
+    <ALID id="330010952" logicalName="PM1.AlarmSignalGD02005F21gasleak1stalarm" description="GD02005 F2-1 gas leak 1st alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010952" eventClear="2330010952" />
+    <ALID id="330010953" logicalName="PM1.AlarmSignalGD02005F21gasleak2ndalarm" description="GD02005 F2-1 gas leak 2nd alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010953" eventClear="2330010953" />
+    <ALID id="330010954" logicalName="PM1.AlarmSignalGD02005fault" description="GD02005 fault" category="EquipmentStatusWarning" enabled="false" eventSet="1330010954" eventClear="2330010954" />
+    <ALID id="330010955" logicalName="PM1.AlarmSignalGD02006F22gasleak1stalarm" description="GD02006 F2-2 gas leak 1st alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010955" eventClear="2330010955" />
+    <ALID id="330010956" logicalName="PM1.AlarmSignalGD02006F22gasleak2ndalarm" description="GD02006 F2-2 gas leak 2nd alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010956" eventClear="2330010956" />
+    <ALID id="330010957" logicalName="PM1.AlarmSignalGD02006fault" description="GD02006 fault" category="EquipmentStatusWarning" enabled="false" eventSet="1330010957" eventClear="2330010957" />
+    <ALID id="330010958" logicalName="PM1.AlarmSignalGD02007fault" description="GD02007 fault" category="EquipmentStatusWarning" enabled="false" eventSet="1330010958" eventClear="2330010958" />
+    <ALID id="330010959" logicalName="PM1.AlarmSignalGD02007NO1gasleak1stalarm" description="GD02007 NO-1 gas leak 1st alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010959" eventClear="2330010959" />
+    <ALID id="330010960" logicalName="PM1.AlarmSignalGD02007NO1gasleak2ndalarm" description="GD02007 NO-1 gas leak 2nd alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010960" eventClear="2330010960" />
+    <ALID id="330010961" logicalName="PM1.AlarmSignalGD02008fault" description="GD02008 fault" category="EquipmentStatusWarning" enabled="false" eventSet="1330010961" eventClear="2330010961" />
+    <ALID id="330010962" logicalName="PM1.AlarmSignalGD02008NO2gasleak1stalarm" description="GD02008 NO-2 gas leak 1st alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010962" eventClear="2330010962" />
+    <ALID id="330010963" logicalName="PM1.AlarmSignalGD02008NO2gasleak2ndalarm" description="GD02008 NO-2 gas leak 2nd alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010963" eventClear="2330010963" />
+    <ALID id="330010964" logicalName="PM1.AlarmSignalGD02009C3H61gasleak1stalarm" description="GD02009 C3H6-1 gas leak 1st alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010964" eventClear="2330010964" />
+    <ALID id="330010965" logicalName="PM1.AlarmSignalGD02009C3H61gasleak2ndalarm" description="GD02009 C3H6-1 gas leak 2nd alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010965" eventClear="2330010965" />
+    <ALID id="330010966" logicalName="PM1.AlarmSignalGD02009fault" description="GD02009 fault" category="EquipmentStatusWarning" enabled="false" eventSet="1330010966" eventClear="2330010966" />
+    <ALID id="330010967" logicalName="PM1.AlarmSignalGD02010C3H62gasleak1stalarm" description="GD02010 C3H6-2 gas leak 1st alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010967" eventClear="2330010967" />
+    <ALID id="330010968" logicalName="PM1.AlarmSignalGD02010C3H62gasleak2ndalarm" description="GD02010 C3H6-2 gas leak 2nd alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010968" eventClear="2330010968" />
+    <ALID id="330010969" logicalName="PM1.AlarmSignalGD02010fault" description="GD02010 fault" category="EquipmentStatusWarning" enabled="false" eventSet="1330010969" eventClear="2330010969" />
+    <ALID id="330010970" logicalName="PM1.AlarmSignalGD02011DMA1gasleak1stalarm" description="GD02011 DMA-1 gas leak 1st alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010970" eventClear="2330010970" />
+    <ALID id="330010971" logicalName="PM1.AlarmSignalGD02011DMA1gasleak2ndalarm" description="GD02011 DMA-1 gas leak 2nd alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010971" eventClear="2330010971" />
+    <ALID id="330010972" logicalName="PM1.AlarmSignalGD02011fault" description="GD02011 fault" category="EquipmentStatusWarning" enabled="false" eventSet="1330010972" eventClear="2330010972" />
+    <ALID id="330010973" logicalName="PM1.AlarmSignalGD02012DMA2gasleak1stalarm" description="GD02012 DMA-2 gas leak 1st alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010973" eventClear="2330010973" />
+    <ALID id="330010974" logicalName="PM1.AlarmSignalGD02012DMA2gasleak2ndalarm" description="GD02012 DMA-2 gas leak 2nd alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010974" eventClear="2330010974" />
+    <ALID id="330010975" logicalName="PM1.AlarmSignalGD02012fault" description="GD02012 fault" category="EquipmentStatusWarning" enabled="false" eventSet="1330010975" eventClear="2330010975" />
+    <ALID id="330010976" logicalName="PM1.AlarmSignalHPMvalvepoweronoff" description="HPM valve power on/off" category="EquipmentStatusWarning" enabled="false" eventSet="1330010976" eventClear="2330010976" />
+    <ALID id="330010977" logicalName="PM1.AlarmSignalLD02001LSCleakalarm" description="LD02001 LSC leak alarm" category="EquipmentStatusWarning" enabled="false" eventSet="1330010977" eventClear="2330010977" />
+    <ALID id="330010978" logicalName="PM1.AlarmSignalLD03001exhaustboxwaterleakupside" description="LD03001 exhaust box water leak (up-side)" category="EquipmentStatusWarning" enabled="false" eventSet="1330010978" eventClear="2330010978" />
+    <ALID id="330010979" logicalName="PM1.AlarmSignalLD03002waterleakdownside" description="LD03002 water leak (down-side)" category="EquipmentStatusWarning" enabled="false" eventSet="1330010979" eventClear="2330010979" />
+    <ALID id="330010980" logicalName="PM1.AlarmSignalLD05001Magneticfluidleak" description="LD05001 Magnetic fluid leak" category="EquipmentStatusWarning" enabled="false" eventSet="1330010980" eventClear="2330010980" />
+    <ALID id="330010981" logicalName="PM1.AlarmSignalLD05002Coolingwaterleak" description="LD05002 Cooling water leak" category="EquipmentStatusWarning" enabled="false" eventSet="1330010981" eventClear="2330010981" />
+    <ALID id="330010982" logicalName="PM1.AlarmSignalLD05003RHCleak" description="LD05003 RHC leak" category="EquipmentStatusWarning" enabled="false" eventSet="1330010982" eventClear="2330010982" />
+    <ALID id="330010983" logicalName="PM1.AlarmSignalLightcurtainfault" description="Light curtain fault" category="EquipmentStatusWarning" enabled="false" eventSet="1330010983" eventClear="2330010983" />
+    <ALID id="330010984" logicalName="PM1.AlarmSignalLightcurtainidel" description="Light curtain idel" category="EquipmentStatusWarning" enabled="false" eventSet="1330010984" eventClear="2330010984" />
+    <ALID id="330010985" logicalName="PM1.AlarmSignalLightcurtainOSSD1" description="Light curtain OSSD1" category="EquipmentStatusWarning" enabled="false" eventSet="1330010985" eventClear="2330010985" />
+    <ALID id="330010986" logicalName="PM1.AlarmSignalLightcurtainOSSD2" description="Light curtain OSSD2" category="EquipmentStatusWarning" enabled="false" eventSet="1330010986" eventClear="2330010986" />
+    <ALID id="330010987" logicalName="PM1.AlarmSignalLoadingareaEMS" description="Loading area EMS" category="EquipmentStatusWarning" enabled="false" eventSet="1330010987" eventClear="2330010987" />
+    <ALID id="330010988" logicalName="PM1.AlarmSignalPowerboxfiredetector" description="Power box fire detector" category="EquipmentStatusWarning" enabled="false" eventSet="1330010988" eventClear="2330010988" />
+    <ALID id="330010989" logicalName="PM1.AlarmSignalPowerboxinterlockbuttonled" description="Power box interlock button led" category="EquipmentStatusWarning" enabled="false" eventSet="1330010989" eventClear="2330010989" />
+    <ALID id="330010990" logicalName="PM1.AlarmSignalPowerboxinterlockresetbutton" description="Power box interlock reset button" category="EquipmentStatusWarning" enabled="false" eventSet="1330010990" eventClear="2330010990" />
+    <ALID id="330010991" logicalName="PM1.AlarmSignalSCRONOFFSWITCH" description="SCR ON/OFF SWITCH" category="EquipmentStatusWarning" enabled="false" eventSet="1330010991" eventClear="2330010991" />
+    <ALID id="330010992" logicalName="PM1.AlarmSignalSL02001gasboxdoorsw11" description="SL02001 gas box door sw1-1" category="EquipmentStatusWarning" enabled="false" eventSet="1330010992" eventClear="2330010992" />
+    <ALID id="330010993" logicalName="PM1.AlarmSignalSL02001gasboxdoorsw12" description="SL02001 gas box door sw1-2" category="EquipmentStatusWarning" enabled="false" eventSet="1330010993" eventClear="2330010993" />
+    <ALID id="330010994" logicalName="PM1.AlarmSignalSL02002gasboxdoorsw11" description="SL02002 gas box door sw1-1" category="EquipmentStatusWarning" enabled="false" eventSet="1330010994" eventClear="2330010994" />
+    <ALID id="330010995" logicalName="PM1.AlarmSignalSL02002gasboxdoorsw12" description="SL02002 gas box door sw1-2" category="EquipmentStatusWarning" enabled="false" eventSet="1330010995" eventClear="2330010995" />
+    <ALID id="330010996" logicalName="PM1.AlarmSignalSL05001LAdoorsw1" description="SL05001 LA door sw1" category="EquipmentStatusWarning" enabled="false" eventSet="1330010996" eventClear="2330010996" />
+    <ALID id="330010997" logicalName="PM1.AlarmSignalSL05002LAdoorsw2" description="SL05002 LA door sw2" category="EquipmentStatusWarning" enabled="false" eventSet="1330010997" eventClear="2330010997" />
+    <ALID id="330010998" logicalName="PM1.AlarmSignalSL05004LAfurnacedoorsw" description="SL05004 LA furnace door sw" category="EquipmentStatusWarning" enabled="false" eventSet="1330010998" eventClear="2330010998" />
+    <ALID id="330010999" logicalName="PM1.AlarmSignalSMK01001detectorfault" description="SMK01001 detector fault" category="EquipmentStatusWarning" enabled="false" eventSet="1330010999" eventClear="2330010999" />
+    <ALID id="330011000" logicalName="PM1.AlarmSignalSMK01001detectoroperator" description="SMK01001 detector operator" category="EquipmentStatusWarning" enabled="false" eventSet="1330011000" eventClear="2330011000" />
+    <ALID id="330011001" logicalName="PM1.AlarmSignalTS05001FFUtempsw" description="TS05001 FFU temp sw" category="EquipmentStatusWarning" enabled="false" eventSet="1330011001" eventClear="2330011001" />
+    <ALID id="330011002" logicalName="PM1.AlarmSignalTS05002Capinsidetempsw" description="TS05002 Cap inside temp sw" category="EquipmentStatusWarning" enabled="false" eventSet="1330011002" eventClear="2330011002" />
+    <ALID id="330011003" logicalName="PM1.AlarmSignalTS05003Capoutsidetempsw" description="TS05003 Cap outside temp sw" category="EquipmentStatusWarning" enabled="false" eventSet="1330011003" eventClear="2330011003" />
+    <ALID id="330011004" logicalName="PM1.AlarmSignalTS05004Raxisrotationtempsw" description="TS05004 R axis rotation temp sw" category="EquipmentStatusWarning" enabled="false" eventSet="1330011004" eventClear="2330011004" />
+    <ALID id="330011005" logicalName="PM1.AlarmSignalTS05005RHCtempsw" description="TS05005 RHC temp sw" category="EquipmentStatusWarning" enabled="false" eventSet="1330011005" eventClear="2330011005" />
+    <ALID id="330011006" logicalName="PM1.AlarmSignalTS05006furnacetempsw" description="TS05006 furnace temp sw" category="EquipmentStatusWarning" enabled="false" eventSet="1330011006" eventClear="2330011006" />
+    <ALID id="330011007" logicalName="PM1.AlarmSignalVFD01001EDM" description="VFD01001 EDM" category="EquipmentStatusWarning" enabled="false" eventSet="1330011007" eventClear="2330011007" />
+    <ALID id="330011008" logicalName="PM1.AlarmSignalVFDenable" description="VFD enable" category="EquipmentStatusWarning" enabled="false" eventSet="1330011008" eventClear="2330011008" />
+    <ALID id="330011009" logicalName="PM1.AlarmSignalWaferrobotEMS" description="Wafer robot EMS" category="EquipmentStatusWarning" enabled="false" eventSet="1330011009" eventClear="2330011009" />
+    <ALID id="330011010" logicalName="PM1.AlarmSignalWTRenable1" description="WTR enable1" category="EquipmentStatusWarning" enabled="false" eventSet="1330011010" eventClear="2330011010" />
+    <ALID id="330011011" logicalName="PM1.AlarmSignalWTRenable2" description="WTR enable2" category="EquipmentStatusWarning" enabled="false" eventSet="1330011011" eventClear="2330011011" />
+    <ALID id="330011012" logicalName="PM1.AlarmSignalWTRinterlockreset" description="WTR interlock reset" category="EquipmentStatusWarning" enabled="false" eventSet="1330011012" eventClear="2330011012" />
     <ALID id="330020001" logicalName="PM1.AlarmHighLimit.AI_APCExternalHeaterTempPV" description="APC external heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020001" eventClear="2330020001" />
     <ALID id="330020002" logicalName="PM1.AlarmHighLimit.AI_APCRingHeaterTempPV" description="APC ring heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020002" eventClear="2330020002" />
     <ALID id="330020003" logicalName="PM1.AlarmHighLimit.AI_CapHeaterTempPV" description="Cap heater Temp.PV High Limit" category="EquipmentStatusWarning" enabled="false" eventSet="1330020003" eventClear="2330020003" />

Furnace/FurnaceUI/Views/Maintenances/LPSensorView.xaml

@@ -28,9 +28,13 @@
     </UserControl.Resources>
     <Border Background="#DAE5F1">
         <TabControl SelectedIndex="{Binding TabSelectIndex,UpdateSourceTrigger=PropertyChanged}">
-            <TabItem Visibility="{Binding LP1BorderVisibility,UpdateSourceTrigger=PropertyChanged,Converter={StaticResource bool2VisibilityConverter}}" Width="70" Height="50">
+            <TabItem Visibility="{Binding LP1BorderVisibility,UpdateSourceTrigger=PropertyChanged,Converter={StaticResource bool2VisibilityConverter}}" Width="90" Height="50">
                 <TabItem.Header>
-                    <TextBlock FontSize="20" Text="LP1"/>
+                    <StackPanel Orientation="Horizontal">
+                        <deviceControl:AITSensor    CustomColorOff="#07FF07"     CustomColorOn="#808080"        IsCustomRender="True"    GreenColor="True"    LightOnValue="{Binding  LP1CarrierInfo.IsEmpty}"/>
+                        <TextBlock FontSize="20" Margin="10,0,0,0" Text="LP1"/>
+                    </StackPanel>
+                 
                 </TabItem.Header>
                 <Grid>
                     <Grid.RowDefinitions>
@@ -40,7 +44,12 @@
                         <RowDefinition></RowDefinition>
                     </Grid.RowDefinitions>
                     <Border Height="330" Grid.Row="1" BorderBrush="#ccc" BorderThickness="1">
-                        <Image  Source="pack://application:,,,/MECF.Framework.Common;component/Resources/LoadPort.png" />
+                        <Canvas>
+                            <Border   Panel.ZIndex="1"  Visibility="{Binding LP1CarrierInfo.IsEmpty,UpdateSourceTrigger=PropertyChanged,Converter={StaticResource bool2VisibilityConverter}}"   Opacity="0.8" Height="330" Width="475" Background="#ccc" >
+
+                            </Border>
+                            <Image  Height="330" Width="475"  Source="pack://application:,,,/MECF.Framework.Common;component/Resources/LoadPort.png" />
+                        </Canvas>
 
                     </Border>
                     <Border  Height="110" Grid.Row="2"  Background="#DAE5F1">
@@ -233,9 +242,13 @@
                     </Border>
                 </Grid>
             </TabItem>
-            <TabItem Visibility="{Binding LP2BorderVisibility,UpdateSourceTrigger=PropertyChanged,Converter={StaticResource bool2VisibilityConverter}}" Width="70" Height="50" >
+            <TabItem Visibility="{Binding LP2BorderVisibility,UpdateSourceTrigger=PropertyChanged,Converter={StaticResource bool2VisibilityConverter}}" Width="90" Height="50" >
                 <TabItem.Header>
-                    <TextBlock FontSize="20" Text="LP2"/>
+                    <StackPanel Orientation="Horizontal">
+                        <deviceControl:AITSensor    CustomColorOff="#07FF07"     CustomColorOn="#808080"        IsCustomRender="True"    GreenColor="True"    LightOnValue="{Binding  LP2CarrierInfo.IsEmpty}"/>
+                        <TextBlock FontSize="20" Margin="10,0,0,0" Text="LP2"/>
+                    </StackPanel>
+
                 </TabItem.Header>
                 <Grid>
                     <Grid.RowDefinitions>
@@ -245,8 +258,13 @@
                         <RowDefinition></RowDefinition>
                     </Grid.RowDefinitions>
                     <Border Height="330" Grid.Row="1" BorderBrush="#ccc" BorderThickness="1">
-                        <Image  Source="pack://application:,,,/MECF.Framework.Common;component/Resources/LoadPort.png" />
+                        <Canvas>
+                            <Border  Panel.ZIndex="1"  Visibility="{Binding LP2CarrierInfo.IsEmpty,UpdateSourceTrigger=PropertyChanged,Converter={StaticResource bool2VisibilityConverter}}"   Opacity="0.5" Height="330" Width="475" Background="#ccc" >
+
+                            </Border>
+                            <Image  Height="330" Width="475"  Source="pack://application:,,,/MECF.Framework.Common;component/Resources/LoadPort.png" />
 
+                        </Canvas>
                     </Border>
                     <Border  Height="110" Grid.Row="2"  Background="#DAE5F1">
                         <StackPanel>
@@ -436,9 +454,12 @@
                     </Border>
                 </Grid>
             </TabItem>
-            <TabItem Visibility="{Binding LP3BorderVisibility,UpdateSourceTrigger=PropertyChanged,Converter={StaticResource bool2VisibilityConverter}}" Width="70" Height="50">
+            <TabItem Visibility="{Binding LP3BorderVisibility,UpdateSourceTrigger=PropertyChanged,Converter={StaticResource bool2VisibilityConverter}}" Width="90" Height="50">
                 <TabItem.Header>
-                    <TextBlock FontSize="20" Text="LP3"/>
+                    <StackPanel Orientation="Horizontal">
+                        <deviceControl:AITSensor    CustomColorOff="#07FF07"     CustomColorOn="#808080"        IsCustomRender="True"    GreenColor="True"    LightOnValue="{Binding  LP3CarrierInfo.IsEmpty}"/>
+                        <TextBlock FontSize="20" Margin="10,0,0,0" Text="LP3"/>
+                    </StackPanel>
                 </TabItem.Header>
                 <Grid>
                     <Grid.RowDefinitions>
@@ -448,8 +469,13 @@
                         <RowDefinition></RowDefinition>
                     </Grid.RowDefinitions>
                     <Border Height="330" Grid.Row="1" BorderBrush="#ccc" BorderThickness="1">
-                        <Image  Source="pack://application:,,,/MECF.Framework.Common;component/Resources/LoadPort.png" />
+                        <Canvas>
+                            <Border  Panel.ZIndex="1"   Visibility="{Binding LP4CarrierInfo.IsEmpty,UpdateSourceTrigger=PropertyChanged,Converter={StaticResource bool2VisibilityConverter}}"   Opacity="0.8" Height="330" Width="475" Background="#ccc" >
 
+                            </Border>
+                            <Image  Height="330" Width="475"  Source="pack://application:,,,/MECF.Framework.Common;component/Resources/LoadPort.png" />
+
+                        </Canvas>
                     </Border>
                     <Border  Height="110" Grid.Row="2"  Background="#DAE5F1">
                         <StackPanel>
@@ -639,9 +665,12 @@
                     </Border>
                 </Grid>
             </TabItem>
-            <TabItem Visibility="{Binding LP4BorderVisibility,UpdateSourceTrigger=PropertyChanged,Converter={StaticResource bool2VisibilityConverter}}" Width="70" Height="50">
+            <TabItem Visibility="{Binding LP4BorderVisibility,UpdateSourceTrigger=PropertyChanged,Converter={StaticResource bool2VisibilityConverter}}" Width="90" Height="50">
                 <TabItem.Header>
-                    <TextBlock FontSize="20" Text="LP4"/>
+                    <StackPanel Orientation="Horizontal">
+                        <deviceControl:AITSensor    CustomColorOff="#07FF07"     CustomColorOn="#808080"        IsCustomRender="True"    GreenColor="True"    LightOnValue="{Binding  LP4CarrierInfo.IsEmpty}"/>
+                        <TextBlock FontSize="20" Margin="10,0,0,0" Text="LP4"/>
+                    </StackPanel>
                 </TabItem.Header>
                 <Grid>
                     <Grid.RowDefinitions>
@@ -651,8 +680,13 @@
                         <RowDefinition></RowDefinition>
                     </Grid.RowDefinitions>
                     <Border Height="330" Grid.Row="1" BorderBrush="#ccc" BorderThickness="1">
-                        <Image  Source="pack://application:,,,/MECF.Framework.Common;component/Resources/LoadPort.png" />
+                        <Canvas>
+                            <Border   Panel.ZIndex="1"  Visibility="{Binding LP4CarrierInfo.IsEmpty,UpdateSourceTrigger=PropertyChanged,Converter={StaticResource bool2VisibilityConverter}}"   Opacity="0.8" Height="330" Width="475" Background="#ccc" >
+
+                            </Border>
+                            <Image  Height="330" Width="475"  Source="pack://application:,,,/MECF.Framework.Common;component/Resources/LoadPort.png" />
 
+                        </Canvas>
                     </Border>
                     <Border  Height="110" Grid.Row="2"  Background="#DAE5F1">
                         <StackPanel>