替换若干IoAlarmSingle/更新 N2purge设备配置/更新相关点位

git-svn-id: http://10.4.3.168:50001/svn/Furnace@96 dbcde07d-dcf5-c148-8a84-ac3097b7778e

FrameworkLocal/Common/CommonData/SorterDefines/N2PurgeModeEnum.cs

@@ -23,7 +23,6 @@ namespace MECF.Framework.Common.CommonData.SorterDefines
         Manual_phase4,
         Manual_phase5,
 
-        ResetAll,
 
     }
 }

Furnace/FurnaceRT/Config/DisplayReplace.xml

@@ -190,10 +190,10 @@
 		<Display Name="PM1.IsCREFOn" DisplayName="Valve.IsCREFOn" />
 		<Display Name="PM1.IsDEPOOn" DisplayName="Valve.IsDEPOOn" />
 		<Display Name="PM1.IsError" DisplayName="Valve.IsError" />
-		<Display Name="PM1.ValveCommonBoxPressureRegulatingCylinder.SetPoint" DisplayName="Valve.Common Box Pressure Regulating.Set" />
-		<Display Name="PM1.ValveCommonBoxPressureRegulatingCylinder.Feedback" DisplayName="Valve.Common Box Pressure Regulating.Actual" />
-		<Display Name="PM1.ValveLABacksideDoorCylinderControl.SetPoint" DisplayName="Valve.LA Backside Door.Set" />
-		<Display Name="PM1.ValveLABacksideDoorCylinderControl.Feedback" DisplayName="Valve.LA Backside Door.Actual" />
+		<Display Name="PM1.ValveAV201.SetPoint" DisplayName="Valve.Common Box Pressure Regulating.Set" />
+		<Display Name="PM1.ValveAV201.Feedback" DisplayName="Valve.Common Box Pressure Regulating.Actual" />
+		<Display Name="PM1.ValveAV202.SetPoint" DisplayName="Valve.LA Backside Door.Set" />
+		<Display Name="PM1.ValveAV202.Feedback" DisplayName="Valve.LA Backside Door.Actual" />
 		<Display Name="PM1.ValveLAExhaustDamper.SetPoint" DisplayName="Valve.LA Exhaust Damper.Set" />
 		<Display Name="PM1.ValveLAExhaustDamper.Feedback" DisplayName="Valve.LA Exhaust Damper.Actual" />
 		<Display Name="PM1.ValveLADamper.SetPoint" DisplayName="Valve.LA Damper.Set" />
@@ -650,10 +650,10 @@
 		<Display Name="PM1.IsCREFOn" DisplayName="Valve.IsCREFOn" />
 		<Display Name="PM1.IsDEPOOn" DisplayName="Valve.IsDEPOOn" />
 		<Display Name="PM1.IsError" DisplayName="Valve.IsError" />
-		<Display Name="PM1.ValveCommonBoxPressureRegulatingCylinder.SetPoint" DisplayName="Valve.Common Box Pressure Regulating.Set" />
-		<Display Name="PM1.ValveCommonBoxPressureRegulatingCylinder.Feedback" DisplayName="Valve.Common Box Pressure Regulating.Actual" />
-		<Display Name="PM1.ValveLABacksideDoorCylinderControl.SetPoint" DisplayName="Valve.LA Backside Door.Set" />
-		<Display Name="PM1.ValveLABacksideDoorCylinderControl.Feedback" DisplayName="Valve.LA Backside Door.Actual" />
+		<Display Name="PM1.ValveAV201.SetPoint" DisplayName="Valve.Common Box Pressure Regulating.Set" />
+		<Display Name="PM1.ValveAV201.Feedback" DisplayName="Valve.Common Box Pressure Regulating.Actual" />
+		<Display Name="PM1.ValveAV202.SetPoint" DisplayName="Valve.LA Backside Door.Set" />
+		<Display Name="PM1.ValveAV202.Feedback" DisplayName="Valve.LA Backside Door.Actual" />
 		<Display Name="PM1.ValveLAExhaustDamper.SetPoint" DisplayName="Valve.LA Exhaust Damper.Set" />
 		<Display Name="PM1.ValveLAExhaustDamper.Feedback" DisplayName="Valve.LA Exhaust Damper.Actual" />
 		<Display Name="PM1.ValveLADamper.SetPoint" DisplayName="Valve.LA Damper.Set" />

Furnace/FurnaceRT/Config/ELK/System.sccfg

@@ -52,64 +52,6 @@
 			<config default="true" name="IsRunInParallelMode"  description="IsRunInParallelMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
 		</configs>
 
-		<configs name="FFU" visible="false">
-			<config default="350" name="LSPEED" description="" max="9999" min="0" paramter="" tag="" unit=""  type="Double"   />
-			<config default="2500" name="HSPEED" description="" max="9999" min="0" paramter="" tag="" unit=""  type="Double"   />
-			<configs name="FFU1">
-				<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
-			</configs>
-			<configs name="FFU2">
-				<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
-			</configs>
-			<configs name="FFU3">
-				<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
-			</configs>
-			<configs name="FFU4">
-				<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
-			</configs>
-			<configs name="FFU5">
-				<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
-			</configs>
-			<configs name="FFU6">
-				<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
-			</configs>
-			<configs name="FFU7">
-				<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
-			</configs>
-			<configs name="FFU8">
-				<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
-			</configs>
-			<configs name="FFU9">
-				<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
-			</configs>
-			<configs name="FFU10">
-				<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
-			</configs>
-			<configs name="FFU11">
-				<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
-			</configs>
-			<configs name="FFU12">
-				<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
-			</configs>
-			<configs name="FFU13">
-				<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
-			</configs>
-			<configs name="FFU14">
-				<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
-			</configs>
-			<configs name="FFU15">
-				<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
-			</configs>
-			<configs name="FFU16">
-				<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
-			</configs>
-			<configs name="FFU17">
-				<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
-			</configs>
-			<configs name="FFU18">
-				<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
-			</configs>
-		</configs>
 
 		<configs name="SetUp" display="" >
 			<config default="ELK" name="ToolType"  description="Tool Type" max="" min="" paramter="NTP;ELK;SiBCN;TiN" tag="ReadOnlySelection" unit="" type="String" />
@@ -472,6 +414,65 @@
 			<config default="30" name="TP6" description="TP6 time out" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
 		</configs>
 	</configs>
+	<configs name="FFU" visible="false">
+		<config default="350" name="LSPEED" description="" max="9999" min="0" paramter="" tag="" unit=""  type="Double"   />
+		<config default="2500" name="HSPEED" description="" max="9999" min="0" paramter="" tag="" unit=""  type="Double"   />
+		<configs name="FFU1">
+			<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
+		</configs>
+		<configs name="FFU2">
+			<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
+		</configs>
+		<configs name="FFU3">
+			<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
+		</configs>
+		<configs name="FFU4">
+			<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
+		</configs>
+		<configs name="FFU5">
+			<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
+		</configs>
+		<configs name="FFU6">
+			<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
+		</configs>
+		<configs name="FFU7">
+			<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
+		</configs>
+		<configs name="FFU8">
+			<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
+		</configs>
+		<configs name="FFU9">
+			<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
+		</configs>
+		<configs name="FFU10">
+			<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
+		</configs>
+		<configs name="FFU11">
+			<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
+		</configs>
+		<configs name="FFU12">
+			<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
+		</configs>
+		<configs name="FFU13">
+			<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
+		</configs>
+		<configs name="FFU14">
+			<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
+		</configs>
+		<configs name="FFU15">
+			<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
+		</configs>
+		<configs name="FFU16">
+			<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
+		</configs>
+		<configs name="FFU17">
+			<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
+		</configs>
+		<configs name="FFU18">
+			<config default="2500" name="SetSpeed" description=" set speed" max="" min="" paramter="" tag="" unit=""  type="String"   />
+		</configs>
+	</configs>
+
 	<configs name="WaferRobot">
 		<config default="10" name="PickTimeout" description="Pick Time Out" max="360" min="1" paramter="" tag="" unit="s" type="Integer" />
 		<config default="10" name="HomeTimeout" description="Home Time Out" max="360" min="1" paramter="" tag="" unit="s" type="Integer" />
@@ -846,66 +847,58 @@
 				<config  type="Bool"   default="true"  name="ValveAV56"								   />
 				<config  type="Bool"   default="true"  name="ValveAV57"								   />
 				<config  type="Bool"   default="false" name="ValveAV65"								   />
-				<config  type="Bool"   default="false" name="ValveSV532"								   />
-				<config  type="Bool"   default="true" name="ValveSV531"								   />
+				<config  type="Bool"   default="false" name="ValveAV66"								   />
+				<config  type="Bool"   default="true"  name="ValveSV227"								   />
 				<config  type="Bool"   default="false" name="ValveAV202"								   />
-				<config  type="Bool"   default="false" name="TrigMS501"								   />
-				<config  type="Bool"   default="true"  name="TrigMS502"						   />
-				<config  type="Bool"   default="false" name="TrigMS503"						   />
-				<config  type="Bool"   default="true"  name="TrigMS504"								   />
+				<config  type="Bool"   default="false" name="ValveAV201"								   />
+				<config  type="Bool"   default="true"  name="TrigMS501"						   />
+				<config  type="Bool"   default="false" name="TrigMS520"								   />
+				<config  type="Bool"   default="false" name="TrigMS521"						   />
+				<config  type="Bool"   default="false" name="TrigMS522"						   />
 			</configs>
 			<configs name="Manual_phase2" visible="false">
 				<config  type="Double"   default="400"  name="MFC51"								   />
 				<config  type="Bool"   default="true"  name="ValveAV56"								   />
 				<config  type="Bool"   default="false"  name="ValveAV57"								   />
 				<config  type="Bool"   default="false" name="ValveAV65"								   />
-				<config  type="Bool"   default="false" name="ValveSV532"								   />
-				<config  type="Bool"   default="true" name="ValveSV531"								   />
+				<config  type="Bool"   default="false" name="ValveAV66"								   />
+				<config  type="Bool"   default="true" name="ValveSV227"								   />
 				<config  type="Bool"   default="false" name="ValveAV202"								   />
-				<config  type="Bool"   default="false" name="TrigMS501"								   />
-				<config  type="Bool"   default="true"  name="TrigMS502"						   />
-				<config  type="Bool"   default="false" name="TrigMS503"						   />
-				<config  type="Bool"   default="true"  name="TrigMS504"								   />
+				<config  type="Bool"   default="false"  name="ValveAV201"								   />
+				<config  type="Bool"   default="true"   name="TrigMS501"								   />
+				<config  type="Bool"   default="false"  name="TrigMS520"						   />
+				<config  type="Bool"   default="false"  name="TrigMS521"						   />
+				<config  type="Bool"   default="false"  name="TrigMS522"								   />
 			</configs>
 			<configs name="Manual_phase3" visible="false">
 				<config  type="Double"   default="200"  name="MFC51"								   />
 				<config  type="Bool"   default="false"  name="ValveAV56"								   />
 				<config  type="Bool"   default="false"  name="ValveAV57"								   />
 				<config  type="Bool"   default="true" name="ValveAV65"								   />
-				<config  type="Bool"   default="true" name="ValveSV532"								   />
-				<config  type="Bool"   default="true" name="ValveSV531"								   />
+				<config  type="Bool"   default="true" name="ValveAV66"								   />
+				<config  type="Bool"   default="true" name="ValveSV227"								   />
 				<config  type="Bool"   default="false" name="ValveAV202"								   />
-				<config  type="Bool"   default="true"  name="TrigMS501"								   />
-				<config  type="Bool"   default="true"  name="TrigMS502"						   />
-				<config  type="Bool"   default="true"  name="TrigMS503"						   />
-				<config  type="Bool"   default="true"  name="TrigMS504"								   />
+				<config  type="Bool"   default="true" name="ValveAV201"								   />
+				<config  type="Bool"   default="true" name="TrigMS501"								   />
+				<config  type="Bool"   default="true"  name="TrigMS520"						   />
+				<config  type="Bool"   default="true" name="TrigMS521"						   />
+				<config  type="Bool"   default="true"  name="TrigMS522"								   />
 			</configs>
 			<configs name="Manual_phase4" visible="false">
 				<config  type="Bool"   default="false"  name="ValveAV56"								   />
 				<config  type="Bool"   default="false"  name="ValveAV57"								   />
 				<config  type="Bool"   default="true" name="ValveAV65"								   />
-				<config  type="Bool"   default="true" name="ValveSV532"								   />
-				<config  type="Bool"   default="false" name="ValveSV531"								   />
+				<config  type="Bool"   default="true" name="ValveAV66"								   />
+				<config  type="Bool"   default="false" name="ValveSV227"								   />
 				<config  type="Bool"   default="true" name="ValveAV202"								   />
-				<config  type="Bool"   default="false"  name="TrigMS501"								   />
-				<config  type="Bool"   default="false"  name="TrigMS502"						   />
-				<config  type="Bool"   default="false"  name="TrigMS503"						   />
-				<config  type="Bool"   default="false"  name="TrigMS504"								   />
+				<config  type="Bool"   default="false" name="ValveAV201"								   />
+				<config  type="Bool"   default="false" name="TrigMS501"								   />
+				<config  type="Bool"   default="false"  name="TrigMS520"						   />
+				<config  type="Bool"   default="false" name="TrigMS521"						   />
+				<config  type="Bool"   default="false"  name="TrigMS522"								   />
 			</configs>
 
-			<configs name="ResetAll" visible="false">
-				<config  type="Double"   default="0"  name="MFC51"								   />
-				<config  type="Bool"   default="false"  name="ValveAV56"								   />
-				<config  type="Bool"   default="false"  name="ValveAV57"								   />
-				<config  type="Bool"   default="false" name="ValveAV65"								   />
-				<config  type="Bool"   default="false" name="ValveSV532"								   />
-				<config  type="Bool"   default="false" name="ValveSV531"								   />
-				<config  type="Bool"   default="false" name="ValveAV202"								   />
-				<config  type="Bool"   default="false" name="TrigLAinternalaircyclefan1switch"								   />
-				<config  type="Bool"   default="false"  name="TrigLAinternalaircyclefan2switch"						   />
-				<config  type="Bool"   default="false" name="TrigLAinternalaircyclefan3switch"						   />
-				<config  type="Bool"   default="false" name="TrigLAinternalaircyclefan4switch"								   />
-			</configs>
+
 			<configs name="N2PurgeAIRTo20PPM" visible="false">
 				<config  type="Bool"   default="true"  name="ValveAV56"								   />
 				<config  type="Bool"   default="true"  name="ValveAV57"								   />
@@ -918,7 +911,7 @@
 				<config  type="Bool"   default="false" name="ValveFIMS2N2Purge"						   />
 				<config  type="Bool"   default="false" name="ValveSV61"								   />
 				<config  type="Bool"   default="false" name="ValveSV62"								   />
-				<config  type="Bool"   default="false" name="ValveCommonBoxPressureRegulatingCylinder"  />
+				<config  type="Bool"   default="false" name="ValveAV201"  />
 			</configs>
 			<configs name="N2PurgeUnder20PPM" visible="false">
 				<config  type="Bool"   default="true"  name="ValveAV56"								   />
@@ -932,7 +925,7 @@
 				<config  type="Bool"   default="false" name="ValveFIMS2N2Purge"						   />
 				<config  type="Bool"   default="false" name="ValveSV61"								   />
 				<config  type="Bool"   default="false" name="ValveSV62"								   />
-				<config  type="Bool"   default="false" name="ValveCommonBoxPressureRegulatingCylinder"  />
+				<config  type="Bool"   default="false" name="ValveAV201"  />
 			</configs>
 			<configs name="AIR" visible="false">
 				<config  type="Bool"   default="false"  name="ValveAV56"								   />
@@ -946,7 +939,7 @@
 				<config  type="Bool"   default="false" name="ValveFIMS2N2Purge"						   />
 				<config  type="Bool"   default="false" name="ValveSV61"								   />
 				<config  type="Bool"   default="false" name="ValveSV62"								   />
-				<config  type="Bool"   default="true" name="ValveCommonBoxPressureRegulatingCylinder"  />
+				<config  type="Bool"   default="true" name="ValveAV201"  />
 			</configs>
 			<configs name="DoorOpen" visible="false">
 				<config  type="Bool"   default="false"  name="ValveAV56"								   />
@@ -960,7 +953,7 @@
 				<config  type="Bool"   default="false" name="ValveFIMS2N2Purge"						   />
 				<config  type="Bool"   default="false" name="ValveSV61"								   />
 				<config  type="Bool"   default="false" name="ValveSV62"								   />
-				<config  type="Bool"   default="true" name="ValveCommonBoxPressureRegulatingCylinder"  />
+				<config  type="Bool"   default="true" name="ValveAV201"  />
 			</configs>
 			<configs name="Foup1" visible="false">
 				<config  type="Bool"   default="true"  name="ValveAV56"								   />
@@ -974,7 +967,7 @@
 				<config  type="Bool"   default="false" name="ValveFIMS2N2Purge"						   />
 				<config  type="Bool"   default="true" name="ValveSV61"								   />
 				<config  type="Bool"   default="false" name="ValveSV62"								   />
-				<config  type="Bool"   default="false" name="ValveCommonBoxPressureRegulatingCylinder"  />
+				<config  type="Bool"   default="false" name="ValveAV201"  />
 			</configs>
 			<configs name="Foup2" visible="false">
 				<config  type="Bool"   default="true"  name="ValveAV56"								   />
@@ -988,7 +981,7 @@
 				<config  type="Bool"   default="true" name="ValveFIMS2N2Purge"						   />
 				<config  type="Bool"   default="true" name="ValveSV61"								   />
 				<config  type="Bool"   default="true" name="ValveSV62"								   />
-				<config  type="Bool"   default="false" name="ValveCommonBoxPressureRegulatingCylinder"  />
+				<config  type="Bool"   default="false" name="ValveAV201"  />
 			</configs>
 
 		</configs>

Furnace/FurnaceRT/Config/IO/ELK/DeviceModelPM.xml

@@ -661,9 +661,7 @@
 		<IoPressureMeter id="PressureGLBoxPG4" display="GLBoxPG4Pressure"  schematicId="GLBoxPG4Pressure" unit="Mpa" aiFeedback="AI_GLBoxPG4Pressure"  physical="0,15000" scale="-0.1,1" aioType="float"/>
 		<IoPressureMeter id="PressureGLBoxPG5" display="GLBoxPG5Pressure"  schematicId="GLBoxPG5Pressure" unit="Mpa" aiFeedback="AI_GLBoxPG5Pressure"  physical="0,15000" scale="-0.1,1" aioType="float"/>
 		<IoPressureMeter id="PressureGLBoxPG6" display="GLBoxPG6Pressure"  schematicId="GLBoxPG6Pressure" unit="Mpa" aiFeedback="AI_GLBoxPG6Pressure"  physical="0,15000" scale="-0.1,1" aioType="float"/>
-		<!--<IoPressureMeter id="PressureGasBoxUpperVG21" display="GasBoxUpperVG21Pressure"  schematicId="GasBoxUpperVG21Pressure" unit="Torr" aiFeedback="AI_GasBoxUpperVG21Pressure"  scale="0,1000" physical="0,15000" aioType="float"/>-->
-		<!--<IoPressureMeter id="PressureGasBoxUpperVG22" display="GasBoxUpperVG22Pressure"  schematicId="GasBoxUpperVG22Pressure" unit="Torr" aiFeedback="AI_GasBoxUpperVG22Pressure"  scale="0,1000" physical="0,15000" aioType="float"/>-->
-		<IoPressureMeter id="ConcentrationO2" display="O2Concentration"  schematicId="O2Concentration" unit="ppm" aiFeedback="AI_O2Concentration"  scale="0,10" physical="0,15000" aioType="float"/>
+			<IoPressureMeter id="ConcentrationO2" display="O2Concentration"  schematicId="O2Concentration" unit="ppm" aiFeedback="AI_O2Concentration"  scale="0,10" physical="0,15000" aioType="float"/>
 
 		<IoPressureMeter id="HeatingExhaustMS1" display="HeatingExhaustMS1"  schematicId="HeatingExhaustMS1" unit="pa" aiFeedback="AI_HeatingExhaustMS1"  physical="0,15000" scale="0,200" aioType="float"/>
 		<IoPressureMeter id="GasBoxExhaustMS2" display="GasBoxExhaustMS2"  schematicId="GasBoxExhaustMS2" unit="pa" aiFeedback="AI_GasBoxExhaustMS2"  physical="0,15000" scale="0,200" aioType="float"/>
@@ -711,58 +709,110 @@
 
 
 	<IoAlarmSignals classType="Aitex.Core.RT.Device.Unit.IoAlarmSignal" assembly="MECF.Framework.RT.EquipmentLibrary">
-		<IoAlarmSignal id="AlarmSignalO2ConcentrationHI"			diSignalsplay="O2ConcentrationHigh"				diSignal="DI_O2ConcentrationHI"			alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalO2ConcentrationLow"			diSignalsplay="O2ConcentrationLow"				diSignal="DI_O2ConcentrationLow"			alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalO2ConcentrationEcho1"		diSignalsplay="O2ConcentrationEcho1"			diSignal="DI_O2ConcentrationEcho1"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalO2ConcentrationEcho2"		diSignalsplay="O2ConcentrationEcho2"			diSignal="DI_O2ConcentrationEcho2"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalSMK1DetectorSensorOperates"		diSignalsplay="SMK1DetectorSensorOperates"			diSignal="DI_SMK1DetectorSensorOperates"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalSMK1DetectorSensorFireAlarm"		diSignalsplay="SMK1DetectorSensorFireAlarm"			diSignal="DI_SMK1DetectorFireAlarm"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalSMK1DetectorSensorFault"		diSignalsplay="SMK1DetectorSensorFault"			diSignal="DI_SMK1DetectorFault"		alarmTrigValue="true"/>
-
-		<IoAlarmSignal id="AlarmSignalHCL1GasLeak1stAlarm"		diSignalsplay="HCL-1 gas leak 1st alarm"			diSignal="DI_HCL1GasLeak1stAlarm"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalHCL1GasLeak2ndAlarm"		diSignalsplay="HCL-1 gas leak 2nd alarm"			diSignal="DI_HCL1GasLeak2ndAlarm"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalHCL2GasLeak1stAlarm"		diSignalsplay="HCL-2gas leak 1st alarm"			diSignal="DI_HCL2GasLeak1stAlarm"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalHCL2GasLeak2ndAlarm"		diSignalsplay="HCL-2gas leak 2nd alarm"			diSignal="DI_HCL2GasLeak2ndAlarm"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalNH31GasLeak1stAlarm"		diSignalsplay="NH3-1gas leak 1st alarm"			diSignal="DI_NH31GasLeak1stAlarm"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalNH31GasLeak2ndAlarm"		diSignalsplay="NH3-1gas leak 2nd alarm"			diSignal="DI_NH31GasLeak2ndAlarm"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalNH32GasLeak1stAlarm"		diSignalsplay="NH3-2gas leak 1st alarm"			diSignal="DI_NH32GasLeak1stAlarm"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalNH32GasLeak2ndAlarm"		diSignalsplay="NH3-2 gas leak 2nd alarm"			diSignal="DI_NH32GasLeak2ndAlarm"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalF21GasLeak1stAlarm"		diSignalsplay="F2-1 gas leak 1st alarm"			diSignal="DI_F21GasLeak1stAlarm"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalF21GasLeak2ndAlarm"		diSignalsplay="F2-1 gas leak 2nd alarm"			diSignal="DI_F21GasLeak2ndAlarm"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalF22GasLeak1stAlarm"		diSignalsplay="F2-2 gas leak 1st alarm"			diSignal="DI_F22GasLeak1stAlarm"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalF22GasLeak2ndAlarm"		diSignalsplay="F2-2 gas leak 2nd alarm"			diSignal="DI_F22GasLeak2ndAlarm"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalNO1GasLeak1stAlarm"		diSignalsplay="NO-1 gas leak 1st alarm"			diSignal="DI_NO1GasLeak1stAlarm"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalNO1GasLeak2ndAlarm"		diSignalsplay="NO-1 gas leak 2nd alarm"			diSignal="DI_NO1GasLeak2ndAlarm"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalNO2GasLeak1stAlarm"		diSignalsplay="NO-2 gas leak 1st alarm"			diSignal="DI_NO2GasLeak1stAlarm"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalNO2GasLeak2ndAlarm"		diSignalsplay="NO-2 gas leak 2nd alarm"			diSignal="DI_NO2GasLeak2ndAlarm"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalC3H61GasLeak1stAlarm"		diSignalsplay="C3H6-1 gas leak 1st alarm"			diSignal="DI_C3H61GasLeak1stAlarm"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalC3H61GasLeak2ndAlarm"		diSignalsplay="C3H6-1 gas leak 2nd alarm"			diSignal="DI_C3H61GasLeak2ndAlarm"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalC3H62GasLeak1stAlarm"		diSignalsplay="C3H6-2 gas leak 1st alarm"			diSignal="DI_C3H62GasLeak1stAlarm"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalC3H62GasLeak2ndAlarm"		diSignalsplay="C3H6-2 gas leak 2nd alarm"			diSignal="DI_C3H62GasLeak2ndAlarm"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalDMA1GasLeak1stAlarm"		diSignalsplay="DMA-1 gas leak 1st alarm"			diSignal="DI_DMA1GasLeak1stAlarm"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalDMA1GasLeak2ndAlarm"		diSignalsplay="DMA-1 gas leak 2nd alarm"			diSignal="DI_DMA1GasLeak2ndAlarm"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalDMA2GasLeak1stAlarm"		diSignalsplay="DMA-2gas leak 1st alarm"			diSignal="DI_DMA2GasLeak1stAlarm"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalDMA2GasLeak2ndAlarm"		diSignalsplay="DMA-2 gas leak 2nd alarm"			diSignal="DI_DMA2GasLeak2ndAlarm"		alarmTrigValue="true"/>
-
-		<IoAlarmSignal id="AlarmTS34RRotationTempSwAlarm"		diSignalsplay="TS34 R rotation temp. sw"			diSignal="DI_TS34RRotationTempSw"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmTS30CapInsideTempSwAlarm"		diSignalsplay="TS30 cap inside temp.sw"			diSignal="DI_TS30CapInsideTempSw"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmTS31capoutsidetemSwAlarm"		diSignalsplay="TS31 cap outside temp.sw"			diSignal="DI_TS31capoutsidetemSw"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmGasboxlowerdoorSwAlarm"		diSignalsplay="gas box lower door sw"			diSignal="DI_GasboxlowerdoorSw"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmGasboxupperdoorSwAlarm"		diSignalsplay="gas box upper door sw"			diSignal="DI_GasboxupperdoorSw"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmEXHboxwaterleakAlarm"		diSignalsplay="EXH box water leak"			diSignal="DI_EXHboxwaterleak"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmOPpanelEMO1Alarm"		diSignalsplay="OP panel EMO 1"			diSignal="DI_OPpanelEMO1"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmOPpanelEMO2Alarm"		diSignalsplay="OP panel EMO 2"			diSignal="DI_OPpanelEMO2"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmMainFurnaceTS306Alarm"		diSignalsplay="main furnace TS306"			diSignal="DI_MainFurnaceTS306"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmHeaterRoomSWS11S12Alarm"		diSignalsplay="heater room SW S11/S12"			diSignal="DI_HeaterRoomSWS11S12"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmHeaterBbacksidePanelSWS112Alarm"		diSignalsplay="heater backside panel SW S112"			diSignal="DI_HeaterBbacksidePanelSWS112"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmRHCTS305Alarm"		diSignalsplay="RHC TS305"			diSignal="DI_RHCTS305"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmGasLeakFaultAlarm"		diSignalsplay="gas leak fault"			diSignal="DI_GasLeakFault"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmMagneticFluidLeakAlarm"		diSignalsplay="Magnetic fluid leak"			diSignal="DI_MagneticFluidLeak"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmCoolingWaterLeakAlarm"		diSignalsplay="Cooling water leak"			diSignal="DI_CoolingWaterLeak"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmLSCWaterLeakAlarm"		diSignalsplay="LSC water leak"			diSignal="DI_LSCWaterLeak"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalGasBoxExhaust1stAlarmMS2"		diSignalsplay="GasBoxExhaust1stAlarmMS2"			diSignal="DI_GasBoxExhaust1stAlarmMS2"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmSignalGasBoxExhaust2ndAlarmMS2"		diSignalsplay="GasBoxExhaust2ndAlarmMS2"			diSignal="DI_GasBoxExhaust2ndAlarmMS2"		alarmTrigValue="true"/>
-		<IoAlarmSignal id="AlarmLABacksideDoorSwitchAlarm"		diSignalsplay="LA backside door switch"			diSignal="DI_LABacksideDoorSwitch"		alarmTrigValue="true"/>
+		<IoAlarmSignal id="AlarmSignalEMO01001powerboxEMO" diSignalsplay="EMO01001 power box EMO" diSignal="DI_EMO01001powerboxEMO" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalPowerboxfiredetector" diSignalsplay="Power box fire detector" diSignal="DI_Powerboxfiredetector" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalSMK01001detectoroperator" diSignalsplay="SMK01001 detector operator" diSignal="DI_SMK01001detectoroperator" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalSMK01001detectorfault" diSignalsplay="SMK01001 detector fault" diSignal="DI_SMK01001detectorfault" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalEMO02001gasboxEMO" diSignalsplay="EMO02001 gas box EMO" diSignal="DI_EMO02001gasboxEMO" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalEMO04001frontbodyEMO" diSignalsplay="EMO04001 frontbody EMO" diSignal="DI_EMO04001frontbodyEMO" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalLD02001LSCleakalarm" diSignalsplay="LD02001 LSC leak alarm" diSignal="DI_LD02001LSCleakalarm" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalLD05001Magneticfluidleak" diSignalsplay="LD05001 Magnetic fluid leak" diSignal="DI_LD05001Magneticfluidleak" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalLD05002Coolingwaterleak" diSignalsplay="LD05002 Cooling water leak" diSignal="DI_LD05002Coolingwaterleak" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalLD05003RHCleak" diSignalsplay="LD05003 RHC leak" diSignal="DI_LD05003RHCleak" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalLD03001exhaustboxwaterleakupside" diSignalsplay="LD03001 exhaust box water leak (up-side)" diSignal="DI_LD03001exhaustboxwaterleakupside" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalLD03002waterleakdownside" diSignalsplay="LD03002 water leak (down-side)" diSignal="DI_LD03002waterleakdownside" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalExternalEMO" diSignalsplay="External EMO" diSignal="DI_ExternalEMO" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalFurnacetransformertempsw" diSignalsplay="Furnace transformer temp sw" diSignal="DI_Furnacetransformertempsw" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalAC100Vtransformertempsw" diSignalsplay="AC100V transformer temp sw" diSignal="DI_AC100Vtransformertempsw" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalFurnacepoweronswitch" diSignalsplay="Furnace power on switch" diSignal="DI_Furnacepoweronswitch" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalAC100Vtransformerpowerswitch" diSignalsplay="AC100V transformer power switch" diSignal="DI_AC100Vtransformerpowerswitch" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalPowerboxinterlockresetbutton" diSignalsplay="Power box interlock reset button" diSignal="DI_Powerboxinterlockresetbutton" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalVFD01001EDM" diSignalsplay="VFD01001 EDM" diSignal="DI_VFD01001EDM" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGasboxinterlockresetbutton" diSignalsplay="Gas box interlock reset button" diSignal="DI_Gasboxinterlockresetbutton" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalSCRONOFFSWITCH" diSignalsplay="SCR ON/OFF SWITCH" diSignal="DI_SCRONOFFSWITCH" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGasboxexhaustpressurealarm1st" diSignalsplay="Gas box exhaust pressure alarm 1st" diSignal="DI_Gasboxexhaustpressurealarm1st" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGasboxexhaustpressurealarm2nd" diSignalsplay="Gas box exhaust pressure alarm 2nd" diSignal="DI_Gasboxexhaustpressurealarm2nd" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalFS101waterflowalarm" diSignalsplay="FS101 water flow alarm" diSignal="DI_FS101waterflowalarm" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalFrontbodyinterlockresetbutton" diSignalsplay="Front body interlock reset button" diSignal="DI_Frontbodyinterlockresetbutton" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalLightcurtainOSSD1" diSignalsplay="Light curtain OSSD1" diSignal="DI_LightcurtainOSSD1" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalLightcurtainOSSD2" diSignalsplay="Light curtain OSSD2" diSignal="DI_LightcurtainOSSD2" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalLightcurtainfault" diSignalsplay="Light curtain fault" diSignal="DI_Lightcurtainfault" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalFrontbodydoorswitch" diSignalsplay="Front body door switch" diSignal="DI_Frontbodydoorswitch" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalFrontbodyIOshuttersw" diSignalsplay="Front body I/O shutter sw" diSignal="DI_FrontbodyIOshuttersw" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalFouprobotEMS" diSignalsplay="Foup robot EMS" diSignal="DI_FouprobotEMS" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalWaferrobotEMS" diSignalsplay="Wafer robot EMS" diSignal="DI_WaferrobotEMS" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalAxisCRmotorEDM" diSignalsplay="Axis-CR motor EDM" diSignal="DI_AxisCRmotorEDM" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalAxisEmotorEDM" diSignalsplay="Axis-E motor EDM" diSignal="DI_AxisEmotorEDM" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalTS05001FFUtempsw" diSignalsplay="TS05001 FFU temp sw" diSignal="DI_TS05001FFUtempsw" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalTS05002Capinsidetempsw" diSignalsplay="TS05002 Cap inside temp sw" diSignal="DI_TS05002Capinsidetempsw" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalTS05003Capoutsidetempsw" diSignalsplay="TS05003 Cap outside temp sw" diSignal="DI_TS05003Capoutsidetempsw" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalTS05004Raxisrotationtempsw" diSignalsplay="TS05004 R axis rotation temp sw" diSignal="DI_TS05004Raxisrotationtempsw" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalTS05005RHCtempsw" diSignalsplay="TS05005 RHC temp sw" diSignal="DI_TS05005RHCtempsw" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalTS05006furnacetempsw" diSignalsplay="TS05006 furnace temp sw" diSignal="DI_TS05006furnacetempsw" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalLoadingareaEMS" diSignalsplay="Loading area EMS" diSignal="DI_LoadingareaEMS" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02001HCL1gasleak1stalarm" diSignalsplay="GD02001 HCL-1 gas leak 1st alarm" diSignal="DI_GD02001HCL1gasleak1stalarm" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02001HCL1gasleak2ndalarm" diSignalsplay="GD02001 HCL-1 gas leak 2nd alarm" diSignal="DI_GD02001HCL1gasleak2ndalarm" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02001fault" diSignalsplay="GD02001 fault" diSignal="DI_GD02001fault" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02002HCL2gasleak1stalarm" diSignalsplay="GD02002 HCL-2 gas leak 1st alarm" diSignal="DI_GD02002HCL2gasleak1stalarm" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02002HCL2gasleak2ndalarm" diSignalsplay="GD02002 HCL-2 gas leak 2nd alarm" diSignal="DI_GD02002HCL2gasleak2ndalarm" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02002fault" diSignalsplay="GD02002 fault" diSignal="DI_GD02002fault" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02003NH31gasleak1stalarm" diSignalsplay="GD02003 NH3-1 gas leak 1st alarm" diSignal="DI_GD02003NH31gasleak1stalarm" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02003NH31gasleak2ndalarm" diSignalsplay="GD02003 NH3-1 gas leak 2nd alarm" diSignal="DI_GD02003NH31gasleak2ndalarm" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02003fault" diSignalsplay="GD02003 fault" diSignal="DI_GD02003fault" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02004NH32gasleak1stalarm" diSignalsplay="GD02004 NH3-2 gas leak 1st alarm" diSignal="DI_GD02004NH32gasleak1stalarm" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02004NH32gasleak2ndalarm" diSignalsplay="GD02004 NH3-2 gas leak 2nd alarm" diSignal="DI_GD02004NH32gasleak2ndalarm" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02004fault" diSignalsplay="GD02004 fault" diSignal="DI_GD02004fault" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02005F21gasleak1stalarm" diSignalsplay="GD02005 F2-1 gas leak 1st alarm" diSignal="DI_GD02005F21gasleak1stalarm" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02005F21gasleak2ndalarm" diSignalsplay="GD02005 F2-1 gas leak 2nd alarm" diSignal="DI_GD02005F21gasleak2ndalarm" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02005fault" diSignalsplay="GD02005 fault" diSignal="DI_GD02005fault" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02006F22gasleak1stalarm" diSignalsplay="GD02006 F2-2 gas leak 1st alarm" diSignal="DI_GD02006F22gasleak1stalarm" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02006F22gasleak2ndalarm" diSignalsplay="GD02006 F2-2 gas leak 2nd alarm" diSignal="DI_GD02006F22gasleak2ndalarm" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02006fault" diSignalsplay="GD02006 fault" diSignal="DI_GD02006fault" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02007NO1gasleak1stalarm" diSignalsplay="GD02007 NO-1 gas leak 1st alarm" diSignal="DI_GD02007NO1gasleak1stalarm" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02007NO1gasleak2ndalarm" diSignalsplay="GD02007 NO-1 gas leak 2nd alarm" diSignal="DI_GD02007NO1gasleak2ndalarm" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02007fault" diSignalsplay="GD02007 fault" diSignal="DI_GD02007fault" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02008NO2gasleak1stalarm" diSignalsplay="GD02008 NO-2 gas leak 1st alarm" diSignal="DI_GD02008NO2gasleak1stalarm" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02008NO2gasleak2ndalarm" diSignalsplay="GD02008 NO-2 gas leak 2nd alarm" diSignal="DI_GD02008NO2gasleak2ndalarm" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02008fault" diSignalsplay="GD02008 fault" diSignal="DI_GD02008fault" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02009C3H61gasleak1stalarm" diSignalsplay="GD02009 C3H6-1 gas leak 1st alarm" diSignal="DI_GD02009C3H61gasleak1stalarm" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02009C3H61gasleak2ndalarm" diSignalsplay="GD02009 C3H6-1 gas leak 2nd alarm" diSignal="DI_GD02009C3H61gasleak2ndalarm" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02009fault" diSignalsplay="GD02009 fault" diSignal="DI_GD02009fault" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02010C3H62gasleak1stalarm" diSignalsplay="GD02010 C3H6-2 gas leak 1st alarm" diSignal="DI_GD02010C3H62gasleak1stalarm" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02010C3H62gasleak2ndalarm" diSignalsplay="GD02010 C3H6-2 gas leak 2nd alarm" diSignal="DI_GD02010C3H62gasleak2ndalarm" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02010fault" diSignalsplay="GD02010 fault" diSignal="DI_GD02010fault" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02011DMA1gasleak1stalarm" diSignalsplay="GD02011 DMA-1 gas leak 1st alarm" diSignal="DI_GD02011DMA1gasleak1stalarm" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02011DMA1gasleak2ndalarm" diSignalsplay="GD02011 DMA-1 gas leak 2nd alarm" diSignal="DI_GD02011DMA1gasleak2ndalarm" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02011fault" diSignalsplay="GD02011 fault" diSignal="DI_GD02011fault" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02012DMA2gasleak1stalarm" diSignalsplay="GD02012 DMA-2 gas leak 1st alarm" diSignal="DI_GD02012DMA2gasleak1stalarm" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02012DMA2gasleak2ndalarm" diSignalsplay="GD02012 DMA-2 gas leak 2nd alarm" diSignal="DI_GD02012DMA2gasleak2ndalarm" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGD02012fault" diSignalsplay="GD02012 fault" diSignal="DI_GD02012fault" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalSL02001gasboxdoorsw11" diSignalsplay="SL02001 gas box door sw1-1" diSignal="DI_SL02001gasboxdoorsw11" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalSL02001gasboxdoorsw12" diSignalsplay="SL02001 gas box door sw1-2" diSignal="DI_SL02001gasboxdoorsw12" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalSL02002gasboxdoorsw11" diSignalsplay="SL02002 gas box door sw1-1" diSignal="DI_SL02002gasboxdoorsw11" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalSL02002gasboxdoorsw12" diSignalsplay="SL02002 gas box door sw1-2" diSignal="DI_SL02002gasboxdoorsw12" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalSL05001LAdoorsw1" diSignalsplay="SL05001 LA door sw1" diSignal="DI_SL05001LAdoorsw1" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalSL05002LAdoorsw2" diSignalsplay="SL05002 LA door sw2" diSignal="DI_SL05002LAdoorsw2" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalSL05004LAfurnacedoorsw" diSignalsplay="SL05004 LA furnace door sw" diSignal="DI_SL05004LAfurnacedoorsw" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalFurnacepoweronoff" diSignalsplay="Furnace power on/off" diSignal="DI_Furnacepoweronoff" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalBlowerpoweronoff" diSignalsplay="Blower power on/off" diSignal="DI_Blowerpoweronoff" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignal100Vtransformerpoweron" diSignalsplay="100V transformer power on" diSignal="DI_100Vtransformerpoweron" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalVFDenable" diSignalsplay="VFD enable" diSignal="DI_VFDenable" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalHPMvalvepoweronoff" diSignalsplay="HPM valve power on/off" diSignal="DI_HPMvalvepoweronoff" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalAxisCRmotorenable1" diSignalsplay="Axis-CR motor enable1" diSignal="DI_AxisCRmotorenable1" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalAxisCRmotorenable2" diSignalsplay="Axis-CR motor enable2" diSignal="DI_AxisCRmotorenable2" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalAxisEmotorenable1" diSignalsplay="Axis-E motor enable1" diSignal="DI_AxisEmotorenable1" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalAxisEmotorenable2" diSignalsplay="Axis-E motor enable2" diSignal="DI_AxisEmotorenable2" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalFTRenable1" diSignalsplay="FTR enable1" diSignal="DI_FTRenable1" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalFTRenable2" diSignalsplay="FTR enable2" diSignal="DI_FTRenable2" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalFTRinterlockreset" diSignalsplay="FTR interlock reset" diSignal="DI_FTRinterlockreset" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalWTRenable1" diSignalsplay="WTR enable1" diSignal="DI_WTRenable1" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalWTRenable2" diSignalsplay="WTR enable2" diSignal="DI_WTRenable2" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalWTRinterlockreset" diSignalsplay="WTR interlock reset" diSignal="DI_WTRinterlockreset" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalCapheaterenable" diSignalsplay="Cap heater enable" diSignal="DI_Capheaterenable" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalLightcurtainidel" diSignalsplay="Light curtain idel" diSignal="DI_Lightcurtainidel" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalPowerboxinterlockbuttonled" diSignalsplay="Power box interlock button led" diSignal="DI_Powerboxinterlockbuttonled" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalGasboxinterlockbuttonled" diSignalsplay="Gas box interlock button led" diSignal="DI_Gasboxinterlockbuttonled" alarmTrigValue="true" />
+		<IoAlarmSignal id="AlarmSignalFrontbodyinterlockbuttonled" diSignalsplay="Frontbody interlock button led" diSignal="DI_Frontbodyinterlockbuttonled" alarmTrigValue="true" />
 
 		<IoAlarmSignal id="AlarmSignalMachineEMO1"		diSignalsplay="MachineEMO1"			diSignal="DI_MachineEMO1"		alarmTrigValue="true"/>
 		<IoAlarmSignal id="AlarmSignalMachineEMO2"		diSignalsplay="MachineEMO2"			diSignal="DI_MachineEMO2"		alarmTrigValue="true"/>
@@ -1042,9 +1092,8 @@
 		<IoSensor id="SensorO2DetectSideFIMS1" display="Transfer Room FIMS1" di="DI_O2_Detect_Side_FIMS1"/>
 		<IoSensor id="SensorO2DetectSideFIMS2" display="Transfer Room FIMS2" di="DI_O2_Detect_Side_FIMS2"/>
 
-		<IoSensor id="SensorLADoorSw1" display="Transfer Room FIMS2" di="DI_SensorLADoorSw1"/>
-		<IoSensor id="SensorLADoorSw2" display="Transfer Room FIMS2" di="DI_SensorLADoorSw2"/>
-		<IoSensor id="SensorLADoorSw3" display="Transfer Room FIMS2" di="DI_SensorLADoorSw3"/>
+		<IoSensor id="SensorLADoorSw1" display="LA door sw1" di="DI_SL05001LAdoorsw1"/>
+	
 
 	</IoSensors>
 
@@ -1095,20 +1144,7 @@
 		<IoTrigger id="TrigExhaustOmmanBoxFanPowerOn" display="" schematicId="" unit="" doTrigger="DO_ExhaustOmmanBoxFanPowerOn"/>
 		<IoTrigger id="TrigHPMValveOutStatus" display="" schematicId="" unit="" doTrigger="DO_HPMValveOutStatus"/>
 		<IoTrigger id="TrigForlineHeaterOn" display="" schematicId="" unit="" doTrigger="DO_ForlineHeaterOn"/>
-		<!--<IoTrigger id="TrigHeaterE901Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE901Enable"/>
-		<IoTrigger id="TrigHeaterE902Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE902Enable"/>
-		<IoTrigger id="TrigHeaterE903Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE903Enable"/>
-		<IoTrigger id="TrigHeaterE904Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE904Enable"/>
-		<IoTrigger id="TrigHeaterE905Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE905Enable"/>
-		<IoTrigger id="TrigHeaterE906Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE906Enable"/>
-		<IoTrigger id="TrigHeaterE907Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE907Enable"/>
-		<IoTrigger id="TrigHeaterE908Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE908Enable"/>
-		<IoTrigger id="TrigHeaterE909Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE909Enable"/>
-		<IoTrigger id="TrigHeaterE910Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE910Enable"/>
-		<IoTrigger id="TrigHeaterE911Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE911Enable"/>
-		<IoTrigger id="TrigHeaterE912Enable" display="" schematicId="" unit="" doTrigger="DO_HeaterE912Enable"/>
-		<IoTrigger id="TrigAV71ExternalHeater" display="" schematicId="" unit="" doTrigger="DO_AV71ExternalHeater"/>
-		<IoTrigger id="TrigAV71RingHeater" display="" schematicId="" unit="" doTrigger="DO_AV71RingHeater"/>-->
+		
 		<IoTrigger id="TrigCapHeaterPowerOnEnable" display="" schematicId="" unit="" doTrigger="DO_CapHeaterPowerOnEnable"/>
 		<IoTrigger id="TrigMechaStopRed" display="" schematicId="" unit="" doTrigger="DO_MechaStopRed"/>
 		<IoTrigger id="TrigMechaPause" display="" schematicId="" unit="" doTrigger="DO_MechaPause"/>
@@ -1157,6 +1193,12 @@
 		<IoTrigger id="TrigF2CleanSwitchB" display="" schematicId="" unit="" doTrigger="DO_CleanSwitch"/>
 		<IoTrigger id="TrigFOUPRobotActionCommand" display="" schematicId="" unit="" aoTrigger="AO_FOUPRobotActionCommand" aiFeedback="AI_FOUPRobotActionCommand"/>
 		<IoTrigger id="TrigWaferRobotActionCommand" display="" schematicId="" unit="" aoTrigger="AO_WaferRobotActionCommand" aiFeedback="AI_WaferRobotActionCommand"/>
+
+		<IoTrigger id="TrigMS501" display="" schematicId="" unit="" doTrigger="DO_MS501"/>
+		<IoTrigger id="TrigMS520" display="" schematicId="" unit="" doTrigger="DO_MS520"/>
+		<IoTrigger id="TrigMS521" display="" schematicId="" unit="" doTrigger="DO_MS521"/>
+		<IoTrigger id="TrigMS522" display="" schematicId="" unit="" doTrigger="DO_MS522"/>
+
 	</IoTriggers>
 	<IoTriggers classType="FurnaceRT.Devices.IoTrigger3" assembly="FurnaceRT">
 		<IoTrigger3 id="GASTempOutRangeAlarm" display="GASTempOutRangeAlarm" diFeedback1="DI_TempOutRangeAlarm" diFeedback2="DI_TempOutRangeAlarm" diFeedback3="DI_TempOutRangeAlarm"  diFeedback4="DI_TempOutRangeAlarm" schematicId="" unit="" doTrigger="DO_GASTempOutRangeAlarm"/>
@@ -1588,8 +1630,8 @@
 		<IoValve id="ValveAV136" diOpen="" doOpen="DO_ValveAV136" display="ValveAV136" schematicId="" ILKDi="DI_AV136ILK" isNc="true" isDefaultOpen="false"/>
 
 
-		<IoValve id="ValveCommonBoxPressureRegulatingCylinder" doOpen="DO_CommonBoxPressureRegulatingCylinderValveOpen" doClose="DO_CommonBoxPressureRegulatingCylinderValveClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
-		<IoValve id="ValveLABacksideDoorCylinderControl" doOpen="DO_LABacksideDoorCylinderControlValveOpen" doClose="DO_LABacksideDoorCylinderControlValveClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
+		<IoValve id="ValveAV201" doOpen="DO_CommonBoxPressureRegulatingCylinderValveOpen" doClose="DO_CommonBoxPressureRegulatingCylinderValveClose" display="AV201" schematicId="" isNc="true" isDefaultOpen="false"/>
+		<IoValve id="ValveAV202" doOpen="DO_LABacksideDoorCylinderControlValveOpen" doClose="DO_LABacksideDoorCylinderControlValveClose" display="AV202" schematicId="" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveLAExhaustDamper" doOpen="DO_LAExhaustValveOpen" doClose="DO_LAExhaustValveClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveLADamper" doOpen="DO_LADamperOpen" doClose="DO_LADamperClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveFIMS1N2Purge" doOpen="DO_FIMS1N2PurgeValveOpen" doClose="DO_FIMS1N2PurgeValveClose" display="ValveAV63" schematicId="" isNc="true" isDefaultOpen="false"/>
@@ -1598,6 +1640,8 @@
 		<IoValve id="ValveSV62" doOpen="DO_SV62Open" doClose="" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveSV63" doOpen="DO_SV63Open" doClose="" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveSV64" doOpen="DO_SV64Open" doClose="" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
+		
+		<IoValve id="ValveSV227" doOpen="DO_circulationfanisturnedopen" doClose="DO_circulationfanisturnedClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
 
 
 		<IoValve id="ValveBlowerPowerOn" doOpen="DO_BlowerPowerOn" doClose="" display="Blower Power On" schematicId="" isNc="true" isDefaultOpen="false"/>

Furnace/FurnaceRT/Config/IO/ELK/_ioDefinePM.xml

@@ -1,60 +1,113 @@
 <?xml version='1.0'?>
 <IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
 	<Dig_In>
-		<DI_ITEM Index="48" Name="DI_O2ConcentrationHI" BufferOffset="48" Addr="D3.0" Description="O2 concentration HI"/>
-		<DI_ITEM Index="49" Name="DI_O2ConcentrationLow" BufferOffset="49" Addr="D3.1" Description="O2 concentration lo"/>
-		<DI_ITEM Index="50" Name="DI_O2ConcentrationEcho1" BufferOffset="50" Addr="D3.2" Description="O2 concentration echo1"/>
-		<DI_ITEM Index="51" Name="DI_O2ConcentrationEcho2" BufferOffset="51" Addr="D3.3" Description="O2 concentration echo2"/>
-		<DI_ITEM Index="51" Name="DI_SMK1DetectorSensorOperates" BufferOffset="52" Addr="D3.4" Description="SMK1 detector sensor operates"/>
-		<DI_ITEM Index="51" Name="DI_SMK1DetectorFireAlarm" BufferOffset="53" Addr="D3.5" Description="SMK1 detector fire alarm"/>
-		<DI_ITEM Index="51" Name="DI_SMK1DetectorFault" BufferOffset="54" Addr="D3.6" Description="SMK1 detector fault"/>
-
-		<DI_ITEM Index="56" Name="DI_HCL1GasLeak1stAlarm" BufferOffset="56" Addr="D3.8" Description="HCL-1 gas leak 1st alarm" />
-		<DI_ITEM Index="57" Name="DI_HCL1GasLeak2ndAlarm" BufferOffset="57" Addr="D3.9" Description="HCL-1 gas leak 2nd alarm" />
-		<DI_ITEM Index="58" Name="DI_HCL2GasLeak1stAlarm" BufferOffset="58" Addr="D3.10" Description="HCL-2gas leak 1st alarm" />
-		<DI_ITEM Index="59" Name="DI_HCL2GasLeak2ndAlarm" BufferOffset="59" Addr="D3.11" Description="HCL-2gas leak 2nd alarm" />
-		<DI_ITEM Index="60" Name="DI_NH31GasLeak1stAlarm" BufferOffset="60" Addr="D3.12" Description="NH3-1gas leak 1st alarm" />
-		<DI_ITEM Index="61" Name="DI_NH31GasLeak2ndAlarm" BufferOffset="61" Addr="D3.13" Description="NH3-1gas leak 2nd alarm" />
-		<DI_ITEM Index="62" Name="DI_NH32GasLeak1stAlarm" BufferOffset="62" Addr="D3.14" Description="NH3-2gas leak 1st alarm" />
-		<DI_ITEM Index="63" Name="DI_NH32GasLeak2ndAlarm" BufferOffset="63" Addr="D3.15" Description="NH3-2 gas leak 2nd alarm" />
-		<DI_ITEM Index="64" Name="DI_F21GasLeak1stAlarm" BufferOffset="64" Addr="D4.0" Description="F2-1 gas leak 1st alarm" />
-		<DI_ITEM Index="65" Name="DI_F21GasLeak2ndAlarm" BufferOffset="65" Addr="D4.1" Description="F2-1 gas leak 2nd alarm" />
-		<DI_ITEM Index="66" Name="DI_F22GasLeak1stAlarm" BufferOffset="66" Addr="D4.2" Description="F2-2 gas leak 1st alarm" />
-		<DI_ITEM Index="67" Name="DI_F22GasLeak2ndAlarm" BufferOffset="67" Addr="D4.3" Description="F2-2 gas leak 2nd alarm" />
-		<DI_ITEM Index="68" Name="DI_NO1GasLeak1stAlarm" BufferOffset="68" Addr="D4.4" Description="NO-1 gas leak 1st alarm" />
-		<DI_ITEM Index="69" Name="DI_NO1GasLeak2ndAlarm" BufferOffset="69" Addr="D4.5" Description="NO-1 gas leak 2nd alarm" />
-		<DI_ITEM Index="70" Name="DI_NO2GasLeak1stAlarm" BufferOffset="70" Addr="D4.6" Description="NO-2 gas leak 1st alarm" />
-		<DI_ITEM Index="71" Name="DI_NO2GasLeak2ndAlarm" BufferOffset="71" Addr="D4.7" Description="NO-2 gas leak 2nd alarm" />
-		<DI_ITEM Index="72" Name="DI_C3H61GasLeak1stAlarm" BufferOffset="72" Addr="D4.8" Description="C3H6-1 gas leak 1st alarm" />
-		<DI_ITEM Index="73" Name="DI_C3H61GasLeak2ndAlarm" BufferOffset="73" Addr="D4.9" Description="C3H6-1 gas leak 2nd alarm" />
-		<DI_ITEM Index="74" Name="DI_C3H62GasLeak1stAlarm" BufferOffset="74" Addr="D4.10" Description="C3H6-2 gas leak 1st alarm" />
-		<DI_ITEM Index="75" Name="DI_C3H62GasLeak2ndAlarm" BufferOffset="75" Addr="D4.11" Description="C3H6-2 gas leak 2nd alarm" />
-		<DI_ITEM Index="76" Name="DI_DMA1GasLeak1stAlarm" BufferOffset="76" Addr="D4.12" Description="DMA-1 gas leak 1st alarm" />
-		<DI_ITEM Index="77" Name="DI_DMA1GasLeak2ndAlarm" BufferOffset="77" Addr="D4.13" Description="DMA-1 gas leak 2nd alarm" />
-		<DI_ITEM Index="78" Name="DI_DMA2GasLeak1stAlarm" BufferOffset="78" Addr="D4.14" Description="DMA-2gas leak 1st alarm" />
-		<DI_ITEM Index="79" Name="DI_DMA2GasLeak2ndAlarm" BufferOffset="79" Addr="D4.15" Description="DMA-2 gas leak 2nd alarm" />
-
-		<DI_ITEM Index="80" Name="DI_TS34RRotationTempSw" BufferOffset="80" Addr="D5.0" Description="TS34 R rotation temp. sw" />
-		<DI_ITEM Index="81" Name="DI_TS30CapInsideTempSw" BufferOffset="81" Addr="D5.1" Description="TS30 cap inside temp.sw" />
-
-		<DI_ITEM Index="82" Name="DI_TS31capoutsidetemSw" BufferOffset="82" Addr="D5.2"   Description="TS31 cap outside temp.sw" />
-		<DI_ITEM Index="83" Name="DI_GasboxlowerdoorSw" BufferOffset="83" Addr="D5.3"   Description="gas box lower door sw" />
-		<DI_ITEM Index="84" Name="DI_GasboxupperdoorSw" BufferOffset="84" Addr="D5.4"   Description="gas box upper door sw" />
-		<DI_ITEM Index="85" Name="DI_EXHboxwaterleak" BufferOffset="85" Addr="D5.5"   Description="EXH box water leak" />
-		<DI_ITEM Index="86" Name="DI_OPpanelEMO1" BufferOffset="86" Addr="D5.6"   Description="OP panel EMO 1" />
-		<DI_ITEM Index="87" Name="DI_OPpanelEMO2" BufferOffset="87" Addr="D5.7"   Description="OP panel EMO 2" />
-		<DI_ITEM Index="88" Name="DI_MainFurnaceTS306" BufferOffset="88" Addr="D5.8" Description="main furnace TS306"/>
-		<DI_ITEM Index="89" Name="DI_HeaterRoomSWS11S12" BufferOffset="89" Addr="D5.9" Description="heater room SW S11/S12"/>
-		<DI_ITEM Index="90" Name="DI_HeaterBbacksidePanelSWS112" BufferOffset="90" Addr="D5.10" Description="heater backside panel SW S112"/>
-		<DI_ITEM Index="91" Name="DI_RHCTS305" BufferOffset="91" Addr="D5.11" Description="RHC TS305"/>
-		<DI_ITEM Index="92" Name="DI_GasLeakFault" BufferOffset="92" Addr="D5.12" Description="gas leak fault"/>
-		<DI_ITEM Index="93" Name="DI_MagneticFluidLeak" BufferOffset="93" Addr="D5.13" Description="Magnetic fluid leak"/>
-		<DI_ITEM Index="94" Name="DI_CoolingWaterLeak" BufferOffset="94" Addr="D5.14" Description="Cooling water leak"/>
-		<DI_ITEM Index="95" Name="DI_LSCWaterLeak" BufferOffset="95" Addr="D5.15" Description="LSC water leak"/>
-		<DI_ITEM Index="528" Name="DI_GasBoxExhaust1stAlarmMS2" BufferOffset="96" Addr="D6.0" Description="gas box exhaust 1st alarm MS2"/>
-		<DI_ITEM Index="529" Name="DI_GasBoxExhaust2ndAlarmMS2" BufferOffset="97" Addr="D6.1" Description="gas box exhaust 2nd alarm MS2"/>
-		<DI_ITEM Index="534" Name="DI_LABacksideDoorSwitch" BufferOffset="102" Addr="D6.6" Description="LA backside door switch"/>
-
+		<DI_ITEM Index="48" Name="DI_EMO01001powerboxEMO" BufferOffset="48" Addr="D3.0" Description="EMO01001 power box EMO"/>
+		<DI_ITEM Index="49" Name="DI_Powerboxfiredetector" BufferOffset="49" Addr="D3.1" Description="Power box fire detector"/>
+		<DI_ITEM Index="50" Name="DI_SMK01001detectoroperator" BufferOffset="50" Addr="D3.2" Description="SMK01001 detector operator"/>
+		<DI_ITEM Index="51" Name="DI_SMK01001detectorfault" BufferOffset="51" Addr="D3.3" Description="SMK01001 detector fault"/>
+		<DI_ITEM Index="52" Name="DI_EMO02001gasboxEMO" BufferOffset="52" Addr="D3.4" Description="EMO02001 gas box EMO"/>
+		<DI_ITEM Index="54" Name="DI_EMO04001frontbodyEMO" BufferOffset="54" Addr="D3.6" Description="EMO04001 frontbody EMO"/>
+		<DI_ITEM Index="55" Name="DI_LD02001LSCleakalarm" BufferOffset="55" Addr="D3.7" Description="LD02001 LSC leak alarm"/>
+		<DI_ITEM Index="56" Name="DI_LD05001Magneticfluidleak" BufferOffset="56" Addr="D3.8" Description="LD05001 Magnetic fluid leak"/>
+		<DI_ITEM Index="57" Name="DI_LD05002Coolingwaterleak" BufferOffset="57" Addr="D3.9" Description="LD05002 Cooling water leak"/>
+		<DI_ITEM Index="58" Name="DI_LD05003RHCleak" BufferOffset="58" Addr="D3.10" Description="LD05003 RHC leak"/>
+		<DI_ITEM Index="59" Name="DI_LD03001exhaustboxwaterleakupside" BufferOffset="59" Addr="D3.11" Description="LD03001 exhaust box water leak (up-side)"/>
+		<DI_ITEM Index="60" Name="DI_LD03002waterleakdownside" BufferOffset="60" Addr="D3.12" Description="LD03002 water leak (down-side)"/>
+		<DI_ITEM Index="61" Name="DI_ExternalEMO" BufferOffset="61" Addr="D3.13" Description="External EMO"/>
+		<DI_ITEM Index="64" Name="DI_Furnacetransformertempsw" BufferOffset="64" Addr="D4.0" Description="Furnace transformer temp sw"/>
+		<DI_ITEM Index="65" Name="DI_AC100Vtransformertempsw" BufferOffset="65" Addr="D4.1" Description="AC100V transformer temp sw"/>
+		<DI_ITEM Index="66" Name="DI_Furnacepoweronswitch" BufferOffset="66" Addr="D4.2" Description="Furnace power on switch"/>
+		<DI_ITEM Index="67" Name="DI_AC100Vtransformerpowerswitch" BufferOffset="67" Addr="D4.3" Description="AC100V transformer power switch"/>
+		<DI_ITEM Index="68" Name="DI_Powerboxinterlockresetbutton" BufferOffset="68" Addr="D4.4" Description="Power box interlock reset button"/>
+		<DI_ITEM Index="69" Name="DI_VFD01001EDM" BufferOffset="69" Addr="D4.5" Description="VFD01001 EDM"/>
+	
+		<DI_ITEM Index="74" Name="DI_Gasboxinterlockresetbutton" BufferOffset="74" Addr="D4.10" Description="Gas box interlock reset button"/>
+		<DI_ITEM Index="75" Name="DI_SCRONOFFSWITCH" BufferOffset="75" Addr="D4.11" Description="SCR ON/OFF SWITCH"/>
+		<DI_ITEM Index="76" Name="DI_Gasboxexhaustpressurealarm1st" BufferOffset="76" Addr="D4.12" Description="Gas box exhaust pressure alarm 1st"/>
+		<DI_ITEM Index="77" Name="DI_Gasboxexhaustpressurealarm2nd" BufferOffset="77" Addr="D4.13" Description="Gas box exhaust pressure alarm 2nd"/>
+		<DI_ITEM Index="78" Name="DI_FS101waterflowalarm" BufferOffset="78" Addr="D4.14" Description="FS101 water flow alarm"/>
+		<DI_ITEM Index="79" Name="DI_Frontbodyinterlockresetbutton" BufferOffset="79" Addr="D4.15" Description="Front body interlock reset button"/>
+		<DI_ITEM Index="80" Name="DI_LightcurtainOSSD1" BufferOffset="80" Addr="D5.0" Description="Light curtain OSSD1"/>
+		<DI_ITEM Index="81" Name="DI_LightcurtainOSSD2" BufferOffset="81" Addr="D5.1" Description="Light curtain OSSD2"/>
+		<DI_ITEM Index="82" Name="DI_Lightcurtainfault" BufferOffset="82" Addr="D5.2" Description="Light curtain fault"/>
+		<DI_ITEM Index="83" Name="DI_Frontbodydoorswitch" BufferOffset="83" Addr="D5.3" Description="Front body door switch"/>
+		<DI_ITEM Index="84" Name="DI_FrontbodyIOshuttersw" BufferOffset="84" Addr="D5.4" Description="Front body I/O shutter sw"/>
+		<DI_ITEM Index="85" Name="DI_FouprobotEMS" BufferOffset="85" Addr="D5.5" Description="Foup robot EMS"/>
+		<DI_ITEM Index="86" Name="DI_WaferrobotEMS" BufferOffset="86" Addr="D5.6" Description="Wafer robot EMS"/>
+		<DI_ITEM Index="87" Name="DI_AxisCRmotorEDM" BufferOffset="87" Addr="D5.7" Description="Axis-CR motor EDM"/>
+		<DI_ITEM Index="89" Name="DI_AxisEmotorEDM" BufferOffset="89" Addr="D5.9" Description="Axis-E motor EDM"/>
+		<DI_ITEM Index="90" Name="DI_TS05001FFUtempsw" BufferOffset="90" Addr="D5.10" Description="TS05001 FFU temp sw"/>
+		<DI_ITEM Index="91" Name="DI_TS05002Capinsidetempsw" BufferOffset="91" Addr="D5.11" Description="TS05002 Cap inside temp sw"/>
+		<DI_ITEM Index="92" Name="DI_TS05003Capoutsidetempsw" BufferOffset="92" Addr="D5.12" Description="TS05003 Cap outside temp sw"/>
+		<DI_ITEM Index="93" Name="DI_TS05004Raxisrotationtempsw" BufferOffset="93" Addr="D5.13" Description="TS05004 R axis rotation temp sw"/>
+		<DI_ITEM Index="94" Name="DI_TS05005RHCtempsw" BufferOffset="94" Addr="D5.14" Description="TS05005 RHC temp sw"/>
+		<DI_ITEM Index="95" Name="DI_TS05006furnacetempsw" BufferOffset="95" Addr="D5.15" Description="TS05006 furnace temp sw"/>
+		<DI_ITEM Index="96" Name="DI_LoadingareaEMS" BufferOffset="96" Addr="D6.0" Description="Loading area EMS"/>
+		<DI_ITEM Index="97" Name="DI_GD02001HCL1gasleak1stalarm" BufferOffset="97" Addr="D6.1" Description="GD02001 HCL-1 gas leak 1st alarm"/>
+		<DI_ITEM Index="98" Name="DI_GD02001HCL1gasleak2ndalarm" BufferOffset="98" Addr="D6.2" Description="GD02001 HCL-1 gas leak 2nd alarm"/>
+		<DI_ITEM Index="99" Name="DI_GD02001fault" BufferOffset="99" Addr="D6.3" Description="GD02001 fault"/>
+		<DI_ITEM Index="100" Name="DI_GD02002HCL2gasleak1stalarm" BufferOffset="100" Addr="D6.4" Description="GD02002 HCL-2 gas leak 1st alarm"/>
+		<DI_ITEM Index="101" Name="DI_GD02002HCL2gasleak2ndalarm" BufferOffset="101" Addr="D6.5" Description="GD02002 HCL-2 gas leak 2nd alarm"/>
+		<DI_ITEM Index="102" Name="DI_GD02002fault" BufferOffset="102" Addr="D6.6" Description="GD02002 fault"/>
+		<DI_ITEM Index="103" Name="DI_GD02003NH31gasleak1stalarm" BufferOffset="103" Addr="D6.7" Description="GD02003 NH3-1 gas leak 1st alarm"/>
+		<DI_ITEM Index="104" Name="DI_GD02003NH31gasleak2ndalarm" BufferOffset="104" Addr="D6.8" Description="GD02003 NH3-1 gas leak 2nd alarm"/>
+		<DI_ITEM Index="105" Name="DI_GD02003fault" BufferOffset="105" Addr="D6.9" Description="GD02003 fault"/>
+		<DI_ITEM Index="106" Name="DI_GD02004NH32gasleak1stalarm" BufferOffset="106" Addr="D6.10" Description="GD02004 NH3-2 gas leak 1st alarm"/>
+		<DI_ITEM Index="107" Name="DI_GD02004NH32gasleak2ndalarm" BufferOffset="107" Addr="D6.11" Description="GD02004 NH3-2 gas leak 2nd alarm"/>
+		<DI_ITEM Index="108" Name="DI_GD02004fault" BufferOffset="108" Addr="D6.12" Description="GD02004 fault"/>
+		<DI_ITEM Index="109" Name="DI_GD02005F21gasleak1stalarm" BufferOffset="109" Addr="D6.13" Description="GD02005 F2-1 gas leak 1st alarm"/>
+		<DI_ITEM Index="110" Name="DI_GD02005F21gasleak2ndalarm" BufferOffset="110" Addr="D6.14" Description="GD02005 F2-1 gas leak 2nd alarm"/>
+		<DI_ITEM Index="111" Name="DI_GD02005fault" BufferOffset="111" Addr="D6.15" Description="GD02005 fault"/>
+		<DI_ITEM Index="112" Name="DI_GD02006F22gasleak1stalarm" BufferOffset="112" Addr="D6.16" Description="GD02006 F2-2 gas leak 1st alarm"/>
+		<DI_ITEM Index="113" Name="DI_GD02006F22gasleak2ndalarm" BufferOffset="113" Addr="D7.0" Description="GD02006 F2-2 gas leak 2nd alarm"/>
+		<DI_ITEM Index="114" Name="DI_GD02006fault" BufferOffset="114" Addr="D7.1" Description="GD02006 fault"/>
+		<DI_ITEM Index="115" Name="DI_GD02007NO1gasleak1stalarm" BufferOffset="115" Addr="D7.2" Description="GD02007 NO-1 gas leak 1st alarm"/>
+		<DI_ITEM Index="116" Name="DI_GD02007NO1gasleak2ndalarm" BufferOffset="116" Addr="D7.3" Description="GD02007 NO-1 gas leak 2nd alarm"/>
+		<DI_ITEM Index="117" Name="DI_GD02007fault" BufferOffset="117" Addr="D7.4" Description="GD02007 fault"/>
+		<DI_ITEM Index="118" Name="DI_GD02008NO2gasleak1stalarm" BufferOffset="118" Addr="D7.5" Description="GD02008 NO-2 gas leak 1st alarm"/>
+		<DI_ITEM Index="119" Name="DI_GD02008NO2gasleak2ndalarm" BufferOffset="119" Addr="D7.6" Description="GD02008 NO-2 gas leak 2nd alarm"/>
+		<DI_ITEM Index="120" Name="DI_GD02008fault" BufferOffset="120" Addr="D7.7" Description="GD02008 fault"/>
+		<DI_ITEM Index="121" Name="DI_GD02009C3H61gasleak1stalarm" BufferOffset="121" Addr="D7.8" Description="GD02009 C3H6-1 gas leak 1st alarm"/>
+		<DI_ITEM Index="122" Name="DI_GD02009C3H61gasleak2ndalarm" BufferOffset="122" Addr="D7.9" Description="GD02009 C3H6-1 gas leak 2nd alarm"/>
+		<DI_ITEM Index="123" Name="DI_GD02009fault" BufferOffset="123" Addr="D7.10" Description="GD02009 fault"/>
+		<DI_ITEM Index="124" Name="DI_GD02010C3H62gasleak1stalarm" BufferOffset="124" Addr="D7.11" Description="GD02010 C3H6-2 gas leak 1st alarm"/>
+		<DI_ITEM Index="125" Name="DI_GD02010C3H62gasleak2ndalarm" BufferOffset="125" Addr="D7.12" Description="GD02010 C3H6-2 gas leak 2nd alarm"/>
+		<DI_ITEM Index="126" Name="DI_GD02010fault" BufferOffset="126" Addr="D7.13" Description="GD02010 fault"/>
+		<DI_ITEM Index="127" Name="DI_GD02011DMA1gasleak1stalarm" BufferOffset="127" Addr="D7.14" Description="GD02011 DMA-1 gas leak 1st alarm"/>
+		<DI_ITEM Index="128" Name="DI_GD02011DMA1gasleak2ndalarm" BufferOffset="128" Addr="D7.15" Description="GD02011 DMA-1 gas leak 2nd alarm"/>
+		<DI_ITEM Index="129" Name="DI_GD02011fault" BufferOffset="129" Addr="D8.0" Description="GD02011 fault"/>
+		<DI_ITEM Index="130" Name="DI_GD02012DMA2gasleak1stalarm" BufferOffset="130" Addr="D8.1" Description="GD02012 DMA-2 gas leak 1st alarm"/>
+		<DI_ITEM Index="131" Name="DI_GD02012DMA2gasleak2ndalarm" BufferOffset="131" Addr="D8.2" Description="GD02012 DMA-2 gas leak 2nd alarm"/>
+		<DI_ITEM Index="132" Name="DI_GD02012fault" BufferOffset="132" Addr="D8.3" Description="GD02012 fault"/>
+		<DI_ITEM Index="133" Name="DI_SL02001gasboxdoorsw11" BufferOffset="133" Addr="D8.4" Description="SL02001 gas box door sw1-1"/>
+		<DI_ITEM Index="134" Name="DI_SL02001gasboxdoorsw12" BufferOffset="134" Addr="D8.5" Description="SL02001 gas box door sw1-2"/>
+		<DI_ITEM Index="135" Name="DI_SL02002gasboxdoorsw11" BufferOffset="135" Addr="D8.6" Description="SL02002 gas box door sw1-1"/>
+		<DI_ITEM Index="136" Name="DI_SL02002gasboxdoorsw12" BufferOffset="136" Addr="D8.7" Description="SL02002 gas box door sw1-2"/>
+		<DI_ITEM Index="137" Name="DI_SL05001LAdoorsw1" BufferOffset="137" Addr="D8.8" Description="SL05001 LA door sw1"/>
+		<DI_ITEM Index="138" Name="DI_SL05002LAdoorsw2" BufferOffset="138" Addr="D8.9" Description="SL05002 LA door sw2"/>
+		<DI_ITEM Index="139" Name="DI_SL05004LAfurnacedoorsw" BufferOffset="139" Addr="D8.10" Description="SL05004 LA furnace door sw"/>
+		
+		<DI_ITEM Index="144" Name="DI_Furnacepoweronoff" BufferOffset="144" Addr="D8.15" Description="Furnace power on/off"/>
+		<DI_ITEM Index="145" Name="DI_Blowerpoweronoff" BufferOffset="145" Addr="D9.0" Description="Blower power on/off"/>
+		<DI_ITEM Index="146" Name="DI_100Vtransformerpoweron" BufferOffset="146" Addr="D9.1" Description="100V transformer power on"/>
+		<DI_ITEM Index="147" Name="DI_VFDenable" BufferOffset="147" Addr="D9.2" Description="VFD enable"/>
+		<DI_ITEM Index="149" Name="DI_HPMvalvepoweronoff" BufferOffset="149" Addr="D9.4" Description="HPM valve power on/off"/>
+		<DI_ITEM Index="150" Name="DI_AxisCRmotorenable1" BufferOffset="150" Addr="D9.5" Description="Axis-CR motor enable1"/>
+		<DI_ITEM Index="151" Name="DI_AxisCRmotorenable2" BufferOffset="151" Addr="D9.6" Description="Axis-CR motor enable2"/>
+		<DI_ITEM Index="152" Name="DI_AxisEmotorenable1" BufferOffset="152" Addr="D9.7" Description="Axis-E motor enable1"/>
+		<DI_ITEM Index="153" Name="DI_AxisEmotorenable2" BufferOffset="153" Addr="D9.8" Description="Axis-E motor enable2"/>
+		<DI_ITEM Index="156" Name="DI_FTRenable1" BufferOffset="156" Addr="D9.11" Description="FTR enable1"/>
+		<DI_ITEM Index="157" Name="DI_FTRenable2" BufferOffset="157" Addr="D9.12" Description="FTR enable2"/>
+		<DI_ITEM Index="158" Name="DI_FTRinterlockreset" BufferOffset="158" Addr="D9.13" Description="FTR interlock reset"/>
+		<DI_ITEM Index="159" Name="DI_WTRenable1" BufferOffset="159" Addr="D9.14" Description="WTR enable1"/>
+		<DI_ITEM Index="160" Name="DI_WTRenable2" BufferOffset="160" Addr="D9.15" Description="WTR enable2"/>
+		<DI_ITEM Index="161" Name="DI_WTRinterlockreset" BufferOffset="161" Addr="D10.0" Description="WTR interlock reset"/>
+		<DI_ITEM Index="162" Name="DI_Capheaterenable" BufferOffset="162" Addr="D10.1" Description="Cap heater enable"/>
+		<DI_ITEM Index="164" Name="DI_Lightcurtainidel" BufferOffset="164" Addr="D10.3" Description="Light curtain idel"/>
+		<DI_ITEM Index="165" Name="DI_Powerboxinterlockbuttonled" BufferOffset="165" Addr="D10.4" Description="Power box interlock button led"/>
+		<DI_ITEM Index="166" Name="DI_Gasboxinterlockbuttonled" BufferOffset="166" Addr="D10.5" Description="Gas box interlock button led"/>
+		<DI_ITEM Index="167" Name="DI_Frontbodyinterlockbuttonled" BufferOffset="167" Addr="D10.6" Description="Frontbody interlock button led"/>
+		
 		<DI_ITEM Index="288" Name="DI_MachineEMO1" BufferOffset="288" Addr="D18.0" Description="Machine EMO 1" />
 		<DI_ITEM Index="289" Name="DI_MachineEMO2" BufferOffset="289" Addr="D18.1" Description="Machine EMO 2" />
 		<DI_ITEM Index="290" Name="DI_EMOReset" BufferOffset="290" Addr="D18.2" Description="EMO reset" />
@@ -1619,6 +1672,13 @@
 		<DO_ITEM Index="350" Name="DO_LABacksideDoorCylinderControlValveClose" BufferOffset="2597" Addr="D1162.5" Description="LA backside door cylinder control valve close"/>
 		<DO_ITEM Index="351" Name="DO_LAExhaustValveOpen" BufferOffset="2598" Addr="D1162.6" Description="LA exhaust damper valve open"/>
 		<DO_ITEM Index="352" Name="DO_LAExhaustValveClose" BufferOffset="2599" Addr="D1162.7" Description="LA exhaust damper valve close"/>
+		
+		<DO_ITEM Index="352" Name="DO_circulationfanisturnedopen" BufferOffset="2612" Addr="D1163.4" Description="AV227 open"/>
+		<DO_ITEM Index="352" Name="DO_circulationfanisturnedClose" BufferOffset="2613" Addr="D1163.5" Description="TAV227 close"/>
+		<DO_ITEM Index="352" Name="DO_MS501" BufferOffset="2614" Addr="D1163.6" Description="MS501"/>
+		<DO_ITEM Index="352" Name="DO_MS520" BufferOffset="2615" Addr="D1163.7" Description="MS520"/>
+		<DO_ITEM Index="352" Name="DO_MS521" BufferOffset="2616" Addr="D1163.8" Description="MS521"/>
+		<DO_ITEM Index="352" Name="DO_MS522" BufferOffset="2617" Addr="D1163.9" Description="MS522"/>
 
 
 

Furnace/FurnaceRT/Config/IO/NTP/DeviceModelPM.xml

@@ -1964,8 +1964,9 @@
 		<IoValve id="ValveAV95" diOpenSensor="DI_AV95FFUAirInOpened" diCloseSensor="DI_AV94RHCAirOutClosed" doOpen="" display="ValveAV95" schematicId="" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveAV96" diOpenSensor="DI_AV96CommonExhaustCylinderOpened" diCloseSensor="DI_AV96CommonExhaustCylinderClosed" doOpen="" display="ValveAV96" schematicId="" isNc="true" isDefaultOpen="false"/>
 		
-		<IoValve id="ValveCommonBoxPressureRegulatingCylinder" doOpen="DO_CommonBoxPressureRegulatingCylinderValveOpen" doClose="DO_CommonBoxPressureRegulatingCylinderValveClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
-		<IoValve id="ValveAV65" doOpen="DO_FFUAirInValveOpen" doClose="DO_FFUAirInValveClose" diOpenSensor="DI_AV65FFUAirInOpened" diCloseSensor="DI_AV65FFUAirInClosed" display="ValveAV65" schematicId="" isNc="true" isDefaultOpen="false"/>		<IoValve id="ValveLABacksideDoorCylinderControl" doOpen="DO_LABacksideDoorCylinderControlValveOpen" doClose="DO_LABacksideDoorCylinderControlValveClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
+		<IoValve id="ValveAV201" doOpen="DO_CommonBoxPressureRegulatingCylinderValveOpen" doClose="DO_CommonBoxPressureRegulatingCylinderValveClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
+		<IoValve id="ValveAV65" doOpen="DO_FFUAirInValveOpen" doClose="DO_FFUAirInValveClose" diOpenSensor="DI_AV65FFUAirInOpened" diCloseSensor="DI_AV65FFUAirInClosed" display="ValveAV65" schematicId="" isNc="true" isDefaultOpen="false"/>		
+		<IoValve id="ValveAV202" doOpen="DO_LABacksideDoorCylinderControlValveOpen" doClose="DO_LABacksideDoorCylinderControlValveClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveLAExhaustDamper" doOpen="DO_LAExhaustValveOpen" doClose="DO_LAExhaustValveClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveLADamper" doOpen="DO_LADamperOpen" doClose="DO_LADamperClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveFIMS1N2Purge" doOpen="DO_FIMS1N2PurgeValveOpen" doClose="DO_FIMS1N2PurgeValveClose" display="ValveAV63" schematicId="" isNc="true" isDefaultOpen="false"/>

Furnace/FurnaceRT/Config/IO/SiBCN/DeviceModelPM.xml

@@ -2009,9 +2009,9 @@
 		<IoValve id="ValveAV95" diOpenSensor="DI_AV95FFUAirInOpened" diCloseSensor="DI_AV94RHCAirOutClosed" doOpen="" display="ValveAV95" ILKDi="" schematicId="" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveAV96" diOpenSensor="DI_AV96CommonExhaustCylinderOpened" diCloseSensor="DI_AV96CommonExhaustCylinderClosed" doOpen="" display="ValveAV96" ILKDi="" schematicId="" isNc="true" isDefaultOpen="false"/>
 
-		<IoValve id="ValveCommonBoxPressureRegulatingCylinder" doOpen="DO_CommonBoxPressureRegulatingCylinderValveOpen" doClose="DO_CommonBoxPressureRegulatingCylinderValveClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
+		<IoValve id="ValveAV201" doOpen="DO_CommonBoxPressureRegulatingCylinderValveOpen" doClose="DO_CommonBoxPressureRegulatingCylinderValveClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveAV65" doOpen="DO_FFUAirInValveOpen" doClose="DO_FFUAirInValveClose" diOpenSensor="DI_AV65FFUAirInOpened" diCloseSensor="DI_AV65FFUAirInClosed" display="ValveAV65" ILKDi="DI_AV65ILK" schematicId="" isNc="true" isDefaultOpen="false"/>
-		<IoValve id="ValveLABacksideDoorCylinderControl" doOpen="DO_LABacksideDoorCylinderControlValveOpen" doClose="DO_LABacksideDoorCylinderControlValveClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
+		<IoValve id="ValveAV202" doOpen="DO_LABacksideDoorCylinderControlValveOpen" doClose="DO_LABacksideDoorCylinderControlValveClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveLAExhaustDamper" doOpen="DO_LAExhaustValveOpen" doClose="DO_LAExhaustValveClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveLADamper" doOpen="DO_LADamperOpen" doClose="DO_LADamperClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveFIMS1N2Purge" doOpen="DO_FIMS1N2PurgeValveOpen" doClose="DO_FIMS1N2PurgeValveClose" display="ValveAV63" schematicId="" isNc="true" isDefaultOpen="false"/>

Furnace/FurnaceRT/Config/IO/TiN/DeviceModelPM.xml

@@ -1910,8 +1910,8 @@
 		<IoValve id="ValveAV136" diOpen="" doOpen="DO_ValveAV136" display="ValveAV136" schematicId="" isNc="true" isDefaultOpen="false"/>
 
 
-		<IoValve id="ValveCommonBoxPressureRegulatingCylinder" doOpen="DO_CommonBoxPressureRegulatingCylinderValveOpen" doClose="DO_CommonBoxPressureRegulatingCylinderValveClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
-		<IoValve id="ValveLABacksideDoorCylinderControl" doOpen="DO_LABacksideDoorCylinderControlValveOpen" doClose="DO_LABacksideDoorCylinderControlValveClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
+		<IoValve id="ValveAV201" doOpen="DO_CommonBoxPressureRegulatingCylinderValveOpen" doClose="DO_CommonBoxPressureRegulatingCylinderValveClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
+		<IoValve id="ValveAV202" doOpen="DO_LABacksideDoorCylinderControlValveOpen" doClose="DO_LABacksideDoorCylinderControlValveClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveLAExhaustDamper" doOpen="DO_LAExhaustValveOpen" doClose="DO_LAExhaustValveClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveLADamper" doOpen="DO_LADamperOpen" doClose="DO_LADamperClose" display="" schematicId="" isNc="true" isDefaultOpen="false"/>
 		<IoValve id="ValveFIMS1N2Purge" doOpen="DO_FIMS1N2PurgeValveOpen" doClose="DO_FIMS1N2PurgeValveClose" display="ValveAV63" schematicId="" isNc="true" isDefaultOpen="false"/>

Furnace/FurnaceRT/Equipments/PMs/PMModuleDevice.cs

@@ -33,6 +33,217 @@ namespace FurnaceRT.Equipments.PMs
     {
 
         // -------------------------------------------------------------------------
+        #region 
+        [Tag("AlarmSignalEMO01001powerboxEMO")]
+        public IoAlarmSignal AlarmSignalEMO01001powerboxEMO { get; set; }
+        [Tag("AlarmSignalPowerboxfiredetector")]
+        public IoAlarmSignal AlarmSignalPowerboxfiredetector { get; set; }
+        [Tag("AlarmSignalSMK01001detectoroperator")]
+        public IoAlarmSignal AlarmSignalSMK01001detectoroperator { get; set; }
+        [Tag("AlarmSignalSMK01001detectorfault")]
+        public IoAlarmSignal AlarmSignalSMK01001detectorfault { get; set; }
+        [Tag("AlarmSignalEMO02001gasboxEMO")]
+        public IoAlarmSignal AlarmSignalEMO02001gasboxEMO { get; set; }
+        [Tag("AlarmSignalEMO04001frontbodyEMO")]
+        public IoAlarmSignal AlarmSignalEMO04001frontbodyEMO { get; set; }
+        [Tag("AlarmSignalLD02001LSCleakalarm")]
+        public IoAlarmSignal AlarmSignalLD02001LSCleakalarm { get; set; }
+        [Tag("AlarmSignalLD05001Magneticfluidleak")]
+        public IoAlarmSignal AlarmSignalLD05001Magneticfluidleak { get; set; }
+        [Tag("AlarmSignalLD05002Coolingwaterleak")]
+        public IoAlarmSignal AlarmSignalLD05002Coolingwaterleak { get; set; }
+        [Tag("AlarmSignalLD05003RHCleak")]
+        public IoAlarmSignal AlarmSignalLD05003RHCleak { get; set; }
+        [Tag("AlarmSignalLD03001exhaustboxwaterleakupside")]
+        public IoAlarmSignal AlarmSignalLD03001exhaustboxwaterleakupside { get; set; }
+        [Tag("AlarmSignalLD03002waterleakdownside")]
+        public IoAlarmSignal AlarmSignalLD03002waterleakdownside { get; set; }
+        [Tag("AlarmSignalExternalEMO")]
+        public IoAlarmSignal AlarmSignalExternalEMO { get; set; }
+        [Tag("AlarmSignalFurnacetransformertempsw")]
+        public IoAlarmSignal AlarmSignalFurnacetransformertempsw { get; set; }
+        [Tag("AlarmSignalAC100Vtransformertempsw")]
+        public IoAlarmSignal AlarmSignalAC100Vtransformertempsw { get; set; }
+        [Tag("AlarmSignalFurnacepoweronswitch")]
+        public IoAlarmSignal AlarmSignalFurnacepoweronswitch { get; set; }
+        [Tag("AlarmSignalAC100Vtransformerpowerswitch")]
+        public IoAlarmSignal AlarmSignalAC100Vtransformerpowerswitch { get; set; }
+        [Tag("AlarmSignalPowerboxinterlockresetbutton")]
+        public IoAlarmSignal AlarmSignalPowerboxinterlockresetbutton { get; set; }
+        [Tag("AlarmSignalVFD01001EDM")]
+        public IoAlarmSignal AlarmSignalVFD01001EDM { get; set; }
+        [Tag("AlarmSignalGasboxinterlockresetbutton")]
+        public IoAlarmSignal AlarmSignalGasboxinterlockresetbutton { get; set; }
+        [Tag("AlarmSignalSCRONOFFSWITCH")]
+        public IoAlarmSignal AlarmSignalSCRONOFFSWITCH { get; set; }
+        [Tag("AlarmSignalGasboxexhaustpressurealarm1st")]
+        public IoAlarmSignal AlarmSignalGasboxexhaustpressurealarm1st { get; set; }
+        [Tag("AlarmSignalGasboxexhaustpressurealarm2nd")]
+        public IoAlarmSignal AlarmSignalGasboxexhaustpressurealarm2nd { get; set; }
+        [Tag("AlarmSignalFS101waterflowalarm")]
+        public IoAlarmSignal AlarmSignalFS101waterflowalarm { get; set; }
+        [Tag("AlarmSignalFrontbodyinterlockresetbutton")]
+        public IoAlarmSignal AlarmSignalFrontbodyinterlockresetbutton { get; set; }
+        [Tag("AlarmSignalLightcurtainOSSD1")]
+        public IoAlarmSignal AlarmSignalLightcurtainOSSD1 { get; set; }
+        [Tag("AlarmSignalLightcurtainOSSD2")]
+        public IoAlarmSignal AlarmSignalLightcurtainOSSD2 { get; set; }
+        [Tag("AlarmSignalLightcurtainfault")]
+        public IoAlarmSignal AlarmSignalLightcurtainfault { get; set; }
+        [Tag("AlarmSignalFrontbodydoorswitch")]
+        public IoAlarmSignal AlarmSignalFrontbodydoorswitch { get; set; }
+        [Tag("AlarmSignalFrontbodyIOshuttersw")]
+        public IoAlarmSignal AlarmSignalFrontbodyIOshuttersw { get; set; }
+        [Tag("AlarmSignalFouprobotEMS")]
+        public IoAlarmSignal AlarmSignalFouprobotEMS { get; set; }
+        [Tag("AlarmSignalWaferrobotEMS")]
+        public IoAlarmSignal AlarmSignalWaferrobotEMS { get; set; }
+        [Tag("AlarmSignalAxisCRmotorEDM")]
+        public IoAlarmSignal AlarmSignalAxisCRmotorEDM { get; set; }
+        [Tag("AlarmSignalAxisEmotorEDM")]
+        public IoAlarmSignal AlarmSignalAxisEmotorEDM { get; set; }
+        [Tag("AlarmSignalTS05001FFUtempsw")]
+        public IoAlarmSignal AlarmSignalTS05001FFUtempsw { get; set; }
+        [Tag("AlarmSignalTS05002Capinsidetempsw")]
+        public IoAlarmSignal AlarmSignalTS05002Capinsidetempsw { get; set; }
+        [Tag("AlarmSignalTS05003Capoutsidetempsw")]
+        public IoAlarmSignal AlarmSignalTS05003Capoutsidetempsw { get; set; }
+        [Tag("AlarmSignalTS05004Raxisrotationtempsw")]
+        public IoAlarmSignal AlarmSignalTS05004Raxisrotationtempsw { get; set; }
+        [Tag("AlarmSignalTS05005RHCtempsw")]
+        public IoAlarmSignal AlarmSignalTS05005RHCtempsw { get; set; }
+        [Tag("AlarmSignalTS05006furnacetempsw")]
+        public IoAlarmSignal AlarmSignalTS05006furnacetempsw { get; set; }
+        [Tag("AlarmSignalLoadingareaEMS")]
+        public IoAlarmSignal AlarmSignalLoadingareaEMS { get; set; }
+        [Tag("AlarmSignalGD02001HCL1gasleak1stalarm")]
+        public IoAlarmSignal AlarmSignalGD02001HCL1gasleak1stalarm { get; set; }
+        [Tag("AlarmSignalGD02001HCL1gasleak2ndalarm")]
+        public IoAlarmSignal AlarmSignalGD02001HCL1gasleak2ndalarm { get; set; }
+        [Tag("AlarmSignalGD02001fault")]
+        public IoAlarmSignal AlarmSignalGD02001fault { get; set; }
+        [Tag("AlarmSignalGD02002HCL2gasleak1stalarm")]
+        public IoAlarmSignal AlarmSignalGD02002HCL2gasleak1stalarm { get; set; }
+        [Tag("AlarmSignalGD02002HCL2gasleak2ndalarm")]
+        public IoAlarmSignal AlarmSignalGD02002HCL2gasleak2ndalarm { get; set; }
+        [Tag("AlarmSignalGD02002fault")]
+        public IoAlarmSignal AlarmSignalGD02002fault { get; set; }
+        [Tag("AlarmSignalGD02003NH31gasleak1stalarm")]
+        public IoAlarmSignal AlarmSignalGD02003NH31gasleak1stalarm { get; set; }
+        [Tag("AlarmSignalGD02003NH31gasleak2ndalarm")]
+        public IoAlarmSignal AlarmSignalGD02003NH31gasleak2ndalarm { get; set; }
+        [Tag("AlarmSignalGD02003fault")]
+        public IoAlarmSignal AlarmSignalGD02003fault { get; set; }
+        [Tag("AlarmSignalGD02004NH32gasleak1stalarm")]
+        public IoAlarmSignal AlarmSignalGD02004NH32gasleak1stalarm { get; set; }
+        [Tag("AlarmSignalGD02004NH32gasleak2ndalarm")]
+        public IoAlarmSignal AlarmSignalGD02004NH32gasleak2ndalarm { get; set; }
+        [Tag("AlarmSignalGD02004fault")]
+        public IoAlarmSignal AlarmSignalGD02004fault { get; set; }
+        [Tag("AlarmSignalGD02005F21gasleak1stalarm")]
+        public IoAlarmSignal AlarmSignalGD02005F21gasleak1stalarm { get; set; }
+        [Tag("AlarmSignalGD02005F21gasleak2ndalarm")]
+        public IoAlarmSignal AlarmSignalGD02005F21gasleak2ndalarm { get; set; }
+        [Tag("AlarmSignalGD02005fault")]
+        public IoAlarmSignal AlarmSignalGD02005fault { get; set; }
+        [Tag("AlarmSignalGD02006F22gasleak1stalarm")]
+        public IoAlarmSignal AlarmSignalGD02006F22gasleak1stalarm { get; set; }
+        [Tag("AlarmSignalGD02006F22gasleak2ndalarm")]
+        public IoAlarmSignal AlarmSignalGD02006F22gasleak2ndalarm { get; set; }
+        [Tag("AlarmSignalGD02006fault")]
+        public IoAlarmSignal AlarmSignalGD02006fault { get; set; }
+        [Tag("AlarmSignalGD02007NO1gasleak1stalarm")]
+        public IoAlarmSignal AlarmSignalGD02007NO1gasleak1stalarm { get; set; }
+        [Tag("AlarmSignalGD02007NO1gasleak2ndalarm")]
+        public IoAlarmSignal AlarmSignalGD02007NO1gasleak2ndalarm { get; set; }
+        [Tag("AlarmSignalGD02007fault")]
+        public IoAlarmSignal AlarmSignalGD02007fault { get; set; }
+        [Tag("AlarmSignalGD02008NO2gasleak1stalarm")]
+        public IoAlarmSignal AlarmSignalGD02008NO2gasleak1stalarm { get; set; }
+        [Tag("AlarmSignalGD02008NO2gasleak2ndalarm")]
+        public IoAlarmSignal AlarmSignalGD02008NO2gasleak2ndalarm { get; set; }
+        [Tag("AlarmSignalGD02008fault")]
+        public IoAlarmSignal AlarmSignalGD02008fault { get; set; }
+        [Tag("AlarmSignalGD02009C3H61gasleak1stalarm")]
+        public IoAlarmSignal AlarmSignalGD02009C3H61gasleak1stalarm { get; set; }
+        [Tag("AlarmSignalGD02009C3H61gasleak2ndalarm")]
+        public IoAlarmSignal AlarmSignalGD02009C3H61gasleak2ndalarm { get; set; }
+        [Tag("AlarmSignalGD02009fault")]
+        public IoAlarmSignal AlarmSignalGD02009fault { get; set; }
+        [Tag("AlarmSignalGD02010C3H62gasleak1stalarm")]
+        public IoAlarmSignal AlarmSignalGD02010C3H62gasleak1stalarm { get; set; }
+        [Tag("AlarmSignalGD02010C3H62gasleak2ndalarm")]
+        public IoAlarmSignal AlarmSignalGD02010C3H62gasleak2ndalarm { get; set; }
+        [Tag("AlarmSignalGD02010fault")]
+        public IoAlarmSignal AlarmSignalGD02010fault { get; set; }
+        [Tag("AlarmSignalGD02011DMA1gasleak1stalarm")]
+        public IoAlarmSignal AlarmSignalGD02011DMA1gasleak1stalarm { get; set; }
+        [Tag("AlarmSignalGD02011DMA1gasleak2ndalarm")]
+        public IoAlarmSignal AlarmSignalGD02011DMA1gasleak2ndalarm { get; set; }
+        [Tag("AlarmSignalGD02011fault")]
+        public IoAlarmSignal AlarmSignalGD02011fault { get; set; }
+        [Tag("AlarmSignalGD02012DMA2gasleak1stalarm")]
+        public IoAlarmSignal AlarmSignalGD02012DMA2gasleak1stalarm { get; set; }
+        [Tag("AlarmSignalGD02012DMA2gasleak2ndalarm")]
+        public IoAlarmSignal AlarmSignalGD02012DMA2gasleak2ndalarm { get; set; }
+        [Tag("AlarmSignalGD02012fault")]
+        public IoAlarmSignal AlarmSignalGD02012fault { get; set; }
+        [Tag("AlarmSignalSL02001gasboxdoorsw11")]
+        public IoAlarmSignal AlarmSignalSL02001gasboxdoorsw11 { get; set; }
+        [Tag("AlarmSignalSL02001gasboxdoorsw12")]
+        public IoAlarmSignal AlarmSignalSL02001gasboxdoorsw12 { get; set; }
+        [Tag("AlarmSignalSL02002gasboxdoorsw11")]
+        public IoAlarmSignal AlarmSignalSL02002gasboxdoorsw11 { get; set; }
+        [Tag("AlarmSignalSL02002gasboxdoorsw12")]
+        public IoAlarmSignal AlarmSignalSL02002gasboxdoorsw12 { get; set; }
+        [Tag("AlarmSignalSL05001LAdoorsw1")]
+        public IoAlarmSignal AlarmSignalSL05001LAdoorsw1 { get; set; }
+        [Tag("AlarmSignalSL05002LAdoorsw2")]
+        public IoAlarmSignal AlarmSignalSL05002LAdoorsw2 { get; set; }
+        [Tag("AlarmSignalSL05004LAfurnacedoorsw")]
+        public IoAlarmSignal AlarmSignalSL05004LAfurnacedoorsw { get; set; }
+        [Tag("AlarmSignalFurnacepoweronoff")]
+        public IoAlarmSignal AlarmSignalFurnacepoweronoff { get; set; }
+        [Tag("AlarmSignalBlowerpoweronoff")]
+        public IoAlarmSignal AlarmSignalBlowerpoweronoff { get; set; }
+        [Tag("AlarmSignal100Vtransformerpoweron")]
+        public IoAlarmSignal AlarmSignal100Vtransformerpoweron { get; set; }
+        [Tag("AlarmSignalVFDenable")]
+        public IoAlarmSignal AlarmSignalVFDenable { get; set; }
+        [Tag("AlarmSignalHPMvalvepoweronoff")]
+        public IoAlarmSignal AlarmSignalHPMvalvepoweronoff { get; set; }
+        [Tag("AlarmSignalAxisCRmotorenable1")]
+        public IoAlarmSignal AlarmSignalAxisCRmotorenable1 { get; set; }
+        [Tag("AlarmSignalAxisCRmotorenable2")]
+        public IoAlarmSignal AlarmSignalAxisCRmotorenable2 { get; set; }
+        [Tag("AlarmSignalAxisEmotorenable1")]
+        public IoAlarmSignal AlarmSignalAxisEmotorenable1 { get; set; }
+        [Tag("AlarmSignalAxisEmotorenable2")]
+        public IoAlarmSignal AlarmSignalAxisEmotorenable2 { get; set; }
+        [Tag("AlarmSignalFTRenable1")]
+        public IoAlarmSignal AlarmSignalFTRenable1 { get; set; }
+        [Tag("AlarmSignalFTRenable2")]
+        public IoAlarmSignal AlarmSignalFTRenable2 { get; set; }
+        [Tag("AlarmSignalFTRinterlockreset")]
+        public IoAlarmSignal AlarmSignalFTRinterlockreset { get; set; }
+        [Tag("AlarmSignalWTRenable1")]
+        public IoAlarmSignal AlarmSignalWTRenable1 { get; set; }
+        [Tag("AlarmSignalWTRenable2")]
+        public IoAlarmSignal AlarmSignalWTRenable2 { get; set; }
+        [Tag("AlarmSignalWTRinterlockreset")]
+        public IoAlarmSignal AlarmSignalWTRinterlockreset { get; set; }
+        [Tag("AlarmSignalCapheaterenable")]
+        public IoAlarmSignal AlarmSignalCapheaterenable { get; set; }
+        [Tag("AlarmSignalLightcurtainidel")]
+        public IoAlarmSignal AlarmSignalLightcurtainidel { get; set; }
+        [Tag("AlarmSignalPowerboxinterlockbuttonled")]
+        public IoAlarmSignal AlarmSignalPowerboxinterlockbuttonled { get; set; }
+        [Tag("AlarmSignalGasboxinterlockbuttonled")]
+        public IoAlarmSignal AlarmSignalGasboxinterlockbuttonled { get; set; }
+        [Tag("AlarmSignalFrontbodyinterlockbuttonled")]
+        public IoAlarmSignal AlarmSignalFrontbodyinterlockbuttonled { get; set; }
+        #endregion
+
         #region AlarmSignal
         [Tag("AlarmSignalO2ConcentrationHI")]
         public IoAlarmSignal AlarmSignalO2ConcentrationHI { get; set; }
@@ -733,10 +944,7 @@ namespace FurnaceRT.Equipments.PMs
         public IoSensor SensorO2DetectSideFIMS2 { get; set; }
         [Tag("SensorLADoorSw1")]
         public IoSensor SensorLADoorSw1 { get; set; }
-        [Tag("SensorLADoorSw2")]
-        public IoSensor SensorLADoorSw2 { get; set; }
-        [Tag("SensorLADoorSw3")]
-        public IoSensor SensorLADoorSw3 { get; set; }
+
 
         //[Tag("SensorNH3PressureOK")]
         //public IoAlarmSignal SignalLeak { get; set; }
@@ -1041,12 +1249,13 @@ namespace FurnaceRT.Equipments.PMs
         public IoValve ValveAV136 { get; set; }
         [Tag("ValveAV230")]
         public IoValve ValveAV230 { get; set; }
+        [Tag("ValveSV227")]
+        public IoValve ValveSV227 { get; set; }
+        [Tag("ValveAV201")]
+        public IoValve ValveAV201 { get; set; }
 
-        [Tag("ValveCommonBoxPressureRegulatingCylinder")]
-        public IoValve ValveCommonBoxPressureRegulatingCylinder { get; set; }
-
-        [Tag("ValveLABacksideDoorCylinderControl")]
-        public IoValve ValveLABacksideDoorCylinderControl { get; set; }
+        [Tag("ValveAV202")]
+        public IoValve ValveAV202 { get; set; }
         [Tag("ValveLAExhaustDamper")]
         public IoValve ValveLAExhaustDamper { get; set; }
         [Tag("ValveLADamper")]

Furnace/FurnaceRT/Equipments/PMs/PMN2Purge.cs

@@ -231,7 +231,7 @@ namespace FurnaceRT.Equipments.PMs
         }
         private bool GetN2PurgeAIRTo20PPMStatus()
         {
-            return ValveLABacksideDoorCylinderControl.DOOpen.Value;
+            return ValveAV202.DOOpen.Value;
         }
         private bool GetN2PurgeUnder20PPMStatus(double value = 20)
         {
@@ -240,15 +240,15 @@ namespace FurnaceRT.Equipments.PMs
         }
         private bool GetN2PurgeAIRStatus()
         {
-            return ValveLABacksideDoorCylinderControl.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
+            return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
         }
         private bool GetLADoorOpenStatus()
         {
-            return (bool)(SensorLADoorSw1?.Value) && (bool)(SensorLADoorSw2?.Value) && (bool)(SensorLADoorSw3?.Value);
+            return (bool)(SensorLADoorSw1?.Value);
         }
         private bool GetN2PurgeDoorOpenStatus()
         {
-            return ValveLABacksideDoorCylinderControl.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
+            return ValveAV202.DOClose.Value && (AlarmSignalFilterBox1DoorSwitch != null ? !AlarmSignalFilterBox1DoorSwitch.Value : false);
         }
         private bool GetN2PurgeFoup1Status()
         {

Furnace/FurnaceRT/FurnaceRT.csproj

@@ -590,7 +590,9 @@
       <Name>UICore</Name>
     </ProjectReference>
   </ItemGroup>
-  <ItemGroup />
+  <ItemGroup>
+    <Folder Include="Config\BackUp\" />
+  </ItemGroup>
   <Import Project="$(MSBuildToolsPath)\Microsoft.CSharp.targets" />
   <PropertyGroup>
     <PostBuildEvent>REM 输出到安装目录，供安装打包使用

Furnace/FurnaceSimulator/Config/ELK/_ioDefinePM.xml

@@ -1,59 +1,112 @@
 <?xml version='1.0'?>
 <IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
 	<Dig_In>
-		<DI_ITEM Index="48" Name="DI_O2ConcentrationHI" BufferOffset="48" Addr="D3.0" Description="O2 concentration HI"/>
-		<DI_ITEM Index="49" Name="DI_O2ConcentrationLow" BufferOffset="49" Addr="D3.1" Description="O2 concentration lo"/>
-		<DI_ITEM Index="50" Name="DI_O2ConcentrationEcho1" BufferOffset="50" Addr="D3.2" Description="O2 concentration echo1"/>
-		<DI_ITEM Index="51" Name="DI_O2ConcentrationEcho2" BufferOffset="51" Addr="D3.3" Description="O2 concentration echo2"/>
-		<DI_ITEM Index="51" Name="DI_SMK1DetectorSensorOperates" BufferOffset="52" Addr="D3.4" Description="SMK1 detector sensor operates"/>
-		<DI_ITEM Index="51" Name="DI_SMK1DetectorFireAlarm" BufferOffset="53" Addr="D3.5" Description="SMK1 detector fire alarm"/>
-		<DI_ITEM Index="51" Name="DI_SMK1DetectorFault" BufferOffset="54" Addr="D3.6" Description="SMK1 detector fault"/>
-
-		<DI_ITEM Index="56" Name="DI_HCL1GasLeak1stAlarm" BufferOffset="56" Addr="D3.8" Description="HCL-1 gas leak 1st alarm" />
-		<DI_ITEM Index="57" Name="DI_HCL1GasLeak2ndAlarm" BufferOffset="57" Addr="D3.9" Description="HCL-1 gas leak 2nd alarm" />
-		<DI_ITEM Index="58" Name="DI_HCL2GasLeak1stAlarm" BufferOffset="58" Addr="D3.10" Description="HCL-2gas leak 1st alarm" />
-		<DI_ITEM Index="59" Name="DI_HCL2GasLeak2ndAlarm" BufferOffset="59" Addr="D3.11" Description="HCL-2gas leak 2nd alarm" />
-		<DI_ITEM Index="60" Name="DI_NH31GasLeak1stAlarm" BufferOffset="60" Addr="D3.12" Description="NH3-1gas leak 1st alarm" />
-		<DI_ITEM Index="61" Name="DI_NH31GasLeak2ndAlarm" BufferOffset="61" Addr="D3.13" Description="NH3-1gas leak 2nd alarm" />
-		<DI_ITEM Index="62" Name="DI_NH32GasLeak1stAlarm" BufferOffset="62" Addr="D3.14" Description="NH3-2gas leak 1st alarm" />
-		<DI_ITEM Index="63" Name="DI_NH32GasLeak2ndAlarm" BufferOffset="63" Addr="D3.15" Description="NH3-2 gas leak 2nd alarm" />
-		<DI_ITEM Index="64" Name="DI_F21GasLeak1stAlarm" BufferOffset="64" Addr="D4.0" Description="F2-1 gas leak 1st alarm" />
-		<DI_ITEM Index="65" Name="DI_F21GasLeak2ndAlarm" BufferOffset="65" Addr="D4.1" Description="F2-1 gas leak 2nd alarm" />
-		<DI_ITEM Index="66" Name="DI_F22GasLeak1stAlarm" BufferOffset="66" Addr="D4.2" Description="F2-2 gas leak 1st alarm" />
-		<DI_ITEM Index="67" Name="DI_F22GasLeak2ndAlarm" BufferOffset="67" Addr="D4.3" Description="F2-2 gas leak 2nd alarm" />
-		<DI_ITEM Index="68" Name="DI_NO1GasLeak1stAlarm" BufferOffset="68" Addr="D4.4" Description="NO-1 gas leak 1st alarm" />
-		<DI_ITEM Index="69" Name="DI_NO1GasLeak2ndAlarm" BufferOffset="69" Addr="D4.5" Description="NO-1 gas leak 2nd alarm" />
-		<DI_ITEM Index="70" Name="DI_NO2GasLeak1stAlarm" BufferOffset="70" Addr="D4.6" Description="NO-2 gas leak 1st alarm" />
-		<DI_ITEM Index="71" Name="DI_NO2GasLeak2ndAlarm" BufferOffset="71" Addr="D4.7" Description="NO-2 gas leak 2nd alarm" />
-		<DI_ITEM Index="72" Name="DI_C3H61GasLeak1stAlarm" BufferOffset="72" Addr="D4.8" Description="C3H6-1 gas leak 1st alarm" />
-		<DI_ITEM Index="73" Name="DI_C3H61GasLeak2ndAlarm" BufferOffset="73" Addr="D4.9" Description="C3H6-1 gas leak 2nd alarm" />
-		<DI_ITEM Index="74" Name="DI_C3H62GasLeak1stAlarm" BufferOffset="74" Addr="D4.10" Description="C3H6-2 gas leak 1st alarm" />
-		<DI_ITEM Index="75" Name="DI_C3H62GasLeak2ndAlarm" BufferOffset="75" Addr="D4.11" Description="C3H6-2 gas leak 2nd alarm" />
-		<DI_ITEM Index="76" Name="DI_DMA1GasLeak1stAlarm" BufferOffset="76" Addr="D4.12" Description="DMA-1 gas leak 1st alarm" />
-		<DI_ITEM Index="77" Name="DI_DMA1GasLeak2ndAlarm" BufferOffset="77" Addr="D4.13" Description="DMA-1 gas leak 2nd alarm" />
-		<DI_ITEM Index="78" Name="DI_DMA2GasLeak1stAlarm" BufferOffset="78" Addr="D4.14" Description="DMA-2gas leak 1st alarm" />
-		<DI_ITEM Index="79" Name="DI_DMA2GasLeak2ndAlarm" BufferOffset="79" Addr="D4.15" Description="DMA-2 gas leak 2nd alarm" />
-
-		<DI_ITEM Index="80" Name="DI_TS34RRotationTempSw" BufferOffset="80" Addr="D5.0" Description="TS34 R rotation temp. sw" />
-		<DI_ITEM Index="81" Name="DI_TS30CapInsideTempSw" BufferOffset="81" Addr="D5.1" Description="TS30 cap inside temp.sw" />
-
-		<DI_ITEM Index="82" Name="DI_TS31capoutsidetemSw" BufferOffset="82" Addr="D5.2"   Description="TS31 cap outside temp.sw" />
-		<DI_ITEM Index="83" Name="DI_GasboxlowerdoorSw" BufferOffset="83" Addr="D5.3"   Description="gas box lower door sw" />
-		<DI_ITEM Index="84" Name="DI_GasboxupperdoorSw" BufferOffset="84" Addr="D5.4"   Description="gas box upper door sw" />
-		<DI_ITEM Index="85" Name="DI_EXHboxwaterleak" BufferOffset="85" Addr="D5.5"   Description="EXH box water leak" />
-		<DI_ITEM Index="86" Name="DI_OPpanelEMO1" BufferOffset="86" Addr="D5.6"   Description="OP panel EMO 1" />
-		<DI_ITEM Index="87" Name="DI_OPpanelEMO2" BufferOffset="87" Addr="D5.7"   Description="OP panel EMO 2" />
-		<DI_ITEM Index="88" Name="DI_MainFurnaceTS306" BufferOffset="88" Addr="D5.8" Description="main furnace TS306"/>
-		<DI_ITEM Index="89" Name="DI_HeaterRoomSWS11S12" BufferOffset="89" Addr="D5.9" Description="heater room SW S11/S12"/>
-		<DI_ITEM Index="90" Name="DI_HeaterBbacksidePanelSWS112" BufferOffset="90" Addr="D5.10" Description="heater backside panel SW S112"/>
-		<DI_ITEM Index="91" Name="DI_RHCTS305" BufferOffset="91" Addr="D5.11" Description="RHC TS305"/>
-		<DI_ITEM Index="92" Name="DI_GasLeakFault" BufferOffset="92" Addr="D5.12" Description="gas leak fault"/>
-		<DI_ITEM Index="93" Name="DI_MagneticFluidLeak" BufferOffset="93" Addr="D5.13" Description="Magnetic fluid leak"/>
-		<DI_ITEM Index="94" Name="DI_CoolingWaterLeak" BufferOffset="94" Addr="D5.14" Description="Cooling water leak"/>
-		<DI_ITEM Index="95" Name="DI_LSCWaterLeak" BufferOffset="95" Addr="D5.15" Description="LSC water leak"/>
-		<DI_ITEM Index="528" Name="DI_GasBoxExhaust1stAlarmMS2" BufferOffset="96" Addr="D6.0" Description="gas box exhaust 1st alarm MS2"/>
-		<DI_ITEM Index="529" Name="DI_GasBoxExhaust2ndAlarmMS2" BufferOffset="97" Addr="D6.1" Description="gas box exhaust 2nd alarm MS2"/>
-		<DI_ITEM Index="534" Name="DI_LABacksideDoorSwitch" BufferOffset="102" Addr="D6.6" Description="LA backside door switch"/>
+		<DI_ITEM Index="48" Name="DI_EMO01001powerboxEMO" BufferOffset="48" Addr="D3.0" Description="EMO01001 power box EMO"/>
+		<DI_ITEM Index="49" Name="DI_Powerboxfiredetector" BufferOffset="49" Addr="D3.1" Description="Power box fire detector"/>
+		<DI_ITEM Index="50" Name="DI_SMK01001detectoroperator" BufferOffset="50" Addr="D3.2" Description="SMK01001 detector operator"/>
+		<DI_ITEM Index="51" Name="DI_SMK01001detectorfault" BufferOffset="51" Addr="D3.3" Description="SMK01001 detector fault"/>
+		<DI_ITEM Index="52" Name="DI_EMO02001gasboxEMO" BufferOffset="52" Addr="D3.4" Description="EMO02001 gas box EMO"/>
+		<DI_ITEM Index="54" Name="DI_EMO04001frontbodyEMO" BufferOffset="54" Addr="D3.6" Description="EMO04001 frontbody EMO"/>
+		<DI_ITEM Index="55" Name="DI_LD02001LSCleakalarm" BufferOffset="55" Addr="D3.7" Description="LD02001 LSC leak alarm"/>
+		<DI_ITEM Index="56" Name="DI_LD05001Magneticfluidleak" BufferOffset="56" Addr="D3.8" Description="LD05001 Magnetic fluid leak"/>
+		<DI_ITEM Index="57" Name="DI_LD05002Coolingwaterleak" BufferOffset="57" Addr="D3.9" Description="LD05002 Cooling water leak"/>
+		<DI_ITEM Index="58" Name="DI_LD05003RHCleak" BufferOffset="58" Addr="D3.10" Description="LD05003 RHC leak"/>
+		<DI_ITEM Index="59" Name="DI_LD03001exhaustboxwaterleakupside" BufferOffset="59" Addr="D3.11" Description="LD03001 exhaust box water leak (up-side)"/>
+		<DI_ITEM Index="60" Name="DI_LD03002waterleakdownside" BufferOffset="60" Addr="D3.12" Description="LD03002 water leak (down-side)"/>
+		<DI_ITEM Index="61" Name="DI_ExternalEMO" BufferOffset="61" Addr="D3.13" Description="External EMO"/>
+		<DI_ITEM Index="64" Name="DI_Furnacetransformertempsw" BufferOffset="64" Addr="D4.0" Description="Furnace transformer temp sw"/>
+		<DI_ITEM Index="65" Name="DI_AC100Vtransformertempsw" BufferOffset="65" Addr="D4.1" Description="AC100V transformer temp sw"/>
+		<DI_ITEM Index="66" Name="DI_Furnacepoweronswitch" BufferOffset="66" Addr="D4.2" Description="Furnace power on switch"/>
+		<DI_ITEM Index="67" Name="DI_AC100Vtransformerpowerswitch" BufferOffset="67" Addr="D4.3" Description="AC100V transformer power switch"/>
+		<DI_ITEM Index="68" Name="DI_Powerboxinterlockresetbutton" BufferOffset="68" Addr="D4.4" Description="Power box interlock reset button"/>
+		<DI_ITEM Index="69" Name="DI_VFD01001EDM" BufferOffset="69" Addr="D4.5" Description="VFD01001 EDM"/>
+
+		<DI_ITEM Index="74" Name="DI_Gasboxinterlockresetbutton" BufferOffset="74" Addr="D4.10" Description="Gas box interlock reset button"/>
+		<DI_ITEM Index="75" Name="DI_SCRONOFFSWITCH" BufferOffset="75" Addr="D4.11" Description="SCR ON/OFF SWITCH"/>
+		<DI_ITEM Index="76" Name="DI_Gasboxexhaustpressurealarm1st" BufferOffset="76" Addr="D4.12" Description="Gas box exhaust pressure alarm 1st"/>
+		<DI_ITEM Index="77" Name="DI_Gasboxexhaustpressurealarm2nd" BufferOffset="77" Addr="D4.13" Description="Gas box exhaust pressure alarm 2nd"/>
+		<DI_ITEM Index="78" Name="DI_FS101waterflowalarm" BufferOffset="78" Addr="D4.14" Description="FS101 water flow alarm"/>
+		<DI_ITEM Index="79" Name="DI_Frontbodyinterlockresetbutton" BufferOffset="79" Addr="D4.15" Description="Front body interlock reset button"/>
+		<DI_ITEM Index="80" Name="DI_LightcurtainOSSD1" BufferOffset="80" Addr="D5.0" Description="Light curtain OSSD1"/>
+		<DI_ITEM Index="81" Name="DI_LightcurtainOSSD2" BufferOffset="81" Addr="D5.1" Description="Light curtain OSSD2"/>
+		<DI_ITEM Index="82" Name="DI_Lightcurtainfault" BufferOffset="82" Addr="D5.2" Description="Light curtain fault"/>
+		<DI_ITEM Index="83" Name="DI_Frontbodydoorswitch" BufferOffset="83" Addr="D5.3" Description="Front body door switch"/>
+		<DI_ITEM Index="84" Name="DI_FrontbodyIOshuttersw" BufferOffset="84" Addr="D5.4" Description="Front body I/O shutter sw"/>
+		<DI_ITEM Index="85" Name="DI_FouprobotEMS" BufferOffset="85" Addr="D5.5" Description="Foup robot EMS"/>
+		<DI_ITEM Index="86" Name="DI_WaferrobotEMS" BufferOffset="86" Addr="D5.6" Description="Wafer robot EMS"/>
+		<DI_ITEM Index="87" Name="DI_AxisCRmotorEDM" BufferOffset="87" Addr="D5.7" Description="Axis-CR motor EDM"/>
+		<DI_ITEM Index="89" Name="DI_AxisEmotorEDM" BufferOffset="89" Addr="D5.9" Description="Axis-E motor EDM"/>
+		<DI_ITEM Index="90" Name="DI_TS05001FFUtempsw" BufferOffset="90" Addr="D5.10" Description="TS05001 FFU temp sw"/>
+		<DI_ITEM Index="91" Name="DI_TS05002Capinsidetempsw" BufferOffset="91" Addr="D5.11" Description="TS05002 Cap inside temp sw"/>
+		<DI_ITEM Index="92" Name="DI_TS05003Capoutsidetempsw" BufferOffset="92" Addr="D5.12" Description="TS05003 Cap outside temp sw"/>
+		<DI_ITEM Index="93" Name="DI_TS05004Raxisrotationtempsw" BufferOffset="93" Addr="D5.13" Description="TS05004 R axis rotation temp sw"/>
+		<DI_ITEM Index="94" Name="DI_TS05005RHCtempsw" BufferOffset="94" Addr="D5.14" Description="TS05005 RHC temp sw"/>
+		<DI_ITEM Index="95" Name="DI_TS05006furnacetempsw" BufferOffset="95" Addr="D5.15" Description="TS05006 furnace temp sw"/>
+		<DI_ITEM Index="96" Name="DI_LoadingareaEMS" BufferOffset="96" Addr="D6.0" Description="Loading area EMS"/>
+		<DI_ITEM Index="97" Name="DI_GD02001HCL1gasleak1stalarm" BufferOffset="97" Addr="D6.1" Description="GD02001 HCL-1 gas leak 1st alarm"/>
+		<DI_ITEM Index="98" Name="DI_GD02001HCL1gasleak2ndalarm" BufferOffset="98" Addr="D6.2" Description="GD02001 HCL-1 gas leak 2nd alarm"/>
+		<DI_ITEM Index="99" Name="DI_GD02001fault" BufferOffset="99" Addr="D6.3" Description="GD02001 fault"/>
+		<DI_ITEM Index="100" Name="DI_GD02002HCL2gasleak1stalarm" BufferOffset="100" Addr="D6.4" Description="GD02002 HCL-2 gas leak 1st alarm"/>
+		<DI_ITEM Index="101" Name="DI_GD02002HCL2gasleak2ndalarm" BufferOffset="101" Addr="D6.5" Description="GD02002 HCL-2 gas leak 2nd alarm"/>
+		<DI_ITEM Index="102" Name="DI_GD02002fault" BufferOffset="102" Addr="D6.6" Description="GD02002 fault"/>
+		<DI_ITEM Index="103" Name="DI_GD02003NH31gasleak1stalarm" BufferOffset="103" Addr="D6.7" Description="GD02003 NH3-1 gas leak 1st alarm"/>
+		<DI_ITEM Index="104" Name="DI_GD02003NH31gasleak2ndalarm" BufferOffset="104" Addr="D6.8" Description="GD02003 NH3-1 gas leak 2nd alarm"/>
+		<DI_ITEM Index="105" Name="DI_GD02003fault" BufferOffset="105" Addr="D6.9" Description="GD02003 fault"/>
+		<DI_ITEM Index="106" Name="DI_GD02004NH32gasleak1stalarm" BufferOffset="106" Addr="D6.10" Description="GD02004 NH3-2 gas leak 1st alarm"/>
+		<DI_ITEM Index="107" Name="DI_GD02004NH32gasleak2ndalarm" BufferOffset="107" Addr="D6.11" Description="GD02004 NH3-2 gas leak 2nd alarm"/>
+		<DI_ITEM Index="108" Name="DI_GD02004fault" BufferOffset="108" Addr="D6.12" Description="GD02004 fault"/>
+		<DI_ITEM Index="109" Name="DI_GD02005F21gasleak1stalarm" BufferOffset="109" Addr="D6.13" Description="GD02005 F2-1 gas leak 1st alarm"/>
+		<DI_ITEM Index="110" Name="DI_GD02005F21gasleak2ndalarm" BufferOffset="110" Addr="D6.14" Description="GD02005 F2-1 gas leak 2nd alarm"/>
+		<DI_ITEM Index="111" Name="DI_GD02005fault" BufferOffset="111" Addr="D6.15" Description="GD02005 fault"/>
+		<DI_ITEM Index="112" Name="DI_GD02006F22gasleak1stalarm" BufferOffset="112" Addr="D6.16" Description="GD02006 F2-2 gas leak 1st alarm"/>
+		<DI_ITEM Index="113" Name="DI_GD02006F22gasleak2ndalarm" BufferOffset="113" Addr="D7.0" Description="GD02006 F2-2 gas leak 2nd alarm"/>
+		<DI_ITEM Index="114" Name="DI_GD02006fault" BufferOffset="114" Addr="D7.1" Description="GD02006 fault"/>
+		<DI_ITEM Index="115" Name="DI_GD02007NO1gasleak1stalarm" BufferOffset="115" Addr="D7.2" Description="GD02007 NO-1 gas leak 1st alarm"/>
+		<DI_ITEM Index="116" Name="DI_GD02007NO1gasleak2ndalarm" BufferOffset="116" Addr="D7.3" Description="GD02007 NO-1 gas leak 2nd alarm"/>
+		<DI_ITEM Index="117" Name="DI_GD02007fault" BufferOffset="117" Addr="D7.4" Description="GD02007 fault"/>
+		<DI_ITEM Index="118" Name="DI_GD02008NO2gasleak1stalarm" BufferOffset="118" Addr="D7.5" Description="GD02008 NO-2 gas leak 1st alarm"/>
+		<DI_ITEM Index="119" Name="DI_GD02008NO2gasleak2ndalarm" BufferOffset="119" Addr="D7.6" Description="GD02008 NO-2 gas leak 2nd alarm"/>
+		<DI_ITEM Index="120" Name="DI_GD02008fault" BufferOffset="120" Addr="D7.7" Description="GD02008 fault"/>
+		<DI_ITEM Index="121" Name="DI_GD02009C3H61gasleak1stalarm" BufferOffset="121" Addr="D7.8" Description="GD02009 C3H6-1 gas leak 1st alarm"/>
+		<DI_ITEM Index="122" Name="DI_GD02009C3H61gasleak2ndalarm" BufferOffset="122" Addr="D7.9" Description="GD02009 C3H6-1 gas leak 2nd alarm"/>
+		<DI_ITEM Index="123" Name="DI_GD02009fault" BufferOffset="123" Addr="D7.10" Description="GD02009 fault"/>
+		<DI_ITEM Index="124" Name="DI_GD02010C3H62gasleak1stalarm" BufferOffset="124" Addr="D7.11" Description="GD02010 C3H6-2 gas leak 1st alarm"/>
+		<DI_ITEM Index="125" Name="DI_GD02010C3H62gasleak2ndalarm" BufferOffset="125" Addr="D7.12" Description="GD02010 C3H6-2 gas leak 2nd alarm"/>
+		<DI_ITEM Index="126" Name="DI_GD02010fault" BufferOffset="126" Addr="D7.13" Description="GD02010 fault"/>
+		<DI_ITEM Index="127" Name="DI_GD02011DMA1gasleak1stalarm" BufferOffset="127" Addr="D7.14" Description="GD02011 DMA-1 gas leak 1st alarm"/>
+		<DI_ITEM Index="128" Name="DI_GD02011DMA1gasleak2ndalarm" BufferOffset="128" Addr="D7.15" Description="GD02011 DMA-1 gas leak 2nd alarm"/>
+		<DI_ITEM Index="129" Name="DI_GD02011fault" BufferOffset="129" Addr="D8.0" Description="GD02011 fault"/>
+		<DI_ITEM Index="130" Name="DI_GD02012DMA2gasleak1stalarm" BufferOffset="130" Addr="D8.1" Description="GD02012 DMA-2 gas leak 1st alarm"/>
+		<DI_ITEM Index="131" Name="DI_GD02012DMA2gasleak2ndalarm" BufferOffset="131" Addr="D8.2" Description="GD02012 DMA-2 gas leak 2nd alarm"/>
+		<DI_ITEM Index="132" Name="DI_GD02012fault" BufferOffset="132" Addr="D8.3" Description="GD02012 fault"/>
+		<DI_ITEM Index="133" Name="DI_SL02001gasboxdoorsw11" BufferOffset="133" Addr="D8.4" Description="SL02001 gas box door sw1-1"/>
+		<DI_ITEM Index="134" Name="DI_SL02001gasboxdoorsw12" BufferOffset="134" Addr="D8.5" Description="SL02001 gas box door sw1-2"/>
+		<DI_ITEM Index="135" Name="DI_SL02002gasboxdoorsw11" BufferOffset="135" Addr="D8.6" Description="SL02002 gas box door sw1-1"/>
+		<DI_ITEM Index="136" Name="DI_SL02002gasboxdoorsw12" BufferOffset="136" Addr="D8.7" Description="SL02002 gas box door sw1-2"/>
+		<DI_ITEM Index="137" Name="DI_SL05001LAdoorsw1" BufferOffset="137" Addr="D8.8" Description="SL05001 LA door sw1"/>
+		<DI_ITEM Index="138" Name="DI_SL05002LAdoorsw2" BufferOffset="138" Addr="D8.9" Description="SL05002 LA door sw2"/>
+		<DI_ITEM Index="139" Name="DI_SL05004LAfurnacedoorsw" BufferOffset="139" Addr="D8.10" Description="SL05004 LA furnace door sw"/>
+
+		<DI_ITEM Index="144" Name="DI_Furnacepoweronoff" BufferOffset="144" Addr="D8.15" Description="Furnace power on/off"/>
+		<DI_ITEM Index="145" Name="DI_Blowerpoweronoff" BufferOffset="145" Addr="D9.0" Description="Blower power on/off"/>
+		<DI_ITEM Index="146" Name="DI_100Vtransformerpoweron" BufferOffset="146" Addr="D9.1" Description="100V transformer power on"/>
+		<DI_ITEM Index="147" Name="DI_VFDenable" BufferOffset="147" Addr="D9.2" Description="VFD enable"/>
+		<DI_ITEM Index="149" Name="DI_HPMvalvepoweronoff" BufferOffset="149" Addr="D9.4" Description="HPM valve power on/off"/>
+		<DI_ITEM Index="150" Name="DI_AxisCRmotorenable1" BufferOffset="150" Addr="D9.5" Description="Axis-CR motor enable1"/>
+		<DI_ITEM Index="151" Name="DI_AxisCRmotorenable2" BufferOffset="151" Addr="D9.6" Description="Axis-CR motor enable2"/>
+		<DI_ITEM Index="152" Name="DI_AxisEmotorenable1" BufferOffset="152" Addr="D9.7" Description="Axis-E motor enable1"/>
+		<DI_ITEM Index="153" Name="DI_AxisEmotorenable2" BufferOffset="153" Addr="D9.8" Description="Axis-E motor enable2"/>
+		<DI_ITEM Index="156" Name="DI_FTRenable1" BufferOffset="156" Addr="D9.11" Description="FTR enable1"/>
+		<DI_ITEM Index="157" Name="DI_FTRenable2" BufferOffset="157" Addr="D9.12" Description="FTR enable2"/>
+		<DI_ITEM Index="158" Name="DI_FTRinterlockreset" BufferOffset="158" Addr="D9.13" Description="FTR interlock reset"/>
+		<DI_ITEM Index="159" Name="DI_WTRenable1" BufferOffset="159" Addr="D9.14" Description="WTR enable1"/>
+		<DI_ITEM Index="160" Name="DI_WTRenable2" BufferOffset="160" Addr="D9.15" Description="WTR enable2"/>
+		<DI_ITEM Index="161" Name="DI_WTRinterlockreset" BufferOffset="161" Addr="D10.0" Description="WTR interlock reset"/>
+		<DI_ITEM Index="162" Name="DI_Capheaterenable" BufferOffset="162" Addr="D10.1" Description="Cap heater enable"/>
+		<DI_ITEM Index="164" Name="DI_Lightcurtainidel" BufferOffset="164" Addr="D10.3" Description="Light curtain idel"/>
+		<DI_ITEM Index="165" Name="DI_Powerboxinterlockbuttonled" BufferOffset="165" Addr="D10.4" Description="Power box interlock button led"/>
+		<DI_ITEM Index="166" Name="DI_Gasboxinterlockbuttonled" BufferOffset="166" Addr="D10.5" Description="Gas box interlock button led"/>
+		<DI_ITEM Index="167" Name="DI_Frontbodyinterlockbuttonled" BufferOffset="167" Addr="D10.6" Description="Frontbody interlock button led"/>
 
 		<DI_ITEM Index="288" Name="DI_MachineEMO1" BufferOffset="288" Addr="D18.0" Description="Machine EMO 1" />
 		<DI_ITEM Index="289" Name="DI_MachineEMO2" BufferOffset="289" Addr="D18.1" Description="Machine EMO 2" />
@@ -1389,7 +1442,7 @@
 		<DO_ITEM Index="1359" Name="DO_DEPOSW" BufferOffset="1359"  Addr="D1084.15" Description="DEPO SW"/>
 
 
-		<DO_ITEM Index="143" Name="DO_HeaterE901Enable" BufferOffset="1360" Addr="D1085.0" Description="Heater E901 power on Enable"/>
+		<!--<DO_ITEM Index="143" Name="DO_HeaterE901Enable" BufferOffset="1360" Addr="D1085.0" Description="Heater E901 power on Enable"/>
 		<DO_ITEM Index="144" Name="DO_HeaterE902Enable" BufferOffset="1361" Addr="D1085.1" Description="Heater E902 power on Enable"/>
 		<DO_ITEM Index="145" Name="DO_HeaterE903Enable" BufferOffset="1362" Addr="D1085.2" Description="Heater E903 power on Enable"/>
 		<DO_ITEM Index="146" Name="DO_HeaterE904Enable" BufferOffset="1363" Addr="D1085.3" Description="Heater E904 power on Enable"/>
@@ -1402,9 +1455,11 @@
 		<DO_ITEM Index="153" Name="DO_HeaterE911Enable" BufferOffset="1370" Addr="D1085.10" Description="Heater E911 power on Enable"/>
 		<DO_ITEM Index="154" Name="DO_CapHeaterPowerOnEnable" BufferOffset="1371" Addr="D1085.11" Description="Cap heater power on Enable"/>
 		<DO_ITEM Index="155" Name="DO_HeaterE912Enable" BufferOffset="1372" Addr="D1085.12" Description="Heater E912 power on Enable"/>
+		-->
 		<!--<DO_ITEM Index="155" Name="DO_SPARE" BufferOffset="1373" Addr="D1085.13" Description="SPARE"/>-->
+		<!--
 		<DO_ITEM Index="155" Name="DO_AV71ExternalHeater" BufferOffset="1374" Addr="D1085.14" Description="AV71 External heater"/>
-		<DO_ITEM Index="155" Name="DO_AV71RingHeater" BufferOffset="1375" Addr="D1085.15" Description="AV71 Ring heater"/>
+		<DO_ITEM Index="155" Name="DO_AV71RingHeater" BufferOffset="1375" Addr="D1085.15" Description="AV71 Ring heater"/>-->
 
 		<!--<DO_ITEM Index="160" Name="DO_FurnacePowerOffLed" BufferOffset="1392" Addr="D1087.0" Description="Furnace Power Off Led"/>
 		<DO_ITEM Index="161" Name="DO_GaslineHeaterPowerOffLed" BufferOffset="1393" Addr="D1087.1" Description="Gasline Heater Power Off Led"/>
@@ -1620,6 +1675,13 @@
 		<DO_ITEM Index="351" Name="DO_LAExhaustValveOpen" BufferOffset="2598" Addr="D1162.6" Description="LA exhaust damper valve open"/>
 		<DO_ITEM Index="352" Name="DO_LAExhaustValveClose" BufferOffset="2599" Addr="D1162.7" Description="LA exhaust damper valve close"/>
 
+		<DO_ITEM Index="352" Name="DO_circulationfanisturnedopen" BufferOffset="2612" Addr="D1163.4" Description="AV227 open"/>
+		<DO_ITEM Index="352" Name="DO_circulationfanisturnedClose" BufferOffset="2613" Addr="D1163.5" Description="TAV227 close"/>
+		<DO_ITEM Index="352" Name="DO_MS501" BufferOffset="2614" Addr="D1163.6" Description="MS501"/>
+		<DO_ITEM Index="352" Name="DO_MS520" BufferOffset="2615" Addr="D1163.7" Description="MS520"/>
+		<DO_ITEM Index="352" Name="DO_MS521" BufferOffset="2616" Addr="D1163.8" Description="MS521"/>
+		<DO_ITEM Index="352" Name="DO_MS522" BufferOffset="2617" Addr="D1163.9" Description="MS522"/>
+
 
 
 		<DO_ITEM Index="353" Name="DO_ValveAV60" BufferOffset="2656" Addr="D1166.0" Description="Valve AV60"/>

Furnace/FurnaceSimulator/Config/_ioDefinePM.xml

@@ -1,59 +1,112 @@
 <?xml version='1.0'?>
 <IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
 	<Dig_In>
-		<DI_ITEM Index="48" Name="DI_O2ConcentrationHI" BufferOffset="48" Addr="D3.0" Description="O2 concentration HI"/>
-		<DI_ITEM Index="49" Name="DI_O2ConcentrationLow" BufferOffset="49" Addr="D3.1" Description="O2 concentration lo"/>
-		<DI_ITEM Index="50" Name="DI_O2ConcentrationEcho1" BufferOffset="50" Addr="D3.2" Description="O2 concentration echo1"/>
-		<DI_ITEM Index="51" Name="DI_O2ConcentrationEcho2" BufferOffset="51" Addr="D3.3" Description="O2 concentration echo2"/>
-		<DI_ITEM Index="51" Name="DI_SMK1DetectorSensorOperates" BufferOffset="52" Addr="D3.4" Description="SMK1 detector sensor operates"/>
-		<DI_ITEM Index="51" Name="DI_SMK1DetectorFireAlarm" BufferOffset="53" Addr="D3.5" Description="SMK1 detector fire alarm"/>
-		<DI_ITEM Index="51" Name="DI_SMK1DetectorFault" BufferOffset="54" Addr="D3.6" Description="SMK1 detector fault"/>
-
-		<DI_ITEM Index="56" Name="DI_HCL1GasLeak1stAlarm" BufferOffset="56" Addr="D3.8" Description="HCL-1 gas leak 1st alarm" />
-		<DI_ITEM Index="57" Name="DI_HCL1GasLeak2ndAlarm" BufferOffset="57" Addr="D3.9" Description="HCL-1 gas leak 2nd alarm" />
-		<DI_ITEM Index="58" Name="DI_HCL2GasLeak1stAlarm" BufferOffset="58" Addr="D3.10" Description="HCL-2gas leak 1st alarm" />
-		<DI_ITEM Index="59" Name="DI_HCL2GasLeak2ndAlarm" BufferOffset="59" Addr="D3.11" Description="HCL-2gas leak 2nd alarm" />
-		<DI_ITEM Index="60" Name="DI_NH31GasLeak1stAlarm" BufferOffset="60" Addr="D3.12" Description="NH3-1gas leak 1st alarm" />
-		<DI_ITEM Index="61" Name="DI_NH31GasLeak2ndAlarm" BufferOffset="61" Addr="D3.13" Description="NH3-1gas leak 2nd alarm" />
-		<DI_ITEM Index="62" Name="DI_NH32GasLeak1stAlarm" BufferOffset="62" Addr="D3.14" Description="NH3-2gas leak 1st alarm" />
-		<DI_ITEM Index="63" Name="DI_NH32GasLeak2ndAlarm" BufferOffset="63" Addr="D3.15" Description="NH3-2 gas leak 2nd alarm" />
-		<DI_ITEM Index="64" Name="DI_F21GasLeak1stAlarm" BufferOffset="64" Addr="D4.0" Description="F2-1 gas leak 1st alarm" />
-		<DI_ITEM Index="65" Name="DI_F21GasLeak2ndAlarm" BufferOffset="65" Addr="D4.1" Description="F2-1 gas leak 2nd alarm" />
-		<DI_ITEM Index="66" Name="DI_F22GasLeak1stAlarm" BufferOffset="66" Addr="D4.2" Description="F2-2 gas leak 1st alarm" />
-		<DI_ITEM Index="67" Name="DI_F22GasLeak2ndAlarm" BufferOffset="67" Addr="D4.3" Description="F2-2 gas leak 2nd alarm" />
-		<DI_ITEM Index="68" Name="DI_NO1GasLeak1stAlarm" BufferOffset="68" Addr="D4.4" Description="NO-1 gas leak 1st alarm" />
-		<DI_ITEM Index="69" Name="DI_NO1GasLeak2ndAlarm" BufferOffset="69" Addr="D4.5" Description="NO-1 gas leak 2nd alarm" />
-		<DI_ITEM Index="70" Name="DI_NO2GasLeak1stAlarm" BufferOffset="70" Addr="D4.6" Description="NO-2 gas leak 1st alarm" />
-		<DI_ITEM Index="71" Name="DI_NO2GasLeak2ndAlarm" BufferOffset="71" Addr="D4.7" Description="NO-2 gas leak 2nd alarm" />
-		<DI_ITEM Index="72" Name="DI_C3H61GasLeak1stAlarm" BufferOffset="72" Addr="D4.8" Description="C3H6-1 gas leak 1st alarm" />
-		<DI_ITEM Index="73" Name="DI_C3H61GasLeak2ndAlarm" BufferOffset="73" Addr="D4.9" Description="C3H6-1 gas leak 2nd alarm" />
-		<DI_ITEM Index="74" Name="DI_C3H62GasLeak1stAlarm" BufferOffset="74" Addr="D4.10" Description="C3H6-2 gas leak 1st alarm" />
-		<DI_ITEM Index="75" Name="DI_C3H62GasLeak2ndAlarm" BufferOffset="75" Addr="D4.11" Description="C3H6-2 gas leak 2nd alarm" />
-		<DI_ITEM Index="76" Name="DI_DMA1GasLeak1stAlarm" BufferOffset="76" Addr="D4.12" Description="DMA-1 gas leak 1st alarm" />
-		<DI_ITEM Index="77" Name="DI_DMA1GasLeak2ndAlarm" BufferOffset="77" Addr="D4.13" Description="DMA-1 gas leak 2nd alarm" />
-		<DI_ITEM Index="78" Name="DI_DMA2GasLeak1stAlarm" BufferOffset="78" Addr="D4.14" Description="DMA-2gas leak 1st alarm" />
-		<DI_ITEM Index="79" Name="DI_DMA2GasLeak2ndAlarm" BufferOffset="79" Addr="D4.15" Description="DMA-2 gas leak 2nd alarm" />
-
-		<DI_ITEM Index="80" Name="DI_TS34RRotationTempSw" BufferOffset="80" Addr="D5.0" Description="TS34 R rotation temp. sw" />
-		<DI_ITEM Index="81" Name="DI_TS30CapInsideTempSw" BufferOffset="81" Addr="D5.1" Description="TS30 cap inside temp.sw" />
-
-		<DI_ITEM Index="82" Name="DI_TS31capoutsidetemSw" BufferOffset="82" Addr="D5.2"   Description="TS31 cap outside temp.sw" />
-		<DI_ITEM Index="83" Name="DI_GasboxlowerdoorSw" BufferOffset="83" Addr="D5.3"   Description="gas box lower door sw" />
-		<DI_ITEM Index="84" Name="DI_GasboxupperdoorSw" BufferOffset="84" Addr="D5.4"   Description="gas box upper door sw" />
-		<DI_ITEM Index="85" Name="DI_EXHboxwaterleak" BufferOffset="85" Addr="D5.5"   Description="EXH box water leak" />
-		<DI_ITEM Index="86" Name="DI_OPpanelEMO1" BufferOffset="86" Addr="D5.6"   Description="OP panel EMO 1" />
-		<DI_ITEM Index="87" Name="DI_OPpanelEMO2" BufferOffset="87" Addr="D5.7"   Description="OP panel EMO 2" />
-		<DI_ITEM Index="88" Name="DI_MainFurnaceTS306" BufferOffset="88" Addr="D5.8" Description="main furnace TS306"/>
-		<DI_ITEM Index="89" Name="DI_HeaterRoomSWS11S12" BufferOffset="89" Addr="D5.9" Description="heater room SW S11/S12"/>
-		<DI_ITEM Index="90" Name="DI_HeaterBbacksidePanelSWS112" BufferOffset="90" Addr="D5.10" Description="heater backside panel SW S112"/>
-		<DI_ITEM Index="91" Name="DI_RHCTS305" BufferOffset="91" Addr="D5.11" Description="RHC TS305"/>
-		<DI_ITEM Index="92" Name="DI_GasLeakFault" BufferOffset="92" Addr="D5.12" Description="gas leak fault"/>
-		<DI_ITEM Index="93" Name="DI_MagneticFluidLeak" BufferOffset="93" Addr="D5.13" Description="Magnetic fluid leak"/>
-		<DI_ITEM Index="94" Name="DI_CoolingWaterLeak" BufferOffset="94" Addr="D5.14" Description="Cooling water leak"/>
-		<DI_ITEM Index="95" Name="DI_LSCWaterLeak" BufferOffset="95" Addr="D5.15" Description="LSC water leak"/>
-		<DI_ITEM Index="528" Name="DI_GasBoxExhaust1stAlarmMS2" BufferOffset="96" Addr="D6.0" Description="gas box exhaust 1st alarm MS2"/>
-		<DI_ITEM Index="529" Name="DI_GasBoxExhaust2ndAlarmMS2" BufferOffset="97" Addr="D6.1" Description="gas box exhaust 2nd alarm MS2"/>
-		<DI_ITEM Index="534" Name="DI_LABacksideDoorSwitch" BufferOffset="102" Addr="D6.6" Description="LA backside door switch"/>
+		<DI_ITEM Index="48" Name="DI_EMO01001powerboxEMO" BufferOffset="48" Addr="D3.0" Description="EMO01001 power box EMO"/>
+		<DI_ITEM Index="49" Name="DI_Powerboxfiredetector" BufferOffset="49" Addr="D3.1" Description="Power box fire detector"/>
+		<DI_ITEM Index="50" Name="DI_SMK01001detectoroperator" BufferOffset="50" Addr="D3.2" Description="SMK01001 detector operator"/>
+		<DI_ITEM Index="51" Name="DI_SMK01001detectorfault" BufferOffset="51" Addr="D3.3" Description="SMK01001 detector fault"/>
+		<DI_ITEM Index="52" Name="DI_EMO02001gasboxEMO" BufferOffset="52" Addr="D3.4" Description="EMO02001 gas box EMO"/>
+		<DI_ITEM Index="54" Name="DI_EMO04001frontbodyEMO" BufferOffset="54" Addr="D3.6" Description="EMO04001 frontbody EMO"/>
+		<DI_ITEM Index="55" Name="DI_LD02001LSCleakalarm" BufferOffset="55" Addr="D3.7" Description="LD02001 LSC leak alarm"/>
+		<DI_ITEM Index="56" Name="DI_LD05001Magneticfluidleak" BufferOffset="56" Addr="D3.8" Description="LD05001 Magnetic fluid leak"/>
+		<DI_ITEM Index="57" Name="DI_LD05002Coolingwaterleak" BufferOffset="57" Addr="D3.9" Description="LD05002 Cooling water leak"/>
+		<DI_ITEM Index="58" Name="DI_LD05003RHCleak" BufferOffset="58" Addr="D3.10" Description="LD05003 RHC leak"/>
+		<DI_ITEM Index="59" Name="DI_LD03001exhaustboxwaterleakupside" BufferOffset="59" Addr="D3.11" Description="LD03001 exhaust box water leak (up-side)"/>
+		<DI_ITEM Index="60" Name="DI_LD03002waterleakdownside" BufferOffset="60" Addr="D3.12" Description="LD03002 water leak (down-side)"/>
+		<DI_ITEM Index="61" Name="DI_ExternalEMO" BufferOffset="61" Addr="D3.13" Description="External EMO"/>
+		<DI_ITEM Index="64" Name="DI_Furnacetransformertempsw" BufferOffset="64" Addr="D4.0" Description="Furnace transformer temp sw"/>
+		<DI_ITEM Index="65" Name="DI_AC100Vtransformertempsw" BufferOffset="65" Addr="D4.1" Description="AC100V transformer temp sw"/>
+		<DI_ITEM Index="66" Name="DI_Furnacepoweronswitch" BufferOffset="66" Addr="D4.2" Description="Furnace power on switch"/>
+		<DI_ITEM Index="67" Name="DI_AC100Vtransformerpowerswitch" BufferOffset="67" Addr="D4.3" Description="AC100V transformer power switch"/>
+		<DI_ITEM Index="68" Name="DI_Powerboxinterlockresetbutton" BufferOffset="68" Addr="D4.4" Description="Power box interlock reset button"/>
+		<DI_ITEM Index="69" Name="DI_VFD01001EDM" BufferOffset="69" Addr="D4.5" Description="VFD01001 EDM"/>
+
+		<DI_ITEM Index="74" Name="DI_Gasboxinterlockresetbutton" BufferOffset="74" Addr="D4.10" Description="Gas box interlock reset button"/>
+		<DI_ITEM Index="75" Name="DI_SCRONOFFSWITCH" BufferOffset="75" Addr="D4.11" Description="SCR ON/OFF SWITCH"/>
+		<DI_ITEM Index="76" Name="DI_Gasboxexhaustpressurealarm1st" BufferOffset="76" Addr="D4.12" Description="Gas box exhaust pressure alarm 1st"/>
+		<DI_ITEM Index="77" Name="DI_Gasboxexhaustpressurealarm2nd" BufferOffset="77" Addr="D4.13" Description="Gas box exhaust pressure alarm 2nd"/>
+		<DI_ITEM Index="78" Name="DI_FS101waterflowalarm" BufferOffset="78" Addr="D4.14" Description="FS101 water flow alarm"/>
+		<DI_ITEM Index="79" Name="DI_Frontbodyinterlockresetbutton" BufferOffset="79" Addr="D4.15" Description="Front body interlock reset button"/>
+		<DI_ITEM Index="80" Name="DI_LightcurtainOSSD1" BufferOffset="80" Addr="D5.0" Description="Light curtain OSSD1"/>
+		<DI_ITEM Index="81" Name="DI_LightcurtainOSSD2" BufferOffset="81" Addr="D5.1" Description="Light curtain OSSD2"/>
+		<DI_ITEM Index="82" Name="DI_Lightcurtainfault" BufferOffset="82" Addr="D5.2" Description="Light curtain fault"/>
+		<DI_ITEM Index="83" Name="DI_Frontbodydoorswitch" BufferOffset="83" Addr="D5.3" Description="Front body door switch"/>
+		<DI_ITEM Index="84" Name="DI_FrontbodyIOshuttersw" BufferOffset="84" Addr="D5.4" Description="Front body I/O shutter sw"/>
+		<DI_ITEM Index="85" Name="DI_FouprobotEMS" BufferOffset="85" Addr="D5.5" Description="Foup robot EMS"/>
+		<DI_ITEM Index="86" Name="DI_WaferrobotEMS" BufferOffset="86" Addr="D5.6" Description="Wafer robot EMS"/>
+		<DI_ITEM Index="87" Name="DI_AxisCRmotorEDM" BufferOffset="87" Addr="D5.7" Description="Axis-CR motor EDM"/>
+		<DI_ITEM Index="89" Name="DI_AxisEmotorEDM" BufferOffset="89" Addr="D5.9" Description="Axis-E motor EDM"/>
+		<DI_ITEM Index="90" Name="DI_TS05001FFUtempsw" BufferOffset="90" Addr="D5.10" Description="TS05001 FFU temp sw"/>
+		<DI_ITEM Index="91" Name="DI_TS05002Capinsidetempsw" BufferOffset="91" Addr="D5.11" Description="TS05002 Cap inside temp sw"/>
+		<DI_ITEM Index="92" Name="DI_TS05003Capoutsidetempsw" BufferOffset="92" Addr="D5.12" Description="TS05003 Cap outside temp sw"/>
+		<DI_ITEM Index="93" Name="DI_TS05004Raxisrotationtempsw" BufferOffset="93" Addr="D5.13" Description="TS05004 R axis rotation temp sw"/>
+		<DI_ITEM Index="94" Name="DI_TS05005RHCtempsw" BufferOffset="94" Addr="D5.14" Description="TS05005 RHC temp sw"/>
+		<DI_ITEM Index="95" Name="DI_TS05006furnacetempsw" BufferOffset="95" Addr="D5.15" Description="TS05006 furnace temp sw"/>
+		<DI_ITEM Index="96" Name="DI_LoadingareaEMS" BufferOffset="96" Addr="D6.0" Description="Loading area EMS"/>
+		<DI_ITEM Index="97" Name="DI_GD02001HCL1gasleak1stalarm" BufferOffset="97" Addr="D6.1" Description="GD02001 HCL-1 gas leak 1st alarm"/>
+		<DI_ITEM Index="98" Name="DI_GD02001HCL1gasleak2ndalarm" BufferOffset="98" Addr="D6.2" Description="GD02001 HCL-1 gas leak 2nd alarm"/>
+		<DI_ITEM Index="99" Name="DI_GD02001fault" BufferOffset="99" Addr="D6.3" Description="GD02001 fault"/>
+		<DI_ITEM Index="100" Name="DI_GD02002HCL2gasleak1stalarm" BufferOffset="100" Addr="D6.4" Description="GD02002 HCL-2 gas leak 1st alarm"/>
+		<DI_ITEM Index="101" Name="DI_GD02002HCL2gasleak2ndalarm" BufferOffset="101" Addr="D6.5" Description="GD02002 HCL-2 gas leak 2nd alarm"/>
+		<DI_ITEM Index="102" Name="DI_GD02002fault" BufferOffset="102" Addr="D6.6" Description="GD02002 fault"/>
+		<DI_ITEM Index="103" Name="DI_GD02003NH31gasleak1stalarm" BufferOffset="103" Addr="D6.7" Description="GD02003 NH3-1 gas leak 1st alarm"/>
+		<DI_ITEM Index="104" Name="DI_GD02003NH31gasleak2ndalarm" BufferOffset="104" Addr="D6.8" Description="GD02003 NH3-1 gas leak 2nd alarm"/>
+		<DI_ITEM Index="105" Name="DI_GD02003fault" BufferOffset="105" Addr="D6.9" Description="GD02003 fault"/>
+		<DI_ITEM Index="106" Name="DI_GD02004NH32gasleak1stalarm" BufferOffset="106" Addr="D6.10" Description="GD02004 NH3-2 gas leak 1st alarm"/>
+		<DI_ITEM Index="107" Name="DI_GD02004NH32gasleak2ndalarm" BufferOffset="107" Addr="D6.11" Description="GD02004 NH3-2 gas leak 2nd alarm"/>
+		<DI_ITEM Index="108" Name="DI_GD02004fault" BufferOffset="108" Addr="D6.12" Description="GD02004 fault"/>
+		<DI_ITEM Index="109" Name="DI_GD02005F21gasleak1stalarm" BufferOffset="109" Addr="D6.13" Description="GD02005 F2-1 gas leak 1st alarm"/>
+		<DI_ITEM Index="110" Name="DI_GD02005F21gasleak2ndalarm" BufferOffset="110" Addr="D6.14" Description="GD02005 F2-1 gas leak 2nd alarm"/>
+		<DI_ITEM Index="111" Name="DI_GD02005fault" BufferOffset="111" Addr="D6.15" Description="GD02005 fault"/>
+		<DI_ITEM Index="112" Name="DI_GD02006F22gasleak1stalarm" BufferOffset="112" Addr="D6.16" Description="GD02006 F2-2 gas leak 1st alarm"/>
+		<DI_ITEM Index="113" Name="DI_GD02006F22gasleak2ndalarm" BufferOffset="113" Addr="D7.0" Description="GD02006 F2-2 gas leak 2nd alarm"/>
+		<DI_ITEM Index="114" Name="DI_GD02006fault" BufferOffset="114" Addr="D7.1" Description="GD02006 fault"/>
+		<DI_ITEM Index="115" Name="DI_GD02007NO1gasleak1stalarm" BufferOffset="115" Addr="D7.2" Description="GD02007 NO-1 gas leak 1st alarm"/>
+		<DI_ITEM Index="116" Name="DI_GD02007NO1gasleak2ndalarm" BufferOffset="116" Addr="D7.3" Description="GD02007 NO-1 gas leak 2nd alarm"/>
+		<DI_ITEM Index="117" Name="DI_GD02007fault" BufferOffset="117" Addr="D7.4" Description="GD02007 fault"/>
+		<DI_ITEM Index="118" Name="DI_GD02008NO2gasleak1stalarm" BufferOffset="118" Addr="D7.5" Description="GD02008 NO-2 gas leak 1st alarm"/>
+		<DI_ITEM Index="119" Name="DI_GD02008NO2gasleak2ndalarm" BufferOffset="119" Addr="D7.6" Description="GD02008 NO-2 gas leak 2nd alarm"/>
+		<DI_ITEM Index="120" Name="DI_GD02008fault" BufferOffset="120" Addr="D7.7" Description="GD02008 fault"/>
+		<DI_ITEM Index="121" Name="DI_GD02009C3H61gasleak1stalarm" BufferOffset="121" Addr="D7.8" Description="GD02009 C3H6-1 gas leak 1st alarm"/>
+		<DI_ITEM Index="122" Name="DI_GD02009C3H61gasleak2ndalarm" BufferOffset="122" Addr="D7.9" Description="GD02009 C3H6-1 gas leak 2nd alarm"/>
+		<DI_ITEM Index="123" Name="DI_GD02009fault" BufferOffset="123" Addr="D7.10" Description="GD02009 fault"/>
+		<DI_ITEM Index="124" Name="DI_GD02010C3H62gasleak1stalarm" BufferOffset="124" Addr="D7.11" Description="GD02010 C3H6-2 gas leak 1st alarm"/>
+		<DI_ITEM Index="125" Name="DI_GD02010C3H62gasleak2ndalarm" BufferOffset="125" Addr="D7.12" Description="GD02010 C3H6-2 gas leak 2nd alarm"/>
+		<DI_ITEM Index="126" Name="DI_GD02010fault" BufferOffset="126" Addr="D7.13" Description="GD02010 fault"/>
+		<DI_ITEM Index="127" Name="DI_GD02011DMA1gasleak1stalarm" BufferOffset="127" Addr="D7.14" Description="GD02011 DMA-1 gas leak 1st alarm"/>
+		<DI_ITEM Index="128" Name="DI_GD02011DMA1gasleak2ndalarm" BufferOffset="128" Addr="D7.15" Description="GD02011 DMA-1 gas leak 2nd alarm"/>
+		<DI_ITEM Index="129" Name="DI_GD02011fault" BufferOffset="129" Addr="D8.0" Description="GD02011 fault"/>
+		<DI_ITEM Index="130" Name="DI_GD02012DMA2gasleak1stalarm" BufferOffset="130" Addr="D8.1" Description="GD02012 DMA-2 gas leak 1st alarm"/>
+		<DI_ITEM Index="131" Name="DI_GD02012DMA2gasleak2ndalarm" BufferOffset="131" Addr="D8.2" Description="GD02012 DMA-2 gas leak 2nd alarm"/>
+		<DI_ITEM Index="132" Name="DI_GD02012fault" BufferOffset="132" Addr="D8.3" Description="GD02012 fault"/>
+		<DI_ITEM Index="133" Name="DI_SL02001gasboxdoorsw11" BufferOffset="133" Addr="D8.4" Description="SL02001 gas box door sw1-1"/>
+		<DI_ITEM Index="134" Name="DI_SL02001gasboxdoorsw12" BufferOffset="134" Addr="D8.5" Description="SL02001 gas box door sw1-2"/>
+		<DI_ITEM Index="135" Name="DI_SL02002gasboxdoorsw11" BufferOffset="135" Addr="D8.6" Description="SL02002 gas box door sw1-1"/>
+		<DI_ITEM Index="136" Name="DI_SL02002gasboxdoorsw12" BufferOffset="136" Addr="D8.7" Description="SL02002 gas box door sw1-2"/>
+		<DI_ITEM Index="137" Name="DI_SL05001LAdoorsw1" BufferOffset="137" Addr="D8.8" Description="SL05001 LA door sw1"/>
+		<DI_ITEM Index="138" Name="DI_SL05002LAdoorsw2" BufferOffset="138" Addr="D8.9" Description="SL05002 LA door sw2"/>
+		<DI_ITEM Index="139" Name="DI_SL05004LAfurnacedoorsw" BufferOffset="139" Addr="D8.10" Description="SL05004 LA furnace door sw"/>
+
+		<DI_ITEM Index="144" Name="DI_Furnacepoweronoff" BufferOffset="144" Addr="D8.15" Description="Furnace power on/off"/>
+		<DI_ITEM Index="145" Name="DI_Blowerpoweronoff" BufferOffset="145" Addr="D9.0" Description="Blower power on/off"/>
+		<DI_ITEM Index="146" Name="DI_100Vtransformerpoweron" BufferOffset="146" Addr="D9.1" Description="100V transformer power on"/>
+		<DI_ITEM Index="147" Name="DI_VFDenable" BufferOffset="147" Addr="D9.2" Description="VFD enable"/>
+		<DI_ITEM Index="149" Name="DI_HPMvalvepoweronoff" BufferOffset="149" Addr="D9.4" Description="HPM valve power on/off"/>
+		<DI_ITEM Index="150" Name="DI_AxisCRmotorenable1" BufferOffset="150" Addr="D9.5" Description="Axis-CR motor enable1"/>
+		<DI_ITEM Index="151" Name="DI_AxisCRmotorenable2" BufferOffset="151" Addr="D9.6" Description="Axis-CR motor enable2"/>
+		<DI_ITEM Index="152" Name="DI_AxisEmotorenable1" BufferOffset="152" Addr="D9.7" Description="Axis-E motor enable1"/>
+		<DI_ITEM Index="153" Name="DI_AxisEmotorenable2" BufferOffset="153" Addr="D9.8" Description="Axis-E motor enable2"/>
+		<DI_ITEM Index="156" Name="DI_FTRenable1" BufferOffset="156" Addr="D9.11" Description="FTR enable1"/>
+		<DI_ITEM Index="157" Name="DI_FTRenable2" BufferOffset="157" Addr="D9.12" Description="FTR enable2"/>
+		<DI_ITEM Index="158" Name="DI_FTRinterlockreset" BufferOffset="158" Addr="D9.13" Description="FTR interlock reset"/>
+		<DI_ITEM Index="159" Name="DI_WTRenable1" BufferOffset="159" Addr="D9.14" Description="WTR enable1"/>
+		<DI_ITEM Index="160" Name="DI_WTRenable2" BufferOffset="160" Addr="D9.15" Description="WTR enable2"/>
+		<DI_ITEM Index="161" Name="DI_WTRinterlockreset" BufferOffset="161" Addr="D10.0" Description="WTR interlock reset"/>
+		<DI_ITEM Index="162" Name="DI_Capheaterenable" BufferOffset="162" Addr="D10.1" Description="Cap heater enable"/>
+		<DI_ITEM Index="164" Name="DI_Lightcurtainidel" BufferOffset="164" Addr="D10.3" Description="Light curtain idel"/>
+		<DI_ITEM Index="165" Name="DI_Powerboxinterlockbuttonled" BufferOffset="165" Addr="D10.4" Description="Power box interlock button led"/>
+		<DI_ITEM Index="166" Name="DI_Gasboxinterlockbuttonled" BufferOffset="166" Addr="D10.5" Description="Gas box interlock button led"/>
+		<DI_ITEM Index="167" Name="DI_Frontbodyinterlockbuttonled" BufferOffset="167" Addr="D10.6" Description="Frontbody interlock button led"/>
 
 		<DI_ITEM Index="288" Name="DI_MachineEMO1" BufferOffset="288" Addr="D18.0" Description="Machine EMO 1" />
 		<DI_ITEM Index="289" Name="DI_MachineEMO2" BufferOffset="289" Addr="D18.1" Description="Machine EMO 2" />
@@ -1389,7 +1442,7 @@
 		<DO_ITEM Index="1359" Name="DO_DEPOSW" BufferOffset="1359"  Addr="D1084.15" Description="DEPO SW"/>
 
 
-		<DO_ITEM Index="143" Name="DO_HeaterE901Enable" BufferOffset="1360" Addr="D1085.0" Description="Heater E901 power on Enable"/>
+		<!--<DO_ITEM Index="143" Name="DO_HeaterE901Enable" BufferOffset="1360" Addr="D1085.0" Description="Heater E901 power on Enable"/>
 		<DO_ITEM Index="144" Name="DO_HeaterE902Enable" BufferOffset="1361" Addr="D1085.1" Description="Heater E902 power on Enable"/>
 		<DO_ITEM Index="145" Name="DO_HeaterE903Enable" BufferOffset="1362" Addr="D1085.2" Description="Heater E903 power on Enable"/>
 		<DO_ITEM Index="146" Name="DO_HeaterE904Enable" BufferOffset="1363" Addr="D1085.3" Description="Heater E904 power on Enable"/>
@@ -1402,9 +1455,11 @@
 		<DO_ITEM Index="153" Name="DO_HeaterE911Enable" BufferOffset="1370" Addr="D1085.10" Description="Heater E911 power on Enable"/>
 		<DO_ITEM Index="154" Name="DO_CapHeaterPowerOnEnable" BufferOffset="1371" Addr="D1085.11" Description="Cap heater power on Enable"/>
 		<DO_ITEM Index="155" Name="DO_HeaterE912Enable" BufferOffset="1372" Addr="D1085.12" Description="Heater E912 power on Enable"/>
+		-->
 		<!--<DO_ITEM Index="155" Name="DO_SPARE" BufferOffset="1373" Addr="D1085.13" Description="SPARE"/>-->
+		<!--
 		<DO_ITEM Index="155" Name="DO_AV71ExternalHeater" BufferOffset="1374" Addr="D1085.14" Description="AV71 External heater"/>
-		<DO_ITEM Index="155" Name="DO_AV71RingHeater" BufferOffset="1375" Addr="D1085.15" Description="AV71 Ring heater"/>
+		<DO_ITEM Index="155" Name="DO_AV71RingHeater" BufferOffset="1375" Addr="D1085.15" Description="AV71 Ring heater"/>-->
 
 		<!--<DO_ITEM Index="160" Name="DO_FurnacePowerOffLed" BufferOffset="1392" Addr="D1087.0" Description="Furnace Power Off Led"/>
 		<DO_ITEM Index="161" Name="DO_GaslineHeaterPowerOffLed" BufferOffset="1393" Addr="D1087.1" Description="Gasline Heater Power Off Led"/>
@@ -1620,6 +1675,13 @@
 		<DO_ITEM Index="351" Name="DO_LAExhaustValveOpen" BufferOffset="2598" Addr="D1162.6" Description="LA exhaust damper valve open"/>
 		<DO_ITEM Index="352" Name="DO_LAExhaustValveClose" BufferOffset="2599" Addr="D1162.7" Description="LA exhaust damper valve close"/>
 
+		<DO_ITEM Index="352" Name="DO_circulationfanisturnedopen" BufferOffset="2612" Addr="D1163.4" Description="AV227 open"/>
+		<DO_ITEM Index="352" Name="DO_circulationfanisturnedClose" BufferOffset="2613" Addr="D1163.5" Description="TAV227 close"/>
+		<DO_ITEM Index="352" Name="DO_MS501" BufferOffset="2614" Addr="D1163.6" Description="MS501"/>
+		<DO_ITEM Index="352" Name="DO_MS520" BufferOffset="2615" Addr="D1163.7" Description="MS520"/>
+		<DO_ITEM Index="352" Name="DO_MS521" BufferOffset="2616" Addr="D1163.8" Description="MS521"/>
+		<DO_ITEM Index="352" Name="DO_MS522" BufferOffset="2617" Addr="D1163.9" Description="MS522"/>
+
 
 
 		<DO_ITEM Index="353" Name="DO_ValveAV60" BufferOffset="2656" Addr="D1166.0" Description="Valve AV60"/>

Furnace/FurnaceUI/Dialog/SelectSequenceViewModel.cs

@@ -20,11 +20,7 @@ namespace FurnaceUI.Client.Dialog
                 switch (value)
                 {
 
-                    case "ResetAll":
-                        {
-                            DialogResultView = N2PurgeModeEnum.ResetAll.ToString();
-                            break;
-                        }
+                
                     case "Auto":
                         {
                             DialogResultView = N2PurgeModeEnum.Auto.ToString();

Furnace/FurnaceUI/Views/Recipes/RecipeViewModel.cs

@@ -630,6 +630,19 @@ namespace FurnaceUI.Views.Recipes
             {
                 IsEnabledNewRecipe = false;
             }
+            var single = QueryDataClient.Instance.Service.GetConfig($"System.Recipe.SingleRecipeFileType");
+            if (single != null && !string.IsNullOrEmpty((string)single))
+            {
+                string[] singleTypes = ((string)single).ToLower().Split(';');
+                if (singleTypes != null)
+                {
+                    int findIndex = Array.IndexOf(singleTypes, CurrentMenuID.ToLower());
+                    if (findIndex != -1)
+                    {
+                        IsEnabledNewRecipe = false;
+                    }
+                }
+            }
         }
         #region folder