|
|
@@ -12,7 +12,7 @@
|
|
|
diDetect="DI_LP1FOUPDetect"
|
|
|
|
|
|
doClamp="DO_LP1FOUPClamp"
|
|
|
- doRelease="DO_LP1FOUPRelease"
|
|
|
+ doRelease=""
|
|
|
doPresence="DO_LP1FOUPPresence"
|
|
|
doPlacement="DO_LP1FOUPPlacement"
|
|
|
doLoad="DO_LP1FOUPLoad"
|
|
|
@@ -32,7 +32,7 @@
|
|
|
diDetect="DI_LP2FOUPDetect"
|
|
|
|
|
|
doClamp="DO_LP2FOUPClamp"
|
|
|
- doRelease="DO_LP2FOUPRelease"
|
|
|
+ doRelease=""
|
|
|
doPresence="DO_LP2FOUPPresence"
|
|
|
doPlacement="DO_LP2FOUPPlacement"
|
|
|
doLoad="DO_LP2FOUPLoad"
|
|
|
@@ -106,8 +106,8 @@
|
|
|
diCollisionAvoidanceUp="DI_POD1CollisionAvoidanceForward"
|
|
|
diN2PurgeValveClosed="DI_POD1N2PurgeAV63Closed"
|
|
|
diN2PurgeValveOpened="DI_POD1N2PurgeAV63Opened"
|
|
|
- diFOUPVacuumSuckingOK="DI_FIMS1FOUPVacuumSuckingOK"
|
|
|
- diFOUPVacuumSuckingAlarm="DI_FIMS1FOUPVacuumSuckingAlarm"
|
|
|
+ diFOUPVacuumSuckingOK="DI_POD1FOUPVacuumSuckingOK"
|
|
|
+
|
|
|
diWaferOnRobot="DI_POD1WaferOnRobot"
|
|
|
diWaferRobotEX1AxisHomePosition="DI_WaferRobotEX1AxisHomePosition"
|
|
|
diWaferRobotEX2AxisHomePosition="DI_WaferRobotEX2AxisHomePosition"
|
|
|
@@ -116,13 +116,13 @@
|
|
|
doUnload="DO_FIMS1UnloadCommand"
|
|
|
doHome="DO_FIMS1UnloadCommand"
|
|
|
doAlarmReset="DO_FIMS1AlarmReset"
|
|
|
- doAutoManual="DO_FIMS1AutoManualCommand"
|
|
|
+
|
|
|
doDock="DO_FIMS1Dock"
|
|
|
doUndock="DO_FIMS1Undock"
|
|
|
doSeal="DO_FIMS1Seal"
|
|
|
doRelease="DO_FIMS1Release"
|
|
|
- doDoorOpen="DO_FIMS1DoorClose"
|
|
|
- doDoorClose="DO_FIMS1DoorOpen"
|
|
|
+ doDoorOpen="DO_FIMS1DoorOpen"
|
|
|
+ doDoorClose="DO_FIMS1DoorClose"
|
|
|
doLatch1On="DO_FIMS1Latch1On"
|
|
|
doLatch2On="DO_FIMS1Latch2On"
|
|
|
doLatch1Off="DO_FIMS1Latch1Off"
|
|
|
@@ -170,8 +170,8 @@
|
|
|
doUndock="DO_FIMS2Undock"
|
|
|
doSeal="DO_FIMS2Seal"
|
|
|
doRelease="DO_FIMS2Release"
|
|
|
- doDoorOpen="DO_FIMS2DoorClose"
|
|
|
- doDoorClose="DO_FIMS2DoorOpen"
|
|
|
+ doDoorOpen="DO_FIMS2DoorOpen"
|
|
|
+ doDoorClose="DO_FIMS2DoorClose"
|
|
|
doLatch1On="DO_FIMS2Latch1On"
|
|
|
doLatch2On="DO_FIMS2Latch2On"
|
|
|
doLatch1Off="DO_FIMS2Latch1Off"
|
|
|
@@ -436,9 +436,9 @@
|
|
|
diAlarm="DI_FoupRobotPedantMode"
|
|
|
diBlade1WaferPresent="DI_FoupRobotEachHandWaferStatus"
|
|
|
|
|
|
- diZAxisHomePosition="DI_FOUPRobotZAxisHomePosition"
|
|
|
- diYAxisHomePosition="DI_FOUPRobotYAxisHomePosition"
|
|
|
- diRAxisHomePosition="DI_FOUPRobotRAxisHomePosition"
|
|
|
+ diZAxisHomePosition=""
|
|
|
+ diYAxisHomePosition=""
|
|
|
+ diRAxisHomePosition=""
|
|
|
diRunning="DI_FoupRobotReserveDI3"
|
|
|
|
|
|
doAlarmReset="DO_FOUPRobotAlarmReset"
|
|
|
@@ -965,7 +965,6 @@
|
|
|
<IoSensor id="SensorOperatorAccessHandOffLeft" display="" di="DI_OperatorAccessHandOffLeft"/>
|
|
|
<IoSensor id="SensorOperatorAccessHandOffRight" display="" di="DI_OperatorAccessHandOffRight"/>
|
|
|
|
|
|
- <IoSensor id="SensorBoatLiftCAPInPosition" display="" di="DI_BoatLiftCAPInPosition"/>
|
|
|
|
|
|
<IoSensor id="SensorVG11Status" display="" di="DI_VG11Status"/>
|
|
|
<IoSensor id="SensorVG12Status" display="" di="DI_VG12Status"/>
|
Jiangjinyuan